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EP0394452A1 - Cryogenic adsorption pump - Google Patents

Cryogenic adsorption pump Download PDF

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Publication number
EP0394452A1
EP0394452A1 EP89903490A EP89903490A EP0394452A1 EP 0394452 A1 EP0394452 A1 EP 0394452A1 EP 89903490 A EP89903490 A EP 89903490A EP 89903490 A EP89903490 A EP 89903490A EP 0394452 A1 EP0394452 A1 EP 0394452A1
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EP
European Patent Office
Prior art keywords
pump
vessel
heat
frame
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP89903490A
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German (de)
French (fr)
Other versions
EP0394452A4 (en
Inventor
Marxen Petrovich Larin
Maxim Leonidovich Alexandrov
Valery Ivanovich Nikolaev
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NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
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Publication of EP0394452A1 publication Critical patent/EP0394452A1/en
Publication of EP0394452A4 publication Critical patent/EP0394452A4/en
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to vacuum technology and in particular to cryogenic adsorption pumps and can be used to generate an ultra-pure oil-free vacuum in a pressure range of 10 2 to 10- 7 Pa when evacuating any gases, except helium, including more aggressive, in chambers of various purposes with a volume of 0.01 m 3 can be used up to several hundreds of cubic meters.
  • cryogenic adsorption pump with a pumping element known (SU, A, 1333833), which consists of an annular vessel with liquid nitrogen, a porous screen, which is arranged coaxially with the vessel in a space which is enclosed by the inner side surface of the vessel , and an adsorbent, which is housed in a gap between the inner side surface of the vessel and the porous screen.
  • a disadvantage of this pump is that at the liquid nitrogen temperature the adsorbent has a low sorption capacity at low (below 10 -3 - 10 -4 Pa) equilibrium pressures of the adsorbable gases. Therefore, the pump cannot achieve limit pressures below 10- 3 Pa even after a brief gas exposure.
  • the adsorbent is cooled by solid nitrogen up to a temperature of 55-50 K.
  • a cryogenic adsorption pump is also known (Zhurnal tekhniche.skoi fiziki, Volume 28, Issue 10, 1988, October, Nauka (Leningrad branch), MP Larin "Kondatsatsionno-adsorptsionnaya i sorbtsionnaya otkachka pri Temperaturakh twerdogo azota", pp. 2026 to 2039) with a housing with a cover , which is provided with an inlet connection for connecting a volume to be evacuated, and the housed in the housing a pumping element and a cooled radiation shield, which surrounds the pumping element.
  • the pumping element is designed as a ring-shaped vessel for cryogenic agents and contains the perforated heat-conducting frames and frame-porous screens arranged coaxially therewith in a space which is delimited by the inner vessel wall.
  • the Gafäßêt, the heat-conducting frames and the frame-porous screens are welded to a disc-shaped heat conductor, so that a thermal contact between the vessel and the heat-conducting frames is ensured.
  • Two frame-porous screens are arranged on both sides of the vessel walls and the other on both sides of the heat-conducting frames, annular spaces between the vessel walls and the frame-porous screens, as well as annular spaces between the heat-conducting frames and the frame-porous screens closest to them are filled with adsorbents . From above, the rooms are covered by rings. Annular cavities between adjacent frames - porous screens are connected to the inlet connection of the pump.
  • the cryogen container has an annular lid with two tubes, with the help of which cryogen is filled into the container and its vapors are evacuated. The upper ends of these tubes are attached to the housing cover.
  • the adsorbent In order to increase the adsorption capacity of a pump, which is one of the most essential pumping characteristics of the pump, the adsorbent should occupy as large a volume as possible in the present pump dimensions and to increase the effectiveness of the pump the surface of the adsorbent and the porous screens should be as large as possible.
  • cavities are enclosed with an adsorbent through the vessel of the pumping element, with the exception of an outer cavity which is connected to the outer side surface of the vessel.
  • the cryogen container takes up a relatively large volume of the pumping element, which has no direct participation in the pumping process, although it could accommodate adsorbents and porous screens.
  • the outer cavity surrounding the vessel with adsorbent As for the outer cavity surrounding the vessel with adsorbent, it has a low effectiveness due to the low conductivity of a play between it and a radiation screen. From DIE 'sem reasons said cryogenic pump has only an insufficient effect of sorption capacity or speed.
  • the invention has for its object to provide a cryogenic adsorption pump, in the pumping element thermally conductive frames and frame-porous screens with respect to the vessel for cryogen which cools an adsorbent located in cavities between the said frames are arranged so that the volume of these Cavities and the surface of the frame-porous screens are increased, as a result of which the adsorption capacity of the pump and its effectiveness are increased.
  • the diameter of the heat-conducting frames and the frame-porous screens can be increased, which increases the surface area of the porous screens and consequently the speed of action of the pump.
  • the diameter of the heat-conducting frames and the frame-porous screens is increased, the volume of the cavities is also increased with an adsorbent, ie the amount thereof, which increases the sorption capacity of a pump.
  • cryogenic adsorption pump according to the invention is shown in longitudinal section.
  • the cryogenic adsorption pump has a housing 1 with a cover 2, which is provided with an inlet connection 3.
  • a pumping element which contains a toroidal cryogen container 4, on the cover 5 of which coaxially arranged heat-conducting frames 6, 7, 8 and frame-porous screens 9 are welded.
  • the outer 6 and the inner 8 heat-conducting frame are made of a dense sheet material and other heat-conducting frames 7 are perforated. Porous copper, for example, can be used as the material for the frames 9.
  • the outer porous screen 9 is on the inside of the heat-conducting frame 6, 'the inner porous screen on the outside of the heat-conducting frame 8 and the other porous screens 9 are arranged on both sides of the perforated heat conductor 7.
  • Annular spaces 10 between the heat-conducting frames 6, 7, 8 and the porous screens 9 adjoining them are filled with an adsorbent, for example with activated carbon.
  • a perforation in the heat conductors 7, which are surrounded by adsorbents from the two sides, is to accelerate a compensation operation of the equilibrium gas pressure carried out over the adsorbent.
  • the cavities "10 are covered from above by rings 11.
  • Annular spaces 12 between adjacent porous screens 9 serve to pass through the evacuated gases.
  • tubes 13 are welded airtight, which are connected to its cavity.
  • the upper ends of these tubes 13 are led out of the housing 1 and fastened in its cover 2 with the aid of connecting pieces 14.
  • the tubes 13 are used for filling the cryogen in the vessel 4 and for evacuating the cryogen vapors to lower the cryogen temperature in the vessel 4.
  • the pumping element is enclosed by a radiation shield to reduce the supply of heat by radiation from the housing 1.
  • the radiation shield contains a toroidal cryogenic agent vessel 15, a frame 16 and an arrow screen 17.
  • the vessel 4 of the pumping element is arranged, and frame 16 is attached to the vessel 15 in an airtight manner at its lower part.
  • two tubes 18 and 19 are inserted, of which the tube 18 is used for filling the cryogen in the vessel 15 and the tube 19 for the escape of the cryogen vapors.
  • the frame 16 has a cover 20 which is connected to the inlet connection 3 via a thermal bridge 21 designed as a corrugated tube.
  • Sockets 22 are welded to the cover 20 of the frame 16, the upper ends of which are welded to the tubes 13 and the stubs 14 in a vacuum-tight manner.
  • the arrow screen 17 is arranged between the pumping element and the inlet connection and is fastened to the upper part of the frame 16 with good thermal contact.
  • a thin-walled tube 23 is arranged in the interior of the vessel 15 of the radiation shield, the lower end of which is welded to a flange 24, which is fastened to the bottom 25 of the housing 1, and the upper end to the lid of the vessel 15, the cross section of the tube 23 covered in its upper part by an arrow screen 26.
  • This cavity 27 can be evacuated via a nozzle 28, which can be arranged, for example, on the bottom 25 of the housing 1. So that a required vacuum level is maintained in the cavity 27 in the operating state, the frame 16 has an annular recess 29 with adsorbent, which is covered by a porous screen 30.
  • An additional screen 31 is arranged between the housing 1 and the radiation shield, which reduces the supply of heat by radiation from the housing 1 to the radiation shield.
  • nozzles 32 On a side wall of the inlet nozzle 3 there are two nozzles 32, one of which is used to connect a backing pump via a valve and the other is used to connect a manometric transducer to control a vacuum level in the inlet nozzle 3.
  • discs 33 and 34 with openings 35 and 36 are arranged along the axis thereof, and the arrow screens 17 and 26 have openings 37 and 38 for gripping through a transport rod, which with the aid of a threaded connection in the opening 36 of the disc 34 and in blind flanges 39, 40 is attached.
  • All surfaces of the pump elements with the exception of surfaces of the arrow screens 17 and 26, which face the volume to be evacuated, have a two-layer coating made of a dense aluminum layer with a thickness of not less than 1 ⁇ m and an aluminum oxide layer with a thickness of 2 to 20 nm.
  • the arrow screens 17 and 26 have a coating with a .thickness not less than 150 microns with a degree of blackening not less than 0.99 in a wavelength range 2 to 200 microns.
  • the pump according to the invention works as follows.
  • a working chamber to be evacuated (not shown) is connected to the inlet connection 3 directly or via a closure (not shown).
  • a mechanical (not shown) fore-vacuum pump is closed on the nozzle 28 via a valve (not shown) with a metal seal and the protective vacuum chamber 27 is evacuated until a pressure of approx. 100 to 40 Pa is achieved therein becomes.
  • a cryogen for example liquid nitrogen, is filled into the vessel 15 of the radiation shield via the tube 18.
  • the adsorbent which is located in the annular recess 29 of the frame 16, also cools, which results in a pressure drop in the space 27 of up to 10 -4 to 10- 5 Pa and below and a strong reduction in heat exchange by residual gases caused between the housing 1 and the radiation shield.
  • cryogen which has a temperature below that of the cryogen in the vessel 15, e.g. Liquid hydrogen or helium, or the same cryogen, e.g. Liquid nitrogen.
  • the cryogen temperature in the vessel 4 is reduced by evacuating the cryomite vapors with the aid of the mechanical forevacuum pump which is connected to the pipes 13.
  • the backing pump e.g. 16 l / s after two hours of operation, the temperature of the frozen nitrogen is reduced to about 55 K and after another four hours up to 50 K and below.
  • the heat conductors 6, 7 and 8 cool the adsorbent which is located in annular cavities 10 of the pumping element.
  • Adsorbent swallows the gases coming out of the working chamber and ensures a limit pressure of 10 -7 Pa and below.
  • a temperature of the adsorbent of approximately 50 K its sorption capacity increases by several orders of magnitude in comparison with that at a temperature of 77.4 K, ie an equilibrium pressure is reduced by 3 to 4 orders of magnitude after adsorption of one and the same amount of gas.
  • the pump is ready for operation and the working chamber can be evacuated.
  • Non-adsorbable gases (helium, neon) are generated with the help of an ion atomizing pump (not shown) removed, which is connected to the flange 24.
  • cavities 10 with adsorbent are distributed over the practically entire cross section of the pump in an area which is enclosed by the frame 16 of the radiation screen, the entire surface of the porous screens 9, the volume of the cavities 10 with adsorbent and the cross-sectional area of the cavities 12 enlarged to flow through the evacuated gases between the adjacent porous screens 9.
  • the effectiveness of the pump with the construction according to the invention is approximately 30% and its sorption capacity is approximately 15% in comparison with the known pump (Zhurnal tekhnicheskoi fiziki, Volume 58, Issue 10, 1988, October, Nauka (Leningrad branch) MP Larin "Kondensatsionno-adsorbtsionnaya i sorbtsionnaya otkachka pri Temperaturakh tverdogo azota", pp. 2026 to 2039) with the same dimensions with this pump.
  • An additional advantage of the invention which is due to the arrangement of the heat pipes 6, 7, 8 and the porous screens 9 on the lid 5 of the vessel 4 of the pumping element, is that the tubes 13 of the vessel 4 have a greater length than in the known one Pump, as a result, heat input through them into the vessel 4 is reduced. So that the required speed when sucking the nitrogen vapors from the vessel 4 is ensured, the through. Knife of the tubes 13 are enlarged.
  • the invention can be used for evacuating plants for vapor deposition and plasma-chemical plants, for example in the electronics industry, and for producing an ultra-pure oil-free vacuum in a pressure range from 10 2 to 10 -7 Pa when solving several tasks in vacuum technology.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

Im Abpumpelement der Kryogenen Adsorptionspumpe ist Adsorptionsmittel in ringförmigen Hohlräumen (10) zwischen wärmeleitenden Zargen (6, 7, 8) und Zargen-porösen Schirmen (9) untergebracht ist, wobei die Zargen (6, 7, 8, 9) unter Sicherstellung eines Wärmekontaktes auf dem Deckel (5) des Kryomittelgefäßes (4) befestigt sind.

Figure imgaf001
In the pumping element of the cryogenic adsorption pump, adsorbent is accommodated in annular cavities (10) between heat-conducting frames (6, 7, 8) and frame-porous screens (9), the frames (6, 7, 8, 9) while ensuring thermal contact are attached to the lid (5) of the cryogen container (4).
Figure imgaf001

Description

Gebiet der TechnikTechnical field

Die Erfindung bezieht sich auf Vakuumtechnik und insbesondere auf kryogene Adsorptionspumpen und kann zur Erzeugung eines ultrareinen ölfreien Vakuums in einem Druckbereich von 102 bis 10-7 Pa beim Evakuieren beliebiger Gase, Helium ausgenommen, darunter auch aggressiver, in Kammern verschiedener Zweckbestimmung mit einem Volumen von 0,01 m3 bis auf mehrere Hunderte Kubikmeter verwendet werden.The invention relates to vacuum technology and in particular to cryogenic adsorption pumps and can be used to generate an ultra-pure oil-free vacuum in a pressure range of 10 2 to 10- 7 Pa when evacuating any gases, except helium, including more aggressive, in chambers of various purposes with a volume of 0.01 m 3 can be used up to several hundreds of cubic meters.

Vorhergehender Stand der TechnikPrevious state of the art

Es ist eine kryogene Adsorptionspumpe mit einem Abpumpelement bekannt (SU, A, 1333833), das aus einem ringförmigen Gefäß mit Flüssigstickstoff, einem porösen Schirm, der koaxi al mit dem Gefäß in einem Raum angeordnet ist, der durch die innere Seitenfläche des Gefäßes umschlossen ist, und einem Adsorptionsmittel besteht, das in einem Spalt zwischen der inneren Seitenfläche des Gefäßes und dem porösen Schirm untergebracht ist.There is a cryogenic adsorption pump with a pumping element known (SU, A, 1333833), which consists of an annular vessel with liquid nitrogen, a porous screen, which is arranged coaxially with the vessel in a space which is enclosed by the inner side surface of the vessel , and an adsorbent, which is housed in a gap between the inner side surface of the vessel and the porous screen.

Ein Nachteil dieser Pumpe besteht darin, daß bei der Flüssigstickstofftemperatur das Adsorptionsmittel eine kleine Sorptionsfähigkeit bei niedrigen (unter 10-3 - 10-4 Pa) Gleichgewichtsdrücken der adsorbierbaren Gase aufweist. Deshalb kann die Pumpe keine Grenzdrücke unter 10-3 Pa sogar nach einer kurzzeitigen Gasbelastung erzielen. Zur Steigerung der Sorptionsfähigkeit der Pumpe verwendet man eine Kühlung des Adsorptionsmittels durch Feststickstoff bis zu einer Temperatur von 55-50 K. Es gelingt aber nicht, diese Temperatur des Adsorptionsmittels im Laufe einer längeren Zeit infolge einer größeren eigenen Wärmezufuhr ins Gefäß mit Stickstoff aufrechtzuerhalten, was eine schnelle Erwärmung des Feststickstoffes bewirkt, nachdem ein Abpumpen seiner Dämpfe beendet worden ist. Ein Betrieb der Pumpe wird dadurch erschwert, daß man des öfteren das Gefäß mit Flüssigstickstoff aufzufüllen und dessen Dämpfe wiederholt abzupumpen hat.A disadvantage of this pump is that at the liquid nitrogen temperature the adsorbent has a low sorption capacity at low (below 10 -3 - 10 -4 Pa) equilibrium pressures of the adsorbable gases. Therefore, the pump cannot achieve limit pressures below 10- 3 Pa even after a brief gas exposure. To increase the sorption capacity of the pump, the adsorbent is cooled by solid nitrogen up to a temperature of 55-50 K. However, it is not possible to maintain this temperature of the adsorbent over a longer period of time as a result of a greater supply of heat to the vessel with nitrogen, which the solid nitrogen heats up quickly after its vapors have been pumped out. Operation of the pump is made more difficult by the fact that one often has to fill the vessel with liquid nitrogen and repeatedly pump out its vapors.

Bekannt ist weiterhin eine kryogene Adsorptionspumpe (Zhurnal tekhniche.skoi fiziki, Band 28, Heft 10, 1988, Oktober, Nauka (Leningrader Zweigstelle), M.P. Larin "Kondensatsionno-adsorptsionnaya i sorbtsionnaya otkachka pri temperaturakh twerdogo azota", S. 2026 bis 2039) mit einem Gehäuse mit einem Deckel, der mit einem Eingangsstutzen zum Anschluß eines zu evakuierenden Volumens versehen ist, und den im Gehäuse untergebrachten einem Abpumpelement und einem gekühlten Strahlungsschirm, der das Abpumpelement umschließt. Das Abpumpelement ist als ein ringförmiges.Gefäß für Kryomittel ausgeführt und enthält die in einem Raum, der durch die innere Gefäßwand abgegrenzt ist, koaxial damit angeordneten perforierten wärmeleitenden Zargen und Zargen-poröse Schirme. Der Gafäßboden, die wärmeleitenden Zargen und die Zargen-porösen Schirme sind an einen scheibenförmigen Wärmeleiter angeschweißt, damit ein Wärmekontakt zwischen dem Gefäß und den wärmeleitenden Zargen sichergestellt wird. Zwei Zargen-poröse Schirme sind beiderseits der Gefäßwände und die sonstigen beiderseits der wärmeleitenden Zargen angeordnet, dabei sind ringförmige Räume zwischen den Gefäßwänden und den Zargen-porösen Schirmen, sowie ringförmige Räume zwischen den wärmeleitenden Zargen und den diesen nächstliegenden Zargen-porösen Schirmen durch Adsorptionsmittel gefüllt. Von oben sind die besagten Räume durch Ringe abgedeckt. Ringförmige Hohlräume zwischen benachbarten Zargen--porösen Schirmen stehen mit dem Eingangsstutzen der Pumpe in Verbindung. Das Kryomittelgefäß hat einen ringförmigen Deckel mit zwei Rohren, mit deren Hilfe in das Gefäß Kryomittel eingefüllt und dessen Dämpfe evakuiert werden. Diese Rohre sind mit den oberen Enden am Gehäusedeckel befestigt.A cryogenic adsorption pump is also known (Zhurnal tekhniche.skoi fiziki, Volume 28, Issue 10, 1988, October, Nauka (Leningrad branch), MP Larin "Kondatsatsionno-adsorptsionnaya i sorbtsionnaya otkachka pri Temperaturakh twerdogo azota", pp. 2026 to 2039) with a housing with a cover , which is provided with an inlet connection for connecting a volume to be evacuated, and the housed in the housing a pumping element and a cooled radiation shield, which surrounds the pumping element. The pumping element is designed as a ring-shaped vessel for cryogenic agents and contains the perforated heat-conducting frames and frame-porous screens arranged coaxially therewith in a space which is delimited by the inner vessel wall. The Gafäßboden, the heat-conducting frames and the frame-porous screens are welded to a disc-shaped heat conductor, so that a thermal contact between the vessel and the heat-conducting frames is ensured. Two frame-porous screens are arranged on both sides of the vessel walls and the other on both sides of the heat-conducting frames, annular spaces between the vessel walls and the frame-porous screens, as well as annular spaces between the heat-conducting frames and the frame-porous screens closest to them are filled with adsorbents . From above, the rooms are covered by rings. Annular cavities between adjacent frames - porous screens are connected to the inlet connection of the pump. The cryogen container has an annular lid with two tubes, with the help of which cryogen is filled into the container and its vapors are evacuated. The upper ends of these tubes are attached to the housing cover.

In dieser Pumpe ist durch Einführung eines durch Flüssigstickstoff gekühlten Strahlungsschirms eine Wärmezufuhr vom Gehäuse zum Abpumpelement bedeutend vermindert.In this pump, the introduction of a radiation screen cooled by liquid nitrogen significantly reduces the supply of heat from the housing to the pumping element.

Zur Steigerung der Adsorptionskapazität einer Pumpe, die eine 'der wesentlichsten Abpumpkennlinien der Pumpe ist, soll bei vorliegenden Pumpenabmessungen das Adsorptionsmittel ein so großes Volumen besetzen, wie es nur möglich ist, und zur Steigerung einer Wirkungsschnelligkeit der Pumpe soll die Oberfläche des Adsorptionsmittels und der porösen Schirme so groß wie nur möglich sein. In der beschriebenen Pumpe sind Hohlräume mit einem Adsorptionsmittel durch das Gefäß des Abpumpelementes mit Ausnahme eines äußeren Hohlraums umschlossen, der an die äußere Seitenfläche des Gefäßes angeschlossen ist. Anders gesagt nimmt das Kryomittelgefäß einen verhältnismäßig großen Volumenteil des Abpumpelementes in Anspruch, der keine unmittelbare Teilnahme am Abpumpvorgang hat, obwohl er Adsorptionsmittel und poröse Schirme aufnehmen könnte. Was den das Gefäß umschließenden Außenhohlraum mit Adsorptionsmittel betrifft, weist er eine niedrige Wirksamkeit infolge niedriger Leitfähigkeit eines Spiels zwischen ihm und einem Strahlungsschirm auf. Aus die- 'sem Gründe besitzt die besagte kryogene Pumpe eine nur unzureichende Sorptionskapazität bzw. Wirkungsschnelligkeit.In order to increase the adsorption capacity of a pump, which is one of the most essential pumping characteristics of the pump, the adsorbent should occupy as large a volume as possible in the present pump dimensions and to increase the effectiveness of the pump the surface of the adsorbent and the porous screens should be as large as possible. In the pump described, cavities are enclosed with an adsorbent through the vessel of the pumping element, with the exception of an outer cavity which is connected to the outer side surface of the vessel. In other words, the cryogen container takes up a relatively large volume of the pumping element, which has no direct participation in the pumping process, although it could accommodate adsorbents and porous screens. As for the outer cavity surrounding the vessel with adsorbent, it has a low effectiveness due to the low conductivity of a play between it and a radiation screen. From DIE 'sem reasons said cryogenic pump has only an insufficient effect of sorption capacity or speed.

Offenbarung der ErfindungDisclosure of the invention

Der Erfindung liegt die Aufgabe zugrunde, eine kryogene Adsorptionspumpe zu schaffen, in deren Abpumpelement wärmeleitende Zargen und Zargen-poröse Schirme gegenüber dem Gefäß für Kryomittel, das ein sich in Hohlräumen zwischen den besagten Zargen befindenden Adsorptionsmittel abkühlt, so angeordnet sind, daß das Volumen dieser Hohlräume und die Oberfläche der Zargen-porösen Schirme vergrößert werden, im Ergebnis wovon die Adsorptionskapazität der Pumpe und deren Wirkungsschnelligkeit gesteigert werden.The invention has for its object to provide a cryogenic adsorption pump, in the pumping element thermally conductive frames and frame-porous screens with respect to the vessel for cryogen which cools an adsorbent located in cavities between the said frames are arranged so that the volume of these Cavities and the surface of the frame-porous screens are increased, as a result of which the adsorption capacity of the pump and its effectiveness are increased.

Diese Aufgabe wird bei einer kryogenen Adsorptionspumpe mit einem durch einen abgekühlten Strahlungsschirm umschlossenen Abpumpelement, das ein Adsorptionsmittel, das in den _durch koaxial angeordnete wärmeleitunde Zargen und Zargen--poröse Schirme gebildeten ringförmigen Hohlräumen unterbebracht ist, und ein Kryomittelgefäß aufweist, das in Wärmekontakt mit den besagten Zargen steht und einen Deckel hat, erfindungsgenäß dadurch gelöst, daß die wärmeleitenden Zargen und die Zargen-porösen Schirme auf dem Deckel des Kryomittelgefäßes befestigt sind.This object is achieved in a cryogenic adsorption pump with a pump-off element enclosed by a cooled radiation shield, which has an adsorbent which is accommodated in the annular cavities formed by coaxially arranged heat-conducting frames and frame-porous screens, and a cryogenic agent vessel which is in thermal contact with the said frames stands and has a lid, solved according to the invention in that the heat-conducting frames and the frame-porous screens are attached to the lid of the cryogenic agent vessel.

Eine Befestigung der wärmeleitenden Zargen und der Zargen-porösen Schirme am Deckel des Kryomittelgefäßes des Abpumpelementes macht es möglich, daß dieses Gefäß aus dem Sorptionsbereich unter den sorbierenden Teil der Pumpe verlegt wird. Dabei kann man den Durchmesser der wärmeleitenden Zargen und der Zargen-porösen Schirme vergrößern, wodurch die Oberfläche der porösen Schirme und folglich die Wirkungsschnelligkeit der Pumpe gesteigert werden. Bei Vergrößerung des Durchmessers der wärmeleitenden Zargen und der Zargen--porösen Schirme wird auch eine Volumenvergrößerung der Hohlräume mit einem Adsorptionsmittel, d.h. dessen Menge erzielt, wodurch die Sorptionskapazität einer Pumpe gesteigert wird.Fastening the heat-conducting frames and the frame-porous screens to the lid of the cryogen container of the Ab pump element makes it possible for this vessel to be moved from the sorption area under the sorbing part of the pump. The diameter of the heat-conducting frames and the frame-porous screens can be increased, which increases the surface area of the porous screens and consequently the speed of action of the pump. When the diameter of the heat-conducting frames and the frame-porous screens is increased, the volume of the cavities is also increased with an adsorbent, ie the amount thereof, which increases the sorption capacity of a pump.

Kurze Beschreibung der ZeichnungBrief description of the drawing

Nachstehend wird die Erfindung anhand einer ausführlichen Beschreibung der beste Variante deren Durchführung unter Bezugnahme auf eine Zeichnung näher erläutert, worin die erfindungsgemäße kryogene Adsorptionspumpe im Längsschnitt dargestellt ist.The invention is explained in more detail below on the basis of a detailed description of the best variant of its implementation with reference to a drawing, in which the cryogenic adsorption pump according to the invention is shown in longitudinal section.

Beste AusfÜhrungsvariante der ErfindungBest embodiment of the invention

Die erfindungsgemäße kryogene Adsorptionspumpe hat ein Gehäuse 1 mit einem Deckel 2, der mit einem Eingangsstutzen 3 versehen ist. Im Gehäuse 1 befindet sich ein Abpumpelement, das ein toroidförmiges Kryomittelgefäß 4 enthält, an dessen Deckel 5 koaxial angeordnete wärmeleitende Zargen 6, 7, 8 und Zargen-poröse Schirme 9 angeschweißt sind. Die äußere 6 und die innere 8 wärmeleitende Zarge sind aus einem dichten Blechmaterial hergestellt und sonstige wärmeleitende Zargen 7 sind perforiert. Als Stoff für die Zargen 9 kann z.B.poröses Kupfer verwendet werden. Der äußere poröse Schirm 9 ist auf der Innenseite der wärmeleitenden Zarge 6, 'der innere poröse Schirm auf der Außenseite der wärmeleitenden Zarge 8 und die anderen porösen Schirme 9 sind beiderseits der perforierten Wärmeleiter 7 angeordnet. Ringräume 10 zwischen den wärmeleitenden Zargen 6, 7, 8 und den an diese angrenzenden porösen Schirmen 9 sind mit einem Adsorptionsmittel, z.B. mit Aktivkohle gefüllt. Eine Lochung in den Wärmeleitern 7, die durch Adsorptionsmittel von den beiden Seiten umschlossen sind, ist zur Beschleunigung eines Ausgleichsvorgangs des Gleichgewichtsgasdrucks über dem Adsorptionsmittel ausgeführt. Von oben sind die Hohlräume" 10 durch Ringe 11 abgedeckt. Ringräume 12 zwischen benachbarten porösen Schirmen 9 dienen zum Durchgehen der evakuierten Gase.The cryogenic adsorption pump according to the invention has a housing 1 with a cover 2, which is provided with an inlet connection 3. In the housing 1 there is a pumping element, which contains a toroidal cryogen container 4, on the cover 5 of which coaxially arranged heat-conducting frames 6, 7, 8 and frame-porous screens 9 are welded. The outer 6 and the inner 8 heat-conducting frame are made of a dense sheet material and other heat-conducting frames 7 are perforated. Porous copper, for example, can be used as the material for the frames 9. The outer porous screen 9 is on the inside of the heat-conducting frame 6, 'the inner porous screen on the outside of the heat-conducting frame 8 and the other porous screens 9 are arranged on both sides of the perforated heat conductor 7. Annular spaces 10 between the heat-conducting frames 6, 7, 8 and the porous screens 9 adjoining them are filled with an adsorbent, for example with activated carbon. A perforation in the heat conductors 7, which are surrounded by adsorbents from the two sides, is to accelerate a compensation operation of the equilibrium gas pressure carried out over the adsorbent. The cavities "10 are covered from above by rings 11. Annular spaces 12 between adjacent porous screens 9 serve to pass through the evacuated gases.

Am Deckel 5 des Gefäßes 4 sind zwei Rohre 13 luftdicht angeschweißt, die mit seinem Hohlraum in Verbindung stehen. Die oberen Enden dieser Rohre 13 sind aus dem Gehäuse 1 hinausgeführt und in dessen Deckel 2 mit Hilfe von Stutzen 14 befestigt. Die Rohre 13 dienen zum Kryomitteleinfüllen in Gefäß 4 und zum Evakuieren der Kryomitteldämpfe zur Senkung der Kryomitteltemperatur im Gefäß 4.On the lid 5 of the vessel 4, two tubes 13 are welded airtight, which are connected to its cavity. The upper ends of these tubes 13 are led out of the housing 1 and fastened in its cover 2 with the aid of connecting pieces 14. The tubes 13 are used for filling the cryogen in the vessel 4 and for evacuating the cryogen vapors to lower the cryogen temperature in the vessel 4.

Das Abpumpelement ist durch einen Strahlungsschirm zur Verminderung einer Wärmezufuhr durch Strahlung vom Gehäuse 1 umschlossen. Der Strahlungsschirm enthält ein toroidförmiges Kryomittelgefäß 15, eine Zarge 16 und einen Pfeilschirm 17. Das Gefäß 4 des Abpumpelementes angeordnet, und Zarge 16 ist an ihrem unteren Teil am Gefäß 15 luftdicht befestigt. In das Gefäß 15 sind zwei Rohre 18 und 19 eingeführt, von denen das Rohr 18 zum Kryomitteleinfüllen in das'Gefäß 15 und das Rohr 19 zum Entweichen der Kryomitteldämpfe dient. In ihrem oberen Teil hat die Zarge 16 einen Deckel 20, der über eine als Wellrohr ausgeführte Wärmebrücke 21 an den Eingangsstutzen 3 angeschlossen ist. Am Deckel 20 der Zarge 16 sind Stutzen 22 angeschweißt, deren obere Enden mit den Rohren 13 und den Stuzten 14 vakuumdicht verschweißt sind. Der Pfeilschirm 17 ist zwischen dem Abpumpelement und dem Eingangsstutzen angeordnet und bei einem guten Wärmekontakt am oberen Teil der Zarge 16 befestigt.The pumping element is enclosed by a radiation shield to reduce the supply of heat by radiation from the housing 1. The radiation shield contains a toroidal cryogenic agent vessel 15, a frame 16 and an arrow screen 17. The vessel 4 of the pumping element is arranged, and frame 16 is attached to the vessel 15 in an airtight manner at its lower part. In the vessel 15, two tubes 18 and 19 are inserted, of which the tube 18 is used for filling the cryogen in the vessel 15 and the tube 19 for the escape of the cryogen vapors. In its upper part, the frame 16 has a cover 20 which is connected to the inlet connection 3 via a thermal bridge 21 designed as a corrugated tube. Sockets 22 are welded to the cover 20 of the frame 16, the upper ends of which are welded to the tubes 13 and the stubs 14 in a vacuum-tight manner. The arrow screen 17 is arranged between the pumping element and the inlet connection and is fastened to the upper part of the frame 16 with good thermal contact.

Im Inneren des Gefäßes 15 des Strahlungsschirms ist ein dünnwandiges Rohr 23 angeordnet, dessen unteres Ende an einen Flansch 24, der am Boden 25 des Gehäuses 1 befestigt ist, und oberes Ende an den Deckel des Gefäßes 15 angeschweißt ist, Der Querschnitt des Rohrs 23 ist in dessen Oberteil durch einen Pfeilschirm 26 überdeckt.A thin-walled tube 23 is arranged in the interior of the vessel 15 of the radiation shield, the lower end of which is welded to a flange 24, which is fastened to the bottom 25 of the housing 1, and the upper end to the lid of the vessel 15, the cross section of the tube 23 covered in its upper part by an arrow screen 26.

Ein Raum, der durch die Zarge 16, eine Außenwand des Gefäßes 15, den Boden dieses Gefäßes, dessen Innenwand, das Rohr 23 und das Gehäuse 1 begrenzt ist, bildet einen Hohlraum 27 des sogenannten Schutzvakuums, das eine durch einen Wärmeaustausch durch Restgase in diesem Raum bedingte Wärmezufuhr vom Gehäuse 1 zum Abpumpelement vermindert. Dieser Hohlraum 27 kann über einen Stutzen 28 evakuiert werden, der z.B. am Boden 25 des Gehäuses 1 angeordnet sein kann. Damit im Betriebszustand ein erforderlicher Vakuumpegel im Hohlraum 27 aufrechterhalten wird, weist die Zarge 16 eine ringförmige Aussparung 29 mit Adsorptionsmittel auf, die durch einen porösen Schirm 30 überdeckt ist.A space which is delimited by the frame 16, an outer wall of the vessel 15, the bottom of this vessel, the inner wall, the tube 23 and the housing 1 forms a cavity 27 of the so-called protective vacuum, which is caused by a heat Exchange of heat caused by residual gases in this room from the housing 1 to the pumping element is reduced. This cavity 27 can be evacuated via a nozzle 28, which can be arranged, for example, on the bottom 25 of the housing 1. So that a required vacuum level is maintained in the cavity 27 in the operating state, the frame 16 has an annular recess 29 with adsorbent, which is covered by a porous screen 30.

Zwischen dem Gehäuse 1 und dem Strahlungsschirm ist ein zusätzlicher Schirm 31 angeordnet, der eine Wärmezufuhr durch Strahlung vom Gehäuse 1zum Strahlungsschirm herabsetzt.An additional screen 31 is arranged between the housing 1 and the radiation shield, which reduces the supply of heat by radiation from the housing 1 to the radiation shield.

Auf einer Seitenwand des Eingangsstutzens 3 sind zwei Stutzen 32 vorhanden, von denen der eine zum Anschluß einer Vorvakuumpumpe über ein Ventil und der andere zum Anschluß eines manometrischen Meßwandlers zur Kontrolle eines Vakuumpegels im Eingangsstutzen 3 dient.On a side wall of the inlet nozzle 3 there are two nozzles 32, one of which is used to connect a backing pump via a valve and the other is used to connect a manometric transducer to control a vacuum level in the inlet nozzle 3.

Im Kanal der Pumpe sind längs dessen Achse Scheiben 33 und 34 mit Öffnungen 35 bzw. 36 angeordnet, und die Pfeil schirme 17 und 26 weisen Öffnungen 37 bzw. 38 zum Durchgreifen einer Transportstange auf, die mit Hilfe einer Gewindeverbindung in der Öffnung 36 der Scheibe 34 und in Blindflanschen 39, 40 befestigt wird.In the channel of the pump, discs 33 and 34 with openings 35 and 36 are arranged along the axis thereof, and the arrow screens 17 and 26 have openings 37 and 38 for gripping through a transport rod, which with the aid of a threaded connection in the opening 36 of the disc 34 and in blind flanges 39, 40 is attached.

Alle Oberflänchen der Pumpenelemente, Oberflänchen der Pfeilschirme 17 und 26 ausgenommen, die dem zu evakuierenden Volumen zugekehrt sind, weisen einen zweischichtigen Überzug aus dichter Aluminiumschicht mit einer Dicke nicht unter 1 µm und aus Aluminiumoxidschicht mit einer Dicke von 2 bis 20 nm auf. Die Pfeilschirme 17 und 26 haben einen Überzug mit einer .Dicke nicht unter 150 µm mit einem Schwärzungsgrad nicht unter 0,99 in einem Wellenlängenbereich 2 bis 200 µm.All surfaces of the pump elements, with the exception of surfaces of the arrow screens 17 and 26, which face the volume to be evacuated, have a two-layer coating made of a dense aluminum layer with a thickness of not less than 1 μm and an aluminum oxide layer with a thickness of 2 to 20 nm. The arrow screens 17 and 26 have a coating with a .thickness not less than 150 microns with a degree of blackening not less than 0.99 in a wavelength range 2 to 200 microns.

Die erfindungsgemäße Pumpe funktioniert wie folgt.The pump according to the invention works as follows.

An den Eingangsstutzen 3 schließt man unmittelbar oder über einen (nicht eingezeichneten) Verschluß eine zu evakuierende (nicht eingezeichnete) Arbeitskammer an. An den Stutzen 28 schließt man über ein (nicht eingezeichnetes) Ventil mit einer Metalldichtung eine mechanische (nicht eingezeichnete) Vorvakuumpumpe und evakuiert den Schutzvakuumraum 27, bis darin ein Druck von ca.100 bis 40 Pa erzielt wird. Danach evakuiert man über einen der Ventile 32 und über ein (nicht eingezeichnetes) Ventil den Pumpenraum und die Arbeitskammer, falls diese an die Pumpe unmittelbar angeschlossen ist, bis zu einem Druck von auch ca.100 bis 40 Pa. Ins Gefäß 15 des Strahlungsschirms füllt man über das Rohr 18 ein Kryomittel, z.B. Flüssigstickstoff ein. Bei einer Abkühlung des Gefäßes 15 kühlt sich auch Adsorptionsmittel ab, das sich in der ringförmigen Aussparung 29 der Zarge 16 befindet, was eine Drucksenkung im Raum 27 bis zu 10-4 bis 10-5 Pa und darunter und eine starke Verminderung eines Wärmeaustauschs durch Restgasen zwischen dem Gehäuse 1 und dem Strahlungsschirm bewirkt.A working chamber to be evacuated (not shown) is connected to the inlet connection 3 directly or via a closure (not shown). A mechanical (not shown) fore-vacuum pump is closed on the nozzle 28 via a valve (not shown) with a metal seal and the protective vacuum chamber 27 is evacuated until a pressure of approx. 100 to 40 Pa is achieved therein becomes. Then one pumps one of the valves 32 and one valve (not shown) to evacuate the pump chamber and the working chamber, if this is directly connected to the pump, up to a pressure of approximately 100 to 40 Pa. A cryogen, for example liquid nitrogen, is filled into the vessel 15 of the radiation shield via the tube 18. When the vessel 15 cools, the adsorbent, which is located in the annular recess 29 of the frame 16, also cools, which results in a pressure drop in the space 27 of up to 10 -4 to 10- 5 Pa and below and a strong reduction in heat exchange by residual gases caused between the housing 1 and the radiation shield.

Dann füllt man in das Gefäß 4 des Abpumpelementes über eines der Rohre 13 Kryomittel ein, das eine Temperatur unter jener des Kryomittels im Gefäß 15 hat, z.B. Flüssigwasserstoff bzw. -helium, oder dasselbe Kryomittel, z.B. Flüssigstickstoff. Im letzteren Falle wird eine Senkung der Kryomitteltemperatur im Gefäß 4 durch ein Evakuieren der Kryomitdämpfe mit Hilfe der mechanischen Vorvakuumpumpe erzielt, die an die Rohre 13 angeschlossen ist. Bei einer Leistung der Vorvakuumpumpe von z.B. 16 l/s gelingt es nach zwei Stunden deren Betriebs die Temperatur des gefrorenen Stickstoffes bis zu ca. 55 K und nach weiteren vier Stunden bis zu 50 K und darunter zu senken.Then you fill into the vessel 4 of the pumping element via one of the tubes 13 cryogen which has a temperature below that of the cryogen in the vessel 15, e.g. Liquid hydrogen or helium, or the same cryogen, e.g. Liquid nitrogen. In the latter case, the cryogen temperature in the vessel 4 is reduced by evacuating the cryomite vapors with the aid of the mechanical forevacuum pump which is connected to the pipes 13. With a performance of the backing pump of e.g. 16 l / s after two hours of operation, the temperature of the frozen nitrogen is reduced to about 55 K and after another four hours up to 50 K and below.

Gleichzeitig mit dem Gefäß 4 wird über die Wärmeleiter 6, 7 und 8 Adsorptionsmittel gekühlt, das sich in ringförmigen Hohlräumen 10 des Abpumpelementes befindet. Adsorptionsmittel schluckt die aus der Arbeitskammer kommenden Gase und stellt einen Grenzdruck von 10-7 Pa und darunter sicher. Bei einer Temperatut des Adsorptionsmittels von ca. 50 K steigt dessen Sorptionsfähigkeit um mehrere Größenordnungen im Vergleich mit jener bei einer Temperatur von 77,4 K, d.h. ein Gleichgewichtsdruck wird nach Adsorption ein und derselben Gasmenge um 3 bis 4 Größenordnungen gesenkt. Nachdem die vorstehend angegebenen Arbeitsgänge ausgeführt worden sind, ist die Pumpe betriebsbereit und die Arbeitskammer kann evakuiert werden. Nicht adsorbierbare Gase (Helium, Neon) werden mit Hilfe einer (nicht eingezeichneten) Ionenzerstäuberpumpe entfernt, die am Flansch 24 angeschlossen wird.Simultaneously with the vessel 4, the heat conductors 6, 7 and 8 cool the adsorbent which is located in annular cavities 10 of the pumping element. Adsorbent swallows the gases coming out of the working chamber and ensures a limit pressure of 10 -7 Pa and below. At a temperature of the adsorbent of approximately 50 K, its sorption capacity increases by several orders of magnitude in comparison with that at a temperature of 77.4 K, ie an equilibrium pressure is reduced by 3 to 4 orders of magnitude after adsorption of one and the same amount of gas. After the above operations have been carried out, the pump is ready for operation and the working chamber can be evacuated. Non-adsorbable gases (helium, neon) are generated with the help of an ion atomizing pump (not shown) removed, which is connected to the flange 24.

Da Hohlräume 10 mit Adsorptionsmittel über den praktisch ganzen Querschnitt der Pumpe in einem Bereich, der durch die Zarge 16 des Strahlungsschirms umschlossen ist, verteilt sind, werden die gesamte Oberfläche der porösen Schirme 9, das Volumen der Hohlräume 10 mit Adsorptionsmittel und die Querschnittsfläche der Hohlräume 12 zum Durchströmen der evakuierten Gase zwischen den benachbarten porösen Schirmen 9 vergrößert. Im Ergebnis davon wird die Wirkungsschnelligkeit der Pumpe mit der erfindungsgemäßen Konstruktion ungefähr um 30% und deren Sorptionskapazität ungefähr um 15% im Vergleich mit der bekannten Pumpe (Zhurnal tekhnicheskoi fiziki, Band 58, Heft 10, 1988, Oktober, Nauka (Leningrader Zweigstelle) M.P.Larin "Kondensatsionno-adsorbtsionnaya i sorbtsionnaya otkachka pri temperaturakh tverdogo azota", S. 2026 bis 2039) bei den mit dieser Pumpe gleichen Abmessungen gesteigert.Since cavities 10 with adsorbent are distributed over the practically entire cross section of the pump in an area which is enclosed by the frame 16 of the radiation screen, the entire surface of the porous screens 9, the volume of the cavities 10 with adsorbent and the cross-sectional area of the cavities 12 enlarged to flow through the evacuated gases between the adjacent porous screens 9. As a result, the effectiveness of the pump with the construction according to the invention is approximately 30% and its sorption capacity is approximately 15% in comparison with the known pump (Zhurnal tekhnicheskoi fiziki, Volume 58, Issue 10, 1988, October, Nauka (Leningrad branch) MP Larin "Kondensatsionno-adsorbtsionnaya i sorbtsionnaya otkachka pri Temperaturakh tverdogo azota", pp. 2026 to 2039) with the same dimensions with this pump.

Ein zusätzlicher Vorteil der Erfindung, der durch Anordnung der Wärmeleitungen 6, 7, 8 und der porösen Schirme 9 am Deckel 5 des Gefäßes 4 des Abpumpelementes bedingt ist, besteht darin, daß die Rohre 13 des Gefäßes 4 eine größere Länge haben als in der bekannten Pumpe, Infolgedessen wird eine Wärmezufuhr über sie in das Gefäß 4 vermindert. Damit die erforderliche Schnelligkeit beim Absaugen der Stickstoffdämpfe aus dem Gefäß 4 sichergestellt ist, kann der Durch- . messer der Rohre 13 vergrößert werden.An additional advantage of the invention, which is due to the arrangement of the heat pipes 6, 7, 8 and the porous screens 9 on the lid 5 of the vessel 4 of the pumping element, is that the tubes 13 of the vessel 4 have a greater length than in the known one Pump, as a result, heat input through them into the vessel 4 is reduced. So that the required speed when sucking the nitrogen vapors from the vessel 4 is ensured, the through. Knife of the tubes 13 are enlarged.

Industrielle AnwendbarkeitIndustrial applicability

Die Erfindung kann zum Evakuieren von Anlagen zum Bedampfen und plasmachemischen Anlagen z.B. in der Elektronenindustrie, sowie zur Erzeugung eines ultrareinen ölfreien Vakuums in einem Druckbereich von 102 bis 10-7 Pa bei Lösung mehrerer Aufgaben in der Vakuumtechnik zum Einsatz kommen.The invention can be used for evacuating plants for vapor deposition and plasma-chemical plants, for example in the electronics industry, and for producing an ultra-pure oil-free vacuum in a pressure range from 10 2 to 10 -7 Pa when solving several tasks in vacuum technology.

Claims (1)

Kryogene Adsorptionspumpe mit einem durch einen gekühlten Strahlungsschirm umschlossenen Abpumpelement, das ein in ringförmigen Hohlräumen (10), die durch koaxial angeordnete wärmeleitende Zargen (6, 7, 8) und Zargen- poröse Schirme (9) gebildet sind, untergebachtes Adsorptionsmittel und ein Kryomittelgefäß (4) enthält, das einen Wärmekontakt mit den besagten Zargen (6, 7, 8, 9) aufweist und einen Deckel (5) hat, dadurch gekennzeichnet , daß die wärmeleitenden Zargen (6, 7, 8) und die Zargen-porösen Schirme (9) auf dem Deckel (5) des Kryomittelgefäßes (4) befestigt sind.Cryogenic adsorption pump with a pump-off element enclosed by a cooled radiation shield, which has an adsorbent and a cryogen container () in annular cavities (10) formed by coaxially arranged heat-conducting frames (6, 7, 8) and frame-porous screens (9). 4), which has a thermal contact with said frames (6, 7, 8, 9) and has a cover (5), characterized in that the heat-conducting frames (6, 7, 8) and the frame-porous screens ( 9) are attached to the lid (5) of the cryogenic agent vessel (4).
EP19890903490 1988-03-10 1989-02-10 Cryogenic adsorption pump Withdrawn EP0394452A4 (en)

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SU4391234 1988-03-10
SU884391234A SU1682628A1 (en) 1988-03-10 1988-03-10 Cryoabsorption pump

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400604A (en) * 1990-11-19 1995-03-28 Leybold Ag Cryopump and process for regenerating said cryopump

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1682628A1 (en) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryoabsorption pump
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
AT398849B (en) * 1992-09-08 1995-02-27 Sitte Hellmuth CHAMBER FOR FREEZING DRYING BY CRYOSORPTION
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US5799493A (en) * 1996-09-05 1998-09-01 Helix Technology Corporation Corrosion resistant cryopump
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
US6438992B1 (en) * 2000-10-18 2002-08-27 Thermal Products Development, Inc. Evacuated sorbent assembly and cooling device incorporating same
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US20070051242A1 (en) * 2005-09-08 2007-03-08 Petrik Viktor I Configurations and methods for assisted condensation

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL251312A (en) * 1960-05-06 1900-01-01
NL251342A (en) * 1960-05-07
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3416326A (en) * 1967-06-02 1968-12-17 Stuffer Rowen Efficient nitrogen trap
FR1549434A (en) * 1967-10-20 1968-12-13
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide
DE2208743A1 (en) * 1971-02-26 1972-09-07 Air Liquide Method and device for gas transmission
FR2146100B2 (en) * 1971-07-16 1974-03-29 Air Liquide
SU547549A1 (en) * 1974-07-05 1977-02-25 Предприятие П/Я А-3605 Adsorption pump
SU659792A2 (en) * 1977-12-06 1979-04-30 Предприятие П/Я В-8851 Initial vacuum cryogenic trap
SU696176A2 (en) * 1978-04-12 1979-11-05 Предприятие П/Я В-8851 Adsorption pump
SU769080A1 (en) * 1978-07-31 1980-10-07 Предприятие П/Я В-8851 Cryogenic vacuum pump
SU992814A2 (en) * 1981-12-31 1983-01-30 Физико-технический институт низких температур АН УССР Cryogenic condensation pump
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
JPS6065287A (en) * 1983-09-20 1985-04-15 Toshiba Corp Cryosorption pump
SU1333833A1 (en) * 1985-08-19 1987-08-30 Организация П/Я М-5273 Cryoadsorption pump
SU1439278A1 (en) * 1987-03-09 1988-11-23 Предприятие П/Я Р-6681 Sorption vacuum pump
SU1698481A1 (en) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic adsorption pump
SU1698482A1 (en) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic condensate extraction pump
SU1682628A1 (en) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryoabsorption pump

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KEINE WEITERE DOKUMENTEN ERMITTELT. *
See also references of WO8908781A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400604A (en) * 1990-11-19 1995-03-28 Leybold Ag Cryopump and process for regenerating said cryopump

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EP0394452A4 (en) 1991-01-23
SU1682628A1 (en) 1991-10-07
US4979369A (en) 1990-12-25
AU623387B2 (en) 1992-05-14
AU3286389A (en) 1989-10-05
EP0363497A4 (en) 1991-01-23
EP0363497A1 (en) 1990-04-18
WO1989008780A1 (en) 1989-09-21
JPH02503461A (en) 1990-10-18
WO1989008781A1 (en) 1989-09-21
JPH02503462A (en) 1990-10-18
AU4188589A (en) 1989-10-05
AU615342B2 (en) 1991-09-26
US5014517A (en) 1991-05-14

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