DE102017208207A1 - A microspectrum module, method of making a microspectrum module, and method of adjusting a mirror pitch of an optical cavity of a microspectrum module - Google Patents

Abstract

The invention relates to a microsphere telemetry module (200) comprising an optical resonator (202) with at least one first mirror element (204) and a second mirror element (206) arranged at a distance from the first mirror element (204). At least one of the mirror elements (204, 206) is curved and / or bent in a light incidence region (218) of the optical resonator (202). The microspectrum module (200) further includes an optical element (226) for directing light to the light incident region (218).

Description

State of the art

The invention is based on a device or a method according to the preamble of the independent claims. The subject of the present invention is also a computer program.

Conventional micromechanical Fabry-Perot interferometers usually consist of two mirror elements, which are arranged on a substrate, optionally over a through hole, as for example in the US 5,561,523 is described. In addition, interferometers are known, which are constructed of two substrates with through holes, as in US 6,721,098 shown. The light beam is passed vertically through the sandwich design with two highly reflective mirrors, each narrow-band areas are transmitted to the resonance wavelength of the interferometer and their overtones depending on the distance between the two mirrors. By varying the distance, the desired resonance wavelength can be adjusted. With a subsequent detector, the light output is then measured and so serially recorded a spectrum.

Disclosure of the invention

Against this background, with the approach presented here, a microspectrum module, a method for producing a microspectrum module, a method for adjusting a mirror spacing of an optical resonator of a microspectrum module, furthermore a device using this method, and finally a corresponding computer program according to the main claims are presented. The measures listed in the dependent claims advantageous refinements and improvements of the independent claim device are possible.

• einem optischen Resonator mit zumindest einem ersten Spiegelelement und
• einem gegenüber dem ersten Spiegelelement beabstandet angeordneten zweiten Spiegelelement, wobei das erste Spiegelelement und/oder das zweite Spiegelelement in einem Lichteinfallsbereich des optischen Resonators gekrümmt und/oder krümmbar ausgestaltet ist; und
• zumindest einem optischen Element zum Lenken von Licht auf den Lichteinfallsbereich.

A microspectrum module is presented with the following features:

• an optical resonator having at least a first mirror element and
• a second mirror element arranged at a distance from the first mirror element, the first mirror element and / or the second mirror element being curved and / or curved in a light incidence region of the optical resonator; and
• at least one optical element for directing light to the light incidence area.

A micro-spectrometer module can be understood as a miniaturized module for analyzing the spectral composition of light by means of an optical resonator. The optical resonator may, for example, be a Fabry-Perot resonator consisting of two partially transparent mirror elements arranged opposite one another and spaced apart from one another. By an optical element, for example, a lens or a reflector can be understood. By the optical element, the light output of the Microspectrum module can be increased. Furthermore, a limitation of the spectral bandwidth of the optical resonator is possible by the arrangement of mirror elements and optical element. The mirror distance, also called cavity length, can be varied, for example, by means of the actuator. The optical resonator can thus have a cavity length tunable by means of the actuator.

Thus, the microspectrum module may optionally include an actuator for changing a curvature of the first mirror element and / or a curvature of the second mirror element, for example, depending on the mirror distance. An actuator may be understood to mean an actuator device comprising one or more actuator elements, such as electrostatic or piezoelectric actuator elements. For example, the actuator may have an actuator element for changing the mirror spacing and at least one further actuator element for changing the curvature of at least one of the two mirror elements or a curvature difference between the two mirror elements.

Further, the microspectrum module may optionally include a distance sensor for measuring a mirror spacing between the first mirror element and the second mirror element. A distance sensor can be understood to mean a sensor device comprising at least one sensor element, for example a capacitive sensor element. Depending on the embodiment, the actuator or, additionally or alternatively, the distance sensor may be integrated in at least one of the two mirror elements.

According to one embodiment, a microspectrum module can be embodied with curved or bendable mirrors, wherein a respective curvature of the mirrors can be variable by means of a suitable actuator device as a function of a respective distance of the mirrors from each other or to a detector of the microspectrum module. In addition, the microspectrum module may, for example, comprise an optical element, such as a lens, upstream of the detector. By setting a respective radius of curvature as a function of the mirror spacing, it is possible to produce a geometrical interferometer mirror contour which is based on conditions of the optical path, ie. H. to local variations of a light incidence angle, tuned and only filters certain wavelengths. Advantageously, the aperture of the optical path can be increased by the upstream optical element, without having to increase the usable filter area of the interferometer.

Thus, through the approach presented here, a very compact design of the microspectrum module and its electronic components, such as Fabry-Perot interferometer and detector, can be achieved with simultaneously high light output of the detector path. For example, the optical resonator and the detector can be built on top of each other on the same substrate without additional spacers. By improving the light yield, in turn, the energy requirement of the microspectrum module can be reduced. By minimizing the Fabry-Perot interferometer and detector, a cost-optimal configuration of the microspectrum module is thus made possible.

According to one embodiment, the actuator may be configured to change the mirror spacing. As a result, the cavity length of the optical resonator can be tuned.

It is advantageous if the first mirror element in the light incidence region has a spherical surface-shaped first bulge. Additionally or alternatively, the second mirror element in the light incidence region may have a spherical surface-shaped second bulge. Accordingly, the actuator may be configured to change a curvature of the first protrusion or a curvature of the second protrusion depending on the mirror distance. As a result, the microspectrum module can be manufactured at relatively low cost.

According to a further embodiment, the first bulge and the second bulge may be arranged opposite one another. Additionally or alternatively, the two bulges may have a common direction of curvature. For example, at least one of the two bulges may be bulged against a light incidence direction in which the light falls on the light incidence area. This makes it possible to direct the light incident on the light incidence region at high light output and constant spectral bandwidth through the optical resonator, for example also to a resonator downstream of the detector.

According to a further embodiment, the first mirror element in the light incidence region may have a curvature structure made up of a plurality of relatively movable segments, or in other words, a curvature structure formed by a plurality of concentrically arranged arcuate openings. Additionally or alternatively, the second mirror element in the light incidence region may have a curvature structure made up of a plurality of relatively movable segments, or in other words, a curvature structure formed by a plurality of concentrically arranged arcuate openings. In this case, the actuator can be designed to deform the curvature structure of the first mirror element to change the curvature of the first mirror element and additionally or alternatively to change the curvature of the second mirror element to deform the curvature structure of the second mirror element. As a result, the curvature or curvature of the mirror elements can be realized with low production costs.

The optical resonator can be designed, for example, as a Fabry-Perot resonator. Thereby, the spectral composition of the incident light can be measured efficiently and accurately.

The microspectrum module according to another embodiment may comprise a light source for illuminating an object to be analyzed by means of the microspectrum module or, additionally or alternatively, a detector for detecting light filtered by the optical resonator. A detector may be understood to mean a light sensor, for example in the form of a CCD or CMOS sensor, a photodiode or a phototransistor. A light source can be understood as a broadband light source. The light source may, for example, also be a (near) infrared light source. By this embodiment, the range of functions of the microspectrum module can be extended without significant increase in the design.

Furthermore, the microspectrum module may include a bandpass pre-filter for pre-filtering light. The bandpass pre-filter may be connected upstream of the detector with respect to a light incident direction. As a result, unwanted interference orders can be filtered out.

The optical element may be further shaped to direct the light to the detector. By an optical element, for example, a lens or a reflector can be understood. As a result, the luminous efficacy of the microspectrum module can be increased.

According to a further embodiment, the optical resonator may be arranged between the optical element and the detector. As a result, the microspectrum module can be made particularly compact.

• Anordnen eines ersten Spiegelelements und eines zweiten Spiegelelements an einem Substrat, um einen optischen Resonator zu bilden, wobei das erste Spiegelelement und das zweite Spiegelelement beabstandet einander gegenüberliegend angeordnet werden und das erste Spiegelelement und/oder das zweite Spiegelelement in einem Lichteinfallsbereich des optischen Resonators gekrümmt und/oder krümmbar ausgestaltet wird; und
• Integrieren eines Abstandssensors und eines Aktors in den optischen Resonator, wobei der Abstandssensor ausgebildet ist, um einen Spiegelabstand zwischen dem ersten Spiegelelement und dem zweiten Spiegelelement zu messen, und der Aktor ausgebildet ist, um eine Krümmung des ersten Spiegelelements und/oder eine Krümmung des zweiten Spiegelelements abhängig vom Spiegelabstand zu ändern.
• Zudem schafft der hier vorgestellte Ansatz ein Verfahren zum Einstellen eines Spiegelabstands eines optischen Resonators eines Mikrospektrometermoduls gemäß einer der vorstehenden Ausführungsformen, wobei das Verfahren folgende Schritte umfasst:
  • Empfangen eines von dem Abstandssensor bereitgestellten Messwerts, der den Spiegelabstand repräsentiert; und
  • Ausgeben eines Ansteuersignals zum Ansteuern des Aktors unter Verwendung des Messwerts, um die Krümmung des ersten Spiegelelements und/oder die Krümmung des zweiten Spiegelelements abhängig vom Spiegelabstand zu ändern.

The approach presented here also provides a method of manufacturing a microspectrum module, the method comprising the steps of:

• Arranging a first mirror element and a second mirror element on a substrate to form an optical resonator, wherein the first mirror element and the second mirror element are spaced from each other and the first mirror element and / or the second mirror element is curved in a light incident region of the optical resonator and / or is designed bendable; and
• Integrating a distance sensor and an actuator in the optical resonator, wherein the distance sensor is adapted to measure a mirror distance between the first mirror element and the second mirror element, and the actuator is formed to a curvature of the first mirror element and / or a curvature of the second Mirror element to change depending on the mirror distance.
• In addition, the approach presented here provides a method for adjusting a mirror spacing of an optical resonator of a microspectrum module according to one of the preceding embodiments, the method comprising the following steps:
  • Receiving a measurement provided by the distance sensor representing the mirror distance; and
  • Outputting a drive signal for driving the actuator using the measured value to change the curvature of the first mirror element and / or the curvature of the second mirror element depending on the mirror spacing.

These methods can be implemented, for example, in software or hardware or in a mixed form of software and hardware, for example in a control unit.

The approach presented here also creates a device that is designed to perform the steps of a variant of a method presented here in appropriate facilities to drive or implement. Also by this embodiment of the invention in the form of a device, the object underlying the invention can be solved quickly and efficiently.

For this purpose, the device may comprise at least one computing unit for processing signals or data, at least one memory unit for storing signals or data, at least one interface to a sensor or an actuator for reading sensor signals from the sensor or for outputting data or control signals to the sensor Actuator and / or at least one communication interface for reading or outputting data embedded in a communication protocol. The arithmetic unit may be, for example, a signal processor, a microcontroller or the like, wherein the memory unit may be a flash memory, an EPROM or a magnetic memory unit. The communication interface can be designed to read or output data wirelessly and / or by line, wherein a communication interface that can read or output line-bound data, for example, electrically or optically read this data from a corresponding data transmission line or output in a corresponding data transmission line.

In the present case, a device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon. The device may have an interface, which may be formed in hardware and / or software. In the case of a hardware-based embodiment, the interfaces can be part of a so-called system ASIC, for example, which contains a wide variety of functions of the device. However, it is also possible that the interfaces are their own integrated circuits or at least partially consist of discrete components. In a software training, the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.

Also of advantage is a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the embodiments described above is used, especially when the program product or program is executed on a computer or a device.

• 1 eine schematische Darstellung eines Spektrometers mit Fabry-Perot-Interferometer;
• 2 eine schematische Darstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 3 eine schematische Darstellung eines Mikrospektrometermoduls aus 2;
• 4 eine schematische Darstellung von Herstellungsschritten zur Herstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 5 eine schematische Darstellung von Herstellungsschritten zur Herstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 6 eine schematische Darstellung von Herstellungsschritten zur Herstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 7 eine schematische Darstellung von Herstellungsschritten zur Herstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 8 eine schematische Darstellung von Herstellungsschritten zur Herstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 9 eine schematische Darstellung eines Spiegelelements mit einer Krümmungsstruktur gemäß einem Ausführungsbeispiel;
• 10 eine schematische Darstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 11 eine schematische Darstellung eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel;
• 12 eine schematische Darstellung einer Vorrichtung gemäß einem Ausführungsbeispiel;
• 13 ein Ablaufdiagramm eines Verfahrens zum Herstellen eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel; und
• 14 ein Ablaufdiagramm eines Verfahrens zum Einstellen eines Spiegelabstands eines optischen Resonators eines Mikrospektrometermoduls gemäß einem Ausführungsbeispiel.

Embodiments of the invention are illustrated in the drawings and explained in more detail in the following description. It shows:

• 1 a schematic representation of a spectrometer with Fabry-Perot interferometer;
• 2 a schematic representation of a Mikrospektrometermoduls according to an embodiment;
• 3 a schematic representation of a Microspectrum from 2 ;
• 4 a schematic representation of manufacturing steps for producing a Mikrospektrometermoduls according to an embodiment;
• 5 a schematic representation of manufacturing steps for producing a Mikrospektrometermoduls according to an embodiment;
• 6 a schematic representation of manufacturing steps for producing a Mikrospektrometermoduls according to an embodiment;
• 7 a schematic representation of manufacturing steps for producing a Mikrospektrometermoduls according to an embodiment;
• 8th a schematic representation of manufacturing steps for producing a Mikrospektrometermoduls according to an embodiment;
• 9 a schematic representation of a mirror element with a curvature structure according to an embodiment;
• 10 a schematic representation of a Mikrospektrometermoduls according to an embodiment;
• 11 a schematic representation of a Mikrospektrometermoduls according to an embodiment;
• 12 a schematic representation of a device according to an embodiment;
• 13 a flowchart of a method for manufacturing a Mikrospektrometermoduls according to an embodiment; and
• 14 a flowchart of a method for adjusting a mirror spacing of an optical resonator of a Mikrospektrometermoduls according to an embodiment.

In the following description of favorable embodiments of the present invention, the same or similar reference numerals are used for the elements shown in the various figures and similar acting, with a repeated description of these elements is omitted.

1 shows a schematic representation of a spectrometer 100 with Fabry-Perot interferometer 102 , In addition, the spectrometer includes 100 a detector 104 for detecting by the Fabry-Perot interferometer 102 filtered light 106 and one between the Fabry-Perot interferometer 102 and the detector 104 arranged lens 108 to direct the light 106 on the detector 104 ,

For Fabry-Perot interferometers 102 , such as linear variable or mechanically tunable filters, causes a variation of the angle of incidence of the light beam 106 a shift of the wavelength to be measured to smaller wavelengths. Meet light rays at the same time 106 with different angles of incidence, ie an uncollimated beam, on the filter, the possible wavelength resolution is reduced. Spectra with strong transmission or absorption variations in a small wavelength range are therefore less easily resolvable. In addition, the maximum of the entire transmission peak shifts to shorter wavelengths, resulting in a wavelength offset.

The size of the Fabry-Perot interferometer 102 is determined in most cases by the usable aperture of the optical detection path. By increasing the usable area of the Fabry-Pérot interferometer 102 the aperture can be increased so that a larger number of photons arrives at the detector. Since there is a very high local mirror spacing requirement at the same time, compliance with this requirement becomes even more difficult with larger areas.

2 shows a schematic representation of a Microspectrum module 200 according to an embodiment. The microspectrum module 200 includes an optical resonator 202 , here by way of example in the form of a Fabry-Perot interferometer. The optical resonator 202 has a first mirror element 204 and a second mirror element 206 on. The two mirror elements 204 . 206 are on a substrate 208 mounted opposite each other and have a mirror spacing to each other 210 on. According to this embodiment, both mirror elements 204 . 206 curved designed. In this case, the first mirror element 204 a first bulge 212 on while the second mirror element 206 a second bulge 214 having. The two bulges 214 . 216 are each designed spherical surface and are located in a light incidence area 218 of the optical resonator 202 , The two mirror elements 204 . 206 For example, at least in the region of their respective bulge are made of an elastically deformable material. In 2 are the two bulges 214 . 216 example bulged in the same direction, namely in a direction opposite to a direction of light incidence. The light incident direction is indicated by a vertical arrow. According to an alternative embodiment, only one of the two mirror elements 204 . 206 in the light incidence area 218 curved or curved formed.

Furthermore, the microspectrum module includes 200 a distance sensor 220 for detecting the mirror distance 210 , An actor 222 is formed to a curvature of at least one of the two bulges 214 . 216 depending on the distance sensor 220 measured mirror distance 210 in a suitable manner, for example by electrostatic or piezoelectric actuation.

According to one embodiment, the actuator 222 configured to tune a cavity length of the optical resonator 202 the mirror distance 210 to change. Depending on the embodiment, the actuator 222 For this purpose, realized with one or more actuator elements, for example, on or in at least one of the two mirror elements 204 . 206 are arranged.

Optionally, the microspectrum module includes 200 a detector 224 for detecting by the optical resonator 202 filtered light and an optical element 226 , The optical element 226 , according to 2 is realized as a lens and the optical resonator 202 upstream, so that this between the optical element 226 and the detector 224 is arranged to be in the light incidence area 218 incident light on the two bulges 214 . 216 and from there on to the detector 224 to steer. The optical element 226 Alternatively, it can also be realized as a reflector.

In 2 a position of the spherical surface Fabry-Perot interferometer is shown, in which the two bulges 214 . 216 a minimum mirror distance 210 to each other.

According to one embodiment, the microspectrum module comprises 200 a lens as an optical element 226 , a Fabry-Perot interferometer as an optical resonator 202 and the detector 224 , The detector 224 is placed, for example, in the focal point of the lens. Thus, only input beams with a lens incidence angle of 0 degrees hit the center of the detector 224 , The extension of the detector 224 determines the corresponding acceptance angle around the central lens angle of incidence leading to a detector signal. If the angle of incidence is further increased, the light rays will no longer be incident on the detector 224 directed. This configuration only evaluates certain angles of incidence and the detector 224 can be chosen smaller than without lens. This behavior is necessary for a spectral evaluation with a low spectral bandwidth by the Fabry-Perot interferometer is possible because the spectral filter of the Fabry-Perot interferometer is dependent on the angle of incidence. The size of the usable area of the Fabry-Perot interferometer determines the luminous flux applied to the detector 224 falls.

To further reduce the size of the Fabry-Perot interferometer, the Fabry-Perot interferometer becomes, for example, between the lens and the detector 224 built. The detector 224 is also positioned in the lens' focus here to limit the variance of the input angles. The optical configuration now directs beams of light at different angles of incidence through the Fabry-Perot interferometer. Focusing takes place through the lens. This means that the spectral bandwidth is increased for a normal planar Fabry-Perot interferometer. In order to reduce this bandwidth increase, the mirror spacing of the Fabry-Perot interferometer should be adjusted as a function of the angle of incidence so that only a small spectral wavelength range can pass through the filter. For example, the mirror surfaces of the Fabry-Pérot interferometer are realized as two spherical surface sections, which depend on the distance position from the detector 224 have different curvatures.

In the 2 and 3 the different corner positions of the Fabry-Perot interferometer are shown, in this embodiment only the lower mirror surface, ie the second mirror element 206 , is movable. In this case, the radius of curvature of the second mirror element 206 by means of the actuator 222 adjusted accordingly to ensure a constant mirror spacing corresponding to the incident light rays. By adjusting the radius of curvature, the spectral bandwidth can be kept at the same level.

In one embodiment, the microspectrum module is 200 realized as a miniature spectrometer system consisting of at least one broadband light source, an optical element, such as a lens, a broad band bandpass filter, a spectral element and a photodetector.

According to a further embodiment, the light guide of the miniature spectrometer system comprises reflectors or lens geometries, for example in the form of continuous surfaces or Fresnel lenses.

The spectral element is realized, for example, as a micromechanical Fabry-Perot interferometer component and comprises at least one substrate and at least two mirror elements spaced apart from one another by a gap whose local distance geometry can be statically or variably adapted, for example, according to the respective angles of incidence.

Depending on the exemplary embodiment, the microspectrum module is realized with an eccentric or concentric illumination arrangement, wherein the light rays reflected at the location of the target are passed via the optical element to the Fabry-Perot interferometer and from there to the detector.

3 shows a schematic representation of a Microspectrum module 200 out 2 , In 3 are the two bulges 214 . 216 shown in a position where they have a maximum mirror spacing 210 to each other.

4 shows a schematic representation of manufacturing steps 400 . 402 . 404 for producing a microspectrum module according to an exemplary embodiment, for example one previously described with reference to FIG 2 and 3 described microspectrum module. Shown is an exemplary sequence of a production of a static spherical mirror with radius of curvature correction by a corresponding actuator, which can also be referred to as a spherical difference actuator. It will be in one step 400 the two mirror elements 204 . 206 layered on top of each other on the substrate 208 arranged. The substrate 208 points in the light transmission area 218 a light passage opening 406 on, with the two mirror elements 204 . 206 the light passage opening 406 be arranged opposite. In a further step 402 becomes the composite of the two mirror elements 204 . 206 with a pressure difference p2> p1 applied to the mirror elements 204 . 206 for generating the two bulges 214 . 216 each bulge in the same direction spherical surface.

In one step 404 the etching of sacrificial structures and further layers takes place. In the process, the distance sensor 220 as well as the actor 222 created or exposed. The actor 222 includes, for example, an actuator element 408 to change the mirror distance 210 and another actuator element 410 that is centered between the two bulges 214 . 216 is arranged, for example, a curvature difference between the two bulges 214 . 216 depending on the mirror distance 210 to create.

Thus shows 4 a possible sequence in the production of a curved structure. In this case, the mirror layer structure in the step 400 deposited in advance. The choice of material according to one embodiment is such that a plastic deformation of the structures is possible and no cracks occur during and after the forming. The internal layer stresses should be geometrically absorbed so that the mechanical deformation after the sacrificial layer etching leads to no deformation. For example, a change and measurement of the distance of the two spherical shells are made possible by electrostatic position actuators and capacitive sensors. By a "spherical difference actuator", for example, the radius of curvature of the two mirror elements 204 . 206 influenced if appropriate elastic surface areas can be exploited.

The 5 to 8th show further embodiments for producing a static spherical mirror with radius of curvature correction. According to 5 be in step 404 optional spring structures 500 generated. Optional stiffening structures for additional stiffening, in particular approximately above and below the actuator element 408 , generated. According to 6 become the two mirror elements 204 . 206 using a designed as a negative form substrate 208 bulged. According to 7 become the two mirror elements 204 . 206 using a designed as a positive form substrate 208 bulged. According to 8th become the two mirror elements 204 . 206 using a substrate designed as a combination of positive and negative form 208 bulged. Additional layers or wafers may be bonded in order to further increase the stability of the overall design. In the 8th illustrated variant can be realized both with a negative mold and with a positive mold.

In 5 Thus, another embodiment is shown, the course of which is based on 4 corresponds to the described production order. The stiffening structures integrate additional reinforcement frames, so that the deformation of the mirror layers 204 . 206 is reduced.

In 6 a possible design for producing the spherical contours according to a further embodiment is shown. It is in the step 400 first a negative mold in the substrate 208 embossed. After that, in the step 402 deposited the required layers on the negative mold and optionally structured. In a subsequent sacrificial layer etch or other process is subsequently in the step 404 the sacrificial layer between the mirror elements 204 . 206 away. The negative mold is optionally also in the area of the adjacent mirror element 204 removed, so that subsequently both mirror elements 204 . 206 are mobile.

A variant of in 6 shown production flow is in 7 shown. Instead of a negative mold, a positive shape is used so that the mirror layers 204 . 206 be deposited on the outwardly curved surfaces. Again, the positive shape can be optionally removed at the end to the mobility of both mirror elements 204 . 206 manufacture.

9 shows a schematic representation of a mirror element 204 with a curvature structure 900 according to an embodiment. The curvature structure 900 is formed by a plurality of relatively movable or relative to each other elastically deformable segments. Adjacent segments are through slots, here for example through holes 902 , separated from each other. Adjacent segments are also connected to one another via flexible webs. According to this embodiment, a central segment of several rings is surrounded by further segments. The rings may each have the same number of segments or a different number of segments. For example, a ring may comprise two, three, four, five, six or more segments. By way of example only, each ring in the embodiment shown includes four segments. Also only by way of example four rings are provided according to the embodiment shown. Alternatively, for example, two, three, four, five, six or more rings may be provided.

The passage openings 902 are according to the embodiment shown as concentrically arranged arcuate openings 902 in the mirror element 204 realized. The openings 902 divide the mirror element 204 in the plurality of elastically deformable relative to each other segments. By appropriate deformation of the segments by means of the actuator, the mirror element 204 to be curved. For example, the actuator is designed to move the segments in different directions, so that the mirror element 204 depending on the direction of displacement, a positive or negative curvature relative to a starting position in which the curvature is substantially zero has.

10 shows a schematic cross-sectional view of a Microspectrum module 200 according to an exemplary embodiment, for example, a previously with reference to FIG 2 to 9 described microspectrum module. According to this embodiment, both mirror elements 204 . 206 each with a curvature structure 900 , as described above by means of 9 is described realized.

To change the curvature of the two mirror elements 204 . 206 the actuator according to this embodiment, a first actuator element 1000 to change the mirror spacing between the two mirror elements 204 . 206 , a second actuator element 1002 for adjusting a curvature difference between the two mirror elements 204 . 206 and a third actuator element 1004 for changing the curvature of the first mirror element 204 that is here between the second mirror element 206 and the third actuator element 1004 is arranged.

As based on 9 describe the in 10 shown mirror elements 204 . 206 one central segment each 1010 and the central segment 1010 annularly surrounding further segments 1012 on through the openings 902 are separated from each other.

11 shows a schematic cross-sectional view of a Microspectrum module 200 according to an embodiment. In contrast to 10 here only has the first mirror element 204 the curvature structure 900 on. The actuator comprises only the two actuator elements 1000 . 1004 for changing the mirror spacing and the curvature structure 900 of the first mirror element 204 ,

For example, the different spacing structures of the curvature structures 900 from the 10 and 11 generated by electrostatic actuators and matched spring characteristics. In doing so, relevant light rays are applied to the detector 224 and spectrally filtered by the set shape of the Fabry-Perot interferometer.

Hereinafter, various embodiments of the approach presented here on the basis of 9 to 11 summarized again in other words.

Based on 9 to 11 is thus an exemplary embodiment of a microspectrum module 200 described in which the mirror surfaces 204 . 206 in segments 1010 . 1012 , also called sub-areas, are structured, with the segments 1010 . 1012 through actuators 1000 . 1002 . 1004 are adjustable so that a spherical surface is simulated in stages. In this case, for example, by the first actuator element 1000 the mirror distance is set and measured. The second actuator element 1002 is formed to the curvature difference between the mirror elements 204 . 206 adjust. By means of the third actuator element 1004 is the radius of curvature of a single mirror, here the right-side mirror element 204 , can be influenced. Depending on the design of the spring geometries, the actuator voltages are matched during structuring so that the desired position is approached with the corresponding radius of curvature. By a suitable spring design in the structured mirror surfaces, for example, an actuator element omitted, so that distance and radius of curvature only by two actuator elements, in 11 through the two actuator elements 1000 . 1004 , are adjustable.

A correspondingly designed Fabry-Perot interferometer is encapsulated, for example, for protection against particles. So can the damping of the system. Optionally, the microspectrum module comprises an upstream optical element, for example a lens, which is placed in the 10 and 11 for the sake of clarity is not shown.

11 shows one in comparison to 10 slightly modified design, the only two actuator elements 1000 . 1004 having. In this case, by combining the two actuator elements 1000 . 1004 adjusted simultaneously the mirror distance and the radius of curvature and measured capacitively. Also in this case is by a suitable spring design in the structured mirror surfaces, or as in 11 shown, a structured mirror surface, an optimization of the actuator control possible. A correspondingly designed Fabry-Perot interferometer can just as well as in 10 be executed Fabry-Perot interferometer encapsulated.

12 shows a schematic representation of a device 1200 according to an embodiment. The device 1200 includes a receiving unit 1210 for receiving a measurement provided by the distance sensor of the microspectrum module 1212 which represents the measured cavity length of the optical resonator. An output unit 1220 is designed to take the reading 1212 from the receiving unit 1210 to receive and this for generating a drive signal 1222 to process to control the actuator. The device 1200 is formed to the drive signal 1222 to provide an interface to one or more actuator elements.

13 shows a flowchart of a method 1300 for producing a microspectrum module according to an exemplary embodiment, for example as described above with reference to FIG 2 to 12 described microspectrum module. The procedure 1300 includes a step 1310 in that the two mirror elements are arranged opposite to one another and at a distance from one another on the substrate in order to form the optical resonator. In this case, the two mirror elements or only one of the two mirror elements in the light incidence region of the optical resonator are designed to be curved or bendable, for example in a manner as described above with reference to FIG 4 to 8th is described. In one step 1320 the integration of the distance sensor and the actuator takes place in the optical resonator, for example by etching corresponding electrically conductive structures in the two mirror elements, as exemplified in the step 404 of the 4 to 8th is shown.

14 shows a flowchart of a method 1400 for adjusting a mirror spacing of an optical resonator of a microspectrum module according to an embodiment. The procedure 1400 For example, using a device as previously described with reference to 12 is described. It is in one step 1410 receive the reading provided by the distance sensor. In a further step 1420 the generation of the drive signal for driving the actuator is performed using the measured value.

If an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 5561523 [0002]
• US 6721098 [0002]

Claims (15)

Microspectrum module (200) with the following features: an optical resonator (202) having at least one first mirror element (204) and a second mirror element (206) arranged at a distance from the first mirror element (204), the first mirror element (204) and / or the second mirror element (206) being in a light incidence area (218) of the optical resonator (202) is curved and / or designed to be bendable; and an optical element (226) for directing light to the light incident region (218). Microspectrum module (200) according to Claim 1 comprising a distance sensor (220) for measuring a mirror spacing (210) between the first mirror element (204) and the second mirror element (206). A microspectrum module (200) according to any one of the preceding claims, comprising an actuator (222; 408, 410; 1000, 1002, 1004) for changing a curvature of the first mirror element (204) and / or a curvature of the second mirror element (206). Microspectrum module (200) according to Claim 3 in which the actuator (222; 408, 410; 1000, 1002, 1004) is designed to change the mirror spacing (210). Microspectrum module (200) according to one of Claims 3 to 4 in which the first mirror element (204) has a spherical surface-shaped first bulge (214) in the light incidence region (218) and / or the second mirror element (206) has a spherical surface-shaped second bulge (216) in the light incidence region (218), wherein the actuator (222 408, 410, 1000, 1002, 1004) is arranged to change a curvature of the first bulge (214) and / or a curvature of the second bulge (216) in dependence on the mirror distance (210). Microspectrum module (200) according to Claim 5 in which the first bulge (214) and the second bulge (216) are arranged opposite one another and / or have a common direction of curvature. Microspectrum module (200) according to one of Claims 3 to 6 in which the first mirror element (204) and / or the second mirror element (206) has a curvature structure (900) of a plurality of relatively movable segments (1010, 1012) in the light incidence region (218), wherein the actuator (222; , 410, 1000, 1002, 1004) is formed to deform the curvature structure (900) to change the curvature of the first mirror element (204) and / or the curvature of the second mirror element (206). A microspectrum module (200) according to any one of the preceding claims, wherein the optical resonator (202) is implemented as a Fabry-Perot resonator (202). A microspectrum module (200) as claimed in any one of the preceding claims including a light source for illuminating an object to be analyzed by the microspectron module (200) and / or a detector (224) for detecting light filtered by the optical cavity (202). Microspectrum module (200) according to Claim 9 comprising a bandpass prefilter for pre-filtering light, the bandpass prefilter being connected upstream of the detector (224). Microspectrum module (200) according to one of Claims 9 or 10 in which the at least one optical element (226) for directing light is formed on the detector (224). Microspectrum module (200) according to Claim 9 or 11 in which the optical resonator (202) is arranged between the optical element (226) and the detector (224). A method (1300) for making a microspectron module (200), the method (1300) comprising the steps of: Arranging (1310) a first mirror element (204) and a second mirror element (206) on a substrate (208) to form an optical resonator (202), wherein the first mirror element (204) and the second mirror element (206) are spaced apart are arranged opposite one another and the first mirror element (204) and / or the second mirror element (206) in a light incident region (218) of the optical resonator (202) is curved and / or made curvable; and Integrating (1320) a distance sensor (220) and an actuator (222; 408, 410; 1000, 1002, 1004) into the optical resonator (202), the distance sensor (220) being configured to provide a mirror spacing (210) between the The first mirror element (204) and the second mirror element (206) are to be measured, and the actuator (222; 408, 410; 1000, 1002, 1004) is formed to have a curvature of the first mirror element (204) and / or a curvature of the second mirror element Mirror element (206) depending on the mirror spacing (210) to change. A method (1400) for adjusting a mirror spacing (210) of an optical resonator (202) of a microspectron module (200) according to a of the Claims 1 to 11 wherein the method (1400) comprises the steps of: receiving (1410) a measurement value (1212) provided by the distance sensor (220) representing the mirror distance (210); and outputting (1420) a drive signal (1222) for driving the actuator (222; 408, 410; 1000, 1002, 1004) using the measurement value (1212) to determine the curvature of the first mirror element (204) and / or the curvature of the first mirror element (204) second mirror element (206) depending on the mirror spacing (210) to change. Apparatus (1200) comprising units (1210, 1220) configured to perform the method (1300) according to Claim 12 or the method (1400) according to Claim 13 execute and / or control and / or implement.

Images