DE60201630T2 - Optical MEMS switch with imaging system - Google Patents

Description

TECHNICAL TERRITORY

These This invention relates to the field of optical microelectromechanical System devices (MEMS devices) and especially that throughout optical switching by means of MEMS devices.

STATE OF TECHNOLOGY

A solution for the completely optical switching uses two MEMS devices, each one an array of tiltable micromirrors, e.g. As small mirrors, includes, which are able to reflect light, what in this document Any radiation in the wavelength in question, whether in the visible spectrum or not. An optical path is made for light coming from an input source, e.g. B. an optical fiber, an output, z. B. an output fiber supplied is, by directing the light by means of a first micromirror at the first optical MEMS device, wherein the first micromirror of the input fiber is assigned to one second micromirror on the second optical MEMS device, which is associated with the output fiber. The second micromirror then directs the light into the output fiber. Every fiber with that System is considered as a port of the system, wherein the input fibers are the input ports and the output fibers the output ports are.

Often The light that passes from the input fiber to the first micromirror the first optical MEMS device to steer, first through a microlens associated therewith and part of a Represents input microlens array. The function of each microlens is the beam of light from its respective associated input fiber is fed to collapse. Alternatively, rather than a separate microlens array to use a respective lens with each fiber of the fiber bundle in be integrated with an arrangement that forms a collimator.

It are also similar Arrangements of microlens arrays or integrated lenses between the output MEMS device and the output fiber bundle in the exit section of the thoroughly optical switch are arranged. In the output section is the Function of every microlens or collimator, the light beam to couple into its respective associated output fiber.

One Problem in the prior art of entirely optical switching by means of MEMS devices is that the midpoint of any certain microlens may not be exactly at the center of their corresponding optical fiber is aligned. This causes the Light beam has a directional error, inasmuch as he himself not moved directly to the center of its associated micromirror. When the distance between the microlens and the MEMS device is great which may be required to prevent the input fiber bundle from blasting which reflects off the micromirrors of the MEMS device become the beam of light, if at all, then off-center, hit the micromirror. As a result, either no Light from the micromirror reflects when the beam is at all does not hit the micromirror, or the beam that is reflected, represents only part of the original Beam, insofar as that part of the light beam that does not open the micromirror hits, is cut, resulting in a damping of the Light beam results.

Similarly, hits in the output section light, which from a Ausgangsmikrospiegel may not be reflected on the microlens and will as a result not coupled into the output fiber.

alternative this may only affect some of the light on the microlens on, so that at most that part of the light could be coupled into the fiber. This has a damping of the light beam result. Further, even when the light is on the output microlens impinges when the light is with another Angle as parallel to the axis from the center of the microlens to the fiber, not all the light reaching the microlens into the output fiber coupled. This too leads for damping of the light beam.

Other implementations of the all-optical switch do not use a microlens array. Instead, each fiber has a lens integrated therewith to form a collimator so that the light comes out as a parallel beam. While the fibers of the optical beam may be made very regular, the direction in which the collimator lens faces may not be parallel to the line formed by the center of the lens and its associated micromirror. This angle is often set by the angle of the housing in which the collimators are mounted. If the angle of the lens is not parallel to the line formed by the center of the lens and its associated micromirror, the light beam will have a directional error insofar as it does not move directly to the center of its associated micromirror. If the distance between the collimator and the MEMS device is large, which may be required to prevent the input fiber bundle from blocking rays reflected from the micromirrors of the MEMS device the light beam hits the micromirror, if any, then off-center. As a result, either no light is reflected by the micromirror when the beam does not strike the micromirror at all, or the beam that is reflected represents only a portion of the original beam, in that part of the light beam that is not incident on the micromirror incident, is cut off, which has an attenuation of the light beam result.

Similarly, hits in the output section light, which from a Ausgangsmikrospiegel is reflected, possibly not on the collimator lens and As a result, it is not coupled into the output fiber.

alternative This may be due to the fact that only part of the light hits the collimator lens on, so at the most that Part of the light could be coupled into the fiber. This has a damping of the light beam result. Further, even when the light is on the output microlens impinges when the light is with another Angle as parallel to the axis from the center of the microlens to the fiber, not all the light reaching the microlens into the output fiber coupled. This too leads for damping of the light beam.

the same Type of problem is in place when using a waveguide a fiber bundle in front.

Though it is quite easy to do the alignment to make sure that the light beam the desired Path follows when only a single input fiber or a single Output fiber is present. If, however, a bunch of input or output fibers present - which thousand or more fibers may comprise it's an exceedingly difficult task to accomplish that all the rays are parallel.

CA-A-2,325,611 and EP-A-1,102,096 disclose optical devices for straightening of signals between a plurality of first and second ports by means of MEMS devices.

SUMMARY THE INVENTION

We have recognized that the previously mentioned problem is that multiple beams of light are not parallel and / or have an undesirable angle when they leave their source by arranging an imaging system between the microlens array and / or the collimators and the movable micromirrors of the MEMS device, to which the light rays steered or from which the light rays are deflected, can be corrected. Such an arrangement causes a Image of the microlens array and / or the collimators on the MEMS device is formed or vice versa, due to the reversible nature of Optics, whereby the distance between the microlens array and / or the Collimators and the MEMS device along which the light rays previously moved, successfully eliminated. Thus, advantageously no ray of light, even if he is not in the desired direction Moved parallel to the line passing through the center of its lens or its collimator and its associated micromirror will be offered the opportunity to move away from his desired destination move away.

at an embodiment In the system, the imaging system reproduces the reflection angle the light away from the first micromirror, which by means of a telecentric Systems, also known as the 4-f system can be accomplished. The physical Size of the arrangement can by compacting the optical path, z. B. by use suitable conventional Mirrors and / or by using collapsible arrangements, d. H. Arrangements in which only one MEMS device stage is present, which a double function as both input and output reduces the use of at least one conventional mirror become. The overall system is arranged to be imposed on anyone Inversions.

SHORT DESCRIPTION THE DRAWING

It demonstrate:

1 an exemplary arrangement for performing optical switching according to the principles of the invention;

2 an exemplary fully optical switching arrangement in which the optical path is arranged to allow at least one of the MEMS devices to be parallel to the plane of light entering or emerging from the fibers of its respective fiber bundle;

3 another arrangement for the entirely optical switching arrangement 2 in which, however, mirrors are aligned with a hole to allow the input fiber bundle and the output fiber bundle to be on the same side of the path between the MEMS devices;

4 another arrangement for the entirely optical switching arrangement 2 in which, however, instead of mirrors having a hole, small mirrors are used at the focal points of different ones of the imaging system;

5 another arrangement for the entirely optical switching arrangement 4 in which, however, the small mirrors are aligned to allow the input fiber bundle and the output fiber bundle to be on the same side of the path between the MEMS devices;

6 another, simpler embodiment of a fully optical switching arrangement according to the principles of the invention, wherein the optical path is arranged to allow at least one of the MEMS devices to be parallel to the plane of light entering or entering the fibers of its respective fiber bundle emerges from it;

7 another embodiment of the invention, which does not require a mirror with holes or small mirror;

8th another, simpler and more compact embodiment of the in 6 shown entirely optical switching arrangement;

9 a collapsible embodiment of the in 8th shown entirely optical switching arrangement; and

10 an enlarged view of a portion of an output MEMS device with a mirror 8th ,

DETAILED DESCRIPTION

The The following is merely an illustration of the basic ideas the invention. It will thus be appreciated that relevant experts will be able to devise various arrangements which, although not explicitly described or illustrated in this document which embody the principles of the invention and within their scope, which is defined in the appended claims. Furthermore, all examples and conditions given in this document should be included knotted Essentially expressions only expressive Purposes serve to assist the reader in understanding the basic idea of the invention and introduced by the inventor To provide concepts for improving the state of the art, and they are to be interpreted in such a way that they are not specific to such cited Examples and conditions limited are.

Provided nothing else is expressly stated in this document, The drawings are not to scale drawn.

Furthermore unless expressly stated otherwise in this document will be shown and / or described in this document Lens actually an optical system, which the respective specified properties of this Lens. Such an optical system can by means of a however, is not necessarily limited to this. Likewise, in cases in which a mirror is shown and / or described, in reality an optical system with the specified properties of such Mirror shown and / or described, which by means of a single Mirror element can be implemented, but not necessarily is limited to a single mirror element. This comes from since, as is well known in the art, the functionality of a curved Mirror by means of a combination of lenses and mirrors and vice versa can be realized. About that In addition, any arrangement of optical components may be used performs a specified function, z. As an imaging system, grating, coated elements and prisms, by any other arrangement of optical components that use the same performs specified function, be replaced. Accordingly, unless otherwise stated in this document expressly is specified, all optical elements or systems which in are able to perform a specific function within one of these Document disclosed overall embodiment to provide for The purposes of the present disclosure are equivalent to each other.

In This document is intended to cover the term microelectromechanical system device (MEMS device) an entire MEMS device or any Section of it. Accordingly, if a section of a MEMS device inoperable or a portion of a MEMS device is covered, a Such MEMS device for Nevertheless, purposes of the present disclosure are as a MEMS device considered.

1 shows an exemplary arrangement for performing optical switching in accordance with the principles of the invention. In 1 a) an input fiber bundle are shown 101 , b) an input microlens array 103 , c) an input MEMS device 105 , d) a lens 107 , e) a lens 109 , f) a lens 113 , g) an output MEMS device 115 , h) a lens 117 , i) a lens 119 , j) an output microlens array 123 and k) an output fiber bundle 125 ,

The input fiber bundle 101 leads to switching optical signals. In particular, each fiber of the input fiber bundle 101 an input port to the switching system 1 , That through each fiber of the fiber bundle 101 supplied light passes through a respective corresponding microlens, which is part of a microlens array 103 is. The function of each Mi krolinse is to collimate the light beam which is supplied from its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 101 be integrated in an arrangement which forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, the light rays falling from the microlens array fall 103 go away, each on the imaging system, which is made up of the lenses 107 and 109 being composed while taking lens 107 enter and lens 109 escape. The imaging system is arranged to cause an image of the microlens array and / or the collimators on the input MEMS device 105 is formed or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 103 and the input MEMS device 105 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated.

Consequently is advantageously no ray of light, even if he is not in the desired direction moved parallel to the line passing through the center of its microlens or its collimator and its associated micromirror The opportunity is offered, of your desired Aim to move away.

be noted is that, although it is shown that the imaging system composed of two lenses for educational purposes only the clarity serves. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. As a system that is one or more lenses operated, can be used.

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 103 leaks, when that light reproduces the input MEMS device 105 reached. However, advantageously this angle becomes directly at the plane of the input MEMS device 105 reproduced. As a result, the light beams do not have the ability to move along the line of that angle, and thus are given no opportunity to wholly or partially miss the micromirror that is to reflect them.

It should be noted that, since the telecentric system may be inverting, the respective corresponding micromirrors of the input MEMS device 105 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 101 If these were not the imaging system would not have been used. The imaging system may also change the size of the image compared to the original.

This would allow the micromirrors of the input MEMS device 105 a different size and / or spacing than those of the microlens array and / or the collimators 103 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 107 and 109 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, great flexibility in system design is achieved.

Each micromirror of the first input MEMS device 105 is set to reflect the light beam impinging on it at a given predetermined angle. Each particular predetermined angle is chosen such that the beam is directed to a respective given micromirror on the output MEMS device 115 is directed, which of the particular fiber of the output fiber bundle 125 corresponds to which the light is directed by this micromirror as an output. Any error resulting from light that has entered the imaging system moving in a direction that is not parallel to the line passing through the center of its lens or its collimator and its associated micromirror at the first input. MEMS device is compensated by the "training" of the entirely optical system as long as the angle of departure of the light from the parallels is small compared to the maximum angle at which the mirror can be tilted. "Training" is the process of determining which voltages must be applied to the electrodes of each micromirror to achieve the required tilt which allows the best connection between it and each other micromirror of the opposing MEMS device, and also which voltage to the micromirror Electrodes of each of the opposite micromirrors must be applied.

After being reflected off its respective micromirror, each light beam passes on its way to the output MEMS device 115 through the optional lens 113 , The optional lens 113 serves as a field lens and shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position. Further, the field lens refocuses each of the rays passing through it, thus reducing losses.

The rays of light coming from the lens 113 go away, each fall on a respective micromirror of the output MEMS device 115 , Each micromirror of the output MEMS device 115 is set to reflect the light beam impinging on it at a given predetermined angle. Each respective predetermined angle is chosen so that each light beam to the respective fiber of the output fiber bundle 125 is directed, which should be the output fiber for the light beam.

After being reflected away from its respective micromirror and before it reaches its respective output fiber, each light beam passes through the lens 117 and then the lens 119 , which together form an imaging system. The imaging system is arranged to cause an image of the output MEMS device 115 at the output microlens array 123 and / or the collimators 123 is formed, or vice versa, due to the reversible nature of optics, reducing the distance between the output MEMS device 115 and the microlens array and / or the collimators 123 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated.

Consequently receives advantageously none of the light rays, even if he is not in the desired Direction parallel to the line moves through the center its microlens or its collimator and its associated Micromirror is formed, the opportunity to stand out from his desired Aim to move away.

As previously in conjunction with the lens of the input imaging system has been stated, this is used, even if it is shown that the imaging system is composed of two lenses, only pedagogical Purposes and purposes of clarity. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. B. a system that is one or more Lenses operated, can be used. In one embodiment The invention provides a telecentric system as an imaging system used.

be noted is that the imaging system compared to the original too the size of the picture can change.

This would allow the micromirrors of the output MEMS device 115 a different size and / or spacing than those of the microlens array and / or the collimators 123 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 117 and 119 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, a high degree of flexibility in system design is achieved.

The rays of light coming from the lens 119 go away, pass through a respective microlens of the microlens array 123 , The function of each microlens is to collimate the beam of light supplied to its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be applied to each output fiber of the fiber bundle 125 be integrated and thus form a collimator. The light from each microlens of the microlens array 123 then enters the respective output fiber bundle associated with the microlens.

be noted is that in some embodiments of the invention, only one imaging system must be used. at such embodiments can the imaging system only for the entrance or only for the output can be used.

This in 1 The system shown offers a great improvement over the arrangements known in the prior art. However, the performance is still somewhat limited, insofar as in 1 the input MEMS device 105 is at an angle with respect to the plane at which the light rays from the fibers of the input fiber bundle 101 and similarly the output MEMS device stands 115 at an angle with respect to the plane at which light enters the fibers of the output fiber bundle 125 entry.

As a result, the images of Faserbün del is not exactly coplanar with their respective MEMS device, resulting in the image being slightly out of focus. Therefore, according to one aspect of the invention in 2 an exemplary fully optical switching arrangement is shown in which the optical path is arranged to allow at least one of the MEMS devices to be parallel to the plane of light entering or exiting the fibers of its respective fiber bundle.

In addition to the elements 1 shows 2 Mirror with a hole 221 and 223 , As in 1 guides the input fiber bundle 101 to be switched optical signals. In particular, each fiber of the input fiber bundle 101 an input port to the switching system 1 , That through each fiber of the fiber bundle 101 supplied light passes through a respective corresponding microlens, which forms part of the microlens array 103 represents. The function of each microlens is to collimate the beam of light supplied by its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 101 be integrated in an arrangement that forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, each beam of light falling from the microlens array falls 103 goes away, on the imaging system, through the lenses 107 and 109 is formed, where he is in the lens 107 enters and with lens 109 exit. The imaging system is arranged to cause an image of the microlens array and / or the collimators on the input MEMS device 105 is formed or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 103 and the input MEMS device 105 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, no ray of light will have an opportunity to move away from its desired target.

be noted is that, although it is shown that the imaging system composed of two lenses for educational purposes only the clarity serves. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. As a system that is one or more lenses operated, can be used.

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 103 leaks, reproduces when this light enters the input MEMS device 105 reached. However, advantageously this angle becomes directly at the plane of the input MEMS device 105 reproduced. As a result, the light rays do not have the ability to move along the line of that angle, and thus are given no opportunity to miss the micromirror that is to reflect them.

It should be noted that, since the telecentric system may be inverting, the respective corresponding micromirrors of the input MEMS device 105 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 101 If these were not the imaging system would not have been used. The imaging system may also change the size of the image compared to the original.

This would allow the micromirrors of the input MEMS device 105 a different size and / or spacing than those of the microlens array and / or the collimators 103 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 107 and 109 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, great flexibility in system design is achieved.

In one aspect of the invention, the mirror is a hole 221 between the lens 107 and the lens 109 inserted, leaving the hole of the mirror with a hole 221 at the focal point of the lens 107 is arranged.

By placing the hole of the mirror with a hole 221 at the focal point of the lens 107 All the light that enters the imaging system passes through the focal point and thus through the hole, unhindered by the mirror 221 , Light that exits the imaging system moves to the input MEMS device 105 which is arranged to be parallel to the plane of light coming from the input fiber bundle 101 exit.

Each micromirror of the first input MEMS device 105 is set to reflect the light beam incident on it at a given predetermined angle. The particular predetermined angle is chosen such that the beam is directed to a given micromirror on the output MEMS device 115 is directed, which of the relevant fiber of the output fiber bundle 125 corresponds to which the light is directed as output. Any error that results from the light that has entered the imaging system traveling along a direction that is not parallel to the line formed by the center of its lens or its collimator and its associated micromirror is compensated by the training of the entirely optical system as long as the angle of departure of the light from the, parallels compared to the maximum angle in which the mirror can be inclined, is small.

It should be noted that at least the mirror is at the center of the input MEMS device 105 and the output MEMS device 115 can not be used for switching. Likewise, depending on the geometry and size of the hole in the holes with a hole, it is possible that other micromirrors disposed around the central micromirror may also be unusable.

After being reflected off its respective micromirror, each light beam passes through an imaging system extending from the lens 109 , the mirror with a hole 221 and the lens 113 composed.

The imaging system generates an image of the input MEMS device 105 at the mirror with a hole 223 ,

This Image of the input MEMS device may be considered as an input virtual MEMS device become.

Light from the image of the input MEMS device 105 gets off the mirror with a hole 223 away reflects and moves to the output MEMS device 115 passing it through the lens 117 passes. In this case, the lens is used 117 as a field lens. The field lens shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position. Further, the field lens refocuses each of the rays passing through it, thus reducing losses.

The light rays leaving the field lens each fall on a respective micromirror of the output MEMS device 115 , Each micromirror of the output MEMS device 115 is set to reflect the light beam incident on it at a given predetermined angle. Each respective predetermined angle is chosen such that each light beam is directed to the respective fiber of the output fiber bundle 125 , which is to be the output fiber for the light beam, is steered.

After being reflected away from its respective micromirror and before it reaches its respective output fiber, each light beam passes through the lens 117 and then the lens 119 , which together form an imaging system. The imaging system is arranged to cause an image of the output MEMS device 115 and / or the collimators on the output microlens array 123 and / or the collimators 123 is formed, or vice versa, due to the reversible nature of optics, reducing the distance between the output MEMS device 115 and the microlens array and / or the collimators 123 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, none of the light rays will have the opportunity to move away from its desired target.

As previously in conjunction with the lens of the input imaging system has been stated, this is used, even if it is shown that the imaging system is composed of two lenses, only pedagogical Purposes and purposes of clarity. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. B. a system that is one or more Lenses operated, can be used. In one embodiment The invention provides a telecentric system as an imaging system used.

be noted is that the imaging system compared to the original too can change the size of the picture.

This would allow the micromirrors of the output MEMS device 115 another size and / or spacing than those of the microlens array and / or the collimators 123 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 117 and 119 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, a high degree of flexibility in system design is achieved.

In one aspect of the invention, the mirror is a hole 223 between the lens 117 and the lens 119 inserted so that the hole of the mirror with a hole 223 at the focal point of the lens 117 is arranged.

By placing the hole of the mirror with a hole 223 At the focal point of the imaging system, all the light entering the imaging system passes through the focal point and thus through the hole, unobstructed by the mirror with a hole 223 ,

Advantageously, the output MEMS device is 115 arranged to be parallel to the plane of light that enters the output fiber bundle 125 occurs, whereby the sharpness problem of the embodiment 1 is corrected.

Every ray of light coming from the lens 119 goes away, passes through a respective microlens of the microlens array 123 , The function of each microlens is to collimate the beam of light supplied to its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be applied to each output fiber of the fiber bundle 125 be integrated and thus form a collimator.

The light from each microlens of the microlens array 123 then enters the respective output fiber bundle associated with the microlens.

It should be noted that in some embodiments of the invention only one imaging system needs to be used. In such embodiments, the imaging system may be used only for the input or only for the output. It is also to be noted that, although in 2 the angle of the mirror with a hole 45 Degree seems to be, such a certain angle is not required.

Any mirror with a hole may not have an actual physical hole, but may instead use an area at the desired location of the hole that is transparent to the wavelength of light switched by the fully optical switch. The required size of the transmissive region is directly proportional to the angular error of the light from the lens array 103 comes.

3 shows another arrangement for the entirely optical switching arrangement 2 in which, however, the mirrors with a hole 221 and 223 are aligned to allow the input fiber bundle 101 and the output fiber bundle 125 on the same side of the path between the MEMS devices. Visually, the paths and functionality are the same.

4 shows another arrangement for the entirely optical switching arrangement 2 which, however, instead of the mirror with a hole 221 and 223 to use, small mirrors 421 and 423 at the focal points of various of the imaging system. The little mirrors 421 and 423 can on glass plates 425 respectively. 427 be mounted to allow them to be stored outside the optical path. Further, rather than allowing the at least one of the MEMS devices to be physically parallel to the plane of light entering or exiting the fibers of its respective fiber bundle, in the embodiment, in fact 4 at least one of the MEMS devices is made optically parallel, ie, virtually parallel, to the plane of light entering or exiting the fibers of its respective fiber bundle.

As in 2 leads the fiber bundle 101 to be switched optical signals. In particular, each fiber of the input fiber bundle 101 an input port to the switching system 4 , The light passing through each fiber of the fiber bundle 101 is supplied through a respective corresponding microlens, which forms part of the microlens array 103 represents. The function of each microlens is to collimate the beam of light supplied by its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 101 be integrated in an arrangement which forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, the light rays falling from the microlens array fall 103 go away, each on the Abbil system, which is made up of the lenses 107 and 109 being composed while taking lens 107 enter and lens 109 escape. The imaging system is arranged to cause an image of the microlens array and / or the collimators on the input MEMS device 105 or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 103 and the input MEMS device 105 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated.

Consequently is advantageously no ray of light, even if he is not in the desired direction moved parallel to the line passing through the center of its microlens or its collimator and its associated micromirror The opportunity is offered, of your desired Aim to move away.

be noted is that, although it is shown that the imaging system composed of two lenses for educational purposes only the clarity serves. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. As a system that is one or more lenses operated, can be used.

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 103 leaks, reproduces when this light enters the input MEMS device 105 reached. However, advantageously this angle becomes directly at the plane of the input MEMS device 105 reproduced. As a result, the light rays do not have the ability to move along the line of that angle, and thus are given no opportunity to miss the micromirror that is to reflect them.

It should be noted that, since the telecentric system may be inverting, the respective corresponding micromirrors of the input MEMS device 105 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 101 If these were not the imaging system would not have been used. It should be noted that the imaging system may also change the size of the image compared to the original. This would allow the micromirrors of the input MEMS device 105 a different size and / or spacing than those of the microlens array and / or the collimators 103 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 107 and 109 to use to create multiple signal paths through the system, e.g. B. to implement a multicast, a broadcast, a monitoring, a protection and a recovery radio tion. Advantageously, great flexibility in system design is achieved.

According to one aspect of the invention, the small mirror is 421 between the lens 107 and the lens 109 used, so that's the small mirror 421 is arranged at the focal point of the imaging system. By placing the small mirror 421 At the focal point of the imaging system, all the light entering the imaging system passes through the focal point and therefore passes through the small mirror 421 reflected, causing its direction to the lens 109 changed.

Light exiting the imaging system moves to the input MEMS device 105 which is arranged so as to be optically parallel to the image of the input fiber bundle 101 which passes through the imaging system of the lenses 107 and 109 is generated.

Each micromirror of the first input MEMS device 105 is set to reflect the light beam incident on it at a given predetermined angle. Each respective predetermined angle is chosen such that the beam is to a given micromirror on the output MEMS device 115 is directed, which of the relevant fiber of the output fiber bundle 125 corresponds to which the light is directed as output. Any error that results from the light that has entered the imaging system traveling along a direction that is not parallel to the line formed by the center of its lens or its collimator and its associated micromirror is compensated by the training of the wholly optical system as long as the angle of departure of the light from the parallels is small compared to the maximum angle at which the mirror may be inclined.

It should be noted that at least the mirror is at the center of the input MEMS device 105 and the output MEMS device 115 can not be used for switching. Likewise, depending on the geometry and size of the Lo It is possible in the mirrors with a hole that other micromirrors which are arranged around the central micromirror can likewise not be used.

After being reflected off its respective micromirror, each light beam passes through an imaging system extending from the lens 109 and the lens 113 composed. The imaging system generates an image of the input MEMS device 105 at the level, which is the small mirror 423 cuts and parallel to the input MEMS device 105 is.

This image of the input MEMS device can be considered as an input virtual MEMS device. Light from the image of the input MEMS device 105 moves to the output MEMS device 115 Continue, passing through the lens 117 passes. In this case, the lens is used 117 as a field lens. The field lens shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position.

Further refocuses the field lens of each of the beams passing through it and thus reduces losses.

The light rays leaving the field lens each fall on a respective micromirror of the output MEMS device 115 , Each micromirror of the output MEMS device 115 is set to reflect the light beam incident on it at a given predetermined angle. Each respective predetermined angle is chosen such that each light beam is directed to the respective fiber of the output fiber bundle 125 , which is to be the output fiber for the light beam, is deflected when the output fiber bundle 125 along the path between the output MEMS device 115 and the input MEMS device 105 would have been.

