DE212011100058U1 - Handling system for handling objects - Google Patents

Abstract

Handling system for handling particularly plate-shaped objects (2), with a transport device (6) which has at least one transfer unit (7) which has object holding means (25) which can be moved horizontally while executing a linear transfer movement (23), and the drive means (27) for causing the transfer movement (23), characterized in that the transfer unit (7) has a support structure (16) and at least one telescopic arm unit (17, 18) carried by the support structure (16), the telescopic arm unit (17, 18) contains several parallel telescopic arms (22) which can be displaced relative to each other and relative to the support structure (16) in the direction of the transfer movement (23), including a telescopic drive arm (22a) that can be driven by the drive means (27) and a die Object-holding means (25) having telescopic holding arm (22c) is located, wherein the telescopic drive arm (22a) and each possibly between the drive iebs telescopic arm (22a) and the telescopic arm (22c) arranged telescopic arm (22b) is equipped with a coupling device (28) which contains a flexible tension cord (33) looped around deflection means (32), wherein the on the telescopic drive arm (22a) arranged tension cord (33) both ...

Description

The invention relates to a handling system for handling in particular plate-shaped objects, comprising a transport device which has at least one transfer unit which has object holding means which can be moved horizontally by carrying out a linear transfer movement, and which has drive means for causing the transfer movement.

Such handling systems are used inter alia in the solar and flat panel industry and serve there for handling plate-shaped objects, in particular to be coated glass plates. The DE 10 2005 039 453 A1 describes a processing plant for processing flat substrates, which is equipped with a handling system of the type mentioned. This known handling system has a transport device which has a plurality of guideways on which transfer units are mounted in such a way by means of guide carriages that they can be moved into a plurality of processing stations and positioned there respectively opposite a processing module. Each transfer unit includes a flat box defining a transfer chamber in which, for example, circulating steel belts are housed, which function as article support means realized in the form of support means and on which the object to be handled is stored. With a corresponding drive of these steel belts, an object lying thereon is displaced transversely to the direction of travel of the transfer units and can be introduced into a processing module. As the steel belts remain in place during this article transfer, an article to be transferred, as it is transferred to a processing module, gradually leaves the article holding means, compromising its stability and adversely affecting the accuracy of positioning of the article in the processing module.

From the DE 196 06 132 A1 a device for loading and unloading a press is known, which is equipped with movable between different positions trolley. Each trolley is provided on both longitudinal sides with clamping and suction devices, which are supported by movable transversely to the direction of travel of the trolley telescopic arms. The telescopic arms allow the clamping and suction units to be positioned above plates to raise or lower them as needed.

The DE 19 25 367 U describes a working platform with a mobile by telescopic arms platform. Other devices with telescopic arms also reveal the FR 2 611 826 A1 , the EP 0 362 680 A2 . DE 91 10 687 U1 and the US 4,907,768 ,

It is therefore an object of the present invention to provide a handling system of the type mentioned, which allows a precise transfer of objects despite space-saving design.

To achieve this object, it is provided that the transfer unit has a support structure and at least one telescopic arm unit carried by the support structure, wherein the telescopic arm unit contains a plurality of telescopic arms which are displaceable relative to one another and relative to the support structure, among which a telescopic arm Drive means drivable drive telescopic arm and the object holding means exhibiting holding telescopic arm is located, wherein the drive telescopic arm and any telescopic arm arranged between the drive telescopic arm and the telescopic arm telescopic arm is equipped with a coupling device, which wrapped around deflecting, bending flexible Includes pull string, wherein the pull-string arranged on the drive telescopic arm is fixed in position both with respect to the support structure and with respect to the telescopic arm adjacent thereto, and wherein the holding telescopic arm is fixed with respect to the pull string the telescopic arm adjacent to it is fixed.

In this way it is possible to leave a repositioned object fixed to the article holding means during the entire repositioning process. This ensures optimum stability during article transfer and high precision when depositing at a designated location. A part of the transfer unit, namely the telescopic arms, carry along the transfer movement and may be able to move laterally beyond the usually remaining supporting structure and an object, for example a glass plate, with permanent support to a place next to the transfer unit, for example, in a processing module to spend. If required, the transfer unit can be kept very narrow transversely to the direction of the transfer movement, which makes it possible to carry out the openings of possibly assigned processing modules with a very small cross-section in order to minimize the influence on the inside of the processing module during the opening time due to external influences ,

An article to be transferred is held to the article support means disposed on the support telescoping arm and is caused to move linearly with them, by engaging the drive telescoping arm engaging drive means are activated. The drive means cause a linear process of the drive telescopic arm, which due to the at least one existing coupling device has the effect that all other telescopic arms, including the holding telescopic arm, also perform a linear movement relative to the telescopic arm carrying them, which ultimately, based on the movement of the drive telescopic arm, a displacement and speed translation result. For example, if the transfer unit has only two telescopic arms, namely a drive telescopic arm and a holding telescopic arm, the holding telescopic arm moves at twice the speed and twice as long as the drive telescopic arm with respect to the supporting structure acting as the base. With a total of three telescopic arms per Telekoparmeinheit results in a translation by the factor "3".

Whether the telescopic arm unit is equipped with only two telescopic arms or with more than two telescopic arms depends in particular on the desired transfer distance and transfer speed. As a rule, it is advisable to integrate at least one additional telescopic arm, which can be labeled as an intermediate telescopic arm, between the drive telescopic arm and the holding telescopic arm, which in turn is then drivingly coupled to the respectively adjacent telescopic arms via a coupling device. As currently optimal in terms of the relationship between effort and benefits is considered an embodiment in which the at least one telescopic arm unit contains a total of three telescopic arms, namely a drive telescopic arm, provided with a subject-holding means holding telescopic arm and an intermediate intermediate telescopic arm arranged therebetween.

