DE3175728D1 - Capacitive pressure transducer with isolated sensing diaphragm - Google Patents
Capacitive pressure transducer with isolated sensing diaphragmInfo
- Publication number
- DE3175728D1 DE3175728D1 DE8181902809T DE3175728T DE3175728D1 DE 3175728 D1 DE3175728 D1 DE 3175728D1 DE 8181902809 T DE8181902809 T DE 8181902809T DE 3175728 T DE3175728 T DE 3175728T DE 3175728 D1 DE3175728 D1 DE 3175728D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure transducer
- capacitive pressure
- sensing diaphragm
- isolated sensing
- isolated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/194,758 US4370890A (en) | 1980-10-06 | 1980-10-06 | Capacitive pressure transducer with isolated sensing diaphragm |
PCT/US1981/001329 WO1982001250A1 (en) | 1980-10-06 | 1981-10-02 | Capacitive pressure transducer with isolated sensing diaphragm |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3175728D1 true DE3175728D1 (en) | 1987-01-29 |
Family
ID=26764894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8181902809T Expired DE3175728D1 (en) | 1980-10-06 | 1981-10-02 | Capacitive pressure transducer with isolated sensing diaphragm |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE3175728D1 (en) |
NO (1) | NO156188C (en) |
-
1981
- 1981-10-02 DE DE8181902809T patent/DE3175728D1/en not_active Expired
-
1982
- 1982-06-04 NO NO821879A patent/NO156188C/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NO156188C (en) | 1987-08-05 |
NO821879L (en) | 1982-06-04 |
NO156188B (en) | 1987-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |