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DE69618627D1 - Auslegerstrukturen - Google Patents

Auslegerstrukturen

Info

Publication number
DE69618627D1
DE69618627D1 DE69618627T DE69618627T DE69618627D1 DE 69618627 D1 DE69618627 D1 DE 69618627D1 DE 69618627 T DE69618627 T DE 69618627T DE 69618627 T DE69618627 T DE 69618627T DE 69618627 D1 DE69618627 D1 DE 69618627D1
Authority
DE
Germany
Prior art keywords
boom structures
boom
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69618627T
Other languages
English (en)
Other versions
DE69618627T2 (de
Inventor
Karl Binnig
Juergen Brugger
Walter Haeberle
Heinrich Rohrer
Peter Vettiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69618627D1 publication Critical patent/DE69618627D1/de
Publication of DE69618627T2 publication Critical patent/DE69618627T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69618627T 1996-03-13 1996-03-13 Auslegerstrukturen Expired - Fee Related DE69618627T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1996/000209 WO1997034122A1 (en) 1996-03-13 1996-03-13 Cantilever structures

Publications (2)

Publication Number Publication Date
DE69618627D1 true DE69618627D1 (de) 2002-02-21
DE69618627T2 DE69618627T2 (de) 2002-09-12

Family

ID=11004410

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69618627T Expired - Fee Related DE69618627T2 (de) 1996-03-13 1996-03-13 Auslegerstrukturen

Country Status (5)

Country Link
US (1) US6079255A (de)
EP (1) EP0886758B1 (de)
JP (1) JP3157840B2 (de)
DE (1) DE69618627T2 (de)
WO (1) WO1997034122A1 (de)

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US6518570B1 (en) * 1998-04-03 2003-02-11 Brookhaven Science Associates Sensing mode atomic force microscope
JP3995819B2 (ja) * 1999-01-18 2007-10-24 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
JP3884887B2 (ja) * 1999-08-27 2007-02-21 株式会社ルネサステクノロジ 描画用探針及びその製作方法
JP3892198B2 (ja) * 2000-02-17 2007-03-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよび試料表面測定装置
JP3785018B2 (ja) * 2000-03-13 2006-06-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよびそれを用いた走査型プローブ装置
JP4610811B2 (ja) * 2000-09-15 2011-01-12 アイメック プローブの製造方法及びその装置
KR100418907B1 (ko) * 2001-02-16 2004-02-14 엘지전자 주식회사 Ｓｐｍ용 캔틸레버
KR20040074971A (ko) * 2002-01-22 2004-08-26 인터내셔널 비지네스 머신즈 코포레이션 데이터 저장 및 현미경 검사용 주사 탐침
KR100746768B1 (ko) * 2002-03-19 2007-08-06 주식회사 엘지이아이 캔틸레버를 이용한 정보 기록 및 판독 장치
CN1291933C (zh) * 2002-03-22 2006-12-27 赫罗伊斯.坦尼沃有限责任公司 生产光导纤维的方法和光导纤维
US20030215816A1 (en) * 2002-05-20 2003-11-20 Narayan Sundararajan Method for sequencing nucleic acids by observing the uptake of nucleotides modified with bulky groups
JP2004093352A (ja) * 2002-08-30 2004-03-25 Seiko Instruments Inc 極微小多探針プローブの製造方法及び表面特性解析装置
CN100342235C (zh) * 2002-09-24 2007-10-10 英特尔公司 通过悬臂偏转检测和／或识别分析物的方法和装置
US7270952B2 (en) * 2002-09-24 2007-09-18 Intel Corporation Detecting molecular binding by monitoring feedback controlled cantilever deflections
DE10307561B4 (de) * 2003-02-19 2006-10-05 Suss Microtec Test Systems Gmbh Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen
US7460462B2 (en) * 2003-12-17 2008-12-02 Hewlett-Packard Development Company, L.P. Contact probe storage fet sensor and write heater arrangements
JP4634159B2 (ja) * 2004-02-13 2011-02-16 山一電機株式会社 プローブユニット
EP2463668A2 (de) 2004-06-21 2012-06-13 Capres A/S Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften
JP5192232B2 (ja) 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
US7089787B2 (en) * 2004-07-08 2006-08-15 Board Of Trustees Of The Leland Stanford Junior University Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
DE602005024312D1 (de) * 2004-08-18 2010-12-02 Us Gov Navy Naval Res Lab Wärmesteuerung der ablagerung in dpn (dip-pen-nanolithography)
JP2006071371A (ja) * 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用
JP4854212B2 (ja) * 2005-03-31 2012-01-18 日立アロカメディカル株式会社 超音波診断装置
US7958565B2 (en) 2005-05-31 2011-06-07 National University Corporation Kanazawa University Scan type probe microscope and cantilever drive device
US7637149B2 (en) * 2005-06-17 2009-12-29 Georgia Tech Research Corporation Integrated displacement sensors for probe microscopy and force spectroscopy
JP2007171022A (ja) 2005-12-22 2007-07-05 Canon Inc 走査プローブ装置
JP2007171021A (ja) 2005-12-22 2007-07-05 Canon Inc 走査プローブ装置及び走査プローブ装置用の駆動ステージ
JP4498285B2 (ja) 2006-02-01 2010-07-07 キヤノン株式会社 走査型プローブ装置
JP4448099B2 (ja) 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
WO2007095360A2 (en) * 2006-02-14 2007-08-23 The Regents Of The University Of California Coupled mass-spring systems and imaging methods for scanning probe microscopy
US7603891B2 (en) 2006-04-25 2009-10-20 Asylum Research Corporation Multiple frequency atomic force microscopy
US8024963B2 (en) * 2006-10-05 2011-09-27 Asylum Research Corporation Material property measurements using multiple frequency atomic force microscopy
US8191403B2 (en) * 2007-03-27 2012-06-05 Richmond Chemical Corporation Petroleum viscosity measurement and communication system and method
DE102007023435A1 (de) * 2007-05-16 2008-11-20 Jpk Instruments Ag Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem
DE102007032830B4 (de) * 2007-07-12 2010-04-15 Jörg Dipl.-Ing. Hoffmann Vorrichtung zur Vermessung eines Werkstücks sowie Messverfahren unter Einsatz einer derartigen Vorrichtung
JP2009125898A (ja) * 2007-11-27 2009-06-11 Seiko Instruments Inc 微小加工装置用プローブおよび微小加工装置
US7938778B2 (en) * 2007-12-26 2011-05-10 Aloka Co., Ltd. Ultrasound diagnosis apparatus
WO2009097487A1 (en) * 2008-01-31 2009-08-06 The Board Of Trustees Of The University Of Illinois Temperature-dependent nanoscale contact potential measurement technique and device
WO2010011397A2 (en) * 2008-05-13 2010-01-28 Northwestern University Scanning probe epitaxy
US7979916B2 (en) * 2008-05-23 2011-07-12 Bede Pittenger Preamplifying cantilever and applications thereof
US8677809B2 (en) 2008-06-16 2014-03-25 Oxford Instruments Plc Thermal measurements using multiple frequency atomic force microscopy
WO2010022285A1 (en) 2008-08-20 2010-02-25 The Board Of Trustees Of The University Of Illinois Device for calorimetric measurement
EP2199732B1 (de) * 2008-12-19 2017-10-11 Klingelnberg AG Vorrichtung mit Rauheitsmesstaster
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US8387443B2 (en) * 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
US8533861B2 (en) 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US8914911B2 (en) 2011-08-15 2014-12-16 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
CN104297147B (zh) * 2014-09-24 2016-08-24 京东方科技集团股份有限公司 基板划伤程度的检测装置及其检测方法、检测系统
JP6424405B2 (ja) * 2015-03-13 2018-11-21 セイコーインスツル株式会社 圧力センサ、触覚センサ、及び圧力センサの製造方法
EP3894828B1 (de) * 2018-12-12 2023-11-01 Micro Motion, Inc. Planares vibrationsdensitometer, densitometerelement und entsprechendes verfahren
EP3894829B1 (de) * 2018-12-12 2024-03-20 Micro Motion, Inc. Ebenes vibrationsviskosimeter, viskosimeterelement und zugehöriges verfahren
EP3690449A1 (de) * 2019-02-04 2020-08-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Ausleger, akustische ultraschallmikroskopievorrichtung mit dem ausleger, verfahren zur verwendung davon und lithographiesystem damit

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DE919073C (de) * 1952-11-16 1954-10-11 Johannes Perthen Dr Ing Elektrischer Taster und Verfahren zu seiner Herstellung
JPS60161508A (ja) * 1984-02-01 1985-08-23 Tokyo Seimitsu Co Ltd 表面粗さ・形状測定装置
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
DE69121868T2 (de) * 1990-12-17 1997-02-06 Canon K.K., Tokio/Tokyo Freitragende Sonde und Apparat zur Anwendung derselben
US5461907A (en) * 1993-03-23 1995-10-31 Regents Of The University Of California Imaging, cutting, and collecting instrument and method
US5444244A (en) * 1993-06-03 1995-08-22 Park Scientific Instruments Corporation Piezoresistive cantilever with integral tip for scanning probe microscope
US5475318A (en) * 1993-10-29 1995-12-12 Robert B. Marcus Microprobe
US5540958A (en) * 1994-12-14 1996-07-30 Vlsi Technology, Inc. Method of making microscope probe tips

Also Published As

Publication number Publication date
EP0886758B1 (de) 2001-11-21
DE69618627T2 (de) 2002-09-12
US6079255A (en) 2000-06-27
JPH11512830A (ja) 1999-11-02
WO1997034122A1 (en) 1997-09-18
EP0886758A1 (de) 1998-12-30
JP3157840B2 (ja) 2001-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee