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DE60139047D1 - Optischer verschiebungssensor - Google Patents

Optischer verschiebungssensor

Info

Publication number
DE60139047D1
DE60139047D1 DE60139047T DE60139047T DE60139047D1 DE 60139047 D1 DE60139047 D1 DE 60139047D1 DE 60139047 T DE60139047 T DE 60139047T DE 60139047 T DE60139047 T DE 60139047T DE 60139047 D1 DE60139047 D1 DE 60139047D1
Authority
DE
Germany
Prior art keywords
shift sensor
optical shift
optical
sensor
shift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60139047T
Other languages
English (en)
Inventor
Tatsuya Matsunaga
Masahiro Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Application granted granted Critical
Publication of DE60139047D1 publication Critical patent/DE60139047D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
DE60139047T 2000-01-31 2001-01-31 Optischer verschiebungssensor Expired - Lifetime DE60139047D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000027429 2000-01-31
JP2000393787 2000-11-19
PCT/JP2001/000656 WO2001057471A1 (fr) 2000-01-31 2001-01-31 Capteur visuel a deplacement

Publications (1)

Publication Number Publication Date
DE60139047D1 true DE60139047D1 (de) 2009-08-06

Family

ID=26584858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139047T Expired - Lifetime DE60139047D1 (de) 2000-01-31 2001-01-31 Optischer verschiebungssensor

Country Status (5)

Country Link
US (1) US6724491B2 (de)
EP (1) EP1167918B1 (de)
JP (1) JP3797422B2 (de)
DE (1) DE60139047D1 (de)
WO (1) WO2001057471A1 (de)

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JP2001289614A (ja) * 2000-01-31 2001-10-19 Omron Corp 変位センサ
JP4833503B2 (ja) * 2003-02-28 2011-12-07 パナソニック電工Ｓｕｎｘ株式会社 厚さ測定装置
DE102005011344B4 (de) * 2004-03-15 2014-02-13 Omron Corporation Sensorvorrichtung
JP4548595B2 (ja) * 2004-03-15 2010-09-22 オムロン株式会社 センサ装置
JP4728609B2 (ja) * 2004-07-20 2011-07-20 株式会社キーエンス 光学式変位計
JP4648665B2 (ja) * 2004-07-26 2011-03-09 株式会社キーエンス 光学式変位計
MX2007002063A (es) * 2004-08-20 2007-04-13 Bridgestone Corp Metodo y aparato para medir una longitud de un miembro en forma de banda.
US20060054843A1 (en) * 2004-09-13 2006-03-16 Electronic Design To Market, Inc. Method and apparatus of improving optical reflection images of a laser on a changing surface location
KR100728482B1 (ko) * 2005-03-15 2007-06-13 오므론 가부시키가이샤 계측 영역의 자동 설정 수단을 구비한 변위 센서
US7400415B2 (en) * 2005-03-15 2008-07-15 Mitutoyo Corporation Operator interface apparatus and method for displacement transducer with selectable detector area
JP4532324B2 (ja) * 2005-03-31 2010-08-25 京セラキンセキ株式会社 被加工物の製造方法
JP5082314B2 (ja) * 2006-07-14 2012-11-28 オムロン株式会社 変位センサ
JP2008045928A (ja) * 2006-08-11 2008-02-28 Omron Corp 光学式計測装置および光学式計測装置の制御方法
US7986356B2 (en) * 2007-07-25 2011-07-26 Hewlett-Packard Development Company, L.P. System and method for determining a gamma curve of a display device
JP5202012B2 (ja) * 2008-02-06 2013-06-05 株式会社キーエンス 光学式変位計
CN101780649B (zh) * 2009-01-16 2012-10-10 鸿富锦精密工业（深圳）有限公司 刀具检测系统及方法
CN101819024B (zh) * 2010-03-22 2011-06-15 中南大学 一种基于机器视觉的二维位移检测方法
US9234770B2 (en) * 2010-04-19 2016-01-12 Qualcomm Incorporated Dynamic sensor range
US20120127487A1 (en) * 2010-11-18 2012-05-24 Sergey Potapenko Methods and apparatuses for measuring the thickness of glass substrates
JP4821934B1 (ja) * 2011-04-14 2011-11-24 株式会社安川電機 ３次元形状計測装置およびロボットシステム
WO2013028196A1 (en) * 2011-08-25 2013-02-28 Alliance For Sustainable Energy, Llc On-line, continuous monitoring in solar cell and fuel cell manufacturing using spectral reflectance imaging
JP6248510B2 (ja) * 2013-09-27 2017-12-20 株式会社ニコン 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、形状測定プログラム、及び記録媒体
WO2015189985A1 (ja) * 2014-06-13 2015-12-17 株式会社ニコン 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、形状測定プログラム、及び記録媒体
JP6728842B2 (ja) * 2016-03-24 2020-07-22 オムロン株式会社 光学計測装置
WO2017208699A1 (ja) * 2016-05-30 2017-12-07 ソニー株式会社 情報処理装置と情報処理方法とプログラムおよび撮像システム
CN106441138B (zh) * 2016-10-12 2019-02-26 中南大学 基于视觉测量的变形监测方法
US10480935B2 (en) 2016-12-02 2019-11-19 Alliance For Sustainable Energy, Llc Thickness mapping using multispectral imaging
JP7024285B2 (ja) * 2017-09-26 2022-02-24 オムロン株式会社 変位計測装置、システム、および変位計測方法
JP2022132827A (ja) * 2021-03-01 2022-09-13 オムロン株式会社 変位センサ及び状態監視方法

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Publication number Priority date Publication date Assignee Title
US4648717A (en) * 1984-02-06 1987-03-10 Robotic Vision Systems, Inc. Method of three-dimensional measurement with few projected patterns
US4650333A (en) * 1984-04-12 1987-03-17 International Business Machines Corporation System for measuring and detecting printed circuit wiring defects
US4891772A (en) * 1987-04-15 1990-01-02 Cyberoptics Corporation Point and line range sensors
US4846577A (en) * 1987-04-30 1989-07-11 Lbp Partnership Optical means for making measurements of surface contours
JPS63277910A (ja) * 1987-05-09 1988-11-15 Toshiba Mach Co Ltd 赤外線厚さ計の検出信号処理方法
US5129010A (en) * 1989-12-15 1992-07-07 Kabushiki Kaisha Toyoto Chuo Kenkyusho System for measuring shapes and dimensions of gaps and flushnesses on three dimensional surfaces of objects
US5280542A (en) * 1989-12-28 1994-01-18 Kabushiki Kaisha Toyota Chuo Kenkyusho XYZ coordinates measuring system
JP3036103B2 (ja) 1991-04-05 2000-04-24 オムロン株式会社 画像処理装置および方法
JP2959875B2 (ja) 1991-07-04 1999-10-06 松山株式会社 畝立て方法及び畝立て装置
US5668631A (en) * 1993-12-20 1997-09-16 Minolta Co., Ltd. Measuring system with improved method of reading image data of an object
US5546189A (en) * 1994-05-19 1996-08-13 View Engineering, Inc. Triangulation-based 3D imaging and processing method and system
JPH08219721A (ja) 1995-02-14 1996-08-30 Sony Corp 画像処理装置
US5969820A (en) * 1996-06-13 1999-10-19 Canon Kabushiki Kaisha Surface position detecting system and exposure apparatus using the same
US6064759A (en) * 1996-11-08 2000-05-16 Buckley; B. Shawn Computer aided inspection machine
US5923427A (en) * 1997-07-10 1999-07-13 Banner Engineering Corporation Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source
JP3028945B2 (ja) * 1998-04-17 2000-04-04 日本電気株式会社 多階調丸め補正処理方法およびパターン検査装置

Also Published As

Publication number Publication date
EP1167918B1 (de) 2009-06-24
US6724491B2 (en) 2004-04-20
US20020154318A1 (en) 2002-10-24
EP1167918A1 (de) 2002-01-02
WO2001057471A1 (fr) 2001-08-09
EP1167918A4 (de) 2006-11-22
WO2001057471B1 (fr) 2004-03-11
JP3797422B2 (ja) 2006-07-19
JPWO2001057471A1 (ja) 2004-08-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition