DE1419207A1 - Method and apparatus for the production of single-crystal bodies from a material, e.g. a semiconductor such as germanium or silicon - Google Patents

Description

Dr. P. Rossbach / _{y / t} / - " + / ^

Patent attorney ψ , '' ^ / ^

Applicant *. Έ. V. Philips' Gloeilampenfabrieken - _{/ 1} _ _ΟΛ _ File fcto. El / P-3728 1419207

Registration from 11/22/1957

il. V. Philips' GIoeilampenfabrieken, Eindhovea / Flolland

«Process and device for the production of single crystal Bodies from a ötüff, a.B · a Semiconductors »such as germanium or silicon * ·

The invention relates to a method and a device for the production of monocrystalline. Body made of a fabric, z »li. a semiconductor, such as Grermaniuta or ^ iliaiua, whereby by .äraiezux'uhr from the outside and / or by excitation in the matter by means of a twine electrical high frequency field, a uC; This substance is formed from which a single crystal can grow in the shape of a circular-cylindrical ötabe3 by solidification in a certain thickness. ^{The monocrystalline u:} ibe produced in this way are used in many cases, in particular. βηΆ it is about semiconducting üxabe, divided into smaller bodies, and so used in semiconducting Vorrioktun s like κ.B. Transistors or crystal diodes. Irfindung also refers to a crystalline at ibe, or monocrystalline obtained from it. carrots that are produced using the process of unfinished vegetables

üL / P-8728
i / 9

909813/133 / ^.

For the production of single-crystal, semiconducting rooms, several methods are known, namely the pulling up of a single crystal from an oil in an oil crucible, further Sas Zonensehmelzverfähre, in which in an elongated oil, which contains a single crystal in a bath and is otherwise filled with polycrystalline material, a thin molten zone is moved in the longitudinal direction of the little needle by the single crystal and finally the crucible-free zone pattern is broken, in which a narrow molten zone is moved in the direction of the single crystal in a vertically freely arranged table Starting from each side of the rod, they ... single-crystal gauges produced using this known process have a relatively high content of references , crystal defects, and so-called jitter offsets, which are also distributed unevenly on the average surface of the gauze are, huge faults urfl V replacements adversely - ic .ti s the physikalisc s properties of the single crystal, for example, its conductivity and its ge gleicUmäss-on distribution at the Quurschnittsfläche can be disruptive in. A word processor of the Einkri-stä! les, ζ 3. in diff.i.usion or in alloying.

It is well known that after crystallization, the deposits arise essentially in the form of thermal stresses in the freshness, which is still at a high temperature. aiagevsachseneii monocrystalline ü.ab. Furthermore, it is known that thermal stresses in the circular-cylindrical a tab are not to be ascribed to the radial heat dissipation & that they can be avoided by maintaining a constant temperature gradient in the ο ι from lün; s on its axis.

909813/1334 " ^{3 <} "

BATH ORIGINAL

U19207 - χ -

There have already been proposals for the 2oaensc ;, ine lav experience This increases the radial heat dissipation. avoid" da3 the grown-up egg, monocrystalline ütab for geese kept at a temperature which is only slightly is below the melting temperature of the tab, and After the increase has finished, go slowly down the whole S and cool down evenly · With the device mentioned, this' ·: emy era. dee grown staff high temperature j & ittels a high frequency coil, the an elongated gra? laitzylinder heats that And consists of two parts, i.e. from a part with a small step that the melted Zone causes and av.s a subsequent part with grösaereifi very it, the graphite cylinder in places so highly heated that this grown, monocrystalline ötab to the gauze at a fairly constant temperature kept a little below its temperature "Ird.

Apart from the rural nature of this process, the other one is liable to him: Jacl. Part ai. That it eriit.rgradienteii iniolge of the low tea eriit.rgradienteii on the solidification surface, which requires a slow growth, is very time-consuming, and that ecus earth * a shift of the difficulty to a s rlterea '.'h ^ se means, that is, the phase in which the oil rennet, which is still on the ice, is slowly and gently cooled down to the Q-inze Reasons can only be used in the case of the Zonenschiael2 procedure, a procedure which, due to the asymmetry of the required repair of three different procedures, is at least used; of s admission-free and versed; un sireieo. monocrystalline bt ibe. ^ eei / net is ·

909P13 / 1334

lrfindaag «leads to« la? «* f« Jar «a ab» »* 1 d« · Al « graadsätslleh let, without dal dl «o» narrow • «alld« rt «a covering appearea,« η «indeed dadarc *, del In d «Bj« alg «a. Ttil 41 ·· ready »anr« * a «h« ea «a timkrietmllla« a atabea »wo thex« l * eli «Spaaeacftn T» rÄ «r £ uog» n oad 7 · γ- ■ • tt ^ ngen * uftr «T ·» ki5nat «a,« la coaetanter temperature graditat aafr · ohterhalt «becomes» dtr the A «f-fcr« t «n taerllto.ir ijp * aa» ng «n T« rbtit «t and de tun« eh dl · Urea ok · der r «rY.« rfaag «a uad 7 # re» tattai «i b ta ei tigt ·

Β · 1 AHPtadoag d «e procedure · neoa der Irfindua« «lsi »• la Suwaeaevorgang der durea Aoeatraalang aa d« r Obtrfläeh · aeurtr * »tend · Würa« v * rltt «t d ·· jeni | i # a Teilee 4« » t »tr« it · ang «waeIui« Mil * inJcri * tallin »a iitab ·«, d «r« la «

hat, w «l« ae 41 · lrc.etobuag * t «« peratar d · «ti» * r «t« igt _# diureJa Älnetraaluni ro η Wärme · aaeg · - gllekfu, 41 · voss tinea äaeeeren rl ^ geaa dl · Stabmoh ·· * y * m + - trleeaen Srmeetna lan ^ «Jcii» per etaaat, 4 ···· μ a »o» etrl · «at letöpermtBnpr« rt «U * ag # * xart chosen» lad »dai τ · β each · bellebigea Oeerfläeaeaeleeent de »geaaaatea parts · dl · riU» · utig «gllehea« Ixt «dl · b« l «la ·» köaetaatea T * aper «.ta» iKr »4leatea la dl« · «« part au » downed “Irish. With the Irwelekaageteeperatur eiaee fabric ·· is dl «nledrig- * st« Temperfttarat, with the Im dl · · «* fabric lttf« 3g ·

taereieefaer spaasang · «aoeh Terwerfuogea litrbeigef üart is« a · Bie Irweicaangeteaperatar d «s tozaa & loas» mi dee Silialaaa »« carries α «. 40O ⁰ C bcw * COO ⁰ C. 91 «Arfiadai ^ suitable eleii in« »··» ader «« ar AJwe & done at d «m« w «i gotaaat« a T «rf« Ja2 <sa · ··! Umm «la ·« ar Terueadomf

B «r Srfia4uaj! lies dl «Irkeaataia sttgra & ä«, dai la a « • ol «a« s. Kreie-ayliadrlecAaa St «·« la kanataater

909813/1334 _BAD

«Redacts on reöhterli * lt * a» erden team * 'ä * Ä di ·% ei these »temperature gradients aa 6« *' 0lMv £ Utfb * etattiindtnden Au «» t raixlung completely so co * pttt * l # rt wi * # _# d * S # · * • troe through a! »eltoblgSK Ofeevfl ^ lteirltil lull you!» enittst further the isrktmvtni * f fl «0 iron finite part of the rough · α · ιΐ ^: 'ί" .-: - _Λ Staiiea »aäElich Is feil» is de »ttjjperatur tibereteigeade ^ aiiBperatw ^ li ^^^ g ^ lit ί-:; i volletätiÄiger Auagleiöii * .- i, - simply? ner heat radiation source, 2nd B. from one sing, with a suitably chosen geometry and temperature distribution "^: staamt.

The Aasdruok "complete equivalency ^w is to be interpreted in a broad" practical sense. Am taeoretiecia full at change. Of course, it is never attainable in the iraxie »but he leaves BiQh. very far annänern _f as is the case in üexi i "next to be described special Att3führttngöformen the muddled naoii the invention.

In a particularly suitable application of the method according to the invention: a v.ärmeatrdilttaüskkörpers is used, which is made of a " zxm rod coaxial hinge bordering on the Bretarrungeiläoae, & * τ alte about 3 ielraua ca the 3tab ^ fits aad & ·· · «& ■ ^ t; endureItiaeeser ainäestene de» - 'Waifache dieaee' is »while the side of the Sing« a flaoli facing the ready snge «fa« l! <8 «i & em crystalline iitab. is »and has a constant or essentially constant temperature which is the minimum temperature of the rod

- 6 -1334

is equivalent to. V, eeentlioh Ut Tor all ««, eg the radiation jumps so dia t wl · «β practieeh without touch * öfliok 1st, to ά · η stick approaches» because it is just near lltgwide * Τ · 11 · ft ·· Hinge * «Air, which contribute to a considerable amount of ac« compensation · Theoretical wäpusg® »iiafeen fern« r results that «la pracleoh balance at eiaea btatiaet« teaperaturgarmditat · » tm duroh di · W« iu «in« e

In ^ 9 ^ Praxis' Λ «ydta yoriüglich · Srg * bai» e · erfealteu »« • zm älest ratio · awisoliea 2 and % lies »» it aar their words »v; eua the outer endurcbjaesuer of the Strahlongtringea twice here three lache des oiabduroiiaeaserB, whereby it should also be noted that the width, ä # b * half the extent between Aassendarcheeeeer and Inneaduroheesaer "is chosen larger in the Maas"

the feraperaxure gradient is smaller «la kaan under be advantageous »instead of the abaessuagen.

Depending on the temperature gradient aasupassea, by cooling the rod part, which is already at a temperature lower than the softening temperature, the! 'Empermurgradieatea the abaesaung & * a ring aa- «ttpaasea, si eclcmäesig by cooling at a fixed distance from the radiation ring, so that a "constant temperature gradient forced by cooling is always maintained *

Bl * effect naea the iSrf charge is also achievable through Use of a medical long body made of a « sua ötab coaxial ätraia "Ägering" consists, deaeen inner side at least au "part, which the Äretarrongafläehe and an adjoining, open, single-crystal 3-compartment, the tetaperature exceeds the annual softening temperature, among other things.

13/1334 - 7 -

BAD ORiQiNAL

-ν

tang τ · γjungt, dia der Zttwacheriehtim _o - daa St * $ ea * ntaprioht «&« tin · 1 «we« »at borrowed« konetaate J: * »ptrat» r «In · daatana equal to Saliael ** eaperat * r des Stafcaa has. la ie'v not required, tödiaaar konlaelie St2: & lens aring d * a rod eng «ueachliaerU« aa txin «#e« a! sei «fcereit · e« eohll4 »rt * n flaoliea Blnf satrifft. Dl · Kaigoag d * e koniecfe «a TeilÄa, ie the ^ ok« l _t dan al «^ st% s®M @ dl · ·« k «ttieoh« n part «» alt 'dar Aohee «aa Stai» »

Torteilhaft gruaaar ala 30 °, * v, t3lcaäeaig

40 ° w * 50 °, chosen.

5er radiation ring iat eweeücaäeeig _a oa ieitasiS ^ i liat "rial old" in · «a possible high stwhlong" coefficient "ak" rg · - divided. 7 «ra« ga «alaa becomes an au · arapidi; b «Bt« fe «a« er Strahltiaeariag τ en »ends *

Basics and the fascination with it • erdea an HaaÄ some in the äer aaheaati «© h«? I dargaatalltar Auef üixrttngebeiepiel · aäk «r

Di · Vlguraa 1 »nd 4 alst achamatlaelia Aabllimsis ^ m Is Cut OTaiar Torrichtuugen naoh drove data free of defects a

Di · Hguraii 2, 3 »5 and 6 ropes la Sehnitt alalga Auebildtuaien a device aaoh the invention» aaa on «la · cut a · single-crystal dtab ··.

71g. 7 iat a graphiache Saratallang äee Yerlaaf ·· that AetEgrubendichte ala funlttioa de »Aoatandaa by & mr Aofcaa for ainan staff, the alttala a Tarxicht« ng oaeh Hg * t has been made, and for «ines. 3ta ", dar a" f baknis "is · produced without the use of elnea Straalungarlngea.

909813/1334

? i «. t «« Igt; «« Keaatieefc «in · Torriehtang near the BsfUr dttjag eur use b« i * crucible free «» Zoaenaekeelarerfaarea. Sin ß.B. «Tie silisiua produced elongated« r rod t is perpendicular for ·! arranged trad ortlioä from a flrap bit- »marriage 2 uneven, dereji A & es * adttrehme« * er de. «» · £ <· * © who carries »reif ach · de · atabäarekaeeaers tea. The araphitriog 2 is heated by means of "an" electrical "Boaiif requenmfelde *, since" τοα des- Hoehfreque "aipale 3 9xm $ mgt vira * Iafe ^ e of the heat transmission το" the inside of the · oraphitinke · 2 la ütab «ine thin "E Jiwlaeae Zoae 4 geeilden" ad erbaltea, the * .B. darok »eakreoiit · Wm * & Bk & de» g ·· 2 ttad der Hoohfreqmeaiepal · 5 la x & i & gerielftttsg 4 · «Stab ··

is · Di · Siek · 4 ·· Üngee 2 is dor # h dl «Senf · eeetimitf di« ■ «■ S« ba «ls« m der Zoae iet · »re-phitring 2 pa3t with et ** · öpielrae« «Ad * a at ** I aero ·« ad indeed i «r« rt _f AaJ neither di «se, mela · oooa Ame St *» ▼ e · Rittg berülirt a * Weaa ana roa «te« «eiakrietalliaen Xade _v « · Β · Α «« upper part de «ätase ·, auegehead, A« r

2 »bwäjrt» eeveft will »wäcaet der

a «stick in dieeer Bieh« a ^ * a, «aA laxel« · the warmth tralilcuif the flat «but d # r «lives tB« iaaerhalb a ·· Abetaode «ijleieu de« 2hurebMe ** «rd * · 3t * b #» is located above the Iretarroageflilöhe, kaaa the, with eiaea konstaatea Te «pesÄturgr * 4ieutea in this * rope» Telletäa ig * u «f« (liekea «erd« & · feil der llng 2 eiiiea reohteoicigea Quireoaaitt bat »kanu da · Aizwaehaea attoh ia eatf eg« a- »geeetater Mcbtußg eevrirfct will», wob «! Di · flaofa · üater» • Page 6 de * tinges dl «ko« pen * iereode funktioa

Calculations are required !, d «d a gray! ·· * rellkoeeen more ideal

• rreieabÄr i »t teei rmmAm * a ·· Strahlangad« r ·! * «Ei · an da« stick eretreokt «bA ei» «»

909813/1334

BATH

-M-

Straalttn «skQeifi * i» ntei £ bat * and be «iner Seapeimtax the same ^ ΛίΤ ^ ·« fciW * ir # »whereT ₁₁₁ di · Scliaelstemperature d ·» represents Stafcea in Gr * 4 Κβίτΐη, for an iitrablunfiring «us Srapait, the «Inen Str * t lnageko # ffislentea from oa 1 bat» means the »deahall) ata ·

if the id "alen U" etandβ ia do not occur in practice, a * approximately a higher temperature is set in the praxle sweekaässlg noela, näsaliQk between 1.2 and 1.5 x I _aa · in general a kaim aageaoaeen wexdem "d * 3 the radiation ringing if it is heated to a "9 liohea Ie" y # temperature "d" 0 see under dea sinfla · e «iaer waxes · - atrahlUÄ; the so.

The Yorriohtaag after the Brfind- :, eoheeatieeh im? I «.2 shown, see see on * an egg crystalline rod «IJer * .B. Also crucibles ordering graphite 10 contains nine (Jeraanittmeohaelse 11 and becomes Kittel · egg »» from the Hooufrequettsepttle 3 eraeagtea elektrisehe »Boom« » Frequeusfeldes received the opening of the oraphite ring 2, "which occurs on the oohmelse 11" except for et »as 3 ielraaa de» Inner Durohmeeser des Binge ·

9098.13 / 1334 * 10-

BATH ORIGINAL

corresponds to * The upper side of the hanging »functions as a radiation compensating wall» The at compartment located inside the Grapaitrinje »2 is the essential nooh la molten state. If the thickness of the radiation plate is chosen to be smaller than 5 aas, if the wall made of uraphite shields the electrical high-frequency field to a high degree from the radiation, the radiation ring is essentially indirect, namely from the Schtael * ·, warms »The beam is not so low« in · a temperature which corresponds to the tea temperature AmT Schmalse or is only slightly higher. As a result, no ideal compensation was achieved, despite the fact that there was already a substantial terbing in accordance with the known processes, without a special radiation ring. This balance has but look read in practice to be inadequate ei ^ v due to the low Strahlungt koefflsienten of geeohaolaenen substance "Doroh climb ranking of Koeffieienten the WäraestraalungeoberflÄehe, lit in goal Gea the JaIX dnreh using a ·· driving graphite ring is ά · τ Auegleich already Substantially Improved · Instead of the Stranlungekoeffisienten of the radiation body cu Tergröeeern, can with the same. The temperature of the radiation ring can be increased by the fact that 10 incisions are provided in the upright walls of the floor, even the width is so small . 0.25 ms, since the disk is still due to its surface tension

- 11 -909813/1334

BATH ORIGINAL

ttioht dureb dl · »· cuts« a »i« a fi * g »1 can; the Entateanng γβ & HochfreqaenjEsi-romea Im the

Crucible wall is hlerdttrea la high * Meeae Ter & iitet » A relatively large I "ti de" Hoehf rcqiienef # ld "t

then came to βατ Straaluagssekeibe? or <5rln £ * n and dl «« · heat directly

According to the invention, the temperature of the driving radiation ring can also be increased up to above the solid-state temperature by means of a seal made of insulating material, e.g. a Qoarziegel _e sasaaseiL with radiation from conductive material, s "Be with gra phi tr ing. Even in this "case l * t Sr.rahl angering middle * of Hochfrequ" n * i "idea directly erhitütj the Sohaeleebildang kaim dt raw Wärsegtrafeln the ^ dea Strahlungeriagea" inga directs and regulated

Both of the last-mentioned Maeanahaen aae ^ S @ f J £ rfladaiif also have the advantage of "daS dl" eaefcreeltt auiatehende ν. and the 3ch «elstiegel · aar bia is« iaes? ν receivedal * -> ■ äaalg low leap era goal received wtTät s © da? the heat emitted by it »« «lohe the Olerfllaae de ·« inciatory rods »reached« ad da »GewliaBS & t · Stranlung» · ■ ueter »kills _t h ^ rabgeeetzt« Bl «der irfiMctng JFÄgiund« lying Sr * ag have next time at;, Gfe. led to the realization that with tele a vertical tu ä eg dea known at the 2onenaoh "i6l" rerfakr * 5i th high, real eel otstrahlungaringee "4" βββΒ the wall of the crucible, which towers above the bowls, atia iioulisiehen »• In the tone of the desired ötraiilongakoÄpeaeatisn, a different beam, received. v.will {this «from% elchiutr> conditions occur in particular tu mostly loslicfeea. Rope dea Letter "to" in the the Sratarrunaefläe & e directly angrefsenden bargain · üb is näalich therefore emänecMt "oil" above such a V = and moglichet b.erab "iie" tE "ß * 809813/1334

/ I *

3 is a thematic representation of a device which is available by applying the invention to the known Vorzugims "on pulling elrütriatallititr rods""it&& r a single-crystal rod can be produced" which has a longitudinal constant specific resistance in longitudinal direction. The single crystal rod 1 is absorbed from a crucible 15 ft in the Scaeel.se the larger crucible 16 drives _f and through an opening "it the Sehmel * e 11 of the larger Siegele in Verbindun; * The liquid level in the two crucibles Bin * the same or almost the same · Mach 4 invention is the driving crucible 15 with a flat hand 1 @ Torsnigeweise r of the rorgen width r * TBmixvB. _{9 the} upper side forms the compensating jet surface "while it rests aa the underside on the smelter 11" so the liquid level in the crucible reaches about to aa the flat sand "where the i'iegei (15 # 1 ^) were in such a way is, iet or set such that the Aufxiehgeechuindigkeit eiakrietallinea rod _f DAFL the Dnrehaeeeer de »• inkristallinen rod to aui a little Spielraa" Inneadurchaeseer of the flat sand corresponding to the seal ·

In FIGS. 4, 5 and 6, devices are shown in accordance with the invention, in which the outer body is made of a coaxial jet ring, which can be seen on the inside, at least with regard to the file that adjoins the surface of the solidification this adjoining, already grown monocrystalline rod part ₉ see on one the Srweichtutgeteuper & ta? exceeding Teiaperater befind et _f surrounds »ehtan In the _Hi: tapers corresponding to the ütabes the Aasacherichtung · When using the method according to the invention, the ätrahlo & gsriag is heated to such a high, constant in substantially temperature ösö the Erstarrangeflache within the conical Feiles of the radiation ring lies · 9 0 9 8 13/1334

- 13 -

BATH ORIGINAL

> 4 shows a preliminary crack after the test

g at · crucible stepping
The vertically arranged bar t is voa

25 trapezoidal cross-sections, the parallel side 26 of which is adjacent to the rod 1. On the inside between jswei see Koriisch anr Schraela. "Rea ^ üagerriä file i new" yliadriischen part · The generators of the two koaisoEen form an angle cL with the axis of the ütabea

from oa · 45 ^θ »At Srbitsaiag dee axaphitriages 25 by means of the high frequency coil 3 a geimol-Eene zone 4 arises in the rod f, which extends to within the conical file · Be the downward movement of the radiant ring 25 and the high frequency coil J v.äch & t the rod is monocrystalline from top to bottom and the upper conical file functions as a compensating wall reddening »ring · at d ^ r Äufv.ärtabev.-egang. the atab grows from the bottom up. on, while the lower conical feil acts as a balancing heat radiation tngörini

In the see & atisoh in Fig. 5 i ^ üahnitt device shown according to the invention, the ötabus einkristalllnen one for Äufsiehea is bestiniiat "comes after entsprecheaÄ of the device, l'ij" 2 a axtS the Scitmelae driving jtrahlunvSring aur Verv.endung _»ö Dieaer iStrahlttn "Erlng 30 has a 3-part which runs in the direction of the axis of the rod, that is, in the sighting of the chiaelsse, conically extending part * which merges into a cylindrical rope conical part towers over the Selimelsse

The device according to Pig · 6 is essentially the same that according to Pig · 3; only the £ l? icae, upper R «na tÖ

098 13/13 34. - 14 -

I <JL * UI

of the seal 15 according to FIG. 3 in Pig 6 through a conically extending inner wall era et et. line such a device in which a small 15 * bit of at least the upper band conically extending inner wall 35 'in the melt 1t of a grösserea Siegele 16 drives and through an opening 17 in this connection is known per see,! laughing of .The invention but the seal 15 is thus kept floating in the melt, daö above the liquid 36 in the spegels 'Üiegel only a conical inner and is located. In this way the raised dtab 1 only emits radiation from the conical inner wall _/

It should be noted that the measure described in the explanation of to increase the temperature of the driving radiation ring is also very advantageous with the devices according to FIGS. 5 and 6 can be taken.

The Effect of Krfindun; is closer explained with reference to j? ig.7 "which is a graph of the results with the Torrichtung and de" method of FIG. 2 is vertical · the density of Aetagrubea ca plotted in arbitrary units ^2, this sight is crucial for the density of impurities in the crystal, while the distance from the dash-dotted axis XX of the rod is plotted v * aagereuht

The & urve Λ represents the Aetg ^ rttbenvurieilung .. above the Represents the cross-sectional area that occurs in a "single-crystal rod, which is obtained by applying the method and obtained in the device according to Fig. 2 · Di · Curve B represents the Aetzgrubearertgabe with one without

- 15 -

909813 / 133A

BATH ORIGINAL

Use of a single-crystal line drawn up along the length of the rays Staff there · It is clearly evident »that with the through Using a method according to the invention obtained monocrystalline rod »the Aetsgrubendiohte is smaller» and the Aetsgruben more similar in cross-section « area are distributed · Kur on the band of the stick the Aetsgrubendlohte considerably However, it should be noted that the temperature is the driving punishment lun ^ aringes lower than that of the ideal compensation required temperature was · Srotadea was already a considerable improvement obtain·

Pat ent appraisals

13/1334

BATH

Claims (1)

Patent claim · ι 1 · Process mv Manufacture of iron monocrystalline bodies from a · «substance eg« ines semiconductor »« 1 «Öenaaniti» or Sill ζ Ium, where duroh ΐ. iira * «on ear from aassea and / or through ^; . this substance is "formed" from which, through solidification in a certain direction, a single crystal grows in fora tinea circular-cylindrical rod, thereby recognizing that during the process of growth of the radiation on the surface of that part of the already grown "inkrischtalliaea rod" ύ · τ a the softening; eteaperatur of the substance over dough temperature has »is compensated by radiation of warmth, the tone disguises a» äaaaeren dea rod eyataetriseh ovgebendea heat radiation body », whose aeoaetrie and $ emperatur- ▼ display are chosen because the heat radiated into this part at a constant temperature gradient is compensated for by any surface element of the named part. 2 · The method according to claim 1, dadaroh geicennxel am et »deS as heat radiation:; slcor £ .er an eagreneender the Brstarrongeflache, sua rod of coaxial radiation Brin ^ used will ram »o» dea on the inside with a little play Staff heraapaSt »and whose Auseendurehaeeeer dea sweifaehea Stabdarehaesser corresponds or is jröeser »where the dem already grown enea single-crystal rod »ogev / andte Side of the binges flaoh is nad eiae! ■ has substantial constant temperature »the siadesteas the melting temperature of the substance corresponds - 17 - 909813/1334 BATH ORIGINAL 3 · Procedure naoh. Claim 1 and / or 2, dadaroh marked «Calibrates that the bend has a rapidly angular cross-section. 4 · Method according to one or more of claims 1 to 3, characterized in that the Breit "dee Einsee the Teiaperatargraaleaten la corresponds to the above-mentioned feil. 5. The method according to one or more of claims 1 to 4, characterized in that the AuBaejidurohnseeeer des If it is twice or three times the stafeduröhiwssere. 6. The method according to one or more of spoke · 1 to 5 »in which a single crystalline, circular aylindrisob-er dta!» is sucked up from an ochmelae, dadaroh kennaeiahnet, that the ätab duroh the opening of one on the JcLmelse driving ötrahlun sacheibe is hochgözug · 7. The method naoh spoke 6, characterized in that the diok of the disc is less than 5 Ma 8 · Method aaeh one or more of Addresses 1 to 7, in which an egg-shaped stick is drawn out of a crucible, which drives in the camel of a rosy crucible and through an opening in its wall communicates with it "characterized in that the US tieibende crucible besltstt a flat ribbon" which rests on the äehmelB "of the larger -Tiegels and thus forms a Strahlunparing Weis · · 9 · Method according to one or more of the Ar ₁ epr lent · 1 to 5 »characterized in that, in the Zonenaohael» method without a crucible, a radiation ring with a rectangular cross section is used · 909813/133 k _BA D I Ό L U / 10. The method according to claim 1, characterized in » that the from sere Jirmestrabltutgskorper from a "to" staff coaxial radiation ring consists of »the one on the inside» at least on the XeIl that touches the flat surface to this adjoining, already monocrystalline grown rod part whose temperature is the softening temperature of the Stick; rises, surrounds, conical in the direction tapers which corresponds to the direction of the stick, and an essentially constant temperature at least « is equal to the melting temperature of the rod 11 · Method according to claim. 10, characterized » that the generatrix of the conical part forms an angle of more than 30 ° with the axis of the ötabes. 12. The method according to claim 10 and / or 11, characterized in that the generatrix of the conical rope forms a riiicle of 40 ° to 50 ° with the axis of the rod. 15 «Procedure according to one or more claims 10 to 12» in which a monocrystalline circular cylindrical rod is pulled up from a ^ Cimelse »characterized» that the ätrehlungering drifts in such a way on the melt »that only a conical part in the direction of the Sehmeise the inside of the hanging is dominated by the üchmelae 14 · The method according to one or more of claims 10 to IZr, in which a single-crystal, circular-cylindrical rod is sucked up from a crucible with an inner wall that runs conically at the top, drifts in the shell of a larger crucible and passes through a it is connected with it, characterized in that the crucible is in this way 13/1334 - 19 - BATH ORIGINAL Selnaelae of the larger crucible is kept drifting, dad only a conical inner wall running through the liquid level towering in the crucible 19. Method according to one or more of claims 10 to 12, in which a single-crystalline, circular-alindric rod is produced by the crucible-free Zonenaehrcelxverfahren, characterized in that the ring has a cylindrical part on the inside apart from a conically ve: running part, which together a geeonmolsene lone be ν, irk en, which extend up to within the conical. Part extends « _v 16 «Procedure according to. Address 15 »characterized by that the radiation line; a trapezoidal cross-section whose shortest parallel side faces the rod. 17 “Procedure according to one” or more of the claims 1 to 16, characterized by * AaS the radiation body consists of graphite 18 · Method according to one or more of claims 2 to 9 »characterized by the ring of radiation from graphite is heated at a temperature that is 1.2 to 1.5 times the melting temperature of the rod amounts to· 19 · Method according to one or more of Claims 6 to 8, 12 and 13 »in which high frequency heating takes place and the lying wall is made of a conductive material, thereby characterized in that the crucible wall is rereehen with incisions, which the high-frequency currents in the crucible wall restrict" 909813/1334 -20- 20. Virfahrtn. After a »» des * aefcrersa Air claim · € bl · 8 »13 and 14» fcii dim HaeMrequeaeerhiteouag applies, dadureh g »k§an * eiaaii« t _f ds? the $ legiXwaai «us an insulator, the Strahlttmgskurp ·? made of a ladder. 21 · Procedure aaeh elnea or oelireren «er Anaprliehe, äftdureh gekennaeicimet, d »Ä dir ütrahlungekoeffiaient de« Ütrahlungaicbody · large alu d ^ .r 4er iioheelee is » 22 “Procedure according to elnea or aehriren dir Auapriiche, thereby gekenaselohnet »that the Teiaperatttrgradieat ta called Sail of the monocrystalline rod ·· adjusted by cooling. earth « 23 · method more claim 21 »thereby that the cooling is at a »constant distance from dea ötrahlun .body done 24 · Device 2ua Aas introduce a iizas procedure oacaa or more of the preceding claims 25 · oincrystalline, circular cylindrical ο tab, darcfa Aar Phrase a «procedure after one or more dir preceding claims 1 to 23 or by means of one Provision made according to claim 24 26 · Single crystalline bodies »obtained from a single crystal!« nen jiabe, who by applying a procedure naih a or more of the Torah claims 1 to 23 or produced by means of a device according to claim 24 1st · 9098 13/1334 BADORlQfNAL