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DE59704877D1 - Mikrogalvanisch hergestelltes bauteil - Google Patents

Mikrogalvanisch hergestelltes bauteil

Info

Publication number
DE59704877D1
DE59704877D1 DE59704877T DE59704877T DE59704877D1 DE 59704877 D1 DE59704877 D1 DE 59704877D1 DE 59704877 T DE59704877 T DE 59704877T DE 59704877 T DE59704877 T DE 59704877T DE 59704877 D1 DE59704877 D1 DE 59704877D1
Authority
DE
Germany
Prior art keywords
microgalvanically
made component
component
microgalvanically made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59704877T
Other languages
English (en)
Inventor
Joerg Heyse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE59704877T priority Critical patent/DE59704877D1/de
Application granted granted Critical
Publication of DE59704877D1 publication Critical patent/DE59704877D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/003—3D structures, e.g. superposed patterned layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Fuel-Injection Apparatus (AREA)
DE59704877T 1997-01-29 1997-11-19 Mikrogalvanisch hergestelltes bauteil Expired - Lifetime DE59704877D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59704877T DE59704877D1 (de) 1997-01-29 1997-11-19 Mikrogalvanisch hergestelltes bauteil

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19703080A DE19703080A1 (de) 1997-01-29 1997-01-29 Mikrogalvanisch hergestelltes Bauteil
PCT/DE1997/002708 WO1998033958A1 (de) 1997-01-29 1997-11-19 Mikrogalvanisch hergestelltes bauteil
DE59704877T DE59704877D1 (de) 1997-01-29 1997-11-19 Mikrogalvanisch hergestelltes bauteil

Publications (1)

Publication Number Publication Date
DE59704877D1 true DE59704877D1 (de) 2001-11-15

Family

ID=7818600

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19703080A Withdrawn DE19703080A1 (de) 1997-01-29 1997-01-29 Mikrogalvanisch hergestelltes Bauteil
DE59704877T Expired - Lifetime DE59704877D1 (de) 1997-01-29 1997-11-19 Mikrogalvanisch hergestelltes bauteil

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19703080A Withdrawn DE19703080A1 (de) 1997-01-29 1997-01-29 Mikrogalvanisch hergestelltes Bauteil

Country Status (6)

Country Link
US (1) US6280832B1 (de)
EP (1) EP0902848B1 (de)
JP (1) JP4102447B2 (de)
KR (1) KR100752060B1 (de)
DE (2) DE19703080A1 (de)
WO (1) WO1998033958A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19955975A1 (de) * 1999-11-19 2001-05-23 Inst Mikrotechnik Mainz Gmbh Lithographisches Verfahren zur Herstellung von Mikrobauteilen
EP1576207A2 (de) * 2002-05-07 2005-09-21 Microfabrica Inc. Verfahren und anordnung zum formen von strukturen
DE102010062596A1 (de) * 2010-12-08 2012-06-14 Robert Bosch Gmbh Ausrichtverfahren und Vorrichtung für elektrochemische Bearbeitung
DE102018203065A1 (de) * 2018-03-01 2019-09-05 Robert Bosch Gmbh Verfahren zur Herstellung eines Injektors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63290289A (ja) * 1987-05-20 1988-11-28 Seiko Epson Corp 光ディスク用スタンパの製造方法
JPS63290285A (ja) 1987-05-21 1988-11-28 Matsushita Electric Ind Co Ltd 犠牲陽極装置
US5190637A (en) 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
DE19607288A1 (de) 1995-03-29 1996-10-02 Bosch Gmbh Robert Verfahren zur Herstellung einer Lochscheibe

Also Published As

Publication number Publication date
KR20000064777A (ko) 2000-11-06
KR100752060B1 (ko) 2008-11-06
WO1998033958A1 (de) 1998-08-06
US6280832B1 (en) 2001-08-28
JP2000508715A (ja) 2000-07-11
EP0902848A1 (de) 1999-03-24
JP4102447B2 (ja) 2008-06-18
EP0902848B1 (de) 2001-10-10
DE19703080A1 (de) 1998-07-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)