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DE602004031609D1 - S einen hydrierten amorphen kohlenstoff, und verfahren zur abscheidung eines derartigen überzugs - Google Patents

S einen hydrierten amorphen kohlenstoff, und verfahren zur abscheidung eines derartigen überzugs

Info

Publication number
DE602004031609D1
DE602004031609D1 DE602004031609T DE602004031609T DE602004031609D1 DE 602004031609 D1 DE602004031609 D1 DE 602004031609D1 DE 602004031609 T DE602004031609 T DE 602004031609T DE 602004031609 T DE602004031609 T DE 602004031609T DE 602004031609 D1 DE602004031609 D1 DE 602004031609D1
Authority
DE
Germany
Prior art keywords
coating
separating
amorphous carbon
hydrogenated amorphous
mechanical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004031609T
Other languages
English (en)
Inventor
Marc Plissonnier
Frederic Gaillard
Stephanie Thollon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602004031609D1 publication Critical patent/DE602004031609D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
DE602004031609T 2003-06-16 2004-06-15 S einen hydrierten amorphen kohlenstoff, und verfahren zur abscheidung eines derartigen überzugs Expired - Lifetime DE602004031609D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0307221A FR2856078B1 (fr) 2003-06-16 2003-06-16 Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d'un tel revetement.
PCT/FR2004/001486 WO2004113586A1 (fr) 2003-06-16 2004-06-15 Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d’un tel revetement

Publications (1)

Publication Number Publication Date
DE602004031609D1 true DE602004031609D1 (de) 2011-04-14

Family

ID=33484470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004031609T Expired - Lifetime DE602004031609D1 (de) 2003-06-16 2004-06-15 S einen hydrierten amorphen kohlenstoff, und verfahren zur abscheidung eines derartigen überzugs

Country Status (9)

Country Link
US (1) US7488536B2 (de)
EP (1) EP1636399B1 (de)
JP (2) JP5064027B2 (de)
KR (1) KR20060026042A (de)
AT (1) ATE500349T1 (de)
DE (1) DE602004031609D1 (de)
ES (1) ES2361916T3 (de)
FR (1) FR2856078B1 (de)
WO (1) WO2004113586A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1934995B1 (de) * 2005-07-15 2014-04-02 Impact Coatings AB (Publ.) Kontaktelement und kontaktanordnung
FR2896807B1 (fr) * 2006-01-30 2008-03-14 Eads Ccr Groupement D Interet Structure multicouche mince, piece la comprenant et son procede de depot
JP2007327349A (ja) * 2006-06-06 2007-12-20 Tocalo Co Ltd 送液ポンプ用部材及びその製造方法
JP2007327350A (ja) * 2006-06-06 2007-12-20 Tocalo Co Ltd 真空ポンプ用部材及びその製造方法
AT503288B1 (de) * 2006-07-26 2007-09-15 Bosch Gmbh Robert Verfahren zum aufbringen eines beschichtungsmaterials sowie beschichtung für eine metallische oberfläche
US8039096B2 (en) * 2008-06-30 2011-10-18 Eaton Corporation Friction- and wear-reducing coating
US8550792B2 (en) * 2008-06-30 2013-10-08 Eaton Corporation Energy conversion device and method of reducing friction therein
JP5306242B2 (ja) * 2010-01-12 2013-10-02 株式会社東芝 ガス絶縁開閉装置
CN102358940B (zh) * 2011-10-12 2014-06-04 湖北久之洋红外系统股份有限公司 一种在物件基底上沉积抗腐蚀类金刚石薄膜的方法
US20150004362A1 (en) * 2013-07-01 2015-01-01 General Electric Company Multilayered coatings with diamond-like carbon
JP6318430B2 (ja) * 2014-06-02 2018-05-09 地方独立行政法人山口県産業技術センター 複合硬質皮膜部材及びその製造方法
FR3075231B1 (fr) * 2017-12-18 2019-11-15 Compagnie Generale Des Etablissements Michelin Sol et dispositif et procedes associes
KR20230054860A (ko) * 2020-09-02 2023-04-25 엔테그리스, 아이엔씨. 다이아몬드-유사 탄소 및 침착된 규소-기재 물질을 포함하는 엠보싱을 갖는 정전 척, 및 관련 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325662A (ja) * 1986-07-18 1988-02-03 Fuji Electric Co Ltd 電子写真感光体
JPH01201820A (ja) * 1988-02-05 1989-08-14 Idemitsu Petrochem Co Ltd 磁気記録媒体
JPH01317197A (ja) * 1988-06-16 1989-12-21 Kanegafuchi Chem Ind Co Ltd ダイヤモンド薄膜基板およびその製法
JPH02305095A (ja) * 1989-05-18 1990-12-18 Yamaha Corp スピーカー振動板
JPH0769479B2 (ja) * 1990-10-22 1995-07-31 東芝セラミックス株式会社 シンクロトロン放射光用反射ミラー
JP3246513B2 (ja) * 1991-09-04 2002-01-15 住友電気工業株式会社 ダイヤモンドライクカーボン積層膜
JP2755078B2 (ja) * 1992-11-11 1998-05-20 富士ゼロックス株式会社 静電荷像担持用誘電体部材
JPH07228962A (ja) * 1994-02-21 1995-08-29 Kyocera Corp 硬質層被覆部材
US5900289A (en) * 1995-11-29 1999-05-04 Antec Angewandte Neue Technologien Gmbh Method of producing a colorating coating
JP3561611B2 (ja) * 1997-09-25 2004-09-02 三洋電機株式会社 硬質炭素系被膜
US20020032073A1 (en) * 1998-02-11 2002-03-14 Joseph J. Rogers Highly durable and abrasion resistant composite diamond-like carbon decorative coatings with controllable color for metal substrates
JP4246827B2 (ja) * 1998-12-15 2009-04-02 Ｔｄｋ株式会社 ダイヤモンド状炭素膜を被覆した部材
US6545809B1 (en) * 1999-10-20 2003-04-08 Flex Products, Inc. Color shifting carbon-containing interference pigments

Also Published As

Publication number Publication date
JP2012112047A (ja) 2012-06-14
EP1636399B1 (de) 2011-03-02
EP1636399A1 (de) 2006-03-22
JP5064027B2 (ja) 2012-10-31
WO2004113586A1 (fr) 2004-12-29
US20060134424A1 (en) 2006-06-22
JP2006527791A (ja) 2006-12-07
FR2856078A1 (fr) 2004-12-17
US7488536B2 (en) 2009-02-10
ATE500349T1 (de) 2011-03-15
FR2856078B1 (fr) 2006-11-17
KR20060026042A (ko) 2006-03-22
ES2361916T3 (es) 2011-06-24

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