DE1956093U - PIEZOELECTRIC PRESSURE SENSOR. - Google Patents

Description

PÄ.023 580 * 13.1.67

Bette * instruments € 2

Stuttgart, January 12, 1967

P 782 S / lo

Pi esoelektrisclies. "Syuekwaxiciler

The Efffinänag concerns a piegoelelrcriselien converter with an oils K ^ IstaIIaaorflaiing eatlialteadea and imter Yorspaimimg pressing against an abutment pot-shapedeii EoMrfederg, which rides the # icJ $ 3? camp

Is $ particular welded Dessi mimittel'bar as VFI serving housing ₉ with a Q

the one, the HohrSeder.unter

Raumes: at a distance '- surrounding approach has _g nnä with a the "Swis-chenraum- closing _r connected to the bottom of the Bourdon tube and the -end of the housing © ansätses.

Membrano

It is known _r oils membrane. as well as on the bottom of the cabbage ⁵ · * »feder" as auoli on the Enäe öea & eHäuaeaiisats®s with the help of τοπ screws .o.öer attach mx »" by attaching the. Membrane awiiBClien the screw elements "imd: üem Eoiirf.eder *» boden · bsw, ₀ the end of the ffeliäuseanaatsee are pinched in order to achieve a good seal _p . Between the membrane edges and oils are very dusty element @ Kupferringe ® ± n . ~> ₀ It is set off ■ exisichtli.Qh-j, öarartige attachment of membranes ■ daß.elae only --daim möglicii _9; when the drilling «= · spring elxiext; - significant Duralimesaere UnO ¹ IJJr ground one: - \ beschliefee; Dißfee; has _a Äiteh; the ^ SeMamse has to correspond-ä'-large dimensions-n - "ha" b ^

this well-known way :: no pressure transducers with-feleiüen "Ab ^ me-gBui ^ Ä ^ h ^^ siieAl-e ^ v ^ Here-n 'lies -a- considerable. Deficiency ^ derni -many' measurement values _r in particular Investigations are simple; therefore they are not possible because not enough small DTuak are available;

large dimensions of the ". knownexi pressure transducer and the."'relative - large mass of the strong bottom of the "Bourdon tube a © relatively, low Elgenfrequens the pressure transducer sur Solge ₅ die. restricts »

Another known Druclasrandler is the membrane ύοώ. a thin "» flange at the bottom of the tube spring gebildets its outer edge in the end © of the housing ansatses is rolled "Such a design of the diaphragm requires ₅ that the tubular sleeve with a pressed-in abutment of the open End® of Gehäusean" sataes forth in the Housing built-in wireL In the known G-boom, the end of the Bourdon tube is closed with the abutment with a - cone Tsrsehen ₆ which is pressed into a mating cone of the converter housing! the influence of the following considerable and rapid successive printing ",, fluctuations exerted on the bottom of the tube spring lookejrt ₉ of the cone and the tubular spring enteric practically .only nor DER membrane getrali; ._ s, _wirf] o Apart from the fact that in ₀ this .'J? all the-Bourdon tube in "äer _... La.ge would be? to vibrate in its entirety ₈ so that the pressures are no longer properly transferred to the crystal _{arrangement housed in the Bourdon tube 8 there} is then also the risk ρ that the thin membrane will tear or break apart

O / O

Your edge of that. (Jehäuss. Dissolves ₉ of? Transmitter sex ale ©? = Disturbs is ο ■ .-. Finally, even one -söieher '' structure is the encoder does not dasu geeigiaets Meßwand'ler very low _{Dimensionenh.ersiistellei3.?} Because. Einwal sea-of Mem = "branrandes also a örkeblieilen Miadestdurciimesserdes Gehauseansatses conditional a special ^one Haelrteil the · belcaiintea Membraaaaordauagen shall look in the fact - that there is no this Anordnungen- allows _the% _ Rohrfedes ^one with her, offeaen end ■ directly with - d @ m housing serving as an abutment SU; Yersahweißea uad 'the Bstefeder duypk the welding process itself \ iater "Yprspanamag su setsen, as it is. with a converter proposed elsewhere:"-.;: _ "

-The invention: is a task aiigruad © _s, © lefetrischen Druekwandler% u -schaffen, "in which: dia membrane solcher.Weise aageoidnet '.is, - that- © ine absolutely Dicht®. Ve ^ biadujag-awiachen d @ x- Mambraa «nd the reed spring bottom on the one hand ^; mi <i. ■ deE'Membraa «on the housing side. is produced and the © in © extraordinary dus5ation ^; However, due to the dimensions of the transducer, this MeiobraaanosidnuBg should - also be applicable to transducers

This object is, sewing the 'invention by ■ gelÖsfe ".. that the membrane, with both -.. @ Ä ä @ -BodeB m s> DrwxkMlls © as auefo ra _r ± t .dicht the end of the Gehäuseansatses is electrically welded .. -and that - the Iristallanordmiag in an sieih,. "known- Weis®;";: a s @ nföral © st free seam has "lind an these; : fseiθβ RauBi sieii inaerlialb. d @ s ^; .Wasidlergeliäuses -. "Approximately coaxially a © öffnmg mid @ is © ^; ..Botouag · ams-closingeiie so that the transducer extends from one -sieh-from the bottom of the Bourdon tube to the opposite end of the: transducer housing - extending" cavity " is _$ "the" the "introduction of a brass between the bottom of the Bourdon tube reaching" Schwelßelek «trod © sam Yers'chwölßen of the""bottom;; the Hohrfeder with the membrane" .-

It is ersicixtXichs that the erfincliingsgemäß © training of Druekwsuidlers the lögliehkeit ■ provides ₈ Retofe & eE. sunäehst "with. the transducer housing © under the torspanaen of the ICrystall'anordäung, in particular by welding, whereby also." still the introduction of a welding electrode ", into the space" wiping the. Rohrfedes ¹ and .des - ". the Bohr = spring; surrounding housing seastsatss is possible ο only daaacii is then the ---- membrane'a connected to the B ^: Qdea - d @ i * _ E @ lirfeder by the Wanöler ^: dürolidringend® sweat® ! © tetrode BMf: die. LEsenfläslie ^: .des .Eofeiederbodssss; anfges © tst ^; wirdj waliresd ¥ öa "ei: a @ r G-ageaelelst ^ ode '. the ffiembx'ka -sii-'die ';"outside

This floor is pressed against this floor and then welded to the floor by introducing a visual white current impulse.U Ia similar · -Wise- the -Yersehweslßen Äes outer band, the membrane with the front face-of the Sehäuseaneanaes "with electrodes 'a- -suitable. Shoulder of the case "" and on - the. .Eändparti.ö. "D @ ^ - membrane to be put on", To a Tbes ^: öncL @ .3? S _: good and tight '"vision to © p.ai®-len _? ^: . ■■ & önnexk: the Söhweißungen Toi? Teilliaft as sungen- executed. willi «. ■ .-: -. .

It should be © rwälaat ₈ that duich-the ei'fiadrnigsgemäße bildi'iag the transducer -'- avoided: _s is that even as - ■ ■■ ".- ■ .- ^■; ■■." -.. ■ '"-. -

CS * ^ C = S

Passage for the SßhwelBström this mtii or the bridge; istj, Jäit dem. ai © membrane. "during welding to d Bo en en ä the Drue ITML s eye Press β t * billion _o

The invention and others with ^: tlir süsaimenlllängende characteristics- & Ü. && naohstefeeiiä aii. Haiiö. the one shown in the «» · iTOng. Au siiiiarmiggfc el game explained in more detail. Egi seigens "'- _.: · ■ - .;., \ -..-

Take a piss- you can finish building one. pieso.el ^ eMrisch.en _; . '. IvieSwan ^^

2 ■ - ■ ai-aeri Qiiersolmitt naali of line 2 »2 la Pig«

3 im S'elmitt eiiies ama AnacJaweißea of i & aibraae

on the ground dö ^ BruckMlse το ^ prepared - with

Pig, 4. Das VersöhweiÄea i.e ^ Eandpartle of the membrane with the Waödlergeliätt'se 'bGiöem' .in

5 The Hanäpartle Sin ^ -feirblg viewed in detail

Pig «. 6 an alternate version of a /faracile.rs with .-; ■■ two-part * .. IJeiiiäiiseV ■. _:

The in! Ig. " The converter shown is made of steel. heart made . and with one. Clamped, flange. 2 provided GeMuse 1 *. When the. Dealer .will- des · Plan.ck 2 with the help of öes-Mipp @ l® 3 aÄ aie seal .4. pressed the on a shoulder-like bit? Waaö 3 rests β- dies © arrangement. results © inen, be brief _ v! eg der Eiras.pannkräiieι In particular, it is located "-is indicated by -arrows"'6'; Veg "outside the -from- transfer"? ·. Eeile _B was die-G-enauig «*. ■ . Keif des tfancllerslgaaies goose. Weseiitlioli increased _o

That. Cs-eMitse T has a lower part? _P. Whose..interior wall 8 in a precisely bcaröeitete.g. perpendicular to the longitudinal surface 9 passes over "The upper part: 10 of the housing 1 sits a hole It ₉ welsÄe with. outside of egg viand 8 ■ .enclosed-ss.eiien-interior; & ®s ßhousing lower part; through the opening 12 -

ausaiaraenhangs-e. :. . ..- ■ '"■■: .V - ■

Of the; G-eliäuseuatertoil 7 ditett- ^ g ^ iUafnaiiiiie der trlBiilieÄ-Krisiallbatigruptf · This .uffliaBl -e'a very -thin-walled "D ^ uöle-sleeve 1.3s.-oils. © in® vfaad'stark .. ψοη πατ v / enigea -.J4i "l-liffiete2» ii.; Ajif w © i & t '.- and "ssiiöasamen with the" --als .-

The bottom 14 of the pressure plunger ends with a chamber for receiving the crystal anorssamig. At its open end, the pressure sleeve is provided with a welding flange 15, of which one is perpendicular to the sleeve of the pressure sleeve having two -and-. ter- · sehweißen the Druokhülse 15 wit the surface 9 cies V / and · · = 1 e 3? £ ehäus it oil ent ₀

The Lrlstallsats located inside the print case consists of three single crystals 1? made of quartz ₅ which, as shown in FIG. 2, have a substantially circular segment-shaped cross-section. The transverse Pieso effect uses _P where the positive electrical charges are generated with the aid of a contact spring formed as a wire spiral from the one provided with a vapor-deposited metal coating. flat Kristalloberfläohen w removed © RDCN ₀ The nut · * tive charges v / ground directly through the Draokhulse 12 led to the housing 1. The positive charges Get over the center conductor of the contact spring 18 in the like? Socket 19 serving for a plug (not shown) “This socket is located in a ceramic insulator 2O ₉ which is inserted into the housing part and with its IHM cut into metal frames 21 or 22 is soldered in. The upper metal frame 21 is as Welding «flange is formed and is used when assembling the» Vandler

ο / ο

in the last operation Torsrugsweis © _vm $ et Talcipm-ο α ei? -la. MelgasatfflospMrs dm * eii - a ring hump «· * schwelßun ^ - 23 with the -housing part 10 completely welded tight * ■ -'.-

For -Ausgleiöh öey TerscM'eäenen. Ausöeijaungskoef fi and in particular ζίμι "Schuta Ä ^ r / K-Äatall® Gege", tlt moderate loads with i © raperatp.rspitsea slaä oil crystals I ^s

: t lce ^ ajTiisQ & ea Hingen "24 unö 25 arranges> ä-ie ii such Msöeiisrangskoeffisienteii iiafeeaj, öass sieli oils

a Itisäetoirnngskoeffisieiiteä äes crystals 17 _P äez * keriiJHi ropes Hiage 24 'ad 25 -and the ?; Dxtiok sleeve 13 from-Am Baderö "14" ass? Br-uok sleeve is "a © sur- -Ci" or-

dixxEch 3? f olle S6; ^ re ^ aßsohauliöhteii: -Heßdruckes dieasno.e, viombr-ane 27 aage eel know The hand par tie fier fiemlir-ane is with öeai Gehänset-sil? ^ / ersotuveißt üäö has Bwiaohen Boaen 14- vn $. Grehäuse'iscil 7 a liiziljuoiitvins directed against äa $ Xjmere äss VfeiKilers auiO The Sohv? © IBimgen are designated as Riagbuekelsehy / eiSiÄiigen

Does it ride Waiiulei'gehäase ^ i ^ K ^ already ei ^ GesGhwGißte ;: ¹ Eris'iiallkaiiMer, .The GehauGä v / sis ^ eisö ^ -am lower part? Vorhaaffcnöii flange. 31 oxo: “Oe ^ only apate ?? boiiü Abcrah according to de? / stviciipm-ktitirtö ^ L: Ud ^ ^ k κι- ^ ί '^ Γ ^ πΐ \ νλ? χ \ ·,' xm. tJiit'srs ^ Ghico: ίίΐΐί: /i/.-.or-CsriS.g ^ a ^ -Ii rl ·:, · ?. . ^7? ii _; Ί i-iicl 2 Güth ^: -ii .;

that formed from the iruckhül & e-13 "ait ^ the ground Ή. 'KristallfcaHSiier einer ?: -m? ei part ₉ Ixohlay3.inörischea Quartiertstall 53 ■ · * The Biiifaciilielt" barber are also the in Fig ο 1 seen & thin.efeäärrings not "iGrhaad s _f beispi the ice "example, be dropped graining"; when the transducer to Anwön ~ duiig l3ei approximately; gleiohialelbeaäeii I'emperaturön is bestlimat _e - - ■ ". . - - .. v ■ - ■ '- ■ "': '_ / _'-'_

Examples S-eteeißflanscli ^15: -the DrmeMaülss is Zuvo: c by means of a swlsehen in the Hinspalt WaM 8 xmä DruGklxülse introduced stempelarfige ". Welding electrode with the Pläülie S versöliweiL-ß-t "here was a counter" = electrode-Tienlltst, oils ■ aieh " ^: on the Eiasp-annflansoh 1 of the ■■ converter alJBtutaea koiintö» The desired pressure voltage of the crystal arrangement was achieved _e Ansehweiien that the Planöehes 15 a © axial Druofch'lilse- the sJätlQ wazp Dehn IMEM-ung oils upper edge of the crystal in ungespann-tem state of the printing sleeve ¹ taller than the top of the Flansches- 15 "

At the., Sen tr al en.frei en laraeitrauiii derlCrist-allanorda-ang they close within 'd'es V / anölergehäuses 1 approximately coaxially an opening: 12. utia. ®tmr% o ^ wag ti aa _& .ä Mscheeiße »-der i. £ 7 as; äeii- als' ijr ^ ckpten ^ el-s siu? liraf tuöert

10

serving soil. 14 des? BruQkhülse will now axially 'stabförnilge a welding electrode 34 in / from the opening and der'Bohrung - free space formed and ä®n central interior space of: Kristallanordmuag "big introduced on the trays 14', the membrane _9, the 2T" from a thin round Metallplättehengebildet "is ₉ is implemented using the G-egenelektro-de 35 against AEEN in. the underside of the bottom" located annular welding projection. 36 held ι öann. bottom 14 and membrane 35 are dureh pressing the "pushed against each other and two electrodes' by turning on the Sc-hweißstromimpulses welded together _o ■

This will die.'vtleinbrane 27 according to fig _o · 5 -verfo "rmt _e © Di mutually facing edges of the housing part 7 and of the floor. 14 aer-DruoMmlse are obliquely at an angle abge sC <=>""This angle is between iiblieherweise JO ⁰ and βθ ⁰ _β The two Purohmesser d and 3>"the circle on" which "the edges swl should be the bevels and d.gix face = surfaces of the bottom 14 and dee ß-ehäusetelles 7 are ^ he ^ agree that Dicu-ökübertragungsverhalt ^ n the Membran.-2? and stisaiBmen with dsm mittlören Piesomodul άβτ crystal array <UEI @ sensitivity AEEA converter "These diameters will therefore have most carefully adhered to," laughs the Verschweißen- the membrane with the bottom of Drtiekiiülse is the "membrane - 2? with "the. underside of the housing part 7

11th

-t ₅ . Ei @ r with: stranding a Sehweißteolcel 37 is «Eu this purpose; ; wirö -die, membrane: 2? ·. with the help of sight? /% ii3 @ ieK: trodea3B. tmä; 39 against the 8-housing ge "=" presses *, -üöie electrode 39-'stutat it-on the help " flange; 31 -ab «." When the visual white current impulses- "there is a tight welding of the membrane and the housing. Converter, the insulator 20 with "the contact spring 18" is used with the cap 21 according to Pig »1 with the" housing part-iü \ v.erse! XweIBto

The transducer obtained in this way is externally sealed hermetically against the iäe'ßdruökraim- imd against the IFmgebmig _o The transducer is characterized by an extraordinary operational safety and can also mate ?? Used in high vacuum or in radioactive media; in particular, it beaitst "no elastic seals of plastics © d ₀ d _o glc _9, the aging or under strah

change disadvantageously _e

Instead of a jai't ~ -dejß_Gbshäuse 1 under pretensioning before “welded pressure sleeve can also be used in a different form of guiding” such as, for example, I? Ie "S veransehaulichtfl Here the housing is formed from each other ve3 screwed parts 41 and 42 The housing part 42 grips underneath with its ring-shaped extension 45 or ring 44

of a * Pi'usk & ülse 45® -The "'ratios are so sin« = directed »that with the Binseliraufeeii de® housing part & ls 42 on the ß-winding part 46 <3i @ J) ri ^ elcJiü3-s © germinates so far», to. the top of the 3rd binge 44 -. on the ^5th surface

violated.; . :

"" 6 / f erney. eiae anflere lusfährrnigaform der

arrangement *, it -.are _: two finger-shaped crystals 48 and Yorliaiiii _r vielcJae a central free Batmauroli the when welding the? .- membrane 30 to the pressure stamp -. "51 elne.llektroäe 52 introduced v / era Jcann other electrode 55 is applied _{- 'according to Fig. 6} - 4 tone below to the membrane 50' - »The further assembly is carried out according to the previously treated example

The invention - "is not limited to the described embodiment = Example®". Thus, other piea © "electrical crystals"? Es? Iend.en _9, for example those made from barium titanate _e swisehen .. 'a plastic stamp - and a housing surface - clamped in. 3

Claims (1)

RA. O 23 5 80 * 111.6? I) Piezoelectric pressure transducer with a die crystal arrangement containing un & sub. "Pre-tension against © ± a ■ abutment oppressive, töpffösaigea reed spring- ^. ..the- with the ■ abutment; verbtxadenj ias special with d © m lan · = - indirectly as an abutment; .Serving housing. accidentally »is _? with .a housing the one the Hohrfedsr formation of a ZwieelienraiMes with distance -.- Ansata. has _s imd with ..eiae-r d @ a. In between- » ■ s @ h lastend © n ₅ with / bathing the. Tube spring and the end® & © s -6e "house © 'ansat ^: ses - connected. Membrane, characterized ■ that the membrane, C2?) - both (3. Ί) with the bottom of the Bourdon tube as ■;! (?) with the end of Atieh GehHuseansatses dieht electrically verschweißt.- is .and the Kristallanordauag in ^at-'1 bekanatei manner .aufweist a central free space. to this free! Eaiia see an opening (12) and a © BohroHg ^^ i) within the transducer housing (.1), - so that the transducer of '.- "a-" is from deBf ^ ground. (14) - the ■ pipe- = spring-up., Ouch. ". opposite end © of the Waadlerge = » _; domestic. extending- cavity -.d-mrehsets. is ₉ . des * .- the introductory ii. -einer "to sto" floors, the "cane spring r @ ieiiead © a. Bourdon tube with the membrane permitted _o Pressure transducer; Shah -Ansprach Λ "_ in that the Seliweißtogen"as; excluded Hiäg "biieIeelseliweißuiig @ n: / MläeH: are" ^{,:: ■:::} - ■ '. \} /: ^<:: ; - ^;