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EP0917165B1 - Condensateur multicouche - Google Patents

Condensateur multicouche Download PDF

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Publication number
EP0917165B1
EP0917165B1 EP98104930A EP98104930A EP0917165B1 EP 0917165 B1 EP0917165 B1 EP 0917165B1 EP 98104930 A EP98104930 A EP 98104930A EP 98104930 A EP98104930 A EP 98104930A EP 0917165 B1 EP0917165 B1 EP 0917165B1
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EP
European Patent Office
Prior art keywords
connection portions
capacitor
internal electrodes
electrodes
external electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98104930A
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German (de)
English (en)
Other versions
EP0917165A2 (fr
EP0917165A3 (fr
Inventor
Yasuyuki Naito
Masaaki Taniguchi
Yoichi Kuroda
Takanori Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP0917165A2 publication Critical patent/EP0917165A2/fr
Publication of EP0917165A3 publication Critical patent/EP0917165A3/fr
Application granted granted Critical
Publication of EP0917165B1 publication Critical patent/EP0917165B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors

Definitions

  • the present invention relates to a multilayer capacitor and, more particularly, to a multilayer capacitor which can be advantageously used in high frequency circuits.
  • Fig. 7 shows a schematic sectional view of a typical prior art multilayer capacitor 1 which includes a main body 5 having a plurality of ceramic dielectric material layers 2 stacked one on top of the other.
  • a set of first internal electrodes 3 and a set of second internal electrodes 4 are arranged alternately, with a respective dielectric material layer 2 located between adjacent pairs of electrodes 3 and 4 to form a plurality of capacitor units.
  • Each of the first internal electrodes 3 is electrically coupled to a first external terminal electrode 8 formed on a first end face 6 of the main body 5.
  • Each of the second internal electrodes 4 is electrically coupled to a second external electrode 9 formed on a second end surface 7 of main body 5.
  • the multilayer capacitor 1 shown in Fig. 7 exhibits a problem which is discussed below.
  • Fig. 9 is a schematic sectional plan view showing one of the electrodes 3 of Fig. 7.
  • arrows indicate the path and direction of typical currents 22 which flow in each of the first internal electrodes 3 of the multilayer capacitor 1.
  • the currents 22 flow from the second external electrode 9 to the second internal electrodes 4 (not shown in Fig. 9), vertically to the first internal electrodes 3 through the dielectric material layers 2 and then to the first external terminal electrode 8 through the first internal electrodes 3.
  • the current 22 induces a magnetic flux in a direction determined by the direction of the current 22, thereby producing a self-inductance component. Since the currents 22 flow in the longitudinal direction of the internal electrodes 3, the multilayer capacitor 1 produces relatively high equivalent series inductance (ESL) and may fail to function properly in a high frequency band when it is used as a decoupling capacitor or bypass capacitor.
  • ESL equivalent series inductance
  • the multilayer capacitor 11 includes a main body 15 having a plurality of dielectric material layers 12 stacked one on top of the other.
  • a plurality of first internal electrodes 13 and a plurality of second internal electrodes 14 are arranged on respective dielectric material layers 12 to form pairs of overlapping electrodes, each pair of overlapping electrodes being separated by a respective dielectric material layer 12 such that a plurality of capacitor units are formed.
  • first and second external terminal electrodes 18 and 19 are formed, respectively, on first and second principal surfaces 16 and 17 extending in parallel with the internal electrodes 13 and 14.
  • a plurality of first connection portions 20, which are electrically isolated from second internal electrodes 14, are provided to electrically connect the first internal electrodes 13 to both the first external terminal electrode 18 and to each other.
  • the electrostatic capacities provided by the plurality of the capacitor units formed by the respective pairs of internal electrodes 13 and 14 arc coupled in parallel by the connection portions 20 and 21 and are combined at external terminal electrodes 18 and 19, respectively.
  • the multilayer capacitor 11 shown in Fig. 8 reduces the equivalent series inductance (ESL) and is suitable for use in a high frequency band.
  • the arrows indicate the path and direction of typical currents 23 which flow in, for example, the first internal electrodes 13 of the multilayer capacitor 11.
  • the currents 23 flow from the second internal electrodes 14 (not shown in Fig. 10) in a face-to-face relationship with the first internal electrodes 13 to the first internal electrodes 13 through the second connection portions 21. Then, most of the currents flow to the nearest first connection portion 20 and further to the first external terminal electrode 18 through the first connection portion 20.
  • Fig. 11 is an enlarged view of a part of the multilayer capacitor 11 shown in Fig. 8, in which currents 24 and 25 flowing respectively through the connection portions 20 and 21 of the multilayer capacitor 11 are indicated by the dashed arrows.
  • the currents 24 flowing through the first connection portion 20 and the currents 25 flowing through the second connection portion 21 produce respective components of magnetic flux 26 and 27, as shown in Fig. 12.
  • the currents flowing through the respective connection portions 20 and 21 flow from the back side to the front side of the plane of Fig. 12 (i.e., they flow out of the page).
  • the direction of the resultant components of magnetic flux 26 and 27 oppose one another in the areas between the connection portions 20 and 21. As a result, the magnetic flux is canceled between the connection portions 20 and 21.
  • the magnetic flux 28 that surrounds the components of magnetic flux 26 and 27, however, is not cancelled. Rather, the magnetic flux 28 tends to be greater than each individual magnetic flux 26, 27 and, therefore, increases the ESL.
  • JP-A-08 181 245 discloses a heat-sink element with a built-in capacitor in which alternative inner electrodes having the same polarity are connected with outer electrodes through pillar-shaped connecting members, and alternative inner electrodes having the same other polarity are connected with outer electrodes through pillar-shaped connecting members.
  • a multilayer capacitor according to the present invention comprises a capacitor body; m pair of first and second generally planar internal electrodes located in said capacitor body, each said pair of internal electrodes being separated by a respective dielectric layer to define a respective capacitive unit, m being a positive integer greater than or equal to one.
  • the multilayer capacitor also comprises n first external electrodes located on a first surface of said capacitor body, n being an integer greater than or equal to 1; p second external electrodes located on said first surface of said capacitor body, p being an integer greater than or equal to 1; n first connection portions operable to electrically connect said first internal electrodes to each other and to a respective one of said first external electrodes, each of said first connection portions being electrically insulated from said second internal electrodes; and p second connection portions operable to electrically connect said second internal electrodes to each other and to a respective one of said second external electrodes, each of said second connection portions being electrically insulated from said first internal electrodes.
  • the first and second connection portions are arranged such that they are not more than about 2 mm from each other. Preferably, they are not positioned more than about 1 mm apart. In other words, the interval between the first and second connection portions is preferably as small as possible.
  • first and second connection portions are provided.
  • the plurality of first connection portions and the plurality of second connection portions are more preferably arranged such that the connection portions nearest to each of the first connection portion are second connection portions.
  • the plurality of first connection portions and the plurality of second connection portions are alternately arranged.
  • first and second internal electrodes are preferably disposed in a substantially square configuration and are rounded in the areas of the four corners of the square. Still further, each of the first and second connection portions preferably has a substantially round configuration, and the roundness at the corners of the first and second internal electrodes is provided as an arc which is substantially concentric with the sectional configuration of the first or second connection portions which are nearest to the relevant corners.
  • the first and second external terminal electrodes are preferably in a substantially point-like configuration.
  • a plurality of first and second internal electrodes are provided such that they are alternately arranged in the stacking direction of the dielectric material layers; the first connection portion further extends through the second internal electrodes to electrically connect the plurality of first internal electrodes to each other; and the second connection portion further extends through the first internal electrodes to electrically connect the plurality of second internal electrodes to each other.
  • FIG. 1 through 4 a multilayer capacitor constructed in accordance with the principles of the present invention and designated generally as 31.
  • the multilayer capacitor 31 includes a capacitor main body 35 having a plurality of dielectric material layers 32 (Figs. 1) preferably made of a ceramic dielectric material and a plurality of pairs of opposed first and second internal electrodes 33 and 34, each such pair of opposing internal electrodes having a dielectric material layer 32 interposed therebetween, so as to form a plurality of capacitor units.
  • a capacitor main body 35 having a plurality of dielectric material layers 32 (Figs. 1) preferably made of a ceramic dielectric material and a plurality of pairs of opposed first and second internal electrodes 33 and 34, each such pair of opposing internal electrodes having a dielectric material layer 32 interposed therebetween, so as to form a plurality of capacitor units.
  • the capacitor main body 35 may be manufactured, for example, by forming internal electrodes 33 and 34 on a plurality of ceramic green sheets, stacking them one on top of the other, and then pressing and cutting the ceramic green sheets to obtain raw chips each having a size corresponding to one capacitor main body 35 and then baking them.
  • the multilayer capacitor 31 electrically couples the first and second internal electrodes using a plurality of connection portions 40, 41.
  • the external electrodes 38, 39 coupled to connection portions 40, 41, respectively, are formed on the same outer surface 37 of the capacitor body 35 to ensure counter current flow in connection portions 40, 41 and thereby to reduce the ESL.
  • first connection portions 40 extend through the dielectric layers 32 and are electrically coupled to each of the first internal electrodes 33. As best shown in Figs. 1 and 2, first connection portions 40 pass through openings 43 in the second internal electrodes 34 and are electrically insulated therefrom.
  • second connection portions 41 extend through the dielectric layers 32 and are electrically coupled to each of the second internal electrodes 34. As best shown in Figs. 1 and 3, second connection portions 41 pass through openings 42 in the first internal electrodes 34 and are electrically insulated therefrom.
  • connection portions 40 and 41 may be formed, for example, by forming holes in the ceramic green sheets before they are laminated together and filling the holes with conductive paste before they are stacked one on top of the other.
  • the first and second internal electrodes 33 and 34 of the present embodiment have a substantially rectangular configuration.
  • the regions of the four corners of the rectangle are rounded with an arc which is substantially concentric with the center of the first or second connection portions 40 and 41 which are nearest to the relevant corner.
  • the distance between the edge at each of the corners of the first and second internal electrodes 33 and 34 and the first or second connection portion 40 or 41 nearest to the corner is smaller than when the corners are not rounded. This also results in a reduction of the current length and contributes to a reduction in the ESL.
  • the electrodes may be replaced with internal electrodes 33a and 34a whose corners are not rounded as indicated by the imaginary lines in Figs. 2 and 3.
  • Fig. 5 is an enlarged schematic view of a part of the multilayer capacitor 31 shown in Fig. 1. It is a view corresponding to Fig. 11 in which the dashed arrows indicate currents 44 and 45 flowing through the connection portions 40 and 41 of the multilayer capacitor 31, respectively.
  • the respective currents 44 and 45 flowing through the first and second connection portions 40 and 41 produce respective components of magnetic flux 46 and 47 which are in opposite directions.
  • the currents 44 flowing through the first connection portions 40 flows from the back side to the front side of the plane of the paper, and the currents 45 flowing through the second connection portions 41 flow from the front side to the back side of the plane of the paper.
  • the components of magnetic flux 46 and 47 are effectively canceled by each other outside the connection portions 40 and 41.
  • the components of magnetic flux 46 and 47 extend in the same direction in the areas between the connection portions 40 and 41 and, therefore, overlap with each other in these limited areas. However, since these areas are relatively small, they have only a limited magnetic flux density with the result that the components of magnetic flux 46 and 47 are effectively canceled by each other when viewed as a whole.
  • the intervals (or distances) between the first and second connection portions 40 and 41 be small, preferably about 2 mm or less. Even better results are achieved if the intervals are about 1 mm or less.
  • the present embodiment makes it possible to effectively cancel the components of magnetic flux induced by the currents which flow through internal electrodes 33 and 34 and those which flow through connection portions 40 and 41. Therefore, it is possible to suppress the ESL of the multilayer capacitor 31 to a higher degree than is possible in the conventional multilayer capacitor 11 shown in Fig. 8.
  • the outer dimensions of the internal electrodes were 5 mm X 5 mm and a total of forty (40) internal electrodes were stacked one on top of the other.
  • the first and second connection portions were provided so as to form five rows and five columns totalling twenty-five (25) connection portions.
  • the intervals between each of the first and second connection portions was 1 mm.
  • the ESL of each sample was obtained using the resonance method.
  • the resonance method is a method wherein the impedance frequency characteristics of each sample multilayer capacitor is measured and the ESL is obtained by measuring a frequency f 0 at a minimum resonance point (referred to as the series resonance point of the capacitance component C s and the ESL of the capacitor) .
  • connection portions 40, 41 of the present invention were fabricated with the same number of stacked layers using the same method of fabrication.
  • Four samples 1 through 4 were fabricated in which the arrangement of the connection portions 40 and 41 was changed, i.e., the numbers of the rows and columns and the intervals (spacing) of the connection portions 40 and 41 were changed as shown in Table 2 (below).
  • the interval between the outermost connection portions and the peripheral edges of the inner electrodes was fixed at 0.5 mm in order to eliminate, to the degree possible, the effect of any variation of this interval.
  • each internal electrode was fixed, e.g., at 5 mm X 5 mm and the interval of the connection portions was varied as shown in Table 2.
  • the sample 1 corresponds to the embodiment shown in Figs. 1-4.
  • the outer dimensions of each internal electrode were made smaller than those of sample 1 (i.e., 4 mm X 4 mm), and the number of the connection portions was set at "2 X 2" such that an interval of 3 mm was obtained as shown in Table 2.
  • Table 2 shows an ESL value measured for each of the above-described samples using the resonance method. Table 2 Row X Column Interval (mm) ESL Value (pH) I Sample 1 2 X 2 4 360 Sample 2 2 X 2 3 340 Sample 3 3 X 3 2 58 Sample 4 5 X 5 1 26
  • the present invention has been described by way of example with reference to the illustrated embodiment, it is possible to change: the number of the internal electrodes, the number and positions of the connection portions, and the number and positions of the external terminal electrodes and still remain within the scope of the invention. Further, the type of the dielectric material used for the dielectric layers and the type of the conductive material used for the internal electrodes and external terminal electrodes may be changed as appropriate.
  • a multilayer capacitor comprises a capacitor main body including a plurality of dielectric material layers which are stacked one on top of the other and at least a pair of first and second internal electrodes which are in a face-to-face relationship with each other with dielectric material layers interposed therebetween.
  • First and second external terminal electrodes are formed on one principal surface of the capacitor main body extending parallel to the plane of the internal electrodes.
  • a first connection portion penetrates through the dielectric material layers such that it electrically connects the first internal electrodes and the first external terminal electrode while being electrically isolated from the second internal electrodes.
  • a second connection portion is disposed adjacent to the first connection portion and penetrates through the dielectric material layers such that it electrically connects the second internal electrodes and the second external terminal electrode while being electrically isolated from the first internal electrodes.
  • a high resonance frequency can be achieved, and the capacitor can be used in a high frequency circuit.
  • a multilayer capacitor according to the invention can be used in electronic circuits operating at higher frequencies and can be advantageously used as a bypass capacitor or decoupling capacitor in a high frequency circuit. Because of the low ESL, the invention will function as a quick power supply supplying power from electricity stored in the capacitor when there is a sudden need for power, for example, during power-up. As such, the invention can be used as a decoupling capacitor in a CPU (microprocessing unit).
  • the degree to which magnetic flux is cancelled in the capacitor is significantly improved when the interval between the first and second connection portions is 2 mm or less.
  • the degree of the magnetic flux cancellation is further improved as the interval is reduced to 1 mm or less which allows the ESL value to be reduced to 30 pH or less.
  • a multilayer capacitor according to the invention can sufficiently satisfy such a need because its ESL can be reduced to 30 pH or less.
  • connection portions are arranged such that each first connection portion is located closest to a corresponding second connection portion, the magnetic flux components induced by the currents flowing through the connection portions can be canceled more effectively.
  • the plurality of first and second connection portions are arranged alternately, the most effective cancellation of magnetic flux components can be achieved.
  • the distance between the corner edge of the internal electrodes and the connection portion located closest to the corner edge can be minimized versus when the corner is not rounded. This functions to further reduce the lengths of the current paths and, therefore, contribute further to the reduction of the ESL.
