DE102019202759A1 - Imaging optics for imaging an object field in an image field and projection exposure apparatus with such an imaging optics - Google Patents

Abstract

An imaging optical system (7) for projection lithography has a plurality of mirrors (M1 to M10) for guiding imaging light from an object field (4) in an object plane (5) into an image field (8) in an image plane (9) along an imaging light -Strahlengangs. The imaging optics has a combination of the optical parameters image-side numerical aperture, anamorphic imaging, main beam angle at the object field designed for reflection mask, obscuration, optimized space cuboid and object-image offset, resulting in an optimized combination of good imaging properties and practical usability within a projection exposure system leads.

Description

The invention relates to an imaging optics or projection optics for imaging an object field in an image field. Furthermore, the invention relates to an optical system having such a projection optical system, a projection exposure apparatus with such an optical system, a method for producing a microstructured or nanostructured component with such a projection exposure apparatus, and a microstructured or nanostructured component produced by this method.

Projection optics of the type mentioned are known from the DE 10 2015 221 984 A1 , from the JP 2002-048977 A , the US 5,891,806 , which describes a projection exposure apparatus of the "proximity type", from the DE 10 2015 209 827 A1 and from the WO 2008/141 686 A1 as well as from the WO 2015/014753 A1 ,

It is an object of the present invention to further optimize an imaging optic of the type mentioned in comparison with the prior art with regard to a combination of good imaging properties and practical usability within the projection exposure apparatus.

This object is achieved by an imaging optics with the features mentioned in claim 1.

The imaging optics are designed for use in projection lithography, in particular for use in EUV projection lithography. The combination of image-side numerical aperture, anamorphic imaging with different imaging scales in the two imaging light planes, minimum angle between the main beam of the central object field point and the object field normal, pupil obscuration, space constraints and object-image offset lead to an imaging optics with good imaging properties simultaneously high practicality for use in projection lithography. The image-side numerical aperture may be at least 0.55. The image-side numerical aperture may be smaller than 0.8, may be smaller than 0.7, and may be smaller than 0.6. The angle between the main beam of the imaging light emanating from a central object field point and the object field normal on the object field may be at least 5.0 °. The obscured portion of the image-side numerical aperture may be at most 25%, at most 23%, or at most 21%.

For the extension of the construction space cuboid along the first object field coordinate, it may be said that this extension can be at most 950 mm, at most 900 mm, at most 850 mm and also at most 800 mm. Accordingly, for the second object field coordinate, an extension of the installation space cuboid can apply, which may be at most 2900 mm, the maximum 2800 mm, the maximum 2700 mm and the maximum 2600 mm. For the z-extension of the modular space, these may not exceed 2400 mm, not more than 2300 mm, not more than 2200 mm, not more than 2100 mm, not more than 2000 mm, not more than 1900 mm, not more than 1800 mm, not more than 1700 mm and not more than 1600 mm can amount.

In an imaging optical system according to claim 2, a component to be arranged in a pupil plane lighting illumination, which serves to illuminate the object field, be arranged in the imaging beam path in front of the object field, without it being necessary, the entrance pupil by means of additional optical components of the illumination optics in the Depict imaging beam path of the imaging optics after the object field. It is thus possible to reduce the number of optical components of the illumination optics and, correspondingly, advantageously increase an imaging light throughput of an optical system which includes the illumination optics and the imaging optics. This is particularly advantageous when using imaging light in the EUV wavelength range, in particular between 5 nm and 30 nm.

An imaging light beam path according to claim 3 allows a spatial separation between the object field and an optical component to be arranged in the entrance pupil before or after the object field. The beam path between the entrance pupil arranged in front of or behind the object field and the object field can be greater than 2000 mm.

An embodiment of the imaging optics according to claim 4 has been found to be particularly suitable. The imaging optics can be exactly four, can be exactly seven, or can have exactly eight GI mirrors. The imaging optics can be exactly three or can have exactly four NI mirrors. A maximum angle of incidence on one of the NI mirrors according to claim 5 facilitates the design of highly reflective mirror layers, in particular when using the imaging optics in the EUV wavelength range. The maximum angle of incidence may not exceed 24 °, may not exceed 23 °, may not exceed 22 ° and may not exceed 21 °.

A minimum angle of incidence on one of the GI mirrors according to claim 6 increases a reflectivity of the respective GI mirror, which in turn comes into play particularly when using EUV wavelengths. The minimum angle of incidence may be at least 66 °, may be at least 67 °, may be at least 68 °, may be at least 69 °, may be at least 70 ° and may also be at least 71 °.

The advantages of a projection exposure apparatus according to claim 8, a manufacturing method according to claim 9 and a micro- or nanostructured component according to claim 10 correspond to those which have already been explained above with reference to the imaging optics and the optical system. In particular, a semiconductor component, for example a memory chip, can be produced using the projection exposure apparatus.

• 1 schematisch eine Projektionsbelichtungsanlage für die EUV-Mikrolithographie;
• 2 in einem Meridionalschnitt eine Ausführung einer abbildenden Optik, die als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1 einsetzbar ist, wobei ein Abbildungsstrahlengang für Hauptstrahlen und für einen oberen und einen unteren Komastrahl dreier ausgewählter Feldpunkte dargestellt ist;
• 3 bis 10 in jeweils zu 2 ähnlichen Darstellungen weitere Ausführungen einer abbildenden Optik, jeweils einsetzbar als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1.

Embodiments of the invention will be explained in more detail with reference to the drawing. In this show:

• 1 schematically a projection exposure system for EUV microlithography;
• 2 in a meridional section, an embodiment of an imaging optic, which follows as a projection objective in the projection exposure apparatus 1 is usable, wherein an imaging beam path for main beams and for an upper and a lower Komastrahl three selected field points is shown;
• 3 to 10 in each case too 2 Similar representations of further embodiments of an imaging optics, each used as a projection lens in the projection exposure system according to 1 ,

A projection exposure machine 1 for microlithography has a light source 2 for illumination light or imaging light 3 , At the light source 2 it is an EUV light source that generates light in a wavelength range, for example between 5 nm and 30 nm, in particular between 5 nm and 15 nm. At the light source 2 it can be a plasma-based light source (laser-produced plasma (LPP), gas-generated plasma (GDP) or even a synchrotron-based light source, for example a free-electron laser (FEL) light source 2 it may in particular be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are possible. In general, even arbitrary wavelengths, for example visible wavelengths or also other wavelengths which can be used in microlithography (for example DUV, deep ultraviolet) and for the suitable laser light sources and / or LED light sources are available (for example 365 nm, 248 nm) nm, 193 nm, 157 nm, 129 nm, 109 nm) for the in the projection exposure apparatus 1 led lighting light 3 possible. A beam path of the illumination light 3 is in the 1 shown very schematically.

For guiding the illumination light 3 from the light source 2 towards an object field 4 in an object plane 5 serves a lighting optics 6 , With a projection optics or imaging optics 7 becomes the object field 4 in a picture field 8th in an image plane 9 mapped with a given reduction scale.

To facilitate the description of the projection exposure apparatus 1 as well as the different versions of the projection optics 7 in the drawing, a Cartesian xyz coordinate system is given, from which the respective positional relationship of the components shown in the figures results. In the 1 the x-direction is perpendicular to the plane of the drawing. The y-direction runs to the left and the z-direction to the top.

The object field 4 and the picture box 8th can at the projection optics 7 bent or curved and in particular be designed part-ring. Alternatively it is possible to use the object field 4 and the picture box 8th rectangular shape. The object field 4 and the picture box 8th have an xy aspect ratio greater than 1. The object field 4 thus has a longer object field dimension in the x direction and a shorter object field dimension in the y direction. These object field dimensions run along the field coordinates x and y ,

The object field 4 is accordingly spanned by the first Cartesian object field coordinate x along the first, larger (longer) object field dimension and the second Cartesian object field coordinate y along the second, smaller (shorter) object field dimension. The third Cartesian coordinate z perpendicular to these two object field coordinates x and y is hereinafter also referred to as object field normal coordinate.

The picture plane 9 is in the projection optics 7 in the execution after 2 parallel to the object plane 5 arranged. An image field normal coordinate thus also runs parallel to the object field normal coordinate along the z direction.

The first object field coordinate x and the normal coordinate z clamp a first imaging light plane xz, which is also referred to below as the sagittal plane. The clamping coordinates x and z of the first imaging light plane xz include the larger object field dimension x ,

The second object field coordinate y and the normal coordinate z clamp a second imaging light plane yz, which is also referred to below as the meridional plane.

For the projection optics 7 can one of the in Figs. 2ff. illustrated embodiments are used. The projection optics 7 to 2 reduces in the first image light level xz by a factor 4 and in the second imaging light plane yz by a factor 8th ,

In the projection optics 7 it is an anamorphic projection optics. Also, other reduction scales in the two imaging light planes xz, yz are possible, for example 3x, 5x, 6x, 7x or even reduction scales larger than 8x. Alternatively, the projection optics 7 also have the same reduction scale in the two imaging light levels xz, yz, for example, a reduction by a factor 8th , Other reduction scales are also possible, for example 4x, 5x or even reduction scales larger than 8x. The respective reduction scale may cause a picture reversal or not, which is also illustrated below by a corresponding sign of the reduction scale.

Shown is the projection optics 7 one with the object field 4 coincident section of a reflection mask 10 , which is also called reticle. The reticle 10 is from a reticle holder 10a carried. The reticle holder 10a is powered by a reticle displacement drive 10b relocated.

The picture through the projection optics 7 takes place on the surface of a substrate 11 in the form of a wafer made by a substrate holder 12 will be carried. The substrate holder 12 is from a wafer or substrate displacement drive 12a relocated.

In the 1 is schematically between the reticle 10 and the projection optics 7 an incoming into this bundle of rays 13 of the illumination light 3 and between the projection optics 7 and the substrate 11 one from the projection optics 7 leaking radiation beam 14 of the illumination light 3 shown. An image field-side numerical aperture (NA) of the projection optics 7 is in the 1 not reproduced to scale.

The projection exposure machine 1 is the scanner type. Both the reticle 10 as well as the substrate 11 be during operation of the projection exposure system 1 scanned in the y direction. Also a stepper type of the projection exposure system 1 in which between individual exposures of the substrate 11 a gradual shift of the reticle 10 and the substrate 11 in the y-direction is possible. These displacements are synchronized with each other by appropriate control of the displacement drives 10b and 12a ,

The 2 shows the projection optics 7 in a meridional section, ie the beam path of the imaging light 3 in the yz plane. The meridional plane yz is also referred to as the second imaging light plane. A first imaging light plane is that plane which is at the respective location of the beam path of the imaging light 3 is spanned by the first Cartesian object field coordinate x and a current imaging light main propagation direction. The imaging light main propagation direction is the beam direction of a main beam 16 a central field point. At each mirror reflection at the mirrors M1 to M8 As a rule, this imaging light main propagation direction changes. This change can be described as a tilt of the current imaging light main propagation direction about the first Cartesian object field coordinate x by a tilt angle equal to the deflection angle of this main beam 16 of the central field point on the respectively considered mirror of the projection optics 7 is. Hereinafter, the first imaging light plane is also referred to as the first imaging light plane xz for the sake of simplification.

The second imaging light plane yz also includes the imaging light main propagation direction and is perpendicular to the first imaging light plane xz.

Because the projection optics 7 is folded exclusively in the meridional plane yz, the second imaging light plane yz coincides with the meridional plane.

Shown in the 2 the beam path in each case three individual beams 15 , of three in the 2 go out to each other in the y-direction spaced object field points. Shown are main rays 16 , so individual rays 15 passing through the center of a pupil in a pupil plane of the projection optics 7 run, and in each case an upper and a lower coma beam of these two object field points. Starting from the object field 4 close the main beams 16 with the normal to the object plane 5 an angle CRA of 5.1 °. Due to this main beam angle CRA is an interpretation of the projection optics 7 for the reflective reticle 10 given. It is thus ensured that an optical path of the reticle 10 incident illumination light 3 with a beam path of the reticle 10 failing illumination or imaging light 3 does not bother.

The projection optics 7 has a picture-side numerical aperture of 0.55.

The projection optics 7 to 2 has a total of ten mirrors, in the order of the beam path of the individual beams 15 , starting from the object field 4 , With M1 to M10 are numbered.

Shown in the 2 to 4 Detail of the calculated reflection surfaces of the mirrors M1 to M10 , A subarea of these calculated reflection surfaces is used. Only this actually used area of the reflection surfaces is plus a supernatant in the real mirrors M1 to M10 actually present. These useful reflection surfaces are supported in known manner by mirror bodies.

In the projection optics 7 to 2 are the mirrors M1 . M9 and M10 designed as a mirror for vertical or normal incidence, so as a mirror to which the imaging light 3 with an angle of incidence less than 45 °. Overall, the projection optics 7 to 2 So three mirrors M1 . M9 and M10 for vertical incidence. These vertical incidence mirrors are also referred to as NI (Normal Incidence) levels.

The mirror M2 to M8 are mirrors for grazing incidence of the illumination light 3 , ie mirrors, on which the illumination light 3 with angles of incidence greater than 60 °. A typical angle of incidence of individual rays 15 of picture light 3 on the mirrors M2 to M8 for grazing incidence is in the range of 80 °. Overall, the projection optics 7 to 2 exactly seven mirrors M2 to M8 for grazing incidence. These grazing incidence mirrors are also referred to as GI (grazing incidence) levels. The mirror M2 to M8 for grazing incidence, large absolute radius values deviate comparatively slightly from a flat surface. The mirror M2 . M3 . M4 . M5 . M6 . M7 and M8 contribute to specific and especially local aberration correction.

The mirror M1 to M10 carry the reflectivity of the mirror M1 to M10 for the picture light 3 optimizing coating. This may be a ruthenium coating, a molybdenum coating or a molybdenum coating having a topmost layer of ruthenium. At the mirrors M2 to M8 for grazing incidence, a coating with, for example, a layer of molybdenum or ruthenium can be used. These highly reflective layers, especially the mirror M1 . M9 and M10 for normal incidence may be designed as multi-layer layers, wherein successive layers may be made of different materials. Alternate layers of material can also be used. A typical multi-layer layer may comprise fifty bilayers each of one layer of molybdenum and one layer of silicon.

To calculate a total reflectivity of the projection optics 7 a system transmission is calculated as follows: A mirror reflectivity is determined as a function of the angle of incidence of a guide beam, ie a main beam of a central object field point, on each mirror surface and combined in a multiplicative manner to the system transmission.

Details on the reflectivity calculation are explained in the WO 2015/014753 A1 ,

Further information on reflection at a GI mirror (grazing incidence mirror) can be found in the WO 2012/126 867 A , Further information on the reflectivity of NI mirrors (normal incidence mirrors) can be found in the DE 101 55 711 A ,

A total reflectivity or system or total transmission of the projection optics 7 , which is a product of the reflectivities of all mirrors M1 to M8 the projection optics 7 is about R = 8%.

The mirror M10 , So the last in the imaging beam path mirror in front of the image field 8th , has a passage opening 17 to the passage of the imaging light 3 , the third last mirror M8 to the penultimate mirror M9 is reflected. The mirror M10 becomes the passage opening 17 around used reflectively. All other mirrors M1 to M9 have no passage opening and are used in a coherently coherent area reflective.

The mirror M1 to M10 are designed as freeform surfaces that can not be described by a rotationally symmetric function. There are also other versions of the projection optics 7 possible, where at least one of the mirrors M1 to M10 is designed as a rotationally symmetric asphere. Also all mirrors M1 to M10 may be embodied as such aspheres.

A free-form surface can be described by the following free-form surface equation (Equation 1): $$\begin{array}{l}Z=\frac{c_x{x}^2+{\mathrm{<figure-callout\; id="2"\; label="c\; y\; y"\; filenames="DE102019202759A1\_0004.png"\; state="\{\{state\}\}">c\; </figure-callout>}}_y{y}^{}{}^2}{1+\sqrt{1-\left(1+k_x\right){\left(c_{x}x\right)}^2-\left(1+k_y\right){\left(c_{y}y\right)}^2}}\\ +C_{1}x+C_{2}y\\ +{\text{C}}_{\text{3}}{\text{x}}^2+{\text{<figure-callout id="4" label="C" filenames="DE102019202759A1\_0004.png,DE102019202759A1\_0005.png" state="{{state}}">C</figure-callout>}}_4\text{xy}+{\text{C}}_5{\text{<figure-callout id="2" label="y" filenames="DE102019202759A1\_0004.png" state="{{state}}">y</figure-callout>}}^2\\ +{\text{C}}_6{\text{x}}^3+...+{\text{C}}_9{\text{<figure-callout id="3" label="y" filenames="DE102019202759A1\_0004.png,DE102019202759A1\_0005.png" state="{{state}}">y</figure-callout>}}^3\\ +{\text{C}}_{10}{\text{x}}^4+...+{\text{C}}_{12}{\text{x}}^2{\text{<figure-callout id="2" label="y" filenames="DE102019202759A1\_0004.png" state="{{state}}">y</figure-callout>}}^2+...+{\text{C}}_{14}{\text{<figure-callout id="4" label="y" filenames="DE102019202759A1\_0004.png,DE102019202759A1\_0005.png" state="{{state}}">y</figure-callout>}}^4\\ +{\text{C}}_{15}{\text{x}}^5+...+{\text{C}}_{20}{\text{<figure-callout id="5" label="y" filenames="DE102019202759A1\_0004.png,DE102019202759A1\_0005.png" state="{{state}}">y</figure-callout>}}^5\\ +{\text{C}}_{21}{\text{x}}^6+...+{\text{C}}_{24}{\text{x}}^3{\text{<figure-callout id="3" label="y" filenames="DE102019202759A1\_0004.png,DE102019202759A1\_0005.png" state="{{state}}">y</figure-callout>}}^3+...+{\text{C}}_{27}{\text{<figure-callout id="6" label="y" filenames="DE102019202759A1\_0004.png" state="{{state}}">y</figure-callout>}}^6\\ +...\end{array}$$

• Z ist die Pfeilhöhe der Freiformfläche am Punkt x, y, wobei x² + y² = r². r ist hierbei der Abstand zur Referenzachse der Freiformflächengleichung (x = 0; y = 0).

For the parameters of this equation (1):

• Z is the arrow height of the freeform surface at point x, y, where x ² + y ² = r ² . r is the distance to the reference axis of the freeform surface equation (x = 0, y = 0).

In the free-form surface equation ( 1 ) C ₁ , C ₂ , C ₃ ... denote the coefficients of free-form surface series expansion in the powers of x and y.

In the case of a conical base, c _x , c _{y is} a constant that corresponds to the vertex curvature of a corresponding asphere. So c _x = 1 / R _x and c _y = 1 / R _y . k _x and k _y each correspond to a conical constant of a corresponding asphere. The equation (1) thus describes a biconical freeform surface.

An alternatively possible free-form surface can be generated from a rotationally symmetrical reference surface. Such free-form surfaces for reflecting surfaces of the mirrors of projection optics of projection exposure apparatuses for microlithography are known from US Pat US 2007-0058269 A1 ,

Alternatively, freeform surfaces can also be described using two-dimensional spline surfaces. Examples include Bezier curves or non-uniform rational base splines (NURBS). For example, two-dimensional spline surfaces may be described by a network of points in an xy plane and associated z-values or by these points and their associated slopes. Depending on the particular type of spline surface, the complete surface is obtained by interpolation between the mesh points using, for example, polynomials or functions that have certain continuity and differentiability properties. Examples of this are analytical functions.

The following table summarizes the parameters "maximum angle of incidence", "reflection surface extent in x-direction", "reflection surface extent in y-direction" and "maximum mirror diameter" for the mirrors M1 to M10 together: M1 M2 M3 M4 M5 Max. Angle of incidence [°] 14.4 85.1 79.3 80.1 83.9 minute Angle of incidence [°] 11.0 74.6 73.7 76.0 77.5 Reflection surface extension in x-direction [mm] 646.5 412.3 341.1 299.5 329.8 Reflection surface extension in the y-direction [mm] 279.0 295.6 267.7 299.5 345.3 Max. Mirror diameter [mm] 646.5 412.3 357.1 382.6 413.0 M6 M7 M8 M9 M10 Max. Angle of incidence [°] 79.7 82.0 78.1 20.5 8.2 minute Angle of incidence [°] 73.9 73.3 71.1 0.0 4.9 Reflection surface extension in x-direction [mm] 357.9 318.1 244.2 293.1 759.4 Reflection surface extension in the y-direction [mm] 263.3 127.3 246.2 148.8 734.4 Max. Mirror diameter [mm] 360.0 318.2 279.0 293.2 759.5

A maximum angle of incidence on one of the NI mirrors is in the projection optics 7 at the mirror M9 before and is there 20.5 °. A minimum angle of incidence of the imaging light 3 on one of the GI mirrors lies with the projection optics 7 at the mirror M8 before and there is 71.1 °.

A pupil-defining aperture stop AS is in the projection optics 7 between the mirrors M9 and M10 arranged. Realization possibilities for such an aperture stop are disclosed, for example, in US Pat WO 2016/188934 A1 , Instead of a single pupil-defining aperture stop AS its effect can also be taken over by several pupil-defining partial apertures, which are at different points of the projection optics 7 are arranged. These partial diaphragms can also be arranged at other locations in the imaging beam path, ie not necessarily between the mirrors M9 and M10 ,

The optical design data of the reflection surfaces of the mirrors M1 to M10 the projection optics 7 can be found in the following tables. Each of these optical design data goes from the image plane 9 Thus, the respective projection optics describe in the reverse direction of the imaging light 3 between the picture plane 9 and the object plane 5 ,

The first of these tables gives an overview of the design data of the projection optics 7 and summarizes the calculated design wavelength for the imaging light, the image-side numerical aperture NA, the reduction factors βx and βy in the two imaging light planes xz and yz, the magnitudes of the image field in the x and y directions, an image field curvature, an image error value rms, and a blind spot. The field curvature is defined as the inverse radius of curvature of the field. The image error value is given in mλ ( m1 ), depending on the design wavelength. This is the rms value of the wavefront error.

The value follows in Table 1 CRA , the value for the etendue of the projection optics 7 , the transmission of the projection optics 7 , ie the total reflectivity, the positions of an entrance pupil of the projection optics 7 in the first imaging light level xz (position EP ( x )) and in the second imaging light plane yz (position EP ( y )) measured along the imaging light main propagation direction from the object plane 5 from, an object-image offset, so a y-distance between a central object field point and a central image field point, a working distance of the penultimate mirror to the image plane, so the distance between the used reflection surface of the penultimate mirror in the image light beam path and the image plane, a also called field length (track length) field plane distance, ie the distance between the object plane 5 and the picture plane 9 , an obscuration value, that is, an aperture portion of the image-side numerical aperture that can not be used for imaging light, as well as the dimensions of a package cuboid within which the mirrors of the projection optics are located 7 can be accommodated, indicated as extension in the x-direction x extension in the y-direction x extension in the z-direction. This field level spacing is also called the length of the projection optics 7 designated.

A definition of etendue, which is also referred to as the optical conductivity, can be found in the US 6,198,793 B1 , Negative values for "Position EP ( x ) "Or" position EP ( y ) "Mean that the entrance pupil in the respective imaging light plane in the beam path of the imaging light in front of the object field 4 is arranged.

The second of these tables are the optical surfaces of the optical components vertex radii at (Radius_x = R _x, R _y = Radius_y) and power values (Power_x, Power_y). Negative radii mean the incident illuminating light 3 concave curves in the section of the respective surface with the plane under consideration (xz, yz), which are of a surface normal in the vertex with the respective direction of curvature ( x . y ) is spanned. The two radii Radius_x, Radiux_y can explicitly have different signs.

The vertices on each optical surface are defined as points of impingement of a guide beam, which originate from an object field center along a plane of symmetry x = 0, that is to say the plane of the drawing 2 (Meridional plane) towards the image field 8th goes.

$${\text{P}}_{\text{y}}=-\frac{2}{R_y\text{cos }AOI}$$

The powers Power_x (P _x ), Power_y (P _y ) at the vertices are defined as: $${\text{P}}_{\text{x}}=-\frac{2\text{cos}AOI}{R_x}$$

$${\text{P}}_{\text{y}}=-\frac{2}{R_y\text{cos}AOI}$$

AOI here denotes an angle of incidence of the guide beam to the surface normal.

The third table gives for the mirrors M1 to M10 in mm the conical constants k _x and k _y , the vertex radius R _x (= radius_x) and the free-form surface coefficients C _n . Coefficients C _n , which are not tabulated, each have the value 0 ,

The fourth table also indicates the amount along which the respective mirror decentred (DCY) from a reference surface in the y direction, was shifted in the z direction (DCZ) and tilted (TLA, TLC). This corresponds to a parallel shift and a tilt in the freeform surface design process. It is shifted in y- and z-direction in mm and tilted around the x-axis and around the z-axis. The twist angle is given in degrees. It is decentered first, then tilted. The reference surface at decentering is the first surface of the specified optical design data. Also for the object field 4  is a decentering in the y and z direction indicated. In addition to the surfaces assigned to the individual mirrors, the fourth plane also has the image plane tabulated as the first surface and optionally also a diaphragm surface (labeled "AS").  Table 1 to FIG. 2 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Field size x 26.0 mm Field size y 1.6 mm curvature of field 0.0125 1 / mm RMS 8.82 mλ cover AS CRA 5.1 ° etendue 12.58 mm ² transmission 8.0% Pos. EP (x) -2343.10 mm Pos. EP (v) Object-image offset -2433.45 mm 2200.40 mm working distance 82 mm Field spacing 2300.05 mm obscuration 04.18% Space-square (759 × 2532 × 1820) mm ³  Table 2 to Fig. 2 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M10 -757.9429030 0.0026203 -694.9894304 0.0028980 REFL M9 1216.8656873 -0.0016436 377.5079738 -0.0052979 REFL M8 -989.6643428 0.0005277 -11229.0818708 0.0006821 REFL M7 -719.5909231 0.0006129 -1805.2232486 0.0050238 REFL M6 -948.1488125 0.0005016 -1784.7557706 0.0047120 REFL M5 -2113.0694226 0.0001489 -6796.6028251 0.0018711 REFL M4 3997.6942638 -0.0001035 -5945.8516457 0.0016262 REFL M3 2357.6563633 -0.0002068 -9435.8652664 0.0008695 REFL M2 2934.0966562 -0.0001139 2663.6104523 -0.0044932 REFL M1 -2175.4278416 0.0008966 -1369.9152890 0.0014971 REFL  Table 3a to Fig. 2 coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -757.94290300 1216.86568700 -989.66434280 C2 0.00350470684 -0.0202778359 0.00593263394 C3 3.36730767e-07 -7.12963166e-06 6.95157297e-06 C5 -1.39469331e-05 0.000477355517 -5.15559949e-05 C7 -1.00054994e-08 1.5332166e-06 3.12332723e-07 C9 6.22281822e-09 -2.1345573e-07 -1.94888453e-07 C10 -2.43987215e-11 1.28942246e-09 1.30442492e-10 C12 -8.81363713e-11 7.57341571e-09 -3.1930369e-10 C14 -3.82587005e-11 5.83906e-09 -6.19425131e-10 C16 -3.24282478e-14 8.76261064e-12 6.45853618e-13 C18 -1.12471566e-14 6.52433711e-12 -5.44364857e-14 C20 7.05230426e-15 -4.75157584e-12 -3.47688425e-12 C21 -5.56573901e-17 6.71747669e-15 5.88317196e-16 C23 -2.44813681e-16 5.85621402e-14 1.4903173e-15 C25 -2.64599188e-16 1.30936264e-13 -5.48895149e-15 C27 -8.28664432e-17 1.74244446e-13 -2.18328723e-14 C29 -6.29586487e-20 6.01199099e-17 -1.25495135e-18 C31 -8.0447495e-20 2.03349891e-16 -5.40484509e-18 C33 -2.03788038e-20 4.31936279e-16 -5.46940464e-17 C35 7.89863334e-21 -2.22639939e-16 -1.44456351e-16 C36 -1.13355752e-22 3.98681037e-20 -1.70402987e-21 C38 -5.81678926e-22 6.60466582e-19 -9.37742001e-20 C40 -1.00572799e-21 3.08307031e-18 -7.84762015e-20 C42 -7.0654087e-22 5.30862635e-18 -3.82197985e-19 C44 -1.73732972e-22 7.30818784e-18 -9.20736431e-19 C46 -9.9553536e-26 5.9419302e-22 4.36967887e-22 C48 -2.24143271e-25 3.81882936e-21 2.79578512e-21 C50 -2.04554369e-25 1.23266121e-20 4.43718325e-21 C52 -3.33403638e-26 -6.36114138e-21 -3.59934183e-21 C54 5.54038647e-26 -1.57226213e-19 -5.7356856e-21 C55 -1.64951412e-28 2.5773272e-26 1.59163236e-25 C57 -1.43496956e-27 3.11535212e-25 2.5760351e-23 C59 -3.18415966e-27 -4.00500873e-23 3.2384471e-23 C61 -3.20849778e-27 -2.72922686e-22 3.19322402e-23 C63 -1.60816238e-27 -7.77792775e-22 -5.85707387e-23 C65 -2.77346442e-28 -1.19729591e-21 -4.56176286e-23 C67 -3.02945746e-31 3.91632375e-27 -4.3631357e-26 C69 -1.45940929e-30 9.51722466e-26 -2.20903304e-25 C71 -1.47351327e-30 -1.44955041e-25 -9.61411243e-25 C73 5.54402453e-33 -2.86941042e-24 -3.87380874e-25 C75 1.98642063e-31 -4.04475993e-24 -5.51579745e-25 C77 -1.56961581e-31 3.20390347e-23 -4.81113113e-25 C78 -4.62014335e-34 8.77939704e-30 3.37683822e-29 C80 -7.42361454e-34 4.20777992e-28 -2.61211412e-27 C82 -2.99868711e-33 6.36343788e-27 -4.07169754e-27 C84 -1.01442089e-32 3.3757112e-26 -9.49922942e-27 C86 -1.27180253e-32 8.81094106e-26 -2.12644342e-27 C88 -6.13491439e-33 2.1643955e-25 -2.14493407e-27 C90 -1.38029357e-33 2.20699501e-25 -4.53653585e-27 C92 -6.33269909e-38 1.31394812e-31 2.38735089e-30 C94 4.74568692e-36 -1.23475982e-30 5.66010234e-30 C96 7.60271599e-36 4.04874776e-30 7.17666283e-29 C98 -5.5614561e-36 1.61290965e-28 5.17327487e-29 C100 -9.77986306e-36 8.05957292e-28 1.98439998e-29 C102 -1.82433237e-36 7.04671203e-28 -7.17829129e-30 C104 3.40164559e-37 -3.80145616e-27 -3.02735324e-29 C105 -1.32628723e-39 7.74991525e-35 -2.84009098e-33 C107 -2.38500753e-38 -7.58787726e-33 1.34134173e-31 C109 -9.20992382e-38 -2.05781309e-31 2.32904705e-31 C111 -1.23514158e-37 -1.58619838e-30 7.39481058e-31 C113 -6.31399238e-38 -5.76973111e-30 5.48732334e-31 C115 -1.70433522e-39 -1.00655825e-29 4.91216526e-33 C117 4.02467455e-39 -2.0520298e-29 -9.91787791e-32 C119 1.07868065e-39 -1.278767e-29 -1.29372074e-31 C121 1.03240686e-43 1.84505199e-37 -4.43889575e-35 C123 -2.86036407e-41 5.34840568e-35 9.02129699e-35 C125 -8.38515003e-41 2.99125893e-34 -1.80895654e-33 C127 -3.69743197e-41 -9.42589015e-34 -1.83023715e-33 C129 6.39746218e-41 -1.73054457e-32 -1.26388175e-33 C131 5.08749143e-41 -6.44412897e-32 -1.34229916e-33 C133 4.3881225e-42 -2.95917597e-32 -6.48164087e-34 C135 4.48558047e-43 1.97407426e-31 -3.15844459e-34 C136 3.76049713e-45 -1.48978825e-39 5.24239478e-38 C138 6.92024691e-44 9.54180806e-38 -2.9540156e-36 C140 3.80805665e-43 3.12761889e-36 -5.14694111e-36 C142 6.84558476e-43 3.11302539e-35 -1.77117021e-35 C144 4.52596653e-43 1.54376512e-34 -2.19220363e-35 C146 -2.65961546e-44 3.98796863e-34 -1.20169281e-35 C148 -2.1323102e-43 4.72970934e-34 -4.41839842e-36 C150 -8.20470974e-44 5.70503028e-34 -1.33863486e-36 C152 -7.92562102e-45 -1.29545739e-34 -3.33947989e-37 C154 -7.20294453e-48 0 0 C156 1.63554022e-47 0 0 C158 1.21878252e-46 0 0 C160 6.70480808e-47 0 0 C162 -2.20296323e-46 0 0 C164 -3.31335339e-46 0 0 C166 -1.29183147e-46 0 0 C168 -1.9816217e-48 0 0 C170 -2.06679615e-49 0 0 C171 -1.35368704e-50 0 0 C173 -1.91813309e-49 0 0 C175 -1.18209681e-48 0 0 C177 -2.98434354e-48 0 0 C179 -3.89273501e-48 0 0 C181 -2.83870985e-48 0 0 C183 -1.11527913e-48 0 0 C185 -8.05352496e-50 0 0 C187 9.50424945e-51 0 0 C189 -6.78196004e-51 0 0  Table 3b to Fig. 2 coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -719.59092310 -948.14881250 -2113.06942300 C2 -0.00855357105 -0.00223757466 -0.00808405471 C3 -6.47401594e-06 -9.55848428e-06 -2.37129166e-06 C5 0.000312295224 1.36189835e-05 -2.34717355e-05 C7 -1.31285111e-07 1.89212626e-07 -1.21916208e-07 C9 -4.542089e-07 -4.20758882e-08 -1.34155736e-07 C10 9.81621438e-12 -3.14743006e-10 -1.44117231e-10 C12 -1.19399765e-09 7.84842603e-11 -1.83644609e-10 C14 2.33850721e-09 -3.6661372e-10 -1.48919727e-10 C16 1.88650862e-13 -4.66815086e-13 -3.73737785e-13 C18 1.80642242e-12 1.96497776e-13 -7.60679166e-14 C20 -5.62988295e-12 1.02433266e-12 -7.19705388e-14 C21 5.05869066e-17 -1.34487264e-16 -3.79939341e-16 C23 3.294056e-15 -1.24392427e-16 -2.12862289e-16 C25 -2.57898007e-14 -1.92690074e-15 4.12620536e-16 C27 5.44477539e-14 -5.28646829e-16 1.60419158e-16 C29 9.83109606e-19 -7.79020656e-19 4.9625809e-19 C31 2.69867302e-18 -2.36834265e-19 -1.69759723e-19 C33 -1.76004564e-17 -1.1057406e-18 4.85412161e-19 C35 -3.57617169e-16 2.80576703e-17 1.12711224e-18 C36 9.2092115e-22 -2.55369534e-21 9.02280442e-21 C38 -7.0311214e-20 -9.14979633e-21 -4.61349567e-21 C40 6.70449409e-19 -1.18141315e-20 -1.15263329e-20 C42 1.70436625e-19 -1.14301311e-19 3.05908526e-21 C44 1.66206012e-18 -6.37654068e-20 7.96403719e-21 C46 1.97403261e-22 3.31103901e-23 1.9652235e-23 C48 -1.58037622e-21 3.17432234e-22 -1.06034322e-23 C50 7.24856994e-21 6.43142646e-22 -5.12635697e-23 C52 1.25821386e-20 5.46603714e-22 4.56961908e-23 C54 5.25930943e-20 -7.45069902e-22 2.64833674e-23 C55 -2.70972638e-25 1.85364028e-25 -5.41995006e-25 C57 9.35945371e-24 5.86071622e-25 4.12140888e-25 C59 -6.55612653e-23 4.42384755e-25 7.83577053e-25 C61 -2.03560323e-22 1.12923724e-25 7.26320481e-25 C63 -2.69534095e-22 5.20008334e-24 5.54343839e-26 C65 -6.58468965e-22 -1.07642807e-24 -4.02931036e-25 C67 -1.46517624e-26 -1.02716253e-27 9.32214836e-28 C69 1.44499055e-25 -1.89676697e-26 3.55818798e-28 C71 -1.12931157e-25 -5.85260377e-26 5.1966476e-27 C73 -3.37298297e-24 -4.52777077e-26 4.86169945e-27 C75 -8.64008864e-24 -2.53814316e-26 -2.0659725e-27 C77 -6.94529481e-24 5.32549233e-26 -2.66413355e-27 C78 1.21329539e-29 -5.65417367e-30 2.03082836e-29 C80 -6.30218012e-28 -2.24417361e-29 -2.4941105e-29 C82 3.43565451e-27 3.68245723e-29 -4.37662959e-29 C84 1.9805939e-26 3.88278609e-29 -3.00957976e-29 C86 2.76211766e-26 1.44557014e-28 -1.84861388e-29 C88 1.73417741e-25 -4.09522003e-28 1.50400666e-31 C90 1.87707213e-25 1.23359511e-28 1.01888491e-29 C92 4.44948373e-31 2.59551946e-32 -4.53562577e-32 C94 -5.10952211e-30 5.53410813e-31 -6.08041696e-32 C96 -1.48182506e-29 2.87851336e-30 -3.04059362e-31 C98 1.46456562e-28 3.02342738e-30 -3.32633296e-31 C100 4.20338992e-28 2.04165355e-30 -2.08550912e-31 C102 2.98337394e-27 1.2331144e-30 5.44402176e-32 C104 -1.31950323e-27 -1.95848225e-30 1.1019901e-31 C105 -2.28578374e-34 6.50043107e-35 -3.59487181e-34 C107 2.02190495e-32 3.55773641e-34 6.71928133e-34 C109 -8.18548883e-32 -3.1163198e-33 9.25081641e-34 C111 -7.9917643e-31 -9.23344253e-33 -1.43636163e-34 C113 -1.77330098e-30 -7.92957937e-33 2.40765589e-35 C115 -1.798564e-30 -1.43914499e-32 -7.95425451e-34 C117 -6.07384145e-29 1.75975185e-32 -9.95505685e-35 C119 1.69808233e-30 -7.54948977e-33 4.5009311e-35 C121 -4.78831943e-36 -2.86052394e-37 3.89720656e-37 C123 6.97679321e-35 -6.56349587e-36 1.26588486e-36 C125 3.0577083e-34 -4.92949953e-35 7.26732383e-36 C127 -4.37955569e-34 -8.91797576e-35 4.71596443e-36 C129 -1.49196058e-32 -3.50795785e-35 5.73131551e-36 C131 -6.816367e-33 -4.08971219e-35 -2.55194895e-36 C133 -3.98875349e-31 -1.40963085e-35 -1.65490546e-36 C135 3.01531654e-31 3.50484617e-35 -1.41372502e-36 C136 2.28560267e-39 -2.10708534e-40 2.59795414e-39 C138 -2.53561463e-37 -1.12166365e-39 -7.92275741e-39 C140 7.74488485e-37 6.09397601e-38 -7.0553953e-42 C142 1.2640731e-35 3.00157382e-37 1.8344858e-38 C144 1.87323613e-35 2.90505415e-37 8.73494015e-39 C146 1.57511887e-34 2.4277704e-37 1.31987822e-38 C148 -3.21844376e-34 3.11141756e-37 -5.25958681e-39 C150 7.99828776e-33 -3.58639975e-37 -2.98853289e-39 C152 -3.85861091e-33 1.38055178e-37 -3.02570548e-39  Table 3c to Fig. 2 coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 3997.69426400 2357.65636300 2934.09665600 C2 0.0221472853 -0.0272187973 0.000420451838 C3 7.26608329e-06 2.21398552e-05 -9.25185181e-06 C5 -1.2635511e-06 -3.9532605e-05 4.55432873e-05 C7 9.12540604e-08 1.96863343e-07 -4.50940573e-08 C9 -1.47535801e-07 4.54586236e-07 -7.49573475e-07 C10 4.15818528e-11 7.02418512e-10 2.78688084e-10 C12 2.06197046e-10 3.33128271e-10 -2.00679085e-10 C14 -3.76237787e-10 -4.55701091e-10 3.20467813e-09 C16 1.06717534e-14 1.87968634e-12 -5.42058692e-13 C18 8.87259584e-13 5.98245756e-13 2.26863729e-12 C20 -1.32600127e-12 3.7835457e-12 -1.59266497e-11 C21 -2.09680554e-16 8.06598515e-16 5.54143584e-17 C23 -2.08460697e-16 3.58532246e-15 2.31275077e-15 C25 3.25985152e-15 3.22416092e-16 -1.39114467e-14 C27 -4.74632667e-15 -6.17406866e-15 8.05428408e-14 C29 1.62498378e-18 6.11232155e-18 -5.31880684e-19 C31 -2.66321031e-19 7.66272364e-18 -1.13562715e-17 C33 1.31794718e-17 6.66772415e-18 8.28987516e-17 C35 -1.80404421e-17 3.99544246e-17 -4.03127778e-16 C36 4.25442383e-20 1.5388952e-21 -1.15479863e-22 C38 5.42278271e-22 9.24053902e-21 5.59769439e-24 C40 3.39623683e-21 2.48474732e-20 2.55544458e-20 C42 4.94763299e-20 4.56297573e-20 -5.26290418e-19 C44 -7.0241396e-20 -6.95774731e-20 2.15125409e-18 C46 1.46523142e-22 -1.22875086e-22 5.28483126e-23 C48 9.97917271e-23 -3.85754782e-23 1.24180816e-22 C50 1.52459549e-22 -5.25404817e-23 -8.16776096e-23 C52 7.32407529e-23 -1.4612873e-22 3.32256247e-21 C54 -3.74088067e-22 1.13543133e-21 -1.17008414e-20 C55 -3.56086801e-24 9.44502154e-26 6.02739927e-27 C57 3.03986842e-26 -9.89916686e-26 2.50010534e-25 C59 -9.07701595e-26 5.32215192e-25 2.41985e-24 C61 1.36198192e-24 -1.62152163e-24 5.89801873e-24 C63 -2.80413846e-25 -4.37609385e-24 -2.07723764e-23 C65 -1.7254272e-24 -4.31633659e-24 4.58881229e-23 C67 -1.25771871e-26 1.02174017e-26 -2.61717385e-27 C69 -7.03007022e-27 2.6879789e-27 -1.24761079e-26 C71 -1.20393212e-26 3.53226243e-27 -2.50220211e-26 C73 5.78050158e-27 8.18038313e-27 -4.36212239e-26 C75 5.83159331e-27 3.43109899e-26 1.40755752e-25 C77 -3.85980755e-27 -1.4435734e-26 -7.04439348e-26 C78 1.49289057e-28 7.10294522e-31 -3.20946247e-31 C80 -1.94324008e-29 3.78707019e-29 4.80293536e-30 C82 -1.9440004e-29 -5.61302491e-29 -5.4216074e-29 C84 -9.23880407e-29 1.85780079e-29 -2.21297817e-28 C86 2.37850348e-29 1.91910854e-28 -1.80175702e-29 C88 9.8763977e-29 2.59383043e-28 -8.19922189e-28 C90 -1.59800675e-29 2.31175037e-28 9.50257055e-29 C92 4.99825723e-31 -3.07837593e-31 5.69302656e-32 C94 2.31918306e-31 -9.25752462e-32 3.91371738e-31 C96 2.40701921e-31 -1.20598585e-31 1.30275604e-30 C98 1.23710152e-31 -4.31291178e-32 2.28010742e-30 C100 -1.23966801e-31 -4.08382329e-31 1.97312046e-31 C102 5.07240685e-31 -2.35807157e-30 2.81465194e-30 C104 -2.98630771e-31 1.39132949e-30 -3.92669235e-30 C105 -3.12885946e-33 -1.16843978e-34 1.10034474e-35 C107 7.49056725e-34 -1.55483599e-33 -3.76929433e-34 C109 8.33593951e-34 1.95633134e-33 -5.73149275e-34 C111 1.57292374e-33 1.72499268e-33 1.03328701e-33 C113 3.15160275e-33 -5.42314763e-33 2.74817166e-33 C115 -3.77310811e-33 -7.69235723e-33 7.94987495e-33 C117 1.41404906e-33 -4.4304487e-33 -2.84287722e-33 C119 -2.06136016e-33 -1.27775277e-32 3.06242752e-32 C121 -7.00763547e-36 3.40517761e-36 -4.83751896e-37 C123 -2.73726106e-36 1.68617605e-36 -4.3129872e-36 C125 -1.22035457e-37 2.54186502e-36 -2.05991164e-35 C127 -5.19018719e-36 5.54131636e-36 -5.48743135e-35 C129 7.65874344e-36 -1.21482588e-35 -6.40700602e-35 C131 -2.20056867e-35 2.2529787e-35 -4.68786533e-35 C133 4.29215522e-36 7.18588869e-35 -9.92507629e-36 C135 -5.94539081e-36 -1.35017604e-35 -9.39469098e-35 C136 2.26024978e-38 1.23120213e-39 -1.00474318e-40 C138 -7.24043452e-39 2.06589248e-38 5.04978785e-39 C140 -6.16055042e-39 -2.70748435e-38 2.3502043e-38 C142 -1.21005522e-38 -5.18623478e-38 7.63388558e-38 C144 -3.63570294e-38 3.8811655e-38 1.48983925e-37 C146 1.59739362e-40 2.23527534e-37 1.37815152e-37 C148 -3.89280056e-38 3.10535197e-38 7.45803269e-38 C150 9.9853956e-39 -8.94887334e-38 2.30808179e-38 C152 -6.00879456e-39 1.99078421e-37 1.0649167e-37  Table 3d to Fig. 2 coefficient M1 KY 0.00000000 KX 0.00000000 RX -2175.42784200 C2 0.000524049374 C3 -4.41858293e-07 C5 -1.73891441e-06 C7 1.44409416e-08 C9 -7.77778353e-10 C10 -6.50405151e-12 C12 2.78213413e-11 C14 -1.06104008e-10 C16 3.29639717e-15 C18 5.42038552e-14 C20 -1.19320728e-13 C21 -2.10510719e-18 C23 -1.72085724e-17 C25 -6.54597796e-17 C27 -5.07156224e-16 C29 2.40777254e-21 C31 -7.37699659e-20 C33 -4.93733371e-20 C35 -5.90518489e-19 C36 -5.44571997e-24 C38 2.69780228e-23 C40 5.40783661e-22 C42 3.24022215e-21 C44 2.01631362e-21 C46 -6.07888482e-27 C48 -7.49518312e-26 C50 -1.66133573e-24 C52 -2.48750949e-24 C54 2.7541757e-23 C55 1.68056275e-28 C57 -9.93143804e-28 C59 -3.48647074e-26 C61 -1.7133292e-25 C63 -4.37862126e-25 C65 -6.51491379e-25 C67 4.47789983e-32 C69 -3.30460184e-30 C71 -2.86171268e-29 C73 -8.24283491e-29 C75 5.43097225e-28 C77 -4.81328747e-27 C78 -2.89515116e-33 C80 -4.18838882e-34 C82 7.77362866e-31 C84 6.02406571e-30 C86 1.7978381e-29 C88 3.55782873e-29 C90 2.64373696e-29 C92 9.19120412e-36 C94 9.26188219e-35 C96 1.19621996e-33 C98 8.08623934e-33 C100 1.47809576e-32 C102 -3.55997227e-32 C104 3.1090208e-31 C105 2.67975563e-38 C107 2.03078805e-37 C109 -8.59872114e-36 C111 -1.02505694e-34 C113 -5.0342641e-34 C115 -1.00591406e-33 C117 -1.82981152e-33 C119 -2.38338011e-34 C121 -1.38642608e-40 C123 -1.03040115e-39 C125 -1.36805073e-38 C127 -1.11210791e-37 C129 -6.57934784e-37 C131 -3.32236959e-37 C133 1.49819403e-36 C135 -1.08346562e-35 C136 -1.30762094e-43 C138 -2.06529392e-42 C140 4.52485792e-41 C142 7.86112131e-40 C144 5.93873107e-39 C146 1.9502105e-38 C148 2.64507336e-38 C150 5.50180816e-38 C152 -2.26248121e-38 C154 5.9754376e-46 C156 4.18150761e-45 C158 5.480236e-44 C160 4.12465429e-43 C162 4.30805464e-42 C164 1.35793052e-41 C166 -5.43497465e-42 C168 -2.24932805e-41 C170 1.53301954e-40 C171 2.64994998e-49 C173 6.28646061e-48 C175 -8.79786954e-47 C177 -2.19023361e-45 C179 -2.28653439e-44 C181 -1.23546817e-43 C183 -2.6406807e-43 C185 -2.52587553e-43 C187 -7.87973229e-43 C189 6.09888811e-43  Table 4a to Fig. 2 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00922820 658.50623636 AS 0.00000000 97.17790353 240.91836870 M9 0.00000000 129.04002638 103.98785767 M8 -0.00000000 -124.73123549 1183.75272279 M7 0.00000000 -54.73050888 1405.22682456 M6 0.00000000 167.37417480 1645.65938323 M5 -0.00000000 711.83033384 1858.66587001 M4 -0.00000000 1191.41146192 1869.12969813 M3 0.00000000 1526.70672980 1712.18337447 M2 0.00000000 1733.59027749 1461.54237562 M1 0.00000000 2053.09313223 606.44180118  Table 4b to Fig. 2 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 6.54892357 0.00000000 -0.00000000 AS -0.36370588 180.00000000 -0.00000000 M9 13.15846936 180.00000000 0.00000000 M8 87.95261706 0.00000000 0.00000000 M7 59.91946223 0.00000000 180.00000000 M6 34.23742580 0.00000000 -0.00000000 M5 11.28737404 -0.00000000 180.00000000 M4 -11.88699512 0.00000000 -0.00000000 M3 -37.67520124 -0.00000000 180.00000000 M2 -59.94609147 0.00000000 -0.00000000 M1 7.73129556 180.00000000 0.00000000

A total reflectivity of the projection optics 7 is about 8%.

The reference axes of the mirrors are usually opposite a normal to the image plane 9 tilted, as the tabulated tilt values make clear.

A boundary of a diaphragm surface of the diaphragm results from puncture points on the diaphragm surface of all the rays of the illumination light 3 , which propagate on the image side at the field center with a full image-side telecentric aperture in the direction of the diaphragm surface. When the aperture is designed as an aperture diaphragm, the boundary is an inner boundary. In the execution of the aperture as Obskurationsbrende it is at the boundary to an outer boundary. The aperture AS can be designed as an aperture and / or obscuration.

The aperture AS can be in one plane or three-dimensional. The extension of the aperture AS can be smaller in the scanning direction (y) than in the cross-scanning direction ( x ).

An overall length of the projection optics 7 in the z-direction, ie a distance between the object plane 5 and the picture plane 9 , is about 2300 mm.

A pupil obscuration is in the projection optics 7 18.4% of the total aperture of the entrance pupil. Less than 25% of the numerical aperture is due to the passage opening 17 so obscured. The construction of the obscurant boundary is analogous to that described above in connection with the diaphragm AS explained construction of the diaphragm boundary.

The unilluminated area within the system pupil may have a different extent in the x-direction than in the y-direction. The unilluminated area in the system pupil may be round, elliptical, square or rectangular. Other geometric shapes of the non-illuminated area in the system pupil are also possible, for example kidney-shaped. This non-illuminable area in the system pupil may also be decentered with respect to a center of the system pupil in the x-direction and / or in the y-direction.

The projection optics 7 has in the sagittal plane an intermediate image in the imaging beam path between the mirrors M8 and M9 , This sagittal intermediate image is in the 2 above the passage opening 17 that is, between the mirror M8 and the passage opening 17 arranged in the imaging light beam path. The projection optics 7 also has a first meridional intermediate image in the imaging beam path between the mirrors M4 and M5 and a second meridional intermediate image in the imaging beam path in the region of a reflection at the mirror M7 ,

Based on 3 Below is another embodiment of a projection optics 21 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 and 2 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M10 the projection optics 21 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies.

The following table again shows the mirror parameters of the mirrors M1 to M10 the projection optics 21 , M1 M2 M3 M4 M5 Max. Angle of incidence [°] 14.9 83.9 80.8 81.4 81.5 minute Angle of incidence [°] 11.3 73.5 75.3 77.5 76.9 Reflection surface extension in x-direction [mm] 647.1 380.5 319.8 333.5 396.4 Reflection surface extension in the y-direction [mm] 280.9 255.5 282.5 318.5 356.0 Max. Mirror diameter [mm] 647.8 380.6 338.8 417.6 434.2 M6 M7 M8 M9 M10 Max. Angle of incidence [°] 81.5 80.5 79.3 20.7 8.7 minute Angle of incidence [°] 72.9 73.0 70.8 0.0 4.3 Reflection surface extension in x-direction [mm] 394.8 344.3 263.0 286.1 842.1 Reflection surface extension in the y-direction [mm] 168.2 185.9 241.6 211.5 825.6 Max. Mirror diameter [mm] 395.1 346.2 293.6 286.3 842.2

A maximum angle of incidence on one of the NI mirrors of the projection optics 21 lies at the mirror M9 before and is 20.7 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 21 on the mirror M8 before and is at least 70.8 °.

In the projection optics 21 is the mirror M10 larger than the projection optics 7 , Also the mirror M9 is in the projection optics 21 in the meridional plane yz significantly more extensive than in the projection optics 7 ,

The optical design data of the projection optics 21  can be taken from the following tables, which in their structure the tables for projection optics 7  to 2  correspond.  Table 1 to Fig. 3rd wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Field size x 26.0 mm Field size y 1.6 mm curvature of field 0.0125 1 / mm RMS 10.01 mλ cover AS CRA 5.1 ° etendue 12.58 mm ² transmission 7.9% Pos. EP (x) -2464.36 mm Pos. EP (y) -2283.98 mm Object image offset 2449.60 mm working distance 80 mm Field spacing 2300.08 mm obscuration 18% Space-square (842 × 2821 × 1820) mm ³  Table 2 to FIG. 3 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M10 -829.6013478 0.0023965 -786.1814427 0.0025591 REFL M9 1120.7047696 -0.0017846 440.9282906 -0.0045359 REFL M8 -1278.4346000 0.0003935 29104.8612729 -0.0002732 REFL M7 -840.0071060 0.0005430 -3974.9615755 0.0022060 REFL M6 -1111.4629091 0.0004173 -2087.8671419 0.0041310 REFL M5 -1317.0410959 0.0002830 -4828.2987231 0.0022227 REFL M4 -5895.7771695 0.0000575 -10932.9972265 0.0010793 REFL M3 1352.7808585 -0.0003046 -9303.6992203 0.0010433 REFL M2 1151.7992351 -0.0003820 1912.5996857 -0.0047526 REFL M1 -1992.2096706 0.0009805 -1304.2918636 0.0015700 REFL  Table 3a to Fig. 3rd coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -829.60134780 1120.70477000 -1278.43460000 C7 -8.09786335e-10 -7.11091698e-07 3.46626575e-08 C9 3.79051496e-08 2.81585974e-06 4.3297486e-07 C10 -2.21674703e-11 1.69814968e-09 -3.95311431e-10 C12 -5.05166156e-11 3.38325781e-09 6.43992068e-10 C14 -1.18264071e-11 1.36532332e-08 2.03654328e-09 C16 -3.33121804e-15 -9.66357891e-13 4.9231347e-13 C18 4.3560301e-14 8.22574351e-12 5.36562988e-12 C20 4.64848352e-14 8.39529032e-11 1.10601178e-11 C21 -4.07773304e-17 6.95317119e-15 -5.27924516e-16 C23 -1.35283166e-16 4.22376866e-14 6.01489172e-15 C25 -1.27152132e-16 1.2474526e-13 3.7188555e-14 C27 -2.66873434e-17 5.464611e-13 6.68003948e-14 C29 -6.65825124e-21 -2.97379148e-17 1.67998958e-17 C31 5.7249816e-20 1.2276433e-16 5.75862781e-17 C33 1.22435517e-19 1.00712867e-15 2.65553651e-16 C35 6.28259003e-20 3.75278685e-15 4.38508313e-16 C36 -6.17860294e-23 4.99175343e-20 1.23708775e-20 C38 -2.7396629e-22 2.04437423e-19 -3.28217435e-19 C40 -4.1816437e-22 1.62351315e-18 -4.3476124e-20 C42 -2.43238915e-22 8.69047389e-18 1.88069831e-18 C44 -4.25699219e-23 2.57086506e-17 3.20126101e-18 C46 -1.67359824e-26 -1.32785883e-22 -3.01130998e-21 C48 6.54854095e-26 4.97668741e-22 -5.74443126e-21 C50 2.62896825e-25 1.4196519e-20 3.37591987e-21 C52 2.74801909e-25 7.36420301e-20 1.62200127e-20 C54 1.24508614e-25 2.05063224e-19 2.42584233e-20 C55 -1.1921175e-28 -4.57746352e-26 -3.60418812e-24 C57 -6.35792845e-28 3.38918799e-24 8.52919859e-23 C59 -1.3327336e-27 2.53663192e-23 1.5609957e-22 C61 -1.3604347e-27 1.76617624e-22 1.68313506e-22 C63 -7.89011559e-28 8.68515231e-22 1.59121011e-22 C65 -2.16947901e-28 2.29466482e-21 1.62741448e-22 C67 4.78638417e-32 -5.23182369e-27 3.75344692e-25 C69 2.69652709e-31 -3.9044164e-26 1.37883076e-24 C71 5.53097167e-31 -6.56410474e-26 4.51888159e-25 C73 6.71810654e-31 1.41475156e-24 6.43867157e-25 C75 4.71697342e-31 9.57934468e-24 1.29976471e-24 C77 -2.43714635e-31 1.98683952e-23 1.20347908e-24 C78 1.01312977e-34 3.5780827e-29 6.10638583e-28 C80 3.7893513e-34 1.44517483e-28 -1.16142838e-26 C82 6.53545409e-34 -6.20458421e-28 -2.57068881e-26 C84 1.32678997e-33 -2.13657415e-27 -3.07201649e-26 C86 1.77480689e-33 6.07707214e-27 -1.33513359e-26 C88 2.47289665e-33 3.8600002e-26 9.93790635e-27 C90 1.00311705e-33 2.80222221e-26 1.56310509e-26 C92 -4.5525436e-37 2.02879871e-31 -2.42624078e-29 C94 -1.41234879e-36 3.29954951e-30 -1.52507538e-28 C96 -2.84212276e-37 2.25149858e-29 -1.02973065e-28 C98 3.65083989e-36 6.70273052e-29 -4.03241108e-29 C100 4.26300269e-36 2.67538218e-29 -9.90662625e-29 C102 1.8746264e-36 -3.17345099e-28 9.5084997e-29 C104 2.87132644e-36 -8.12432399e-28 2.04276357e-28 C105 -1.65305941e-39 -1.40477571e-33 -5.54022172e-32 C107 -1.07829604e-38 -1.52470956e-32 8.95559546e-31 C109 -3.0335475e-38 2.38811324e-32 2.50275577e-30 C111 -5.44783497e-38 3.34939095e-31 3.62379596e-30 C113 -5.96302271e-38 7.98449162e-31 2.58049637e-30 C115 -4.13251381e-38 8.19120014e-31 4.99233641e-31 C117 -2.53470214e-38 1.05500507e-30 9.07452607e-31 C119 -5.81039401e-39 3.40081485e-30 1.7906784e-30 C121 1.28114559e-42 -9.92940874e-36 7.45584301e-34 C123 6.20425866e-42 -1.44121678e-34 7.88361583e-33 C125 9.46928144e-42 -9.99523814e-34 1.04949092e-32 C127 -2.53596247e-42 -3.50395669e-33 2.06634109e-33 C129 -1.5059948e-41 -2.30097409e-33 9.69454261e-33 C131 -9.43908037e-42 2.66776135e-32 1.18498118e-32 C133 -1.68937603e-42 1.19749381e-31 6.36419232e-33 C135 -9.35907611e-42 1.84103523e-31 9.92720911e-33 C136 4.46934544e-45 3.33077617e-38 2.57887523e-36 C138 3.20136833e-44 7.3648806e-37 -3.53445231e-35 C140 9.66337034e-44 5.50936165e-37 -1.29869733e-34 C142 2.02350199e-43 -1.22536354e-35 -2.14488417e-34 C144 2.77691172e-43 -3.7158869e-35 -2.09201897e-34 C146 2.43072133e-43 1.5202727e-35 -2.53007898e-35 C148 1.42036643e-43 4.0809687e-34 9.19567591e-35 C150 8.34549204e-44 1.38522831e-33 2.87747187e-35 C152 1.33413331e-44 1.69286848e-33 3.38370141e-35 C154 -1.86305219e-48 1.53682613e-40 -7.93880965e-39 C156 -9.44479373e-48 2.44474597e-39 -1.5112134e-37 C158 -1.3254414e-47 1.8890391e-38 -3.56914411e-37 C160 2.45396135e-47 9.43994526e-38 -4.18041757e-38 C162 8.97095594e-47 2.96020208e-37 -3.04008418e-37 C164 1.0253375e-46 8.88580034e-37 -5.06997778e-38 C166 5.40393507e-47 2.77964822e-36 3.63433887e-37 C168 1.39523847e-47 6.72159967e-36 7.42498329e-38 C170 1.57144649e-47 6.82553494e-36 6.50885118e-38 C171 -7.36349757e-51 -3.22252353e-43 -4.80687219e-41 C173 -6.29769239e-50 -1.22470534e-41 5.47287696e-40 C175 -2.24034349e-49 -2.84499687e-41 2.71010867e-39 C177 -5.36030736e-49 1.90293384e-40 5.33355629e-39 C179 -8.66305362e-49 1.06294897e-39 6.31632125e-39 C181 -9.24573143e-49 2.48402082e-39 2.02123287e-39 C183 -6.53176329e-49 4.12188135e-39 3.11204983e-40 C185 -3.09033416e-49 6.9504792e-39 5.81907963e-40 C187 -1.44215627e-49 1.24197275e-38 8.24111929e-41 C189 -1.45990743e-50 1.07079728e-38 5.42787359e-41  Table 3b to Fig. 3rd coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -840.00710600 -1111.46290900 -1317.04109600 C7 2.93129805e-07 2.81284126e-07 5.52322191e-08 C9 1.35422241e-08 -4.56424966e-08 8.92340148e-08 C10 -1.04319837e-11 5.19115324e-11 -1.85215553e-10 C12 6.98065087e-10 1.39626883e-10 2.79116019e-11 C14 -1.07997282e-09 -3.21102314e-11 -6.83251513e-11 C16 3.30700323e-13 -4.06765135e-13 -2.73443943e-13 C18 -9.21257644e-13 -2.00446164e-13 1.07080845e-13 C20 1.84774979e-12 -2.14728178e-12 8.23054602e-14 C21 -1.73304177e-16 1.95905689e-16 1.79536687e-16 C23 1.38932396e-15 -7.81003208e-16 -5.83538936e-16 C25 6.67219907e-15 -1.0738849e-15 2.12786102e-16 C27 -1.56748099e-14 5.0883613e-15 -2.33234475e-16 C29 -1.04538546e-19 1.00125002e-18 1.45945674e-18 C31 4.20323934e-17 -7.00782969e-18 -1.17231109e-18 C33 -9.94255068e-18 -2.94859047e-17 -1.19537648e-19 C35 -3.38149895e-18 -7.53506382e-17 -6.12983858e-20 C36 -1.78724636e-20 -5.17192798e-22 -1.55527718e-21 C38 -4.83543341e-20 -1.60631851e-21 2.40964041e-22 C40 1.25693969e-20 6.13046841e-20 8.93449226e-21 C42 8.09030294e-19 4.13621051e-19 1.59888451e-20 C44 9.92242668e-19 4.4493054e-19 7.73481671e-21 C46 -1.53686764e-23 -2.54191449e-23 -2.92972641e-23 C48 -4.12329831e-21 1.28730932e-21 -5.70771963e-23 C50 -1.19343014e-20 7.581263e-21 -8.89672292e-24 C52 4.17780784e-21 1.14613008e-20 4.42455127e-23 C54 1.88985762e-20 1.78686294e-21 6.95215696e-24 C55 1.68919571e-24 9.67063942e-26 -4.94661385e-28 C57 1.2185934e-23 7.21236237e-25 3.69001879e-25 C59 -4.20064811e-24 -6.19504492e-24 -5.11632558e-25 C61 -7.23969978e-23 -6.3796585e-23 -1.72199492e-24 C63 -3.82660392e-22 -1.92061544e-22 -1.49112454e-24 C65 -3.50460277e-22 -8.64480139e-23 -1.06152859e-24 C67 -1.17732664e-27 2.02823674e-27 1.37109819e-27 C69 3.42263222e-25 -8.87870945e-26 4.02824414e-27 C71 2.15779216e-24 -7.991539e-25 2.7452612e-27 C73 1.59406057e-24 -2.46853688e-24 -3.83094177e-27 C75 -3.70693265e-24 -2.59631615e-24 -4.53013706e-27 C77 -1.47131584e-24 -1.04850333e-24 -2.84498377e-28 C78 -1.1016443e-28 -4.78867043e-30 1.44483891e-30 C80 -1.18607497e-27 -3.78189464e-29 -2.38019809e-29 C82 1.08988902e-27 4.35744283e-28 4.79328376e-30 C84 4.74501297e-27 5.60838579e-27 8.97774378e-29 C86 2.88656579e-26 2.25888425e-26 1.36305264e-28 C88 1.06224924e-25 4.97117863e-26 9.32468622e-29 C90 4.10232896e-26 7.98878937e-27 6.66717125e-29 C92 2.19555911e-31 -8.13682245e-32 -3.98162576e-32 C94 -1.41273492e-29 3.45204506e-30 -1.45279894e-31 C96 -1.64051496e-28 4.16478804e-29 -2.25274095e-31 C98 -3.2711466e-28 1.95080884e-28 4.53133028e-32 C100 9.57716351e-29 3.94585408e-28 2.79863136e-31 C102 7.04472084e-28 3.39551963e-28 2.29929584e-31 C104 -1.56431176e-28 1.26412928e-28 2.60728511e-32 C105 4.37652539e-33 1.28034657e-34 -7.24084914e-35 C107 6.44264056e-32 8.32395278e-34 7.64617361e-34 C109 -8.85872066e-32 -2.32011437e-32 5.34032722e-34 C111 -6.57848643e-31 -3.05084502e-31 -1.97203161e-33 C113 -8.71751591e-31 -1.50837115e-30 -5.66097168e-33 C115 -6.26903531e-30 -4.1078447e-30 -5.22918649e-33 C117 -1.55438714e-29 -7.1604135e-30 -3.43595181e-33 C119 2.47324309e-30 8.20058549e-32 -2.60374094e-33 C121 -8.2362209e-36 1.68363922e-36 6.51645153e-37 C123 2.67249339e-34 -7.14671941e-35 2.55555895e-36 C125 5.32906017e-33 -1.07901427e-33 6.29865795e-36 C127 2.22949719e-32 -6.73480079e-33 4.64373368e-36 C129 3.96467001e-33 -2.08836682e-32 -6.03313489e-36 C131 -1.45790744e-32 -2.99959743e-32 -7.85491259e-36 C133 -5.23808086e-32 -2.60380781e-32 -6.36201251e-36 C135 9.43023293e-33 -4.94117827e-33 -1.33650175e-36 C136 -9.6648295e-38 -1.66425438e-39 1.39481514e-39 C138 -1.82103877e-36 -6.1513055e-39 -1.24052843e-38 C140 2.0887919e-36 6.89299465e-37 -1.92669423e-38 C142 4.46841436e-35 9.35746005e-36 1.39865745e-38 C144 2.73649689e-35 5.43364363e-35 8.35592357e-38 C146 2.68825285e-34 1.73287692e-34 1.57854916e-37 C148 2.97613749e-34 3.77340597e-34 9.52751617e-38 C150 1.22801609e-33 5.10625195e-34 7.36562079e-38 C152 -7.11211343e-34 -4.90107199e-35 5.74681693e-38 C154 9.88679714e-41 -1.3814637e-41 -4.66232978e-42 C156 -1.67166039e-39 6.09211751e-40 -1.70199744e-41 C158 -5.87933488e-38 1.1063033e-38 -5.83198695e-41 C160 -4.8195922e-37 8.70903467e-38 -9.28077836e-41 C162 -2.17129257e-37 3.61027484e-37 -1.40512934e-41 C164 -9.50292614e-37 8.08412681e-37 1.1335795e-40 C166 4.20342242e-36 8.83179953e-37 7.72832249e-41 C168 -4.71392063e-36 9.36931084e-37 7.08722386e-41 C170 6.31507001e-36 -3.60998792e-37 3.62516882e-41 C171 9.00665366e-43 7.84198156e-45 -9.5589925e-45 C173 2.05779015e-41 -1.57024867e-44 8.18953208e-44 C175 -2.78648459e-42 -7.9248069e-42 1.94129351e-43 C177 -8.8904764e-40 -1.18066211e-40 1.60631163e-44 C179 -1.18507185e-39 -7.92448231e-40 -2.10613831e-43 C181 -6.0633341e-39 -3.07573929e-39 -1.3363462e-42 C183 2.38349068e-39 -7.31462545e-39 -1.55784799e-42 C185 -3.5821176e-38 -1.36226587e-38 -6.7357706e-43 C187 2.31217881e-38 -1.33726311e-38 -6.97418712e-43 C189 -7.20925488e-39 -1.07056173e-39 -6.12811224e-43  Table 3c to Fig. 3rd coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -5895.77716900 1352.78085900 1151.79923500 C7 1.85562442e-07 9.99996049e-08 -8.5486722e-09 C9 -4.06069882e-08 -1.9990628e-07 -9.21561033e-07 C10 -1.82661151e-10 2.75086314e-10 2.96979457e-11 C12 8.10458709e-11 4.64861299e-10 -2.10882799e-09 C14 -1.06959325e-10 1.58059951e-10 3.37944178e-09 C16 -2.93166759e-14 -4.27109405e-13 1.0622474e-12 C18 5.90460878e-13 -8.96626943e-13 1.30029205e-11 C20 -2.99981277e-13 -1.30618449e-12 -1.10227837e-11 C21 -1.29402114e-15 6.35496739e-16 9.55606914e-16 C23 -3.8807679e-16 1.51060485e-15 -4.84688474e-15 C25 1.75104207e-15 6.02895795e-15 -7.39702079e-14 C27 -8.90444971e-16 3.50168491e-15 2.46446861e-14 C29 -6.40863287e-19 -4.34189685e-18 -1.24642073e-17 C31 -3.32558593e-18 -1.05474604e-17 -1.25738304e-17 C33 7.87434899e-18 -2.07156555e-17 3.74200261e-16 C35 -3.56893841e-18 -1.62967156e-17 3.1133025e-17 C36 2.19030625e-21 -8.56987907e-21 1.75098143e-21 C38 2.52136456e-21 1.89677177e-20 1.02724432e-19 C40 -1.42082477e-20 6.38032719e-20 3.73038538e-19 C42 4.2574082e-20 1.31512362e-19 -1.48847933e-18 C44 5.27672421 e-21 7.88684816e-20 -8.0788052e-19 C46 -1.18641843e-23 6.14238693e-23 5.09899348e-23 C48 -8.68738636e-23 -3.93139222e-22 -8.09714942e-22 C50 -3.69406936e-22 -1.30895384e-21 -4.82320635e-21 C52 -2.3920112e-22 -1.94361528e-21 2.9350407e-21 C54 8.43818848e-23 -8.21834559e-22 7.82353931e-21 C55 -9.9297483e-26 1.30133624e-24 -2.39232602e-25 C57 2.23614605e-25 1.26538239e-24 -8.71719476e-25 C59 -1.51455936e-26 2.60023218e-24 4.5941426e-24 C61 1.40774397e-25 7.94627313e-24 2.75289517e-23 C63 -2.91411246e-24 6.71641478e-24 -1.45673913e-23 C65 -2.58524651e-24 3.26300021e-24 -8.04911619e-23 C67 2.99319865e-27 -8.97693499e-27 -1.23409896e-27 C69 2.09871361e-27 1.96145936e-26 2.17563235e-26 C71 2.76839065e-26 6.08340533e-26 1.14831747e-25 C73 3.35048272e-26 1.56037266e-25 1.54984079e-25 C75 5.8040407e-26 1.56190828e-25 -1.72960055e-27 C77 -1.51036648e-26 3.67791434e-26 4.56471833e-25 C78 7.16398611e-30 -7.21721743e-29 1.10986765e-29 C80 -3.00490707e-29 -1.35210358e-28 3.00707281e-29 C82 6.08607781e-30 -1.24551472e-28 -2.76564038e-28 C84 -5.98749531e-29 -6.32890857e-28 -8.24480381e-28 C86 -1.61406969e-28 -1.14368877e-27 4.34563e-28 C88 3.52645617e-28 -6.58621833e-28 7.7134868e-27 C90 1.97697974e-28 -2.81550847e-28 -1.0588895e-27 C92 -1.75439337e-31 4.84005928e-31 4.90522436e-32 C94 1.254504e-31 -1.1743734e-30 -6.26258437e-31 C96 -1.03942635e-30 -2.26334954e-30 -4.75634048e-30 C98 -2.09336836e-30 -7.76464982e-30 -1.88548199e-29 C100 -3.01223187e-30 -1.56244033e-29 -3.62986138e-29 C102 -5.03309113e-30 -1.19048124e-29 -8.07419494e-29 C104 1.01376894e-30 -1.88089911e-30 3.35284695e-29 C105 -3.76346175e-34 1.74509098e-33 -2.78081815e-34 C107 1.70442005e-33 8.21426187e-33 -8.31243218e-34 C109 1.19934958e-34 5.60104077e-33 1.07624567e-32 C111 1.81907328e-33 2.86456139e-32 5.40823479e-32 C113 9.49654288e-33 9.65957347e-32 7.03631637e-32 C115 1.63872801e-32 1.30542751e-31 -7.52575309e-32 C117 -1.76360233e-32 7.42184734e-32 -3.5726521e-32 C119 -8.36202838e-33 2.47764192e-32 -4.25626392e-31 C121 5.24607614e-36 -1.23846798e-35 -1.21710746e-36 C123 -6.8580402e-36 3.67979577e-35 9.56871017e-36 C125 1.45621084e-35 1.86500768e-35 1.02920594e-34 C127 6.17409349e-35 3.01783518e-35 4.80203739e-34 C129 6.808064e-35 2.40762891e-34 1.9619567e-33 C131 1.60684405e-34 4.04566489e-34 3.656584e-33 C133 2.19246437e-34 2.16489708e-34 3.07432582e-33 C135 -3.8211526e-35 -4.17214661e-35 -7.79825913e-36 C136 6.77248172e-39 -1.21590252e-38 3.5304421e-39 C138 -3.41063774e-38 -2.52145972e-37 6.2308374e-39 C140 -3.75935735e-38 -1.0802611e-37 -2.31914783e-37 C142 3.87691722e-38 -2.49347565e-37 -1.63696977e-36 C144 -2.72868902e-37 -1.82379413e-36 -3.61876846e-36 C146 -4.19376269e-37 -4.6417351e-36 -8.10399723e-36 C148 -9.42769091e-37 -4.74669378e-36 -6.45349342e-36 C150 4.06521553e-37 -2.23762351e-36 -4.94230553e-37 C152 1.58989914e-37 -4.85580623e-37 2.57249929e-35 C154 -6.92442617e-41 1.12492414e-40 1.19933e-41 C156 1.01938472e-40 -5.03840668e-40 -4.28637191e-41 C158 -7.6043822e-41 2.25232106e-40 -8.7184863e-40 C160 -4.57762101e-40 1.87539537e-39 -3.36536913e-39 C162 -1.1390532e-39 4.78912296e-39 -2.67269635e-38 C164 -7.95252705e-40 4.01500595e-39 -6.49341056e-38 C166 -3.75504718e-39 2.02043299e-39 -1.06504622e-37 C168 -3.56497235e-39 2.21602309e-39 -9.73946324e-38 C170 5.80499057e-40 2.6453229e-39 -1.47885174e-37 C171 -5.41693204e-44 -9.94990843e-44 -1.75338298e-44 C173 1.20147193e-43 3.14803579e-42 6.20025602e-44 C175 1.05961354e-42 8.85585945e-43 2.12044719e-42 C177 -2.01376803e-42 -3.86938621e-42 1.68975342e-41 C179 4.11363772e-42 -2.83025419e-42 4.97365052e-41 C181 2.41023939e-42 1.1983518e-41 1.69831024e-40 C183 1.00066555e-41 3.78160173e-41 3.19971229e-40 C185 2.05956596e-41 3.07898327e-41 3.85685598e-40 C187 -2.78175452e-42 7.08172531e-42 2.78284834e-40 C189 -8.53880777e-43 -4.10745227e-42 2.61695515e-40  Table 3d to Fig. 3 coefficient M1 KY 0.00000000 KX 0.00000000 RX -1992.20967100 C7 -4.25700702e-08 C9 -4.63738814e-09 C10 -6.48340323e-12 C12 4.73172e-11 C14 4.19558987e-12 C16 1.5862854e-14 C18 -1.79361677e-14 C20 -1.54635866e-13 C21 -1.69902835e-19 C23 1.91699367e-17 C25 -1.63498192e-16 C27 1.33939935e-16 C29 1.58313507e-20 C31 -5.56281915e-21 C33 -2.38615255e-20 C35 2.42527459e-19 C36 -4.06214592e-24 C38 2.63844178e-23 C40 3.41624113e-22 C42 4.36163788e-21 C44 -3.92984919e-21 C46 -1.10727508e-25 C48 -2.3815276e-24 C50 -2.0114821e-23 C52 -8.47297785e-23 C54 -5.10334171 e-23 C55 2.22984942e-28 C57 -2.63639952e-28 C59 -2.23446783e-26 C61 -1.91543569e-25 C63 -7.56027873e-25 C65 -6.68433414e-25 C67 2.33056754e-30 C69 4.90627324e-29 C71 5.42914638e-28 C73 3.51054151e-27 C75 8.86211676e-27 C77 3.54353394e-27 C78 -4.00414331e-33 C80 -6.24298316e-33 C82 3.63396124e-31 C84 4.92390792e-30 C86 2.8410855e-29 C88 8.85071665e-29 C90 8.3554444e-29 C92 -3.00045678e-35 C94 -5.86113358e-34 C96 -6.80215748e-33 C98 -6.78364428e-32 C100 -3.2713124e-31 C102 -6.01508706e-31 C104 -7.85415189e-32 C105 3.87702048e-38 C107 1.51790053e-37 C109 -2.6650454e-36 C111 -6.36728159e-35 C113 -5.64355807e-34 C115 -2.55099775e-33 C117 -6.10178996e-33 C119 -5.13257311e-33 C121 2.06435329e-40 C123 3.73477708e-39 C125 4.06446023e-38 C127 4.74850298e-37 C129 4.1608161e-36 C131 1.44259375e-35 C133 2.10850556e-35 C135 -3.07354376e-36 C136 -1.93991312e-43 C138 -1.1166761e-42 C140 6.89936035e-42 C142 2.98248781e-40 C144 4.96125714e-39 C146 3.06866344e-38 C148 1.19864646e-37 C150 2.11822934e-37 C152 1.64100526e-37 C154 -5.81733558e-46 C156 -9.76693315e-45 C158 -1.04497901e-43 C160 -1.11537744e-42 C162 -1.44312349e-41 C164 -9.73250259e-41 C166 -2.42760785e-40 C168 -3.03493392e-40 C170 1.33117689e-40 C171 3.9048724e-49 C173 2.86373277e-48 C175 -4.44099821e-48 C177 -3.52871439e-46 C179 -1.25140089e-44 C181 -1.41941709e-43 C183 -6.50179615e-43 C185 -2.26958159e-42 C187 -2.77608337e-42 C189 -2.17065899e-42  Table 4a to FIG. 3 surface DCX DCY DCZ image plane 0.00000000 0.00000000 732.71934563 M10 0.00000000 0.00000000 732.71934563 AS 0.00000000 100.51203440 277.25118743 M9 0.00000000 139.05684188 102.58620751 M8 -0.00000000 -107.11820229 1218.12321390 M7 -0.00000000 -32.97461410 1462.18796767 M6 -0.00000000 183.30851628 1691.50115750 M5 0.00000000 671.47590094 1874.50874752 M4 0.00000000 1330.78101011 1856.73925216 M3 0.00000000 1681.11046892 1721.40359729 M2 0.00000000 1999.53912600 1410.06678813 M1 0.00000000 2279.61122652 622.09168275  Table 4b to FIG. 3 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 6.22224713 0.00000000 -0.00000000 AS 0.36737836 180.00000000 0.00000000 M9 192.44449427 0.00000000 -0.00000000 M8 87.77320929 -0.00000000 0.00000000 M7 59.88844072 -0.00000000 -0.00000000 M6 33.61266212 -0.00000000 -0.00000000 M5 9.50325668 -0.00000000 -0.00000000 M4 -11.33294102 -0.00000000 -0.00000000 M3 -32.73842121 0.00000000 -0.00000000 M2 -57.39396942 0.00000000 -0.00000000 M1 187.28337933 0.00000000 -0.00000000

The projection optics 21 has a sagittal intermediate image again in the imaging beam path between the mirror M8 and the passage opening 17 , The two meridional intermediate images are also in the projection optics 21 on the one hand in the imaging beam path between the mirrors M4 and M5 and on the other hand in the area of reflection of the imaging light 3 at the mirror M7 ,

Based on 4 Below is another embodiment of a projection optics 22 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 3 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The projection optics 22 has a total of eleven mirrors M1 to M11 , The mirror M1 . M10 and M11 are called NI mirrors and the mirrors M2 to M9 executed as a GI mirror. The mirror M1 to M11 the projection optics 22 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 Max. Angle of incidence [°] 12.9 84.2 81.3 79.7 82.8 minute Angle of incidence [°] 7.3 71.6 75.1 74.3 76.2 Reflection surface extension in x-direction [mm] 606.4 362.8 309.5 301.8 430.9 Reflection surface extension in the y-direction [mm] 252.5 207.6 263.0 401.1 322.1 Max. Mirror diameter [mm] 606.4 363.0 327.2 405.0 434.2 M6 M7 M8 M9 M10 M11 Max. Angle of incidence [°] 84.2 81.4 84.1 82.9 23.1 8.7 minute Angle of incidence [°] 76.8 76.5 76.4 74.0 0.7 4.7 Reflection surface extension in x-direction [mm] 517.3 536.2 457.8 366.9 225.5 762.8 Reflection surface extension in the y-direction [mm] 261.9 332.3 227.6 259.9 201.1 751.3 Max. Mirror diameter [mm] 519.4 551.0 457.8 368.1 227.1 763.0

A maximum angle of incidence on one of the NI mirrors is in the projection optics 22 at the mirror M10 before and is there 23.1 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 22 on the mirror M8 before and is there 70.8 °.

The optical design data of the projection optics 22 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 4 wavelength 13.5 nm N / A 12:55 βx -4.00 βy 8:00 Feldgröße_x 26.0 mm Feldgröße_y 1.6 mm curvature of field 0.0125 1 / mm RMS 4.87 mλ cover AS CRA 5.1 ° etendue 12.58 mm ² transmission 6.5% Pos. EP (x) -1998.18 mm Pos. EP (y) -1714.72 mm Object-image offset 2417.33 mm working distance 82 mm Field spacing 2610.64 mm obscuration 20% Space-square (763 × 2751 × 2159) mm ³ Table 2 to Fig. 4 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M11 -718.0204223 0.0027625 -725.3246074 0.0027803 REFL M10 779.5492928 -0.0025654 490.8647891 -0.0040747 REFL M9 -1165.8944155 0.0003362 6786.9839967 -0.0015037 REFL M8 -864.5566800 0.0003927 -25990.5627797 0.0004533 REFL M7 -824.8600643 0.0004692 -2827.8818999 0.0036544 REFL M6 -1210.6172210 0.0003078 -2432.9792756 0.0044122 REFL M5 -3354.0056578 0.0001147 -8400.5627247 0.0012376 REFL M4 1460.5306490 -0.0002919 -2688.3425697 0.0034898 REFL M3 797.1734637 -0.0005220 -1843.3728843 0.0052142 REFL M2 937.5420379 -0.0004437 1485.1866129 -0.0064741 REFL M1 -1710.1154890 0.0011514 -1051.5978367 0.0019318 REFL Table 3a to Fig. 4 coefficient M11 M10 M9 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -718.02042230 779.54929280 -1165.89441500 C7 -3.60633801e-09 -1.04799825e-06 4.89093521e-07 C9 2.72059459e-08 9.91143171e-07 2.99594287e-07 C10 -1.75316908e-11 2.24558587e-09 1.38324449e-10 C12 -5.72041996e-11 3.97569905e-09 -2.61091239e-10 C14 -2.87698473e-11 5.64266873e-09 8.37805648e-10 C16 -1.86426518e-14 -4.83967383e-12 -1.14083175e-13 C18 2.20770958e-14 -5.10162841e-12 1.67486995e-12 C20 2.97951799e-14 1.46244672e-11 2.67223421e-12 C21 -4.2147889e-17 1.41139357e-14 -9.85253974e-17 C23 -1.81762008e-16 6.49225757e-14 9.55246611e-16 C25 -2.0182952e-16 6.33538443e-14 6.45241714e-15 C27 -6.52118111e-17 7.01432545e-14 8.70099342e-15 C29 -4.33120904e-20 -7.63273933e-17 5.63767895e-19 C31 -1.32495831e-20 -5.96868864e-17 7.42814793e-18 C33 7.51710926e-20 1.74080178e-16 3.90129965e-17 C35 5.63074867e-20 3.27580525e-16 3.02695057e-17 C36 -9.27076474e-23 1.36318882e-19 -1.51252903e-21 C38 -4.73490528e-22 5.66581206e-19 1.03498894e-20 C40 -7.86413466e-22 1.20999258e-18 6.5051199e-20 C42 -5.34555308e-22 1.49054828e-18 1.91942166e-19 C44 -1.4799692e-22 2.69530143e-18 1.0302749e-19 C46 -6.50718188e-26 -3.80665615e-22 4.8279215e-23 C48 -1.01725413e-25 -2.38368391e-21 9.26037017e-23 C50 9.66447564e-26 2.0719713e-21 4.13456439e-22 C52 2.32820508e-25 3.43562102e-21 5.1278053e-22 C54 9.57092768e-26 1.87041736e-20 -8.73462556e-22 C55 -1.46494125e-28 1.67107051e-24 6.14353752e-26 C57 -9.61811881e-28 9.40256637e-24 -6.23910073e-25 C59 -2.15835437e-27 1.99790398e-23 -3.82021499e-26 C61 -2.26284907e-27 4.44054856e-23 1.39902024e-24 C63 -1.15866666e-27 2.94339045e-24 -5.14981428e-24 C65 -1.53335853e-28 6.40263422e-23 -1.58144208e-23 C67 -2.81630799e-31 -1.96833271e-26 -1.92792146e-27 C69 -8.08215021e-31 -4.52878681e-26 -9.01010401e-28 C71 -4.12952119e-31 -7.97570374e-27 1.73161325e-27 C73 5.92795088e-31 2.08598585e-25 3.07478805e-27 C75 6.82611339e-31 -5.3403254e-27 -2.29971988e-26 C77 2.21320973e-31 1.51339246e-25 -2.92558806e-26 C78 -6.310589e-34 -5.3020081e-29 -1.53092524e-32 C80 -4.40192966e-33 1.78120336e-28 2.29143228e-29 C82 -1.18512029e-32 2.1884895e-28 8.81451898e-30 C84 -1.59606056e-32 -7.5601909e-29 2.02255615e-29 C86 -1.21927024e-32 7.23697294e-28 1.15640011e-28 C88 -5.26537405e-33 2.83357416e-27 5.77530783e-28 C90 -1.42639985e-33 4.97925918e-27 7.37323133e-28 C92 3.44552871e-37 1.57880518e-31 2.65651616e-32 C94 1.81871098e-36 -1.94741169e-31 3.57309607e-32 C96 2.73832674e-36 3.90530002e-31 6.76752126e-32 C98 1.78053024e-36 4.2569051e-31 2.9732501e-31 C100 1.08229377e-36 6.07494011e-30 1.68628649e-30 C102 7.0465454e-37 3.08344613e-29 5.52673414e-30 C104 -7.07332406e-38 4.52957261e-29 5.10196016e-30 C105 1.02184269e-39 2.01078367e-33 -1.27174384e-35 C107 7.1589231e-39 6.38030388e-33 -3.30220522e-34 C109 2.23856653e-38 2.5061656e-32 -6.55450286e-35 C111 3.49337993e-38 4.07490515e-32 3.76468692e-34 C113 3.34127909e-38 6.07315157e-32 2.26895427e-33 C115 2.09532232e-38 8.29231769e-32 6.54030492e-33 C117 8.7202269e-39 1.28779373e-31 1.40382251e-32 C119 3.01928601e-39 1.25916376e-31 1.00707517e-32 C121 -2.40088207e-42 0 0 C123 -1.42607584e-41 0 0 C125 -2.43649861e-41 0 0 C127 -1.22523579e-41 0 0 C129 1.24293232e-41 0 0 C131 1.78867486e-41 0 0 C133 7.11302386e-42 0 0 C135 1.30250563e-42 0 0 C136 -6.08564809e-45 0 0 C138 -5.39587952e-44 0 0 C140 -2.05606093e-43 0 0 C142 -4.19676043e-43 0 0 C144 -5.27774418e-43 0 0 C146 -4.28292981e-43 0 0 C148 -2.23951819e-43 0 0 C150 -7.05772885e-44 0 0 C152 -1.21095003e-44 0 0 Table 3b to Fig. 4 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -864.55668000 -824.86006420 -1210.61722100 C7 2.88991627e-07 1.97315981e-07 1.80888043e-07 C9 1.41812534e-08 -2.5743177e-08 -5.22889042e-08 C10 4.36629562e-11 -2.33737885e-11 -2.02707772e-10 C12 -4.92514433e-11 -1.15906037e-10 2.42225782e-10 C14 -4.52586787e-11 -1.33427176e-10 -1.18535784e-10 C16 3.20658136e-13 1.55952671e-13 -4.46770168e-13 C18 -7.82070972e-14 5.13081535e-13 5.09352866e-13 C20 -9.43150931e-14 2.4361971e-13 -9.84789336e-14 C21 1.06822529e-16 3.07251086e-17 -3.94594085e-17 C23 -4.88069708e-16 -3.35061941e-16 -1.18367281e-15 C25 -6.64825646e-16 -8.51526028e-16 3.64624101e-16 C27 -4.71770431e-17 1.65537581e-16 -3.91230523e-16 C29 2.58870533e-19 2.57079743e-19 7.16409397e-19 C31 -2.46376816e-18 5.77958271e-19 -1.7720313e-18 C33 2.94506715e-18 2.78461635e-18 4.95170687e-19 C35 -1.24101482e-18 -4.09045748e-18 -1.57761286e-18 C36 2.50041625e-22 4.92278775e-22 -9.44555481e-22 C38 -4.36606171e-21 -1.20343335e-21 1.26712904e-21 C40 1.591781e-20 -2.90965572e-21 -3.33414967e-21 C42 7.14816616e-21 -1.27960989e-21 -1.41942391e-21 C44 -8.42709465e-21 2.47550436e-23 -5.3719278e-22 C46 1.09734769e-23 1.8126232e-25 -8.77607625e-26 C48 6.63334172e-23 9.12798832e-24 -1.91648779e-24 C50 1.55631624e-23 -4.02361787e-24 -4.15092666e-24 C52 2.21932895e-22 1.96620408e-23 -2.40535665e-23 C54 -3.8923367e-22 7.45352779e-23 8.71718331e-23 C55 1.57128541e-26 -6.03923972e-27 7.07187144e-27 C57 1.81916099e-25 -8.54985603e-27 8.91263922e-27 C59 3.5720505e-25 -2.44695598e-26 7.59582324e-26 C61 2.45974257e-25 6.74837273e-26 2.3063553e-25 C63 -5.0495252e-24 -5.32176444e-25 -1.18282681e-25 C65 2.55778247e-25 4.7359078e-25 -4.28985682e-25 C67 -1.07141855e-28 1.30199628e-29 -1.24618229e-30 C69 -6.12631021e-28 1.39348364e-29 4.97422945e-30 C71 2.36115335e-27 9.71911885e-29 6.32059621e-29 C73 -2.50412792e-26 1.22767711e-28 -1.14189439e-27 C75 -2.59192364e-26 2.60555982e-27 1.22884941e-27 C77 2.70667316e-26 -7.49289464e-27 -4.49541865e-27 C78 -2.93133329e-31 5.11671278e-32 -2.0873647e-32 C80 -4.25240444e-30 8.23755259e-32 -4.79382638e-32 C82 -1.35444776e-29 1.20362908e-31 -1.52404104e-30 C84 -6.82327729e-29 -1.35035033e-30 -6.70310756e-30 C86 -6.13262589e-30 -1.77868158e-30 -4.08828211e-30 C88 1.53003577e-28 -2.56912121e-30 -2.16044229e-29 C90 -1.80429826e-29 3.41145359e-29 2.82458216e-29 C92 2.34308108e-34 -6.80013688e-35 -3.08002408e-35 C94 -9.88397626e-33 -4.92051765e-34 9.39433204e-34 C96 -2.48184258e-31 -5.23033519e-34 5.27544627e-33 C98 -1.16528126e-31 8.15909565e-33 5.1021012e-32 C100 1.17061433e-30 4.28397054e-34 1.79623305e-31 C102 1.00631066e-30 -9.10310909e-33 -7.52509035e-32 C104 -1.2700313e-30 -7.13446043e-32 5.62722251e-32 C105 2.11612752e-36 -2.24439388e-37 -1.74394984e-38 C107 2.77975238e-35 -7.04691409e-38 -1.03058153e-37 C109 -1.32665938e-34 1.10239225e-36 2.20472633e-36 C111 -6.3633581e-34 -2.47305185e-38 -3.28666092e-37 C113 9.81941737e-34 -1.47302218e-35 -2.10466325e-34 C115 3.10068559e-33 9.8891862e-36 -6.42096295e-34 C117 1.31559618e-33 1.57355792e-35 1.16473756e-33 C119 -3.88536354e-33 5.9187555e-35 -1.08770771e-33 Table 3c to Fig. 4th coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -3354.00565800 1460.53064900 797.17346370 C7 -5.85560431e-08 3.54699566e-07 6.04200657e-08 C9 6.36468044e-08 -2.84881013e-08 -7.58781826e-08 C10 -3.75555362e-11 9.34402839e-11 4.93534674e-10 C12 -2.55205619e-10 -2.67132766e-11 -5.69882185e-11 C14 1.23244842e-10 -1.10062641e-10 -1.86452012e-10 C16 9.38641182e-14 5.34677585e-13 -7.59125978e-13 C18 -7.14254817e-13 1.08553238e-12 5.06343897e-13 C20 2.60882363e-13 1.29681798e-13 -1.25220087e-12 C21 4.20276442e-17 -2.85718128e-15 1.12134222e-15 C23 2.78075832e-16 -2.45756918e-15 -1.11103248e-15 C25 -5.19544262e-16 -1.62842234e-15 1.90570058e-15 C27 3.28631407e-16 -3.96739247e-16 -4.79532068e-15 C29 1.63155004e-18 -1.67839594e-18 -1.43033019e-18 C31 -5.7934585e-18 9.74652257e-18 2.5527037e-18 C33 1.99074704e-18 3.07066558e-18 1.84470382e-17 C35 -2.17329633e-18 1.74635814e-18 -8.54468864e-18 C36 -6.8583707e-22 -1.787162e-20 1.20754024e-20 C38 1.72356595e-20 -2.47686689e-20 -7.60576336e-21 C40 -3.28964483e-20 -1.88155543e-20 -1.59054374e-20 C42 1.25708447e-20 -2.07131468e-20 3.94514579e-20 C44 7.71600018e-21 -3.60170311e-21 8.02343652e-20 C46 1.56612389e-24 1.7832602e-22 -1.32321643e-22 C48 1.19986621e-22 1.27667042e-22 -1.28500267e-22 C50 2.02233386e-23 6.09480432e-23 -2.57179441e-22 C52 -5.87463144e-23 5.27911699e-23 -9.53492324e-22 C54 1.07498678e-22 1.19930624e-23 1.56909275e-22 C55 -3.30655908e-26 -1.15926964e-24 -3.99398087e-25 C57 -3.19922023e-26 -7.26877836e-25 2.97250404e-25 C59 -2.44232764e-25 -5.06265295e-25 3.73927179e-25 C61 1.31060729e-25 -5.22229251e-25 1.80851993e-24 C63 -1.77732509e-24 -1.17062885e-25 -2.01150803e-24 C65 -9.31389835e-25 3.79129614e-26 -2.8165857e-24 C67 -3.5111279e-28 -1.89389248e-27 4.99436635e-27 C69 5.57932533e-28 -1.80702804e-27 5.25296084e-27 C71 -2.94269375e-27 2.18872215e-27 6.37760708e-27 C73 4.59337117e-27 1.87189721e-27 2.47966457e-26 C75 5.70441692e-27 9.3525416e-29 4.83926655e-26 C77 -1.31168911e-27 -1.89606922e-29 -4.03871767e-27 C78 4.63220874e-32 5.01114259e-30 1.01660918e-29 C80 -3.31572136e-30 1.62120446e-29 -1.6337543e-29 C82 8.62323359e-30 1.46356132e-29 -2.47831252e-29 C84 -1.00496729e-29 -9.02383716e-30 -3.79948395e-29 C86 2.27675206e-30 5.7418806e-31 -1.19831659e-28 C88 5.21043939e-29 3.09853442e-31 -5.39297865e-29 C90 2.11313245e-29 -1.24620094e-30 1.89912141e-29 C92 3.06892304e-33 1.56059147e-32 -9.94464641e-32 C94 -6.270269e-33 3.51035599e-33 -1.15885542e-31 C96 4.32278303e-32 3.15137399e-32 -2.21452961e-31 C98 4.40388721e-32 -2.698398e-32 -1.61198269e-31 C100 -7.16320023e-32 -5.36956526e-33 -6.84334024e-31 C102 -6.72995698e-32 4.52801077e-33 -7.51415552e-31 C104 7.97042974e-33 4.39450904e-34 2.31115963e-31 C105 1.11925165e-36 -2.73049308e-34 -4.15760165e-35 C107 1.79249126e-35 -1.58099e-34 4.82619483e-34 C109 -6.8322663e-35 -6.57593957e-34 8.45230989e-34 C111 -1.00864549e-34 1.40872901e-35 8.41412317e-34 C113 -1.89510636e-36 1.17338938e-34 1.15852951e-33 C115 -4.47912285e-34 -2.50576836e-35 3.41609956e-33 C117 -8.00726526e-34 -9.40901927e-36 2.08268689e-33 C119 -2.45872874e-34 8.01460764e-36 -9.68078929e-34 Table 3d to FIG. 4 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 937.54203790 -1710.11548900 C7 -3.27114279e-07 -8.28925235e-08 C9 -9.43051949e-07 5.10084395e-08 C10 7.84534704e-11 -1.25763686e-11 C12 -3.54977629e-10 1.20785355e-10 C14 3.39810722e-09 -1.88039812e-10 C16 -5.22134516e-13 -2.4061252e-17 C18 3.55058244e-12 -2.28528992e-13 C20 -1.61681343e-11 6.39925345e-13 C21 3.19332586e-16 -4.54608885e-18 C23 -3.05454067e-16 -5.18740997e-17 C25 -1.58307676e-14 6.89854912e-16 C27 8.6605816e-14 -1.09985593e-15 C29 -5.09491204e-18 -7.79360723e-21 C31 1.7180173e-17 5.89143726e-20 C33 1.13686851e-16 -1.9854311e-18 C35 -6.2681985e-16 5.3085552e-18 C36 -2.83424281e-21 2.0897681e-24 C38 5.18717421e-20 -3.49419552e-23 C40 -1.21607725e-20 -1.01666948e-21 C42 -1.41052815e-18 6.42012159e-21 C44 5.46458932e-18 -4.02389073e-20 C46 7.1222751e-24 -5.1110991e-26 C48 -1.99606202e-22 -5.78775789e-26 C50 -1.33946082e-21 4.82703483e-24 C52 1.69275966e-20 -5.04301416e-23 C54 -4.52599645e-20 6.82001759e-23 C55 6.22889841e-26 -6.98934986e-29 C57 -6.22103658e-26 -1.3281816e-28 C59 2.21606762e-25 3.42260383e-27 C61 1.81947736e-23 1.07137537e-26 C63 -1.72000759e-22 4.51282961e-25 C65 3.50889501e-22 3.39266636e-25 C67 3.0052677e-28 2.88213461e-31 C69 -2.45399237e-28 -1.23998752e-30 C71 -1.22683598e-26 -1.56842139e-29 C73 -1.8406694e-25 1.0966102e-28 C75 1.46240103e-24 -9.19518136e-28 C77 -2.47441879e-24 7.06873576e-27 C78 -7.65116062e-31 4.5122827e-34 C80 -5.49918978e-32 9.1956364e-34 C82 -1.06667035e-29 -7.00641435e-33 C84 2.03867727e-28 -3.14642883e-31 C86 1.8645668e-27 -3.57753344e-30 C88 -9.84070904e-27 -6.2253275e-30 C90 1.1998373e-26 -7.49748819e-29 C92 -3.93212564e-33 -7.55935956e-37 C94 -1.00756052e-33 9.98116068e-36 C96 5.93207705e-31 1.0923806e-34 C98 -4.56386277e-31 7.07405698e-35 C100 -1.26091721e-29 4.98170317e-33 C102 4.32628953e-29 -3.47544497e-32 C104 -2.8756268e-29 4.11466243e-32 C105 1.1978665e-36 -1.09489785e-39 C107 -2.81456175e-35 3.55571503e-39 C109 -9.10548189e-35 2.0570816e-38 C111 -5.03748271e-33 1.72128789e-36 C113 -2.77629617e-33 1.47688946e-35 C115 3.4115601e-32 6.29413784e-35 C117 -8.58200282e-32 3.56955268e-34 C119 1.92998645e-32 8.55295059e-34 Table 4a to FIG. 4 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M11 0.00000000 0.00000000 668.02588077 AS 0.00000000 105.61938130 264.58414909 M10 0.00000000 145.46070351 112.39946645 M9 0.00000000 -138.41707238 1096.19329807 M8 0.00000000 -100.55248306 1413.23237690 M7 0.00000000 15.17712546 1650.68375045 M6 0.00000000 435.59818420 2031.23337693 M5 0.00000000 944.54694267 2217.19719198 M4 0.00000000 1403.36382365 2198.93943245 M3 0.00000000 1905.03586545 1950.46450782 M2 0.00000000 2119.13349356 1692.46854257 M1 0.00000000 2283.04672185 1075.95308755 Table 4b to FIG. 4 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M11 7.33527736 0.00000000 -0.00000000 AS -3.39267450 180.00000000 -0.00000000 M10 195.38313433 -0.00000000 -0.00000000 M9 94.64251431 -0.00000000 0.00000000 M8 73.60276389 0.00000000 -0.00000000 M7 53.08322253 0.00000000 -0.00000000 M6 31.11096674 0.00000000 -0.00000000 M5 8.89646273 0.00000000 -0.00000000 M4 -14.31384671 0.00000000 -0.00000000 M3 -38.33068794 0.00000000 -0.00000000 M2 -62.71182104 0.00000000 -0.00000000 M1 184.94402985 -0.00000000 0.00000000

The projection optics 22 has a sagittal intermediate image in the imaging beam path between the mirror M9 and the passage opening 17 and has three meridional intermediate images, namely a first intermediate image in the meridional plane in the imaging beam path between the mirrors M3 and M4 , a second meridional intermediate image in the imaging beam path between the mirrors M5 and M6 and a third meridional intermediate image in the imaging beam path in the region of a reflection at the mirror M8 ,

Based on 5 Below is another embodiment of a projection optics 23 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 4 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The projection optics 23 has a total of eight mirrors M1 to M8 , The mirror M1 . M4 . M7 and M8 are called NI mirrors and the mirrors M2 . M3 . M5 and M6 are designed as GI mirrors.

The mirror M2 and M3 form a directly in the beam path of the imaging light 3 successively arranged mirror pair. Also the mirrors M5 and M6 form one in the beam path of the imaging light 3 directly behind each other arranged mirror pair.

The mirror pairs M2 . M3 on the one hand and M5 . M6 on the other hand reflect the picture light 3 so that the angles of failure of the individual rays 15 on the respective mirrors M2 . M3 respectively M5 . M6 add up to these two mirror pairs. The second mirror M3 and M6 of the respective mirror pair M2 . M3 and M5 . M6 thus reinforces a deflecting effect, which is the first mirror M2 . M5 on the respective single beam 15 exercises. This arrangement of the mirrors of the mirror pairs M2 . M3 respectively M5 . M6 corresponds to those in the DE 10 2009 045 096 A1 is described for a lighting optics.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 20.6 82.8 80.9 14.1 83.2 83.2 20.2 8.5 minute Angle of incidence [°] 18.8 70.0 71.9 10.4 71.8 72.8 0.0 4.5 Reflection surface extension in x-direction [mm] 446.6 368.2 428.3 656.6 281.7 146.7 300.1 806.6 Reflection surface extension in the y-direction [mm] 232.0 292.3 366.5 230.7 225.4 234.2 190.3 786.6 Max. Mirror diameter [mm] 446.9 368.7 432.0 656.7 296.3 247.0 300.3 806.8

A maximum angle of incidence on one of the NI mirrors is in the projection optics 23 on the mirror M1 before and is there 20.6 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 23 on the mirror M2 before and is there 70.0 °.

The optical design data of the projection optics 23 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 5 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Feldgröße_x 26.0 mm Feldgröße_y 1.6 mm curvature of field 0.0125 1 / mm RMS 8.82 mλ cover AS CRA 5:39 ° etendue 12.58 mm ² transmission 10.08% Pos. EP (x) 2596.16 mm Pos. EP (y) 8123.64 mm Object-image offset 1684.70 mm working distance 80 mm Field spacing 2156.08 mm obscuration 18.3% Space-square (807 × 2802 × 1726) mm ³ Table 2 to Fig. 5 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -800.8188166 0.0024758 -754.2797839 0.0026747 REFL M7 1129.0521447 -0.0017714 475.0594198 -0.0042101 REFL M6 14691.7963723 -0.0000294 -9763.8050741 0.0009497 REFL M5 5204.3670055 -0.0000814 112126.0700408 -0.0000842 REFL M4 -2268.8207102 0.0008621 -1544.9954040 0.0013237 REFL M3 8567.2109351 -0.0000539 -3890.1307758 0.0022275 REFL M2 1820.6443546 -0.0002529 -10432.6615787 0.0008326 REFL M1 -2180.2546420 0.0008622 -1398.8203950 0.0015212 REFL Table 3a to Fig. 5 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -800.81881660 1129.05214500 14691.79637000 C7 -1.63729031e-08 1.38287746e-06 -3.28435472e-08 C9 6.84673663e-10 3.91097061e-07 5.56712184e-08 C10 -2.30328894e-11 1.46544654e-09 5.40729471e-11 C12 -6.56726399e-11 6.43271546e-09 4.40788801e-11 C14 -2.9733984e-11 5.74492628e-09 -1.51698055e-10 C16 -3.21643739e-14 7.86021828e-12 -2.10197561e-13 C18 -3.66681665e-14 2.10311618e-11 5.82828123e-14 C20 -8.81665591e-15 1.01439088e-11 8.50378098e-13 C21 -4.57637202e-17 6.50749699e-15 -2.49546773e-15 C23 -1.737599e-16 6.32146592e-14 -6.256823e-16 C25 -1.85865843e-16 1.22707551e-13 -4.53113055e-16 C27 -6.3747799e-17 8.63062553e-14 -1.92548472e-15 C29 -5.34621851e-20 6.90374205e-17 -1.49356884e-17 C31 -1.13706329e-19 3.40102445e-16 -2.30749878e-17 C33 -7.92648036e-20 5.31249145e-16 -5.51073804e-17 C35 -1.80373909e-20 2.04794487e-16 -6.87608764e-19 C36 -7.9354103e-23 4.89956204e-20 1.01331761e-18 C38 -3.78555476e-22 6.81676373e-19 -1.2161068e-19 C40 -6.30580138e-22 2.4282552e-18 -1.47970294e-18 C42 -4.5527176e-22 3.81938068e-18 6.26475044e-20 C44 -1.3311543e-22 3.61846189e-18 2.98719604e-19 C46 -8.65693115e-26 7.58808716e-22 2.53527444e-20 C48 -3.02081071e-25 6.3315862e-21 -1.15528014e-20 C50 -3.7271534e-25 1.75217853e-20 3.19274883e-20 C52 -2.04526778e-25 2.37170473e-20 2.13210482e-20 C54 -6.38409554e-26 1.46691387e-20 2.11881585e-22 C55 -1.17607067e-28 2.68094923e-25 -4.18091862e-22 C57 -7.27781115e-28 1.00330599e-23 -2.17059627e-22 C59 -1.65432689e-27 5.56758289e-23 5.58161126e-22 C61 -1.81690972e-27 1.06786681e-22 5.78559346e-22 C63 -9.23636914e-28 3.80961161e-23 -1.08122225e-22 C65 1.190807e-29 -3.70201622e-22 -3.95262111e-23 C67 -1.74347791e-31 -1.61622264e-27 -1.76538069e-23 C69 -2.65293799e-31 -3.57626958e-26 4.01817155e-24 C71 -1.83531352e-31 -1.3979837e-25 1.22384249e-24 C73 -6.62638901e-32 -1.20967851e-25 -1.08260741e-23 C75 -7.09441336e-32 -9.37617201e-25 -2.50779591e-24 C77 1.12106179e-31 -1.07544585e-24 2.63842259e-25 C78 -3.05719696e-34 8.85212716e-30 1.00454261e-25 C80 -1.58406603e-33 -8.96537996e-29 5.71751502e-26 C82 -4.91368945e-33 -1.02732748e-27 5.02841446e-26 C84 -7.06795269e-33 -1.38914113e-27 -2.41201166e-25 C86 -6.16392235e-33 8.53650821e-27 -5.9874985e-26 C88 -3.38188253e-33 2.98745396e-26 1.90858343e-26 C90 -2.20753247e-33 6.41637105e-26 -4.10503543e-28 C92 1.89574908e-37 5.12198477e-31 5.4592031e-27 C94 -3.9475368e-36 8.92195973e-30 2.02373574e-27 C96 -1.22054225e-35 5.08536455e-29 -2.57618781e-27 C98 -1.58544839e-35 1.36375237e-28 1.25781721e-27 C100 -1.16251679e-35 1.7878558e-28 1.1520657e-27 C102 -5.39125561e-36 2.96108925e-28 9.52139484e-29 C104 -2.42676872e-36 2.67158057e-28 -6.19712863e-31 C105 -1.88063592e-40 -7.30917342e-35 -8.93453286e-30 C107 -3.8422399e-39 1.28456836e-32 3.04879904e-29 C109 -4.96350556e-39 1.5155181e-31 -3.55166106e-29 C111 -8.20779835e-39 6.24517537e-31 1.81622755e-29 C113 -8.91502786e-39 8.30003322e-31 2.6797002e-29 C115 1.16140421e-39 -7.13115037e-31 9.59364049e-31 C117 7.96427711e-39 -3.08789238e-30 -1.07136881e-30 C119 8.50815881e-39 -5.36958318e-30 7.92027656e-32 C121 -2.16664429e-42 -1.15474143e-35 -5.68645517e-31 C123 9.25532636e-42 -2.41669137e-34 -5.7201883e-31 C125 4.34890493e-41 -1.72285419e-33 2.71027153e-31 C127 7.83996487e-41 -6.59829047e-33 8.52597201e-33 C129 6.89552239e-41 -1.22286322e-32 -8.85652786e-32 C131 4.18800498e-41 -1.20838293e-32 -3.92638406e-32 C133 1.9564609e-41 -1.86894493e-32 4.4323265e-34 C135 1.00658736e-41 -1.97974422e-32 -9.64275666e-34 C136 8.46616254e-46 -2.06090341e-39 4.61210007e-36 C138 6.78106299e-45 -3.36789687e-37 -7.3846832e-33 C140 -2.09079293e-44 -4.84477479e-36 1.49189646e-33 C142 -7.67751939e-44 -2.72612557e-35 9.33103813e-34 C144 -9.41864351e-44 -7.00579872e-35 -1.64418137e-33 C146 -8.85483819e-44 -4.01487563e-35 -8.93621988e-34 C148 -8.5811287e-44 1.1857469e-34 7.76964212e-35 C150 -6.75657159e-44 2.44501411e-34 1.00831742e-35 C152 -2.99487167e-44 2.83491393e-34 3.06072263e-36 C154 1.48407889e-48 1.62014236e-40 0 C156 -3.15076933e-47 3.89890113e-39 0 C158 -1.36191367e-46 3.36101481e-38 0 C160 -2.93546772e-46 1.69353889e-37 0 C162 -3.47996913e-46 4.93657363e-37 0 C164 -2.56276829e-46 8.12042181e-37 0 C166 -1.39426611e-46 8.92919974e-37 0 C168 -5.50464597e-47 8.79314626e-37 0 C170 -1.9995403e-47 6.72612077e-37 0 C171 -5.92799023e-51 7.56056219e-44 0 C173 -4.33450571e-50 4.57253301e-42 0 C175 -1.02533527e-49 7.66914439e-41 0 C177 -1.77878999e-49 5.42508166e-40 0 C179 -2.88706413e-49 2.15838931e-39 0 C181 -3.76978902e-49 4.26933344e-39 0 C183 -2.5619191e-49 3.33336532e-39 0 C185 -5.58934122e-50 -1.47199373e-39 0 C187 6.34098064e-50 -4.98140574e-39 0 C189 3.55320033e-50 -6.01350559e-39 0 Table 3b to Fig. 5 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 5204.36700600 -2268.82071000 8567.21093500 C7 4.87773863e-08 2.04060012e-09 -8.30512448e-08 C9 6.72204271e-08 -1.0834766e-07 6.77452676e-08 C10 4.82574885e-12 1.05388475e-12 -5.97647539e-11 C12 -1.73332631e-10 1.62741116e-11 -2.73488012e-11 C14 1.89663692e-10 -2.31774454e-10 3.43109154e-11 C16 1.34214937e-13 -7.82176533e-15 -4.35004516e-14 C18 2.35443584e-13 1.86203031e-15 2.70085585e-13 C20 -1.09484272e-12 -2.15959685e-13 -2.75246567e-14 C21 -2.47456866e-16 1.73835864e-18 -2.08807937e-16 C23 6.33936587e-17 -1.06081268e-19 2.71275218e-16 C25 -6.15945794e-16 -5.09626546e-17 -2.82853896e-16 C27 4.89166477e-15 -5.66978493e-16 -1.51999365e-16 C29 3.18496088e-18 -6.81942165e-21 3.70571197e-19 C31 -5.64214828e-18 -7.93737857e-21 -2.85970085e-19 C33 -7.6868996e-18 -4.74875329e-19 -4.07302368e-19 C35 -2.74384912e-17 1.07439183e-19 1.27629785e-18 C36 5.14219225e-22 4.11047443e-24 -5.48934263e-22 C38 -5.65301502e-20 7.09243847e-23 8.75028241e-22 C40 -1.51697503e-20 1.00691882e-21 2.88169154e-21 C42 1.91341566e-19 2.2915265e-21 6.29303119e-21 C44 2.13355537e-19 1.49443897e-20 -5.62639245e-21 C46 -1.35896222e-22 5.68618517e-26 -4.3170146e-24 C48 4.77296722e-22 1.50574707e-24 -2.76336781e-24 C50 2.2087416e-21 4.99376822e-24 2.95261044e-23 C52 4.35468663e-22 -1.21084729e-23 8.88127889e-24 C54 -4.14376746e-22 5.72887245e-23 2.15246608e-23 C55 -1.07732749e-24 -4.78439764e-29 5.9578935e-27 C57 4.03160251e-24 -1.86149435e-27 -4.78484333e-26 C59 1.36541018e-23 -3.5383654e-26 -1.8649333e-25 C61 -3.17787113e-23 -2.28559713e-25 -6.67875223e-25 C63 -3.75796205e-23 -9.32745527e-25 -9.39433331e-26 C65 -6.64104509e-24 3.70793048e-24 -2.7997917e-25 C67 1.49430631e-26 -8.62903934e-31 2.18974264e-28 C69 -3.32119152e-26 -4.5380713e-29 6.11775124e-28 C71 -2.1012607e-25 -3.03719615e-28 -9.04448203e-28 C73 -1.6163604e-25 -6.82789877e-28 -1.45681498e-27 C75 1.8534216e-25 1.40904565e-27 -3.57848901e-27 C77 -6.6302258e-26 -4.22800096e-28 2.04048928e-27 C78 7.64916966e-29 8.72661498e-34 -5.01806497e-31 C80 -1.52355469e-28 3.21059078e-32 2.19659655e-30 C82 -1.57066889e-27 7.42740886e-31 6.63540755e-30 C84 5.88407194e-28 7.53849885e-30 2.95272968e-29 C86 7.62180509e-27 3.50727976e-29 4.32320957e-29 C88 2.18642707e-27 1.70793767e-28 1.41292536e-29 C90 1.31739349e-27 -5.30463264e-28 5.24769617e-30 C92 -7.75168861e-31 6.94899707e-36 -4.00750245e-33 C94 3.21998974e-30 6.7141433e-34 -2.16771e-32 C96 1.55756415e-29 6.40028058e-33 -1.48895056e-32 C98 1.96565616e-29 2.39033632e-32 7.51766074e-32 C100 -4.83312986e-29 9.04769357e-33 5.70846647e-32 C102 -2.03614393e-29 -4.1142672e-31 1.53265106e-31 C104 -1.2543268e-30 -8.51151121e-32 -5.9724108e-32 C105 -2.81581595e-33 -8.02206459e-39 9.46961081e-36 C107 1.78833376e-33 -3.7847021e-37 -4.42008197e-35 C109 4.4030631e-32 -8.88319799e-36 -1.78188445e-34 C111 7.98434919e-32 -1.15478092e-34 -5.54769568e-34 C113 -3.98788462e-31 -7.70203196e-34 -1.50491597e-33 C115 -1.97575097e-31 -2.83908764e-33 -1.35108369e-33 C117 5.92715381e-33 -1.7967475e-32 -3.42119468e-34 C119 -5.58675e-32 3.65978025e-32 -1.89449398e-34 C121 2.0830293e-35 -2.86952593e-41 2.88478083e-38 C123 -1.32684867e-34 -5.14219061e-39 2.17827745e-37 C125 -7.30361214e-34 -6.39952692e-38 5.68177748e-37 C127 -1.68851838e-33 -3.39523197e-37 -2.85632795e-37 C129 3.58651474e-33 -7.05400085e-37 -2.06453146e-36 C131 2.76462515e-33 2.97049102e-36 5.05671999e-37 C133 3.82249064e-34 4.12139074e-35 -4.68072736e-36 C135 2.75470649e-34 -2.40899559e-35 2.13315277e-36 C136 3.18733155e-38 3.92006857e-44 -6.9337235e-41 C138 2.62951385e-38 2.59739462e-42 3.02425175e-40 C140 6.45638052e-37 6.29456211e-41 2.03220354e-39 C142 2.83861077e-36 8.70323126e-40 5.4522729e-39 C144 5.87243105e-36 7.63801974e-39 1.31099036e-38 C146 -1.18943904e-35 3.68977175e-38 2.74978879e-38 C148 -6.40152862e-36 1.20124247e-37 9.14391729e-39 C150 -1.04565413e-36 1.06944343e-36 1.50229787e-38 C152 -3.33204856e-37 -1.53464877e-36 -4.15819217e-39 Table 3c to Fig. 5 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 1820.64435500 -2180.25464200 C7 -2.12784414e-08 -6.15130346e-10 C9 8.65250748e-09 -7.00978981e-08 C10 6.95440323e-11 5.00403109e-11 C12 -9.74683499e-11 1 .16675833e-11 C14 -3.5352284e-11 -2.47853973e-10 C16 3.83369157e-13 5.10667177e-14 C18 1.95911085e-13 3.51880874e-14 C20 -1.12714516e-13 -4.73378181e-13 C21 1.57467455e-16 7.4149654e-17 C23 5.9891602e-16 1.44350802e-16 C25 1.41125186e-15 7.35128124e-17 C27 2.54531894e-15 1.33622455e-17 C29 3.15680528e-18 -3.5430565e-21 C31 9.28839511e-19 2.77582712e-19 C33 -9.60002575e-18 -4.3323723e-18 C35 -8.95814275e-18 -5.85573177e-19 C36 4.49237299e-21 -1.34176094e-24 C38 1.36510372e-20 8.9758538e-22 C40 1.67119668e-20 1.80869693e-21 C42 2.25925404e-20 -5.48392309e-20 C44 -3.35150057e-21 -6.10454453e-20 C46 2.32385612e-24 -2.47806502e-24 C48 3.85663636e-23 -2.44202238e-23 C50 5.29127445e-23 -4.32057551e-23 C52 2.17969681e-22 6.11103051e-23 C54 2.9597841e-22 -7.53841996e-23 C55 -1.77031005e-25 7.87646424e-30 C57 -5.03679738e-25 -7.74494929e-26 C59 3.72096698e-25 -3.73578821e-25 C61 2.9273736e-24 1.97135258e-24 C63 2.52444447e-24 1.31575325e-23 C65 -2.58147832e-24 1.95223382e-23 C67 1.55503533e-27 9.61512993e-29 C69 -7.92892242e-28 1.21798673e-27 C71 -8.85292086e-27 5.8354169e-27 C73 -2.17586754e-26 -1.32103915e-27 C75 -2.72760107e-26 -7.811315e-26 C77 1.22623399e-26 6.98158727e-26 C78 1.05757876e-29 1.13898394e-33 C80 2.92647271e-29 3.4482601e-30 C82 2.13234927e-29 3.23247372e-29 C84 -1.50331282e-28 1.56849369e-29 C86 -2.75525656e-28 -7.34562328e-28 C88 -2.4157755e-28 -2.83560112e-27 C90 5.66068412e-29 -1.88061684e-27 C92 -3.73852896e-32 -2.32033148e-33 C94 1.99125388e-32 -3.53637365e-32 C96 3.05756709e-31 -2.54277991e-31 C98 1.03039253e-30 -7.16194899e-31 C100 2.36617865e-30 1.9502017e-30 C102 2.63062414e-30 9.78086171e-30 C104 -8.79077622e-31 -7.96080937e-30 C105 -2.42276814e-34 -2.28751215e-37 C107 -6.49677403e-34 -8.74457445e-35 C109 -8.81615317e-34 -1.1793919e-33 C111 4.11201455e-33 -4.24903294e-33 C113 1.03447623e-32 9.99749303e-33 C115 6.95771375e-33 1.17840318e-31 C117 4.21261899e-33 2.99926088e-31 C119 2.59058438e-33 1.08288417e-31 C121 3.84917324e-37 3.11322487e-38 C123 9.14908662e-39 5.12327229e-37 C125 -3.45334125e-36 4.35644539e-36 C127 -1.50102748e-35 2.43967496e-35 C129 -3.93659161e-35 2.08988575e-35 C131 -9.07178347e-35 -2.58466174e-34 C133 -9.57654127e-35 -6.72552819e-34 C135 2.93819486e-36 4.88515978e-34 C136 2.08362037e-39 5.58973543e-42 C138 5.52483689e-39 1.14661162e-39 C140 1.00869411e-38 2.0134246e-38 C142 -3.71425478e-38 1.17733281e-37 C144 -1.62922842e-37 1.86484382e-37 C146 -1.09001086e-37 -1.61071043e-36 C148 1.85314442e-37 -8.81812699e-36 C150 2.34746046e-37 -1.67660963e-35 C152 -1.72950222e-38 -2.68891191e-36 Table 4a to FIG. 5 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 700.00000000 M7 0.00000000 155.98897896 112.83973535 M6 0.00000000 -91.56591234 1055.08853912 M5 0.00000000 -278.07519343 1283.62799699 M4 0.00000000 -1119.37865157 1698.12410313 M3 0.00000000 609.80940048 1649.93370562 M2 0.00000000 1087.40430768 1393.34336099 AS 0.00000000 1224.02426223 1188.32715795 M1 0.00000000 1548.47553741 701.44536439 Table 4b to Fig. 5 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M8 7.43895911 0.00000000 -0.00000000 M7 14.79921420 180.00000000 0.00000000 M6 -63.03093593 0.00000000 -0.00000000 M5 -38.50553834 0.00000000 180.00000000 M4 76.08747694 -0.00000000 -0.00000000 M3 -14.92174881 0.00000000 180.00000000 M2 -42.28410392 -0.00000000 -0.00000000 AS -15.80634349 180.00000000 0.00000000 M1 14.16446290 180.00000000 0.00000000

Unlike the projection optics described above 7 . 21 and 22 lies with the projection optics 23 an entrance pupil in the imaging beam path after the object field 4 ,

The aperture AS lies with the projection optics 23 in the imaging beam path between the mirrors M1 and M2 ,

The projection optics 23 in turn has a sagittal intermediate image in the imaging beam path between the mirror M6 and the passage opening 17 , The projection optics 23 has two meridional intermediate images on the one hand in the imaging beam path between the mirrors M2 and M3 and on the other hand in the imaging beam path in the region of a reflection at the mirror M6 ,

Based on 6 Below is another embodiment of a projection optics 24 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 5 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 23.1 83.2 80.0 15.2 80.2 84.7 20.4 8.7 minute Angle of incidence [°] 21.7 72.1 73.2 11.5 71.0 74.9 0.0 4.7 Reflection surface extension in x-direction [mm] 444.1 385.8 471.7 633.9 317.0 177.0 295.6 796.1 Reflection surface extension in the y-direction [mm] 234.2 336.4 418.7 159.4 204.5 292.7 189.8 779.1 Max. Mirror diameter [mm] 444.5 387.3 473.8 634.0 317.7 305.7 295.6 796.4

A maximum angle of incidence on one of the NI mirrors is in the projection optics 24 on the mirror M1 before and is there 23.1 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 24 on the mirror M5 before and is there 71.0 °.

The optical design data of the projection optics 24 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 6 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Feldgröße_x 26.0 mm Field size v 1.6 mm curvature of field 0.0125 1 / mm RMS 8.84 mλ cover AS CRA 5.4 ° etendue 12.58 mm ² transmission 8.03% Pos. EP (x) 2534.33 mm Pos. EP (v) 6212.83 mm Object-image offset 1799.68 mm working distance 80 mm Field spacing 2200.00 mm obscuration 19.0% Space-square (796 × 2831 × 1718) mm ³ Table 2 to Fig. 6 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -789.4189120 0.0025097 -744.8684030 0.0027105 REFL M7 1138.8921288 -0.0017561 473.1663149 -0.0042269 REFL M6 -30910.0937638 0.0000117 -20905.8613158 0.0005307 REFL M5 307383.2966038 -0.0000016 -7956.2866553 0.0010101 REFL M4 -2351.4354654 0.0008284 -1554.8320756 0.0013206 REFL M3 -60993.7005144 0.0000076 -4849.4532844 0.0017898 REFL M2 2259.5055098 -0.0001880 -28920.4473949 0.0003256 REFL M1 -2301.8043938 0.0008024 -1499.0747921 0.0014447 REFL Table 3a to Fig. 6 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -789.41891200 1138.89212900 -30910.09376000 C7 -2.28594347e-08 1.59924995e-06 -2.19659074e-08 C9 -6.81763364e-09 1.02651086e-06 3.01531133e-08 C10 -2.9551736e-11 1.96061716e-09 8.47508164e-11 C12 -6.79881022e-11 7.52025602e-09 -1.08572479e-11 C14 -3.57100493e-11 7.144923e-09 -8.02371321e-11 C16 -4.0811503e-14 1.01538024e-11 -1.56591486e-13 C18 -5.75939346e-14 3.11114061e-11 4.14001208e-14 C20 -1.41021173e-14 1.39613281e-11 2.42359914e-13 C21 -5.90903468e-17 9.17243522e-15 1.00410608e-17 C23 -1.94927488e-16 8.55597222e-14 -1.09903318e-15 C25 -2.12240774e-16 1.71905653e-13 -9.43534098e-16 C27 -7.29462219e-17 1.03290029e-13 -5.79987475e-16 C29 -6.46683238e-20 9.62754394e-17 -1.67457701e-17 C31 -1.65414593e-19 5.35051284e-16 7.15088155e-18 C33 -1.26541593e-19 8.41544212e-16 7.99742794e-18 C35 -4.02816104e-20 4.90470944e-16 -3.01146613e-18 C36 -1.02717613e-22 7.41810318e-20 -1.80897862e-19 C38 -4.44640857e-22 1.05051434e-18 -1.22320712e-19 C40 -7.22732678e-22 3.65813042e-18 1.12217204e-19 C42 -5.05751795e-22 4.99746174e-18 -1.79016068e-20 C44 -1.76216599e-22 6.68818399e-18 2.46999055e-20 C46 -1.12474794e-25 1.2972042e-21 6.04930398e-21 C48 -4.71574169e-25 1.13661234e-20 -8.65953859e-21 C50 -5.60525982e-25 2.77273702e-20 -4.72664671e-21 C52 -1.88282581e-25 3.21981845e-20 -3.54774414e-22 C54 2.05637607e-25 -4.0338556e-20 5.91191723e-22 C55 -1.63193181e-28 1.0496396e-24 8.38686844e-23 C57 -8.86879896e-28 2.03762998e-23 2.15863001e-22 C59 -1.89486185e-27 1.03812686e-22 -2.45829993e-22 C61 -2.38338651e-27 2.90390438e-22 3.07351597e-23 C63 -1.86780437e-27 3.12107127e-22 -1.76357145e-23 C65 -1.49129215e-28 -4.61898834e-22 -6.21437863e-24 C67 -2.11920776e-32 -9.31720824e-27 -1.91672534e-25 C69 7.31955447e-31 -1.44513641e-25 1.27421534e-24 C71 7.87827299e-31 -1.28349183e-25 4.93320478e-24 C73 1.22935573e-31 1.06653712e-24 -6.23474715e-25 C75 -1.34492945e-30 1.82219862e-24 6.11165125e-25 C77 -2.95434235e-30 1.04547493e-23 -4.30103748e-26 C78 -2.77012353e-34 -3.13320795e-29 -1.16838089e-26 C80 -3.41801945e-33 -4.37874692e-28 -7.66514954e-26 C82 -1.0908062e-32 -1.64409531e-27 1.06435055e-25 C84 -1.16176223e-32 -5.54248027e-27 -2.34977778e-26 C86 -3.97837331e-33 -2.05063916e-26 2.18701797e-26 C88 5.46844896e-33 -6.83383422e-27 -7.78506698e-27 C90 1.12560211e-33 5.35563619e-26 1.12708663e-27 C92 -2.80508369e-36 1.59745336e-30 -1.1940012e-28 C94 -2.06001917e-35 2.56075045e-29 2.68390394e-30 C96 -3.9466527e-35 9.85211197e-29 -1.13014e-27 C98 -3.80927048e-35 1.61380885e-28 2.10883171e-28 C100 -1.91247607e-35 -3.2864102e-29 -2.89246131e-28 C102 2.85647669e-36 -2.55019155e-28 5.23948235e-29 C104 1.76466665e-35 -1.11940374e-27 -8.71046828e-30 C105 -4.29010186e-40 1.80671454e-33 5.02256669e-31 C107 1.49122725e-38 4.34972446e-32 1.05395735e-29 C109 6.45079903e-38 2.94183203e-31 -1.60195922e-29 C111 7.39056617e-38 1.03792136e-30 2.49683449e-30 C113 1.08939349e-38 2.40957593e-30 -4.03697643e-30 C115 -4.10814955e-38 3.79897578e-30 1.78163485e-30 C117 -6.1715864e-38 -1.17534782e-31 -1.97997044e-31 C119 -1.89727512e-38 -3.82730672e-30 3.45191913e-32 C121 1.33514841e-41 -4.33116203e-35 1.31761273e-32 C123 9.9121241e-41 -8.15188348e-34 2.59404022e-33 C125 2.28415893e-40 -3.82423683e-33 8.16459845e-32 C127 2.76967747e-40 -8.25747112e-33 -1.72213006e-32 C129 1.92724847e-40 -5.3969046e-33 3.02868784e-32 C131 7.17538167e-41 1.91998287e-32 -5.34395073e-33 C133 -1.62032572e-41 3.23581712e-32 3.96098653e-34 C135 -6.2226261e-41 6.88744468e-32 -7.12844423e-35 C136 -1.80972327e-45 -3.93745436e-38 9.00874212e-36 C138 -1.03474441e-43 -1.25148956e-36 -4.29871431e-34 C140 -4.8321956e-43 -1.0657384e-35 8.6634739e-34 C142 -8.29005922e-43 -4.04149827e-35 1.11586059e-34 C144 -6.77843005e-43 -1.02939004e-34 9.79613442e-35 C146 -1.64319993e-43 -1.56616605e-34 -7.54834049e-35 C148 1.1584023e-43 -1.37819838e-34 6.50226113e-36 C150 2.03877095e-43 1.73736541e-34 -3.24985651e-37 C152 7.9101842e-44 2.12312386e-34 6.10069115e-38 C154 -2.99384144e-47 6.07972194e-40 0 C156 -2.32376076e-46 1.35030988e-38 0 C158 -6.55059482e-46 8.65596496e-38 0 C160 -1.00700974e-45 2.74438849e-37 0 C162 -9.78454956e-46 5.18540635e-37 0 C164 -5.98153769e-46 3.0806407e-37 0 C166 -2.2656653e-46 -5.96738972e-37 0 C168 -2.57341278e-48 -9.56409269e-37 0 C170 8.76288002e-47 -1.67895103e-36 0 C171 1.24361755e-51 3.82174904e-43 0 C173 1.6860782e-49 1.73192818e-41 0 C175 9.32023082e-49 1.9715146e-40 0 C177 1.8894641e-48 9.53292446e-40 0 C179 1.89005549e-48 2.87518718e-39 0 C181 7.16479937e-49 5.89114433e-39 0 C183 -3.81811461e-49 5.96138805e-39 0 C185 -4.96329145e-49 2.36938669e-39 0 C187 -3.81721105e-49 -7.14800108e-39 0 C189 -1.39983141e-49 -5.36346353e-39 0 Table 3b to Fig. 6 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 307383.29660000 -2351.43546500 -60993.70051000 C7 1.70237016e-07 -2.18139801e-08 -3.29483374e-08 C9 9.12763991e-08 -1.88618354e-07 4.36905102e-08 C10 5.04963461e-11 -7.27810153e-13 2.14579064e-11 C12 -1.61036777e-10 -9.97201841e-12 6.95397969e-12 C14 2.1115971e-10 -4.49811443e-10 9.98976641e-12 C16 9.90955534e-14 -2.20761023e-14 -4.09311228e-14 C18 1.27707012e-13 -2.87223418e-14 7.81595793e-14 C20 -1.2550654e-12 -1.48146038e-12 8.3981924e-16 C21 -5.96925872e-17 1.03001936e-18 -4.31288132e-17 C23 -4.83379593e-16 1.61296727e-17 6.42019871e-17 C25 -6.79181305e-16 7.75987201e-16 -3.42162593e-17 C27 7.58151603e-15 1.24091461e-14 2.20044484e-17 C29 2.30689706e-18 -1.12081943e-20 3.11578093e-19 C31 1.02282992e-18 -1.29259673e-19 5.9632496e-19 C33 1.11330638e-17 -1.33804691e-17 2.15797736e-19 C35 -3.77924527e-17 -1.80881355e-16 -6.28949992e-20 C36 -7.69385764e-22 -9.49886071e-24 -3.60003332e-23 C38 1.4700957e-20 -7.77330795e-22 3.18514189e-21 C40 2.03602355e-19 -7.91508499e-21 2.9543513e-21 C42 -2.48807573e-20 -1.05345696e-19 7.68001341e-22 C44 -6.73553062e-20 -4.65404729e-18 1.96169445e-22 C46 -1.37157749e-22 -2.2209227e-26 -1.52710394e-23 C48 -1.49708745e-22 -2.60091147e-24 -5.17599114e-23 C50 -1.38422708e-21 1.15141549e-22 -3.97468397e-23 C52 -4.75143039e-21 3.50261757e-21 -2.59289532e-24 C54 1.52124952e-21 6.67492822e-20 1.87312201e-24 C55 1.2013404e-25 2.46133363e-28 -1.20986329e-26 C57 -2.84877474e-24 2.74782067e-26 -1.96603371e-25 C59 -3.23180994e-23 4.68939128e-25 -3.68206051e-25 C61 -4.5243632e-23 3.72360145e-24 -1.88011404e-25 C63 9.32931453e-23 6.49508576e-23 -5.76766813e-26 C65 2.62807512e-23 1.66406223e-21 1.0444611e-27 C67 4.96172495e-27 1.43289708e-31 3.82882172e-28 C69 5.89330331e-26 8.14077994e-29 2.25226729e-27 C71 2.41931757e-25 -2.764158e-27 3.22870866e-27 C73 7.76678462e-25 -9.23921035e-26 1.76506741e-27 C75 -2.64896663e-25 -1.19447403e-24 1.86513316e-28 C77 -4.69549712e-25 -1.42793841e-23 -6.83802283e-30 C78 -2.68092826e-29 -2.26931891e-33 2.23734044e-31 C80 1.74696996e-28 -4.89280352e-31 6.22019816e-30 C82 1.87830761e-27 -1.19143837e-29 1.83136282e-29 C84 5.90118306e-27 -9.70323213e-29 1.86821562e-29 C86 -5.08293883e-27 -9.78802132e-28 6.75126861e-30 C88 -8.44570843e-27 -2.41972037e-26 2.57803713e-30 C90 2.17741494e-27 -3.38212357e-25 -3.12079609e-31 C92 3.65935257e-32 1.49764185e-35 -4.38914316e-33 C94 -4.38376792e-30 -9.12540422e-34 -4.49347341e-32 C96 -2.66941003e-29 4.88946447e-32 -9.42865458e-32 C98 -7.19860192e-29 2.09195599e-30 -9.28757005e-32 C100 -2.46705984e-30 2.62687458e-29 -3.87407574e-32 C102 8.35301387e-29 2.22869338e-28 -5.84452752e-33 C104 -9.11318584e-31 2.11151437e-27 -2.45853046e-34 C105 1.14630957e-33 1.40385622e-38 -2.87855919e-36 C107 -4.72476667e-33 4.61431017e-36 -9.50422851e-35 C109 -2.26080203e-32 1.51997351e-34 -3.98318299e-34 C111 -1.47338358e-31 1.55622708e-33 -6.23590416e-34 C113 1.1011244e-31 9.98455389e-34 -4.32366939e-34 C115 4.00319403e-31 2.04758182e-31 -1.2906311e-34 C117 -1.56953564e-31 4.87290356e-30 -6.35185578e-35 C119 7.26171283e-33 4.17295758e-29 9.4796899e-36 C121 -3.57233797e-36 -2.65820193e-40 1.79963661e-38 C123 9.73470033e-35 3.30152485e-39 3.31016699e-37 C125 9.05102735e-34 -6.01916327e-37 9.61524525e-37 C127 3.0282343e-33 -2.45609106e-35 1.29189513e-36 C129 1.16481475e-33 -4.31528844e-34 1.04427521e-36 C131 -3.1735488e-33 -3.16562682e-33 3.44267589e-37 C133 -1.01683326e-33 -2.1424973e-32 5.88870769e-38 C135 -2.07295601e-34 -1.81971343e-31 3.12464606e-39 C136 -1.527148e-38 -5.13887859e-44 1.57571254e-41 C138 4.82731096e-38 -2.18438419e-41 5.59250444e-40 C140 -7.07842916e-37 -8.95000543e-40 3.20502958e-39 C142 -4.03385924e-36 -1.03087283e-38 6.85564788e-39 C144 -9.96296562e-36 8.67138624e-38 7.19118417e-39 C146 -3.2892397e-36 1.69938852e-36 4.16257786e-39 C148 7.93769937e-36 -2.90040517e-35 1.08663705e-39 C150 3.66951031e-36 -4.99937158e-34 6.1850464e-40 C152 6.14240075e-37 -2.90236723e-33 -1.05760533e-40 Table 3c to Fig. 6 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 2259.50551000 -2301.80439400 C7 -1.53417006e-08 -1.58578264e-08 C9 -1.69259217e-08 -1.09661328e-07 C10 1.93276296e-10 1.41347713e-11 C12 2.04186063e-11 1.40849836e-11 C14 -1.78357404e-11 -2.57144705e-10 C16 4.99162992e-14 1.88145755e-14 C18 2.14856847e-13 -8.39519111e-14 C20 -1.51017804e-13 -4.87105973e-13 C21 6.50899113e-16 8.22806077e-17 C23 4.32500417e-16 1.09731176e-16 C25 7.03147135e-16 -3.50572427e-16 C27 3.7061136e-16 -8.40082648e-16 C29 1.90343213e-18 4.48492987e-20 C31 3.84686104e-18 -2.55516904e-19 C33 8.1922938e-20 -4.57542054e-18 C35 3.71979549e-19 -8.06214542e-18 C36 2.0271749e-21 3.83714436e-23 C38 -1.93685467e-20 -1.91099434e-21 C40 -9.86768275e-21 -6.67320263e-21 C42 2.4532004e-20 9.23882226e-21 C44 5.03125918e-20 -1.22116386e-19 C46 -7.15434673e-23 1.95092941e-24 C48 -2.12550058e-22 -2.4937445e-23 C50 -3.58251093e-22 -8.74368424e-23 C52 -4.19931186e-22 5.35966991e-22 C54 -3.22761682e-22 4.82637812e-22 C55 8.50331138e-26 -6.89462654e-27 C57 1.60839317e-24 7.88938308e-26 C59 2.71144086e-24 9.87110162e-25 C61 1.16815891e-24 7.04761031e-25 C63 -9.58081162e-25 -7.62210347e-24 C65 -2.6056879e-24 6.35324497e-24 C67 3.4243476e-27 -1.02690617e-28 C69 1.08830748e-26 6.87119647e-28 C71 1.94181461e-26 6.12015905e-27 C73 2.12610742e-26 3.05188605e-27 C75 2.88779999e-26 -1.43808726e-25 C77 2.38898376e-26 -1.20345458e-25 C78 -4.69942868e-30 2.84375124e-31 C80 -6.17746363e-29 -2.020403e-30 C82 -1.52453827e-28 -5.09632147e-29 C84 -1.40413737e-28 -2.30364279e-28 C86 -1.5450752e-29 -7.61889912e-29 C88 1.12566408e-29 8.08558527e-28 C90 4.37348937e-29 -2.85416094e-28 C92 -6.06381688e-32 2.10210662e-33 C94 -2.28241953e-31 -1.65930886e-32 C96 -4.97981987e-31 -1.4486695e-31 C98 -7.1182832e-31 -7.51997934e-31 C100 -6.98562328e-31 2.22784176e-30 C102 -9.92368499e-31 1.84818819e-29 C104 -7.46849846e-31 1.1430644e-29 C105 1.18795746e-34 -5.89093282e-36 C107 1.26554934e-33 2.51640814e-35 C109 4.21376595e-33 1.10575212e-33 C111 6.18611218e-33 9.3851125e-33 C113 3.19335365e-33 2.50239264e-32 C115 -5.25808251e-34 1.61234956e-32 C117 8.41033623e-34 -2.50998963e-32 C119 3.97427968e-34 8.36406207e-33 C121 4.31645794e-37 -2.25597446e-38 C123 1.86783785e-36 1.82130364e-37 C125 4.33644176e-36 1.16147129e-36 C127 8.48902113e-36 7.81234476e-36 C129 1.12797147e-35 1.83161543e-35 C131 1.17075929e-35 -3.59617743e-34 C133 1.61569212e-35 -1.19602371e-33 C135 1.01631457e-35 -5.84221373e-34 C136 -1.08613978e-39 6.26159382e-41 C138 -1.04181705e-38 -1.407317e-40 C140 -4.38719683e-38 -1.08537429e-38 C142 -8.88697662e-38 -1.46546405e-37 C144 -8.23032232e-38 -7.28236532e-37 C146 -2.55561856e-38 -1.56340984e-36 C148 -9.94344512e-41 -2.40392363e-36 C150 -3.7924593e-38 -1.64042882e-36 C152 -2.23419651e-38 -6.2183326e-37 Table 4a to FIG. 6 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 689.93417693 M7 0.00000000 159.67848261 114.61322867 M6 0.00000000 -117.15079791 1112.02804357 M5 -0.00000000 -296.45598757 1361.59117076 M4 -0.00000000 -1041.83921383 1718.87364362 M3 0.00000000 419.99848940 1758.08749033 M2 0.00000000 1112.78485818 1433.38026686 AS -0.00000000 1297.48943293 1201.20560993 M1 0.00000000 1665.18565469 750.23596713 Table 4b to Fig. 6 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M8 7.75591185 0.00000000 -0.00000000 M7 15.51182370 180.00000000 0.00000000 M6 -64.39591338 -0.00000000 -0.00000000 M5 -39.95665953 0.00000000 180.00000000 M4 77.96346208 0.00000000 -0.00000000 M3 -11.78788743 -0.00000000 180.00000000 M2 -38.07642033 -0.00000000 0.00000000 AS -13.64318112 180.00000000 0.00000000 M1 16.82976349 180.00000000 0.00000000

The position of the sagittal intermediate image and the meridional intermediate images corresponds to the projection optics 24 that of the projection optics 23 to 5 ,

Based on 7 Below is another embodiment of a projection optics 25 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 6 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 21.6 82.7 80.3 14.2 80.8 84.5 20.4 8.5 minute Angle of incidence [°] 19.7 71.0 73.2 10.5 71.2 74.5 0.0 4.6 Reflection surface extension in x-direction [mm] 447.1 386.8 466.4 640.2 307.3 175.8 296.8 815.9 Reflection surface extension in the y-direction [mm] 233.8 304.0 413.4 172.9 207.2 260.4 189.6 798.5 Max. Mirror diameter [mm] 447.6 387.9 469.2 640.3 308.9 274.8 296.8 816.6

A maximum angle of incidence on one of the NI mirrors is in the projection optics 25 on the mirror M1 before and is there 21.6 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 25 on the mirror M2 before and is there 71.0 °.

The optical design data of the projection optics 25 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 7 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Feldgröße_x 26.0 mm Feldgröße_y 1.6 mm curvature of field 0.0125 1 / mm RMS 9.94 mλ cover AS CRA 5:35 ° etendue 12.58 mm ² transmission 14.08% Pos. EP (x) 2510.04 mm Pos. EP (y) 6337.92 mm Object-image offset 1784.31 mm working distance 80 mm Field spacing 2150.56 mm obscuration 17.9% Space-square (816 × 2823 × 1721) mm ³ Table 2 to Fig. 7 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -807.6275546 0.0024542 -763.1795280 0.0026444 REFL M7 1134.6858605 -0.0017626 476.0446608 -0.0042013 REFL M6 -58311.8537327 0.0000064 -16493.3532318 0.0006528 REFL M5 459918.3512002 -0.0000010 -9998.1863554 0.0008252 REFL M4 -2375.0220167 0.0008233 -1555.7958850 0.0013149 REFL M3 -81827.0667055 0.0000056 -4831.0435982 0.0018195 REFL M2 2393.5417388 -0.0001882 -44610.6816998 0.0001990 REFL M1 -2345.3253896 0.0007972 -1426.5705607 0.0014997 REFL Table 3a to Fig. 7 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -807.62755460 1134.68586000 -58311.85373000 C7 -2.06023586e-08 1.5467293e-06 -2.08013915e-08 C9 -6.99536399e-09 1.04159299e-06 4.80431807e-08 C10 -2.76790491 e-11 1.96173697e-09 8.15901891e-11 C12 -6.2504773e-11 7.51224155e-09 -1.51845354e-11 C14 -3.28998047e-11 7.22328599e-09 -1.36900563e-10 C16 -3.5237862e-14 1.00453219e-11 -2.98053936e-13 C18 -5.11679662e-14 3.12682042e-11 -5.4544528e-15 C20 -1.30907788e-14 1.47337403e-11 4.836193e-13 C21 -5.30162487e-17 9.30088859e-15 -2.14347083e-16 C23 -1.70154909e-16 8.48366708e-14 -2.53234644e-15 C25 -1.84711639e-16 1.75030664e-13 3.41745401e-16 C27 -6.42264739e-17 1.08903361e-13 -1.36624423e-15 C29 -5.03494146e-20 9.2478415e-17 1.21662265e-17 C31 -1.36723467e-19 5.3606478e-16 8.56858817e-17 C33 -1.06237642e-19 8.68177107e-16 2.46032882e-18 C35 -4.08643537e-20 6.43625302e-16 -1.17522833e-17 C36 -8.33573347e-23 7.37539466e-20 -1.37390152e-19 C38 -3.7686336e-22 1.09174799e-18 1.19694678e-18 C40 -6.05378436e-22 3.7688972e-18 -1.02897729e-18 C42 -4.16986161e-22 5.44417245e-18 -4.49371413e-19 C44 -1.24037105e-22 5.6851171e-18 1.58894072e-19 C46 -1.08897607e-25 1.34965191e-21 -3.42029001e-21 C48 -3.81772899e-25 1.06987607e-20 -5.96648907e-20 C50 -4.62451175e-25 2.65518072e-20 -1.22775737e-20 C52 -2.01608936e-25 3.11650627e-20 6.25853726e-21 C54 2.46757328e-25 -7.28637659e-20 2.14683069e-21 C55 -1.58370772e-28 7.59176182e-25 9.92063951e-23 C57 -6.83934489e-28 1.60927814e-23 -4.40087378e-22 C59 -1.50022495e-27 1.01246763e-22 -1.0499852e-22 C61 -1.77226209e-27 3.110609e-22 3.58503468e-22 C63 -1.52035635e-27 2.79179886e-22 -2.92054811e-23 C65 -3.93540999e-28 -2.91132381e-22 -4.81539993e-23 C67 9.00263162e-32 -1.1008722e-27 1.51199501e-24 C69 5.91788135e-31 -1.11802707e-27 1.64113615e-23 C71 6.78322589e-31 5.01451946e-25 1.32925749e-23 C73 2.51148855e-31 2.0098348e-24 -2.89633791e-24 C75 -3.91379298e-31 2.39603502e-24 3.38840566e-25 C77 -3.03362914e-30 1.59276867e-23 1.46362235e-25 C78 -2.73080815e-35 4.79947514e-30 -1.95437025e-26 C80 -2.14598618e-33 -1.41461284e-28 7.6297595e-26 C82 -6.36439668e-33 -1.38415703e-27 1.91957693e-25 C84 -8.21963454e-33 -6.45175162e-27 -1.19608933e-25 C86 -3.90783894e-33 -2.96684419e-26 2.15391483e-26 C88 5.2600037e-33 -7.69233206e-27 -8.60191264e-27 C90 3.48447425e-33 3.29800438e-26 3.59161183e-27 C92 -2.18429189e-36 5.92215709e-31 -2.88799207e-28 C94 -1.44435212e-35 1.19466823e-29 -2.04808129e-27 C96 -2.89767442e-35 2.88262994e-29 -3.27610799e-27 C98 -2.8747751e-35 -1.96505284e-29 3.56536688e-28 C100 -1.50070968e-35 -2.26356826e-28 -2.99611664e-28 C102 -3.37369724e-36 -3.77097596e-28 9.26278382e-29 C104 1.68365562e-35 -1.68063764e-27 -4.52746205e-29 C105 -1.15682707e-39 -3.23607586e-34 1.58386119e-30 C107 5.52911216e-39 2.36939992e-32 -6.34094548e-30 C109 2.28098754e-38 2.40408161e-31 -4.09062329e-29 C111 2.89231415e-38 9.18050904e-31 9.15028185e-30 C113 5.61113458e-39 2.54871587e-30 -2.20028928e-30 C115 -2.68519502e-38 5.49093281e-30 2.46522641e-30 C117 -5.29856881e-38 5.3080512e-31 -4.77294724e-31 C119 -2.80898493e-38 -2.59913882e-30 2.37715365e-31 C121 8.49917691e-42 -1.45687699e-36 2.06090075e-32 C123 6.43910961e-41 -2.03859192e-34 1.05641742e-31 C125 1.60682028e-40 -1.35987033e-34 2.45791896e-31 C127 2.07332894e-40 4.14874541e-33 2.75041504e-33 C129 1.40239374e-40 1.72039684e-32 3.69975647e-32 C131 5.02640422e-41 3.90338416e-32 -8.91297531e-33 C133 1.16973191e-41 4.85871545e-32 1.18319768e-33 C135 -5.43653696e-41 1.04281502e-31 -6.17093384e-34 C136 9.51602131e-46 2.44169656e-38 -3.94845154e-35 C138 -5.01445458e-44 -4.1355264e-37 2.84883577e-34 C140 -2.19344814e-43 -6.15589327e-36 2.66396789e-33 C142 -3.7902014e-43 -2.20610411e-35 3.93952758e-34 C144 -3.89409166e-43 -5.9399751e-35 -4.49449843e-35 C146 -9.27864674e-44 -1.47441288e-34 -1.51378797e-34 C148 1.02901668e-43 -2.56126003e-34 1.18128851e-35 C150 1.71547841e-43 1.5455181e-34 -1.11385414e-36 C152 9.51444086e-44 2.25581763e-34 6.49834247e-37 C154 -1.72977866e-47 -1.88685008e-41 0 C156 -1.42761738e-46 3.13925652e-39 0 C158 -4.41458843e-46 1.44626382e-38 0 C160 -7.27627255e-46 -2.37672682e-38 0 C162 -7.28368801e-46 -1.97891505e-37 0 C164 -4.00849116e-46 -6.36994149e-37 0 C166 -1.38715678e-46 -1.28152467e-36 0 C168 -3.97891332e-47 -1.65702436e-36 0 C170 7.15014124e-47 -2.69367741e-36 0 C171 -1.64548291e-51 -3.86782555e-43 0 C173 8.13799448e-50 3.00871819e-42 0 C175 4.27095704e-49 8.72484513e-41 0 C177 7.97428662e-49 3.83446452e-40 0 C179 9.48343583e-49 9.24288739e-40 0 C181 4.76319371e-49 2.67267725e-39 0 C183 -3.69712441e-49 5.11334137e-39 0 C185 -4.39526356e-49 5.7758226e-39 0 C187 -2.94806566e-49 -8.20021018e-39 0 C189 -1.37356346e-49 -8.35142973e-39 0 Table 3b to Fig. 7 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 459918.35120000 -2375.02201700 -81827.06671000 C7 1.7116708e-07 -1.75050568e-08 -3.76343662e-08 C9 7.82765768e-08 -1.60968626e-07 5.03973779e-08 C10 5.61195537e-11 -6.79547504e-13 3.17291712e-11 C12 -1.76980372e-10 -1.40808216e-12 1.41076308e-11 C14 3.25218818e-10 -3.64600254e-10 3.71170087e-12 C16 1.3046587e-13 -1.99398098e-14 -4.8577761e-14 C18 1.2921239e-13 -5.21553164e-14 6.668123e-14 C20 -2.04988777e-12 -8.354519e-13 7.19080111e-15 C21 6.65287887e-18 2.63373796e-19 -1.55433319e-17 C23 -5.25998582e-16 2.01635039e-17 6.53659677e-17 C25 -1.16381066e-15 5.36206815e-16 -2.49067664e-17 C27 1.22577954e-14 1.06135684e-14 1.35563757e-17 C29 1.27401918e-18 -1.12816924e-20 1.74276599e-19 C31 -3.5334617e-18 -8.70592196e-20 4.41252342e-19 C33 1.8573594e-17 -8.18503791e-18 3.83081014e-20 C35 -6.46985035e-17 -7.90495783e-17 -6.45649927e-20 C36 5.34142764e-22 -7.02750524e-24 -1.87010559e-22 C38 -3.22621192e-20 -5.27078797e-22 3.15073416e-21 C40 3.02783374e-19 -7.2649903e-21 3.41651525e-21 C42 6.14167487e-20 -1.25494407e-19 1.65925704e-21 C44 1.57768045e-19 -4.13111873e-18 -1.43326785e-23 C46 -7.10931884e-23 7.56277753e-26 -7.2687638e-24 C48 1.41717302e-21 -2.51444449e-24 -3.43255981e-23 C50 -2.56899138e-21 4.33592669e-23 -3.11493353e-23 C52 -6.06172543e-21 1.77407021e-21 1.01932146e-23 C54 -1.32549647e-22 2.52747193e-20 3.87643035e-24 C55 4.82127587e-26 1.65385797e-28 3.28774524e-27 C57 2.28368244e-24 1.79029209e-26 -1.74963194e-25 C59 -4.87486099e-23 3.38666389e-25 -3.28870597e-25 C61 -6.22258727e-23 4.25688229e-24 -2.25681463e-25 C63 7.8081418e-23 6.83357148e-23 -8.68841664e-26 C65 3.03976002e-23 1.29998283e-21 4.88699992e-27 C67 2.11165172e-27 -1.83071621e-30 1.15498019e-28 C69 -1.14735992e-25 7.6073881e-29 1.31210266e-27 C71 3.61703732e-25 -2.04695464e-28 2.65653799e-27 C73 1.09495196e-24 -3.40714672e-26 1.55280667e-27 C75 -1.45591101e-25 -5.41442516e-25 -4.66772069e-28 C77 -5.90336271e-25 -4.63786333e-24 -3.48934329e-29 C78 -3.33160864e-29 -1.61971553e-33 -2.97405724e-31 C80 -6.07053238e-29 -3.0653997e-31 5.01004289e-30 C82 3.41169559e-27 -7.77535609e-30 1.38634887e-29 C84 6.92231953e-27 -9.77776331e-29 1.62869411e-29 C86 -4.17996675e-27 -1.39060568e-27 8.79051757e-30 C88 -5.89424517e-27 -2.10094257e-26 2.9278275e-30 C90 4.58162961e-27 -2.43850984e-25 -3.52881283e-31 C92 1.21683398e-31 3.53204082e-35 -2.80715233e-34 C94 4.1963475e-30 -9.34744818e-34 -2.2996681e-32 C96 -3.43879775e-29 -1.42194494e-33 -6.7585871e-32 C98 -1.00667079e-28 4.97371498e-31 -9.308095e-32 C100 -1.93082416e-29 9.58917851e-30 -3.25709325e-32 C102 6.10627947e-29 9.20819743e-29 1.07601769e-32 C104 -7.71469691e-30 6.1198929e-28 -2.47932666e-34 C105 1.87417215e-33 1.41595356e-38 5.33821484e-36 C107 -2.93926952e-33 2.7977632e-36 -6.9699692e-35 C109 -8.90216414e-32 9.57692507e-35 -2.65104018e-34 C111 -1.78522775e-31 1.35566475e-33 -4.46484385e-34 C113 2.43086644e-31 1.5555775e-32 -4.16753468e-34 C115 1.53315129e-31 2.70713497e-31 -1.79729411e-34 C117 -2.17117012e-31 3.57976517e-30 -4.85884382e-35 C119 -1.26685811e-31 2.75738259e-29 8.70818767e-36 C121 -5.60327681e-36 -3.53181141e-40 -5.82362975e-39 C123 -6.0802923e-35 4.49672081e-39 1.51239305e-37 C125 1.30009456e-33 -3.62506562e-38 5.85444216e-37 C127 3.80691213e-33 -4.95128736e-36 1.16896075e-36 C129 1.5506168e-33 -1.14446009e-34 1.16188264e-36 C131 -9.25270903e-35 -1.1307451e-33 2.43330442e-37 C133 4.53412987e-35 -7.97280482e-33 -1.10076045e-37 C135 8.89682023e-34 -5.08431974e-32 7.08632767e-39 C136 -3.28127496e-38 -9.69426482e-44 -3.3240883e-41 C138 1.59430751e-37 -1.25601249e-41 3.75329875e-40 C140 3.36999076e-38 -5.77603868e-40 1.91878952e-39 C142 -5.84036805e-36 -9.18042096e-39 4.24324005e-39 C144 -1.25760855e-35 -8.96891059e-38 5.58832679e-39 C146 -6.29680966e-36 -1.26594479e-36 4.68852282e-39 C148 -6.83423186e-37 -2.8867468e-35 1.41481833e-39 C150 9.5611159e-37 -3.16060446e-34 2.99145204e-40 C152 -1.83279e-36 -1.74190979e-33 -9.78994275e-41 Table 3c to Fig. 7 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 2393.54173900 -2345.32539000 C7 -2.00161873e-08 -1.054273e-08 C9 -2.20524587e-08 -1.18537405e-07 C10 1.87197844e-10 4.98371365e-12 C12 4.65939083e-11 1.97555829e-12 C14 -1.76270998e-11 -2.37539357e-10 C16 3.94537544e-14 2.40480506e-15 C18 2.97357771e-13 -1.42820058e-13 C20 -2.42286021e-13 -4.04583116e-13 C21 7.48315304e-16 6.92152114e-17 C23 5.54053218e-16 1.13378106e-16 C25 1.01393198e-15 -5.02843362e-16 C27 4.92553835e-16 -5.38425742e-16 C29 5.56410789e-19 9.21589721e-20 C31 3.50949285e-18 -8.30902512e-19 C33 3.54582964e-19 -6.78596913e-18 C35 5.0514341e-18 -9.85781662e-18 C36 -2.85830377e-21 2.10243912e-23 C38 -1.85574224e-20 -2.63788989e-21 C40 -1.29100421e-20 -6.81338918e-21 C42 4.07391087e-20 7.15857237e-21 C44 1.07883797e-19 -1.03861562e-19 C46 -1.04948022e-24 1.58143781e-24 C48 -1.03837065e-22 3.69659393e-23 C50 -3.92235011e-22 3.51852125e-22 C52 -7.12678829e-22 1.23325212e-21 C54 -1.14349503e-21 1.22675404e-21 C55 2.05525326e-25 -3.61877134e-27 C57 1.79337019e-24 4.83656767e-26 C59 4.46019445e-24 3.89400831e-25 C61 2.22233984e-24 2.33848156e-25 C63 -2.46349142e-24 -7.00678032e-24 C65 -7.04987597e-24 6.84471889e-24 C67 8.86977131e-28 -1.70524556e-28 C69 4.1985169e-27 -2.52412938e-27 C71 2.09280303e-26 -2.62974404e-26 C73 2.78081275e-26 -1.23234969e-25 C75 6.00164293e-26 -2.80079601e-25 C77 9.67025381e-26 -1.97231674e-25 C78 -6.98103974e-30 1.21934514e-31 C80 -7.90501428e-29 7.72962153e-31 C82 -2.88369902e-28 -9.70182762e-31 C84 -3.59170388e-28 -6.46331404e-29 C86 -2.39461603e-29 -1.76676095e-28 C88 8.27529042e-29 5.29327812e-28 C90 1.23286348e-28 -3.50738705e-28 C92 -1.29990329e-32 4.8218447e-33 C94 -2.34921374e-32 7.2825706e-32 C96 -4.89803934e-31 9.38471738e-31 C98 -1.0421466e-30 5.78947376e-30 C100 -8.96427122e-31 1.95689414e-29 C102 -2.41424027e-30 3.2202921e-29 C104 -3.75981312e-30 1.63354875e-29 C105 1.40509236e-34 -1.80185269e-36 C107 1.79601632e-33 -5.4019662e-35 C109 8.53346212e-33 -5.85078446e-34 C111 1.70149197e-32 1.95334673e-34 C113 1.19188772e-32 1.38691264e-32 C115 -4.88655731e-33 5.80409324e-32 C117 6.72112188e-36 1.55026845e-32 C119 4.13573775e-33 1.22322626e-32 C121 6.90328834e-38 -6.71009227e-38 C123 -4.10352496e-37 -1.12574947e-36 C125 3.19939287e-36 -1.62636019e-35 C127 1.46123449e-35 -1.2925091e-34 C129 1.82071066e-35 -5.6554205e-34 C131 1.22346065e-35 -1.50315429e-33 C133 4.22711913e-35 -1.89902418e-33 C135 5.922356e-35 -7.53981088e-34 C136 -1.14844681e-39 9.78987855e-42 C138 -1.59499623e-38 8.2707742e-40 C140 -9.23584762e-38 1.50813718e-38 C142 -2.48674627e-37 4.56724095e-38 C144 -3.21958298e-37 -2.03330191e-37 C146 -1.04885481e-37 -1.97971525e-36 C148 1.47860245e-37 -6.62580389e-36 C150 -6.83387526e-38 -4.16539865e-36 C152 -1.57192051e-37 -7.31285438e-37 Table 4a to Fig. 7 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 708.24027011 M7 0.00000000 160.86914288 114.57615755 M6 0.00000000 -108.72656529 1109.47980395 M5 -0.00000000 -275.46053333 1338.63805917 M4 -0.00000000 -1046.80157846 1715.11232146 M3 0.00000000 525.51183564 1691.41307523 M2 0.00000000 1165.84603152 1364.08524877 AS -0.00000000 1315.80516928 1147.70727323 M1 -0.00000000 1648.37937407 685.25298704 Table 4b to Fig. 7 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M8 7.58086040 0.00000000 -0.00000000 M7 15.16172080 180.00000000 0.00000000 M6 -64.39945069 -0.00000000 -0.00000000 M5 -39.98829377 -0.00000000 180.00000000 M4 76.56024464 -0.00000000 -0.00000000 M3 -13.96944108 0.00000000 180.00000000 M2 -40.83451792 0.00000000 0.00000000 AS -17.20296458 180.00000000 -0.00000000 M1 15.05315048 180.00000000 -0.00000000

The position of the sagittal intermediate image and the meridional intermediate images corresponds to the projection optics 25 that of the projection optics 23 to 5 ,

Based on 8th Below is another embodiment of a projection optics 26 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 7 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 20.2 85.1 79.2 16.2 82.3 84.8 20.4 8.1 minute Angle of incidence [°] 18.3 71.8 70.2 13.2 72.6 75.9 0.0 4.6 Reflection surface extension in x-direction [mm] 447.0 363.9 408.4 623.2 323.8 195.7 295.8 798.7 Reflection surface extension in the y-direction [mm] 231.7 355.4 255.3 187.4 312.8 267.9 158.1 774.8 Max. Mirror diameter [mm] 447.3 383.7 408.7 623.2 347.7 279.7 296.0 798.7

A maximum angle of incidence on one of the NI mirrors is in the projection optics 26 on the mirror M7 before and is there 20.4 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 26 on the mirror M3 before and is there 70.2 °.

The optical design data of the projection optics 26 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 8 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Field size x 26.0 mm Field size y 1.6 mm curvature of field 0.0125 1 / mm RMS 12.37 mλ cover AS CRA 5:35 ° etendue 12.58 mm ² transmission 8.23% Pos. EP (x) 2510.51 mm Pos. EP (v) 6055.84 mm Obi ect image offset 1678.25 mm working distance 80 mm Field spacing 2199.95 mm obscuration 08.16% Space-square (799 × 2536 × 1760) mm ³ Table 2 to Fig. 8 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -790.4492739 0.0025114 -724.3763608 0.0027817 REFL M7 1121.3711092 -0.0017835 346.9722386 -0.0057643 REFL M6 17534.6565985 -0.0000194 30236.6755357 -0.0003897 REFL M5 3693.5873601 -0.0001194 -244725.3144758 0.0000371 REFL M4 -2005.6915787 0.0009648 -1449.6875591 0.0014259 REFL M3 4048.9950577 -0.0001338 -2047.0269001 0.0036068 REFL M2 1737.8860855 -0.0002275 -9661.5000550 0.0010472 REFL M1 -2120.1484508 0.0008899 -1387.0737880 0.0015285 REFL Table 3a to Fig. 8 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -790.44927390 1121.37110900 17534.65660000 C7 -1.38849914e-08 1.59722318e-06 9.45562101e-09 C9 -4.82086007e-09 1.41611674e-06 -2.14430802e-08 C10 -1.88498768e-11 1.18361302e-09 2.70713588e-11 C12 -5.90442591e-11 7.99290262e-09 -3.27381229e-11 C14 -2.23991075e-11 7.55335732e-09 6.72698226e-11 C16 -3.01449062e-14 8.29740423e-12 -2.83141051e-13 C18 -3.90050874e-14 3.22935559e-11 9.80186661e-14 C20 -1.11386584e-14 1.64677088e-11 -3.18499051 e-13 C21 -3.94089474e-17 5.86467521e-15 -3.75970315e-15 C23 -1.62148242e-16 7.87211466e-14 3.71012196e-15 C25 -1.71422572e-16 1.92994113e-13 -6.8892869e-16 C27 -4.93427404e-17 1.5103052e-13 5.21903328e-16 C29 -5.15552248e-20 7.04158984e-17 1.48986531e-16 C31 -1.21958545e-19 5.22116537e-16 -3.03489865e-17 C33 -8.79604e-20 8.69617463e-16 -4.60589894e-17 C35 -2.13080749e-20 4.50470257e-16 1.06763179e-17 C36 -7.41183608e-23 4.01781282e-20 1.10037084e-18 C38 -3.74153652e-22 8.91361595e-19 -1.00830647e-18 C40 -6.21902288e-22 3.98193274e-18 -5.01665632e-19 C42 -4.23295331e-22 7.49243217e-18 5.27475153e-19 C44 -9.35610187e-23 3.80223643e-18 8.36691131e-20 C46 -9.42330646e-26 4.62979089e-22 -5.2287143e-20 C48 -3.33555729e-25 8.40096622e-21 -2.84368641e-20 C50 -4.20490438e-25 3.39569105e-20 4.30443323e-20 C52 -2.259852e-25 4.56972466e-20 1.234705e-21 C54 -4.68217072e-26 9.84956877e-21 -4.16908282e-21 C55 -1.04660786e-28 -1.9190776e-25 -2.4408618e-22 C57 -6.58052266e-28 7.83141336e-24 -8.5693116e-23 C59 -1.59807249e-27 7.84542845e-23 3.08076896e-22 C61 -1.86560133e-27 5.05721625e-23 -2.09647242e-22 C63 -8.55911092e-28 -5.28920189e-22 -7.41554047e-23 C65 -6.31305449e-29 -1.99816223e-21 2.85819903e-23 C67 4.18392481e-32 4.21804542e-26 8.62457499e-24 C69 -7.3263571e-32 2.34048151e-25 1.37752887e-23 C71 1.21362535e-31 3.4102015e-26 -7.50727101e-24 C73 1.67425044e-31 -2.54929365e-24 -7.90900893e-24 C75 -2.6071615e-31 -7.37912852e-24 1.58753626e-24 C77 -1.33187666e-31 1.67084395e-24 1.74739353e-25 C78 -2.04817035e-34 2.56699151e-29 3.09418065e-26 C80 -2.19255634e-33 4.41392757e-28 6.94193231e-26 C82 -7.3495278e-33 -4.8677607e-28 -2.86348208e-26 C84 -8.96179006e-33 8.39714472e-27 4.20143612e-27 C86 -5.53071654e-33 6.87400296e-26 7.32188125e-26 C88 -2.69533678e-33 1.43478725e-25 -1.47435474e-26 C90 -1.32340262e-33 6.0061316e-25 -3.21485517e-27 C92 -1.73969403e-36 -3.02511672e-30 -7.12856594e-28 C94 -5.81878433e-36 -2.4577285e-29 -2.05410896e-27 C96 -1.78551239e-35 -2.55917305e-29 -8.75257659e-29 C98 -2.42894463e-35 9.8347137e-29 1.81777997e-27 C100 -1.62073889e-35 4.88900034e-28 1.03157606e-28 C102 -1.94617358e-36 1.84335276e-27 -3.13712379e-29 C104 1.47398325e-38 6.59406889e-28 1.41451379e-29 C105 -8.20384579e-40 -1.02600083e-33 -2.11121842e-30 C107 -1.78548607e-39 -3.9764611e-32 -9.87223619e-30 C109 1.95035709e-38 -3.30126932e-32 -4.56482097e-30 C111 2.53712663e-38 1.60243331e-31 1.81255455e-30 C113 7.82496597e-39 -4.43295146e-30 -1.18214129e-29 C115 -8.94132834e-39 -1.05383608e-29 -2.12255999e-30 C117 -4.12827015e-39 1.12506006e-30 1.32665594e-30 C119 1.40875453e-39 -7.24955208e-29 -3.6627658e-33 C121 6.46432099e-42 1.27280652e-34 2.38123254e-32 C123 1.20950981e-41 1.66719557e-33 1.03206296e-31 C125 7.16387798e-41 6.33683233e-33 5.92287155e-32 C127 1.3882739e-40 5.47435513e-33 -1.01892142e-31 C129 1.36154511e-40 1.97925027e-32 -3.50436435e-32 C131 5.7626087e-41 3.5541758e-32 -4.50908503e-34 C133 -5.84936735e-42 -1.31054771e-31 -7.52157767e-33 C135 -2.81698156e-43 -1.37520874e-31 -1.2761397e-34 C136 2.09115548e-46 3.89275271e-38 6.05831955e-35 C138 2.21203004e-45 2.34743669e-36 4.59500172e-34 C140 -1.58276392e-43 1.39468534e-35 5.81171168e-34 C142 -3.95067277e-43 2.61935215e-35 1.95376368e-35 C144 -3.60715835e-43 1.2587042e-34 6.5028061e-34 C146 -2.09402131e-43 1.05220808e-33 2.92430017e-34 C148 -2.19316697e-44 7.81123464e-34 2.21047607e-35 C150 1.03786955e-44 -2.49830769e-33 1.35943816e-35 C152 6.94257515e-45 3.83575344e-33 2.52751572e-37 C154 -1.58363496e-47 -1.91734885e-39 0 C156 -2.67354669e-47 -3.35923215e-38 0 C158 -1.97031855e-46 -1.89508137e-37 0 C160 -5.00396923e-46 -3.42525643e-37 0 C162 -6.48883079e-46 -1.32326969e-37 0 C164 -4.66416029e-46 -3.17693396e-36 0 C166 -1.48724029e-46 -6.46567145e-36 0 C168 1.0867471e-47 1.27573559e-36 0 C170 -2.50347403e-48 7.38251821e-36 0 C171 1.37632181e-51 -6.15024184e-43 0 C173 -4.09167106e-50 -4.55666778e-41 0 C175 1.45740074e-49 -4.19357261e-40 0 C177 7.16346388e-49 -1.60914499e-39 0 C179 7.31499208e-49 -1.52359638e-39 0 C181 2.87241655e-49 -1.48022327e-38 0 C183 -9.39144817e-50 -6.78457847e-38 0 C185 -2.668532e-49 -1.24134494e-38 0 C187 -1.06131213e-49 1.7934508e-37 0 C189 -3.22658001e-50 -6.40571866e-38 0 Table 3b to Fig. 8 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 3693.58736000 -2005.69157900 4048.99505800 C7 -2.47382381e-08 1.29728237e-08 -1.93591269e-07 C9 1.04715812e-07 -9.72822022e-08 1.04101515e-07 C10 -3.51967734e-11 1.89116698e-12 -1.68382584e-10 C12 -2.85544287e-11 -1.53999426e-11 -5.54174731e-11 C14 -2.35745672e-10 -4.30638369e-10 5.35552564e-11 C16 1.96902933e-13 -3.61585994e-15 1.04946481e-13 C18 2.9334079e-13 1.46667214e-14 4.02831368e-13 C20 1.22459418e-12 -5.61671949e-13 -1.74782239e-13 C21 -2.70227593e-16 4.86652523e-18 -4.47819934e-16 C23 -6.8077594e-16 -2.51373309e-18 -1.86360598e-16 C25 -2.06489e-15 -7.44419468e-17 -4.64910615e-16 C27 -7.42642533e-15 -1.53702828e-15 9.26628011e-16 C29 1.32107108e-18 -2.31727432e-21 2.89823487e-19 C31 2.06205186e-18 3.81594755e-20 -1.18888543e-19 C33 1.78222017e-17 -8.34787408e-19 3.69027417e-18 C35 4.77641626e-17 7.64619414e-18 -3.45849943e-18 C36 -9.34434187e-21 8.22296472e-24 6.93708427e-23 C38 -1.38240752e-20 2.54561578e-22 1.67482861e-20 C40 3.98487428e-20 -1.17574977e-21 1.3693849e-20 C42 -1.20270733e-19 -5.98242367e-20 -1.23445485e-19 C44 -3.65518414e-19 -3.1595429e-19 -1.27512125e-19 C46 2.70392764e-22 -4.8200435e-25 2.99717769e-23 C48 3.173139e-22 -6.06277625e-24 9.17991437e-23 C50 -8.6707004e-22 3.74049249e-23 -3.0490342e-22 C52 5.15542462e-22 4.22548991e-22 -1.51867215e-21 C54 3.50591764e-21 -3.06789785e-21 -1.40208993e-22 C55 6.2494865e-25 2.39977396e-29 -3.72913333e-26 C57 2.09114947e-26 -5.74748282e-27 -1.13704349e-24 C59 -6.40210161e-24 -8.10336845e-26 -3.99657115e-24 C61 2.81571455e-24 6.05792804e-25 4.13060627e-24 C63 -6.14583748e-24 1.78217759e-23 2.11974824e-23 C65 -3.11145163e-23 9.50223027e-23 1.53676917e-23 C67 -1.64462999e-26 9.46653588e-30 -1.09847857e-27 C69 -4.27554519e-26 2.73500119e-28 -5.52135745e-27 C71 1.08467224e-25 -3.24912778e-29 9.54866478e-27 C73 4.50229762e-26 -1.3370134e-26 1.37227464e-25 C75 1.14698331e-25 -1.64155378e-25 3.1330641e-25 C77 1.98018248e-25 2.57317012e-25 5.09391268e-26 C78 -3.47851153e-29 -1.15934061e-33 1.28569434e-30 C80 1.3534111e-29 2.40208618e-32 3.50017431e-29 C82 2.56198245e-28 1.63414314e-30 2.25121955e-28 C84 -6.00778102e-28 3.32626264e-29 2.54011228e-28 C86 -4.36448246e-28 -1.55201435e-28 -6.03826882e-28 C88 -1.11102807e-27 -2.44096466e-27 -1.14246064e-27 C90 -8.05442882e-28 -1.76594132e-26 -8.43820447e-28 C92 5.41662609e-31 -1.11018067e-34 2.15972342e-32 C94 2.66638087e-30 -4.89930986e-33 1.58561169e-31 C96 -3.09193952e-30 -1.94522575e-32 1.02515348e-31 C98 -1.3449449e-30 -1.53958901e-31 -3.7349495e-30 C100 1.2069745e-30 3.26228075e-30 -1.75469983e-29 C102 5.68180285e-30 2.47926155e-29 -2.57401144e-29 C104 1.84701176e-30 6.97946768e-29 -3.76407569e-30 C105 1.07206931e-33 2.09509713e-38 -2.82881021e-35 C107 -3.06137358e-33 9.333717e-37 -5.02467311e-34 C109 -8.88179027e-33 4.84615249e-36 -4.74026914e-33 C111 3.03853332e-32 -4.84801404e-34 -1.33925768e-32 C113 2.42090921e-32 -4.25645731e-33 -1.2105171e-32 C115 2.27759961e-33 3.34675924e-33 -8.31405317e-33 C117 -1.53118425e-32 2.03202218e-31 -1.95707599e-32 C119 -1.49707377e-33 1.16833989e-30 1.77818335e-32 C121 -8.08199509e-36 7.4338515e-40 -1.78034586e-37 C123 -4.75355496e-35 4.0623823e-38 -1.695069e-36 C125 -1.61254111e-35 1.01185108e-37 -5.59844346e-36 C127 -1.1467649e-34 4.46984416e-36 2.70094892e-35 C129 -8.33977368e-35 4.62995815e-35 2.3314547e-34 C131 -2.0614289e-35 -2.20864051e-34 7.20545667e-34 C133 1.90640342e-35 -2.02289595e-33 7.34156864e-34 C135 -2.16815518e-36 -1.1411907e-32 9.19130213e-35 C136 -1.30336025e-38 -1.66381617e-43 2.51730226e-40 C138 8.54194103e-38 -1.39461534e-41 2.7539496e-39 C140 1.83329465e-37 -1.93241795e-40 3.27692984e-38 C142 4.15785734e-38 1.71257701e-39 1.37931973e-37 C144 1,48044599e-37 2.07249807e-38 3.72992205e-37 C146 9.65061553e-38 2.09136472e-37 8.65364187e-37 C148 3.43345364e-38 -4.11620441e-37 2.35978986e-36 C150 -6.56991709e-39 -1.03847425e-35 2.25859391e-36 C152 4.0205461e-39 2.7307038e-35 -2.18956916e-38 Table 3c to Fig. 8 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 1737.88608500 -2120.14845100 C7 1.7757856e-08 -1.10635644e-09 C9 7.37656281e-08 -1.3388122e-07 C10 -2.63722921e-12 8.41924542e-11 C12 -9.25679985e-11 1.32585923e-10 C14 -1.19673236e-10 -1.13762156e-10 C16 5.90035954e-13 7.45004505e-14 C18 3.10053282e-14 7.98305481e-14 C20 3.39697169e-14 -5.71805837e-13 C21 2.46224998e-16 5.70426491e-17 C23 -7.63918855e-16 2.79930643e-16 C25 3.35238239e-16 1.10394114e-15 C27 1.7650621e-16 -1.85491959e-15 C29 1.88984988e-18 -9.18783774e-21 C31 5.80641081e-19 -4.48549418e-19 C33 -2.7544796e-19 5.56875722e-18 C35 7.36959621e-19 -8.82177533e-18 C36 7.63569985e-21 -3.18602787e-23 C38 1.72913505e-20 -1.19591298e-21 C40 7.332101e-21 -1.23873556e-20 C42 -2.86134995e-21 -3.7567181e-20 C44 -6.79345925e-21 -9.81966831e-20 C46 1.40358025e-22 2.86155087e-24 C48 2.59264333e-22 3.22672161e-24 C50 -7.49817945e-23 -1.76817154e-22 C52 -2.21687377e-22 -6.39466541e-22 C54 -2.24520825e-23 -2.1607279e-22 C55 -1.29636313e-25 3.33701712e-27 C57 -3.84002941e-25 1.60435727e-25 C59 1.13337932e-24 1.14203971e-24 C61 1.67032996e-24 6.18526527e-24 C63 1.74098058e-24 1.45761417e-23 C65 1.32775405e-25 2.25509076e-23 C67 -7.37560159e-27 -2.28529104e-28 C69 -2.05716163e-26 -2.06880466e-27 C71 -7.98449579e-27 -3.43033904e-27 C73 1.24313273e-26 3.07578543e-26 C75 9.32784101e-27 4.96308774e-26 C77 2.25363349e-27 -9.62778088e-27 C78 -4.25334727e-30 -5.35709414e-32 C80 -8.36862386e-30 -9.30183186e-30 C82 -1.28201582e-28 -7.78071539e-29 C84 -2.08514922e-28 -4.1291919e-28 C86 -1.6339876e-28 -1.24361159e-27 C88 -1.10665588e-28 -1.697588e-27 C90 -1.14411188e-29 -3.08421389e-27 C92 2.06940859e-31 8.09319659e-33 C94 7.65775765e-31 1.08252924e-31 C96 6.76447901e-31 6.20998284e-31 C98 -2.84058235e-31 6.37463023e-31 C100 -3.90474971e-31 -2.13300133e-30 C102 3.11711994e-32 2.93288554e-30 C104 -2.73443341e-32 2.78789045e-31 C105 3.14680118e-34 3.34424925e-37 C107 8.41600018e-34 2.89273722e-34 C109 5.11485635e-33 3.03113843e-33 C111 9.99811179e-33 1.71845918e-32 C113 9.64758442e-33 5.82085183e-32 C115 5.0377822e-33 1.04783061e-31 C117 2.1040055e-33 9.65613373e-32 C119 1.99309699e-34 2.02327862e-31 C121 -1.95203058e-36 -1.34308221e-37 C123 -9.8497421e-36 -2.31100154e-36 C125 -1.35910863e-35 -1.85787611e-35 C127 -4.20671379e-37 -6.49337089e-35 C129 1.02133712e-35 -3.94753585e-35 C131 5.16102865e-37 -1.13816442e-35 C133 -5.80650251e-36 -5.45416357e-34 C135 -1.51753557e-38 4.79642612e-36 C136 -4.37635269e-39 -3.4415929e-43 C138 -1.29377672e-38 -4.55877813e-39 C140 -7.12764621e-38 -5.89005444e-38 C142 -1.5845454e-37 -3.88501281e-37 C144 -2.03667943e-37 -1.47466304e-36 C146 -1.40120039e-37 -3.19634144e-36 C148 -3.62938719e-38 -3.38085085e-36 C150 2.73002121e-39 -2.19490921e-36 C152 -7.29237542e-40 -6.7618622e-36 Table 4a to Fig. 8 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 0.00000000 M7 0.00000000 0.00000000 143.00002101 M6 -0.00000000 0.00000000 -110.68935459 M5 0.00000000 0.00000000 -241.37064080 M4 -0.00000000 0.00000000 -865.60704518 M3 0.00000000 0.00000000 699.25693732 M2 0.00000000 0.00000000 1103.25301021 AS 0.00000000 0.00000000 1237.80575304 M1 0.00000000 0.00000000 1542.44217703 Table 4b to Fig. 8 surface TLA [deg] TLB [deg] TLC [deg] image plane 0.00000000 -0.00000000 0.00000000 M8 690.77427176 6.88359726 0.00000000 M7 107.14011017 13.76719452 180.00000000 M6 1142.53706319 -67.07353206 0.00000000 M5 1350.97609633 -44.41815583 0.00000000 M4 1724.90028056 73.89637126 0.00000000 M3 1689.79285124 -17.31373242 -0.00000000 M2 1423.99027063 -45.39408352 0.00000000 AS 1212.24554658 -22.59165667 180.00000000 M1 736.03552703 13.62704667 180.00000000

The position of the sagittal intermediate image and the meridional intermediate images corresponds to the projection optics 26 that of the projection optics 23 to 5 ,

Based on 9 Below is another embodiment of a projection optics 27 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 8th have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 18.6 82.2 80.1 15.4 84.2 84.4 20.2 8.5 minute Angle of incidence [°] 16.7 69.8 70.7 11.3 71.9 73.9 0.0 4.5 Reflection surface extension in x-direction [mm] 569.4 393.3 428.9 595.6 313.2 146.8 300.3 810.5 Reflection surface extension in the y-direction [mm] 292.4 279.8 345.5 220.2 285.8 283.1 200.3 794.0 Max. Mirror diameter [mm] 569.6 394.9 429.4 595.6 342.1 295.3 300.3 811.1

A maximum angle of incidence on one of the NI mirrors is in the projection optics 27 on the mirror M7 before and is there 20.2 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 27 on the mirror M2 before and is there 69.8 °.

The optical design data of the projection optics 27 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 9 wavelength 13.5 nm N / A 12:55 βx 4:00 βy -8.00 Field size x 26.0 mm Field size v 1.6 mm curvature of field 0.0125 1 / mm RMS 8.6 mλ cover AS CRA 5.1 ° etendue 12.58 mm ² transmission 8.21% Pos. EP (x) 3147.45 mm Pos. EP (y) 4928.91 mm Object-image offset 1689.73 mm working distance 79 mm Field spacing 2297.64 mm obscuration 20.2% Space-square (810 × 2678 × 1774) mm ³ Table 2 to FIG. 9 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -806.4215916 0.0024588 -761.7725591 0.0026482 REFL M7 1095.1364621 -0.0018262 492.6445023 -0.0040597 REFL M6 48894.3428514 -0.0000081 -10940.3180286 0.0009174 REFL M5 5688.4146431 -0.0000690 26039.1246184 -0.0003914 REFL M4 -2180.1295266 0.0008929 -1349.0646523 0.0015232 REFL M3 4118.9350142 -0.0001200 -3669.0094550 0.0022052 REFL M2 1426.7556390 -0.0003417 -9271.2417512 0.0008849 REFL M1 -2360.0933057 0.0008076 -1812.6106680 0.0011577 REFL Table 3a to Fig. 9 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -806.42159160 1095.13646200 48894.34285000 C7 -1.7934819e-08 1.2666643e-06 -7.16678821e-08 C9 3.96661465e-09 1.07034047e-07 2.01472783e-08 C10 -2.83719175e-11 1.46454982e-09 4.44298207e-11 C12 -6.52271178e-11 5.69551778e-09 5.15487724e-12 C14 -2.52005192e-11 4.30005571e-09 -7.05832011e-11 C16 -2.90870849e-14 7.03864402e-12 5.61357013e-14 C18 -3.09442187e-14 1.40286093e-11 -2.4699485e-13 C20 -1.07611109e-15 2.27106339e-12 1.55638983e-16 C21 -5.03678466e-17 5.83831182e-15 3.37343629e-16 C23 -1.7493115e-16 5.19220945e-14 4.57804283e-17 C25 -1.72504846e-16 7.40456108e-14 -8.64791461e-16 C27 -4.65535972e-17 1.3400983e-14 3.67672602e-16 C29 -4.66616192e-20 5.72451925e-17 -1.89428726e-17 C31 -1.01249543e-19 2.32195984e-16 -1.86960165e-17 C33 -6.11197778e-20 1.615387e-16 4.74797742e-18 C35 -2.40169468e-20 3.52152621e-16 -6.02283642e-19 C36 -8.0745705e-23 4.10824779e-20 -6.82309264e-19 C38 -3.79981197e-22 6.10328486e-19 -1.97908151e-19 C40 -5.9490144e-22 1.52913009e-18 1.99584989e-19 C42 -3.68360472e-22 2.28205895e-18 2.48754863e-20 C44 -7.61286175e-23 -3.92840478e-19 -5.41046731e-20 C46 -7.67504666e-26 7.90497224e-22 3.766426e-21 C48 -2.27521429e-25 1.85859014e-21 1.55707299e-20 C50 -2.81395251e-25 2.39837064e-21 3.99668373e-21 C52 -2.03668888e-25 6.87506967e-21 -5.70194825e-22 C54 1.32085321e-25 -4.13531876e-20 2.06698486e-22 C55 -1.40025334e-28 7.78193935e-25 2.15191044e-22 C57 -7.25785935e-28 -2.05005847e-24 1.92072134e-22 C59 -1.58538134e-27 -9.4815994e-24 4.78998644e-23 C61 -1.60484129e-27 -5.52430344e-24 -2.02629751e-23 C63 -8.96159315e-28 -2.52194799e-22 3.87898687e-24 C65 -2.99566395e-28 1.50109859e-22 2.37720034e-24 C67 -1.66406789e-31 -1.79322686e-26 3.69246851e-25 C69 -8.6590474e-31 2.39747976e-25 -1.44294487e-24 C71 -1.17509295e-30 1.09037969e-24 -2.05802356e-24 C73 -7.42134754e-31 9.41469806e-25 -1.49725097e-25 C75 4.16607726e-31 4.38121162e-25 4.58634992e-26 C77 -9.64438157e-31 3.74741956e-24 -1.11641096e-26 C78 -6.91325598e-35 -4.28330622e-29 -3.21078887e-26 C80 -1.44640118e-33 6.99618584e-28 -2.6300988e-26 C82 -4.23769085e-33 5.29838294e-27 -2.04921792e-26 C84 -5.08374257e-33 1.04193611e-26 -5.28641162e-27 C86 -4.01770328e-33 1.36980331e-26 1.05489947e-27 C88 -1.69549221e-33 4.87419803e-26 -4.60899836e-28 C90 -1.51807555e-34 4.2027212e-28 -6.80580259e-29 C92 1.38088745e-37 1.51955673e-30 1.10776398e-29 C94 1.73998866e-36 -9.24562852e-30 -3.50024612e-28 C96 1.35355347e-36 -8.86452272e-29 2.81520518e-28 C98 -3.04744105e-36 -1.73074451e-28 4.39282287e-29 C100 -1.87751106e-36 -6.61027116e-29 8.96393627e-31 C102 -3.56806272e-36 -7.13337777e-29 -1.35906597e-30 C104 4.80357669e-36 -2.82033217e-28 4.52044868e-31 C105 -1.33800179e-39 2.5378633e-33 2.54566982e-30 C107 -4.72482853e-39 -2.14994171e-32 -5.96001133e-31 C109 -9.35673674e-39 -3.49730335e-31 -4.57652911e-31 C111 -2.00490429e-38 -1.05198551e-30 1.97618327e-30 C113 -2.59800858e-38 -1.52242693e-30 1.62881491e-32 C115 -1.62049115e-38 -2.07506982e-30 -2.1737918e-32 C117 -4.05402033e-39 -5.05182638e-30 1.36096797e-32 C119 4.31314947e-39 -1.61434301e-30 -5.59772234e-34 C121 -1.76322401e-42 -4.58278781e-35 0 C123 -1.42504942e-41 2.49235193e-34 0 C125 -2.95860559e-41 3.9985733e-33 0 C127 -1.6462433e-41 1.199658e-32 0 C129 23674111e-42 1.52684221e-32 0 C131 -3.68567166e-42 2.88630964e-33 0 C133 3.76707704e-42 4.70038241e-33 0 C135 -1.57974997e-41 1.38860887e-32 0 C136 3.3300498e-45 -7.06673761e-38 0 C138 1.20573909e-44 3.1179351e-37 0 C140 8.17424278e-45 1.25776408e-35 0 C142 1.77849571e-44 5.65003155e-35 0 C144 4.62574591e-44 1.12178589e-34 0 C146 3.43155767e-44 1.37197596e-34 0 C148 2.80131843e-44 1.73572276e-34 0 C150 9.97979643e-45 2.82707392e-34 0 C152 -2.50176122e-44 1.26295112e-34 0 C154 1.37507001e-48 6.03641434e-40 0 C156 1.21127173e-47 -1.58764519e-39 0 C158 2.23009112e-47 -6.10624567e-38 0 C160 -1.51446908e-47 -2.59365784e-37 0 C162 -8.68394234e-47 -4.9086583e-37 0 C164 -1.03617872e-46 -4.97653388e-37 0 C166 -1.059047e-47 -4.90677605e-38 0 C168 2.66445653e-48 -1.48396607e-37 0 C170 2.42224548e-47 -3.40077071e-37 0 C171 -7.38617249e-51 8.08653584e-43 0 C173 -5.45474485e-50 7.45086567e-43 0 C175 -1.609285e-49 -1.63407488e-40 0 C177 -3.66302343e-49 -1.04987237e-39 0 C179 -6.62193125e-49 -2.85706967e-39 0 C181 -6.92495051e-49 -4.37169621e-39 0 C183 -4.19393782e-49 -4.912029e-39 0 C185 -2.27501188e-49 -5.84340016e-39 0 C187 -7.2696461e-50 -6.70732613e-39 0 C189 3.67556528e-50 -3.24726217e-39 0 Table 3b to Fig. 9 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 5688.41464300 -2180.12952700 4118.93501400 C7 8.19100809e-08 -5.56320484e-09 -1.6455032e-07 C9 4.49274358e-08 -2.00006027e-07 -1.94858883e-09 C10 8.37095135e-12 6.01034955e-13 -2.55108002e-11 C12 -1.48979036e-10 2.87185942e-11 -1.08449085e-10 C14 8.78671584e-11 -4.51072722e-10 1.85364923e-10 C16 4.28540635e-15 -9.99731442e-15 -3.19284299e-13 C18 1.76560976e-13 3.31307171e-14 5.86889321e-13 C20 -3.60458633e-13 -7.94786954e-13 -4.5987077e-13 C21 -3.35252208e-16 4.87589251e-18 -4.8229289e-16 C23 2.66126385e-16 -1.39927349e-17 7.28874164e-16 C25 -4.03330555e-16 5.72661474e-17 -1.46797021e-15 C27 1.31883652e-15 -2.40741256e-15 9.99490735e-16 C29 2.1974927e-18 -7.78543948e-21 4.26462587e-19 C31 2.32951685e-19 -2.11948072e-20 -1.58833247e-18 C33 1.87976593e-18 -3.33795685e-19 2.88707469e-18 C35 -7.22039053e-18 -2.24138207e-17 -2.7682269e-18 C36 -6.26315519e-21 -2.1471502e-23 -1.16040153e-21 C38 -4.82280783e-21 -4.81954954e-22 -4.85629923e-22 C40 -6.32220305e-21 -8.66953659e-22 1.52677585e-21 C42 -7.14089278e-21 1.09564341e-20 -1.07844165e-20 C44 2.05940259e-20 -3.68509601e-19 1.81173186e-20 C46 -1.60782505e-23 8.86511627e-26 3.85302462e-24 C48 -1.33575711e-22 3.27674159e-25 5.61595528e-24 C50 -3.0725726e-22 -1.18938569e-24 -6.97028568e-24 C52 -1.99551488e-22 2.26309617e-22 1.12789804e-22 C54 1.49225811e-22 -1.34284222e-21 -5.984516e-23 C55 3.50529917e-25 8.30775602e-28 1.37431837e-29 C57 2.41312337e-25 1.68512757e-26 1.94813873e-26 C59 9.58440061e-25 1.13714145e-25 -1.22807403e-26 C61 1.54064019e-24 3.22262429e-26 2.34505819e-25 C63 8.07165733e-25 -5.06962061e-25 -4.13030636e-25 C65 2.12166289e-25 3.27491583e-23 5.06787078e-26 C67 -1.66305416e-27 -2.40362864e-30 -6.80262502e-29 C69 2.50543931e-27 -3.28507837e-29 -2.26421849e-28 C71 1.74742584e-26 1.28838594e-28 -3.15480603e-28 C73 2.1144757e-26 9.73763886e-28 -1.11565404e-27 C75 1.21831332e-26 -4.89091496e-26 6.71116311e-29 C77 -1.69857862e-26 2.12356729e-25 -4.42157361e-29 C78 -1.3710869e-29 -1.44553985e-32 -1.14343212e-31 C80 5.03668776e-30 -3.45187438e-31 -5.32785981e-31 C82 -4.24162691e-29 -3.76044516e-30 -6.71025683e-31 C84 -9.49517228e-29 -1.21114337e-29 -2.66689632e-31 C86 -1.0996375e-28 3.59145369e-29 3.79394721e-30 C88 -4.7911626e-29 -3.64233711e-29 5.08331279e-31 C90 5.56651061e-29 -1.90856193e-27 3.21175857e-30 C92 1.04800785e-31 4.57946605e-35 7.67119533e-34 C94 4.65729543e-32 9.84569638e-34 1.77404288e-33 C96 -3.44398828e-31 1.56162716e-33 8.63279566e-33 C98 -5.32216517e-31 -6.33986287e-32 2.36263608e-32 C100 -5.26428851e-31 -1.05540267e-31 -1.88324358e-32 C102 -2.82229447e-31 5.88906857e-30 3.99984689e-32 C104 2.31825988e-31 -1.48855808e-29 -1.41416461e-32 C105 1.00967595e-34 1.51105317e-37 1.44625165e-37 C107 -6.76302426e-34 3.76398123e-36 4.84110761e-36 C109 6.19870876e-34 5.71600661e-35 1.00240909e-35 C111 2.30563367e-33 3.57613515e-34 4.98167953e-35 C113 2.91621575e-33 7.34961434e-35 -9.91641003e-35 C115 2.9162628e-33 -5.51487434e-33 1.07802866e-34 C117 1.20314744e-33 1.72974365e-32 -1.31640452e-34 C119 -1.04621728e-33 8.64761489e-32 2.42567435e-35 Table 3c to Fig. 9 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 1426.75563900 -2360.09330600 C7 2.85100776e-09 1.10786504e-08 C9 9.15001909e-09 -2.96863696e-08 C10 2.0583489e-10 2.62345128e-11 C12 -2.46297996e-11 3.07471153e-11 C14 -1.56485958e-11 -1.93497322e-10 C16 2.82715575e-13 3.82241973e-14 C18 5.75724203e-14 2.01043081e-13 C20 3.45937363e-14 -3.60884747e-13 C21 3.92771345e-16 4.26075681e-17 C23 1.01749343e-16 5.46976462e-17 C25 -6.00284176e-17 5.84797374e-16 C27 -5.02120728e-16 -7.41620869e-16 C29 1.54199203e-18 5.68233681 e-20 C31 3.85796644e-19 -1.62331518e-19 C33 -1.85511541e-19 9.67656462e-19 C35 -1.84994933e-18 -5.35388889e-18 C36 1.54206415e-21 2.59136027e-23 C38 2.44168704e-21 -5.79977534e-22 C40 -9.47030391e-21 -3.7911127e-21 C42 -4.68472913e-21 -2.4286467e-21 C44 1.18462595e-19 -1.40913047e-20 C46 2.31716292e-23 -1.28047117e-24 C48 8.18227121e-25 2.92126085e-25 C50 4.78797288e-24 1.78811491e-23 C52 -2.68597468e-22 2.15159816e-23 C54 -1.19437002e-21 1.41530962e-22 C55 -6.91322832e-27 -5.13292856e-28 C57 -2.07120542e-25 2.05075736e-26 C59 1.99755975e-25 1.67402996e-25 C61 2.09594546e-24 5.86182326e-25 C63 5.70063631e-24 1.14864609e-24 C65 2.23978697e-24 9.82056567e-25 C67 -3.23547005e-28 3.29779255e-29 C69 2.28188562e-28 4.23560951e-29 C71 2.13425428e-28 -1.14403398e-27 C73 -7.38816037e-27 -3.32553633e-27 C75 -1.55570478e-26 -4.65838322e-27 C77 4.64050004e-26 -6.41462644e-27 C78 5.95492232e-31 1.48672128e-32 C80 1.21032943e-29 -3.82783997e-31 C82 1.08632359e-29 -5.27883093e-30 C84 -5.92221108e-29 -2.42626559e-29 C86 -1.64891102e-28 -6.58480469e-29 C88 -3.32718161e-28 -1.15644431e-28 C90 -3.57308036e-28 -7.71451361e-29 C92 7.31945156e-33 -4.99228525e-34 C94 -3.42722223e-33 -2.20403906e-33 C96 -3.24184885e-33 2.48201874e-32 C98 -7.16437825e-33 1.31168151e-31 C100 7.60043445e-31 2.43975973e-31 C102 2.28981099e-30 3.9762372e-31 C104 1,65007236e-31 1.44304817e-31 C105 -5.0684362e-36 -2.20679295e-37 C107 -2.82394256e-34 3.57225973e-36 C109 -5.72378253e-34 8.50944562e-35 C111 5.18525862e-34 5.59679704e-34 C113 4.30087145e-33 1.97446599e-33 C115 4.92791667e-33 4.28520688e-33 C117 4.47242862e-33 6.37286531e-33 C119 9.02972727e-33 3.16038754e-33 C121 -4.57964353e-38 3.95317062e-39 C123 6.62642755e-38 3.33695165e-38 C125 3.04081225e-38 -2.25673196e-37 C127 1.42537898e-37 -2.19995432e-36 C129 -2.82308624e-36 -6.15962324e-36 C131 -3.49506036e-35 -9.38475045e-36 C133 -8.14056423e-35 -1.71659566e-35 C135 -4.22088901e-35 1.1786017e-36 C136 3.11288018e-41 1.67655821e-42 C138 2.51839513e-39 -1.39259693e-41 C140 7.23368161e-39 -6.76517624e-40 C142 4.55813605e-39 -6.11067719e-39 C144 -2.79280928e-38 -2.92285766e-38 C146 -7.14664963e-38 -8.16420938e-38 C148 5.49628282e-38 -1.47347598e-37 C150 2.02332831e-37 -1.89604602e-37 C152 6.16914297e-38 -4.90148262e-38 Table 4a to FIG. 9 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 703.91125244 M7 0.00000000 157.74971811 113.24356560 M6 0.00000000 -100.79055390 1081.30478466 M5 0.00000000 -345.52990255 1396.96326387 M4 0.00000000 -988.15125934 1760.72519213 M3 0.00000000 469.03261772 1690.71709723 M2 0.00000000 925.32826390 1410.73276313 AS 0.00000000 1204.31072167 925.85343590 M1 0.00000000 1519.45191520 378.12921294 Table 4b to Fig. 9 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M8 7.47649952 0.00000000 -0.00000000 M7 14.95299904 180.00000000 0.00000000 M6 -63.62976089 0.00000000 -0.00000000 M5 -40.86248203 0.00000000 180.00000000 M4 73.86849330 -0.00000000 -0.00000000 M3 -17.14198470 0.00000000 180.00000000 M2 -45.80939768 -0.00000000 -0.00000000 AS 10.62711050 180.00000000 0.00000000 M1 12.42253686 180.00000000 0.00000000

The position of the sagittal intermediate image and the meridional intermediate images corresponds to the projection optics 27 that of the projection optics 23 to 5 ,

Based on 10 Below is another embodiment of a projection optics 28 explains that instead of the projection optics 7 at the lighting system 1 to 1 can be used. Components and functions similar to those described above in connection with 1 to 9 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

The mirror M1 to M8 are again designed as a free-form surface mirror, for which the above-mentioned free-form surface equation (1) applies. M1 M2 M3 M4 M5 M6 M7 M8 Max. Angle of incidence [°] 21.8 83.5 81.2 13.9 81.1 83.3 21.2 8.7 minute Angle of incidence [°] 20.9 71.4 72.7 10.2 71.6 73.6 0.0 4.8 Reflection surface extension in x-direction [mm] 508.4 401.7 492.7 722.8 442.5 193.0 293.0 771.0 Reflection surface extension in the y-direction [mm] 328.8 420.6 431.8 159.6 283.4 243.9 171.7 761.0 Max. Mirror diameter [mm] 508.7 456.8 509.1 722.8 446.2 251.3 293.2 771.4

A maximum angle of incidence on one of the NI mirrors is in the projection optics 28 on the mirror M1 before and is there 21.8 °. A minimal angle of incidence on one of the GI mirrors is the projection optics 28 on the mirror M2 before and is there 71.4 °.

The optical design data of the projection optics 28 can be taken from the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to FIG. 10 wavelength 13.5 nm N / A 12:55 βx 4.80 βy -7.50 Field size x 26.0 mm Field size y 1.6 mm curvature of field 0.0125 1 / mm RMS 12.37 mλ cover AS CRA 5.0 ° etendue 12.58 mm ² transmission 8.1% Pos. EP (x) 4755.84 mm Pos. EP (y) -7843.41 mm Object-image offset 1842.47 mm working distance 80 mm Field spacing 2063.50 mm obscuration 16.0% Space-square (771 × 2798 × 1585) mm ³ Table 2 to FIG. 10 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M8 -765.1706093 0.0025922 -708.8852765 0.0028448 REFL M7 1369.0927917 -0.0014608 400.5971626 -0.0049926 REFL M6 -20941.4472492 0.0000190 -13666.3975327 0.0007355 REFL M5 26292.8812938 -0.0000176 -12561.6082313 0.0006882 REFL M4 -2061.0322442 0.0009472 -1434.8441887 0.0014280 REFL M3 5590.9907806 -0.0000815 -3779.5359208 0.0023224 REFL M2 1527.5950656 -0.0003066 -9677.5998153 0.0008825 REFL M1 -2947.8307214 0.0006337 -2069.7571113 0.0010346 REFL Table 3a to Fig. 10 coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -765.17060930 1369.09279200 -20941.44725000 C7 1.74794436e-08 -1,50379286e-06 5.0039409e-08 C9 4.7450824e-09 -8.69862608e-07 -3.03858977e-08 C10 -2.40801153e-11 1.6013987e-09 1.40111371e-10 C12 -7.12140751e-11 7.20991192e-09 -7.51389006e-11 C14 -3.10923744e-11 7.87299843e-09 -5.85898331e-11 C16 3.53114948e-14 -7.49116588e-12 -6.16415809e-13 C18 5.03871593e-14 -2.77347016e-11 1.93918267e-13 C20 1.35603683e-14 -1.5042697e-11 -2.63213009e-13 C21 -5.99418324e-17 6.22051851e-15 -1.20182253e-15 C23 -2.16168846e-16 6.88353908e-14 3.27250103e-15 C25 -2.25936103e-16 1.49823534e-13 -1.3683202e-15 C27 -7.4784706e-17 1.45425775e-13 -1.25286165e-16 C29 5.9846871e-20 -6.02351537e-17 4.36014879e-17 C31 1.65826284e-19 -4.00996137e-16 3.30368534e-18 C33 1.26641857e-19 -7.82927015e-16 -1.45591424e-17 C35 1.49973315e-20 7.38113752e-17 8.52578554e-18 C36 -1.07882794e-22 3.54697046e-20 -9.80513785e-20 C38 -4.95639118e-22 5.73151483e-19 7.42951318e-20 C40 -8.10815678e-22 2.27055676e-18 -1.14866644e-19 C42 -6.12241932e-22 2.98330366e-18 -7.69738763e-20 C44 -1.765576e-22 5.04372095e-18 7.38025137e-20 C46 7.37190307e-26 -5.00328072e-22 -3.34027203e-21 C48 4.1527894e-25 -6.68868853e-21 -6.16840537e-21 C50 4.66423684e-25 -1.84519158e-20 2.82731508e-21 C52 1.61965593e-25 -1.65713988e-20 4.25948935e-21 C54 6.9505023e-26 -3.31166767e-20 -3.86467342e-22 C55 -3.05715269e-28 1.17026902e-24 2.74593617e-23 C57 -1.68847677e-27 2.57605965e-23 -8.81580294e-23 C59 -3.70749613e-27 1.64151235e-22 -4.56905568e-23 C61 -3.97093223e-27 5.16850836e-22 7.56035222e-23 C63 -1.95600905e-27 8.43059245e-22 7.6124285e-24 C65 -3.04024125e-29 -5.25763227e-22 8.91919441e-25 C67 3.34248764e-31 -3.7397211e-27 2.6605166e-25 C69 4.60982416e-31 7.21675535e-26 1.50674921e-24 C71 1.86544351 e-30 6.53222367e-26 -9.80465487e-26 C73 2.08649779e-30 -1.04355368e-24 -8.84691803e-25 C75 1.47866458e-30 8.66539358e-25 -4.90976896e-25 C77 1.62572373e-31 3.3507246e-24 6.67238072e-26 C78 3.89897124e-34 -5.1700159e-29 -2.52121533e-27 C80 2.32223354e-33 -1.31414862e-27 9.97035845e-27 C82 8.03277981e-33 -1.06150188e-26 2.14589378e-26 C84 1.13481959e-32 -4.71190192e-26 9.92310449e-27 C86 6.05656252e-33 -1.19369374e-25 -1.5231012e-26 C88 2.19241903e-33 -1.55238702e-25 -2.13338151e-28 C90 -1.21415705e-33 3.29093305e-26 -6.41993793e-28 C92 8.13499183e-37 -4.49370519e-31 -2.63251654e-29 C94 1.30396148e-35 -1.45165465e-29 -1.53881982e-28 C96 1.91756649e-35 -7.62776737e-29 7.64471803e-29 C98 5.3057429e-36 -1.05627772e-28 -5.27008809e-29 C100 1.24224917e-36 8.72808879e-29 9.8944607e-29 C102 1.20937253e-36 -4.99955902e-28 2.45307646e-29 C104 1.80954835e-36 -9.91095862e-28 -1.02574391e-29 C105 -3.18024662e-39 1.85423314e-33 8.67487334e-32 C107 -2.65240749e-38 6.59720915e-32 -1.62430134e-31 C109 -1.1259601e-37 6.57909228e-31 -2.29078275e-30 C111 -2.48967727e-37 3.52821553e-30 -5.16951739e-30 C113 -2.6217524e-37 1.11268842e-29 6.44728786e-31 C115 -1.3533363e-37 2.17075516e-29 1.02068268e-30 C117 -4.23448661e-38 2.3063332e-29 -7.70990939e-33 C119 -5.00451731e-39 5.50371427e-30 9.3609616e-33 C121 -5.27925396e-42 1.64742565e-35 1.10005116e-33 C123 -6.37640575e-41 5.14338711e-34 5.31652926e-33 C125 -1.46057904e-40 3.68414809e-33 -9.99650601e-33 C127 -1.00027663e-40 9.73006779e-33 7.16015121e-33 C129 2.10458873e-41 3.61466976e-33 1.39631996e-33 C131 2.32423687e-41 -2.38651589e-32 -3.39453887e-33 C133 -8.71820675e-42 4.53876302e-32 -4.24487149e-34 C135 -1.43038618e-41 1.21515889e-31 4.40797265e-34 C136 2.99128828e-45 -3.49149371e-38 4.437023e-38 C138 3.34807691e-44 -1.650559e-36 -1.05433045e-35 C140 2.35394329e-43 -1.97172685e-35 7.82960538e-35 C142 8.27661406e-43 -1.2451271e-34 3.70411336e-34 C144 1.37794829e-42 -4.79373009e-34 1.01769441e-34 C146 1.14950722e-42 -1.16082441e-33 -2.69358953e-35 C148 4.55531176e-43 -1.85232678e-33 -2.63313635e-35 C150 9.41512333e-44 -1.83370038e-33 4.57476353e-37 C152 2.64871665e-44 -9.16053418e-34 1.24575595e-36 C154 1.80103563e-47 -2.81893359e-40 0 C156 1.67497639e-46 -8.3745025e-39 0 C158 5.45927109e-46 -7.70621748e-38 0 C160 8.00536588e-46 -3.05108261e-37 0 C162 5.6918187e-46 -5.65797794e-37 0 C164 1.70644389e-46 -5.55635972e-39 0 C166 3.93631825e-47 1.41309013e-36 0 C168 4.50899501e-47 -1.34025605e-36 0 C170 3.18752475e-47 -4.701381e-36 0 C171 -7.87033718e-51 3.29664974e-43 0 C173 -6.53250728e-50 1.88592881e-41 0 C175 -4.50880265e-49 2.67834178e-40 0 C177 -1.82269642e-48 1.94328424e-39 0 C179 -3.98124654e-48 8.67704761e-39 0 C181 -4.91954766e-48 2.55873538e-38 0 C183 -3.5349084e-48 4.83223976e-38 0 C185 -1.34295657e-48 6.2668754e-38 0 C187 -2.57056195e-49 5.90660796e-38 0 C189 -6.4985743e-50 3.88011098e-38 0 Table 3b to FIG. 10 coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 26292.88129000 -2061.03224400 5590.99078100 C7 -1.92391308e-07 4.02351684e-08 1.64842293e-07 C9 -6.04057984e-08 3.23296865e-07 -4.61294368e-08 C10 1.29100035e-12 2.49886621e-12 -1.54271202e-10 C12 -1.75644818e-10 -1.50134535e-11 8.95120535e-11 C14 1.49660788e-10 -9.88591105e-10 2.47395337e-11 C16 -5.38312743e-14 3.07223136e-14 -9.46808068e-14 C18 -2.05869417e-13 -2.0201754e-13 -1.03217704e-13 C20 3.84469502e-13 3.37589035e-12 2.09737753e-14 C21 1.00511619e-16 7.44529845e-19 -8.45742213e-17 C23 2.1984225e-16 -1.14114116e-16 8.3558825e-17 C25 -4.52698005e-16 1.03890171e-15 -9.43480728e-18 C27 1.53576409e-15 -2.13490587e-15 3.06001977e-18 C29 7.6993361e-19 3.08641192e-21 -7.54464983e-20 C31 1.50259165e-18 5.28576262e-20 -3.0999375e-19 C33 -1.72045187e-18 3.10194076e-18 3.14072173e-19 C35 5.98886005e-18 3.07005606e-16 -4.14841151e-20 C36 2.2071823e-21 -3.93923319e-24 -1.38201991e-22 C38 9.32008905e-22 3.189474e-24 4.06532737e-22 C40 -5.91357198e-21 2.70288525e-21 -2.06772522e-21 C42 -9.38234337e-21 5.08010035e-20 -2.41361753e-22 C44 3.04996754e-20 -3.2630273e-19 -3.89324909e-22 C46 -5.61677629e-23 2.76822299e-25 -2.49353216e-24 C48 -1.24025999e-22 9.54058167e-24 -7.69156287e-24 C50 -8.30407608e-23 1.49190933e-22 -8.95917137e-24 C52 1.0334459e-22 7.58252549e-22 4.1594614e-24 C54 8.22219786e-23 -7.23648432e-20 7.17125056e-24 C55 -1.44876405e-25 1.13986694e-28 -1.20256966e-26 C57 -4.64762041e-25 2.45533935e-27 5.79252935e-27 C59 -6.28480222e-25 2.45381789e-26 4.58871073e-26 C61 5.100289e-25 -1.85149336e-25 2.84879006e-26 C63 4.18478495e-25 -1.77014453e-23 3.34200541e-26 C65 1.36339538e-25 9.89456732e-23 1.09232032e-26 C67 1.27038358e-27 -1.98581663e-30 1.65214778e-29 C69 3.11167892e-27 -1.61924724e-28 2.69739351e-28 C71 8.53408929e-27 -4.13013393e-27 4.16881607e-28 C73 -9.497661e-28 -5.49922738e-26 1.05895728e-28 C75 -6.11795721e-27 -1.59382679e-25 -1.70087604e-29 C77 4.39310998e-27 1.25695157e-23 -2.46779256e-28 C78 3.16790027e-30 -7.60143945e-34 2.02564644e-31 C80 1.63398056e-29 -4.29340676e-32 -7.71661514e-32 C82 5.65768188e-29 -1.28818047e-30 -1.66070071e-30 C84 4.03212511e-29 -1.10113653e-29 -2.17612628e-30 C86 -4.14783903e-29 4.15209898e-29 -1.9224301e-30 C88 -1.86683159e-29 5.52191197e-27 -1.02617028e-30 C90 2.23629484e-29 3.22853196e-26 -3.51361991e-31 C92 -1.675827e-32 2.06150373e-36 1.82218789e-34 C94 3.62425766e-32 1.35282288e-33 -3.18123134e-33 C96 -3.14760567e-32 5.23637743e-32 -4.78463092e-33 C98 -1.02467269e-31 9.79164722e-31 -3.33191669e-33 C100 3.01191588e-33 1.24778691e-29 -9.08339139e-34 C102 1.39811405e-31 1.7706763e-29 -3.10396096e-34 C104 -9.07809021e-32 -1.41734963e-27 3.85462106e-33 C105 -4.01936077e-35 2.53121383e-39 -2.12978299e-36 C107 -2.03779992e-34 3.50134626e-37 -8.29448849e-39 C109 -9.77923818e-34 1.9581133e-35 1.87861071e-35 C111 -2.13278343e-33 3.14221956e-34 4.47952521e-35 C113 -4.63996285e-34 3.88007136e-33 3.49011186e-35 C115 9.00260406e-34 -3.23403349e-32 3.76832888e-35 C117 -5.96271356e-35 -8.98581709e-31 3.44381675e-35 C119 -4.08889496e-34 -1.02628303e-29 8.45053067e-36 C121 7.57826329e-38 5.3869131e-41 -4.10660254e-39 C123 -1.65009612e-36 -5.73020148e-39 1.56368469e-38 C125 -6.04083826e-36 -3.37497481e-37 -1.14252725e-38 C127 -6.82312609e-36 -7.82031272e-36 -2.68532239e-38 C129 -6.8496594e-37 -1.34531392e-34 -3.2714919e-38 C131 2.56806145e-36 -1.27407001e-33 -6.46069943e-38 C133 -5.9655837e-36 -8.71015769e-35 3.87424216e-38 C135 2.63440461e-36 9.998216e-32 -3.69127425e-38 C136 2.06694487e-40 3.34434073e-45 6.94228999e-42 C138 2.11264785e-40 -1.34443488e-42 4.62695654e-42 C140 -4.86799635e-39 -1.3451671e-40 -4.26672305e-41 C142 -7.16387358e-39 -3.14463328e-39 -1.02849414e-40 C144 -8.93808989e-39 -5.57031049e-38 -1.55923579e-40 C146 7.47390082e-40 -4.73763443e-37 1.06862126e-40 C148 2.86733136e-40 5.78117504e-36 -4.78309515e-40 C150 -1.45018156e-38 7.22144063e-35 -2.16976212e-40 C152 9.94366691e-39 1.02763985e-33 -1.20705377e-40 Table 3c to Fig. 10 coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 1527.59506600 -2947.83072100 C7 -2.80842767e-08 -1.29432823e-08 C9 -1.4326993e-08 2.24090246e-08 C10 1.95886885e-10 1.50831429e-11 C12 -2.57084832e-11 2.61359141e-11 C14 -7.62891388e-11 -5.40939844e-11 C16 -4.77437685e-14 -2.02665315e-14 C18 -2.83472123e-13 -5.9156932e-14 C20 -6.59561751e-14 7.85849407e-14 C21 8.74881993e-16 1.25660731e-17 C23 1.9544113e-16 7.57142711e-18 C25 -4.09581702e-16 1.30396087e-16 C27 1.92290104e-16 -2.2283278e-16 C29 -1.48842398e-18 -2.34022795e-21 C31 -3.58236935e-18 1.596138e-19 C33 -6.98478304e-19 3.04277604e-20 C35 3.86755544e-18 5.90505473e-19 C36 -6.86729059e-22 9.98928795e-23 C38 -1.21467487e-20 1.54958883e-21 C40 -1.33365744e-20 5.84215534e-21 C42 1.52161016e-20 8.15276611e-21 C44 2.02635882e-20 -2.34548537e-21 C46 7.23950866e-23 -4.4971599e-25 C48 7.12954833e-23 -3.58643288e-24 C50 1.42855561e-22 -2.21141821e-23 C52 1.34023731e-22 -4.82760756e-23 C54 -5.16627498e-23 -2.40745048e-23 C55 3.06309757e-25 -3.95291392e-27 C57 8.70502437e-25 -7.52172127e-26 C59 1.43901343e-24 -4.18121446e-25 C61 7.29078429e-25 -9.90719762e-25 C63 -3.29438324e-25 -7.94880197e-25 C65 -8.8794297e-25 1.31540065e-25 C67 -3.59151966e-27 6.42069587e-30 C69 -4.20462107e-27 8.06845048e-29 C71 -8.10412279e-27 9.26374502e-28 C73 -7.50829309e-27 2.69068016e-27 C75 -5.70181675e-27 3.27891034e-27 C77 -1.32097374e-27 3.12140803e-27 C78 -7.92492354e-30 8.27077144e-32 C80 -2.78248589e-29 2.09100386e-30 C82 -7.63418931e-29 1.53587472e-29 C84 -7.08098841e-29 5.34082189e-29 C86 -2.13274295e-29 8.33862102e-29 C88 1.35745721e-30 4.64453652e-29 C90 1.47796685e-29 -1.28526798e-29 C92 7.63884366e-32 -2.12522853e-35 C94 8.10186285e-32 -2.95760747e-34 C96 1.97147328e-31 -1.88748547e-32 C98 3.1172979e-31 -9.25642842e-32 C100 2.24451054e-31 -1.63478495e-31 C102 1.22936213e-31 -1.34847499e-31 C104 5.37618414e-32 -1.24309234e-31 C105 8.76592345e-35 -9.60872287e-37 C107 3.90418877e-34 -3.25812617e-35 C109 1.70121907e-33 -3.0161531e-34 C111 2.54514939e-33 -1.41667071e-33 C113 1.73779392e-33 -3.38088407e-33 C115 5.26211277e-34 -3.72226681e-33 C117 1.52827167e-34 -1.3149869e-33 C119 -5.13105586e-35 5.90467073e-34 C121 -7.03367087e-37 -2.61781089e-40 C123 -7.30798934e-37 -7.94345299e-39 C125 -1.63436532e-36 1.58239041e-37 C1 27 -3.65343567e-36 1.41918614e-36 C129 -4.51159945e-36 3.90364711e-36 C131 -2.76997822e-36 5.09992425e-36 C133 -9.69844478e-37 2.51858856e-36 C135 -4.91767269e-37 3.00168025e-36 C136 -1.87474623e-40 5.90762426e-42 C138 -1.46579979e-39 2.6932599e-40 C140 -1.32121945e-38 3.01192409e-39 C142 -2.77746339e-38 1.79044419e-38 C144 -3.06154932e-38 5.8835076e-38 C146 -1.9829294e-38 1.03176829e-37 C148 -7.61505711e-39 8.24272945e-38 C150 -2.06733896e-39 1.7549457e-38 C152 -6.20113915e-40 -1.67925004e-38 Table 4a to FIG. 10 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 666.64738277 M7 0.00000000 -148.49128757 110.42286253 M6 0.00000000 88.01531328 996.23336389 M5 0.00000000 339.29325935 1312.65484079 M4 0.00000000 948.43019918 1591.47251843 M3 0.00000000 -235.60906387 1580.64131066 M2 0.00000000 -835.01820831 1280.11885578 AS 0.00000000 -1042.75316932 1008.89868957 M1 0.00000000 -1677.68244955 179.93073891 Table 4b to Fig. 10 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M8 -7.47362992 0.00000000 -0.00000000 M7 -14.94810809 180.00000000 0.00000000 M6 63.29855244 0.00000000 -0.00000000 M5 38.07042599 0.00000000 180.00000000 M4 -77.44055031 0.00000000 -0.00000000 M3 13.57583444 0.00000000 180.00000000 M2 39.58903323 0.00000000 -0.00000000 AS 0.93496730 180.00000000 0.00000000 M1 -16.22474811 180.00000000 0.00000000

In the projection optics 28 the entrance pupil is in the first imaging light plane xz in the imaging light beam path after the object field 4 and in the second imaging light plane yz in the imaging beam path in front of the object field 4 ,

The position of the sagittal intermediate image and the meridional intermediate images corresponds to the projection optics 28 that of the projection optics 23 to 5 ,

The projection exposure apparatus is used to produce a microstructured or nanostructured component 1 used as follows: First, the reflection mask 10 or the reticle and the substrate or the wafer 11 provided. Subsequently, a structure on the reticle 10 on a photosensitive layer of the wafer 11 using the projection exposure system 1 projected. By developing the photosensitive layer, a micro or nanostructure is then formed on the wafer 11 and thus produces the microstructured component.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102015221984 A1 [0002]
• JP 2002048977 A [0002]
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• DE 102015209827 A1 [0002]
• WO 2008/141686 A1 [0002]
• WO 2015/014753 A1 [0002, 0038]
• WO 2012/126867 A [0039]
• DE 10155711 A [0039]
• US 20070058269 A1 [0047]
• WO 2016/188934 A1 [0051]
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• DE 102009045096 A1 [0084]

Claims (10)

Imaging optics (7; 21; 22; 23; 24; 25; 26; 27; 28) for projection lithography - with a plurality of mirrors (M1 to M10; M1 to M11; M1 to M8) for guiding imaging light (3) from an object field (4) in an object plane (5) to an image field (8) in an image plane (9) along an imaging light beam path, with an image-side numerical aperture greater than 0.5, - Wherein the object field (4) is spanned by a first Cartesian object field coordinate (x) along a first, larger object field dimension and a second Cartesian object field coordinate (y) along a second, smaller object field dimension, wherein a first imaging plane (xz) is spanned by the first Cartesian object field coordinate (x) and a field normal (z) on the image field (8), wherein a second imaging plane (yz) is spanned by the second Cartesian object field coordinate (y) and the field normal (z), - wherein a first absolute magnification (ßx) of the imaging optics (7; 21; 22; 23; 24; 25; 26; 27; 28) in the first imaging plane (xz) of a second absolute magnification (βx) of the imaging optics in the second imaging plane (yz), - wherein an angle (CRA) between a main beam (16) of the imaging light (3) emanating from a central object field point and the object field normal (z) is at least 4 °, wherein a last mirror (M10; M11; M8) in the imaging light beam path has a passage opening (17) for the passage of the imaging light (3), - Wherein a reflection surface of the last mirror (M10; M11; M8) around the passage opening (17) is used around the full circumference for the reflection of the imaging light (3), with an obscured portion of the image-side numerical aperture in the imaging light beam path of at most 27%, - wherein the mirrors (M1 to M10, M1 to M11; M1 to M8) of the imaging optics (7; 21; 22; 23; 24; 25; 26; 27; 28) can be accommodated in a space-cuboid, the - has an extension of at most 1000 mm in the direction of the first object field coordinate (x), - has an extension of at most 3000 mm in the direction of the second object field coordinate (y) and - in the direction of the object field normal (z) has an extension of at most 2500 mm, with an object-image offset between a central object field point and a central image field point along the second object field coordinate (y), which is greater than 1700 mm. Imaging optics after Claim 1 , characterized by an embodiment such that an entrance pupil in the imaging beam path in front of the object field (4). Imaging optics after one of the Claims 1 or 2 , characterized in that a beam path of the imaging light (3) along the imaging beam path between the entrance pupil and the object field (4) is greater than 1000 mm. Imaging optics after one of the Claims 1 to 3 characterized by a plurality of GI mirrors (M2 to M8; M2 to M9; M2, M3, M5, M6) and a plurality of NI mirrors (M1, M9, M10; M1, M10, M11; M1, M4; M7, M8). Imaging optics after Claim 4 , characterized in that a maximum angle of incidence on one of the NI mirrors (M1, M9, M10, M1, M10, M11, M1, M4, M7, M8) is at most 25 °. Imaging optics after Claim 4 or 5 characterized in that a minimum angle of incidence on one of the GI mirrors M2 to M8; M2 to M9; M2, M3, M5, M6) is at least 65 °. Optical system - with an imaging optic according to one of the Claims 1 to 6 , - with an illumination optical system (6) for illuminating the object field (4) with illumination light (3) of a light source (2). Projection exposure system with an optical system after Claim 7 and a light source (2) for generating the illumination light (3). Method for producing a structured component with the following method steps: providing a reticle (10) and a wafer (11), Projecting a structure on the reticle (10) onto a photosensitive layer of the wafer (11) using the projection exposure apparatus Claim 8 , - Generating a micro or nanostructure on the wafer (11). Structured component produced by a method according to Claim 9 ,

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