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EP0151078A3 - High intensity mass spectrometer with simultaneous multiple detection - Google Patents

High intensity mass spectrometer with simultaneous multiple detection Download PDF

Info

Publication number
EP0151078A3
EP0151078A3 EP85400127A EP85400127A EP0151078A3 EP 0151078 A3 EP0151078 A3 EP 0151078A3 EP 85400127 A EP85400127 A EP 85400127A EP 85400127 A EP85400127 A EP 85400127A EP 0151078 A3 EP0151078 A3 EP 0151078A3
Authority
EP
European Patent Office
Prior art keywords
mass spectrometer
high intensity
multiple detection
simultaneous multiple
intensity mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85400127A
Other languages
French (fr)
Other versions
EP0151078B1 (en
EP0151078A2 (en
Inventor
Georges Slodzian
Francois Costa De Beauregard
Bernard Daigne
Francois Girard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Universite Paris Sud Paris 11
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Universite Paris Sud Paris 11
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA, Universite Paris Sud Paris 11 filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Publication of EP0151078A2 publication Critical patent/EP0151078A2/en
Publication of EP0151078A3 publication Critical patent/EP0151078A3/en
Application granted granted Critical
Publication of EP0151078B1 publication Critical patent/EP0151078B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H01J49/326—Static spectrometers using double focusing with magnetic and electrostatic sectors of 90 degrees
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H01J49/322—Static spectrometers using double focusing with a magnetic sector of 90 degrees, e.g. Mattauch-Herzog type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP85400127A 1984-01-27 1985-01-25 High intensity mass spectrometer with simultaneous multiple detection Expired EP0151078B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8401332 1984-01-27
FR8401332A FR2558988B1 (en) 1984-01-27 1984-01-27 HIGH-CLARITY MASS SPECTROMETER CAPABLE OF SIMULTANEOUS MULTIPLE DETECTION

Publications (3)

Publication Number Publication Date
EP0151078A2 EP0151078A2 (en) 1985-08-07
EP0151078A3 true EP0151078A3 (en) 1986-08-20
EP0151078B1 EP0151078B1 (en) 1989-12-27

Family

ID=9300554

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85400127A Expired EP0151078B1 (en) 1984-01-27 1985-01-25 High intensity mass spectrometer with simultaneous multiple detection

Country Status (6)

Country Link
US (1) US4638160A (en)
EP (1) EP0151078B1 (en)
JP (1) JPS6110843A (en)
DE (1) DE3575048D1 (en)
FR (1) FR2558988B1 (en)
SU (1) SU1600645A3 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3522340A1 (en) * 1985-06-22 1987-01-02 Finnigan Mat Gmbh LENS ARRANGEMENT FOR FOCUSING ELECTRICALLY CHARGED PARTICLES AND MASS SPECTROMETER WITH SUCH A LENS ARRANGEMENT
JPS6477853A (en) * 1987-09-18 1989-03-23 Jeol Ltd Mapping type ion microanalyzer
JPH0224950A (en) * 1988-07-14 1990-01-26 Jeol Ltd Mass analyzing device with simultaneous sensing
JPH02304854A (en) * 1989-05-19 1990-12-18 Jeol Ltd Simultaneous detecting type mass spectrometer
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
JPH03269943A (en) * 1990-03-20 1991-12-02 Jeol Ltd Simultaneous detection type mass analyzer
FR2666171B1 (en) * 1990-08-24 1992-10-16 Cameca HIGH TRANSMISSION STIGMA MASS SPECTROMETER.
JP3727047B2 (en) * 1999-07-30 2005-12-14 住友イートンノバ株式会社 Ion implanter
US6984821B1 (en) * 2004-06-16 2006-01-10 Battelle Energy Alliance, Llc Mass spectrometer and methods of increasing dispersion between ion beams
US20060043285A1 (en) * 2004-08-26 2006-03-02 Battelle Memorial Institute Method and apparatus for enhanced sequencing of complex molecules using surface-induced dissociation in conjunction with mass spectrometric analysis
FR2942072B1 (en) * 2009-02-06 2011-11-25 Cameca ACHROMATIC MAGNETIC MASS SPECTROMETER WITH DOUBLE FOCUSING.
LU92130B1 (en) * 2013-01-11 2014-07-14 Ct De Rech Public Gabriel Lippmann Mass spectrometer with optimized magnetic shunt
WO2017075470A1 (en) * 2015-10-28 2017-05-04 Duke University Mass spectrometers having segmented electrodes and associated methods
LU101794B1 (en) * 2020-05-18 2021-11-18 Luxembourg Inst Science & Tech List Apparatus and method for high-performance charged particle detection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622781A (en) * 1969-07-30 1971-11-23 Inst Plasmaphysik Gmbh Mass spectrograph with double focusing
GB2079039A (en) * 1980-06-13 1982-01-13 Jeol Ltd A double focusing mass spectrometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4864989A (en) * 1971-12-10 1973-09-07
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622781A (en) * 1969-07-30 1971-11-23 Inst Plasmaphysik Gmbh Mass spectrograph with double focusing
GB2079039A (en) * 1980-06-13 1982-01-13 Jeol Ltd A double focusing mass spectrometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MASS SPECTROMETRY REVIEWS, vol. 2, no. 2, 1983, pages 289-325, John Wiley & Sons Inc.; H. MATSUDA: "High-resolution high-sensitivity mass spectrometers" *
NUCLEAR INSTRUMENTS & METHODS, vol. 153, no. 2/3, juin 1978, pages 407-414, North-Holland Publishing Co., Amsterdam, NL; S. TAYA et al.: "Second-order image aberration correction of double-focusing mass spectrometers by electrostatic hexpole lens" *

Also Published As

Publication number Publication date
FR2558988B1 (en) 1987-08-28
EP0151078B1 (en) 1989-12-27
JPH0359544B2 (en) 1991-09-10
EP0151078A2 (en) 1985-08-07
JPS6110843A (en) 1986-01-18
FR2558988A1 (en) 1985-08-02
US4638160A (en) 1987-01-20
DE3575048D1 (en) 1990-02-01
SU1600645A3 (en) 1990-10-15

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