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DE69216637D1 - Verfahren zur oberflächenbehandlung eines werkstückes - Google Patents

Verfahren zur oberflächenbehandlung eines werkstückes

Info

Publication number
DE69216637D1
DE69216637D1 DE69216637T DE69216637T DE69216637D1 DE 69216637 D1 DE69216637 D1 DE 69216637D1 DE 69216637 T DE69216637 T DE 69216637T DE 69216637 T DE69216637 T DE 69216637T DE 69216637 D1 DE69216637 D1 DE 69216637D1
Authority
DE
Germany
Prior art keywords
workpiece
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69216637T
Other languages
English (en)
Other versions
DE69216637T2 (de
Inventor
Pavel P Kulik
Vladimir V Ivanov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPA OVERSEAS PUBLISHERS ASS AM
Original Assignee
OPA OVERSEAS PUBLISHERS ASS AM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27356472&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69216637(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from SU5006149 external-priority patent/RU2036242C1/ru
Priority claimed from SU5006148 external-priority patent/RU2037746C1/ru
Priority claimed from SU5006147 external-priority patent/RU2038410C1/ru
Application filed by OPA OVERSEAS PUBLISHERS ASS AM filed Critical OPA OVERSEAS PUBLISHERS ASS AM
Publication of DE69216637D1 publication Critical patent/DE69216637D1/de
Application granted granted Critical
Publication of DE69216637T2 publication Critical patent/DE69216637T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder or liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
DE69216637T 1991-11-01 1992-10-30 Verfahren zur oberflächenbehandlung eines werkstückes Revoked DE69216637T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
SU5006149 RU2036242C1 (ru) 1991-11-01 1991-11-01 Способ плазменной обработки поверхности изделия и установка для его осуществления
SU5006148 RU2037746C1 (ru) 1991-11-01 1991-11-01 Способ защиты сверхчистых поверхностей
SU5006147 RU2038410C1 (ru) 1991-11-01 1991-11-01 Установка для плазменной обработки поверхности изделий
PCT/EP1992/002549 WO1993009261A1 (en) 1991-11-01 1992-10-30 Methods and apparatus for treating a work surface

Publications (2)

Publication Number Publication Date
DE69216637D1 true DE69216637D1 (de) 1997-02-20
DE69216637T2 DE69216637T2 (de) 1997-04-24

Family

ID=27356472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69216637T Revoked DE69216637T2 (de) 1991-11-01 1992-10-30 Verfahren zur oberflächenbehandlung eines werkstückes

Country Status (5)

Country Link
US (1) US5562841A (de)
EP (1) EP0610392B1 (de)
JP (1) JPH07500635A (de)
DE (1) DE69216637T2 (de)
WO (1) WO1993009261A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6238587B1 (en) 1996-05-31 2001-05-29 Ipec Precison, Inc. Method for treating articles with a plasma jet
US5970993A (en) * 1996-10-04 1999-10-26 Utron Inc. Pulsed plasma jet paint removal
JP4646397B2 (ja) * 1997-07-28 2011-03-09 フオルクスワーゲン・アクチエンゲゼルシヤフト 滑り軸受用のサーマルコーティング方法
DE19807086A1 (de) * 1998-02-20 1999-08-26 Fraunhofer Ges Forschung Verfahren zum Beschichten von Oberflächen eines Substrates, Vorrichtung zur Durchführung des Verfahrens, Schichtsystem sowie beschichtetes Substrat
DE19929247A1 (de) * 1998-12-18 2000-06-21 Volkswagen Ag Verfahren zum thermischen Beschichten einer Fläche eines Innenraumes und Anordnung zur Durchführung des Verfahrens
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
US6203661B1 (en) 1999-12-07 2001-03-20 Trusi Technologies, Llc Brim and gas escape for non-contact wafer holder
US6398823B1 (en) 1999-12-07 2002-06-04 Tru-Si Technologies, Inc. Dynamic break for non-contact wafer holder
US6402843B1 (en) 1999-12-07 2002-06-11 Trusi Technologies, Llc Non-contact workpiece holder
US6121571A (en) * 1999-12-16 2000-09-19 Trusi Technologies Llc Plasma generator ignition circuit
US6423923B1 (en) 2000-08-04 2002-07-23 Tru-Si Technologies, Inc. Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream
DE10239875B4 (de) * 2002-08-29 2008-11-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur großflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen
AU2003279994A1 (en) * 2002-10-21 2004-05-13 John P. Sinisi System and method for mobile data collection
US20040091435A1 (en) * 2002-11-13 2004-05-13 Adi Shefer Deodorant and antiperspirant controlled release system
US7063730B2 (en) * 2003-10-21 2006-06-20 Fleetguard, Inc. Filter with end cap base retainer
JP4449645B2 (ja) * 2004-08-18 2010-04-14 島津工業有限会社 プラズマ溶射装置
ES2371662T3 (es) * 2005-09-07 2012-01-05 Purratio Ag Procedimiento para la producción de energía térmica.
WO2013096951A1 (en) * 2011-12-23 2013-06-27 Solexel, Inc. High productivity spray processing for semiconductor metallization and interconnects
US10980101B2 (en) * 2015-06-02 2021-04-13 Fuji Corporation Plasma generating device
KR102719354B1 (ko) 2018-03-23 2024-10-17 노바 엔지니어링 필름스 인코포레이티드 가스 연행 개구를 갖는 막 증착 장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2918563A (en) * 1956-07-05 1959-12-22 Trefileries Et Laminoirs De Pr Welding devices for metallic pieces
NL254821A (de) * 1959-08-14 1900-01-01
US3317704A (en) * 1966-08-29 1967-05-02 Thermal Dynamics Corp Electric arc torches
US3470347A (en) * 1968-01-16 1969-09-30 Union Carbide Corp Method for shielding a gas effluent
DE2254491C3 (de) * 1972-11-07 1975-04-17 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Beschichten von Oberflächen an Werkstücken durch Aufspritzen von im Lichtbogen aufgeschmolzenen Schichtstoffen, sowie Anordnung zur Durchführung des Verfahrens
US4599505A (en) * 1983-03-31 1986-07-08 The United States Of America As Represented By The Secretary Of The Navy Flexible trailing shield for welding reactive metals
SE447461B (sv) * 1985-04-25 1986-11-17 Npk Za Kontrolno Zavaratschni Sammansatt munstycke for plasmatron
US4739146A (en) * 1986-02-25 1988-04-19 Metallurgical Industries, Inc. Method for applying a weld bead to a thin section of a substrate
US5393948A (en) * 1994-04-11 1995-02-28 Martin Marietta Open faced trailing welding shield

Also Published As

Publication number Publication date
WO1993009261A1 (en) 1993-05-13
EP0610392A1 (de) 1994-08-17
DE69216637T2 (de) 1997-04-24
EP0610392B1 (de) 1997-01-08
JPH07500635A (ja) 1995-01-19
US5562841A (en) 1996-10-08

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation