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DE60009694D1 - Ein inspektionssystem für mikrovias - Google Patents

Ein inspektionssystem für mikrovias

Info

Publication number
DE60009694D1
DE60009694D1 DE60009694T DE60009694T DE60009694D1 DE 60009694 D1 DE60009694 D1 DE 60009694D1 DE 60009694 T DE60009694 T DE 60009694T DE 60009694 T DE60009694 T DE 60009694T DE 60009694 D1 DE60009694 D1 DE 60009694D1
Authority
DE
Germany
Prior art keywords
microvias
inspection system
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60009694T
Other languages
English (en)
Other versions
DE60009694T2 (de
Inventor
Adrian Boyle
Peter Conlon
Niall Dorr
James Mahon
Mark Owen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MV Research Ltd
Original Assignee
MV Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MV Research Ltd filed Critical MV Research Ltd
Application granted granted Critical
Publication of DE60009694D1 publication Critical patent/DE60009694D1/de
Publication of DE60009694T2 publication Critical patent/DE60009694T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2805—Bare printed circuit boards
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10141—Special mode during image acquisition
    • G06T2207/10152—Varying illumination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Quality & Reliability (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE60009694T 1999-05-14 2000-05-11 Ein inspektionssystem für mikrovias Expired - Fee Related DE60009694T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IE990391 1999-05-14
IE990391 1999-05-14
PCT/IE2000/000061 WO2000070360A1 (en) 1999-05-14 2000-05-11 A microvia inspection system

Publications (2)

Publication Number Publication Date
DE60009694D1 true DE60009694D1 (de) 2004-05-13
DE60009694T2 DE60009694T2 (de) 2005-04-28

Family

ID=11042063

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60009694T Expired - Fee Related DE60009694T2 (de) 1999-05-14 2000-05-11 Ein inspektionssystem für mikrovias

Country Status (7)

Country Link
US (1) US6697154B2 (de)
EP (1) EP1181569B1 (de)
JP (1) JP2002544524A (de)
AU (1) AU4426800A (de)
DE (1) DE60009694T2 (de)
IE (1) IES20000356A2 (de)
WO (1) WO2000070360A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE376178T1 (de) * 2000-06-28 2007-11-15 Bosch Gmbh Robert Vorrichtung zum bildlichen erfassen von stückgütern
US20030067774A1 (en) * 2001-10-04 2003-04-10 Nanovia, L.P. Illumination systems and methods employing diffractive holographic optical elements
US20030086083A1 (en) * 2001-11-01 2003-05-08 Martin Ebert Optical metrology tool with dual camera path for simultaneous high and low magnification imaging
DE102004015326A1 (de) * 2004-03-30 2005-10-20 Leica Microsystems Vorrichtung und Verfahren zur Inspektion eines Halbleiterbauteils
US20060046618A1 (en) * 2004-08-31 2006-03-02 Sandhu Gurtej S Methods and systems for determining physical parameters of features on microfeature workpieces
US7331503B2 (en) * 2004-10-29 2008-02-19 Intel Corporation Solder printing process to reduce void formation in a microvia
US7379185B2 (en) * 2004-11-01 2008-05-27 Applied Materials, Inc. Evaluation of openings in a dielectric layer
US7433590B2 (en) * 2005-04-19 2008-10-07 Accu-Sort Systems, Inc. Method of low intensity lighting for high speed image capture
US7668364B2 (en) * 2005-04-26 2010-02-23 Hitachi Via Mechanics, Ltd. Inspection method and apparatus for partially drilled microvias
JP4584313B2 (ja) * 2005-08-31 2010-11-17 シーシーエス株式会社 同軸光照射装置
KR20070048034A (ko) * 2005-11-03 2007-05-08 엘지전자 주식회사 테이프 제품의 검사장치
US7372632B2 (en) * 2006-09-07 2008-05-13 Hitachi Via Mechanics, Ltd. Apparatus and methods for the inspection of microvias in printed circuit boards
TWM315340U (en) * 2006-12-11 2007-07-11 Lumos Technology Co Ltd Cone microlenses and lens structure using the same
KR101207198B1 (ko) * 2010-01-18 2012-12-03 주식회사 고영테크놀러지 기판 검사장치
US9764426B2 (en) * 2013-12-04 2017-09-19 Microlution Inc. Multi-station laser machine
SE537979C2 (sv) 2014-04-07 2016-01-05 Optonova Sweden Ab Förfarande för produktkontroll med kamera och belysningsanordning
WO2018111644A1 (en) * 2016-12-16 2018-06-21 Electro Scientific Industries, Inc. Imaging method for low contrast features
CN107064778A (zh) * 2017-05-05 2017-08-18 柏承科技(昆山)股份有限公司 Pcb盲孔检测方法
JP7187782B2 (ja) * 2018-03-08 2022-12-13 オムロン株式会社 画像検査装置
TWI821348B (zh) * 2019-08-01 2023-11-11 由田新技股份有限公司 量測孔狀結構的自動光學檢測系統
CN113933309B (zh) * 2021-10-28 2023-10-20 赣州市同兴达电子科技有限公司 一种复测aoi机台检盲孔孔内不良的方法
WO2024201724A1 (ja) * 2023-03-28 2024-10-03 株式会社Fuji 検査装置及び検査方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560273A (en) * 1982-11-30 1985-12-24 Fujitsu Limited Method and apparatus for inspecting plated through holes in printed circuit boards
US4647208A (en) * 1985-07-22 1987-03-03 Perceptron, Inc. Method for spatial measurement of holes
US5197105A (en) * 1990-05-30 1993-03-23 Dainippon Screen Mfg. Co. Ltd. Method of reading optical image of inspected surface and image reading system employabale therein
JPH0786466B2 (ja) * 1990-07-18 1995-09-20 大日本スクリーン製造株式会社 プリント基板のパターン検査装置
US5214712A (en) * 1990-09-11 1993-05-25 Matsushita Electric Industrial Co., Ltd. Pattern inspection system for inspecting defect of land pattern for through-hole on printed board
JPH0723847B2 (ja) * 1990-10-30 1995-03-15 大日本スクリーン製造株式会社 プリント基板のパターン検査方法
JP2969402B2 (ja) * 1991-12-02 1999-11-02 株式会社新川 ボンデイングワイヤ検査装置
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination
US5610710A (en) * 1996-05-28 1997-03-11 International Business Machines Corporation Dual mode illumination system for optical inspection

Also Published As

Publication number Publication date
US20020027654A1 (en) 2002-03-07
DE60009694T2 (de) 2005-04-28
EP1181569B1 (de) 2004-04-07
EP1181569A1 (de) 2002-02-27
US6697154B2 (en) 2004-02-24
WO2000070360A1 (en) 2000-11-23
IES20000356A2 (en) 2001-02-07
JP2002544524A (ja) 2002-12-24
AU4426800A (en) 2000-12-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee