DE3781963D1 - Oberflaechenanalysegeraet. - Google Patents

Oberflaechenanalysegeraet.

Info

Publication number: DE3781963D1
Authority: DE; Germany
Prior art keywords: surface analyzer; analyzer
Prior art date: 1986-07-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8787110018T

Other languages

English (en)

Other versions

DE3781963T2 (de

Inventor

Masahiko C O Nissin Elect Aoki

Masashi C O Nissin Ele Konishi

Yasuhiro C O Nissin El Matsuda

Naoto C O Nissin Elect Okazaki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nissin Electric Co Ltd

Original Assignee

Nissin Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-07-12

Filing date

1987-07-10

Publication date

1992-11-05

1986-07-12 Priority claimed from JP61164299A external-priority patent/JPS6319746A/ja

1986-10-01 Priority claimed from JP61235397A external-priority patent/JPS6388743A/ja

1986-12-16 Priority claimed from JP29926986A external-priority patent/JPS63150845A/ja

1987-07-10 Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd

1992-11-05 Publication of DE3781963D1 publication Critical patent/DE3781963D1/de

1993-02-18 Application granted granted Critical

1993-02-18 Publication of DE3781963T2 publication Critical patent/DE3781963T2/de

2007-07-11 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Life Sciences & Earth Sciences (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Crystallography & Structural Chemistry (AREA)
Plasma & Fusion (AREA)
Spectroscopy & Molecular Physics (AREA)
General Engineering & Computer Science (AREA)
High Energy & Nuclear Physics (AREA)
Analysing Materials By The Use Of Radiation (AREA)

DE8787110018T 1986-07-12 1987-07-10 Oberflaechenanalysegeraet. Expired - Fee Related DE3781963T2 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP61164299A JPS6319746A (ja)	1986-07-12	1986-07-12	表面解析装置
JP61235397A JPS6388743A (ja)	1986-10-01	1986-10-01	表面解析装置
JP29926986A JPS63150845A (ja)	1986-12-16	1986-12-16	表面解析装置

Publications (2)

Publication Number	Publication Date
DE3781963D1 true DE3781963D1 (de)	1992-11-05
DE3781963T2 DE3781963T2 (de)	1993-02-18

Family

ID=27322310

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8787110018T Expired - Fee Related DE3781963T2 (de)	1986-07-12	1987-07-10	Oberflaechenanalysegeraet.

Country Status (3)

Country	Link
US (1)	US4829179A (de)
EP (1)	EP0253336B1 (de)
DE (1)	DE3781963T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63276860A (ja) *	1987-05-07	1988-11-15	Nissin Electric Co Ltd	表面解析装置
DE3904032A1 (de) *	1989-02-10	1990-08-16	Max Planck Gesellschaft	Elektronenmikroskop zur untersuchung von festkoerperoberflaechen
US5059785A (en) *	1990-05-30	1991-10-22	The United States Of America As Represented By The United States Department Of Energy	Backscattering spectrometry device for identifying unknown elements present in a workpiece
US5689112A (en) *	1996-04-12	1997-11-18	Enge; Harald A.	Apparatus for detection of surface contaminations on silicon wafers
JP4148864B2 (ja) *	2003-09-26	2008-09-10	株式会社神戸製鋼所	試料分析装置
US7005657B1 (en)	2005-02-04	2006-02-28	Varian Semiconductor Equipment Associates, Inc.	Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3240931A (en) *	1962-09-28	1966-03-15	Bendix Corp	Spatial discriminator for particle beams
DE1937482C3 (de) *	1969-07-23	1974-10-10	Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen	Mikrostrahlsonde
FR2193253B1 (de) *	1972-07-21	1975-03-07	Cameca
US3812354A (en) *	1973-05-31	1974-05-21	Atomic Energy Commission	Thermoluminescent detector for mass spectrometer
US3819941A (en) *	1973-10-15	1974-06-25	Bendix Corp	Mass dependent ion microscope having an array of small mass filters
US3955084A (en) *	1974-09-09	1976-05-04	California Institute Of Technology	Electro-optical detector for use in a wide mass range mass spectrometer
DE2556291C3 (de) *	1975-12-13	1980-11-27	Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen	Raster-Ionenmikroskop
US4435642A (en) *	1982-03-24	1984-03-06	The United States Of America As Represented By The United States National Aeronautics And Space Administration	Ion mass spectrometer
US4564758A (en) *	1984-02-01	1986-01-14	Cameca	Process and device for the ionic analysis of an insulating sample
FR2575597B1 (fr) *	1984-12-28	1987-03-20	Onera (Off Nat Aerospatiale)	Appareil pour la micro-analyse ionique a tres haute resolution d'un echantillon solide

1987
- 1987-07-06 US US07/070,252 patent/US4829179A/en not_active Expired - Lifetime
- 1987-07-10 EP EP87110018A patent/EP0253336B1/de not_active Expired
- 1987-07-10 DE DE8787110018T patent/DE3781963T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0253336A3 (en)	1990-01-10
EP0253336B1 (de)	1992-09-30
EP0253336A2 (de)	1988-01-20
DE3781963T2 (de)	1993-02-18
US4829179A (en)	1989-05-09

Publication	Publication Date	Title
ATE70057T1 (de)	1991-12-15	Antitumormittel.
DE3775679D1 (de)	1992-02-13	Vernebler.
DE3767169D1 (de)	1991-02-14	Sportschuh.
ATE57924T1 (de)	1990-11-15	3-aryloxy-3-substituierte-propanamine.
DE3764043D1 (de)	1990-09-06	Alkylendiamine.
ATE63533T1 (de)	1991-06-15	Xylolisomerisierung.
DE3779761D1 (de)	1992-07-16	Abseilgeraet.
DE3771918D1 (de)	1991-09-12	Chinolinamide.
DE3861432D1 (de)	1991-02-07	Analysengeraet.
DE3785294D1 (de)	1993-05-13	Neigungsmesser.
DE3786679D1 (de)	1993-09-02	Schmitt-triggerschaltung.
DE3773636D1 (de)	1991-11-14	Saeurebeschleunigte hydrocarboxilierung.
DE3771271D1 (de)	1991-08-14	Fluorphthalimide.
FI860054A0 (fi)	1986-01-07	Motionsanordning.
ES2023141B3 (es)	1992-01-01	Algunas 3-benzoil-4-oxolactamas.
DE3779382D1 (de)	1992-07-02	3-6-diphenylpyridazine.
DE3873399D1 (de)	1992-09-10	Oberflaechenanalysegeraet.
DE3781963D1 (de)	1992-11-05	Oberflaechenanalysegeraet.
DE3763648D1 (de)	1990-08-16	Rollski.
DE3782392D1 (de)	1992-12-03	Bauelement.
FI860046A0 (fi)	1986-01-06	Foerlaengningsanordning foer traefaner.
DE3766410D1 (de)	1991-01-10	Methylalkylcyclosiloxane.
DE3669032D1 (de)	1990-03-22	Okulopressionsgeraet.
DE3785405D1 (de)	1993-05-19	Blockierungsfreie konzentration.
DE3764485D1 (de)	1990-10-04	Polyglycidylamine.

Legal Events

Date	Code	Title	Description
1993-10-28	8364	No opposition during term of opposition
2004-06-09	8339	Ceased/non-payment of the annual fee