The respective coupling device has a flexurally flexible, for example, rope-shaped or band-shaped cord, which is wrapped around deflecting means, in particular roller-shaped deflection means. It is possible, the pull cord in one piece or in several parts, in particular from several successive Zugstrangabschnitten, form. The latter, for example, opens up the possibility of biasing one of the tension cord sections by means of a spring so that strains can be compensated by elasticity or temperature.

Advantageous developments of the invention will become apparent from the dependent claims.

The transport device preferably includes a positioning device on which the at least one transfer unit is arranged and which makes it possible to move and position the transfer unit in a horizontal direction perpendicular to the transfer movement or in a vertical direction or both horizontally and vertically. In this way, repositioning objects can be moved with high flexibility in space. In particular, it is possible to construct the positioning device in such a way that the transfer unit can be moved along a row of processing modules and opposite each of these processing modules can be positioned in order to be able to load or unload a processing module from this position. Also, vertical differences between the processing modules can be compensated for vertical mobility.

A particularly advantageous construction of the telescopic arm unit provides that the existing telescopic arms are arranged horizontally next to one another transversely to their longitudinal axes. In this way, a small overall height of the telescopic arm unit can be realized. Particularly advantageous is a pertinent arrangement that extend all telescopic arms at least approximately in a common horizontal plane.

Adjacent telescopic arms are expediently supported by linear guide means linearly displaceable together. In addition, the drive telescopic arm can also be slidably mounted by linear guide means on the support structure. This results in a high stability of the telescopic arm unit.

The linear guide means expediently each comprise at least one guide rail and at least one guide carriage mounted linearly displaceably on the guide rail and supported in the transverse direction. The interaction of guide rail and guide carriage is effected by plain bearing means and / or rolling bearing means.

The linear guide means are preferably arranged transversely to their longitudinal axes horizontally next to each other, which allows compliance with a low overall height of the transfer unit. All linear guide means may, for example, extend at least approximately in a common horizontal plane.

The drive means are expediently equipped with a drive unit which has at least one linear drive extending in the direction of the transfer movement. This linear drive is fixed in place on the support structure and has a drivable to a linear output drive output member which is coupled for movement with the drive telescopic arm. Although it would be possible in principle to form the drive unit electrically actuated, in particular equipped with an electric servo motor or stepper motor, a design is preferred in which the drive unit has at least one fluid-operated and preferably rodless linear drive. A fluid-actuated linear drive has the advantage that it is easily vacuum suitable, which ensures particularly universal applications.

In order to be able to generate high driving forces with small dimensions, it is advantageous if the drive unit is equipped with at least two parallel-connected and drive-coupled linear drives.

In principle, the at least one transfer unit could be equipped with only a single telescopic arm unit. However, a design is considered to be particularly advantageous which has at least two telescoping arm units arranged horizontally next to each other transversely to the direction of the transfer movement and which are arranged together on one and the same support structure. These two or more than two telescoping arm units are drivingly synchronized so that their holding telescopic arms equipped with article-holding means are always synchronously extendable and retractable. The double arrangement of Teleskoparmeinheiten offers the advantageous possibility of a particularly stable and precise support of objects to be transported, while high torsional rigidity and small footprint.

The telescopic arm units are in particular arranged horizontally next to one another in such a way that, in the extended state, they protrude laterally in the manner of an at least two-pronged fork over the preferably plate-shaped support structure.

The drive unit is, as seen in a vertical plan view of the transfer unit, expediently arranged between the two telescopic arm units, preferably centrally between these two telescopic arm units. There are then the drive telescopic arms of two telescopic arm units via at least one driver with the driven part of the at least one linear drive of the drive unit motion-coupled. As a driver, at least one flexible strand, such as a steel cable or a steel strip, can be used. In contrast, a permanently particularly high precision with relatively simple production offers a design in which the driver is designed like a strut and rigidly connects the drive telescopic arms while bridging the intermediate space between them. This driver may for example be designed plate-shaped. It may extend above or, preferably, below the drive unit past the latter, wherein it may be fastened to the output part of the at least one linear drive.

Viewed in a vertical plan view, the transfer unit in the retracted state of the at least one telescopic arm unit has a starting outline that can be labeled as a base outline. Within this basic outline are located in the basic position of the telescopic arm unit (s) both the article-holding means and the drive means. By appropriately designing the at least one telescopic arm unit, it is expedient to ensure that in the extended state of the telescopic arm units, the drive means continue to lie within the base outline, but the telescopic arm unit (s) and in particular the object holding means project at least partially laterally beyond the base outline. In this way, an object held on the article-holding means, which in the retracted state of the telescoping arm unit (s) lies within the base outline, can be completely transferred out of the base outline, while retaining the support of the object-article supporting it. holding means.

The article-holding means are in particular realized as a support means on which the object to be transported can be placed, so that it is retained for example due to friction. The article may be undermined and then lifted by the article-holding means for its picking up. Preferably, the support means are arranged on the upwardly facing longitudinal side of the holding telescopic arm, selectively distributed support elements formed, which may consist of an elastically yielding material. However, it is also possible to use the outer surface of the holding telescopic arm directly directly as a support means.

As an alternative to pure support means, the article holding means can also be designed as gripping means. For example, they can consist of one or more suction pads, which hold a transportable object with negative pressure. Another useful type of grippers are electrostatic grippers, such as those in the DE 102 32 080 A1 or the WO 2004/077531 A1 to be discribed.

In all embodiments of the article holding means, these article holding means may for example be arranged exclusively on the at least one holding telescopic arm. In addition, it is possible to provide article-holding means which have a holding plate, which is equipped for example with arranged on the top support elements or arranged on the bottom gripping means of the type described above. By such a holding plate and the holding telescopic arms can several adjacent Teleskoparmeinheiten be interconnected.

Depending on whether the holding plate is used for placing objects or for gripping objects, it may for example be attached to the top or bottom of the holding telescopic arms. It is also possible to operate the transfer unit with 180 ° orientation.

It is advantageous if the at least one transfer unit is equipped with position detection means, in particular in the form of a position measuring system, with which the current position of the object holding means can be detected directly or indirectly. The position detection device cooperates expediently with a drive telescopic arm.

The handling system can be readily conceived such that the telescoping arm units are horizontally extendable and positionable relative to the preferably plate-like support structure starting from a retracted basic position in two opposite directions. In this way it is possible alternately to operate processing modules arranged on opposite sides of a transfer unit and, for example, to take objects from a processing module arranged on one side of the transfer unit and transfer them to a processing module arranged on the other side of the transfer unit. In this transfer movement is a movement stop in the retracted home position is not mandatory. Thus, there is the advantageous possibility of relocating the Teleskoparmeinheiten without interruption of movement from the one extended end position in the extended to the opposite side other end position.

The invention will be explained in more detail with reference to the accompanying drawings. In this show:

1 a partially schematic plan view of a preferred embodiment of the handling system according to the invention in connection with a processing plant, wherein the existing Teleskoparmeinheiten are shown in the retracted home position and wherein a transportable plate-shaped object is indicated by dash-dotted lines,

2 an end view of the arrangement 1 looking in the direction of arrow II,

3 a side view of the handling system of 1 and 2 existing transfer unit with viewing direction according to arrow III 1 .

4 a top view of the 1 to 3 apparent transfer unit in an intermediate position of the Teleskoparmeinheiten, which lies between the retracted home position and the extended end position, wherein an object to be transferred is again shown with dotted line,

5 a side view of the transfer unit 4 looking in accordance with arrow V,

6 a top view of the transfer unit in the extended end position moved Teleskoparmeinheiten and with dash-dotted illustration of an object to be transferred,

7 a side view of the transfer unit 6 looking in the direction of arrow VII,

8th an end view of a preferred embodiment of a telescopic arm, as in the transfer unit of 1 to 7 is realized, looking in accordance with arrow VIII 1 .

9 a schematic side view of the transfer unit with viewing direction according to arrow II in the retracted basic position of a transport unit,

10 the arrangement 9 at partially extended telescopic arm according to a side view according to arrow V from 4 , and

11 the arrangement 9 and 10 in a side view according to arrow VII 6 to illustrate the extended end position of a Teleskoparmeinheit.

The 1 schematically shows a section of a processing device 1 in which objects 2 , in particular flat or plate-shaped objects 2 , can be edited. For example, the processing device is a device for coating glass plates in the solar and / or flat panel industry.

The processing device 1 contains an example of a charging / discharging module 3 and several editing modules 4 which are arranged in a row lying consecutively. Next to the module row is a handling system 5 arranged, which is able to edit objects 2 from the charging / discharging module 3 and in one of the editing modules 4 to spend, as well as after processing from the respective processing module 4 and again to the charging / discharging module 3 for ejection from the processing device 1 return. The handling system 5 can also be used to reposition objects 2 between different processing modules 4 be used.

An essential part of the handling system 5 is one in its entirety with reference number 6 designated transport device. The same includes at least one transfer unit 7 and expediently also a desired method and positioning of the transfer unit 7 serving positioning device 8th ,

The positioning device 8th has a linear guide 12 , which is a method of transfer unit 7 in a horizontal, first traversing direction 13 allows. The transfer unit 7 is expediently under mediation of a lifting device 14 on the linear guide 12 stored, which allows the transfer unit 7 in one of the first direction of travel 13 right-angled, vertical second travel direction 15 to proceed. One or more drive means, not shown, of the positioning device 8th enable the travel drive of the transfer unit 7 to the mentioned traversing movements 13 . 15 to be able to cause.

By process in the first direction of travel 13 can the transfer unit 7 along the row of modules 3 . 4 be moved to horizontally opposite each one of the modules 3 . 4 to be able to position. Are all modules 3 . 4 at the same height, can on the vertical second Verfahrmöglichkeit 15 the transfer unit 7 be waived.

Should a transfer unit 7 operate only a single module or two opposite on opposite sides of the transfer unit modules, can on the horizontal and / or on the vertical displacement of the transfer unit 7 also be waived. In this case, you save yourself a consuming constructed positioning 8th ,

Every module 3 . 4 has a not shown, normally closed opening, the transport device 6 is facing. The transport unit 7 can in the embodiment by methods in the first direction of travel 13 be positioned so that they are one of the openings of the modules 3 . 4 opposite.

The charging / discharging module 3 serves to plate-shaped objects to be processed 2 in and out. The transfer unit 7 can one in the charge / discharge module 3 located object 2 record, bring out, in the one editing module 4 Move the opposite area and then, after previously the associated opening has been released, in the selected processing module 4 introduce and store there. In this way, an object can be 2 between charging / discharging module 3 and a processing module 4 transfer. Reverse transfers are also possible and also subject transfers between different processing modules 4 ,

The transfer unit 7 , which may be present once or several times, contains a suitably plate-shaped and preferably horizontally oriented support structure 16 , By way of example, this defines a horizontally extending, vertically upwardly pointing carrying plane 16a , About this support structure 16 is the transfer unit 7 at the positioning device 8th fixed. In other words, the positioning device acts 8th on the support structure 16 and is capable of the same in the first direction of travel 13 and, optionally, in the second direction of travel 15 to relocate.

The supporting structure 16 carries in the area of the carrying plane 16a two telescopic arm units 17 . 18 , each with several telescopic arms 22 includes, relative to each other and also each with respect to the support structure 16 under execution of a indicated by a double arrow linear transfer movement 23 are movable. The transfer movement 23 is oriented horizontally and runs in the embodiment perpendicular to the first direction of travel 13 and also to the optional second travel direction 15 ,

Every telescopic arm 22 has a longitudinal shape. All telescopic arms 22 are with their longitudinal direction parallel to the transfer movement 23 aligned.

On the support structure 16 are the two transfer units 17 . 18 transverse and in particular perpendicular to the direction of the transfer movement 23 spaced horizontally next to each other. The supporting structure 16 carries both telescopic arm units together 17 . 18 ,

As an example, each telescopic arm unit contains 17 . 18 a total of three telescopic arms 22 , In detail, these are a drive telescopic arm 22a , a holding telescopic arm 22c and one between these two telescopic arms 22a . 22c arranged intermediate telescopic arm 22b ,

The drive telescopic arm 22a is mediated by first linear guide means 24a to carry out the transfer movement 23 linearly displaceable on the support structure 16 stored. So one can say that on the one hand in each case adjacent telescopic arms 22a . 22b . 22c Linearly displaceable are stored together and that on the other hand, the drive telescopic arm 22a on the supporting structure 16 is slidably mounted.

Every telescopic arm 22 Incidentally, it is expediently shaped like a spar, although it can be composed of several components.

The name of the "holding telescopic arm" 22c This is due to the fact that it - in the embodiment on its vertically upwardly facing top - with article-holding means 25 Is provided. The same are formed in the embodiment as a support means, in particular in the form of in the longitudinal direction of the holding telescopic arm 22c selectively distributed support elements, which consist for example of plastic material. However, article support means designed as a support means 25 like this in 9 to 11 is illustrated, also directly from the upwardly facing, in particular flat outer surface of the holding telescopic arm 22c be formed. It is expedient if the object holding means designed as support means 25 have non-slip properties.

The article holding means 25 allow the loose placement of the object to be transferred 2 , An object to be transferred or transported 2 is thus from above on the two Teleskoparmeinheiten 17 . 18 as illustrated in the drawing, between the adjacent telescoping arm units 17 . 18 existing gap 26 bridged and on the article-holding means 25 both holding telescopic arms 22c rests against slipping.

In that the article-holding means 25 on the holding telescopic arm 22c are arranged, they are together with this under execution of the linear transfer movement 23 horizontally movable.

The article holding means 25 For example, they can also be embodied as gripping means which grip an object to be transferred, in particular from below or from above. Such gripping means are realized, for example, in the form of vacuum grippers or on the basis of electrostatic grippers. Also mechanical grippers are possible. The gripping means can, as in the embodiment of the support means, be arranged on the upper side of the respective holding telescopic arm, wherein the telescopic arm units or the entire transfer unit 7 , depending on whether an object is to be taken from below or from above, either in the direction shown in the drawing operating or in a rotated by 180 ° orientation, - so quasi upside down - so that in the embodiment upwards pointing side of the holding telescopic arms facing down.

The transfer movement 23 is by drive means 27 hervorrufbar. The latter are exemplary of the supporting structure 16 , in particular at the support level 16a , arranged and stand with each drive telescopic arm 22a in drive connection.

Each other directly adjacent telescopic arms 22a . 22b ; 22b . 22c are each by a coupling device 28 drivingly coupled. By this coupling is achieved that from the by the drive means 27 caused transfer movement 23 of the drive telescopic arm 22a a transfer movement 23 of the subsequent intermediate telescopic arm 22b is generated, taking out of the transfer movement 23 this intermediate telescopic arm 22b the transfer movement 23 of the holding telescopic arm 22c is produced.

Ultimately, therefore, all linear movements of the same Teleskoparmeinheit 17 . 18 belonging telescopic arms 22 by driving the drive telescopic arm 22a caused by the drive means 27 cooperate.

Structure and operation of the coupling devices 28 is especially good 8th to 11 seen.

One on the drive telescopic arm 22a arranged first coupling device 28 has two with axial distance to each other on the drive telescopic arm 22a arranged deflection 32 - Preferably in the form of the drive telescopic arm 22a rotatably mounted pulleys -, and one around these two deflection 32 looped, bend-flexible cord 33 , At the tension cord 33 it is in particular a rope or a band, preferably made of metal or of a high tensile plastic material. Pictured is a one-piece version of the pull string 33 However, this can readily consist of several successively arranged strand parts or strand sections.

At the intermediate telescopic arm 22a is a comparably trained further coupling device 28 arranged, whose components are provided in the drawing with identical reference numerals.

Every string of tension 33 can be a reciprocating motion (double arrow 30 ) around the deflecting means wrapped around it 32 To run. In this orbital motion 30 move between the deflection 32 extending strand dreams 33a . 33b in each case in one or the other direction of the transfer movement 23 ,

Every string of tension 33 has an example of a first strand 33a and a second strand 33b , The at the drive telescopic arm 22a arranged tensile strand 33 is with his first strand 33a at least one fastening point 34 on the supporting structure 16 fixed in place. The second strand 33b this train string 33 is at least one second attachment point 35 on the drive telescopic arm 22a adjacent telescopic arm 22 fixed in place, which is exemplified by the intermediate telescopic arm 22b is.

What the pull string 33 of the intermediate telescopic arm 22b As far as its first strand is concerned 33a at least one third attachment point 36 fixed to the intermediate telescopic arm 22b fixed and his second strand 33b is at least a fourth attachment point 37 stationary on the holding telescopic arm 22c attached. The latter means that the holding telescopic arm 22c in any case, stationary with respect to the tension cord 33 of the telescopic arm adjacent to it 22 is fixed, in the embodiment of the intermediate telescopic arm 22b is formed.

In one embodiment, no intermediate telescopic arm 22b owns, the stationary fixation of the holding telescopic arm 22a accordingly at the second strand strand 33b of the drive telescopic arm 22a arranged pull strings 33 ,

It would also be conceivable, instead of just a single intermediate telescopic arm 22b several intermediate telescopic arms 22b between the drive telescopic arm 22a and the holding telescopic arm 22c to incorporate, in which case the coupling takes place in the same manner as described above.

The mutual fixation of the individual components at the attachment points 34 - 37 For example, by means of fastening tabs 38 which are able to bridge existing distances.

If necessary, individual attachment points can also be present multiple times.

A comparison of 9 to 11 makes the activation of the drive means 27 clearly occurring movements.

Starting with the in 9 shown retracted home position, are all telescopic arms 22 retracted and expediently lie in the axial direction of the transfer movement 23 essentially at the same height.

Upon actuation of the drive means 27 learns the drive telescopic arm 22a a feed, being his tensile strand 33 at the first attachment point 34 remains stationary. The consequence of this is that this tensile strand 33 around the deflection 32 of the moving drive telescopic arm 22a revolves and thereby, how out 10 and 11 it can be seen that on the tension cord 33 arranged second attachment point 35 undergoes an axial displacement. This axial displacement has the consequence that at the second attachment point 35 arranged intermediate telescopic arm 22b is taken. As its tensile strand 33 at the third attachment point 36 stationary on the drive telescopic arm 22a is fixed, runs the cord 33 of the intermediate telescopic arm 22b around the deflection 32 of the intermediate telescopic arm 22b around. The latter has the consequence that the second strand strand 33b of the relevant pull string 33 ordered fourth attachment point 37 in turn is displaced axially, while the holding telescopic arm 22c with the article-holding means disposed thereon 25 entraining.

The linear movement of the individual telescopic arms 22 takes place simultaneously and relative to each other at the same speed. By coupling is achieved, however, that ultimately the holding telescopic arm 22c with respect to the drive telescopic arm 22a is shifted by three times the speed by three times the distance. This displacement and speed ratio reduces from the factor "three" to the factor "two" when on the intermediate telescopic arm 22b is waived.

In this way, the telescopic arm unit 17 . 18 be moved from the retracted home position in the extended end position. To return to the basic position, only the drive means to operate with the opposite sign.

Advantageously, there is the possibility of each Teleskoparmeinheit 17 . 18 starting from the basic position by appropriate activation of the drive means 27 optionally extend in one or the other axial direction. In this way, the transport device 6 able to both sides of the transfer unit 7 arranged modules 3 . 4 to use.

If you have the transfer unit 7 seen in a plan view from above, it has in the off 1 to 3 and 9 apparent retracted state of Teleskoparmeinheiten 17 . 18 about a embodiment of the outline of the plate-shaped support structure 16 defined base outline 42 , Within this basic outline are located in retracted Teleskoparmeinheiten 17 . 18 both the article-holding means 25 as well as the drive means 27 , More specifically, in the embodiment in the retracted home position both Teleskoparmeinheiten 17 . 18 completely within the basic outline 42 arranged.

A sheet-like article resting on the article-holding means 25 is stored, is located in the retracted basic position of Teleskoparmeinheiten 17 . 18 expediently also entirely within the basic outline 42 , In this way, the transfer unit 7 easily in the first direction of travel 13 along the modules arranged laterally next to it 3 . 4 be moved.

If by operation of the drive means 27 the telescopic arm units 17 . 18 in the transfer direction 23 are moved, they gradually move sideways over the above base outline 42 out. This is especially true for the holding telescopic arms 22c and the object holding means disposed thereon 25 ,

One recognizes by means of 4 . 5 and 10 as the article-holding means 25 when operating the telescopic arm units 17 . 18 gradually sideways from the base outline 42 go out. The 4 . 5 and 10 illustrate an intermediate position in which the article-holding means 25 partly outside the basic outline 42 lie.

In the in 6 . 7 and 11 illustrated extended end position of the telescopic arm units 17 . 18 are the article holding means 25 and in particular also these holding telescopic arms 22c entirely from the base outline 42 moved out. Corresponding to that on the article-holding means 25 resting object 2 ,

Takes the transfer unit 7 one of the opening of a module 3 . 4 opposite position and is the opening of the relevant module 3 . 4 released, dip the telescopic arm units 17 . 18 when taking the extended end position with its article-holding means 25 completely in that module 3 . 4 one. Thus, therefore, an object 2 easily from a module 3 . 4 taken out or in a module 3 . 4 be stored, being stationary during the entire transfer to the article-holding means 25 is held.

To an object 2 in a module 3 . 4 to receive the object holding means in the embodiment 25 in the second direction of travel 15 lowered state of the transfer unit 7 retracted into the relevant module until it is below the male object 2 lie whereupon they are raised until the object 2 on the article-holding means 25 rests. Now the telescopic arm unit can 17 . 18 together with the resting object 2 from the relevant module 3 . 4 be moved out.

Dropping an object 2 in a module 3 . 4 happens in reverse sequence. The article holding means 25 be together with the object 2 in the transfer direction 23 in the module 3 . 4 retracted. When retracted, the transfer unit becomes 7 and hence the article holding means 25 lowered so that the object 2 within within the module 3 . 4 arranged support means is stored and subsequently the Teleskoparmeinheiten 17 . 18 back out of the module 3 . 4 without an object 2 can be moved out.

When the article-holding means 25 are formed as gripping means which can take an object from above, the at least one holding telescopic arm 22c for receiving an item 2 above this into a module 3 . 4 retracted. To grasp the object, the transfer unit 7 then be briefly lowered. To deposit an item 2 in a module 3 . 4 becomes the at least one holding telescopic arm 22c with the object hanging on it 2 retracted into the relevant module, whereupon the generated gripping force is removed, so that the object 2 solves. Also, the drop can be combined with a short-term vertical movement.

If the two telescopic arm units 17 . 18 from the base outline 42 extend, they share the structure of a two-pronged fork in the embodiment. Each telescopic arm unit 17 . 18 in this case corresponds to a fork tine, wherein the space arranged therebetween 26 preferably completely free.

In an embodiment not shown, that between adjacent Teleskoparmeinheiten 17 . 18 existing gap 26 at least partially occupied at least in that area in which the holding telescopic arms 22c are located. The article holding means 25 in this case have a holding plate, which on the holding telescopic arms 22c adjacent telescopic arm units 17 . 18 is attached while keeping the gap 26 bridged. Depending on the form of implementation, either supporting means for placing the object to be transported can then be present on this holding plate, or gripping means for actively gripping the object to be transferred 2 , As gripping means, for example, a plurality of gripping units may be provided which are distributed over a large area over the holding plate and which are designed, for example, as a suction gripper or as an electrostatic gripper or as a mechanical gripper. In this way, an object to be handled can be detected over a large area and thus very securely, even if it is relatively thin. It is also possible by the article holding means 25 several at the same time to grab and transport smaller items.

At the transfer unit 7 of the embodiment, one would arrange the mentioned holding plate expediently on the vertically upwardly facing side, in particular such that it extends over a plurality of holding telescopic arms 22c and the intervening space between them 26 bridged. Should the transfer unit 7 in this case be equipped with gripping means, which is an object 2 From above, you become the telescopic arm units 17 . 18 and expediently the entire transfer unit 7 but use in a 180 ° reversed position. As a result, the objects to be transferred can be conveniently transported suspended below the transfer unit.

The in their entirety with reference numeral 27 designated drive means preferably include a drive unit 43 at least one in the direction of the transfer movement 23 extending linear drive 44 . 45 having. This at least one linear drive 44 . 45 is with respect to the support structure 16 fixed in place and in particular at the upwardly facing support plane 16a the supporting structure 16 attached. The drive unit 43 is preferably in the middle between the two Teleskoparmeinheiten 17 . 18 arranged, extending parallel to these. The drive unit 43 lies entirely within the basic outline 42 ,

In the embodiment, the drive unit includes 43 two with parallel alignment side by side arranged side by side linear actuators 44 . 45 , In this way, with compact dimensions, a high driving force can be generated.

The drive unit 43 could in principle consist of one or more electric drives, for example, an electric servomotor or stepper motor. However, a design in fluid-actuated design has proved to be particularly advantageous, in particular in the form of a pneumatically actuatable drive unit 43 ,

Regardless of their design, the linear drives have 44 . 45 expediently in each case via an elongated, on the support structure 16 fixed stator 46 and one regarding the stator 46 in the longitudinal direction linearly movable output part 47 , The stator 46 is on the support structure 16 attached. By actuating the linear drive 44 . 45 can the stripping section 47 to one with the direction of the transfer movement 23 be driven coinciding output motion.

In the embodiment, each stator 46 from a tubular body in which a linearly displaceable by fluid loading drive piston is arranged, with the outside of the stator 46 linearly displaceable arranged driven part 47 is motion coupled. This movement coupling can be mechanical, but in the exemplary embodiment, however, carried out in an advantageous manner without contact, by the drive piston with the driven part 47 is motion-coupled by a permanent magnetic device. Such a system has the advantage that it can be performed absolutely fluid-tight, since there are no dynamic seals with respect to the drive fluid.

The two linear drives 44 . 45 are functionally connected in parallel, so drive the Teleskoparmeinheiten 17 . 18 each simultaneously and in the same direction. These are the two drive telescopic arms 22a in synchronously drivable manner with the driven parts 47 drivingly connected.

The drive connection is expediently by means of a rigid driver 48 realized, which struts like a right angle to the transfer direction 23 between the two drive telescopic arms 22a extends, leaving the gap 26 bridged and on both drive telescopic arms 22a is rigidly attached. Preferably, the driver 48 plate-shaped or strip-shaped, where it is either above or below the driven parts 47 extends transversely to these.

In the embodiment, the two output parts 47 from the driver 48 happened below. Guide the driven parts 47 the linear output movement from, is the same of the driver 48 directly involved and therefore directly on the drive telescopic arms 22a transferred so that the telescopic arm units 17 . 18 be operated synchronously.

It could conceivably be a different type of driver 48 recourse, for example, to one or more rope-shaped or band-shaped driver, the drive connection between the at least one output member 47 and a respective drive telescopic arm 22a create. Such ropes or bands are suitably made of steel.

As in particular from 3 and 8th is clearly visible, are the telescopic arms 22 each telescopic arm unit 17 . 18 expediently transversely to their longitudinal axes and thus transversely to the transfer direction 23 arranged horizontally next to each other. In this case, they can in particular at least approximately in an in 8th indicated common horizontal plane 52 run. Such, longitudinally adjacent arrangement of the telescopic arms 22 allows compliance with very small height dimensions for the telescopic arm unit 17 . 18 ,

The above illustrations make it clear that expediently also the linear guide means 24a . 24b . 24c are arranged horizontally next to each other transversely to their longitudinal axes, which also expediently at least approximately in a common horizontal plane 52 can extend.

Towards the transfer movement 23 considered, are the two drive telescopic arms 22a expediently outside, while the holding telescopic arms 22c lie inside. Under "inside" is that long side of each telescope unit 17 . 18 to understand that of the other telescope unit 18 . 17 is facing.

In the 9 to 11 are the telescopic arms 22 only for the sake of clarity because of vertical superimposed.

It is useful if the linear guide means 24a . 24b . 24c in each case at least one and preferably exactly one linearly extending guide rail 53 and at least one on this guide rail 23 linearly displaceably mounted and supported in the transverse direction guide carriage 54 , The guide rail 53 is on the one, the guide slide 54 fixed to the other of each to be stored relative to each other components.

Exemplary is the guide rail 53 the first linear guide means 24a on the supporting structure 16 arranged. It sits in particular on the upwardly facing side of the support structure 16 towering carrying Holmes 55 , The assigned guide carriage 54 is on the drive telescopic arm 22a attached.

The guide rail 53 the second linear guide means 24b is on the drive telescopic arm 22a fastened, expediently on one to the other Teleskoparmeinheit 17 respectively. 18 pointing long side. The assigned guide carriage 54 is on the intermediate telescopic arm 22b attached.

Finally, there is the guide rail 53 the third linear guide means 24c at the intermediate telescopic arm 22b , in particular at one to each adjacent telescopic arm unit 17 respectively. 18 pointing longitudinal side. The assigned guide carriage 54 is on the holding telescopic arm 22c arranged.

Every guide slide 54 engages over the assigned guide rail 53 expediently equestrian. For this purpose, each guide carriage 54 Be designed U-shaped. Preferably, the guide carriages 54 aligned so that their U-openings in the case of the first linear guide means 24a down and in the case of the second and third linear guide means 24b . 24c sideways, towards the guide sled 54 the first linear guide means 24a are oriented.

So that the article-holding means 25 can be optimally positioned, has the transfer unit 7 expediently via position detection means 56 , The same are preferably realized in the form of a displacement measuring system, with which any position of the object-holding means is infinitely variable 25 in the transfer direction 23 can capture. The position of the article holding means 25 However, it is expediently not directly detected, but only indirectly, by detecting the position of at least one drive telescopic arm 22a , As between the relative movements of the individual telescopic arms 22 each telescopic arm unit 17 . 18 a fixed relationship can, by the position detection of a drive telescopic arm 22a very precise on the position of the article holding means 25 or this article holding means 25 having holding telescopic arms 22c getting closed.

The position detecting means 56 are expediently alongside a telescopic arm unit 18 arranged, wherein of the relative to each other to moving components of the position detecting means 56 one on the support structure 16 and the other on the drive telescopic arm 22a is arranged.

The particular advantage of realized in the embodiment Teleskoparmsystems 17 . 18 consists in the optimal adaptation to the spatial and technical conditions of the application. By using two telescopic arm units 17 . 18 is optimally utilized with relatively little effort of the existing space, whereby an optionally existing vacuum chamber of the processing device 1 can be made relatively small. In an advantageous application of the processing device 1 all of their components are under vacuum, with those in the processing modules 3 existing process chambers very high temperatures prevail. For operation under vacuum and at high temperatures are the fluidic and in particular pneumatically actuated drive means 27 especially predestined.

By the article holding means 25 Part of a telescopic arm system 17 . 18 are, the transfer unit can 7 in the direction of the transfer movement 23 be made very narrow. The width of the transfer unit 7 is in the retracted basic position of the telescopic arm units 17 . 18 very low.

Starting from the retracted basic position, the telescopic arm units 17 . 18 expediently be extended either in one or the other direction. To ensure this, are the drive means 27 suitably designed so that the at least one output part 47 in the retracted basic position, a middle position between the two in the axial direction of the transfer movement 23 oriented end faces of the telescopic arm units 17 . 18 occupies. Will the drive unit 43 actuated, drive the output parts 47 starting from the middle position either in the direction of the one or the other side edge of the support structure 16 ,

The operating principle of each telescopic arm unit 17 . 18 can be summarized in particular to the effect that in each case at least one based on a cable principle coupling device 28 is available. About in particular designed as pulleys deflecting 32 is formed by means of rope or band-shaped tensile cords a closed ring. At this pulley then the two relative to each other to be moved components of each immediately adjacent telescopic arms 22 attached. We now have a telescopic arm 22 Moving around a path "s", the next telescopic arm coupled thereto moves at twice the speed and twice the travel. If three telescopic arms are used, it moves as a holding telescopic arm 22c acting third telescopic arm compared with the drive telescopic arm 22a forming the first telescopic arm 22 at triple speed around the triple way "3s".

Through the linear guide means 24a . 24b . 24c are the telescopic arms 22 each telescopic arm unit 17 . 18 supported on each other and torsionally rigid connected.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102005039453 A1 [0002]
• DE 19606132 A1 [0003]
• DE 1925367 U [0004]
• FR 2611826 A1 [0004]
• EP 0362680 A2 [0004]
• DE 9110687 U1 [0004]
• US 4907768 [0004]
• DE 10232080 A1 [0024]
• WO 2004/077531 A1 [0024]

Claims (17)

Handling system for handling in particular plate-shaped objects ( 2 ), with a transport device ( 6 ) containing at least one transfer unit ( 7 ) carrying out a linear transfer movement ( 23 ) horizontally movable article holding means ( 25 ), and the drive means ( 27 ) for causing the transfer movement ( 23 ), characterized in that the transfer unit ( 7 ) a supporting structure ( 16 ) and at least one of the support structure ( 16 ) carried telescopic arm unit ( 17 . 18 ), wherein the telescopic arm unit ( 17 . 18 ) several in the direction of the transfer movement ( 23 ) relative to each other and relative to the support structure ( 16 ) displaceable, mutually parallel telescopic arms ( 22 ), under which one by the drive means ( 27 ) drivable drive telescopic arm ( 22a ) and the article holding means ( 25 ) holding telescopic arm ( 22c ), wherein the drive telescopic arm ( 22a ) and any one between the drive telescopic arm ( 22a ) and the holding telescopic arm ( 22c ) arranged telescopic arm ( 22b ) with a coupling device ( 28 ) equipped, one by deflection ( 32 ) wrapped, bend-flexible tensile strand ( 33 ), wherein the on the drive telescope arm ( 22a ) arranged tensile strand ( 33 ) both with regard to the supporting structure ( 16 ) as well as with respect to its adjacent telescopic arm ( 22b ) is fixed in place and wherein the holding telescopic arm ( 22c ) stationary with respect to the tension cord ( 33 ) of the telescopic arm ( 22b ) is fixed. Handling system according to claim 1, characterized in that the at least one transfer unit ( 7 ) at a positioning device ( 8th ) is arranged by means of which they are in a transfer movement ( 23 ) right-angled horizontal direction ( 13 ) and / or in a vertical direction ( 15 ) is movable and positionable. Handling system according to claim 1 or 2, characterized in that the at least one transfer unit ( 7 ) at least one between the drive telescopic arm ( 22a ) and the holding telescopic arm ( 22c ) arranged intermediate telescopic arm ( 22b ), wherein the tensile strand ( 33 ) of each intermediate telescopic arm ( 22b ) stationary with respect to both its adjacent telescopic arms ( 22a . 22c ) is fixed. Handling system according to claim 3, characterized in that the at least one telescopic arm unit ( 17 . 18 ) three telescopic arms ( 22 ) in the form of a drive telescopic arm ( 22a ), an intermediate telescopic arm ( 22b ) and a holding telescopic arm ( 22c ) having. Handling system according to one of claims 1 to 4, characterized in that the telescopic arms ( 22 ) of the at least one telescopic arm unit ( 17 . 18 ) are arranged horizontally next to each other transversely to their longitudinal axes, wherein they expediently at least approximately in a common horizontal plane ( 52 ). Handling system according to one of claims 1 to 5, characterized in that the drive telescopic arm ( 22a ) by linear guide means ( 24a ) on the supporting structure ( 16 ) in the axial direction of the transfer movement ( 23 ) is displaceably mounted and that respectively adjacent to each other arranged telescopic arms ( 22a . 22b ; 22b . 22c ) also by linear guide means ( 24b . 24c ) in the axial direction of the transfer movement ( 23 ) are mounted displaceably on each other, wherein the linear guide means ( 24a . 24b . 24c ) expediently at least one on each part arranged guide rail ( 53 ) and arranged at least one on the other part, on the associated guide rail ( 53 ) slidably mounted guide carriage ( 54 ) contain. Handling system according to claim 6, characterized in that the linear guide means ( 24a . 24b . 24c ) are arranged horizontally next to each other transversely to their longitudinal axes, wherein they expediently at least approximately in a common horizontal plane ( 52 ). Handling system according to one of claims 1 to 7, characterized in that the drive means ( 27 ) a drive unit ( 43 ), which at least one in the direction of the transfer movement ( 23 ) extending linear drive ( 44 . 45 ), with respect to the support structure ( 16 ) is fixed in place and one with the drive telescopic arm ( 22a ) at least one telescopic arm unit ( 17 . 18 ) motion-coupled, driven to a linear output movement driven part ( 47 ), wherein the linear drive ( 44 . 45 ) is suitably designed as a fluid-operated, rodless linear drive. Handling system according to claim 8, characterized in that the drive unit ( 43 ) at least two parallel-connected linear drives ( 44 . 45 ) having. Handling system according to one of claims 1 to 9, characterized in that the transfer unit ( 7 ) at least two transverse to the direction of the transfer movement ( 23 ) spaced horizontally next to each other Telescopic arm units ( 17 . 18 ), which together have a supporting structure ( 16 ) at which its drive telescopic arms ( 22a ) are slidably mounted, wherein the drive telescopic arms ( 22a ) of the two telescopic arm units ( 17 . 18 ) in synchronously drivable manner with the drive means ( 27 ) are in drive connection. Handling system according to claim 10 in conjunction with claim 8 or 9, characterized in that the drive units ( 43 ) in a vertical plan view of the transfer unit ( 7 ), between the two Teleskoparmeinheiten ( 17 . 18 ), wherein the drive telescopic arms ( 22a ) of both telescopic arm units ( 17 . 18 ) via at least one driver ( 48 ) with the output part ( 47 ) of the at least one linear drive ( 44 . 45 ) are motion-coupled, wherein the driver ( 48 ) is expediently strut-like and the drive telescopic arms ( 22a ) while bridging the intermediate space between them ( 26 ) in particular rigidly interconnected. Handling system according to one of claims 1 to 11, characterized in that the transfer unit ( 7 ) in the retracted state of the at least one telescopic arm unit ( 17 . 18 ) and in vertical plan view a base outline ( 42 ) within which both the article holding means ( 25 ) as well as the drive means ( 27 ), wherein in the extended state of at least one Teleskoparmeinheit ( 17 . 18 ) the drive means ( 27 ) within the basic outline ( 42 ), while the article holding means ( 25 ) at least partially beyond the base outline ( 42 ) protrude. Handling system according to claim 12, characterized in that the transfer unit ( 7 ) at least two horizontally juxtaposed Teleskoparmeinheiten ( 17 . 18 ) in the extended state in the manner of a least two-pronged fork over the base outline ( 42 ) protrude. Handling system according to one of claims 1 to 13, characterized in that the support structure ( 16 ) of the transfer unit ( 7 ) plate-shaped and is suitably aligned in a horizontal plane. Handling system according to one of claims 1 to 14, characterized in that the article holding means ( 25 ) is designed as a support for serving an object and expediently from on the upwardly facing longitudinal side of the holding telescopic arm ( 22c ) arranged, selectively distributed support elements are formed. Handling system according to one of claims 1 to 15, characterized in that each coupling device ( 28 ) as deflection means ( 32 ) two spaced apart rotatably on the associated telescopic arm ( 22 ) mounted pulleys to which a suitably rope-shaped or band-shaped tensile strand ( 33 ) is wrapped around. Handling system according to one of claims 1 to 16, characterized in that the transfer unit ( 7 ) in particular in the form of a position measuring system realized position detecting means ( 56 ) for the at least one telescopic arm unit ( 17 . 18 ) having.

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