DE2032302A1 - Method and device for attaching leads to metallized Be range from semiconductor surfaces - Google Patents

Description

OF ... INS. DIPL.-IN3. M.SC. DIPL-PHYS. DR. OIPL.-PHYS.

HÖGER - LEGAL RIGHT - GRIESSBAÖH - HAuCKER

38 235 b PATENT LAWYERS IN STUTTGART

June 15, 1970
k - 133

Texas Instruments Incorporated

Dallas / Texas
13 500 north Central Expressway

United States

Method and device for attaching supply lines on metallized areas of semiconductor surfaces

The invention relates to a method for attaching supply lines on metallized areas of semiconducting surfaces where the Supply lines from one located on a supply roll or the like, separated one after the other by a guide running ladder are, after each of the free end of the conductor through a contacting tip forming the end of the guide with a metalli-r ized area of the semiconductor surface was connected to form a contact, as well as a device for implementation of the procedure. In particular, the invention is concerned with one

1 09809/1322

June 15, 1970

- 133

Method for the automatic contacting of semiconductor surfaces and with a device for carrying out this method.

In a typical manufacturing process. To manufacture Semiconductor devices, such as transistors, will have a large number of such devices in a semiconductor wafer produced, which has a diameter of about 5 cm. On the top surface of each semiconductor device expanded metal contacts are then vapor-deposited before the semiconductor wafer is divided into individual semiconductor devices,

which have a size of about 12.9 mm. In these semiconductor devices, typically the substrate forms the collector _s, a first diffused region forms the base, and a second diffused region forms the emitter; separate expanded metal contacts are provided for the base and the emitter ».

The semiconductor die is then alloyed onto the metallic surface of a pin, which forms a collector lead that is large enough to be soldered into an electronic circuit or otherwise attached. The expanded contacts of the base and emitter are then usually connected to other leads ψ provided in the transistor base plate by means of thin gold wires which have a diameter of approximately 25.4 ». The machines used for this purpose are commonly referred to as a, ls ball bonder. In the usual ball contactor, a hollow needle-shaped contact point is used _{to press the ball, which is formed at the end of the wire 9,} against the corresponding expanded contact. The contact area, the wire and the contacting tip are heated to a contacting temperature of about 320 ° G, so that a connection is created under the pressure of the contacting tip. The contacting tip j is operated by means of a microscope and a micromanipulator ^. Between the end of the Kontaktierspitsse and a council roll, the wire is between a pair of ³ resilient

■ ■■ * '"■ *"".-■''j

Clamping jaws passed through. The clamping jaws are used for clamping of the wire while it is being withdrawn from the supply roll. After the .spherical melting bead with the expanded contact is connected, the contacting tip is raised, wherein the wire is pulled out of the contacting tip. The contacting tip is then moved sideways and lowered again until the wire is pressed against one of the leads and connected to it will »This second connection is stapled contacting (strikih bond). If the contact tip is raised again, the wire is pulled out of it through the tack contact. The pulled-out piece of wire is then cut by means of a flame, at the same time a new melting bead at the end of the Wire is formed. The piece of wire that starts with this Vorgo.ng Remaining from the staple contact is called "pig's tails (pig tail) and then removed by a worker with pliers. Then the new melting bead against, the end of the contacting tip pulled what-because of the '' Clamping action of the clamping jaws when the contact tip drops in preparation for a new work cycle.

When contacting semiconductors by hand as described above, a number of typical errors occur. When the Kontaktierspitze is executed at the time when the dia Kugelkontaktierung '. Not aligned exactly opposite the expanded contact is _t then creates either a short circuit or no contact. After a ball contact has been made, the contact can be destroyed if the contact tip is lifted, either because the metal of the expanded contact is detached from the semiconductor surface, or because the fusion bead is detached from the expanded contact, or because the wire is at the junction between the fusion bead and the wire rips. These errors are all the more serious because the manner and manner in which the contacting tip is raised when actuated by an operator may not be uniform enough or not at the correct speed

1 pen /

he follows. Every jerky movement of the contacting tip naturally has result in an increased incidence of errors. If at any point the wire becomes detached from the bead, then the jaws pull the wire out of the contacting tip, so that the contacting process must be interrupted until the Wire is reinserted and threaded through the contacting tip and until a new melting bead is produced again. The threading very fine wire is a very tedious and time consuming activity. It is understood that such an error in an automated system operating at high speed would be even more devastating.

The present invention is now concerned with an improved method for contacting semiconductors and with a pre = direction to carry out this procedure, in particular with a method and a device for automatic contacting of metallized semiconductor surfaces in which or in which the aforementioned disadvantages no longer occur.

The inventive method is characterized in that the supply of the conductor from the supply roll or the like. In the V / else is controlled that no tensile forces act on the completed contact. The device for carrying out the invention The method is characterized in that controllable devices for driving the conductor in the direction of the End of the contacting tip are provided. In particular, according to the invention there is provided a fully automatic system for connection of a gold wire with the expanded contact of a semiconductor device or suggested with another surface by means of spherical contact, which is followed by a tack contact, where the wire is connected to a second surface. The system contains electro-optic devices for precise alignment the contacting tip in a predetermined position with respect to the semiconductor device and devices with their Help the contacting tip can be moved in a precisely specified manner in order to make the connections. In this way

- 5th

109609/1322

Firstly, faulty contacts as a result of inaccurate adjustment avoided. In addition, the invention has the advantage that the need to cut off the so-called pig tails by hand is no longer necessary. Another advantage of the invention System consists in * doing it in one work cycle works, which-a continuous work even then ensures, if contact is made during a working cycle, * · error occurs or the wire breaks. Furthermore, the device for performing the method according to the invention is shown in FIG Able to complete a complete work cycle in about a second .

109609/1322

Further advantages and details of the invention are given below explained in more detail with reference to embodiments shown in the drawing. Show it: .

Fig. 1 is a plan view of a typical workpiece

for a device for performing the

method according to the invention;

2a simplified side views of the workpiece ^1S according to FIG. 1 to explain the invention

according to the procedure;
Fig. 3 is a side view of a "according to the invention

Contacting device, with individual parts

have broken away;
Fig. 4 is a front view of the contacting device

according to FIG. 3, with individual parts weggebro- •. chen are;
5 shows a section essentially along the line J.

5-5 in Fig. 3j
6 is an enlarged side view of a part

the contacting device according to FIG. 3 including a part of that in this figure

broken parts; '
FIG. 7 is a plan view of that shown in FIG

Parts of the contacting device according to the invention, FIG. 8 shows a section essentially along the line

7a-7a in Fig. 7ϊ |
9 is a front view of FIGS. 6 and 7

shown parts of the Kontafctiervorriehtung; • Fig.10 is a side view of the "Kontaktierköpfes"

Contacting device according to FIG. 3 partially

on average; ] "

11 shows a plan view of the contacting head according to FIG

Fig. 10; '

Fig. 12 is a front view of the KqntaktierkGpfes- | * etflä & - ^: "

Figs. 10 and 11, ·

ORfGiNAL INSPECTED

13 is a "schematic circuit diagram of the control system for controlling the contacting device according to the invention; FIG.

Fig. 14 is a schematic circuit diagram of a part the circuit diagram shown in Fig. 13;

14a shows a function table for the counter in dfeji Lehaltkreis according to FIG. 14;

Fig. 15 is a schematic circuit diagram of a part

the circuit shown in Fig. 13; '

16 shows a shearatic representation of a control disk for a contacting device according to the invention;

Fig.17 is a schematic circuit diagram of another Part of the circuit according to FIGS. 13 and

18 shows a time diagram to explain the mode of operation of the contacting device according to FIG. 3.

Contacting method

Fig. 1 shows a workpiece 10 with a transistor plate 12, those on the flattened head of a metal pin or conductor 14 is alloyed. The conductor 14 and similar conductors 16 and 18 are fixed in a glass plate 20. Conductor wires 24a and 24b extend from the * expanded base and ground contacts to the conductors 16 and 18. The lead wires are typically made of gold and have a diameter of 0.025 mm. The present invention is now concerned with a method and apparatus for attaching lead wires 24ε and 24b between the expanded contacts of the .Transistor 12 and the conductors 16 and 18, respectively. It goes without saying however, that the method and apparatus according to the present invention Invention can be used to create any surfaces to contact any semiconductor with wires.

109003/1322

2a to 2d show the method according to the present "invention for attaching the lead wire 24a to the transistor 12 and the conductor 18. The transistor plate 12 is first brought into a working position and then the contacting device is opposite a predetermined axis 26 on the Transis ⁺ or ^ latte centered, which takes place by means of an electro-optical servo system, which is described below. A contacting tip 28 is clearly outside the field of view of the optical device during the alignment of the contacting device, its position is indicated by the dashed outline 28a. The wire 24 leads of the form of a hollow needle Kontaktierspitze 28 to a supply roll, which is not shown in FIGS. 2a to 2d. the wire 24 is controlled by acting on the supply roll winding force under voltage gehalten.-a ball 25, which when passing through a flame at the end of the wire prevents the D raht is pulled out of the needle.

After the electro-optical system is aligned with respect to the transistor plate 12, the contacting tip 28 is shown in FIG a predetermined position relative to the axis 26 is spent. The preset position is chosen so that the needle is is located over a suitable area of the expanded contacts of the * transistor 12 and the contacting tip is subsequently lowered to press the ball 25 against the expanded contact, as shown in solid lines in Fig.2a is shown. Both the ball 25 and the expanded contacts are heated to a contact temperature, so that the exerted on the ball 25 by the contacting tip 28 Pressure connects the wire 24 to the expanded contact.

The contacting tip 28 is then raised and carries out such a lateral movement that its tip is longitudinal

1098Θ9 / Ϊ-322 -

- 9 ..- -. ■■■■

the dashed line 32 (Fig. 2b) and then lowered in a second position relative to the axis 26 which is selected so that the edge of the wire 24 is pressed against the surface of the conductor 18. The force acting on the supply roll is inverted for the duration of the movement of the contacting ^{tip Z 1} along the line 32, so that the "wire is unwound through the contacting tip by means of an air stream, whereby tensions on the wire and the connection point are avoided. In this way it becomes possible to move the contacting tip at high speed without destroying the connection or the wire.

Next, the contacting tip * 28 is lifted, whereby it allows a piece of wire 24c to emerge, as shown in Fig. 2c is. The wire 24 is then clamped in place with respect to the contacting tip 28. If now the contacting tip 28 their Continues upward movement, then the wire breaks at the point at which it is weakened by the tack contact 33. the Contacting point 28 then moves along line 34 »so that the piece of wire 24c is passed through a flame 36, a new ball 27 being formed, as shown in FIG. 2d. After passing the flame 36, the wire is released, see above that the winding force now again acting on the bobbin the ball 27 upwards against the tip of the contacting tip 28 draws. The contact tip then moves on into their starting position drawn at 28a in FIG. 2a.

The one described above and illustrated with reference to FIGS. 2a to 2d Procedure has decisive advantages. As a result of the inversion of those acting on the supply roll 'The force and the output of the wire under drive from the contacting tip by means of an air jet is the

■ - OK -

109809/1122

Stress at the connection between the wire and the expanded contact of the transistor plate 12 is substantially reduced or avoided entirely. However, this also reduces the risk of faulty contacts, which can be based on a detachment of the expanded contact from the transistor plate _J , a detachment of the ball from the expanded contact and a detachment of the wire from the ball. It is almost even more important that when such an error occurs, the wire 24 is not pulled out of the contacting tip 28 as a result of the winding force acting on the supply roll, as was the case with the known hand-operated contacting devices. Instead, the output of the wire 24 'under drive ensures that a piece of wire emerges from the tip of the contact tip so that staple contact can take place regardless of whether ball contact has been achieved or not. The drive of the supply roll for outputting the wire is maintained until the wire is in the process step according to FIG. 2c. is clamped so that a premature tearing of the wire 24 after the tack contact or an error in the execution of the tack contact do not result in the wire being pulled out of the contact tip. Once the wire is firmly clamped, this state is maintained until the wire has been passed through the flame 36 and until a new ball 27 has formed at its end in preparation for the next working cycle. If the ball contacting or the tack contacting were not carried out successfully, then the flame 36 separates the protruding wire end and the contacting device is thus prepared for the next work cycle even if an error has occurred in the ball contacting or in the stab contacting. A contact cycle can be carried out in about one second, so that about 60 contacts per minute can be achieved.

109008/132?

Maintaining the functionality of the contacting device despite incorrect contacting steps is obvious, since the sliding out of the wire 24 from the contacting tip make it necessary to shut down the contacting device until the wire would be threaded again into the contacting tip and provided with a new ball. Such repair times but would result in a considerable loss of production.

Contacting device *

The contacting device according to the present invention for Implementation of the method explained with reference to FIGS. 2a to 2d is shown in Figs. 3 to 18 and overall with denoted by reference numeral 50. An essential component of the contacting device 50 is formed by a U-rail Frame 52, which is best seen in Figs. A first carrier element 54 is located within the frame 52 (Fig. 3) mounted on tapered roller bearings 56 and 58 with low friction and movable in a direction hereinafter referred to as the X coordinate should be designated. The carrier element 54 is moved in the direction of the X coordinate by means of a not shown Spindle driven, in turn, by an X stepper motor 60 is driven. The Kotor 60 is on the frame Accounted. A second support member 62 is with the first Carrier element 54 via low-friction tapered roller bearings 64 and 66 (see Fig. 4) connected for movement in one direction, which is to be referred to as the Y-coordinate in the following. The second carrier element 62 is moved by means of a second spindle, which'not shown, driven, in turn, about a second or driven by a Y stepping motor 68 which is attached to the first support element 54. Within a housing 70, only in FIG. 13 limit switches 71 and 73 shown are provided. Within

109809/1322

of a housing 72 are limit switches 75 and 77 (see Pig. 13) intended. The limit switches act "with crouching (not shown puts together), which are each "mounted on the spindles, about the movement of the first stamping element 54 in the X direction along the bearings 56 and 58 or the movement of the second carrier element 62 in the Y direction along the bearings 64 and 66 in one V / e to limit, which will be explained below. The second carrier torque 62 can thus in the XY plane in each Position relative to the frame 52 are brought and thus forms a device that is usually referred to as a cross table will.

An electro-optical system 74 for character recognition, for example of the type described in an earlier application of the applicant (file number .....) is on the second Support element fastened via a support arm 76. The mode of operation of such an electro-optical system is described in the above Registration explained in detail. It is sufficient at this point to point out that the system 74 has the cough within of the optical field of view, so in the present Tall the pattern on the traninstor plate 12, with an identical one Comparison pattern compares and positive or negative X error signals and positive or negative Y-error signals generated -which indicate the direction in which the eye must be moved along the Y and X axes in order to align the reference pattern to reach with the sampled sexton.

The X and Y error signals are used to control the actuation of the X stepping motor 60 and the Y stepping motor 68 used, so that an automatic alignment of the electro-optical system 74 on a predetermined optical axis 26 (see Pig. 2a) the transistor mounted on the workpiece 10 plate 12 (see Pig. 3) takes place via the circuit, the one in Pig. 13 is shown and later in the

1 0980S / Uf2 " ¹³ ~

.-. 13 -

Details should be described. The workpiece 10 is carried by a clamping device 40 which is on a switching chain is attached, which brings the workpiece in the machining position, so that the semiconductor device within of the field of view of the optical system 74 lies. The wide carrier element 62 also carries a contact unit which mi-t denoted by reference numeral 80, and will be described below shall be. A plate 82 is on a base plate 84 of the support element 62 by means of tapered roller bearings 86 and (see Fig. 3) mounted displaceably, in one direction hereinafter referred to as the H coordinate. the Plate 82 is moved in the direction of the Η coordinate by an H stepper motor 92 is driven, which is attached to a leg 94 of the second carrier element 62 that protrudes downward is and carries a shaft 98. The shaft 98 is in legs and 1Ό2 of the second support element 62 supported .. On the shaft 98 a double-acting eccentric disc 96 is arranged, which is in engagement with eccentric rollers 104 and 106, which fixed on a plate 162 by means of brackets 108 and 110 are. The eccentric disk 96 is described below because of its function often referred to as Η disk.

A vertical plate 112 is slidable with the vertical Leg 114 of an L-shaped element 116 connected, and via vertically arranged angular roller bearings 118 and 120, as can best be seen in FIG. The vertical plate 112 is raised by means of a stepping motor 122 and Lowered, which drives a shaft 126 which carries a cam disk 124, which hereinafter is often referred to as a V-disk ". An eccentric roller 128 runs on the outer edge of the V-disk 124 and is mounted on the end of an arm 130. The Arm 130 is connected to vertical plate 112 by a pin 132. The height of the eccentric roller relative to the vertical plate 112 can by means of a screw 134 are set, which in a downward protruding

109809/1322

Projection 136 of the Arias 130 is screwed in and on the edge * the vertical plate 112 rests. In this way, a vertical alignment of the contacting tip 28 relative to the Clamping device 40 allows.

A disc 138 (see. Pig. 15 and 16) is over a piece of pipe 140 connected to the V-disk 124. The edge of the disk 138 passes a photoelectric scanner 416 (see also Pig. .13). Openings at predetermined points along the circumference are photoelectrically scanned, ue the respective Determine the position of the V-disk 124, and the resulting Signals are used to drive the V stepper motor 122 control. A similar disk and a corresponding photoelectric scanning device is provided, ULI to determine the position of the H-disk 96 and the H-stepping switch motor 92 to be controlled, which however · for reasons the simplification in the drawing only in FIG 457 is shown.

The contacting tip 28 is attached to the end of an Arises 142, which in turn can be rotated via an axis of rotation 146 with a yoke 144 is connected, the one at the lower end of the vertical plate 112 is attached. The lowest position of the arm 142 and there- with the contacting tip 28 is made by an adjustable screw 148 in the horizontal leg of an L-shaped bracket 150 set, which in turn is attached to the yoke 144. Also attached to the L-shaped bracket 150 is an electromagnet 152 which, when energized, the arm 142 against 'the stop screw 148 pulls.

As already stated above, the second carrier element 62 is automatically relative to the optical axis of the Aligned transistor plate 12, by means of the electro-optical 'System 74 and by means of the Servosys terns that the

- 15 -

109809/1322

X stepper motor 60 and Y stepper motor 68, and which will be described below. The vertical Plate 112 to which the correction unit SO is attached, forms together with the plate 82 an H-V cross table with whose help the movements of the contacting tip 28 can be achieved, the various positions of which are shown in FIGS. 2a to 2d are recorded. The positions of the H-V cross table in relation to the X-Y cross table and thus the position in which the Contact tip first to carry out the ball contact is lowered onto the transistor plate, opposite the optical axis is adjusted in the direction of the X and Y coordinates by means of micrometer screws 154 and 156, respectively, as one can best seen in FIG.

The housing of the micrometer screw 154 is on a bracket 158 attached, which in turn is attached to the plate "82. The probe tip 160 of the micrometer screw 154 is with connected to a wedge 164, which in a swallow * - tail-shaped keyway in the horizontal plate (cf. Fig. 3) is performed. A plate 162 is secured by means of screw bolts 166, which protrude through elongated holes in the plate 162 and which are quickly screwed into the plate 82, in a predetermined Position held. By loosening the screw jacks 166 and adjusting The position of the eccentric rollers 104 and 106 relative to the plate 82 can be adjusted using the micrometer screw 154. This is the position of the contacting tip 28 in the X direction specified for each position of the H-disk 96.

Similarly, the housing of the KikroEeter screw 156 is attached to plate 82 by a bracket 168. The probe tip 170 of this micrometer screw is secured with a clamp 172 connected to the horizontal leg of the L-shaped element 116. A dovetail wedge 174 is attached to the bottom of the L-shaped member 116 and slides

109809/1322

in a keyway 176 in the plate 82nd compartment setting the The element 116 can be fastened to the Y coordinate by means of screws 178, which are inserted through elongated holes in this element 116 reach through and are screwed into the plate 82.

A wire feed device, designated as a whole by the reference numeral 180, is on the L-shaped element 116 attached, "which moves together with the plate 32 and im individual in the pig-. 6, 7 and 8 shown. The device contains a replaceable supply roll for the wire, which on a carrier roller 184, 184a is attached. The carrier roller 184> 184a is mounted on a tube 186 and there by an annular one Shoulder of a screwed-on cap 188 secured. Compressed air is introduced into the interior of the tube 186 via a duct

192 inside the arm 194 that supports the tube 186. The arm 194 is attached to the L-shaped member 116, see above that it moves together with the contacting unit. The compressed air is supplied to channel 192 via a flexible hose 196 and a clutch 198 is supplied. How to best see Fig. 8 sees a number of openings 200 lead from the inner bore 190 of the tube 186 to the annular space between the Tube 186 and the carrier roll 184. Through these openings'200.

An amount of air is supplied that is sufficient to keep the roller 184 permanently on a layer of air, so that a very low-friction mounting is achieved. In addition, it will be noted that the openings 200 are not exactly radial, but are slightly offset , so that the air circulates along the circumference of the space between the tube 186 and the carrier roll, thereby exerting a winding force on the carrier roll 184, ie a force which causes the carrier roll to rotate in such a direction that the wire is rewound onto the supply roll 82. A nozzle 202 periodically receives blasts of compressed air from a flexible hose 204 and directs a stream of air against the surface

109809/1322

- 17 -

184a of the carrier roll. This air flow is sufficiently large to overcome the winding force generated by the air flowing out of the openings 200 and a resulting ^ "gpulkraft. The air for the nozzle 202 for Reversal of the direction of rotation of the carrier roller 184, 184a is controlled by a solenoid valve (not shown).

Usually the supply roll rotates at a relatively slow speed. However, if for any reason the wire breaks, the air exiting openings 200 will cause the carrier rollers 184, 184a to rotate rapidly in the direction in which the wire would be wound. Alternating successive dark and light segments 205 and 206 on the end face of the carrier roll allow this catastrophic failure to be set so that operation can be interrupted. Separate glass fiber strands 208 and 210 are combined and aligned on the part of the end face which is shown with light and dark areas 205 and 206 (/. The light is guided over the glass fiber strand 208 to the end face and the reflected light is over the Glass fiber strand 210 is fed back to a photodetector, the pulse frequency and the intensity of the light reflected from the light and dark segments are electronically determined with the help of the photodetector. As soon as the frequency exceeds a specified value, a signal is generated that indicates a wire break out from the supply roll 182 to the Kontaktierspitze 28, by means of a device for wire feeding, the / 9 »10 and 11 of the drawing is shown in detail in FIGS.. the apparatus for wire feed means includes means to support the execution of the wire from the contacting tip 28 by means of air pressure, which as a whole with the reference numeral 220 denotes iat, and means for clamping the wire which the reference numeral

10900971922

22 wears. The device for clamping the wire is made a fixed jaw 224 and a movable jaw 226. The fixed jaw 224 is connected to a bracket 228 by a screw 230. The bracket 228 is in turn attached to an arm 142 by means of a screw 232. The movable jaw is attached to one end of a rod 234, which by means of an electromagnet 236 can be moved back and forth. The rod 234 runs in a bush 238 which is arranged within a jacket 240. The jacket 240 is held in a bore in the arm 142 by means of a set screw 242. Between the end of the Shell 240 and a counter pressure disk 246 is a compression spring 244 is provided, which the movable jaw 226 in holds the open position as long as the solenoid 236 is not energized.

The device for supporting the execution of the wire from the contacting tip 28 is likewise carried by the holder 228 and consists of an inner tubular element 250 which extends through an opening in the holder 228 and is screwed into an outer tubular element 252. The inner tubular element 250 has a tube part 250a of small diameter which protrudes only a little into a tube part 252a which protrudes downward from the outer tubular element 252. Compressed air is introduced into a cavity 254 between the inner and outer tubular members by a fitting 255 which penetrates into the annular space between the tubular members 250a and 252a. The compressed air source is controlled by means of a solenoid valve (not shown). _;

The contacting tip is on an electrical heating device device 256 attached, in turn by a tubular Carrier 258 is supported by the bracket. 228 there

extends through and connected to a cap 260 on the jacket 240 is. ·

The burner device for generating a new ball on The end of the wire after each tack contact is designated as a whole with the reference 261 (FIG. 5). This burner device consists of an arm 262 which contains the piping necessary for supplying combustible gases to a nozzle 264. This arm 262 is held by the second carrier element 62 carried and moves with it. The nozzle is between a working position in which it is in solid Lines is shown, and a rest position indicated by dashed lines; is (264a), by means of ■ a ^ only Solenoid 464 shown in Fig. 13 is pivotable. if if the nozzle is in the rest position (264a), then the gas flow flowing out of it is directed against an electrical flow Ignition device 266> during the operation of the inventive Contacting device is constantly energized. The nozzle is swiveled from the rest position to the working position, when the solenoid 264 is energized. The location of the ignition device 266 is also shown in FIGS.

Electrical system

The device according to the invention described so far is automatically controlled by a circuit included in 13 is shown in the schematic block diagram. A first clock generator 300 generates 4000 pulses per second. One of its outputs leads to a modulo two counter 302 and the other output to a modulo ten counter 322. The Output signals from the modulo two counter 302 go to a main counter 304. The main counter 304 is only put into operation when when a reset pulse is on input line 305 occurs. It then counts from 1 to 2000. The outputs of the

10980971322. _ ₂₀ .

The main counters 304 become the counting decoders 306-318 in parallel which generate logic output signals as described below in connection with FIG will.

The logical ones. ' usjango signals of the counting decoders 306 bis are used to control the servo system for aligning the second support member 62. The output pulses of the modulo two counter 302 are via a gate circuit led when the counting decoder 306 to activate the servoeysteros generates a logical output signal. On the other hand, when the count decoder 307 for low speed activation of the servo system ^ generates a logic output signal, then the gate circuit 320 is blocked and the pulses from the McQulo ten counter 322 are via the gate circuit 3-2 Ί guided. The outputs of gate circuits 320 'and 324 become applied to the X and Y servo amplifiers 326 and 328.

Wje in the above-mentioned application (file number., ...) in more detail is described, the electro-optic system 74 generates an X-rc-hLersignel on the channel 330 which the X servo amplifier 326 is fed and a Y error signal on channel 332, which is fed to the Y-ofcrvoverstirlcer 328.

The X-valve amplifier 326 generates a logic signal on the edge 1 334, which indicates the direction in which the X-control stepper: otor is turning for the comparison image in the olektro-opt: uchcr: system 74 to align and doroit? iuc? j the second Trüirprelement 62, on which dan system 74 Ie-

..;.,., ..Γ ·,, “. , -, ,, au ^ ij.ur.lcli.terL, 'iet'L'Tgt is, ge _; ^f : enur.) he der Transxstorplatto 1 _£ -f. this ior;: i-CCiK; Signal is via the norrralerweii: -e. closed contacts d (;. r limit switch 71 and 73 and via the ο in en pole of a two-pole iron, manually operable] Traf- ^! t :: chalii ^j rp 3? 6a with three ocMllis ί.οΠ judgment '^ i iU.-ri circuit 33 ^ for the X-iJohri It-

109809/1322

BATH ORIGINAL

switch motor output.

When a logic "one" appears on output line 334, the X stepper motor 60 drives the second carrier pulse toward limit switch 71 so that upon reaching that limit switch, the logic input to circuit 338 is reversed to a logic "zero" . The logic ¹ ITuIl "at the input of the circuit 338 then leads to a reversal of the direction of movement of the second carrier element in the direction of the limit switch 73. When the second carrier element 62 reaches the limit switch 73, the logic signal is reversed to a logic" one ", see above that the direction of rotation of the X stepping motor 60 is reversed again. The pulses arriving via the gate circuits 320 or 324 are amplified by the X servo amplifier 326 and output to the circuit 33.8 via the line 340 and the second Pci 336b of the pushbutton switch.

The circuit 338 for controlling the X stepping motor is shown in FIG. 14 and consists essentially of a four-stage reversible counter made up of JK flip-flops FP ₁ and FF ₂ with the logic outputs T ₁ , C ₁ , '- T ₂ ^{and c} p · ^The logic input to determine the direction in which the X stepper motor is driven is provided to input 344. The switching step pulses are fed to input 346. NAND circuits 348 to 356 form the necessary logic circuits for controlling the flip-flops FF ₁ and FFp in such a way that when a pulse train is supplied to the input 346, the outputs assume those logic states which they assume according to the function table according to FIG. 14a to have. If there is a logical "one" at input 344, then the counter counts in the forward direction and if there is a logical "zero" at input 344, then the counter counts in downward direction. The transistor 358 is controlled via the output T _{1, which in turn}

109809/1322

the transistors 359 and 360 switches so that these

either,., ^ _n

connect the output 362 / to the positive voltage or to ground, so that essentially an inversion of the logic signal takes place. In a similar way, the transistor 364 is controlled via the output Cj, which in turn switches the transistors 365 and 366 in such a way that they connect the output 368 to the positive supply voltage or to ground. The output Dp controls the transistor 370, which in turn switches the transistors 371 and 372, which control the current at the W output 374. The output Cp controls the transistor 376, which in turn switches the transistors 377 and 37.8 _f which control the current at the output 380 for sale. Line 382 is a common return line for stepper motor 60. Outputs 362, 368, 374 and 380 are across. Resistors shown in Fig. 13 are connected to one another and serve to drive the X stepping motor 60, the common return line 382 being drawn in the center. When the four outputs 362, 368, 374 and 380 are activated in the manner described, the motor rotates by a predetermined amount.

By moving the key switch 336 to the top or the "Lower contact can manually move the second support element 62 can be achieved in one direction or the other along the X-axis. When the switch is up is, then the pole 336a is connected to a positive voltage, which corresponds to a logic "one". The counter within the circle for the control of the X stepping motor thus counts in the forward direction, if a .pulse from the Kodulo ten counter 322 to the input is applied across lower pole 336b. Similarly, when switch 336 is in its down position is brought, the logic input 344 is connected to ground, which corresponds to a logic "zero". The counter of the circle

109 ^ 09/1322

- 23 -

thus pays for the control of the X-step switching motor Input of the output pulse of the modulo ten counter at the lower pole 336b reverse.

The Y-indexing motor 68 is operated in the same way as the X stepper motor 60 by a servo amplifier 328, by limit switches 75 and 77, by a double-pole switch 384 with three switch positions and a circuit 386 actuated for the control of the Y-stepping motor, whereby these elements with the corresponding components that were described in connection with the X-stepping motor, are identical.

The V-stepping motor 122 and the H-stepping! tinotor 92 are "assigned to control circuits 388 and 390, those with the circuit 338, the one in Tig. 14 are identical. the Control circuits 388 and 390 are controlled by circuits 392 and 394, respectively, shown in Figure 17 and those below should be explained.

The pulses for the ^T 'rice 392 are supplied by a second clock generator 396, which works with a pulse rate of 2.4 heart' ^ and a monulo-five counter 39 & (see. Fig. 13). These pulses arrive on line 400 (see FIG. 17) and are applied to the inputs of a pair of I .AiTD gates and 404. The outputs of the NAND gates 402 -and -404 are sine, as in an OR circuit, led to a common output. The logic signal at the output 'of the decoder 315, via which a first input of the control circuit for the V stepping motor is set, is fed via the line 406 to the input of the gate circuit 408 of the last-mentioned circuit. The output of the gate circuit 408 is connected to the inputs of T ovz cha1tunken 402 and 410. The second input of the gate circuit '410 "is via a 7 / iderstar.u · Ή 2

109809/1322

connected to a positive voltage source and also with the output line 414 of the sensing device 416 for the Position of the V-disk, which is shown in detail in FIG. 15 and is explained below.

The logic signal on the output line 418 of the decoder 516, which is used to set a second input of the control circuit 392 for the V-stepping motor, is a Input of a gate circuit 420 is supplied. The output of the gate circuit 420 is connected to the inputs of the gate circuits and 422 connected. The other input of the gate circuit 422 is connected to the output 424 of the sensing device 416 for the position connected to the V-disk and also via a resistor to the positive voltage source.

The sensing device 416 for the position of the V-disk contains a light source 430, the V-disk 138 and first and second photodiodes 436 and 438. Light from source 430 passes through openings 432 formed at predetermined locations along the circumference of the V-disk 138, as shown in FIG. 16, respectively at the same radial distance from the center of the disc, onto the photodiode 436. Light from the source passes through a single opening 434 which, compared to the openings 432, has a different radial distance from the center of the disc, to the second photodiode 438 and is intended to determine the start of a work cycle. Located in the same angular position as the opening 434 also one of the openings 432, so that the V-stepping motor from a single central circuit (one-shut-circutt) can be put into operation.

The photodiode 436 together with the resistor 440 forms one Voltage divider that supplies the base voltage for the transistor, which acts as an emitter follower stage with output 414,

109809/1322 - 25 -

BATH ORIGINAL

is bound. Resistor 444 limits the current through the Transistor 442. In the same way, the diode 438 together with the resistor 446 forms a voltage divider, which the Provides base voltage for transistor 448, which is connected as an emitter follower, and an output signal on the line. 424 delivers. A resistor 450 limits the current through the Transistor 448.

Whenever the photodiode 436 is struck by a light beam that passes through one of the openings 432, then there is approximately ground potential on the output line 414, which corresponds to a logical "ITuIl". When the photodiode 436, on the other hand, is not illuminated, the base of the Transistor 442 and thus output 414 is sufficient positive potential, which corresponds to the logical "one". Diode 338 works in the same way and creates a logic "zero" on output line 424 when the diode is struck by a beam of light passing through the aperture 434 passes through. If the photodiode is not illuminated, a logical "one" is delivered at the output.

The push button 454 provides a means for manual actuation • aes V stepper motor. When push button 454 is pressed is, then the central circle 455 delivers a start pulse on the line 406, the shape of which corresponds to the shape of the pulses that Are supplied by the decoder 315, and match this impulse has the same results as her to be described below '.

On the input line 400 for the control circuit 392 are always clock pulse available. When the V-Washer 138 is so arranged is that the light hits the first photodiode 436, then a logical "Hull" and the The output of the gate circuit 410 thus provides a logical one

109809/1322 - 26 -

"One". Line 406 is usually a logical one "One", so that both inputs for the gate circuit 408 the supply logical "one" and thus the logical "zero" appears at the output. This opens the gate circuit 402 blocked and the logical "one" is at its output. The consequence of this is that the logical "one" is constantly at output 452 is present, so that no pulses are given to the input of the control circuit 392 for the V-stepping motor, which corresponds to the input 346 in Fig..14. When the decoder 315 determines the correct count of the main counter 304, then appears on the line 406 temporarily logical "zero", so that the logical "one" occurs at the output of the gate circuit 408, whereby the gate circuit 402 is set will. Then when the signal on line 400 changes from logic "zero" to logic "one", then jumps the output 452 from logic "one" to logic "zero". This has the consequence that the associated with the V-stepping motor Circle 388 advances this and at the same time rotates the V-disk 138 until it provides the light for the photodiode 436 interrupts. Thereupon the logical "one" appears again on the output line 414, which together with the logical "One" from the output of gate circuit 408 causes the output of gate circuit 410 to provide the logic "zero", whereby the output of gate 408 is held at a logic "one". As a result of these shifts it rotates the V-stepping motor continues even after a potential is present on line 406 which corresponds to the logic "one" corresponds to, up to the point in time at which the photodiode 436 is illuminated through the next opening 432. At this point in time, the logic "zero" occurs again on line 414, the output signal of gate circuit 410 jumps to the logical "one" and the output signal of the gate circuit 408 jumps to the logical "zero" and holds the output of the gate circuit 402 at the logic "one".

10 & Ö09M322

The operation of the gates 404, 420 and 422 as well as the photodiode 438 is the same in response to a pulse from the decoder 316. The purpose of the dual ports 432 and 434 is to ensure that the V-wheel each time returns to its Besugsstellung, the 1st set through the opening 434 and thus is ready for the start of a new cycle. If only a single set of ports 432 were provided and the motor for some reason overflowed one of the ports 432, then the V-pulley would fall out of step for all subsequent duty cycles until manually reset. However, since a pulse is generated by means of the decoder 317 in order to rotate the V-disk 138 out of the position it assumes when the last opening 432 is opposite the photodiode 436 within one cycle, the V-step controller rotates until it is determined that the opening 434 is between the light source 420 and the photodiode 438.

The H-stepping motor ^ 2 is driven by the same circuit components as the V-stepping motor 122, except that S di- · stepping pulses before. the clock 396 can be derived by a mod /.o- four-counter 456. The sensing device 45 ^r / for the position of the disc Η-iat identical to the sensing device 416 for the V-pulley and the central circle 458 (one-shut-circuit) is identical to the central circle 455th

The air through nozzle 202, which serves to cause the supply roll to rotate so that the wire is unwound, is controlled by an electromagnet 460 which is energized by a decoder 309. The air that goes into the cavity. 254 of the wire feeder is introduced, is controlled by an electromagnet 462, which is controlled via a de-

109809/1322

encoder 310 is energized. The electromagnet 236 of the clamping device is controlled via the output of a decoder 312. The burner nozzle 264 is moved from its rest position into its working position by means of an electromagnet 464 which is excited by a decoder 313. The electromagnet 152 for holding down the contacting tip 28 is excited via a decoder 314. It is also ensured that. Each of the five aforementioned electromagnets can also be operated manually by means of the push buttons 466 to 470 and the diode group 472. The diodes 474 that are in parallel to the individual electromagnets, protect the Circuit in front of inductive pulses.

Operation of the contacting device

To prepare the contacting device 10, a reference image, which corresponds to the image of the transistor plate 12, is first inserted into the electro-optical system 74. Then, by means of the micrometer screws 154 and 156, the X and Y _r displacement of the expanded contact, on which the spherical contact is to be made, is set with respect to the optical axis of the image. The wire 2, 4 is then drawn from the supply roll 182 through the clamping device 222, the tube 250a and the contacting tip 28, and a ball is formed at the end of the wire. For this and other purposes, the contacting device according to the invention can be operated by means of the manually operated switches 466 to 470 and the switches 454 of the sensing devices 416 and 457 for the position of the V-disk or the Η-disk. Furthermore, the second holding element 62 can be shifted by hand in both directions along the X and Y axes by means of the switch gate 336 and 384.

- 29 -

109809/1322

The automatic sequence of the work program is best done from Pig. 18 clearly. When the clamping device 40 brings the workpiece 10 into the working position, a mechanically generated backlash pulse is given on the line 305, which resets the main counter 304, which then immediately begins to count. When the counter reading 2 is reached, the decoder 306 for enabling the servo devices generates a logic signal which connects the pulses γόη from the Modul6 two counter 302 to the X servo amplifier 326 and to the Y servo amplifier 328. The X stepping motor 60 and the Y stepping motor 68 are then driven in a direction in which the comparison pattern within the electro-optical system 74 is brought into register with the transistor plate 12, as a result of the X and Y error signals which are fed back via lines 330 and 532. The positioning process is when the counter reading is reached. 25 ends, in which the decoder 308 for controlling the rubber lens of the electro-optical system 74 generates a logic signal, which has the consequence that a greater magnification (optical zoom) of the transistor plate 12 is effected. When the counter reading 125 is reached, the decoder 307 blocks the gate circuit 320 for low operating speeds and sets the gate circuit 324 so that the slower successive pulses of the modulo ten counter 322 are fed to the X and Y 3 servo amplifiers 326 and 328, respectively. Both the signal for the decoder 306 and the signal for the decoder 307 end when the counter reading 225 is reached. The signal for controlling the rubber lens ends when the counter reading 250 is reached.

During the alignment by the X or Y stepping motor 60 .bzw. 68 is the contacting tip outside of the field of view, which is shown in Fig. 12 by the dashed

- 30 -

109809/1322

- 3O -

ten lines 480 is indicated, as indicated at 28a in Pig.2a is. Before the end of the period in which the electro-optic system 74 enlarges the transistor plate, the electromagnet 152 is energized when the counter reading 195 is reached in order to fix the rotatably mounted arm 142. The first decoder 317 to enable the servos for the H stepper motor generates a pulse when the counter reading 206 is reached, Gen a horizontal movement of the contacting tip 28 into the position takes place in which the ball contact is made '. The release pulse takes no longer than necessary, including the H washer in the sensing device 457 to turn so much that the photodiode is no longer illuminated. The H stepping motor continues until another opening is over the photodiode so that a pulse is sent to the controller 394 for the H stepper motor is given, which a shutdown this engine. This happens approximately when the counter reading 365 is reached. The contacting tip is located at this point in time over the expanded contact on the transistor plate 12 on which the ball contacts are made target.

When the counter reading 345 is reached, the electromagnet 152, which serves to hold down the arm 142 is de-energized.

Next, when the counter reading 375 is reached, the first decoder 315 to enable the Seivovorrichtungan for the V-stepping motor a pulse that causes this motor to start. While the ^ stepper motor is turning, the vertical plate 112 is lowered so that the ball is held at the end of the wire which is held by the contacting tip 28 is pressed against the expanded contact. The rotatably mounted arm 142 ensures that only the correct one Pressure is applied when the plate 112 is under the

109809/1322 - 31 -

Moved level at which the ball made the expanded contact touched. The V-disk is stopped when, for example, the counter reading 497 is reached, at which an opening 432 in the V-disk 138 between the light source 430 and the photodiode 436 lies. This movement of the contact tip is shown in Fig.2a shown.

While the V-stepper motor lowers the contacting tip, energizes the decoder 309 to control the supply roll in unwinding when the counter reading 425 is reached Electromagnet 460, see that a'Luftström is generated at the nozzle 202, which such a force on the "supply roll exerts that a resulting rotational movement of the same is caused in the unwinding direction. The decoder 31 "3 for the Activation of the flame energizes the electromagnet 262 when it is reached of the counter reading 500, so that the burner nozzle is pivoted into the position indicated by the flame 36 in FIG will.

After a short Yerweilsöi-c, which is to ensure that a fixed Kugelkontaktierung has occurred, the first decoder for \ e released generates the servo devices for d-V-SchrittschaIt ^ otor eiti second signal to turn a start of the V-Sclirittschaltmotors Consequence. The V-step motor then runs until approximately the counter reading 1268 is reached, at which the second opening £ 32 is located between the light source 430 and the photodiode 436. The first decoder 317 for enabling the servo devices for the H-stepping motor also generates a second signal, namely "when the counter reading of 650 is reached, which starts the II-stepping motor 92. When the counter reading 673 is reached, the V- Stepping motor, the contacting tip is raised to its Haxiraalhöhe and the contacting tip remains in this position for about the time between

109809/1322. - 32 -

the counter reading from 673 to 815, although the V-stepping motor continues. When the counter reading 790 is reached, the decoder 310 excites the electromagnet for the wire feed 462 so that a pulse of air enters the wire feeder 220 is output, which supports the unwinding of the wire from the contacting tip. The V stepper motor then begins with the lowering of the contacting tip when the counter reading 815 is reached and the H stepper motor is stopped when the counter reading 857 is reached. When the count reaches 912, the V-stepping machine has brought the contacting tip into its lowest position, in which it presses the wire against the conductor 18. The contacting tip remains in this position until the Counter reading 1062 for generating the stick contact. ϊη the Time between the count 912 and the count 1000 energized der'Decondierer 314 the electromagnet 152 so that the from this force additionally generated the pressure of the contacting tip on the edge of the wire during the manufacture of the Stick contact increased. This part of the movement of the contacting tip is in Pig. 2b shown.

When the counter reading 1062 is reached, the stepping motor lifts the contacting tip, whereby wire is unwound and at 1200, decoder 312 energizes electromagnet 236 to clamp the wire. During the V stepper motor If the contacting tip pulls further upwards, the wire breaks off at the point where it passes through the Staple contact has been weakened. This movement is shown in Fig. 2c.

Once the wire is broken, the second decoder generates 318 to enable the servo devices for the H stepper motor when the counter reading 1225 is reached, a pulse through which the !! - stepping motor 92 is started and

109809/1322

- 33 -

the contacting tip in the starting position outside of the Field of view of the electro-optical system 74 returns. Shortly thereafter, at counter reading 1268, the V-stepping, motor stopped, via a feedback signal from the sensing device 416 for determining the position ' the V washer. De- · Electromagnet 236 for plaguing the The wire remains energized until the count is reached 1475. During this time, the wire has passed flame 36 and a new ball has formed at its end. The path of the contacting tip in the time between the counter positions 1225 and 1525 is shown in FIG. 2d.

Once, the electromagnet 236 for clamping the wire is de-energized, the second decoder 316 generates for release -the 'servo devices for the! / "stepping motor a Pulse through which this motor 122 is put into operation again and the contacting tip is in an intermediate position brings, in which this remains until the beginning of the next work cycle. While the contact tip is down moves, the newly created ball at the end of the wire is pulled up against the end of the contactor tip, which is below the influence of the winding force that is generated by the air which flows continuously through the openings 200 into the air bearing. As soon as the contact tip is under the Is lowered level at which the flame 36 is located, the decoder 313 de-energizes the flame activation of the 'electromagnet 464, so that the burner nozzle, with a count of 1525, in the direction of the ignition device 266 is pivoted back.

When the counter reading 1525 is reached, the sensing device generates 457 for the position of the Η-disk over the second photodiode " a pulse so that the H stepping motor 92 stops will. When the count reaches 1653, the

109809/1322 _ ₃₄ _

Sensing device 416 for the position of the V-disk over the second photodiode a pulse, which deti V-stepper motor stops.

The clamping device 40 begins the positioning process when the counter reading 1225 is reached and the movement of the The clamping device causes a new reset pulse on the input line 305, which is about a counter reading from 1800. The work cycle is then repeated. So you can see that the complete cycle lasts less than a second.

-Patent claims-

1Q9809 / 1322

Claims (1)

Claims / 3./ Process for connecting a wire to a metallized ^ - th surface on a semiconductor device because through characterized in that the semiconductor device is aligned within an optical field of view, that the optical field of view and the semiconductor device are aligned in predetermined positions with respect to one another, and that the wire is then moved to a predetermined position within the field of view in order to move the wire with a predetermined one Connect point on the semiconductor device. 2. The method according to claim 1, characterized in that the wire successively at least, in two predetermined positions is moved; around the wire between to connect two predetermined points on the semiconductor device. 3. The method according to claim .., characterized in that the end of the wire from a supply roll by a *? tubular needle is guided that a ball is formed at the end of the wire, which has a through. has a knife that is larger than the inner Dtxehmesser of the tubular needle that torque on the roll in the winding direction exerted to tension the wire and to hold the ball against the end of the needle that the ball is is pressed against the first surface by means of the needle. to connect the ball to the first surface so that a torque is exerted on the roller in the unwinding direction, while the needle moves from the first surface to the second Surface is moved that one side of the wire is pressed against the second surface to the wire with the second Surface to join that needle from the second - 36 - 109809/1322. Surface is lifted while the wire is being dispensed ", that the wire is clamped to tear the wire between the connection and the needle, that the wire is through a flame is passed to create a new ball, and that the wire is released, and that onto the spool torque is applied to tension the wire and counteract the ball in preparation for the next contact cycle to move the end of the needle. Method according to claim 1, characterized that the semiconductor device is held in place at the workplace and that the optical field of view is moved to align it with the semiconductor device. Method of joining first and second metallized surfaces, at least one of which is on a semiconductor device is located by means of a connecting wire which is wound on a supply roll and which is passed through a tubular contacting tip is guided, thereby characterized in that a ball is formed at the end of the wire so that tension is applied to the wire, to keep the ball against the tip of the needle by clicking on the roller a torque: '. In the winding direction is exerted that the wire ^ the first and the second surface at connection temperature (bonding temperature) are heated "that the ball is pressed against the first surface by means of the needle is used to connect the ball to the first surface, releasing tension on the wire by applying torque is reduced in the unwinding direction on the roll and by positive feeding of the wire from the needle while the needle is moved from the first surface to the second surface, that the wire by means of the needle against the second upper - 37 - 103809/1322 surface is pressed to the wire with the second surface to connect that piece of wire run out of the needle that the wire is then clamped against the needle in order to tear off the thread in the area of the last-mentioned connection, and that the wire protruding from the needle goes through a flame is passed to create a new ball at the end of the wire. 5. Method for connecting first and second metallized surfaces by means of a connecting wire from a wire stock , thereby g e k e η η ζ ei without t that . the wire is threaded through a tubular needle that a ball is formed at the end of the wire that the wire and the first and second surfaces on connection window be heated that the ball by means of the needle against the first Surface is pressed to connect the ball to the first surface that the needle from the first surface to the second surface while applying a force the wire is exercised in a direction that goes there Tension on the wire tends to prevent one side of the wire from pressing against the second surface is to connect the wire to the second surface that the wire is run out of the needle that the wire then between the needle and the second connection is torn off and that the wire is then passed through a flame is used to form a new ball, 7. The method according to claim 6, d a d u r c h g e k e η η - · records that the wire is running positively out of the needle while the needle is moved from the first surface to the second surface. - 38 - 10 980 9/1322 8. The method according to claim 6, characterized in that g e k e η η that the needle is lifted from the second surface 'after the wire is connected to deliver wire, and that the wire is then held opposite the needle and that the needle is raised further to place the wire between the connection and the needle to tear. 9. Method of joining first and second metallized surfaces with a wire, characterized that the first and second surfaces are roughly aligned at a contacting station, that one is movable in an X-Y plane Cross table is brought into a predetermined position with respect to the first and second surface that the contacting tip through which the wire is threaded through and which is attached to the table, opposite the table in a first Position is transferred, the first position being selected so that the contacting tip moves against the first surface is to connect the wire that passes through it to the first surface, and that the contacting tip is moved into a second predetermined position in relation to the table, the second predetermined position being selected in such a way that that the contacting tip is moved against the second surface, around the wire protruding from it with the second Connect surface. 10. The method according to claim 9, characterized in that the wire positive from the Kontalitierspitze is performed while the contacting tip moves from the first to the second predetermined position. 11. The method according to claim 10, characterized that the wire is carried out positively from the contacting tip by means of an air stream. - 39 - 109809/1322 12. The method according to claim 9, characterized in that the wire is on a supply roll is stored that the wire is threaded through the contacting needle, and that a ball is formed at its end is that a torque is exerted on the roller in the winding direction to tension the wire and to counteract the ball to hold the contacting tip before the contacting tip is moved into the first position, and that to reduce the tension in the wire generates a torque in the unwinding direction is exerted on the coil while the contacting tip is moved from the first position to the second position. 13. The method according to claim 9 _9, characterized in that the contacting tip is raised a bit from the second position in order to pull out a piece of wire from .der * Kohtaktierspitze, that the wire is then held against the contacting tip, and that the needle moves further upwards is to tear off the wire so that a piece of wire protrudes from the contacting tip, and that the piece of wire is then passed through a flame to form a new ball before the wire 1 ». is left. 1 ^. Process for the production of thermocompression joints /
dungfzwisehen a connecting wire of small diameter and two surfaces, thereby geke η η ζ calibrated η et that the wire is positively fed from a contact needle while the needle is moved from one surface to the other. 15. The method according to claim I ¹ I, characterized in that the wire is carried out positively from the contacting tip by the wire and an air stream are guided through a small diameter channel, 109809/1322 - 40 - that the air flow exerts a force on the wire through friction, which has the tendency to pull the wire out of the contacting tip, lead out. 36. Method of feeding a small diameter wire to a thermocompression contacting tip for connection a connecting wire between first and second surfaces, characterized in that the wire is stored on a reel that normally a torque is exerted on the spool in the winding direction is used to maintain tension on the wire and a torque in the unwinding direction to reduce the tension is applied to the coil when the contacting 'tip moves between the first and second surfaces will. 17. The method according to claim 16, characterized in that that the coil is carried by an air cushion and that the torque; in the unwinding direction and in Winding direction can be exerted on the bobbin by the friction of air against the bobbin. 18. Syotem for automatically connecting first and second surfaces on a semiconductor device with a connecting wire, characterized by the combination of the following features: a table is provided which is fixed so that it is movable in the direction of the X and Y coordinates j an the table is attached to an electro-optic _s character recognition system having a field of view and means for generating X and Y error signals, the aniseigen in which direction along the X resp. Y coordinate the axis of the field of view must be moved to the Achre in a predetermined manner with respect to the semiconductor device '"' ' which is positioned within the field of view; means are provided to connect the semiconductor device - 41 - 109809/1322 a workplace within the field of vision bring to; .Servo devices are provided that are included in Move the table depending on the X and Y error signals, until the axis of the field of view is in that predetermined position with respect to the semiconductor device, and a contacting device is provided, which is attached to the table and that of the connection of the. Jumper wire with the first and second opposite the optical Axis predetermined location on the semiconductor device is used, the first and the second predetermined position so the wire is selected to be connected to predetermined points on the first and second surfaces. 19. System according to claim 18, characterized in that ge k e η η that the contacting device includes first and second elements which are attached so that the the first element is movable relative to the table in a plane substantially parallel to the X-Y plane, and that second element i-n one opposite the X-Y plane essentially vertical plane, with the first element connected to the table and the second element to the first is attached that further a contacting needle on the second element is attached that means are provided for feeding a wire to the contacting tip, that means to move the first element in a predetermined manner opposite the table are provided that means for moving the second element in a predetermined manner relative to the first element are provided, and that with the help of this Means the Kontaktierspitüe is movable against the first and the second surface. 20. System according to claim 19, d a d u r c h g e k e η η drawing η e t that the first element is attached to the table and the second element is attached to the first. - 42 - 100809/1322 21. System according to claim 20, characterized in that the means for feeding the wire to the contacting tip are attached to the first element. 22. System according to claim 21, characterized in that on the second element means for Plague clamps of the wire are attached. 23. System according to claim 2, characterized that means for generating a flame are provided, the means for moving the first element and the means for moving the second element guide the tip of the needle past the flame, that on a prahtstück protruding from the Kontaktierspxtze a ball is formed. 2k. System according to Claim 19 _s, characterized in that the contacting tip is attached to one end of an arm, the other end of which is rotatably connected to the second element in such a way that the arm can execute a limited rotational movement about an axis which is substantially parallel to the XY -Plane runs, whereby the downward movement is limited by a stop , 25. System according to claim 2 ² I, characterized in that an electromagnet is provided which exerts such a force on the arm that it is pulled against the stop. 26. System according to claim 23, characterized that a clock is provided that counting devices for counting the clock pulses as a function are provided by a logic input signal which indicates the start of a contact cycle, and that - 43 - 109809/1322 Devices for determining predetermined counting results of the counter are specified, which generate logic signals to operate the system automatically, in the following in order: a) the table is in a predetermined position in relation to the Axis of the field of view brought b) the contacting tip is moved out of the field of view into a position in which the first contact is made target c) the contacting tip is lowered to the wire in the first position to fasten d) the contacting tip is raised e) the contacting tip is moved into the position in which , the second contact should be made f) the contacting tip is lowered in order to establish the second connection g) the contacting tip is raised a short distance, then the wire is clamped while the contacting tip is moved further up h) the contactor is in its starting position outside of the field of view returned, being moved past a flame so that a new ball forms i) after a new ball is formed at the end of the wire, the previously clamped wire is released. 27. System according to claim 19 »thereby g e k e η η ζ e i c h η et that to the means of moving the first Element in a predetermined manner opposite the table an eccentric disc and eccentric roller and a drive for the Eccentric disk belong, and that to the means of movement - 44 - 109809/1322 of the second element in a predetermined manner opposite the first element an eccentric disk and eccentric roller as well Drive means for the eccentric disk include. 28. System according to claim 27 »characterized that at least one of the eccentric discs is driven by a stepping motor which is arranged so that it drives the eccentric disc, and that one Pulse source is provided that a counter for counting the pulses and for supplying currents to the stepping motor is provided by which the stepper motor is caused to be in synchronism with each of those connected to the motor applied pulses to advance, and that logic circuits for switching the pulses through to the counter as a function of are provided by a logic signal which represents the number of the steps defines by which the stepping motor moves the eccentric disk. 29. System according to claim 28, characterized that the logic devices for switching through the pulses to the Zähleifl.ittcl to generate contain a number of start pulses at predetermined times within a contact cycle in order to switch through to effect the pulses to the counter, and further means which are connected to the eccentric elements and which are used for this purpose serve to generate logical stop signals, and to terminate the pulses when the eccentric disc has a predetermined position has reached. 30. System according to claim 29 »marked thereby. It is shown that the means for generating the logical stop signal contain a light source and light-sensitive ones Detector devices and a disk, which is located between the light source and the light-sensitive detector devices and which is shared with the - 45 -. 109809/1322 Eccentric disc rotates, as well as an opening in the disc, which is arranged so that the light from the light source to the light-sensitive detector devices can pass through them when the eccentric disc is in the Position in which it must be stopped. 31. System according to claim 30, characterized in that two logical devices for Switching through the pulses to the counter is provided that two devices for generating start pulses are provided at different predetermined times within a contact cycle through which the switching the pulses are introduced to the counter, "that two light-sensitive detector devices are provided, to generate stop signals that interrupt the output of pulses from the corresponding logic devices, and that at least two openings are provided in the disk which have a different radial spacing from the center thereof, each of the openings sending the light to only one of the light-sensitive detector devices lets through. 32. System according to claim 20, characterized in that the contacting device means contains, which output the wire positively from the contacting tip, while this between the first and the second <th surface is moved. 33. System according to claim 32, characterized in that g e k e η η ζ e ic h η e t that means to positive output of the wire from the contacting tip belongs to a tubular channel through which the wire is led out, as well as Means for generating a flow of air through the tubular duct in the direction in which the wire is carried out, - 46 - 101808/1322 34. Sy StBm according to claim 32, characterized ', that to the means for the positive execution of the wire from the contacting tip a first tubular channel through which the wire is passed, as well as a second tubular channel, the around and protruding from the lower end of the first tubular channel and means for introducing Air under pressure enters the second tubular channel at a point above the lower end of the first tubular Canal lies. 35. System according to claim 18, characterized that the contacting device comprises the following elements: a) an axis - " b) a spool for a wire supply, which is mounted on the axle, with between the axle and the Coil is an annular space and c) openings through which compressed air enters the annular Space between the axis and the coil is introduced so that the coil is carried by the air ^. 36. System according to claim 35 »characterized in that the openings are arranged so that there is a torque acting on the spool in one direction. 37. System according to claim 36 ₉ characterized thereby - For example, without the fact that basic means for supplying air are provided in order to generate an opposite torque on the coil, and that means for controlling the air supply to the two devices via which air - 47 - 109808/1323 is supplied, are provided to indicate the direction of the on to control the coil applied torque. 38. System according to claim l8, characterized in that means for setting the contacting device are provided in the direction of the X and Y coordinate opposite the table, with the help of which the Position of the contacting device relative to the axis of the field of view is adjusted and with the help of which the points at which the connections are established. < 39. System according to claim l8, characterized GEK e η η - η i ze et that the contacting device comprises a coil for feeding the wire to the Kontaktiereiniichtung, and that means are provided for applying a torque in the winding direction of the coil to the wire to tension, and that means are provided to determine a speed of rotation of the spool which is greater than a predetermined maximum to indicate that the wire has broken. HO. Automatic contacting machine, characterized in that a number of operating devices are provided which, when actuated in succession, connect a holding wire to a first and a second surface of a semiconductor device located at a workplace, that a clock is provided, that counting devices for counting the Pulses are provided until a predetermined maximum count as a function of a start signal, which indicates that the first and the second contact are in the working position, and that means are provided to generate a series of logic signals when certain _ 48 - · 109809/1322. Generate counter readings by which the actuating devices operated in an order in which the jumper wire is connected to the first and second contacts will. System for automatically connecting a first and a second surface with a jumper wire, characterized by the combination of the following Characteristics: they are means for aligning the first and second Surface provided at a workplace. a table is provided which is arranged so that it is movable in an X-Y plane with respect to the work station is. there-are electro-optical devices for automatic Alignment of the table in a predetermined manner with respect to the first and the second located at the workplace Surface provided, a tubular contacting tip is movably attached to the table. Means are provided for feeding the wire to the contacting tip. * there are means are provided to the contacting tip one after the other in a first and in a second, opposite the Bring table predetermined position, the first and the second predetermined position with the first and second Surface match when the table is in the specified position in relation to the first and second surfaces, and there are means for raising and lowering the contacting tip in a predetermined manner in order to keep the wire in the - 49 - 109809/1322 tacting point against the first and second surfaces to press. System for aligning a workpiece at a work station, characterized in that an electro-optical device is provided at the work station, which scans the workpiece and generates error signals which give an indication of the movement which is necessary to move the electro-optical device over a predetermined one Axis ge2 ^ ⁿ to align the workpiece, and that means for moving the electro-optical device to the optical. Axis depending on the error signals are provided to. align the workpiece at the workplace. System for feeding a small diameter strand, characterized by the combination following features: an axis is provided; there is a coil rotatably arranged on the axis, wherein there is an annular space between the coil and the axle »and there are openings for the supply of compressed air in the annular Space is provided between the coil and the axle so that the coil is supported by an air cushion. System for feeding a small diameter strand, characterized by the combination of the following features: a coil is provided for the stranded wire, and eg means for supplying air are provided to support the coil on an air cushion and onto it 109809/1322 - so - apply torque in one direction. 45. System according to claim 44, characterized that the devices for supplying the air are also suitable, selectively a torque exercise in the other direction on the spool. 46. System for feeding a small diameter strand, characterized in that a ' tubular channel is provided through which the strand is fed, and that means for producing a Air flow through the tubular channel in the direction in which the braid is carried out are provided. 47. System for feeding a strand of wire, thereby characterized in that there is provided a first tubular channel through which the wire is passed that a second tubular channel is provided around the lower end of the first tubular channel lies around and protrudes beyond this, and that means for introducing compressed air into the second tubular channel are provided above the lower end of the first tubular channel. 48. Method of connecting a conductor wire between two Surfaces of a semiconductor device, d a d. u r c h characterized that a first end of a Wire is connected to one of the surfaces by means of a contacting head that the wire from the contacting head executed towards the attached end of the wire is while the contacting head is moved to the other surface, and that an intermediate piece of the wire by means of of the contacting head is connected to the other surface. - 51 - 20323Ö2 49. Method of attaching leads to metallized Areas of semiconductor surfaces in which the leads from a supply roll o. The like. Located Ladder running through a guide one after the other be separated after each of the free end of the conductor through a contact tip forming the end of the guide with connected to a metallized area of the semiconductor surface to form a contact, thereby characterized in that the feed of the conductor (24) from the supply roll (182) or the like. Controlled in this way will that no tensile forces on the completed contact (25) act. 50. The method according to claim 49, characterized in that g e k e η η - draws, that the conductor (2 * 1) is driven in the direction of the end of the contacting tip (28), 51. The method according to claim 49 and 50, characterized ge ken η ζ ei c h η e t that the drive of the conductor (24) by driving the supply roll (182) in the deflection direction is brought about. 52. The method according to claim 51, characterized in that that the supply roll (182) on an air cushion stored and driven by at least one air flow having a tangential component. 53. The method according to claim 52, d ad ure h, characterized in that the supply roll by two air streams that produce opposite torques, the resulting torque being rotation causes the supply roll (182) in the unwinding direction. - 52 - 109808/1322 5 ^. Method according to one or more of the preceding claims; Proverbs, characterized by that the conductor is driven within the guide in the direction of the end thereof. 55. The method according to claim 5 * J, characterized in that it is identified that the drive takes place with compressed air. 56. The method according to claim 55 »characterized in that it draws η η that the compressed air is passed through a tubular channel (252a) surrounding the conductor. 57. The method according to one or more of the preceding claims, characterized in that a second connection (33) of the conductor (24) with a metallic surface (18) is made at a distance from the first contact (25), and that the Feeding of the conductor (2 ² O after the second connection (33) has been made is controlled in such a way that the conductor (2 * 0 in the area of the second connection (33) tears off, and that a conductor piece (2JJc) of a predetermined length from the contact tip (28) protrudes. 58. The method according to claim 57, characterized that after the second connection (33) has been made, the contact tip (28) is lifted from this and that the conductor (2 * 0 a predefinable time after the start the lifting process and before the end of the same in the guide is clamped by a clamping device (222). 59. The method according to claim 57 and 58, characterized in that the contacting tip (28) protruding piece of ladder (2 * Jc) each before the beginning of a Working cycle is guided by a flame (36), so that at the end of a spherical melting bead (27). forms. - 53 - 109809/1322 ■ ZÖ32302 53 60. The method according to claim 59, d a d u r c h g e k e η η draws that after the melt bead has been produced, the clamping device (22-2) is opened and the supply roll (182) is driven in the winding direction, so that the melting bead is against the end of the hollow needle Contacting tip (28) places. 61. The method according to claim 60, characterized in that the melting bead (27) for formation a contact (25) pressed by the contacting tip (28) against a metallized area of the semiconductor surface will. 62. The method according to one or more of the preceding claims, characterized in that when the contact (25) and the second connection (33) are made (äef-Sefilr ^ tti ^ iiiS ^ d ^^ metallized area or the metallic surface (18) are heated to a temperature which at a given pressure of the contact tip, a connection by thermocompression is permitted. 63. The method according to one or more of the preceding claims, characterized in that the contacting tip (28 ^{) is aligned with the aid of an optical system (7 1} I) with respect to the metallized or metallic surface (s), 64. The method according to one or more of the preceding claims, since by geke nn zei ch η et that during the production of the second connection (33) the conductor (24) through a relatively small area of the end of the contacting tip (28) against the metallic Surface (28) is pressed so that the conductor is weakened in this area by crushing . ,, . - 54 - 109805/1323 2Ö32302 65. The method according to claim 63 and 6 ¹ Ij, characterized in that the semiconductor surface remains in a fixed position, and that the optical system (7 * 0 is aligned opposite it. 66 . Verfihren according to any one of claims 63 to 65, characterized in that the optical system (7 ¹ O and Kontaktierspitze (28) are interconnected such that they can be aligned to prepare an operating cycle in common with respect to the surface to be contacted, and that the Contacting tip so arranged r is that after this alignment for the implementation of the individual work passages relative to the optical system (7 ¹ O is movable. 67 · Method according to one or more of Claims 63 to 66, characterized in that the optical system (7 ¹⁰ O and the contact tip are automatically controlled with the aid of servo devices via a controller. 68. Proceedings according to one or more of the preceding claims, characterized in that wires are used as conductors « 69 · Method according to one or more of the preceding claims 1 to 67, characterized in that that stranded wires are used as conductors. 70. The method according to one or more of the preceding claims, d "a characterized by the fact that the second connection (33) is produced on a semiconductor device. 71. The method according to claim 70, d a d u r c h g e ke η η draws, that the first contact (.25) and the second connection (33) at different points of the same Semiconductor device can be produced. - 56 - 109809/1322 72. Device for carrying out the method according to a or more of claims * J9 to 71 > characterized in that controllable facilities are provided for driving the conductor in the direction of the end of the contacting tip (28). 73. Apparatus according to claim 72, characterized that the controllable devices are designed as a valve-controlled compressed air system. ) 7 ^. Device according to claim 73, characterized in that the conductor (2 * 1) is in a tubular shape Channel (252a) is performed, and that the compressed air is fed to this channel so that it is directed towards the The end of the contacting tip (28) flows. 75. Apparatus according to claim 7 ¹ J, characterized in that the channel (252a) surrounds the end of a second tubular channel (250a) through which the conductor (2k) is fed and downwards over the end of this second channel ( 25Oa) protrudes. 76. Device according to one of claims 72 to 75> dad u_r ch ™ indicated that the supply roll (l82) for the conductor (2 * 0 is mounted on an air cushion. 77. Apparatus according to claim 76, characterized that the air cushion can be generated by means of compressed air, which from the inside of an axis (190) through opening (200) emerges into an annular space between the axis (190) and the supply roll (182), and that the openings (200) are arranged so that there is a tangential component of the outflowing air, so that on the supply roll a torque is applied in a first direction. - 57 - 109809/1322 78. Apparatus according to claim 77, characterized in that a further supply line (2o2) of the Compressed air system, a second air stream acts tangentially on the supply roll (182) in such a way that a torque in opposite direction results. ■ 79. Apparatus according to claim 77 and 78, d a du r c h g e denotes, that a monitoring device for the speed of the supply roll (182) is provided, which triggers a signal when a specified speed is exceeded, which indicates a broken wire. 80. Device according to one or more of the preceding claims 72 to 79, characterized g e k e η η ζ calibratable - ne, t that a clamping device (40) is provided, by means of which a workpiece (10) on which a contact (25 ) and a second connection (33) is to be established, can be brought into a working position, that a cross table (62) that can be displaced in an XY plane is provided, that an optical system (7 ^ 0 is provided, with the help of which the cross table ( 62) can be aligned with respect to the workpiece (10) in that a contacting device (80) is provided on the cross table (62) which contains the supply roll (182) and the guide for the conductor (24), the output end of which is designed as a hollow needle Forms contacting tip. ■ 81. Device according to claim 80, characterized in that the optical system (-7 * 0 is connected to the cross table (62) and is designed as an electro-optical system which generates X and Y error signals indicate in which direction along the X or Y coordinate the system must be shifted so that its optical axis is aligned in a predetermined manner with respect to the workpiece , and that servo devices are provided around the - 58 - 109809/1322 to bring eiektrooptische system (7 ¹ O, and thus the cross table (72) corresponding to, X and Y error signals in a superiors · added position with respect to the points at which a contact is to take place. 82. Apparatus according to claim 80 and 81, characterized »that the contacting device (80) consists of two parts, that one of these parts is movable in a plane which is essentially to the X-Y plane is parallel and that the other part is movable in a plane substantially perpendicular to the X-Y plane is that one of the parts is also connected to the cross table (62), and the other part to the first part, and that the contacting tip (28) is part of the part of the contacting device connected to the first part of the contacting device (80) is, 83. Apparatus according to claim 82, characterized in that the supply roll (182) is a component of the first part of the contacting device (80). 84. Apparatus according to claim 82 and 83, characterized in that the second part of the contacting device (80) contains a clamping device (222) for the conductor (21). 85. Device according to one or more of claims 80 to 8 * 1, characterized in that a device (26l) for generating a flame (3 ¹ O is seen before , and that devices are provided which the; first and second part move the contacting device (80) in such a way that a melt bead is formed at the end of the piece of wire (2Mc) protruding from the contacting tip (28). - 59 - 86. Device according to one or more of claims 80 to 85, characterized geke η η ζ eich ne t that the contacting tip (28) is attached to one end of an arm, the other end of which extends over an axis running parallel to the XY plane (I ¹ IO) is connected rotatably to a limited extent with the second part of the contacting device (80), where the downward rotary movement is limited by a stop (148). 87. Apparatus according to claim 86, characterized in that that an electromagnet (152) is provided, which in the excited state the arm (I't2) against the stop pulls. 88. Apparatus according to claim 82, characterized in that the drive devices for the two parts of the contacting device (8'O) each have an eccentric disk (96), (124) and an eccentric roller (106, 10 ¹ Ij 128) Have drive unit (92, 122) for the eccentric discs. . - 89. Apparatus according to claim 88, dad u r c h g e k e η η draws that at least one of the drive units (92, 122) is designed as a stepping motor. 90. Apparatus according to claim 72 to 89, d a d u r c h g e core sign that for the implementation of all Movement and switching processes electrically operated devices are provided. 91. Apparatus according to claim 90, d a d u r c h g e k e η η draws that for automatic control of the process of a complete work cycle, a clock (300) is provided, which at the beginning of each work cycle with '■■■■ ..- 60 - 109809/1322 a main counter (304) is connected to the decoder (306 to 318), which determine the reaching of predetermined counter readings of the main counter (3O ¹ I) and accordingly emit signals to the individual electrically operated devices. 92. Apparatus according to claim 91, characterized that it performs the following steps in each full work cycle: a) the table is in a predetermined position in relation to the Axis of the field of view brought b) the contacting tip is moved out of the field of view into a position in which the first contact is made target. c) The contact tip is lowered to fix the wire in the first position » d) the contacting tip is raised. e) the contacting tip is moved into the position in which the second contact is to be made. f) the contacting tip is lowered in order to establish the second connection j g) the contacting tip is raised a short distance, then the wire is clamped while the contacting tip is moved further up h) the Kontaktiersptze is returned to its starting position outside of the field of view, where it is at a Flame is moved past so that a new ball forms on the wire, and i) after a new ball is formed at the end of the wire, the previously clamped wire is released. - 61 - 109809/1322 - vA 93. Device according to claim 89 to 92 ,. characterized in that the stepper motor (e.g. 122) is switched on in synchronism with the pulses from a pulse source (396). 94. Apparatus according to claim 93, characterized in that the stepping motor (122) has a logic Circuit (392) is assigned, which lets through the pulses from the pulse source (396) when it is supplied with a start signal and which the pulses from the pulse source (396) locks when it receives a stop signal. 95 · Device according to claim 9 ¹ J, characterized in that the start signals are generated by one of the detectors (315) connected to the counter, and that the stop signals are generated by a device (Fig. 16) which works with the eccentric disk (12 ^ 4) is in connection. · 96. The device according to claim 95, characterized in that the device for generating the stop signals consists of a light source (430), a light-sensitive detector (436) and an intermediate disc (138) which rotates with the eccentric disc (12 * 0 and at least has an opening (432) which is arranged so that the light from the light source (430) then reaches the light-sensitive detector (436) when the eccentric disc (124) is in a position in which she is to be stopped . 97. Apparatus according to claim 94 to 96, since you rchg e - Kenn-z eich net that a second device for generating a start signal and a second device for generating a stop signal is provided, which is used to the stepping motor (122) its normal operation during a work cycle in any case before the start of the - 62 109809/1322 to bring the next work cycle into a predetermined starting position. 98. Apparatus according to claim 97, characterized in that the second device for generating a start signal is a second detector (316) connected to the counter, and that the second device for generating of a stop signal through another opening (^ 3 * 0 in the disc (I38) and another light-sensitive detector (^ 38) is formed, the radial distance the further opening (43 * 1) from the center of the disc (I38) different from the radial distance of the first opening (s) (1J32) is. 109809/1322