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DE60128073D1 - Substratreinigungssystem - Google Patents

Substratreinigungssystem

Info

Publication number
DE60128073D1
DE60128073D1 DE60128073T DE60128073T DE60128073D1 DE 60128073 D1 DE60128073 D1 DE 60128073D1 DE 60128073 T DE60128073 T DE 60128073T DE 60128073 T DE60128073 T DE 60128073T DE 60128073 D1 DE60128073 D1 DE 60128073D1
Authority
DE
Germany
Prior art keywords
cleaning system
substrate cleaning
substrate
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60128073T
Other languages
English (en)
Other versions
DE60128073T2 (de
Inventor
Ryoichi Ohkura
Yuji Ono
Hiroshi Yamaguchi
Miyuki Takaishi
Hideo Kamikochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SES Co Ltd
Original Assignee
SES Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SES Co Ltd filed Critical SES Co Ltd
Priority claimed from EP01113291A external-priority patent/EP1263022B1/de
Publication of DE60128073D1 publication Critical patent/DE60128073D1/de
Application granted granted Critical
Publication of DE60128073T2 publication Critical patent/DE60128073T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE60128073T 2001-05-31 2001-05-31 Substratreinigungssystem Expired - Fee Related DE60128073T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01113291A EP1263022B1 (de) 2001-05-31 2001-05-31 Substratreinigungssystem

Publications (2)

Publication Number Publication Date
DE60128073D1 true DE60128073D1 (de) 2007-06-06
DE60128073T2 DE60128073T2 (de) 2007-10-18

Family

ID=38047898

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60128073T Expired - Fee Related DE60128073T2 (de) 2001-05-31 2001-05-31 Substratreinigungssystem

Country Status (1)

Country Link
DE (1) DE60128073T2 (de)

Also Published As

Publication number Publication date
DE60128073T2 (de) 2007-10-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee