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DE69713076D1 - Herstellungsverfahren für laser mit spitzzulaufender wellenleiterregion - Google Patents

Herstellungsverfahren für laser mit spitzzulaufender wellenleiterregion

Info

Publication number
DE69713076D1
DE69713076D1 DE69713076T DE69713076T DE69713076D1 DE 69713076 D1 DE69713076 D1 DE 69713076D1 DE 69713076 T DE69713076 T DE 69713076T DE 69713076 T DE69713076 T DE 69713076T DE 69713076 D1 DE69713076 D1 DE 69713076D1
Authority
DE
Germany
Prior art keywords
lasers
manufacturing process
tapered wave
wave ladder
ladder region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69713076T
Other languages
English (en)
Other versions
DE69713076T2 (de
Inventor
Ruiyu Fang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE69713076D1 publication Critical patent/DE69713076D1/de
Publication of DE69713076T2 publication Critical patent/DE69713076T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12121—Laser
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
    • H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1053—Comprising an active region having a varying composition or cross-section in a specific direction
    • H01S5/1064—Comprising an active region having a varying composition or cross-section in a specific direction varying width along the optical axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Integrated Circuits (AREA)
  • Laser Surgery Devices (AREA)
DE69713076T 1996-03-22 1997-03-19 Herstellungsverfahren für laser mit spitzzulaufender wellenleiterregion Expired - Fee Related DE69713076T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT96TO000219A IT1285023B1 (it) 1996-03-22 1996-03-22 Procedimento per la realizzazione di laser con regione di guida rastremata.
PCT/EP1997/001385 WO1997036353A1 (en) 1996-03-22 1997-03-19 Method for the manufacture of lasers with tapered guide region

Publications (2)

Publication Number Publication Date
DE69713076D1 true DE69713076D1 (de) 2002-07-11
DE69713076T2 DE69713076T2 (de) 2002-10-31

Family

ID=11414452

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69713076T Expired - Fee Related DE69713076T2 (de) 1996-03-22 1997-03-19 Herstellungsverfahren für laser mit spitzzulaufender wellenleiterregion

Country Status (6)

Country Link
EP (1) EP0888653B1 (de)
JP (1) JPH10512105A (de)
CA (1) CA2249398C (de)
DE (1) DE69713076T2 (de)
IT (1) IT1285023B1 (de)
WO (1) WO1997036353A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2344899B (en) 1999-05-29 2000-11-22 Bookham Technology Ltd Production of an integrated optical device
GB2370884A (en) * 2000-11-09 2002-07-10 Kamelian Ltd Optical waveguide
JP2011180166A (ja) * 2010-02-26 2011-09-15 National Institute Of Advanced Industrial Science & Technology シリコン細線光導波路の作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2111707T3 (es) * 1992-11-26 1998-03-16 Nederland Ptt Procedimiento de fabricacion de bifurcaciones pronunciadas de una guia de ondas en componentes opticos integrados.
NL9400266A (nl) * 1994-02-22 1995-10-02 Nederland Ptt Werkwijze en bijbehorend paar van maskerpatronen voor het onder toepassing van dubbele maskering vervaardigen van geintegreerde optische golfgeleiderstructuren.

Also Published As

Publication number Publication date
WO1997036353A1 (en) 1997-10-02
EP0888653B1 (de) 2002-06-05
DE69713076T2 (de) 2002-10-31
EP0888653A1 (de) 1999-01-07
JPH10512105A (ja) 1998-11-17
CA2249398C (en) 2001-06-12
ITTO960219A0 (de) 1996-03-22
ITTO960219A1 (it) 1997-09-22
CA2249398A1 (en) 1997-10-02
IT1285023B1 (it) 1998-06-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AVAGO TECHNOLOGIES GENERAL IP ( SINGAPORE) PTE. LT

8339 Ceased/non-payment of the annual fee