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EP0678384B1 - Auf Abruf arbeitender Tintenstrahldruckknopf - Google Patents

Auf Abruf arbeitender Tintenstrahldruckknopf Download PDF

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Publication number
EP0678384B1
EP0678384B1 EP95108677A EP95108677A EP0678384B1 EP 0678384 B1 EP0678384 B1 EP 0678384B1 EP 95108677 A EP95108677 A EP 95108677A EP 95108677 A EP95108677 A EP 95108677A EP 0678384 B1 EP0678384 B1 EP 0678384B1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
plate
ink
piezoelectric elements
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95108677A
Other languages
English (en)
French (fr)
Other versions
EP0678384A1 (de
Inventor
Minoru C/O Seiko Epson Corporation Usui
Haruhiko C/O Seiko Epson Corporation Koto
Haruo C/O Seiko Epson Corporation Nakamura
Yozo C/O Seiko Epson Corporation Shimada
Tomoaki C/O Seiko Epson Corporation Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27233944&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0678384(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP2337278A external-priority patent/JP3041952B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to DE9117235U priority Critical patent/DE9117235U1/de
Publication of EP0678384A1 publication Critical patent/EP0678384A1/de
Application granted granted Critical
Publication of EP0678384B1 publication Critical patent/EP0678384B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1614—Production of print heads with piezoelectric elements of cantilever type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Definitions

  • the present invention relates to a drop-on-demand ink-jet printing head for jetting ink, in the form of small droplets, from an ink reservoir so as to form printed dots on recording paper.
  • Drop-on-demand ink-jet printing heads can be classified into three main types.
  • the first type is a so-called bubble jet type in which a heater for instantaneously vaporizing ink is provided on the top end of a nozzle to thereby produce and jet ink drop by expansion pressure created during vaporization.
  • a piezoelectric element provided in a vessel constituting an ink reservoir flexes or expands in accordance with an electrical signal applied thereto so as to jet ink in the form of a drop by a force produced when the element expands.
  • a piezoelectric element is provided in an ink reservoir in opposition to a nozzle so as to jet an ink drop by dynamic pressure produced in a nozzle area upon expansion of the piezoelectric element.
  • the above-mentioned third type drop-on-demand ink-jet printing head has a configuration wherein a plurality of nozzle apertures are formed in a wall of a vessel constituting an ink tank, and piezoelectric elements are disposed at the respective nozzle apertures matched in the direction of their expansion and contraction with each other.
  • a printing signal is applied to the piezoelectric elements so as to selectively actuate the piezoelectric elements to jet ink drops from the corresponding nozzles by the dynamic force produced when the piezoelectric elements are actuated to thereby form dots on printing paper.
  • document EP-A-0372521 discloses a drop-on-demand ink-jet printing head in which a piezoelectric plate is fixedly attached to an elastic metal plate and is cut and divided corresponding to the arrangement of nozzle apertures, with one end of the piezoelectric plate being fixed to a frame while the other end thereof opposite to the nozzle apertures is a free end.
  • a driving signal is applied to the piezoelectric plate to thereby bend the elastic metal plate to store energy.
  • the application of the driving signal is stopped to thereby release the elastic force stored in the elastic metal plate so that dynamic pressure is applied to ink, creating a repulsion force to thereby discharge the ink in the form of ink drops to the outside through the nozzle apertures.
  • prior art document US-A-4 566 018 discloses a recorder operating with drops of liquid.
  • This recorder comprises transducers which function as flexural vibrators. These transducers are bilaminar and are formed of a piezoceramic layer and a metal layer, respectively. Given application of electrical voltage to a contact of an individual transducer, such transducer moves in a deflected energized position. Upon short-circuiting of the contacts of the transducer, it snaps back into the initial de-energized position and thereby squeezes a droplet of writing fluid onto a recording medium.
  • the drop-on-demand ink-jet printing head of the present invention provides that ink drops can be produced at a low voltage and with a high energy efficiency.
  • the drop-on-demand ink-jet printing head especially comprises: an array of a plurality of piezoelectric elements arranged at regular intervals and fixed at their one ends to a base, the other ends of the respective piezoelectric elements being free ends which are disposed in opposition to respective nozzle apertures, the piezoelectric elements being formed by cutting, at predetermined width, a piezoelectric plate obtained by firing a lamination of paste-like piezoelectric material conductive material stacked alternately in layers; and ink reservoir portions formed between the nozzle apertures and the free ends of the piezoelectric elements.
  • a piezoelectric plate is formed by firing a lamination of paste-like piezoelectric material conductive material stacked alternately in layers and is cut at predetermined widths into pieces to thereby constitute the array of piezoelectric elements. Accordingly, even if a low voltage is selectively applied to the piezoelectric material layers constituting the respective piezoelectric elements to thereby drive the layers, the sum of the respective force components acts on ink, so that it is possible to produce enough dynamic pressure to jet the ink as ink drops through the corresponding nozzle apertures. Since the array of piezoelectric elements can be formed by cutting into strips the piezoelectric plate fixed to a base or the like, extremely small vibration elements can be produced with high working accuracy and with high efficiency.
  • Figs. 1 and 2 depict a drop-on-demand ink-jet printing head of a first type according to the present invention.
  • a base 2 has sidewise extended projection portions 2a and 2a at its one end portion, that is, at its lower portion in the drawings, so that piezoelectric vibrators 12 and 12' (which will be described later) are fixed to the projection portions 2a and 2a.
  • a vibration plate 4 for separating an ink reservoir and the piezoelectric vibrators 12.
  • Concave portions 4a and 4a are formed in the vibration plate 4 in the vicinity of portions where the vibration plate 4 contacts the piezoelectric vibrators 12 so that the vibration plate 4 can be respond easily to the vibration of the piezoelectric vibrators 12.
  • recess portions 6a constituting ink reservoirs in cooperation with the vibration plate 4 are provided in the areas opposite to the piezoelectric vibrators 12.
  • recess portions 6b constituting ink supply channels are formed so that the recess portions 6a constituting the ink reservoirs, nozzle apertures and the recess portions 6b constituting the ink supply channels communicate with each other through respective penetration holes 6c and 6d.
  • the nozzle plate 8 is fixed to the surface of the spacer member 6, and in the nozzle plate 8, a plurality of nozzle apertures 10 and 10' are formed so as to accord with the arrangement of the piezoelectric vibrators 12 and 12'.
  • the respective openings of the recess portions 6b formed in the spacer member 6 are sealed by the nozzle plate 8 so as to form the ink supply channels.
  • Figs. 3a to 3f illustrate a method of producing the above-mentioned vibrators.
  • a thin coating of a piezoelectric material in paste-like form for example, a titanic-acid/zirconic-acid lead-system composite ceramic material, is applied on a surface plate 20 to thereby form a first piezoelectric material layer 21 (in Fig. 3a).
  • a first conducive layer 22 is formed on the surface of the first piezoelectric material layer 21, while a part of the first piezoelectric material layer 21 is left as an exposed portion 21a (in Fig. 3b).
  • a thin coating of a piezoelectric material is applied on the respective surfaces of the conductive layer 22 and the exposed portion 21a of the first piezoelectric material layer 21 to thereby form a second piezoelectric material layer 23.
  • a conductive layer 24 is further formed on the other surface of the layer 23 opposite the surface on which the conductive layer 21a has been formed (in Fig. 3c). The above steps are repeated a required number of times.
  • the lamination is dried and fired under pressure at a temperature in a range of 1000°C to 1200°C for about an hour, thereby obtaining a plate-like ceramic member 25.
  • One end portion of the ceramic member 25 where the conductive layer 24 is exposed is coated with a conductive paint to thereby form a collecting electrode 26, and the other end portion of the ceramic member 25 where the conductive layer 22 is exposed is coated with a conductive paint to thereby form a collecting electrode 27 (in Fig. 3d) to thereby form a piezoelectric plate 28.
  • the thus-formed piezoelectric plate 28 is fixed onto the projection portion 2a of the base 2 through a conductive bonding agent (Fig. 3e). Then, the piezoelectric plate 28 is cut, by a diamond cutter or the like, in the vicinity of the surface of the base 2, to thereby divide it in predetermined widths into a plurality of vibrators 30 (in Fig. 3f).
  • Individually separated conductive members are connected to the respective collecting electrodes 26 which are connected to the one-side electrodes of the respective piezoelectric vibrators 30, of the thus-arranged vibration unit, while a common conductive member is connected to the collecting electrodes 27 which are respectively connected to the other-side electrodes.
  • the vibration plate 4 is made of a conductive material, the vibration plate 4 is employed as the common conductive member.
  • the piezoelectric vibrators 30 If an electric signal of about 30 V is applied between the conductive members, the piezoelectric vibrators 30 to which the signal is selectively applied through their proper conductive members, expand in their axial directions as a result of application of the actuating voltage to the respective piezoelectric material layers.
  • the electrodes are disposed parallel to each other in the expansion direction, the energy efficiency is high in comparison with those of other vibration modes.
  • the vibration plate 4 fixed to the top ends of the piezoelectric vibrators 12 expands so that the vibration plate 4 contacting the piezoelectric vibrators 12 is displaced in the direction toward the recess portions 6a constituting the ink reservoirs, thereby compressing the ink reservoirs.
  • the ink on which the pressure is exerted through the volume reduction of the ink reservoirs reaches the corresponding nozzle apertures 10 through the penetrating holes 6c and jets out as ink drops.
  • the piezoelectric vibrators 12 contract so that the vibration plate 4 also returns to its initial position. Consequently, the ink reservoir is expanded to the volume at the time when no signal is applied, so that the ink in the recess portion 6b flows into the recess portion 6a through the penetrating hole 6d, thereby preparing for the next ink drop generation.
  • the ink reservoirs compressed by the piezoelectric vibrators 12 and 12' are connected with the nozzle apertures 10 and 10' through ink channels such as the penetrating holes 6c and 6c, so that it is possible to shorten the distance between the two arrays of nozzle apertures 10 and 10' independently of the distance between the two arrays of piezoelectric elements 12 and 12'.
  • reference numeral 32 represents a vibration plate, on the surface of which a ridge strip portion 32a is formed so as to separate the array of piezoelectric vibrators 12 from the array of piezoelectric vibrators 12', and groove portions 32b to 32e are formed to surround the respective top ends of the piezoelectric vibrators 12 and 12'.
  • the reference numeral 33 represents a nozzle plate in which nozzle apertures 34 and 34' are formed so as to accord with the arrangement of the piezoelectric vibrators 12 and 12', and ridge portions 33a to 33c are formed in the opposite side and central portions, respectively, so as to form recess portions 33e and 33f constituting ink reservoirs on the top ends of the piezoelectric vibrators 12 and 12' when the nozzle plate 33 is fixed to the vibration plate 32.
  • the vibration plate 32 fixed to the top ends of the piezoelectric vibrators 12 and 12' expands so that the vibration plate 32 contacting the piezoelectric vibrators is displaced toward the recess portions 33e and 33f of the nozzle plate 33, thereby compressing the ink therein through the vibration plate 32.
  • the piezoelectric vibrators 12 contract to their initial states to make the vibration plate 33 return to its initial position, so that the ink reservoir is expanded to the volume at the time of application of no signal. Consequently, the ink in the recess portions 32b to 32e flows into the recess portions 33e and 33f constituting ink reservoirs, thereby preparing for the next ink drop generation. According to this embodiment, no spacer member is necessary, and it is possible to simplify the assembling process.
  • reference numeral 40 represents a cylindrical body composed of an electrically isolating material such as ceramics.
  • the cylindrical body 40 has openings at its opposite ends.
  • a nozzle plate 43 having nozzle apertures 41 and 42 is fixed on the one end of the cylindrical body 40 through a bonding agent, while a base plate 44 having piezoelectric element arrays (which will be described later) is fixed on the other end of the cylindrical body 40.
  • Piezoelectric elements 45 and 46 of these piezoelectric element arrays are disposed so that the direction of expansion/contraction is opposite to the nozzle apertures 41 and 42 when electric signals from lines 47 and 48 are applied thereto.
  • a partition plate 49 reaching the nozzle plate 43 is provided on the base plate 44.
  • the base plate 44 in this embodiment the piezoelectric elements 45 and 46 expand in the direction of lamination so that the free ends of the piezoelectric elements 45 and 46 press ink toward the nozzle apertures 41 and 42, whereby the dynamically pressurized ink enters the nozzle apertures 41 and 42 and is jetted out as ink drops to thereby form dots on the printing paper.
  • the piezoelectric elements 45 and 46 contract into their original states, so that ink flows into the space between the nozzle plate 43 and the piezoelectric elements 45 and 46 to thereby prepare for the next ink drop generation.
  • Figs. 7a and 7b show an embodiment of the inventive method of producing an array of piezoelectric elements.
  • reference numeral 65 represents a member in which the surface of a base plate 66 formed of a plate-like ceramic material is coated with a conductive material 67, which acts also as bonding agent.
  • the surface of the conductive material 67 of this base plate 66 is coated with piezoelectric materials 68 and conductive materials 69 alternately in layers in the same manner as in the above-mentioned case (Figs. 3a to 3c).
  • the base plate 66, the piezoelectric materials 68 and the conductive materials 69 are fired integrally as they are. Consequently, the base plate 66, the piezoelectric materials 68 and the conductive materials 69 are bonded by the conductive layers 67 and formed integrally (in Fig. 7b). Subsequent to the firing operation, by forming slits at a constant distance as mentioned above, it is possible to integrally form piezoelectric element arrays on the base plate 66 in which the conductive layers 67 are formed.
  • a layer S which has no relationship to piezoelectric action may be formed of a piezoelectric or electrode material in advance on the free end surface, as shown in Fig. 8, so that the layer S may be ground to carry out the adjustment working.
  • Fig. 9 shows another embodiment of the array of piezoelectric elements according to the present invention.
  • inactive layers 76 of a length corresponding to a quarter of the vibration wavelength are formed between a base plate 70 and electrodes 74, which are the closest to the base plate 70, when piezoelectric elements 78 are fixed on the base plate 70 to form a printing head assembly.
  • Fig. 10 shows another embodiment of the array of piezoelectric elements according to the present invention.
  • a layer 84 of a substance of a high viscoelastic property is interposed between a base plate 80 and an array of piezoelectric elements 82 which are assembled as a printing head, or the piezoelectric elements are fixed to the base plate through a bonding agent which can maintain a high viscoelastic property upon completion of solidification, thereby forming a bonding agent layer.
  • Fig. 11 illustrate a positive measure against such a problem.
  • a shallow slit 87 is formed in an array of piezoelectric elements 86 on the side thereof contacting a base plate 85 so that the slit 87 can absorb the strain in the width direction.
  • Fig. 12 shows an embodiment of the above-mentioned nozzle plate.
  • a nozzle plate 92 is constituted in a manner so that a nozzle aperture 89 is formed in the area opposite to free end of each piezoelectric element 88, and an elliptical recess portion 90 is formed so as to surround the nozzle aperture 89.
  • ink present in the elliptical recess portion 90 is surrounded by a wall 94 of the recess portion 90 and covered from the back with the free end of the piezoelectric element 88 upon reception of dynamic pressure caused by elastic waves from the piezoelectric element 88. Its escape path being blocked, the ink concentratedly flows into the nozzle aperture 89. It is therefore possible to jet ink drops effectively with as low applied voltage as possible.
  • Fig. 13 shows another embodiment of the nozzle plate.
  • a groove 98 having a slightly larger width W than the width W' of each piezoelectric element 96 passes a nozzle aperture 100.
  • the piezoelectric element 96 if the piezoelectric element 96 is disposed close enough for its top end to enter the groove 98, elastic waves generated by the piezoelectric element 96 apply a dynamic pressure to ink in the groove 98. Then, since the ink in the groove 98 is surrounded by the walls 102 of the groove 98 and covered from the back with the free end of the piezoelectric element 96, the ink in the groove 98 jets out from the nozzle aperture 100 effectively. When the driving signal is stopped to thereby allow the piezoelectric element 96 to contract, ink flows from a portion not opposite the piezoelectric element in the groove 98 into an area opposite the piezoelectric element, thereby preparing for the next printing operation.
  • the width of the groove 98 is larger than that of the piezoelectric element 96 in this embodiment so that the top end of the piezoelectric element 96 can enter the groove 98
  • the width W of the groove 98 may be made smaller than the width W' of the piezoelectric element 96 to provide a space between the top end of the piezoelectric element 96 and the surface of the nozzle plate 101. In this case, ink receiving elastic waves from the piezoelectric element 96 is prevented from expanding in the direction parallel to the nozzle plate 101 by the walls 102 of the groove 98, so that it is possible to produce ink drops effectively.
  • Fig. 14 shows another embodiment of the nozzle plate.
  • a recess portion 106 having substantially the same shape as a piezoelectric element is formed so as to surround a nozzle aperture 104, and grooves 108 which are shallower than the recess portion 106 are formed in both sides of the recess portion 106.
  • a plate having a three-layer structure in which nickel plates 116 and 118 are pressed and fixed onto the opposite side of a copper plate 114, as shown in Fig. 15, is prepared, and then a recess portion and grooves are formed by an etching agent which dissolves only the nickel plates 116 and 118 selectively.
  • an etching agent which dissolves only the nickel plates 116 and 118 selectively.
  • a plate having such a three-layer structure of a copper plate 114 having a thickness of 50 ⁇ m sandwiched between nickel plates 116 and 118 each having a thickness of 25 ⁇ m it is possible to dissolve all of the nickel plate on one surface of the copper plate at the same time as a recess portion is formed on the other surface, so that it is possible to form a nozzle plate having a groove of 50 ⁇ m in width defining a nozzle aperture.
  • Figs. 16 and 17 show another embodiment of the nozzle plate.
  • the nozzle plate of this embodiment because of screening the side of piezoelectric elements 128 dynamic pressure caused upon application of a signal to the piezoelectric elements is prevented from propagating to other adjacent nozzle apertures by separation walls 126, so that it is possible to prevent unnecessary ink from flowing out.
  • Fig. 18 shows another embodiment according to the present invention.
  • struts 130 are formed between piezoelectric elements 132 constituting a piezoelectric element array, and are fixed to a base plate 134 on which the array of piezoelectric elements is mounted, or on a nozzle plate 136.
  • Fig. 19 shows another configuration of the struts 130 shown in Fig. 18.
  • the foregoing rectangular-prism-like piezoelectric ceramic material is fixed on a base plate 142, and then the ceramic material is cut and separated into portions 144 to form piezoelectric elements and portions 146 to form struts, the portions to form piezoelectric elements being ground a little on the side of their free ends.
  • a nozzle plate 148 is disposed so as to be in contact with the portions 146 to form struts as shown in Fig. 20, so that it is possible to make the gap between the nozzle plate and the free end of each of the piezoelectric elements be a predetermined size. Accordingly to this embodiment, not only is it possible to form struts in the process of forming an array of piezoelectric elements, but also it is possible to simplify the assembling work because of eliminating the step of attaching the strut members to the base plate.
  • Figs. 21a and 21b show another embodiment of the inventive method of fixing a nozzle plate.
  • a nozzle plate 150 through which nozzle apertures 152 are bored is urged against a base plate 160 by magnets 156 and 158 or springs so as to be always in contact with the free ends of piezoelectric elements 154.
  • a voltage in the direction of contraction is applied to the piezoelectric elements 154 which are in the position of ink drop formation. Consequently, a gap G is produced between the nozzle plate 150 and the free end surfaces of the piezoelectric elements 154 (in Fig. 21b), so that ink flows into this gap. Then, when the application of the signal is stopped, or if a signal in the direction of expansion is applied, the free ends of the piezoelectric elements 154 expand toward the nozzle plate 150.
  • the ink in the gap G is pressed to the nozzle aperture 152 and jetted out to the outside as an ink drop. Since the nozzle aperture 152 which has no relationship to the formation of an ink drop is made to elastically contact with the free end of the piezoelectric element 154, dynamic pressure from the adjacent piezoelectric elements does not act on the nozzle aperture 152 so that the ink can be prevented from leaking.
  • a bonding agent or resin 162 having low viscosity and high elasticity at the time of solidification for example, an epoxy-system bonding agent, ultraviolet-ray setting resin such as G11 or G31 made by Asahi Chemical Industry Co., Ltd., or ultraviolet-ray setting silicon rubber such as TUV6000 or TUV 602 made by Toshiba Silicon Co., Ltd., is injected and solidified in portions except for the free end surfaces of the piezoelectric elements 160, as shown in Figs. 22a to 22c, to thereby reduce the influence of the piezoelectric elements 160 to vibration as much as possible, so that it is possible to reinforce the mechanical strength of the piezoelectric elements 160 and more ensure the electric insulation of the conductive layers.
  • an epoxy-system bonding agent for example, ultraviolet-ray setting resin such as G11 or G31 made by Asahi Chemical Industry Co., Ltd., or ultraviolet-ray setting silicon rubber such as TUV6000 or TUV 602 made by Toshiba Silicon Co., Ltd.
  • Figs. 23a and 23b show an embodiment of a drop-on-demand ink-jet printing head of a third type according to the present invention.
  • piezoelectric elements 172 and 174 are arrayed on a base plate 166 through conductive spacers 168 and 170 so that the direction of lamination of the piezoelectric elements is parallel to the base plate 166 and the free ends of the piezoelectric elements are separated from each other by a predetermined space.
  • a separation wall member 176 is disposed with predetermined gaps from the respective free ends of the piezoelectric elements 172 and 174.
  • nozzle apertures 180 and 182 are formed in opposition to the gaps between the separation wall member 176 and the respective free ends of the piezoelectric elements 172 and 174, and fixed at predetermined intervals through a spacer 184.
  • An ink tank 186 communicates with the nozzle apertures 180 and 182 through communication holes 188 and 190.
  • Figs. 24a to 24c depict a method of forming the above-mentioned piezoelectric element array.
  • spacer members 196 and 198 are fixed to a member 194 corresponding to the base plate 166 in Figs. 23a and 23b through a bonding agent (in Fig. 24a).
  • piezoelectric element plates 200 and 202 which are the same as those shown in Fig. 3, are fixed at their one ends through a conductive bonding agent so that the conductive layers on their one side are on the side of the spacers 196 and 198 (Fig. 24b).
  • slits 204 and 206 are formed in the thickness of the piezoelectric element plates at predetermined intervals extending parallel to the direction of lamination of the piezoelectric element plates 200 and 202 (Fig. 24c). Consequently, piezoelectric elements 205 and 207 separated from each other by the slits 204 and 206 are formed on the base plate 194 in a manner so that electrodes on one side are commonly connected to each other by the spacers 196 and 198.
  • a voltage is applied to the respective piezoelectric layers of the piezoelectric elements 172 and 174 through conductive layers 171 and 173 of the piezoelectric element 172 and conductive layers 175 and 177 of the piezoelectric element 174 at the same time, so that the sum of expansion force of the respective piezoelectric layers acts on the free ends. Accordingly, the ink between the separation wall member 176 and the free end of the piezoelectric element 174 is pressed out from the space and jets out to the outside from the nozzle aperture 182. When the application of the voltage to the piezoelectric element 174 is stopped, the piezoelectric element contracts, so that ink flows from the ink tank 186 into the space, thereby preparing for the next dot generation.
  • piezoelectric elements are fixed in the form of a cantilever shape by a spacer in a printing head shown in Figs. 23a and 23b, as shown in Fig. 25a, portions of piezoelectric element plates 210 and 212 projecting over spacers 214 and 216 are fixed to a base plate 220 by a bonding agent or resin 218 having a low viscosity and a high elasticity at the time of solidification, for example, an epoxy-system bonding agent, ultraviolet-ray hardening resin such as G11 and G31 made by Asahi Chemical Industry Co., Ltd., or ultraviolet-ray setting silicon rubber such as TUV6000 or TUV 602 made by Toshiba Silicon Co., Ltd.
  • slits 222 are formed at predetermined intervals using a diamond cutter or the like, thereby forming piezoelectric elements 224 and 226, with their one-side surfaces being bonded to the base plate 220 (Fig. 25b).
  • a nozzle plate 230 is attached through a spacer 228 to the base plate 220 on which the thus -formed piezoelectric element arrays are mounted, thereby providing a printing head the same as that shown in Fig. 23a.
  • Reference numeral 232 in Fig. 26 represents a partition member disposed between the facing surfaces of the piezoelectric elements, and 234 and 236 represent nozzle apertures.
  • the piezoelectric element 224 expands while transforming the bonding agent 218 elastically, pressing the ink between the partition member 232 and the free end thereof, thereby jetting the ink from the nozzle aperture 234 as an ink drop.
  • the force produced by the piezoelectric element 224 is extremely large, the effect of the viscosity of the bonding agent 218 is extremely small, so that the energy produced as the transformation of the piezoelectric element is not absorbed by the bonding agent.
  • Figs. 27a to 27c illustrate another embodiment of the inventive method of forming a piezoelectric element array, in which spacers 242 and 244 are fixed to the opposite ends of a base plate 240, and a bonding agent 246 having low viscosity and high elasticity at the time of solidification flows into a grooved portion formed by the spacers 242 and 244 (Fig. 27a).
  • a piezoelectric element plate 248 the same as the mentioned above is fixed to the spacers 242 and 244 with a conductive bonding agent and to the base plate 240 with a bonding agent 246 (Fig. 27b).
  • slits 250 and 252 separated from each other and extending to the outer surface of the base plate 240 are formed.
  • slits 254 parallel in the oblique direction are formed at predetermined intervals so that the two ends of the piezoelectric element plates separated by the slits 250 and 252 are displaced by one-half pitch (Fig. 27c).
  • a nozzle plate 266 is prepared for the thus-arranged piezoelectric elements, with the nozzle plate 266 arranged by displacing nozzle apertures 262 in the first column and nozzle apertures 264 in the second column from each other by one-half pitch, as shown in Fig. 28.
  • the nozzle plate 266 is attached to the base plate 240 (Fig. 27c) through a spacer 268 as shown in Fig. 29, thereby constituting a printing head.
  • the slits 250 and 252 form ink channels, and a portion 256 separated by these slits 250 and 252 functions as a partition member, so that when a signal is applied to the piezoelectric elements 258a and 260, ink drops are jetting out from the nozzle apertures 262 and 264.
  • a partition member and ink channels can be formed together with the formation of piezoelectric elements at the same time, it is possible to simplify the process of production, and it is also possible to improve the density of dots without making the width of the piezoelectric elements narrow.
  • the entire large force produced by the thickness-wise vibration of piezoelectric elements is used, and ink is jetted out by the pressure of the piezoelectric elements, so that it is possible to produce ink drops effectively not only in the case of using a normal ink but also in the case of using an extremely high viscous ink such as hot melt ink.
  • Figs. 30a and 30b show an embodiment of a fourth type according to the present invention.
  • the reference numeral 270 represents a lead piece composed of a high elastic spring member 272 and a piezoelectric elements 274 (which will be described later) laminated on the elastic spring member 272, one end of the lead piece 270 being fixed to a spacer 276 so that the lead piece 270 faces a nozzle plate 278, the other end of the lead piece 270 being formed as a free end so that the lead piece can vibrate flexibly.
  • Reference numeral 278 represents a nozzle plate in which nozzle apertures are formed at positions opposite the free ends of respective ones of the lead pieces 270. The nozzle plate 278 is fixed to a base member 282 which also functions as a housing.
  • Figs. 31a to 31c illustrate a process of producing the above-mentioned lead piece, in which a piezoelectric element plate 292 produced by the above-mentioned process is cemented through a bonding agent to one surface of a plate 290 composed of a high elastic metal plate or ceramics constituting the above -mentioned spring plate 272 so that conductive layers 294 and 296 thereof are parallel to the plate 292, thereby constituting a plate.
  • the thus integrally formed structure constituted by the piezoelectric element plate 292 and the plate 290 is fixed to a spacer member 298 on its one side (Fig. 31b), and slits 300 are formed at regular intervals using a diamond cutter or the like to thereby strip lead pieces 302 with their one ends fixed to the spacer 298 and with their other ends made free (Fig. 31c).
  • the piezoelectric element plate 292 produced in advance is cemented to the plate 290 in the embodiment shown in Fig. 31, high heat-proof ceramics may be used for the plate 290, so that it is possible to omit the cementing process if the piezoelectric element plate is formed on the above-mentioned process (in Fig. 3) thereon.
  • Figs. 32a to 32c show another embodiment of producing a lead piece, in which a piezoelectric element plate 312 produced by the above-mentioned process is cemented to one surface of a plate 310 composed of an elastic metal plate or ceramics and constituting the above-mentioned spring plate 272 with a bonding agent so that conductive layers 314 and 316 of the piezoelectric element plate 312 are perpendicular to the plate 310 (Fig. 32a).
  • the piezoelectric element plate 312 and the plate 310 arranged integrally is fixed at its one end portion to a spacer member 318 (in Fig. 32b). Then, slits 320 are formed in the piezoelectric element plate 312 and the plate 310 at regular intervals using a diamond cutter or the like, so as to form stripped lead pieces 322, one ends of which are fixed to the spacer 318 and the other ends of which are free (Fig. 32c).
  • the present invention provides a drop-on demand ink-jet printing head which comprises a nozzle plate having an array of a plurality of nozzle apertures; an array of plurality of piezoelectric elements arranged at regular intervals and fixed at one end thereof to a base, the other ends of said respective piezoelectric elements being free ends which are in opposition to respective ones of said nozzle apertures, ink reservoir portions being formed between said nozzle apertures and said free ends wherein said piezoelectric elements are formed by cutting, at predetermined width, a piezoelectric plate obtained by a lamination of at least two layers of piezoelectric material and at least two layers of conductive material stacked alternately in layers.
  • the piezoelectric plate is fixed at one surface of a plate made of an elastic material and said cutting at predetermined width is made for forming a plurality of lead pieces with one end thereof fixed to a base and their other ends being free ends disposed in opposition to the nozzle apertures and said ink reserving space is formed between said nozzle apertures and said free ends of said lead pieces.
  • the piezoelectric plate can be obtained by firing or burning a lamination of paste-like piezoelectric material and conductive material stacked alternatively in layers.
  • the drop-on-demand ink-jet printing head can further comprise a vibration plate driven by said piezoelectric element array and interposed between said nozzle plate and said piezoelectric element array.
  • the ink reservoirs can be formed by providing recess portions in a spacer interposed between said nozzle plate and a vibration plate. Further, the ink reservoirs can be formed by providing recess portions in said nozzle plate and/or a vibration plate.
  • the elastic material is injected between adjacent ones of said piezoelectric elements.
  • Recess portions can be formed at said nozzle apertures opposite to said free ends of respective ones of said piezoelectric elements.
  • each of said piezoelectric elements has an immovable area at the base side.
  • the immovable area may have a length equal to a quarter of vibration wavelength of the piezoelectric element.
  • the drop-on-demand ink-jet printing head may further comprise a viscoelastic material layer interposed between said piezoelectric elements and said base so as to fix said piezoelectric element to said base.
  • Slits can be formed in said piezoelectric elements at the base side thereof.
  • the nozzle plate can be supported by a support member so as to be disposed in opposition to said free ends portions of said piezoelectric elements with a predetermined space therebetween.
  • the support member comprises a piezoelectric element plate.
  • the nozzle plate is provided with a partition member between adjacent ones of said nozzle apertures and supported by a support member so as to be disposed at a predetermined distance from respective free ends of said piezoelectric elements.
  • the nozzle plate is provided with at least one nozzle aperture disposed so as to be in elastic contact with respective free ends of said piezoelectric elements.
  • the at least one partition member can be constituted by a piezoelectric plate. It is preferred that the direction of said cutting is disposed by a predetermined angle from the direction perpendicular to the direction of array of said nozzle apertures.
  • the piezoelectric material and said conductive material can be laminated in parallel to the plate.
  • the piezoelectric material and the conductive material are laminated perpendicular to said plate.
  • the support members can be disposed on both sides of respective piezoelectric elements.
  • the steps (a) to (d) are repeated a required number of times to obtain the lamination with a predetermined number of layers. It is advantageous if the method further comprises the step of
  • the method can further comprise the step of
  • the method can still further comprise the step of
  • the method can further comprise the step of
  • the method further comprises the step of

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (4)

  1. Tintenstrahldruckkopf des Tropfen auf Abruf-Typs mit:
    einer Basis (2; 70; 80; 85);
    einer Düsenplatte (8; 92), welche eine Mehrzahl von Düsenöffnungen (10, 10'; 89) ausbildet;
    einer Anordnung von piezoelektrischen Elementen (12, 12'; 78; 82; 86; 89), welche jeweils in vorbestimmten Abständen angeordnet sind, jeweils mit einem inaktiven Bereich, wo kein piezoelektrisches Phänomen im wesentlichen beeinflußt ist, und jeweils mit einem Ende, welches auf der Basis (2; 70; 80; 85) befestigt ist, sowie einem anderen Ende, welches frei ist und welches jeweiligen Düsenöffnungen (10, 10'; 89) der Düsenplatte (8; 92) gegenüberliegt; und
    einem Tintenreservoir (6a, 6b; 90), welches zwischen den Düsenöffnungen (10, 10'; 89) der Düsenplatte (8) und den freien Enden der piezoelektrischen Elemente (12, 12'; 78; 82; 86; 89) gebildet ist;
    dadurch gekennzeichnet, daß
    - jedes der piezoelektrischen Elemente (12, 12'; 78; 82; 86; 89) eine Laminierung mit mehrfachen piezoelektrischen Schichten (21, 23) und mehrfachen leitenden Schichten (22, 24) ist, erhältlich durch Laminierung von piezoelektrischem Material und leitendem Material, welches abwechselnd in Schichten übereinander angeordnet ist, um eine piezoelektrische Platte (25) zu bilden, und Schneiden der piezoelektrischen Platte (25) mit vorbestimmten Breiten,
    - jedes der piezoelektrischen Elemente (12, 12'; 78; 82; 86, 89) in einer axialen Richtung hiervon oszilliert und
    - der inaktive Bereich an dem einen Ende der piezoelektrischen Elemente gebildet ist.
  2. Tintenstrahldruckkopf des Tropfen auf Abruf-Typs gemäß Anspruch 1, bei dem der inaktive Bereich auf dem befestigten Ende des piezoelektrischen Elements (78; 82; 86) gebildet ist.
  3. Tintenstrahldruckkopf des Tropfen auf Abruf-Typs gemäß Anspruch 1 oder 2, bei dem Tintentropfenerzeugungsvibrationen auf der Oberfläche der Basis (70; 80) benachbart zur inaktiven Schicht reflektiert sind.
  4. Verfahren zur Herstellung eines Tintenstrahldruckkopfs des Tropfen auf Abruf-Typs, das folgendes umfaßt:
    Bereitstellung einer Basis (2; 70; 80; 85);
    Bildung einer Anordnung von piezoelektrischen Elementen (12, 12'; 78; 82; 86; 89) auf der Basis (2; 70; 80; 85), die jeweils einen inaktiven Bereich aufweisen, und die jeweils ein Ende, welches auf der Basis (2; 70; 80; 85) befestigt ist, sowie ein anderes Ende aufweisen, welches frei ist;
    Ausbildung einer Düsenplatte (18), die eine Mehrzahl von Düsenöffnungen (10, 10'; 89) bildet, so daß das freie Ende jedes piezoelektrischen Elements einer jeweiligen der Düsenöffnungen der Düsenplatte (8) gegenüberliegt; und
    Bereitstellung eines Tintenreservoirs (16a, 66, 90), zwischen den Düsenöffnungen der Düsenplatte (8) und den freien Enden der piezoelektrischen Elemente,
    dadurch gekennzeichnet, daß
    - jedes der piezoelektrischen Elemente (12, 12'; 78; 82; 86; 89) durch Laminierung mehrfacher piezoelektrischer Schichten und mehrfacher leitender Schichten gebildet ist und in einer axialen Richtung hiervon oszilliert, und
    - der inaktive Bereich an dem einen Ende der piezoelektrischen Elemente gebildet ist.
EP95108677A 1990-02-23 1991-02-25 Auf Abruf arbeitender Tintenstrahldruckknopf Expired - Lifetime EP0678384B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9117235U DE9117235U1 (de) 1990-02-23 1991-02-25 Tintenstrahldruckkopf des Tropfen auf Abruf-Typs

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP43787/90 1990-02-23
JP4378790 1990-02-23
JP2337278A JP3041952B2 (ja) 1990-02-23 1990-11-30 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
JP337278/90 1990-11-30
EP91102760A EP0443628B2 (de) 1990-02-23 1991-02-25 Auf Abruf arbeitender Tintenstrahldruckknopf

Related Parent Applications (1)

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EP91102760.5 Division 1991-02-25

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EP0678384B1 true EP0678384B1 (de) 1997-08-20

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KR100221459B1 (ko) * 1997-03-07 1999-09-15 이형도 프린트헤드의 기록액 분사장치 및 그 방법
US6417600B2 (en) * 1998-09-17 2002-07-09 Seiko Epson Corporation Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same
JP2002361868A (ja) 2000-08-08 2002-12-18 Seiko Epson Corp インクジェット式記録ヘッド、及び、その製造方法
JP2024137288A (ja) * 2023-03-24 2024-10-07 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出装置

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DE3317082A1 (de) * 1983-05-10 1984-11-15 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet
JPS608953A (ja) 1983-06-29 1985-01-17 Omron Tateisi Electronics Co プログラム・アナライザ
JPS61246063A (ja) * 1985-04-25 1986-11-01 Ricoh Co Ltd インクジエツト噴射ヘツドの導体回路形成法
US4752789A (en) * 1986-07-25 1988-06-21 Dataproducts Corporation Multi-layer transducer array for an ink jet apparatus
US4788557A (en) * 1987-03-09 1988-11-29 Dataproducts Corporation Ink jet method and apparatus for reducing cross talk
JPH01255549A (ja) * 1988-04-06 1989-10-12 Seiko Epson Corp インクジェットヘッド
EP0372521B1 (de) 1988-12-07 1993-04-14 Seiko Epson Corporation Auf Abruf arbeitender Tintenstrahldruckkopf
JPH0733087B2 (ja) * 1989-06-09 1995-04-12 シャープ株式会社 インクジェットプリンタ

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