  • each of the first and second connection portions with a substantially circular cross-section and by forming the rounded corners of the internal electrodes in an arc which is substantially concentric with the circular cross-section of the connection portion nearest to the corner.
  • first and second external terminal electrodes of the invention are bump-like in shape
  • a bump connection can be advantageously used to mount the multilayer capacitor to a circuit board.
  • semiconductor chips such as CPUs, "flip chips” or the like
  • the configuration of the external terminal electrodes as described above is consistent with this trend.
  • Such bump connection allows mounting with a high density and makes it possible to suppress the generation of inductance components at the connections.
  • first and second internal electrodes are alternately arranged in the stacking direction of the dielectric material layers in order to increase the electrostatic capacity provided
  • the above-described effects can be achieved in a multilayer capacitor having such an increased capacity by forming the first connection portions such that they do not electrically connect the second internal electrodes but electrically connect the plurality of first internal electrodes to each other and by forming the second connection portions such that they do not electrically connect the first internal electrodes but electrically connect the plurality of second internal electrodes to each other.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)

Claims (18)

  1. Condensateur (31), comprenant :
    un corps de condensateur (35) ayant des première et seconde surfaces planaires opposées, globalement parallèles ;
    m paires de première et seconde électrodes internes globalement planaires (33, 34) situées dans ledit corps de condensateur (35), chaque dite paire d'électrodes internes (33, 34) étant séparée par une couche diélectrique respective (32) pour définir une unité capacitive respective, m étant un entier positif supérieur ou égal à un ;
    n premières électrodes externes (38), n étant un entier supérieur ou égal à 1;
    p secondes électrodes externes (39), p étant un entier supérieur ou égal à 1;
    n premières parties de connexion (40) pouvant agir pour connecter électriquement lesdites premières électrodes internes (33) les unes aux autres et à une dite première électrode externe respective (38), chacune desdites premières parties de connexion (40) étant électriquement isolée desdites secondes électrodes internes (34) ;
    p secondes parties de connexion (41) pouvant agir pour connecter électriquement lesdites secondes électrodes internes (34) les unes aux autres et à une dite seconde électrode externe respective (39), chacune desdites secondes parties de connexion (41) étant électriquement isolée desdites premières électrodes internes (33),
    dans lequel lesdites premières et secondes parties de connexion (40, 41) sont agencées en alternance dans une direction de colonne et dans une direction de rangée à former à la fois dans des régions centrales et dans des régions périphériques des électrodes internes respectives (33, 34);
    caractérisé en ce que
    les n premières électrodes externes (38) et les p secondes électrodes externes (39) sont situées sur ladite première surface planaire (37) dudit corps de condensateur (35),
    les n premières électrodes externes (38) et les p secondes électrodes externes (39) ne sont pas formées sur ladite seconde surface planaire, qui est opposée à ladite première surface planaire (37), dudit corps de condensateur (35),
    lesdites parties de connexion (40, 41) sont agencées de sorte qu'un espace latéral entre lesdites parties de connexion (40, 41) adjacentes fait environ 2 mm ou moins,
    lesdites premières et secondes électrodes externes (38, 39) sont agencées de manière alternée dans les directions de colonne et de rangée sur la première surface planaire (37).
  2. Condensateur selon la revendication 1, comprenant en outre une partie intérieure du corps de condensateur (35) où les premières et secondes parties de connexion (40, 41) ne sont pas adjacentes les unes aux autres, la partie intérieure ayant une épaisseur qui est égale à l'épaisseur totale d'une électrode interne et d'une couche diélectrique.
  3. Condensateur selon la revendication 1, dans lequel lesdites premières et secondes parties de connexion (40, 41) sont agencées de sorte que, lorsqu'un courant alternatif est appliqué auxdites premières et secondes électrodes externes (38, 39), les composants de flux (46, 47) créés par des courants (44, 45) s'écoulant dans lesdites premières et secondes parties de connexion (40, 41) soient opposés l'un à l'autre.
  4. Condensateur (31) selon la revendication 1, dans lequel lesdites parties de connexion (40, 41) s'étendent parallèlement les unes aux autres.
  5. Condensateur (31) selon la revendication 1, dans lequel ledit espacement latéral entre lesdites parties de connexion (40, 41) adjacentes mesure environ 1 mm ou moins.
  6. Condensateur (31) selon la revendication 1, dans lequel n et p sont des entiers positifs supérieurs à 1 et lesdites premières et secondes parties de connexion (40, 41) sont agencées de sorte que chacune desdites premières parties de connexion (40) soit située de manière adjacente à au moins une desdites secondes parties de connexion (41) et un courant (44, 45) s'écoule à travers lesdites premières et secondes parties de connexion (40, 41) dans des directions opposées lorsqu'un courant alternatif est appliqué auxdites premières et secondes électrodes externes (38, 39).
  7. Condensateur (31) selon la revendication 1, dans lequel ledit corps de condensateur (35) a une forme globalement parallélépipède.
  8. Condensateur (31) selon la revendication 4, dans lequel chacune desdites premières parties de connexion (40) est située de manière adjacente à au moins une desdites secondes parties de connexion (41).
  9. Condensateur (31) selon la revendication 8, dans lequel chacune desdites premières parties de connexion (40) est située latéralement plus près desdites secondes parties de connexion respectives (41) qu'elle ne l'est du reste desdites premières parties de connexion (40).
  10. Condensateur (31) selon la revendication 4, dans lequel chacune desdites parties de connexion (40, 41) s'étend dans une direction perpendiculaire auxdites premières et secondes électrodes globalement planaires (33, 34).
  11. Condensateur (31) selon la revendication 1, dans lequel chacune desdites premières et secondes électrodes internes (33, 34) ont des coins arrondis.
  12. Condensateur (31) selon la revendication 1, dans lequel chacune desdites premières et secondes électrodes internes (33, 34) est de forme globalement rectangulaire et comporte quatre coins, chacun desdits coins étant arrondi.
  13. Condensateur (31) selon la revendication 12, dans lequel chacun desdits coins arrondis a une première ou seconde partie de connexion (40, 41) respective située de manière adjacente à celui-ci.
  14. Condensateur (31) selon la revendication 13, dans lequel une partie de chaque partie de connexion (40, 41) qui est située de manière adjacente à un desdits coins arrondis comprend une coupe ronde ayant un centre qui est sensiblement concentrique avec un rayon du coin arrondi adjacent.
  15. Condensateur (31) selon la revendication 1, dans lequel lesdites premières parties de connexion (40) passent à travers des trous respectifs (43) formés dans lesdites secondes électrodes internes (34) et lesdites secondes parties de connexion (41) passent à travers des trous respectifs (42) formés dans lesdites premières électrodes internes (33).
  16. Condensateur (31) selon la revendication 15, dans lequel un matériau diélectrique est situé entre des parties desdites premières et secondes parties de connexion (40, 41) qui passent à travers lesdits trous (42, 43) dans lesdites secondes électrodes internes (34) et lesdites premières électrodes internes (33), respectivement.
  17. Condensateur (31) selon la revendication 1, dans lequel m, n et p sont tous des entiers positifs supérieurs à 1.
  18. Condensateur (31) selon la revendication 1, dans lequel chacune desdites électrodes externes (38, 39) a la forme d'un bouton.
EP98104930A 1997-11-14 1998-03-18 Condensateur multicouche Expired - Lifetime EP0917165B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP313206/97 1997-11-14
JP31320697 1997-11-14
JP31320697 1997-11-14

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Publication Number Publication Date
EP0917165A2 EP0917165A2 (fr) 1999-05-19
EP0917165A3 EP0917165A3 (fr) 2005-03-23
EP0917165B1 true EP0917165B1 (fr) 2007-04-11

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US (4) US6034864A (fr)
EP (1) EP0917165B1 (fr)
DE (1) DE69837516T2 (fr)
TW (1) TW429385B (fr)

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EP0917165A2 (fr) 1999-05-19
DE69837516T2 (de) 2007-12-27
TW429385B (en) 2001-04-11
US6034864A (en) 2000-03-07
US6462932B1 (en) 2002-10-08
EP0917165A3 (fr) 2005-03-23
US20020109958A1 (en) 2002-08-15
US6370011B1 (en) 2002-04-09
US6496354B2 (en) 2002-12-17

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