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DE69212507D1 - Piezoresistiver Druckwandler mit leitender, elastomerer Abdichtung - Google Patents

Piezoresistiver Druckwandler mit leitender, elastomerer Abdichtung

Info

Publication number
DE69212507D1
DE69212507D1 DE69212507T DE69212507T DE69212507D1 DE 69212507 D1 DE69212507 D1 DE 69212507D1 DE 69212507 T DE69212507 T DE 69212507T DE 69212507 T DE69212507 T DE 69212507T DE 69212507 D1 DE69212507 D1 DE 69212507D1
Authority
DE
Germany
Prior art keywords
conductive
pressure transducer
elastomeric seal
piezoresistive pressure
piezoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69212507T
Other languages
English (en)
Other versions
DE69212507T2 (de
Inventor
Dean J Maurer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69212507D1 publication Critical patent/DE69212507D1/de
Application granted granted Critical
Publication of DE69212507T2 publication Critical patent/DE69212507T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE1992612507 1991-01-28 1992-01-27 Piezoresistiver Druckwandler mit leitender, elastomerer Abdichtung Expired - Lifetime DE69212507T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64656891A 1991-01-28 1991-01-28

Publications (2)

Publication Number Publication Date
DE69212507D1 true DE69212507D1 (de) 1996-09-05
DE69212507T2 DE69212507T2 (de) 1997-02-06

Family

ID=24593555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992612507 Expired - Lifetime DE69212507T2 (de) 1991-01-28 1992-01-27 Piezoresistiver Druckwandler mit leitender, elastomerer Abdichtung

Country Status (4)

Country Link
EP (1) EP0497534B1 (de)
JP (1) JP2800083B2 (de)
CA (1) CA2058916C (de)
DE (1) DE69212507T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3394835B2 (ja) * 1995-03-20 2003-04-07 株式会社キャットアイ 部品取付装置
DE19626081A1 (de) * 1996-06-28 1998-01-02 Siemens Ag Halbleiter-Bauelement
DE19703206C2 (de) 1997-01-29 2002-01-24 Infineon Technologies Ag Drucksensor-Bauteil mit Schlauchanschluß
DE19707503B4 (de) * 1997-02-25 2007-01-04 Infineon Technologies Ag Drucksensor-Bauelement und Verfahren zur Herstellung
DE19844461A1 (de) * 1998-09-28 2000-03-30 Siemens Ag Hanhabungs- und Montageschutz
DE29903716U1 (de) * 1999-03-02 1999-06-02 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V., 78052 Villingen-Schwenningen Mikroventilanordnung
DE19909069C2 (de) * 1999-03-02 2001-08-30 Hahn Schickard Ges Mikroventilanordnung
DE20115733U1 (de) 2001-09-25 2001-12-20 FESTO AG & Co., 73734 Esslingen Ventileinrichtung
DE102004032984A1 (de) * 2004-07-08 2006-01-26 Robert Bosch Gmbh Bauraumoptimierte Sensoranbindung
JP5010395B2 (ja) * 2007-08-24 2012-08-29 パナソニック株式会社 圧力センサ
DE102015219070A1 (de) * 2015-10-02 2017-04-06 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums
JP6756245B2 (ja) * 2016-11-18 2020-09-16 日本電産トーソク株式会社 油圧センサ取付構造

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4426406A (en) * 1981-02-11 1984-01-17 Brooks Mark A Method of fabricating a pressure sensor
JPS597234A (ja) * 1982-07-05 1984-01-14 Aisin Seiki Co Ltd 圧力センサ
US4505157A (en) * 1983-08-05 1985-03-19 Transamerica Delaval Inc. Transducers with quick dome connect systems
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
DE3563479D1 (en) * 1985-01-28 1988-07-28 Kristal Instr Ag Method for manufacturing a measuring transducer for measuring mechanical quantities
US4656454A (en) * 1985-04-24 1987-04-07 Honeywell Inc. Piezoresistive pressure transducer with elastomeric seals
JPS62235536A (ja) * 1986-03-14 1987-10-15 Aisin Seiki Co Ltd 圧力センサ
JPS62174249U (de) * 1986-04-24 1987-11-05
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode

Also Published As

Publication number Publication date
CA2058916A1 (en) 1992-07-29
DE69212507T2 (de) 1997-02-06
JPH0621482A (ja) 1994-01-28
EP0497534A3 (en) 1993-08-18
CA2058916C (en) 2000-03-21
JP2800083B2 (ja) 1998-09-21
EP0497534A2 (de) 1992-08-05
EP0497534B1 (de) 1996-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition