DE3482705D1 - Druckwandler. - Google Patents

Druckwandler.

Info

Publication number: DE3482705D1
Authority: DE; Germany
Prior art keywords: pressure converter; converter; pressure
Prior art date: 1983-12-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8585900385T

Other languages

English (en)

Inventor

A Knecht

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Rosemount Inc

Original Assignee

Rosemount Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-12-09

Filing date

1984-12-07

Publication date

1990-08-16

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24235510&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3482705(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1984-12-07 Application filed by Rosemount Inc filed Critical Rosemount Inc

1990-08-16 Application granted granted Critical

1990-08-16 Publication of DE3482705D1 publication Critical patent/DE3482705D1/de

2004-12-08 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Measuring Fluid Pressure (AREA)

DE8585900385T 1983-12-09 1984-12-07 Druckwandler. Expired - Fee Related DE3482705D1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US06/559,897 US4565096A (en)	1983-12-09	1983-12-09	Pressure transducer
PCT/US1984/002007 WO1985002677A1 (en)	1983-12-09	1984-12-07	Pressure transducer

Publications (1)

Publication Number	Publication Date
DE3482705D1 true DE3482705D1 (de)	1990-08-16

Family

ID=24235510

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8585900385T Expired - Fee Related DE3482705D1 (de)	1983-12-09	1984-12-07	Druckwandler.

Country Status (8)

