DE2736536C2 - Substrate holder for use in the vapor deposition of optical plastic lenses - Google Patents

Description

According to the invention, this object is achieved by that the substrate holder is covered with a cover made of a solvent-soluble polymer

Further advantageous embodiments of the invention are given in the sub-addresses.

According to the invention, a water- or solvent-soluble polymer, such as polyethylene oxide, is used, which has a color coding. This applied product contains approximately 0.2 g of Rodimens dye per 1000 ml of the cover material. ι ο

Other dyes can also be used. According to the invention are red or purple dyes preferred on gray metallic surfaces. The person skilled in the art can make a corresponding selection using the following publication: "Color Index" 3rd Edition, Volume 5 by the Society of Dyes and Colorants, published by the American Association of Textile Chemists and Colorists, edited by Chorley & Pickersgille Ltd, Leeds and London, Seiter; 5077-5086. According to the invention, water-soluble dyes are preferred, for example Rodimens Basic Red 1-71, as noted above, or other types such as Basic Violet 1-41. Find in some publications There are also blue, brown, green and black dyes, which can optionally be used. However, the same are not preferred according to the invention because they are more difficult to use as indicators of complete coating of the metal surface.

It is used in a conventional manner, e.g. B. by spraying, dipping, brushing, a liquid covering material is applied to the substrate holder. For covering the inner surfaces of large vacuum chambers, spraying is preferred. Smaller support fittings and the like, including those shown in the drawings reproduced type of special substrate holder are coated by immersion. You let them Dry coated parts at room temperature or inside an oven before exposing them to the reduced pressure of the vacuum chamber. The specified polymers do not give off gas in a vacuum when they are applied very thinly as a coating, i. H. the same has a thickness of the order of 1 μίτι and if a correct one Drying is done.

Most metallic or dielectric evaporation agents have been found to adhere well to the polymer surface during and after evaporation cling to. As soon as the coating deposits have accumulated, the plates or armatures can be Doors removed from the vacuum chamber and placed in a solvent bath, or ultrasonic cleaning tank a conventional dishwasher can also be stirred to remove the precipitate with the polymer coating from the plates, which can then be dried and subjected to the next coating process.

The advantages achieved according to the invention consist in a low cost factor, easy handling, large volume turnover, low labor cost so related to the build up of the coating material on the fittings and vacuum equipment that exposure to the coating material in connection with coating the lens substrates. There is a complete removal of the on the fittings and the like. Deposited coatings, and the process can be repeated without adverse effects on the surface quality or the mechanical equipment of the treated Parts result. The diluent-soluble polymers described here are non-toxic and cleaning of the coating deposits with solvents, preferably water, does not lead to the formation of dust and thus complies with the relevant regulations for working in clean rooms. The method according to the invention requires! no dangers to the safety or health of the workforce.

The substrate holder according to the invention is coated with a solvent-soluble polymer. The coating mixture consists of a mixture of 500 ml Water (deionized), 500 ml of methanol, 5.5 g of polyethylene oxide, and 0.2 g of Rodimens dye. The parts are mixed in a conventional electric mixer, with polyethylene oxide and the dye added to the circulating mixture of water and methanol. Mixing is for 2 minutes continued. The mixture is then allowed to stand for 10 minutes to remove air bubbles. That I resulting mixture is transferred to a suction sprayer for coating. All panels and support assemblies to be coated should be thoroughly cleaned, e.g. In a conventional dishwasher using conventional wetting agents before coating is carried out.

The cleaned and dried substrate holder and dgl should be as hot as it is practical z. B. a temperature of about 95 ° preferred. The preferred cleaning agents are agents based of medium to high molecular weight phosphates, in which the plates are first immersed for at least 15 minutes The substrate holder is arranged at an angle or in such a way that the cleaning agent flows off by the action of gravity and evaporation of all of the rest Moisture occurs

Once the panels have dried and are at a temperature at which they are easy to apply Conventional rubber gloves can be handled in a suitable carrying arrangement A conventional spray rack has been used in the practice. A suction spray gun is set so that it emits a very fine spray. The mixture is in an oscillating movement applied over the plates to be coated. The dye in the polyethylene oxide is a good indication of the achievement of a complete coating. Of course, although the dye is most useful, the dye is not essential as it has been found to be both Indication of the complete covering as well as later an indication of the complete removal of the Plating represents

In the suction spray gun is both compressed Air as well as M has been used as a propellant with a pressure of 2.5 bar. Experience shows that this leads Using nitrogen for faster application of the mixture and a more uniform coating, so this gas is the preferred propellant

The plates are then removed from the spray rack and placed on drying racks Two to ten minutes drying per rack is sufficient, albeit the length of time from the air flow over

5 6

depends on the plates and further, above-mentioned work steps, der-

An embodiment of the invention is in the stalt that each plate pairs are used.

Drawings shown and will be described in more detail below. Not all solvent-soluble coating materials

described. It shows lien are being sucked in.

F i g. 1 is a side elevation of a 5 chungen according to the invention z. B. polyvinyl alcohol as a coating material

Substrate holder; and turned. The polyvinyl alcohol was treated with

F i g. 2, a side elevation in section of the holder, mixed solutions and the ones in the

measure F i g. 1 along line 2-2. Drawings reproduced support plates with the following

In Fig. 1, a preferred embodiment is applied lowing results. _:

of a holder for polymer substrates with optical quality. In the first test, 500 ml of water with 18 g of jj

did reproduced. A plate 10 can be seen which has polyvinyl alcohol mixed therein. Plates of the j; *. ,,

formed has a plurality of openings 11 each openings reproduced type are the different p

The opening has, around its circumference, a circular, above-described operation of the

ge edge or ring 12. Subjected a plurality of wing pull-ups it was found that

nuts 13 is screwed onto appropriate bolts 15 the coating was stained and otherwise unacceptable.

through corresponding openings in the plate 10. In a second test, a solution of 250 ml

extend. Water and 250 ml of methanol with 18 g of polyvinyl alcohol

With reference to FIGS. 2 are mixed after a. Also those coated with this mixture

preferred embodiment plate pairs, the plates are defective and have an irregular shape

with each other by locking screws 13 and corresponding 20 staining.

corresponding bolts are connected. It is a rotatable and in another test a solution was found

spring-loaded clip 20 over the 250 ml of water and 250 ml of methanol along with 3 g

Slots IOC guided, making the support assembly applied in polyvinyl alcohol. This mixture could be

a coating chamber, not shown, is arranged. did not spray properly, ran off unevenly and

In FIG. 2 is a pair of such plates 10 and iOA 25 there was some staining,

reproduced. These plates are identical and if on a further test the same solution was found

the same paired together next to the one used as in the previous investigation,

elevated rings 12 and 12Λ are arranged, but are with the addition of 6 g of polyvinyl alcohol. This

The same together with the aligned openings 11 mixture could not be sprayed properly and

in such a way that they take up the lenses 15 to be coated and do not mix them in the desired manner, ran un-

men and hold in place. uniformly from and to the coating test

Thus, a plate 10 has a plurality of lenses 15 stained.

which are arranged over the openings 11 so that the latter polyvinyl alcohol mixtures could be applied to the edges of the same inside the ring-shaped Ta- but by brush. The same can be worn see, which are also used in immersion processes through the opposite,
the ring pairs 12 and 12/4 are formed. The above polyvinyl alcohol mixtures are so-called plates and lenses are put into the coating - then heated to the boiling point
Chamber transferred and the coating process carried out both in the hot and in the cold feed, as it is, for. B. in DE-OS 25 38 982 was a mixing with various of the above Löist 40 solutions, but the results are the same, ie

After coating, the plates are removed from the device, which is unsuitable during spraying, the lenses are removed and the gene is removed. In addition to the methanol-water mixture, Na plates can be examined. A moderate build-up of coating material (this can be the case for example, ethanol, propanol, isopropanol for a single coating process) will come about. According to the invention, an organidieself is dismantled and a cleaning, aqueous mixture is preferred. The organic plant is preferably first blown away from the compound should be relatively easily and quickly evaporable plates, since this removes the preferred method of vacuum cleaning the plates The polymer is brought, ie by spraying, and then freed from the coating. A preferred support is provided. It is further preferred that the organic matter for removing a water-soluble coating see compound amounts to 5 to 95%, which consists in that the same amount of water is immersed in water One of all dye compounds is acetone. In addition to being heated above, the removal of the dye from the plat- indicated polyethylene oxide can also indicate a complete removal of the coating. 55 polymers are used. It is assumed that the plates are then rinsed in a further hot, commercially available polyethylene oxide, a re-water bath, is dryly impure polyethylene oxide by blowing air, but can be as clean, visually for cleanliness as clean grades This product can be used, examined and then carried out in the manner described above. Other suitable polymers include polyvinylbenes. Furthermore, other polydie plates can also be used in a solution of the solvent-soluble methacrylate or acrylate. A we-polymer and dye is immersed and then the essential property of the polymer formed is air-dried and optionally heated. in that it has polar groups, preferably hydroxyl groups, the cleaned and recoated plates, the better to hold the vaporizable maggot then ready for renewed use of the material. The preferred vaporizable material employing the support plates of the material shown in the drawings is quartz.
The type shown is cleaning, coating.It is stated above that the solvent-based

soluble polymer should be chemically inert to the vaporizable material. It is still noted it has been suggested that the quartz should tend to adhere to the coating so as to prevent flaking. The term “flaking” is to be understood as meaning that pieces of the vaporizable material applied to the carrier Material break off and become bound to the surface of the lenses. Will the lentils and the chipped Parts then coated, with the chipped parts firmly bonded to the surface of the lenses surface roughness results inappropriately. The adherence of the quartz becomes no impermeable layer formed. After use, the polymer and the adhered to it Quartz washed off. Of course, the repeated use of the substrate carrier can lead to builds an impermeable structure. Hence, this structure must be washed off before this appearance occurs Above, the preferred sprayable coating mixture indicated is one which contains 5.5 g of solvent-soluble Contains polymer in one liter of solvent. This corresponds to approximately a 0.5% solution. The aim is a coating that has the chemical and mechanical properties specified above Higher concentrations of polymer lead to a faster build-up of a coating, however This gives rise to problems in handling. Too much polymer in the solvent can result in a viscous material that is difficult to spray. In any case, 5% or even 10% solutions of polyethylene oxide can be used, although a concentration is preferred of not more than 5% is considered as a practical upper limit value

35

1 sheet of drawings

40

55

Claims (3)

1 2 This cleaning is necessary to prevent gas emission, claims: dust contamination and incorrect processing of various mechanical parts. Happier 1. Substrate holder for use in loading the required cleaning due to the vapor deposition optical plastic lenses, thereby accomplishing 5 the most procedures all of which are marked, that he with a Oberzug effect of the vaporizable material or Oberzugaus Surfaces exposed to a solvent-soluble polymer are made from a very source is made of hard material such as corrosion-resistant steel 2. Substrate holder according to claim 1, thereby provided or with the formation of here surfaces indicates that the coating is made of a solvent or a material such as chemically applied nickel medium-soluble Polymer one opposite to the coating material, coated so that the agglomerations vaporizing material and against the sub on the upper material by abrasion, z. B. by Schrubstrat inert dye contains ben with steel wool or in some other mechanical way 3. The substrate holder can be removed after at least one of the connections. speak 1 and 2, characterized in that the is Another cleanup procedure was that Polymer is polyethylene oxide and that the dye is the exposed surface with a non-adherent is contained in the coating in an amount that has been coated into polymer such as PTFE. The accumulated Display of a uniform coating, sufficient cover material can usually be from the PTFE surface chanically, d L by rubbing or chemically, d. H. by 20 washing with solvent to regenerate a be removed from a clean surface. Another method of avoiding the trouble with the unsuitable overalls A lens or substrate holder is created in which metal foils are used only once, having formed therein a plurality of seats, 25 such as aluminum foil, through which all exposed parts which are arranged in such a way that they are releasably covered over the sub. Strat pick up, and the substrate holder uniform with None of these methods described above has a solvent soluble polymer such as polyethylene has been found to be completely satisfactory. The first oxide is coated, the polymer being a low process is of course very labor-intensive, and that Dyestuff contains 30 cleaning the surfaces by scrubbing or un-after The use of the substrate holder can often lead to using a sandblasting blower same brought into a suitable solvent and that lead to damage to the tight tolerances that Solvent-soluble polymer removes the dye from those associated with optical substrates gives an indication of the complete coating and the coating procedures carried out. at the subsequent complete removal of the poly- 35 the second using PTFE carried out. th method is obviously a The invention represents a further development of the DE-costly mode of operation and still the kost-OS 25 38 982 represent the generally synthetic poly-play of plating easily by the manual tools mere in connection with the covering of a lin- damaged, which is necessary for mechanical cleaning made of a synthetic polymer with a durable 40. It was also found that the th, abrasion-resistant glass mass describes it is not a non-adhesive material for PTFE in these synthetic polymers z. B. to dialkylgly- all coating materials proves the application of Colcarbonate and polycarbonates, which are used in the manufacture of disposable films, are only effective in covering ophthalmic lenses and other lenses for the enlargement of large, essentially flat surfaces, such as the cam turn walls are used in the optical industry, but this is not the case with other fittings, such as the. Substrate holder, satisfactory. These latter synthetic polymeric lenses are often planar and have an intricate geometry. advantageous, as they are inexpensive by casting or, in some cases, the surfaces can also be injection-molded and the like. Can be produced. It's owning away parts. This makes it possible in a direct manner without costly 50 Furthermore, Vacuum Deposition Of Thin Films is made Grinding Entangled Surface Configurations to (1961), pp. 384-385, a method of application obtain. The coating is applied in a vacuum. an inner coating of evaporation vessels with Here, a source of evaporation and a combined lacquer are known. A chemical reaction occurs. steamable material applied such a veration between paint and metal and leads to a steamable material and the selected polymer sub- 55 so-called »metallization« of the paint, strat are in a vacuum chamber in such a way- The GB-PS 7 42 056 describes the production of metal arranged so that the vaporizable painted papers, such as those used, for example, for condensate material evaporated and deposited on the substrate are required. Ethyl cellulose is used for will. Practically all metal parts defined in the vacuum chamber are detached, present fittings of the evaporation source in a 60 The teaching of US-PS 27 88 031 also relates to the exposed to a greater or lesser extent, and the application of metal patterns on substrates. it is thus a coating of the same during the Here is obviously a common lacquer, but not Deposition of the vaporizable material on which a high polymer is used. Substrate. An accumulation of the coating on the interior object of the invention is to provide a new substrate side the chamber and the holder inside it for use in the vapor deposition of optical Matures and aids including the substrate shark plastic lenses available. This new one ters, the system substrate holder monitoring the thickness of the coating should take care of the deficiencies discussed above, Heaters and the like require frequent cleaning. squirm.