EP0112492A3 - Alarm and control system for semiconductor manufacturing plants - Google Patents

Alarm and control system for semiconductor manufacturing plants Download PDF

Info

Publication number: EP0112492A3
Authority: EP; European Patent Office
Prior art keywords: alarm; control system; semiconductor manufacturing; manufacturing plants; plants
Prior art date: 1982-11-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP83111572A

Other versions

EP0112492B1 (en

EP0112492A2 (en

Inventor

Shoichi C/O Nohmi Bosai Kogyo Co. Ltd. Kimura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nohmi Bosai Ltd

Original Assignee

Nohmi Bosai Kogyo Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-11-27

Filing date

1983-11-19

Publication date

1987-08-26

1983-11-19 Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd

1984-07-04 Publication of EP0112492A2 publication Critical patent/EP0112492A2/en

1987-08-26 Publication of EP0112492A3 publication Critical patent/EP0112492A3/en

1990-01-10 Application granted granted Critical

1990-01-10 Publication of EP0112492B1 publication Critical patent/EP0112492B1/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
- G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Business, Economics & Management (AREA)
Emergency Management (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Emergency Alarm Devices (AREA)
Fire-Detection Mechanisms (AREA)
Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
Fire Alarms (AREA)

EP19830111572 1982-11-27 1983-11-19 Alarm and control system for semiconductor manufacturing plants Expired EP0112492B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP206888/82		1982-11-27
JP20688882A JPS5998293A (en)	1982-11-27	1982-11-27	Alarm and controller for semiconductor plant or the like

Publications (3)

Publication Number	Publication Date
EP0112492A2 EP0112492A2 (en)	1984-07-04
EP0112492A3 true EP0112492A3 (en)	1987-08-26
EP0112492B1 EP0112492B1 (en)	1990-01-10

Family

ID=16530706

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP19830111572 Expired EP0112492B1 (en)	1982-11-27	1983-11-19	Alarm and control system for semiconductor manufacturing plants

Country Status (4)

Country	Link
EP (1)	EP0112492B1 (en)
JP (1)	JPS5998293A (en)
DE (1)	DE3381099D1 (en)
ES (1)	ES527814A0 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR910000246Y1 (en) *	1984-07-11	1991-01-18	히로시 세끼	Composite fire sensor
JP2539067B2 (en) *	1990-02-20	1996-10-02	富士通株式会社	Low pressure vapor phase growth equipment
WO2005091238A2 (en) *	2004-03-23	2005-09-29	Du Plessis Jacobus Petrus Fran	Fire preventing or extinguishing system for an appliance
US20140358300A1 (en) *	2013-03-15	2014-12-04	Macronix International Co., Ltd.	Portable Control System for Cylinder Cabinet

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2180423A1 (en) *	1972-04-17	1973-11-30	Securitex Sarl
FR2226813A5 (en) *	1973-04-04	1974-11-15	Cifal	Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) *	1974-05-17	1976-05-04	Compugraphic Corporation	Character image generation apparatus and CRT phototypesetting system
US4069018A (en) *	1976-09-28	1978-01-17	Weyerhaeuser Company	Explosive gas monitoring method and apparatus
US4219806A (en) *	1978-09-15	1980-08-26	American District Telegraph Company	Dual alarm gas detector
US4267889A (en) *	1978-12-27	1981-05-19	Williams Robert M	Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) *	1980-03-21	1983-01-25	New Cosmos Electric Company Limited	Gas leakage detector

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS54639B2 (en) *	1971-08-10	1979-01-12
JPS5323195A (en) *	1976-08-16	1978-03-03	Otsuka Kagaku Yakuhin	Method of treating flame resistance for inflammable organic material and flame resisting composition
NL8003068A (en) *	1980-05-28	1982-01-04	Naarden & Shell Aroma Chem	PERFUME COMPOSITIONS AND PERFUMED MATERIALS AND ARTICLES CONTAINING ESTERS OF BICYCLIC MONOTERPEENIC ACIDS AS RAW MATERIAL.

1982
- 1982-11-27 JP JP20688882A patent/JPS5998293A/en active Pending
1983
- 1983-11-19 EP EP19830111572 patent/EP0112492B1/en not_active Expired
- 1983-11-19 DE DE8383111572T patent/DE3381099D1/en not_active Expired - Fee Related
- 1983-11-25 ES ES527814A patent/ES527814A0/en active Granted

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2180423A1 (en) *	1972-04-17	1973-11-30	Securitex Sarl
FR2226813A5 (en) *	1973-04-04	1974-11-15	Cifal	Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) *	1974-05-17	1976-05-04	Compugraphic Corporation	Character image generation apparatus and CRT phototypesetting system
US4069018A (en) *	1976-09-28	1978-01-17	Weyerhaeuser Company	Explosive gas monitoring method and apparatus
US4219806A (en) *	1978-09-15	1980-08-26	American District Telegraph Company	Dual alarm gas detector
US4267889A (en) *	1978-12-27	1981-05-19	Williams Robert M	Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) *	1980-03-21	1983-01-25	New Cosmos Electric Company Limited	Gas leakage detector

Also Published As

Publication number	Publication date
DE3381099D1 (en)	1990-02-15
ES8505125A1 (en)	1985-04-16
EP0112492B1 (en)	1990-01-10
JPS5998293A (en)	1984-06-06
EP0112492A2 (en)	1984-07-04
ES527814A0 (en)	1985-04-16

Publication	Publication Date	Title
DE3460163D1 (en)	1986-07-03	Thermoelectric plant
HK1008104A1 (en)	1999-04-30	Plant management system
DE3378872D1 (en)	1989-02-09	Semiconductor devices and method for making the same
GB2075751B (en)	1983-12-21	Programmable semiconductor devices and their manufacture
DE3378391D1 (en)	1988-12-08	Wafer orientation system
DE3370387D1 (en)	1987-04-23	Alarm system
GB8416604D0 (en)	1984-08-01	Restraining element for actuator
EP0092924A3 (en)	1985-06-26	Reactor temperature control systems and methods
GB2177529B (en)	1989-07-12	Alarm systems
GB2124763B (en)	1986-08-28	Alarm system
GB8430740D0 (en)	1985-01-16	Plant
GB8300189D0 (en)	1983-02-09	Coal-milling plant
EP0112490A3 (en)	1987-09-16	Alarm and control system for semiconductor manufacturing plants
GB2104290B (en)	1985-08-21	Semiconductor device and method for manufacturing the same
GB2094123B (en)	1984-09-19	Bags for potting plants and the potting of plants
GB8422788D0 (en)	1984-10-17	Plant growing device
IL69756A0 (en)	1983-12-30	System and method for making large area photovoltaic devices
JPS57211769A (en)	1982-12-25	Programmable semiconductor device
GB2115262B (en)	1985-04-11	Plant protection devices
EP0112492A3 (en)	1987-08-26	Alarm and control system for semiconductor manufacturing plants
DE3369214D1 (en)	1987-02-19	Alarm system
GB8404121D0 (en)	1984-03-21	Alarm systems
IL63701A0 (en)	1981-11-30	Semiconductor memory system
EP0112491A3 (en)	1987-09-16	Alarm and control system for semiconductor manufacturing plants
GB2119981B (en)	1985-08-07	Alarm systems

Legal Events

Date	Code	Title	Description
1984-05-04	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1984-07-04	17P	Request for examination filed	Effective date: 19831119
1984-07-04	AK	Designated contracting states	Designated state(s): BE CH DE FR GB IT LI
1987-07-08	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1987-08-26	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): BE CH DE FR GB IT LI
1988-05-04	17Q	First examination report despatched	Effective date: 19880321
1989-11-25	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1990-01-10	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): BE CH DE FR GB IT LI
1990-01-10	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 19900110 Ref country code: BE Effective date: 19900110
1990-02-15	REF	Corresponds to:	Ref document number: 3381099 Country of ref document: DE Date of ref document: 19900215
1990-03-16	ET	Fr: translation filed
1990-11-01	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1990-11-01	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1990-12-19	26N	No opposition filed
1992-12-15	REG	Reference to a national code	Ref country code: CH Ref legal event code: PFA Free format text: NOHMI BOSAI LTD
1994-10-07	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: FR Payment date: 19941007 Year of fee payment: 12
1994-10-14	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 19941014 Year of fee payment: 12
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1996-07-17	GBPC	Gb: european patent ceased through non-payment of renewal fee	Effective date: 19951119
1996-07-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Effective date: 19960731
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