However, after being reflected away from its respective micromirror and before reaching its respective output fiber, each light beam passes through an imaging system extending from the lens 117 , the little mirror 423 and the lens 119 composed. The imaging system is arranged to cause an image of the output MEMS device 115 at the output microlens array 123 and / or the collimators 123 or vice versa, due to the reversible nature of optics, which is at a right angle to the path between the output MEMS device 115 and the input MEMS device 105 is arranged. This change of direction is due to the small mirror 423 achieved at the focal point of the lens 117 is arranged. The imaging system thus changes the direction of the optical path and also successfully eliminates the distance between the output MEMS device 115 and the microlens array and / or the collimators 123 along which the light beams effectively moved in arrangements known in the art. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, none of the light rays will have the opportunity to move away from its desired target.

As previously in conjunction with the lens of the input imaging system has been stated, this is used, even if it is shown that the imaging system is composed of two lenses, only pedagogical Purposes and purposes of clarity. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. B. a system that is one or more Lenses operated, can be used. In one embodiment The invention provides a telecentric system as an imaging system used.

be noted is that the imaging system compared to the original too the size of the picture can change.

This would allow the micromirrors of the output MEMS device 115 a different size and / or spacing than those of the microlens array and / or the collimators 123 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 117 and 119 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, a high degree of flexibility in system design is achieved.

Every ray of light coming from the lens 119 goes away, passes through a respective microlens of the microlens array 123 , The function of each microlens is to collimate the beam of light supplied to its respective associated input fiber. In alternative embodiments of the invention can Instead of using a separate microlens array, a lens is applied to each output fiber of the fiber bundle 125 be integrated and thus form a collimator.

The light from each microlens of the microlens array 123 then enters the respective output fiber bundle associated with the microlens.

5 shows another arrangement for the entirely optical switching arrangement 4 in which, however, small mirrors 421 and 423 are aligned to allow the input fiber bundle 101 and the output fiber bundle 125 are arranged on the same side of the path between the MEMS devices. Visually, the paths and functionality are the same.

Other Arrangements with other angles can be accomplished by those versed in the art Those skilled in the art using the principles disclosed in this document be readily developed, whether for embodiments of the invention, which use mirrors with a hole, or embodiments invention, the small mirror or any combination from mirrors with a hole and small mirrors serve.

6 Figure 12 shows another, simpler embodiment of a fully optical switching arrangement in accordance with the principles of the invention in which the optical path is arranged to allow at least one of the MEMS devices to be parallel to the plane of light entering the fibers of its respective fiber bundle enters or exits. In 6 a) the input fiber bundle are shown 101 , b) the input microlens array 103 , c) the input MEMS device with a hole 605 , d) the lens 107 , e) the lens 613 , f) the output MEMS device with a hole 615 , g) the lens 119 , h) the output microlens array 123 and i) the output fiber bundle 125 ,

The input fiber bundle 101 leads to switching optical signals. In particular, each fiber of the input fiber bundle 101 an input port to the switching system 6 , That through each fiber of the fiber bundle 101 supplied light passes through a respective corresponding microlens, which is part of a microlens array 103 is. The function of each microlens is to collimate the beam of light supplied by its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 101 be integrated in an arrangement which forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, the light rays falling from the microlens array fall 103 go away, each on the imaging system, which is made up of the lenses 107 and 613 being composed while taking lens 107 enter and lens 613 escape. The imaging system is arranged to cause an image of the microlens array and / or the collimators on the input MEMS device having a hole 605 is formed or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 103 and the input MEMS device 105 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, no ray of light will be afforded the opportunity to move away from its desired target.

In accordance with one aspect of the invention, the output MEMS device is a hole 615 between the lens 107 and the lens 613 inserted so that the hole of the output MEMS device with a hole 615 at the focal point of the lens 107 is arranged. By placing the hole of the output MEMS device with a hole 615 at the focal point of the lens 107 All light entering the imaging system passes through the focal point and thus through the hole, unimpeded through the output MEMS device with a hole 615 ,

Light exiting the imaging system moves to the input MEMS device with a hole 605 which is arranged to be parallel to the plane of light coming from the input fiber bundle 101 exit.

be noted is that, although it is shown that the imaging system composed of two lenses for educational purposes only the clarity serves. Relevant Said experts will readily recognize that anything Imaging system, e.g. As a system that is one or more lenses operated, can be used.

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 103 exits, reproduces when this light enters the entrance be-MEMS device with a hole 605 reached.

However, advantageously, this angle becomes directly at the plane of the input MEMS device with a hole 605 reproduced. As a result, the light rays do not have the ability to move along the line of that angle, and thus are given no opportunity to miss the micromirror that is to reflect them.

According to one aspect of the invention, the input MEMS device is 605 between the lenses 613 and 119 inserted so that the hole of the input MEMS device 605 at the focal point of the lens 613 is arranged.

It should be noted that, since the telecentric system may be inverting, the respective respective micromirrors of the input MEMS device have a hole 605 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 101 If these were not the imaging system would not have been used. The imaging system may also change the size of the image compared to the original. This would allow the micromirrors of the input MEMS device to have one hole 605 a different size and / or spacing than those of the microlens array and / or the collimators 103 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 107 and 613 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, great flexibility in system design is achieved.

Each micromirror of the input MEMS device 605 is set to reflect the light beam incident on it at a given predetermined angle. The particular predetermined angle is chosen so that the beam to a given micromirror on the output MEMS device with a hole 615 is directed, which of the relevant fiber of the output fiber bundle 125 corresponds to which the light is directed as output. Any error that results from the light that has entered the imaging system traveling along a direction that is not parallel to the line formed by the center of its lens or its collimator and its associated micromirror is compensated by the training of the wholly optical system as long as the angle of departure of the light from the parallels is small compared to the maximum angle at which the mirror may be inclined.

After being reflected off its respective micromirror, each light beam passes through the lens 613 which serves as a field lens. The field lens shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position. Further, the field lens refocuses each of the rays passing through it, thus reducing losses.

The light rays departing from the field lens each fall on a respective micromirror of the output MEMS device having a hole 615 , Each micromirror of the output MEMS device with a hole 615 is set to reflect the light beam impinging on it at a given predetermined angle. Each respective predetermined angle is chosen so that each light beam to the respective fiber of the output fiber bundle 125 is directed, which should be the output fiber for the light beam.

Upon being reflected off its respective micromirror, the output MEMS device is reflected with a hole 615 and before reaching its respective output fiber, each light beam passes through the lens 613 and then the lens 119 , which together form an imaging system. The imaging system is arranged to cause an image of the output MEMS device having a hole 615 and / or the collimators on the output microlens array 123 and / or the collimators 123 is formed, or vice versa, due to the reversible nature of the optics, whereby the distance between the output MEMS device with a hole 615 and the microlens array and / or the collimators 123 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated.

Consequently receives advantageously none of the light rays, even if he is not in the desired Direction parallel to the line moves through the center its microlens or its collimator and its associated Micromirror is formed, the opportunity to stand out from his desired Aim to move away.

As previously stated in connection with the lens of the input imaging system, this serves, even though it is shown that the imaging system is composed of two lenses, only for educational purposes and purposes of clarity. Skilled artisans will readily recognize that any imaging system, e.g. For example, a system that uses one or more lenses can be used. In one embodiment of the invention, a telecentric system is used as the imaging system.

be noted is that the imaging system compared to the original too can change the size of the picture.

This would allow the micromirrors of the output MEMS device to have one hole 615 a different size and / or spacing than those of the microlens array and / or the collimators 123 exhibit.

It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 613 and 119 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, a high degree of flexibility in system design is achieved.

Every ray of light coming from the lens 119 goes away, passes through a respective microlens of the microlens array 123 , The function of each microlens is to collimate the beam of light supplied to its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be applied to each output fiber of the fiber bundle 125 be integrated and thus form a collimator.

The light from each microlens of the microlens array 123 then enters the respective output fiber bundle associated with the microlens.

It should be noted that the focus of the input MEMS device with a hole 605 or the output MEMS device with a hole 615 Likewise, depending on the geometry and size of the hole in the MEMS devices with a hole, it is possible that other micromirrors that would otherwise be present around the center of the micromirror array may also not be usable. The hole does not have to be an actual physical hole, but merely has to be an area which is transparent to the wavelengths of light switched by the wholly optical switch. It should also be noted that although the hole is shown and described as being located in the "center" of the MEMS device, it need not be in the center. Skilled artisans will be able to place the hole in other locations and develop additional operable embodiments. Any changes in the lens arrays or angles of the components to compensate for the other locations of the holes may be readily developed by those of ordinary skill in the art. In addition, by directing the light up or down to avoid impacting the MEMS device, it is possible to eliminate the hole altogether. Such an embodiment is in 7 shown. It should be noted that because the MEMS devices in 7 have no holes, they are simply referred to as input MEMS device and output MEMS device and thus as in 1 - 6 With 105 respectively. 115 Marked are.

8th shows another, simpler and more compact embodiment of the in 6 shown entirely optical switching arrangement. In 8th a) the input fiber bundle are shown 101 , b) the input microlens array 103 , c) the input MEMS device with a mirror 815 , d) the lens 107 , e) the lens 613 , f) the output MEMS device with a mirror 815 , g) the lens 119 , h) the output microlens array 123 and i) the Aungangsfaserbündel 125 ,

The input fiber bundle 101 leads to switching optical signals. In particular, each fiber of the input fiber bundle 101 an input port to the switching system 8th , That through each fiber of the fiber bundle 101 supplied light passes through a respective corresponding microlens, which is part of a microlens array 103 is. The function of each microlens is to collimate the beam of light supplied by its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 101 be integrated in an arrangement which forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, the light rays falling from the microlens array fall 103 go away, each on the imaging system, which is made up of the lenses 107 and 613 being composed while taking lens 107 enter and lens 613 escape. The picture sys This is arranged to cause an image of the microlens array and / or the collimator on the input MEMS device to be mirrored 805 is formed or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 103 and the input MEMS device 805 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, no ray of light will be afforded the opportunity to move away from its desired target.

In accordance with one aspect of the invention, the output MEMS device is a mirror 815 optically between the lens 107 and the lens 613 arranged so that the mirror 845 the output MEMS device with a mirror 815 at the focal point of the lens 107 is arranged.

Of the Mirror on which in naming a MEMS device with a Mirror is a mirror that is on the MEMS device is involved, but during the Operating the optical switch differently than the other microswitches, which are integrated on the MEMS device, is not moved.

The mirror may be a separate fixed mirror that can be fabricated or otherwise bonded to the MEMS device, or it may be a micromirror set to a fixed tilt. For the output MEMS device with a mirror 815 is the mirror of the mirror 845 while for the input MEMS device with a mirror 805 the mirror of the mirror 835 is.

10 shows an enlarged view of a portion of the output MEMS device with a mirror 815 , In

10 a MEMS device substrate is shown 1051 , Micromirror 1053 and the mirror 845 , The micromirrors 1053 can be tilted freely, with the mirror 845 however, kept at a fixed inclination. The input MEMS device with a mirror 835 has the same structure.

By placing the mirror 845 the output MEMS device with a mirror 815 at the focal point of the lens 107 All the light entering the imaging system passes through the focal point and thus passes through the mirror 845 the output MEMS device with a mirror 815 reflected. Light exiting the imaging system continues to move to the input MEMS device with a mirror 805 ,

be noted is that, although it is shown that the imaging system composed of two lenses for educational purposes only the clarity serves. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. As a system that is one or more lenses operated, can be used.

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 107 exits, when this light reflects the input MEMS device with a mirror 805 reached. However, advantageously, this angle becomes directly at the plane of the input MEMS device with a mirror 805 reproduced. As a result, the light rays do not have the ability to move along the line of that angle, and thus are given no opportunity to miss the micromirror that is to reflect them.

Note that because the telecentric system may be inverting, the respective respective micromirrors of the input MEMS device may be a mirror 805 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 101 If these were not the imaging system would not have been used. The imaging system may also change the size of the image compared to the original. This would allow the micromirrors of the input MEMS device to be mirrored 805 a different size and / or spacing than those of the microlens array and / or the collimators 103 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 107 and 613 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, great flexibility in system design is achieved.

Each micromirror of the input MEMS device 605 is set to reflect the light beam incident on it at a given predetermined angle. Each respective predetermined angle is chosen such that the beam is directed to a given micromirror on the output MEMS device with a mirror 815 is directed, which of the relevant fiber of the output fiber bundle 125 corresponds to which the light is directed as output. Any error that results from the light that has entered the imaging system traveling along a direction that is not parallel to the line formed by the center of its lens or its collimator and its associated micromirror is compensated by the training of the wholly optical system as long as the angle of departure of the light from the parallels is small compared to the maximum angle at which the mirror may be inclined.

After being reflected off its respective micromirror, each light beam passes through the lens 613 , which serves as a field lens. The field lens shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position. Further, the field lens refocuses each of the rays passing through it, thus reducing losses.

The light rays departing from the field lens each fall on a respective micromirror of the output MEMS device with a mirror 815 , Each micromirror of the output MEMS device with a mirror 815 is set to reflect the light beam impinging on it at a given predetermined angle. The respective predetermined angle is chosen so that each light beam to the respective fiber of the output fiber bundle 125 is directed, which should be the output fiber for the light beam.

After being reflected away from its respective micromirror and before it reaches its respective output fiber, each light beam passes through the lens 613 and then the lens 119 , which together form an imaging system. The imaging system is arranged to cause an image of the output MEMS device to be mirrored 815 and / or the collimators on the output microlens array 123 and / or the collimators 123 is formed, or vice versa, due to the reversible nature of the optics, whereby the distance between the output MEMS device with a mirror 815 and the microlens array and / or the collimators 123 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, none of the light rays will have the opportunity to move away from its desired target.

In accordance with one aspect of the invention, the input MEMS device is a mirror 805 between the lens 613 and the lens 119 used, so the mirror 835 the input MEMS device with a mirror 805 at the focal point of the lens 613 is arranged. By placing the mirror 835 the input MEMS device with a mirror 835 At the focal point of the imaging system, all the light entering the imaging system passes through the focal point and thus passes through the mirror 835 the input MEMS device with a mirror 805 reflected.

As previously in conjunction with the lens of the input imaging system has been stated, this is used, even if it is shown that the imaging system is composed of two lenses, only pedagogical Purposes and purposes of clarity. Relevant Experienced professionals will readily recognize that anything Imaging system, e.g. B. a system that is one or more Lenses operated, can be used. In one embodiment The invention provides a telecentric system as an imaging system used.

be noted is that the imaging system compared to the original too the size of the picture can change.

This would allow the micromirrors of the output MEMS device to be mirrored 815 a different size and / or spacing than those of the microlens array and / or the collimators 123 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lenses 613 and 119 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions. Advantageously, a high degree of flexibility in system design is achieved.

Every ray of light coming from the lens 119 goes away, passes through a respective microlens of the microlens array 123 , The function of each microlens is to collimate the beam of light supplied to its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be applied to each output fiber of the fiber bundle 125 be integrated and thus form a collimator.

The light from each microlens of the microlens array 123 then enters the respective output fiber bundle associated with the microlens.

be noted is that where the mirror of a MEMS device is arranged with a mirror is, no micromirrors can be used for switching.

Further It should be noted that although the mirror is considered to be in the "center" of the MEMS devices arranged and described arranged, he is not in the center have to be. Well-versed Professionals will be able to mirror the other places to arrange and additional operational embodiments to develop. Any changes the lens arrangements or angle of the components to the others Places of holes to compensate of relevant savvy professionals are easily developed.

at In the foregoing, designations of the input and output fiber bundles, MEMS devices, are provided and the like primary educational Purpose, since every cross-linked fiber pair is actually in between may have a bidirectional connection. However, an input fiber can no light to be emitted from any other source fiber than the one to which the light of the input fiber leads as the output is received.

9 shows a collapsible embodiment of the in 8th shown entirely optical switching arrangement. In 9 a) a fiber bundle are shown 901 , b) a microlens array 903 , c) a MEMS device with a mirror 905 , d) a lens 907 and e) a curved mirror 913 , Unlike the previously described embodiments, the fiber bundle contains 901 both input fibers which supply light and output fibers which receive light so that the fiber bundle 901 serves as both input and output ports. However, such designations of the input and output fibers are primarily for pedagogical purposes because each cross-linked fiber pair may actually have a bidirectional connection therebetween. Any specific fiber which the user designates as input fiber may be paired with any other fiber which the user intends to designate as output fiber.

Light coming from the input fibers of the fiber bundle 901 is supplied through a respective associated microlens of the first microlens array 903 , The function of each microlens is to collimate the beam of light supplied by its respective associated input fiber. In alternative embodiments of the invention, instead of using a separate microlens array, a lens may be associated with each fiber of the fiber bundle 901 be integrated in an arrangement which forms a collimator, so that the light emerges as a parallel beam.

In accordance with the principles of the invention, the light rays falling from the microlens array fall 903 go away, each to the imaging system, which is made up of the lens 907 , the mirror 935 the MEMS device with a mirror 905 and the curved mirror 913 composed. The light occurs at the lens 907 and enters at the curved mirror 913 out, having it on the mirror 935 which is substantially at the focal point of the lens 907 is arranged, was deflected. The mirror 935 is also essentially at the focal point of the curved mirror 935 arranged. The imaging system is arranged to cause an image of the microlens array and / or the collimators on the MEMS device to be mirrored 905 is formed or vice versa, due to the reversible nature of the optics, whereby the distance between the microlens array and / or the collimators 903 and the MEMS device with a mirror 905 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated.

Consequently is advantageously no ray of light, even if he is not in the desired direction moved parallel to the line passing through the center of its microlens or its collimator and its associated micromirror The opportunity is offered, of your desired Aim to move away.

The MEMS device with a mirror 905 has the same structure as the MEMS device with a mirror 815 , what a 10 is shown on.

By placing the mirror of the MEMS device with a mirror 905 at the focal point of the lens 907 All the light entering the imaging system passes through the focal point and thus passes through the mirror 935 of the MEMS device with a mirror 905 reflected. Light exiting the imaging system moves on to the MEMS device with a mirror 905 ,

In one embodiment of the invention, a telecentric system, also known as a 4-f system, is used as the imaging system. By using a telecentric system, such systems being well known in the art, the angle of each beam when it is from each of the microlenses 903 leaks, reproduces when this light the MEMS device with a mirror 905 reached. However, advantageously, this angle is directly at the level of the MEMS device with a mirror 905 reproduced. As a result, the light rays do not have the ability to move along the line of that angle, and thus are given no opportunity to miss the micromirror that is to reflect them.

It should be noted that since the telecentric system may be inverting, the respective respective micromirrors of the MEMS device may include a mirror 905 maybe not in exactly the same place, eg. B. on a direct line from the input fiber bundle 901 If these were not the imaging system would not have been used. It should be noted that the imaging system may also change the size of the image compared to the original. This would allow the micromirrors of the MEMS device to be mirrored 905 a different size and / or spacing than those of the microlens array and / or the collimators 903 exhibit. It would also allow the use of a fiber bundle without a microlens array and / or collimators if the fill factor, ie the ratio between the dot size and the distance between the dots, between the fiber bundle and the micromirrors of the MEMS device is substantially maintained. Furthermore, it is possible to use optical splitters, e.g. B. between the lens 907 and the curved mirror 913 to use to create multiple signal paths through the system, e.g. To implement multicast, broadcast, monitor, protection and recovery functions.

advantageously, will be a big one Flexibility in the System design achieved.

Each micromirror of the MEMS device 905 is set to reflect the light beam incident on it at a given predetermined angle.

Each respective predetermined angle is chosen such that the beam is directed to a given micromirror of MEMS device with a mirror 905 is directed, which of the respective output fiber of the fiber bundle 901 corresponds to which the light is directed as the output, after the light through the curved mirror 913 is reflected, which also fulfills the function of a field lens. The field lens function shifts the angle at which the light impinges on each micromirror to a position to which the light is directed. This makes it possible to homogenize all input micromirrors, inasmuch as all micro-mirrors which have the same slope will deflect their light to the same position.

Further refocuses the field lens of each of the beams passing through it and thus reduces losses. Any mistake that results that the light, which entered the imaging system is moved along a direction that is not parallel to the Line is through the center of his lens or his Collimator and its associated micromirror is formed through the training of the thoroughly compensated as long as the deviation angle of the Light of the parallels compared with the maximum angle, in which the mirror can be tilted is small.

The rays of light coming from the curved mirror 913 move back each fall on a respective micromirror of the MEMS device with a mirror 905 which is an output micromirror, insofar as it is used to direct the light to a particular fiber of the fiber bundle 101 hinzulenken over which the light is supplied as an output. Each output micromirror of the MEMS device with a mirror 905 is set to reflect the light beam impinging thereon at a given predetermined angle selected such that each light beam is directed to its respective output fiber of the fiber bundle 901 is directed.

After being reflected off its respective output micromirror and before it reaches its respective output fiber, each light beam passes through the imaging system passing through the curved mirror 913 , the mirror 935 and the lens 907 is formed.

This imaging system is the same imaging system through which the input light beams initially passed. As previously explained, the imaging system is arranged to cause an image of the MEMS device to be mirrored 905 on the microlens array 903 and / or the collimators 903 is formed, or vice versa, due to the reversible nature of the optics, whereby the distance between the output MEMS device with a mirror 905 and the microlens array and / or the collimators 903 along which the light beams have effectively moved in arrangements known in the art is successfully eliminated. Thus, advantageously, even if it does not move in the desired direction parallel to the line formed by the center of its microlens or its collimator and its associated micromirror, none of the light rays will have the opportunity to move away from its desired target.

Each output light beam from the lens 907 goes away, passes through a respective microlens of the microlens array 903 , The light from each microlens of the microlens array 903 then enters the respective output fiber of the fiber bundle 901 a, which is associated with the microlens.

be noted is that where the mirror of a MEMS device is arranged with a mirror is, no micromirrors can be used for switching.

Further It should be noted that although the mirror is considered to be in the "center" of the MEMS devices arranged and described arranged, he is not in the center have to be. Well-versed Professionals will be able to mirror the other places to arrange and additional operational embodiments to develop. Any changes the lens arrangements or angle of the components to the others Places of holes to compensate of relevant savvy professionals are easily developed.

As noted, the embodiment is off 9 a collapsible version of the invention.

Well-versed Professionals will readily be able to collapsible versions other embodiments to develop the invention.

be noted is that in place of optical fibers, which are the light rays as inputs respectively, this by an optical source, eg. B. a laser or a light emitting diode, planar waveguides or the like, can be supplied. Similarly, could instead of optical fibers receiving the light beams as outputs, the Light rays through other receivers, for example, photodetectors, planar waveguides or the like, be received.

Claims (15)

An optical switch comprising: a first microelectromechanical system (MEMS) device [ 105 . 115 . 605 . 615 ], which includes a first number of micromirrors, and a first imaging system [ 107 . 109 . 117 . 119 . 613 . 907 . 913 ]; wherein the optical switch is CHARACTERIZED in that: the first imaging system is optically coupled at one end thereof to the first MEMS device to be coupled to the end of the first imaging system which is the end of the first imaging system to which the first MEMS device is coupled is opposite to generate an image of the first MEMS device; wherein the image of the first MEMS device is closer to at least one element of the set, which inputs to the optical switch and outputs of the optical switch [ 101 . 103 . 123 . 125 ] than in the first MEMS device. An optical switch according to claim 1, wherein the image at least one point crosses a plane passing through the at least one point an item from the set, which inputs to the optical switch and outputs of the optical switch is formed. An optical switch according to claim 1, wherein an optical Element of the first imaging system, which is smaller than the entirety of the first imaging system, also as a field lens for the optical Switch is used. An optical switch according to claim 1, further comprising a field lens [ 113 . 613 ] through which light reflected by the first MEMS device passes. An optical switch according to claim 1, further comprising a curved mirror [ 913 ], which is arranged to perform the function of a field lens, and which reflects light on an optical path which has been reflected by the first MEMS device. An optical switch according to claim 1, 2, 4, 5 or 6, wherein said first MEMS device comprises a MEMS device having a fixed mirror during operation [ 935 ], wherein the fixed during operation mirror is disposed substantially at a focal point of the first imaging system. An optical switch according to claim 1, wherein the first MEMS device has an area facing light of at least some wavelengths, which are switched by the optical switch, is permeable. An optical switch according to claim 7, wherein the transmissive region is disposed substantially at a focal point of the first imaging system. An optical switch according to claim 1, wherein light passing through the first imaging system passes through a transmissive region of a mirror [ 425 . 427 ], wherein the transmissive region is transmissive to at least a few wavelengths switched by the optical switch and within the optical path of the first imaging system while the remainder of the mirror is not within the optical path of the imaging system. An optical switch according to claim 1, wherein the first Imaging system is a telecentric imaging system. The optical switch of claim 1, further comprising: a second microelectromechanical system (MEMS) device [ 105 . 115 . 605 . 615] comprising a second number of micromirrors; and a second imaging system [ 107 . 109 . 117 . 119 . 613 . 907 . 913 ] optically coupled to the second MEMS at one end thereof to form an image of the second MEMS device at the end of the second imaging system opposite that end of the second imaging system to which the second MEMS device is coupled to create; wherein the image of the first MEMS device is closer to an element of the set than to the first MEMS device, and the image of the second MEMS device is closer to the other element of the set than to the second MEMS device; and wherein light reflected by at least one of the micromirrors of the first MEMS device is reflected by at least one of the micromirrors of the second MEMS device. An optical switch according to claim 11, wherein the first imaging system and the second imaging system at least share a lens. Method of use in a wholly optical Switch, CHARACTERIZED by the step of imaging a first one microelectromechanical system (MEMS) device, which includes a first number of micromirrors to form an image of first MEMS device to produce closer to at least one of the Quantity, including inputs to the optical switch and outputs of the optical switch, than in the first MEMS device. The method of claim 13, further comprising the step of passing through of light rays which generate the image through a transparent area, which is contained within a mirror, essentially when the light beams essentially meet each other at a focal point. The method of claim 13, further comprising the step of reflecting light rays, which is the image generate, away from a mirror on the MEMS device, the one having a fixed inclination, substantially when the light beams are facing each other essentially at a focal point.