Country	Link
US (1)	US4565096A (de)
EP (1)	EP0164413B2 (de)
JP (1)	JPS61500633A (de)
BR (1)	BR8407212A (de)
CA (1)	CA1225255A (de)
DE (1)	DE3482705D1 (de)
MX (1)	MX161014A (de)
WO (1)	WO1985002677A1 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4639631A (en) *	1985-07-01	1987-01-27	Motorola, Inc.	Electrostatically sealed piezoelectric device
US4732042A (en) *	1986-04-22	1988-03-22	Motorola Inc.	Cast membrane protected pressure sensor
WO1988007181A1 (en) *	1987-03-09	1988-09-22	Antonio Nicholas F D	Pressure sensor and transducer apparatus
GB8718637D0 (en) *	1987-08-06	1987-09-09	Spectrol Reliance Ltd	Sealing electrical feedthrough
US4790192A (en) *	1987-09-24	1988-12-13	Rosemount Inc.	Silicon side by side coplanar pressure sensors
US5165281A (en) *	1989-09-22	1992-11-24	Bell Robert L	High pressure capacitive transducer
US5020377A (en) *	1990-01-23	1991-06-04	Kavlico Corporation	Low pressure transducer using metal foil diaphragm
US5295395A (en) *	1991-02-07	1994-03-22	Hocker G Benjamin	Diaphragm-based-sensors
DE4132391C1 (en) *	1991-09-26	1992-10-01	Siemens Ag, 8000 Muenchen, De	Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry
CH688745A5 (fr) *	1993-06-25	1998-02-13	Suisse Electronique Microtech	Capteur de pression différentielle de type capacitif.
US5447073A (en) *	1994-02-04	1995-09-05	The Foxboro Company	Multimeasurement replaceable vortex sensor
US5463904A (en) *	1994-02-04	1995-11-07	The Foxboro Company	Multimeasurement vortex sensor for a vortex-generating plate
US5744725A (en) *	1994-04-18	1998-04-28	Motorola Inc.	Capacitive pressure sensor and method of fabricating same
US5616861A (en) *	1995-06-07	1997-04-01	Rosemount Aerospace Inc.	Three pressure pseudo -Δ-P sensor for use with three pressure air data probe
US5663506A (en) *	1995-08-21	1997-09-02	Moore Products Co.	Capacitive temperature and pressure transducer
US5672808A (en) *	1996-06-11	1997-09-30	Moore Products Co.	Transducer having redundant pressure sensors
EP1009986B1 (de) *	1996-07-10	2002-09-25	Honeywell Data Instruments, Inc.	Fehlerkompensierter druckwandler
DE19709846C1 (de) *	1997-02-28	1998-04-02	Siemens Ag	Druckdifferenz-Meßumformer
DE19750131C2 (de) *	1997-11-13	2002-06-13	Infineon Technologies Ag	Mikromechanische Differenzdrucksensorvorrichtung
JPH11295176A (ja) *	1998-04-14	1999-10-29	Nagano Keiki Co Ltd	差圧センサ
US6431003B1 (en)	2000-03-22	2002-08-13	Rosemount Aerospace Inc.	Capacitive differential pressure sensor with coupled diaphragms
AU2001297790B2 (en) *	2000-10-25	2006-10-12	Washington State University Research Foundation	Piezoelectric micro-transducers, methods of use and manufacturing methods for same
EP1236974A1 (de) *	2001-03-01	2002-09-04	Seyonic SA	Vorrichtung zur Druckmessung in zwei Punkten einer strömenden Flüssigkeit
US6920795B2 (en) *	2002-01-09	2005-07-26	Red Wing Technologies, Inc.	Adapter for coupling a sensor to a fluid line
US6848316B2 (en)	2002-05-08	2005-02-01	Rosemount Inc.	Pressure sensor assembly
JP4708679B2 (ja) *	2003-03-28	2011-06-22	株式会社デンソー	液封型圧力センサ
JP2006058078A (ja) *	2004-08-18	2006-03-02	Hitachi Ltd	熱式空気流量計
CN101069075B (zh) *	2004-12-08	2012-05-30	Abb专利有限公司	制造测量变换器的方法
US7691723B2 (en) *	2005-01-07	2010-04-06	Honeywell International Inc.	Bonding system having stress control
US7703328B2 (en) *	2006-05-18	2010-04-27	Baker Hughes Incorporated	Pressure sensor utilizing a low thermal expansion material
DE102009000071A1 (de) *	2009-01-08	2010-07-15	Robert Bosch Gmbh	Kapazitiver Drucksensor
FR2974628B1 (fr) *	2011-04-28	2013-12-27	Commissariat Energie Atomique	Microdebitmetre et son procede de realisation
DE102011078557A1 (de) *	2011-07-01	2013-01-03	Endress + Hauser Gmbh + Co. Kg	Verfahren zum Betreiben eines Absolut- oder Relativdrucksensors mit einem kapazitiven Wandler
JP5965165B2 (ja) *	2012-03-14	2016-08-03	アズビル株式会社	差圧発信器
GB2557345B (en)	2016-12-08	2021-10-13	Bae Systems Plc	MIMO communication system and data link
JP6753805B2 (ja) *	2017-03-22	2020-09-09	アズビル株式会社	差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
JP2018159593A (ja) *	2017-03-22	2018-10-11	アズビル株式会社	差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
US11371899B2 (en)	2018-05-17	2022-06-28	Rosemount Inc.	Measuring element with an extended permeation resistant layer

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3618390A (en) *	1969-10-27	1971-11-09	Rosemount Eng Co Ltd	Differential pressure transducer
DE2364027A1 (de) *	1973-12-21	1975-07-03	Siemens Ag	Differenzdruckmesszelle mit elektrischem abgriff
US3978731A (en) *	1974-02-25	1976-09-07	United Technologies Corporation	Surface acoustic wave transducer
US4131088A (en) *	1976-11-08	1978-12-26	The Bendix Corporation	Multiple function pressure sensor
US4207604A (en) *	1976-12-02	1980-06-10	Kavlico Corporation	Capacitive pressure transducer with cut out conductive plate
JPS5516228A (en) *	1978-07-21	1980-02-04	Hitachi Ltd	Capacity type sensor
FR2454616A1 (fr) *	1979-04-18	1980-11-14	Thomson Csf	Capteur de pression a ondes elastiques de surface et systeme d'allumage pour moteur a combustion interne mettant en oeuvre ce capteur
GB2048488B (en) *	1979-04-26	1983-04-27	Rosemount Eng Co Ltd	Differential pressure sensing apparatus
US4222277A (en) *	1979-08-13	1980-09-16	Kulite Semiconductor Products, Inc.	Media compatible pressure transducer
US4322980A (en) *	1979-11-08	1982-04-06	Hitachi, Ltd.	Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
EP0049955A1 (de) *	1980-10-09	1982-04-21	General Motors Corporation	Druckaufnehmer mit zwei Kammern
DE3238430A1 (de) *	1982-10-16	1984-04-19	Philips Patentverwaltung Gmbh, 2000 Hamburg	Differenzdrucksensor

1983
- 1983-12-09 US US06/559,897 patent/US4565096A/en not_active Expired - Lifetime
1984
- 1984-12-07 WO PCT/US1984/002007 patent/WO1985002677A1/en active IP Right Grant
- 1984-12-07 CA CA000469627A patent/CA1225255A/en not_active Expired
- 1984-12-07 BR BR8407212A patent/BR8407212A/pt unknown
- 1984-12-07 DE DE8585900385T patent/DE3482705D1/de not_active Expired - Fee Related
- 1984-12-07 MX MX203642A patent/MX161014A/es unknown
- 1984-12-07 JP JP60500108A patent/JPS61500633A/ja active Granted
- 1984-12-07 EP EP85900385A patent/EP0164413B2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH0565015B2 (de)	1993-09-16
US4565096A (en)	1986-01-21
EP0164413B1 (de)	1990-07-11
WO1985002677A1 (en)	1985-06-20
EP0164413A1 (de)	1985-12-18
EP0164413A4 (de)	1988-03-30
MX161014A (es)	1990-06-29
CA1225255A (en)	1987-08-11
JPS61500633A (ja)	1986-04-03
EP0164413B2 (de)	1993-07-21
BR8407212A (pt)	1985-11-26

Publication	Publication Date	Title
DE3482705D1 (de)	1990-08-16	Druckwandler.
DE3782507D1 (de)	1992-12-17	Druckwandler.
DE3480968D1 (de)	1990-02-08	Ultraschall-wandler.
IT8419130A0 (it)	1984-01-12	Convertitore di segnale elettropneumatico.
DE3484786D1 (de)	1991-08-14	Akustischer wandler.
DE3582374D1 (de)	1991-05-08	Halbleiter-druckwandler.
DE3785785D1 (de)	1993-06-17	Druckwandler.
DE3482517D1 (de)	1990-07-19	Wandleraufhaengung.
DE3482346D1 (de)	1990-06-28	Zweifach anwendbare ultraschallwandleranordnung.
IT8419791A0 (it)	1984-02-24	Guarnizione.
FI843892L (fi)	1985-04-05	Nytt roerlaos.
FI842260A7 (fi)	1984-12-17	Kontinuerligt arbetande press.
NO159204C (no)	1988-12-07	Klemkopling.
IT8323871A0 (it)	1983-11-24	Guarnizione.
DE3483926D1 (de)	1991-02-21	Halbleiter-differenzdruckwandler.
FI840190A7 (fi)	1984-07-20	Frekvensomformare.
NL185414B (nl)	1989-11-01	Schakelband.
FI843642A7 (fi)	1985-03-20	PCM-muunnin.
DE3585518D1 (de)	1992-04-09	Hochdruckwandler.
NO831158L (no)	1983-03-29	Omretter.
DE3481183D1 (de)	1990-03-08	Zeichenhilfsgeraet.
DE3766188D1 (de)	1990-12-20	Druckwandler.
ATE13335T1 (de)	1985-06-15	Wasserenergie-umwandler.
FI842964L (fi)	1985-03-27	Cyanohydreringskatalysator.
FI841096A0 (fi)	1984-03-19	Statisk konditionscykel.

Legal Events

Date	Code	Title
1991-07-18	8363	Opposition against the patent
1993-09-23	8366	Restricted maintained after opposition proceedings
2004-10-21	8339	Ceased/non-payment of the annual fee