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DE69106066D1 - Herstellung von Siliciumcarbid-Whiskern. - Google Patents

Herstellung von Siliciumcarbid-Whiskern.

Info

Publication number
DE69106066D1
DE69106066D1 DE69106066T DE69106066T DE69106066D1 DE 69106066 D1 DE69106066 D1 DE 69106066D1 DE 69106066 T DE69106066 T DE 69106066T DE 69106066 T DE69106066 T DE 69106066T DE 69106066 D1 DE69106066 D1 DE 69106066D1
Authority
DE
Germany
Prior art keywords
manufacture
silicon carbide
carbide whiskers
whiskers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106066T
Other languages
English (en)
Other versions
DE69106066T2 (de
Inventor
James Allen Jensen
Allan Bruce Rosenthal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lanxide Technology Co LP
Original Assignee
Lanxide Technology Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lanxide Technology Co LP filed Critical Lanxide Technology Co LP
Application granted granted Critical
Publication of DE69106066D1 publication Critical patent/DE69106066D1/de
Publication of DE69106066T2 publication Critical patent/DE69106066T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/36Carbides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005Growth of whiskers or needles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69106066T 1990-07-24 1991-07-19 Herstellung von Siliciumcarbid-Whiskern. Expired - Fee Related DE69106066T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56690890A 1990-07-24 1990-07-24

Publications (2)

Publication Number Publication Date
DE69106066D1 true DE69106066D1 (de) 1995-02-02
DE69106066T2 DE69106066T2 (de) 1995-05-11

Family

ID=24264909

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106066T Expired - Fee Related DE69106066T2 (de) 1990-07-24 1991-07-19 Herstellung von Siliciumcarbid-Whiskern.

Country Status (4)

Country Link
EP (1) EP0468377B1 (de)
JP (1) JP3224406B2 (de)
CA (1) CA2043679A1 (de)
DE (1) DE69106066T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2879627B1 (fr) * 2004-12-21 2007-09-21 Univ Claude Bernard Lyon Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3874598T2 (de) * 1987-05-05 1993-01-28 Standard Oil Co Ohio Verfahren zur herstellung von whiskern durch den vls-mechanismus.

Also Published As

Publication number Publication date
EP0468377A1 (de) 1992-01-29
CA2043679A1 (en) 1992-01-25
JP3224406B2 (ja) 2001-10-29
DE69106066T2 (de) 1995-05-11
JPH04265299A (ja) 1992-09-21
EP0468377B1 (de) 1994-12-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee