[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

DE50008010D1 - Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung - Google Patents

Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung

Info

Publication number
DE50008010D1
DE50008010D1 DE50008010T DE50008010T DE50008010D1 DE 50008010 D1 DE50008010 D1 DE 50008010D1 DE 50008010 T DE50008010 T DE 50008010T DE 50008010 T DE50008010 T DE 50008010T DE 50008010 D1 DE50008010 D1 DE 50008010D1
Authority
DE
Germany
Prior art keywords
nitrogen
highly pure
column
rectification
temperature air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE50008010T
Other languages
English (en)
Inventor
Dipl-Ing Spoeri
Dipl-Ing Lochner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde GmbH
Original Assignee
Linde GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linde GmbH filed Critical Linde GmbH
Priority to DE50008010T priority Critical patent/DE50008010D1/de
Application granted granted Critical
Publication of DE50008010D1 publication Critical patent/DE50008010D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04151Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04187Cooling of the purified feed air by recuperative heat-exchange; Heat-exchange with product streams
    • F25J3/04218Parallel arrangement of the main heat exchange line in cores having different functions, e.g. in low pressure and high pressure cores
    • F25J3/04224Cores associated with a liquefaction or refrigeration cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04333Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04351Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
    • F25J3/04357Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen and comprising a gas work expansion loop
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04375Details relating to the work expansion, e.g. process parameter etc.
    • F25J3/04387Details relating to the work expansion, e.g. process parameter etc. using liquid or hydraulic turbine expansion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04375Details relating to the work expansion, e.g. process parameter etc.
    • F25J3/04393Details relating to the work expansion, e.g. process parameter etc. using multiple or multistage gas work expansion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04436Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using at least a triple pressure main column system
    • F25J3/04454Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using at least a triple pressure main column system a main column system not otherwise provided, e.g. serially coupling of columns or more than three pressure levels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00Processes or apparatus using separation by rectification
    • F25J2200/32Processes or apparatus using separation by rectification using a side column fed by a stream from the high pressure column
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00Processes or apparatus using separation by rectification
    • F25J2200/34Processes or apparatus using separation by rectification using a side column fed by a stream from the low pressure column
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00Processes characterised by the type or other details of the product stream
    • F25J2215/42Nitrogen or special cases, e.g. multiple or low purity N2
    • F25J2215/44Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2220/00Processes or apparatus involving steps for the removal of impurities
    • F25J2220/42Separating low boiling, i.e. more volatile components from nitrogen, e.g. He, H2, Ne
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2220/00Processes or apparatus involving steps for the removal of impurities
    • F25J2220/44Separating high boiling, i.e. less volatile components from nitrogen, e.g. CO, Ar, O2, hydrocarbons
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2235/00Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams
    • F25J2235/42Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams the fluid being nitrogen
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2240/00Processes or apparatus involving steps for expanding of process streams
    • F25J2240/02Expansion of a process fluid in a work-extracting turbine (i.e. isentropic expansion), e.g. of the feed stream
    • F25J2240/12Expansion of a process fluid in a work-extracting turbine (i.e. isentropic expansion), e.g. of the feed stream the fluid being nitrogen
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2245/00Processes or apparatus involving steps for recycling of process streams
    • F25J2245/42Processes or apparatus involving steps for recycling of process streams the recycled stream being nitrogen
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00Details related to the use of reboiler-condensers
    • F25J2250/04Down-flowing type boiler-condenser, i.e. with evaporation of a falling liquid film

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
DE50008010T 2000-09-13 2000-11-04 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung Expired - Fee Related DE50008010D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50008010T DE50008010D1 (de) 2000-09-13 2000-11-04 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10045128A DE10045128A1 (de) 2000-09-13 2000-09-13 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung
DE50008010T DE50008010D1 (de) 2000-09-13 2000-11-04 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung

Publications (1)

Publication Number Publication Date
DE50008010D1 true DE50008010D1 (de) 2004-11-04

Family

ID=7655964

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10045128A Withdrawn DE10045128A1 (de) 2000-09-13 2000-09-13 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung
DE50008010T Expired - Fee Related DE50008010D1 (de) 2000-09-13 2000-11-04 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10045128A Withdrawn DE10045128A1 (de) 2000-09-13 2000-09-13 Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung

Country Status (7)

Country Link
US (1) US6499313B2 (de)
EP (1) EP1189001B1 (de)
AT (1) ATE278167T1 (de)
BR (1) BR0103987A (de)
DE (2) DE10045128A1 (de)
ES (1) ES2230020T3 (de)
TW (1) TW524963B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006536A (ja) * 2002-05-31 2004-01-08 Ishikawajima Harima Heavy Ind Co Ltd 薄膜製造方法及び装置
JP5307055B2 (ja) * 2010-03-04 2013-10-02 大陽日酸株式会社 窒素及び酸素の製造方法並びに窒素及び酸素の製造装置。
RU2522132C2 (ru) * 2012-07-10 2014-07-10 Ооо "Зиф" Способ разделения воздуха
US20150168057A1 (en) * 2013-12-17 2015-06-18 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for producing liquid nitrogen
CN106247757B (zh) * 2016-08-26 2019-09-24 陈正洪 一种气体转化方法及系统
JP6900230B2 (ja) * 2017-04-19 2021-07-07 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 純度の異なる窒素を製造するための窒素製造システムおよびその窒素製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578095A (en) * 1984-08-20 1986-03-25 Erickson Donald C Low energy high purity oxygen plus argon
US5402647A (en) * 1994-03-25 1995-04-04 Praxair Technology, Inc. Cryogenic rectification system for producing elevated pressure nitrogen
DE19609489A1 (de) * 1996-03-11 1997-09-18 Linde Ag Verfahren und Vorrichtung zur Verflüssigung eines tiefsiedenden Gases
US5596886A (en) * 1996-04-05 1997-01-28 Praxair Technology, Inc. Cryogenic rectification system for producing gaseous oxygen and high purity nitrogen
GB9724787D0 (en) * 1997-11-24 1998-01-21 Boc Group Plc Production of nitrogen

Also Published As

Publication number Publication date
US6499313B2 (en) 2002-12-31
TW524963B (en) 2003-03-21
DE10045128A1 (de) 2002-03-21
US20020066289A1 (en) 2002-06-06
ES2230020T3 (es) 2005-05-01
EP1189001A1 (de) 2002-03-20
BR0103987A (pt) 2002-04-23
ATE278167T1 (de) 2004-10-15
EP1189001B1 (de) 2004-09-29

Similar Documents

Publication Publication Date Title
JPH02247485A (ja) 精溜によって空気を分解する方法及び装置
ATE129336T1 (de) Verfahren zur tieftemperaturzerlegung von luft.
EP0384688B1 (de) Lufttrennung
DE69012923D1 (de) Verfahren und Vorrichtung zur Herstellung von Stickstoff aus Luft.
ATE481607T1 (de) Verfahren zur gewinnung von gasförmigem und flüssigem stickstoff mit variablem anteil des flüssigprodukts
MY126482A (en) Method for carbon dioxide recovery from a feed stream
EP0773417A2 (de) Lufttrennungsverfahren und Vorrichtung zur Herstellung von Stickstoff
KR0141438B1 (en) Cryogenic air separation process producing elevated pressure nitrogen by pumped liquid nitrogen
GB2180923A (en) Process and apparatus for the production of pressurized nitrogen
CA2218630A1 (en) A three column cryogenic cycle for the production of impure oxygen and pure nitrogen
US4834785A (en) Cryogenic nitrogen generator with nitrogen expander
ATE260866T1 (de) Kryogene herstellung von wasserstoff und kohlenmonoxid mit einem unreinen kohlenmonoxidexpander
CA2058847A1 (en) Air separation
US5049174A (en) Hybrid membrane - cryogenic generation of argon concurrently with nitrogen
DE50008010D1 (de) Verfahren und Vorrichtung zur Erzeugung hoch reinen Stickstoffs durch Tieftemperatur-Luftzerlegung
US5077978A (en) Cryogenic process for the separation of air to produce moderate pressure nitrogen
EP0754923A2 (de) Verfahren und Vorrichtung zur Erzeugung von ultrahochreinem Stickstoff
CA1280360C (en) Air separation process with waste recycle for nitrogen and oxygen production
ATE301271T1 (de) Drei-säulen-system zur tieftemperatur-zerlegung von luft
ATE304154T1 (de) Vorrichtung und verfahren zur herstellung von gasförmigem sauerstoff unter niedrigem druck
DE50107586D1 (de) Verfahren zur Gewinnung von gasförmigem Stickstoff
JP2000203827A (ja) 合成ガス生産ユニットへ不純酸素を供給するための方法
EP0856713A2 (de) Herstellung von kryogenen Flüssigmischungen
JPH0261482A (ja) 超高純度窒素の製造方法及び装置
JPH0372908B2 (de)

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: LINDE AG, 80807 MUENCHEN, DE

8339 Ceased/non-payment of the annual fee