DE976483C - Device for sealing a gap between rooms with different pressures - Google Patents

Description

FEDERAL REPUBLIC OF GERMANY

ISSUED OCTOBER 3, 1963

GERMAN PATENT OFFICE

PATENT LETTERING

CLASS 48b GROUPII03 INTERNAT. CLASS C 23c

S i2

Dr. Emil Duhme, Heidenheim / Brenz, and Karl Stöhr, Berlin-Spandau

have been named as inventors

Siemens & Halske Aktiengesellschaft, Berlin and Munich

Device for sealing a gap between rooms with different pressures

Patented in the territory of the Federal Republic of Germany on December 24, 1944 The period from May 8, 1945 up to and including May 7, 1950 is not counted towards the patent term

(Ges. Of July 15, 1951)

Patent application published on October 25, 1956 Patent granted on September 12, 1963

When metallizing insulating tapes by metal vapor deposition or cathode sputtering od. The like. Often there is a requirement to keep the tape running from one room to one or more to lead other spaces between which there are pressure differences.

The same problem also occurs when tapes of paper or other foils enter the vacuum space from cathode ray oscilloscopes, electron microscopes or other corpuscular beam devices should be introduced, for example, a layer sensitive to the rays to be exposed directly to the rays or if serial images are taken with the electron microscope should be.

In such cases, the tape is carried out through the gaps in the chamber walls, which the Cross-section of the belts are adapted as possible to the desired with low suction power Maintain pressure in the individual chambers ao

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to be able to. However, large pressure differences cannot be controlled.

The invention now describes a much simpler device for sealing gaps for the passage of bands through partitions between rooms of different pressure, whereby According to the invention, the gap opens tangentially into a cylindrically curved groove and the resilient material in the form of a ίο cylindrical body whose 'diameter is the Corresponds to the curvature of the fillet and its length is greater than the length of the gap cross-section, resiliently against the gap exit in the groove and the guided on the floor of the gap Tape is pressed.

An embodiment of the invention is shown in the figures.

In Fig. 1, first, a general arrangement is shown shown within which the inventive concept can be used; here with 1 is a through the pipeline 2 denotes evacuated chamber which contains a metal steam generator 3. This metal vapor generator consists of an elongated tub 4, which is partly with the to evaporating metal 5, for example zinc, is filled. It becomes electrical with the help of the heating wire 6 heated. The strip 7 to be metallized is placed at its outlet opening directed upwards passed by. This band is located in the vacuum-tight chamber 8 below higher pressure than in the chamber 1 and exits through the gap 9 from this chamber. After this it has passed the evaporator 3, it becomes within a chamber 8 corresponding second chamber 10, which is also under higher pressure than chamber 1, wound up again.

The formation of the gap 9 is shown in FIGS. 2 and 3 on an enlarged scale in order to illustrate the invention. The housing of the chambers 8 or 10 carries the extension 11, which is provided with the groove 12. The gap 9, through which the strip 7 to be metallized emerges, opens tangentially to this groove. 13 is a cylindrical body made of an elastically flexible material such as rubber, which is pressed against the groove with the aid of the springs 14 (FIG. 2). He presses the paper tape 7 against the lower slot plane and thereby seals the slot itself. There is also a seal on the side because the body 13 also rests on the two outer ends. With the aid of sealing devices as shown in FIGS. 2 and 3, it is possible to ^{maintain pressures of about 10 ~ 4} Torr within the vacuum bell (working space), while inside the chambers 8 and 10 only pressures of about 10 ~ ² Torr to rule.

It is not necessary to have a stock of the material to be metallized from a special inside of the vacuum chamber arranged to be wrapped in a second chamber, as the Fig. Ι shows. You can also add special chambers to the actual work space of the material to be metallized and these chambers only through the one to the entrance of the to be metallized Connect the necessary slots with the embodiment according to the invention.

The band to be metallized and the band leaving the working area can also be left under normal atmospheric pressure if it is introduced into the working area through several gaps designed according to the invention and chambers with increasing vacuum are inserted between the individual gaps. Such an arrangement is shown schematically in FIG. The antechambers 19 and 20, which are sealed from one another and from the working chamber 1 and the surrounding atmosphere by gaps roughly in the manner of the design shown in FIGS. 2 and 3, close to the working space 1 here on both sides. The strip 7 to be metallized is guided through this gap. 21 and 22 are pipelines for connecting the chambers 19 and 20 to pumping devices. By appropriately grading the pressures present in spaces 19 and 20, it is possible to gradually lower the pressure in the direction of working space 1 down to 10 ~ ⁴ Torr. In general, it will be sufficient to use mechanical pumps with high suction power to evacuate the spaces 19 and 20.

Claims (1)

PATENT CLAIM: Device for sealing a gap for the passage of a tape through a Partition wall between rooms of different high pressure (lock) using elastically flexible material, in particular when a tape enters or exits a vacuum chamber in which the tape is located is metallized by thermal metal vapor deposition, characterized in that the gap opens tangentially into a cylindrically curved groove and the elastically flexible one Material in the form of a cylindrical body, the diameter of which is the curvature of the fillet and whose length is greater than the length of the gap cross-section, resiliently against the gap exit in the groove and pressed the band guided on the bottom of the gap is. no Documents considered: German Patent No. 567 955; Austrian Patent No. 139 099; British Patent Nos. 193 298, 285 914, 375 241. 1 sheet of drawings © 609 659/257 10.56 (309 694/4 9.63)