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DE69434548D1 - Herstellungsverfahren eines polyimiden optischen wellenleiters - Google Patents

Herstellungsverfahren eines polyimiden optischen wellenleiters

Info

Publication number
DE69434548D1
DE69434548D1 DE69434548T DE69434548T DE69434548D1 DE 69434548 D1 DE69434548 D1 DE 69434548D1 DE 69434548 T DE69434548 T DE 69434548T DE 69434548 T DE69434548 T DE 69434548T DE 69434548 D1 DE69434548 D1 DE 69434548D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical waveguide
polyimide optical
polyimide
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69434548T
Other languages
English (en)
Other versions
DE69434548T2 (de
Inventor
Yasuko Maruo
Sasaki Shigekuni
Toshiaki Tamamura
Tohru Matsuura
Shinji Ando
Shinsuke Matsui
Fumio Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of DE69434548D1 publication Critical patent/DE69434548D1/de
Application granted granted Critical
Publication of DE69434548T2 publication Critical patent/DE69434548T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G02B1/046—Light guides characterised by the core material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
DE69434548T 1993-03-18 1994-03-18 Herstellungsverfahren eines polyimiden optischen wellenleiters Expired - Fee Related DE69434548T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP8251693 1993-03-18
JP8251693 1993-03-18
JP17857493 1993-06-28
JP17857493 1993-06-28

Publications (2)

Publication Number Publication Date
DE69434548D1 true DE69434548D1 (de) 2005-12-22
DE69434548T2 DE69434548T2 (de) 2006-08-03

Family

ID=26423529

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69434548T Expired - Fee Related DE69434548T2 (de) 1993-03-18 1994-03-18 Herstellungsverfahren eines polyimiden optischen wellenleiters
DE69418752T Expired - Fee Related DE69418752T2 (de) 1993-03-18 1994-03-18 Herstellungsverfahren von optischen Wellenleitern aus Polyimid

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69418752T Expired - Fee Related DE69418752T2 (de) 1993-03-18 1994-03-18 Herstellungsverfahren von optischen Wellenleitern aus Polyimid

Country Status (3)

Country Link
US (2) US5598501A (de)
EP (2) EP0884610B1 (de)
DE (2) DE69434548T2 (de)

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US5539848A (en) * 1995-05-31 1996-07-23 Motorola Optical waveguide module and method of making
JP3738469B2 (ja) * 1995-07-27 2006-01-25 日立化成工業株式会社 ポリイミド及びこれを用いた光部品
US5659648A (en) * 1995-09-29 1997-08-19 Motorola, Inc. Polyimide optical waveguide having electrical conductivity
US5649045A (en) * 1995-12-13 1997-07-15 Amoco Corporation Polymide optical waveguide structures
DE19652533C1 (de) 1996-12-17 1998-04-30 Siemens Ag Optoelektronischer Modul
JPH10221549A (ja) * 1997-02-07 1998-08-21 Hitachi Ltd プラスチック製光導波路およびそれを用いた光スイッチ
KR100288742B1 (ko) * 1997-03-12 2001-05-02 윤종용 광도파로소자의제조방법
US6201914B1 (en) 1997-04-15 2001-03-13 UNIVERSITé LAVAL Tapered waveguide for optical dispersion compensation
US5949942A (en) * 1997-09-12 1999-09-07 Intel Corporation Planar waveguide and method of forming the same
DE19826658A1 (de) * 1998-06-16 1999-12-30 Siemens Ag Schaltungsträger mit integrierten, aktiven, optischen Funktionen
JP2000162460A (ja) * 1998-11-27 2000-06-16 Sharp Corp 有機光導波路およびその製造方法並びにそれを用いた光学部品
US6775453B1 (en) * 1998-12-21 2004-08-10 Lsi Logic Corporation On-chip graded index of refraction optical waveguide and damascene method of fabricating the same
JP2000347054A (ja) * 1999-03-31 2000-12-15 Sharp Corp 光デバイス及びその製造方法、並びに、ポリイミド膜の製造方法
KR100319299B1 (ko) * 1999-04-14 2002-01-05 윤종용 광통신용 폴리이미드
KR100330595B1 (ko) * 1999-04-19 2002-03-29 윤종용 광도파로
US6555288B1 (en) * 1999-06-21 2003-04-29 Corning Incorporated Optical devices made from radiation curable fluorinated compositions
US6306563B1 (en) * 1999-06-21 2001-10-23 Corning Inc. Optical devices made from radiation curable fluorinated compositions
US6389215B1 (en) 1999-10-28 2002-05-14 The United States Of America As Represented By The Secretary Of The Navy Low birefringent polyimides for optical waveguides statement regarding federally sponsored research or development
CA2389347A1 (en) 1999-12-02 2001-06-07 Tony C. Kowalczyk Photodefinition of optical devices
US7058245B2 (en) 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
JP2002026370A (ja) * 2000-07-06 2002-01-25 Fujitsu Ltd 半導体受光装置
US6434318B1 (en) 2000-08-02 2002-08-13 Gemfire Corporation Device and method for variable attenuation of an optical channel
US6507681B1 (en) 2000-08-02 2003-01-14 Gemfire Corporation Anti-waveguide routing structure
DE60008121T2 (de) * 2000-11-28 2004-09-16 National University Of Ireland, Cork Herstellung von Materialien für Wellenleiter mit Stufenbrechungsindex
JP2004514941A (ja) * 2000-11-28 2004-05-20 フォトン−エックス　インコーポレイテッド 薄膜光ウエーブガイド
US6496637B2 (en) * 2000-12-21 2002-12-17 Corning Incorporated Low optical loss polymers
GB2373343A (en) * 2001-03-16 2002-09-18 Bookham Technology Plc Rib waveguide for connection to an optical component
US6599957B2 (en) 2001-05-07 2003-07-29 Corning Incorporated Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material
AU2002307120A1 (en) * 2001-05-07 2002-11-18 Corning Incorporated Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material
US7372052B2 (en) * 2001-06-28 2008-05-13 C-Beam & Light, Inc. Electron beam method and apparatus for reducing or patterning the birefringence of halogenated optical materials
US7253425B2 (en) * 2001-06-28 2007-08-07 E-Beam & Light, Inc. Method and apparatus for forming optical elements by inducing changes in the index of refraction by utilizing electron beam radiation
US7026634B2 (en) * 2001-06-28 2006-04-11 E-Beam & Light, Inc. Method and apparatus for forming optical materials and devices
US7546016B2 (en) * 2001-06-28 2009-06-09 E-Beam & Light, Inc. Optical elements formed by inducing changes in the index of refraction by utilizing electron beam radiation
US20060011863A1 (en) * 2001-06-28 2006-01-19 E-Beam & Light, Inc. Electron beam method and apparatus for improved melt point temperatures and optical clarity of halogenated optical materials
TWI304076B (de) * 2001-07-13 2008-12-11 Nippon Catalytic Chem Ind
KR100409223B1 (ko) * 2002-02-01 2003-12-12 주식회사 효성 불소치환 폴리이미드를 이용한 광도파로
KR100730320B1 (ko) * 2002-05-28 2007-06-19 마츠시다 덴코 가부시키가이샤 광회로-전기회로 혼재기판용 재료 및 광회로-전기회로혼재기판
US6832034B2 (en) * 2002-06-21 2004-12-14 3M Innovative Properties Company Optical waveguide
EP1518135A1 (de) * 2002-06-27 2005-03-30 Pirelli & C. S.p.A. Optische wellenleiter aus polyimid und verfahren zu deren herstellung
KR100511100B1 (ko) * 2002-07-12 2005-08-31 김미화 퍼플루오로스티렌 화합물, 이를 이용한 코팅액 및광도파로형 광소자
JP3947457B2 (ja) 2002-11-29 2007-07-18 日東電工株式会社 ポリイミド光導波路の製造方法
JP2007010692A (ja) * 2003-11-05 2007-01-18 Hitachi Chem Co Ltd 光導波路及びその製造方法
JP2005157091A (ja) * 2003-11-27 2005-06-16 Mitsumi Electric Co Ltd 分岐光導波路の製造方法
JP2006030919A (ja) * 2004-07-22 2006-02-02 Kansai Paint Co Ltd 光導波路の作成方法
JP2006072352A (ja) * 2004-08-19 2006-03-16 Rohm & Haas Electronic Materials Llc プリント回路板を形成する方法
JP4682111B2 (ja) * 2006-09-14 2011-05-11 富士通株式会社 導波路型光デバイス及びその製造方法
JP4995618B2 (ja) * 2007-04-17 2012-08-08 日東電工株式会社 光学フィルム、及び画像表示装置
JP5147646B2 (ja) * 2008-10-31 2013-02-20 新光電気工業株式会社 光導波路の製造方法
WO2015060822A1 (en) * 2013-10-22 2015-04-30 Empire Technology Development Llc Thermally printed optic circuits
CN107636122B (zh) * 2015-09-30 2020-10-16 环球油品公司 使用铁、钼和颗粒碳催化剂的组合物进行淤浆加氢裂化的方法
CN108427159B (zh) * 2018-05-16 2020-04-14 德州尧鼎光电科技有限公司 一种深紫外平面光波导
CN111505767B (zh) * 2020-04-28 2022-02-25 上海交通大学 基于氧化硅掩膜的铌酸锂光子芯片制备方法

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US4808285A (en) * 1986-04-16 1989-02-28 Gte Laboratories Incorporated Method of making micro-optical components on polydiacetylene optical devices
GB2191603A (en) * 1986-06-13 1987-12-16 Northern Telecom Ltd Optical conductor having at least three layers
JP2657700B2 (ja) * 1988-08-08 1997-09-24 日本電信電話株式会社 含フッ素ポリイミド光学材料
US5098804A (en) * 1989-01-13 1992-03-24 E. I. Du Pont De Nemours And Company Multiplexer-demultiplexer for integrated optic circuit
JPH049087A (ja) * 1990-04-26 1992-01-13 Seiko Epson Corp 湿式記録装置
JP2813713B2 (ja) * 1990-04-27 1998-10-22 日本電信電話株式会社 ポリイミド系光導波路
JP2816770B2 (ja) * 1991-01-11 1998-10-27 日本電信電話株式会社 ポリイミド光導波路の製造方法
CA2041133C (en) * 1990-04-27 1995-01-03 Toru Matsuura Polymide optical waveguide
JP2640553B2 (ja) * 1990-04-27 1997-08-13 日本電信電話株式会社 フッ素化ポリイミド共重合体及びその製造方法
JP2816771B2 (ja) * 1991-01-11 1998-10-27 日本電信電話株式会社 ポリイミド光導波路及びその製造方法
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JPH04107403A (ja) * 1990-08-28 1992-04-08 Brother Ind Ltd 光導波路アレイ及びその製造方法
JPH0527132A (ja) * 1991-07-24 1993-02-05 Furukawa Electric Co Ltd:The 導波路型光部品の製造方法
US5202938A (en) * 1991-11-25 1993-04-13 Hoechst Celanese Corp. Laminated waveguiding polarizer utilizing polymeric birefringent cladding
JP2759726B2 (ja) * 1992-08-04 1998-05-28 日本電信電話株式会社 ポリイミドの屈折率変化方法
US5317082A (en) * 1992-12-22 1994-05-31 Amoco Corporation Photodefinable optical waveguides

Also Published As

Publication number Publication date
US5572619A (en) 1996-11-05
DE69418752D1 (de) 1999-07-08
US5598501A (en) 1997-01-28
EP0616234A2 (de) 1994-09-21
EP0616234B1 (de) 1999-06-02
EP0884610B1 (de) 2005-11-16
EP0884610A3 (de) 1999-01-20
EP0884610A2 (de) 1998-12-16
DE69418752T2 (de) 2000-01-27
DE69434548T2 (de) 2006-08-03
EP0616234A3 (de) 1995-01-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee