DE102016013412A1 - Contact system and contact module - Google Patents

Abstract

A contact system (100, 100 ', 100 ") contains at least one pneumatically actuated contact pin (12, 12, 12), a pressure chamber (1) and one in a housing (2) of the pressure chamber (1) for each contact pin (12, 12 , 12) respectively provided first passage (37, 37 "). Each contact pin (12, 12, 12) in each case has a first section (14) with a first outer diameter and a second section (14) adjoining the first section (14) with a larger second outer diameter than the first outer diameter. Each first passage (37; 37 ') has a first section (13; 13') facing away from the pressure chamber (1) with a first inner diameter and a second section (13; 13 ') facing the pressure chamber (1) with one opposite the first Inner diameter larger second inner diameter. The second section (14) of each contact pin (12, 12, 12) is axially movably guided in the second section (13; 13 ') of the first passage (37; 37'). For contacting, the first section (14) of the contact pin (12, 12, 12) in the first portion (13, 13 ') of the first passage (37, 37') is performed. A certain axial position of each contact pin (12, 12, 12) in the associated first passage (37, 37 ') corresponds to a certain pressure level of a pressure medium in the pressure chamber (1). The pressure medium is temperature-controlled.

Description

FIELD OF THE INVENTION

The present invention relates to a contact system comprising at least one contact pin, with which a single contact point or a grid of contact points can be contacted in order to detect and transmit at least one electrical signal in each case. In addition, the present invention also relates to a single contact module with a contact pin.

TECHNICAL BACKGROUND

• • Kontaktsysteme mit Federkontaktstiften, wie sie beispielsweise in der US 6,624,645 B2 offenbart sind,
• • Kontaktsysteme mit Hebelarmen, wie sie beispielsweise in der US 7,555,834 B2 beschrieben sind und
• • Kontaktsysteme mit Knickstäben, wie sie beispielsweise aus der US 5,324,205 A1 hervorgehen.

From the prior art, a variety of contact systems is known. The contact systems can be essentially divided into three groups after the construction of their contact pins:

• • Contact systems with spring contact pins, as used in the US 6,624,645 B2 are disclosed
• • Contact systems with lever arms, such as those in the US 7,555,834 B2 are described and
• • contact systems with buckling rods, such as those from the US 5,324,205 A1 emerge.

The contact points to be contacted by the contact system can in this case be implemented in different standardized configurations on the housing of an integrated circuit, such as, for example, Ball Grid Array (BGA) or Quad Flat No Leads Package (QFN). (German: square, flat packaging without lines), be arranged.

All these contact pins have in common that the contacting required spring or biasing force by elastic deformation of a component (coil spring spring contact pin) or the entire contact pin (lever arm or buckling bar) is made. In order to achieve the requirements of the contact force, the travel and the stability in a particular application of the elastic contact pin, resulting in consideration of structural mechanics laws may under circumstances a relatively large size for the elastic contact pin.

This has several disadvantages:

The required for the reflection-minimized transmission of high-frequency signals electrical adjustment of the contact pin to the entire measuring system, which is typically already difficult to accomplish, is made even more difficult by the extension of the contact pin. This adversely affects the signal integrity of the high frequency signal to be transmitted.

In addition, there is a different contact force for each point of the spring travel. This nonlinearity of the elastic contact pin has a particularly disadvantageous effect when axial tolerances, for example in the case of misalignment, in the case of wear or planarity tolerances of the contact surface grid, have to be compensated.

Aging-related fluctuations in the spring force due to, for example, the relaxation of the elastic contact pin can not be compensated or only with great effort.

If the contact force of the elastic contact pin is to be adjusted, for example, in the case of sensitive contact points, in high-current applications or in the case of oxidized contact points, this is likewise not possible or only with difficulty.

Semiconductor devices are often tested under extreme temperature conditions, such as in burn-in tests. In these cases, the elastic contact pins are often exposed to very high or very low temperatures, so that they act as a heat conductor and dissipate heat undesirable from the measurement object or the measured object.

This is a condition to be improved.

SUMMARY OF THE INVENTION

Against this background, the object of the present invention is to specify a contact module containing a contact pin and a contact system which contains at least one contact pin, each of which overcomes the above-mentioned disadvantages.

According to the invention, this object is achieved by a contact system having the features of patent claim 1 and by a contact module having the features of patent claim 14. Advantageous technical extensions are listed in the respective dependent claims.

For this purpose, the contact system according to the invention contains at least one pneumatically actuated contact pin, a pressure chamber and a first passage provided in the housing of the pressure chamber for each contact pin.

In this case, implementation is understood here and below to mean an opening between the pressure chamber and the outer space of the pressure chamber within the housing of the pressure chamber. The implementation here essentially has one certain longitudinal extent and a particular cross-sectional profile or a profile of the cross-sectional profile along the longitudinal extent. Optionally, the bushing may also have, in addition to the longitudinal extension, a transverse extension adjoining the longitudinal extension and / or an additional extension adjoining the longitudinal or transverse extension and oriented at an arbitrary angle to the longitudinal extent.

The single first passage has a first portion facing away from the pressure chamber with a first inner diameter and a second portion facing the pressure chamber with a second inner diameter larger than the first inner diameter.

The first portion of the contact pin has a first outer diameter, while the second portion of the contact pin has a relation to the first outer diameter larger second outer diameter corresponding to the inner diameter of the second portion of the first passage.

The second section of the contact pin is axially movably guided in the second section of the first feedthrough and, for contacting, the first section of the contact pin is made in the first section of the first feedthrough.

The axial position of each contact pin in the associated first passage corresponds to a pressure level of a pressure medium in the pressure chamber.

The fact that the outer diameter of the contact pin as well as the inner diameter of the first passage increases from the first section of the contact pin or from the first section of the first bushing to the second section of the contact pin or to the second section of the contact pin of the first bushing forms at a certain axial position of the contact pin within the first passage a certain cavity between the inner wall of the second portion of the first passage, the cylinder outer surface of the first portion of the contact pin, the pressure chamber facing away from the end face of the second portion of the contact pin and the pressure chamber facing end face of the first portion of the first implementation. In this cavity is air with a certain compressibility, which exerts a damping effect on the axially moving contact pin in the axial movement of the contact pin in the direction of the outer space of the pressure chamber. In this way, an elastic contact pin can advantageously be replaced by a rigid contact pin. Also, the coil spring commonly used in a pneumatically driven contact pin for applying a damping of the contact pin can be advantageously avoided.

For targeted temperature control of the contact pin to prevent heat flow or outflow from the temperature-controlled housing of the integrated circuit to be tested via the contact pin, the pressure medium is temperature-controlled in the pressure chamber according to the invention. The contact pin, which communicates with the pressure medium of the pressure chamber, thus assumes the temperature of the pressure medium by means of heat transfer or thermal convection. In an approximation of the temperature of the pressure medium to the temperature of the housing so that a heat supply or removal is prevented via the contact pin.

In order to realize the temperature of the contact pin by means of heat transfer not only in the area in which the contact pin within the pressure chamber with the pressure medium directly, but also over a greater longitudinal extension of the contact pin, in a preferred extension of the invention, at least one air duct provided within the contact pin extending from the pressure chamber facing the end of the contact pin over a certain longitudinal extent in the second portion of the contact pin. Each of these air ducts is referred to below as the first air duct.

These first air channels fill with the temperature-controlled pressure medium and preferably realize a more uniform and faster temperature control of the contact pin along the longitudinal extent of the at least one first air channel.

An air channel here and hereinafter is understood to mean a cavity with a specific transverse profile and a specific course within a mechanical component and / or between at least two adjacent mechanical components.

In addition, air channels are provided between the interior of the second section of the first passage and the outer space of the pressure chamber, which are referred to below as the second air channels.

The axial position of the individual second air ducts in the second section of the first passage and the longitudinal extension of the first air ducts in the associated contact pin are designed so that at an axial position of the contact pin within a certain position range in the first implementation, a connection between each second air duct and at least one first air channel exists. The axial position of a contact pin within a certain position range results from different distances of the contact point to be contacted on the housing of the integrated circuit to be tested for contact system.

In this way, in each case an air exchange between the pressure chamber and the outer space of the pressure chamber is realized via the first and second air ducts, which accelerates the contact pin via heat convection accelerated to the temperature level of the pressure medium in the pressure chamber.

In a first embodiment of the invention, each first air duct is preferably realized in each case as a recess which extends in the longitudinal direction on the cylinder outer circumferential surface of the second portion of the contact pin. Each of these recesses extends from the end of the contact pin, which faces the pressure chamber, over a certain longitudinal extent in the second portion of the contact pin.

In a preferred extension of the first embodiment of the invention, each recess at its end facing away from the pressure chamber each have a conical or frusto-conical shape. In this way, the contact pin in the first passage is centered by the same amount of air flowing in each first air channel.

In a second embodiment of the invention, each first air channel is realized in each case as a first bore common to each first air channel in the longitudinal direction of the second portion of the contact pin within the contact pin and an adjoining second bore extending transversely to the second portion of the contact pin. The first bore also extends from the end of the contact pin, which faces the pressure chamber, over a certain longitudinal extent in the second portion of the contact pin.

In a first variant of the contact system according to the invention, the respective first feedthrough associated with each contact pin is realized in each case as a stepped through-bore in the housing of the pressure chamber, which has a first section with a first inner diameter and a second section with a second inner diameter. With regard to a good axial guidance of the contact pin which is moved axially within the first feedthrough, a partial section of a first sleeve is accurately fixed in a partial section of the second section of the stepped through-hole. For this purpose, the contact pin is guided axially movably with the second section in the first sleeve. The advantage of the first variant is the fact that the first sleeve is relatively simple in construction and thus manufacturable.

In a second variant of the contact system according to the invention, the respective first feedthrough associated with each contact pin is realized as the interior of a first sleeve which is fixed precisely in an associated through-bore in the housing of the pressure chamber. The first sleeve again has a first portion with the first inner diameter and a second portion with the second inner diameter. The advantage of the second variant lies in the fact that the first sleeve and the contact pin inserted therein can be produced as a separable contact module, which can be installed comparatively easily in the housing of the pressure chamber.

In both variants of the contact system according to the invention, at least one opening is provided in the partial section of the second section of the first sleeve located in the pressure chamber. This portion of the second portion of the first sleeve is at the same time vacant from the associated contact pin. In this way, a direct connection between the located in the pressure chamber pressure medium and the pressure chamber facing the end of the contact pin is possible.

For electrical connection of the contact point to be contacted with the contact point with a printed circuit board, a signal line is attached to the contact pin or to the first sleeve.

For better fixation of the first sleeve and thus of the associated contact pin in the housing of the pressure chamber that end of the first sleeve, which is remote from the associated contact pin, preferably fixed in each case in a third passage in the housing of the pressure chamber accurately.

With a view to contacting a coaxial contact terminal on an integrated circuit, each contact pin of the contact system is extended by a contact socket arranged coaxially with the respective contact pin. For this purpose, an insulator part and a coaxially arranged second passage are provided around the respective contact pin, in which the contact socket is axially movable.

In addition to a contact system according to the invention, which contains at least one contact pin, preferably a plurality of contact pins, the invention also covers a single contact module according to the invention, which comprises a first sleeve and a contact pin axially movable and pneumatically controllable therein. The features of the first sleeve and the contact pin in this case correspond to the corresponding features in the contact system according to the invention.

The above embodiments and developments can, if appropriate, combine with each other as desired. Further possible refinements, developments and implementations of the invention also include combinations, not explicitly mentioned, of features of the invention described above or below with regard to the exemplary embodiments. In particular, the person skilled in the art will also add individual aspects as improvements or in addition to the respective basic form of the present invention.

list of figures

• 1A eine Schnittdarstellung einer Ausführungsform eines erfindungsgemäßen Kontaktsystems mit eingefahrenen Kontaktstift,
• 1B eine Schnittdarstellung einer Ausführungsform eines erfindungsgemäßen Kontaktsystems mit ausgefahrenen Kontaktstift,
• 2A eine Längsschnittdarstellung einer ersten Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 2B eine Querschnittsdarstellung einer ersten Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 3A eine Längsschnittdarstellung einer zweiten Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 3B eine Querschnittsdarstellung einer zweiten Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 4A eine Längsschnittdarstellung einer koaxialen Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 4B,4C Querschnittdarstellungen einer koaxialen Ausführungsform eines erfindungsgemäßen Kontaktmoduls,
• 5 eine Schnittdarstellung einer weiteren Ausführungsform eines erfindungsgemäßen Kontaktsystems,
• 6A eine Schnittdarstellung einer koaxialen Ausführungsform eines erfindungsgemäßen Kontaktsystems,
• 6B,6C eine Draufsicht und eine Schnittdarstellung einer Gehäuseplatte für eine koaxiale Ausführungsform eines erfindungsgemäßen Kontaktsystems und
• 7 eine Schnittdarstellung einer weiteren Ausführungsform eines erfindungsgemäßen Kontaktsystems.

The present invention will be explained in more detail with reference to the exemplary embodiments indicated in the schematic figures of the drawing. It shows:

• 1A a sectional view of an embodiment of a contact system according to the invention with retracted contact pin,
• 1B a sectional view of an embodiment of a contact system according to the invention with extended contact pin,
• 2A a longitudinal sectional view of a first embodiment of a contact module according to the invention,
• 2 B a cross-sectional view of a first embodiment of a contact module according to the invention,
• 3A a longitudinal sectional view of a second embodiment of a contact module according to the invention,
• 3B a cross-sectional view of a second embodiment of a contact module according to the invention,
• 4A a longitudinal sectional view of a coaxial embodiment of a contact module according to the invention,
• 4B . 4C Cross-sectional views of a coaxial embodiment of a contact module according to the invention,
• 5 a sectional view of another embodiment of a contact system according to the invention,
• 6A a sectional view of a coaxial embodiment of a contact system according to the invention,
• 6B . 6C a plan view and a sectional view of a housing plate for a coaxial embodiment of a contact system according to the invention and
• 7 a sectional view of another embodiment of a contact system according to the invention.

The accompanying figures of the drawing are intended to convey a further understanding of the embodiments of the invention. They illustrate embodiments and, together with the description, serve to explain principles and concepts of the invention. Other embodiments and many of the stated advantages will become apparent with reference to the drawings. The elements of the drawings are not necessarily shown to scale to each other.

In the figures of the drawing are the same, functionally identical and same-acting elements, features and components - unless otherwise stated - each provided with the same reference numerals.

In the following the figures are described coherently and comprehensively.

DESCRIPTION OF EMBODIMENTS

A first embodiment of a contact system 100 according to the invention will be described below with reference to FIGS 1A and 1B explained in detail:

The contact system according to the invention has a pressure chamber 1 on top of a case 2 preferably pressure-tight is completed. In a simple realization, the housing 2 an upper plate 2 ₁ and a lower plate 2 ₂ on, which are spaced by connecting webs 2 ₃ at a certain distance from each other.

The realization of the housing 2 Two spaced-apart plates are suitable for applications in which the individual contact pins of the contact system are arranged on a single surface for contacting and testing a single integrated circuit.

Of the invention, but also housing forms are covered, in which form a plurality of plates in a certain orientation to each other a housing surface and each contain contact pins. In a case with more than two plates, several integrated circuits can be contacted and tested simultaneously.

As material for the housing 2 and its individual components are preferably an electrical one insulating material used with a certain mechanical load capacity.

In a preferred housing 2 with two parallel plates 2 ₁ and 2 ₂ are between the webs 2 ₃ each a first access 3 ₁ and a second access 3 ₂ intended. About the first access 3 ₁ is from a first pneumatic pump 4 ₁ via a first pressure regulating valve 5 ₁ the pressure chamber 2 a certain volume of pressure medium, for example air, supplied to a specific first or second pressure level, in particular a relation to the outer space of the pressure chamber 1 increased pressure level to adjust. In series with the first pneumatic pump 4 ₁ and to the first pressure control valve 5 ₁ is a temperature controller 19 connected, which regulates the temperature of the pressure medium to a certain temperature level.

Optional is a second access 3 ₂ provided via the means of a second pneumatic pump 4 ₂ and a second pressure regulating valve 5 ₂ a certain volume of pressure medium from the pressure chamber 1 is discharged to set a certain second pressure level, in particular a relation to the outer space of the pressure chamber reduced pressure level, ie, a negative pressure level.

The housing 2 the pressure chamber 1 has at least one first through hole 6 ₁ . 6 ₂ and 6 ₃ , prefers several through holes, which in the realizations in the 1A and 1B each in the upper plate 2 ₁ of the housing 2 , are arranged. In these through holes 6 ₁ . 6 ₂ and 6 ₃ is in each case a first embodiment of a contact module 7 ₁ . 7 ₂ and 7 ₃ accurately fixed. These contact modules 7 ₁ . 7 ₂ and 7 ₃ are additionally in second through holes 8 ₁ . 8 ₂ and 8 ₃ , which are opposite the first through holes 6 ₁ . 6 ₂ and 6 ₃ in the case 2 ie in the realization in the 1A and 1B each in the lower plate 2 ₂ of the housing 2 , precisely fixed. This serves for additional stabilization of the contact modules 7 ₁ . 7 ₂ and 7 ₃ in the case 2 the pressure chamber 1 ,

At the ends of the contact modules 7 ₁ . 7 ₂ and 7 ₃ are each signal lines 9 ₁ . 9 ₂ and 9 ₃ For example, wires, cables, and other transmission elements, by means of soldering, bonding, welding, and other connection technologies, are attached to contact points or pads on a printed circuit board, respectively 10 to lead. This circuit board 10 is right at the bottom plate 2 ₂ of the housing 2 attached. Alternatively, the circuit board 10 also in one of the pressure chamber 10 be remotely positioned meter integrated.

In 1A are the contact pins 12 ₁ . 12 ₂ and 12 ₃ each in the retracted state, ie in the non-contacting state shown. In 1B are the contact pins 12 ₁ . 12 ₂ and 12 ₃ in the extended state in which they are associated contact points 201 ₁ . 201 ₂ and 201 ₃ a housing 200 contact the integrated circuit to be tested.

The first embodiment of the contact module according to the invention 7 , is based on the enlarged view in the 2A and 2 B explained in detail:

The first embodiment of the contact module according to the invention 7 contains a first sleeve 11 , each accurately fitting in one of the first through holes 6 ₁ . 6 ₂ and 6 ₃ in accordance with 1A or 1B each upper plate 2 ₁ of the housing 2 and in an associated second through-bore 8 ₁ . 8 ₂ and 8 ₃ in accordance with 1A or 1B respectively lower plate 2 ₂ of the housing 2 is fixed.

In the interior of the first sleeve 11 that as the first implementation 37 serves, is a contact pin 12 guided axially movable. The first implementation 37 ie the interior of the first sleeve 11 , includes one of the pressure chamber 1 facing away from the first section 13 ₁ as the passage for a first section 14 ₁ the contact pin in the state of contacting serves, and one of the pressure chamber 1 facing and joining the first section 13 ₁ subsequent second section 13 ₂ in which one at the first section 14 ₁ following second section 14 ₂ the contact pin is guided axially movable.

The first inner diameter of the first sleeve 11 in the area of the first section 13 ₁ the first implementation 37 is preferably slightly larger than the first outer diameter of the first section 14 ₁ of the contact pin 12 to slip through the contact pin 12 through the inner bore of the first sleeve 11 in the area of the first section 13 ₁ the first implementation 37 to guarantee without hindrance or without friction.

The second inner diameter of the first sleeve 11 ie, the inner diameter of the first passage 37 , in the area of the second section 13 ₂ the first implementation 37 corresponds to the second outer diameter of the second section 14 ₂ of the contact pin 12 to prevent the escape of pressure medium from the pressure chamber 1 in the outer space of the pressure chamber 1 at the beginning of the pressure build-up in the pressure chamber 1 to prevent.

Between the inner wall of the first sleeve 11 in the area of the second section 13 ₂ the first implementation 37 , the first section 14 ₁ of the contact pin 12 , the pressure chamber facing end face of the first sleeve 11 in the transition between the first and the second section of the first implementation 37 and the pressure chamber facing away from the end face of the second section 14 ₂ of the contact pin 12 a cavity forms. This cavity is filled with compressible air. For an axial movement of the contact pin 12 within the first sleeve 11 in the direction of the housing to be contacted of the integrated circuit to be tested, the air in the cavity is additionally compressed. It acts as a damping element on the contact pin 12 , Thus, the contact system according to the invention does not require a coil spring as a damping element, as used in other contact systems with pneumatic actuation of the contact pins according to the prior art.

From a certain compression of the air in the cavity with increasing axial movement of the contact pin 12 in the first sleeve 11 Can the air in the space between the first sleeve 11 in the area of the first section 13 ₁ the first implementation 37 and the first section 14 ₁ of the contact pin 12 in the outer space of the pressure chamber 1 escape.

The first sleeve 11 points in the area of the second section 13 ₂ the first implementation 37 , preferably in the section of the second section 13 ₂ the first implementation 37 who is in the pressure chamber 1 located, a radially inwardly directed shoulder 15 on, as a pressure chamber facing mechanical stop for the contact pin 12 serves.

The pressure chamber facing end face of the first sleeve 11 in the transition between the first and second sections of the first implementation 37 serves as druckkammerabgewandter mechanical stop for the contact pin.

The first sleeve 11 points in the section of the second section 13 ₂ the first implementation 37 who is in the pressure chamber 1 located, at least one opening 16 , Preferably, a plurality of openings, on, through which in each case the pressure medium located in the pressure chamber into the interior of the first sleeve 11 and thus to the pressure chamber facing the end 17 of the contact pin 12 can get. The contact pin 12 can thus be at a certain axial position within the first sleeve 11 position the pressure level of the pressure medium in the pressure chamber 1 corresponds and is referred to as the first axial position.

In this extended state, the in 1B is shown, the first section protrudes 14 ₁ each contact pin 12 ₁ . 12 ₂ and 12 ₃ beyond the first sleeve 13 and contacted with its associated probe 18 the associated contact point 201 ₁ . 201 ₂ and 201 ₃ on the housing 200 the integrated circuit to be tested. This pressure level corresponds to a first pressure level created by the first pneumatic pump 4 ₁ and the first pressure regulating valve 5 ₁ is set.

In retracted state, in 1A is shown, there is the single contact pin 12 ₁ . 12 ₂ and 12 ₃ in an axial position within the first sleeve 11 , which are closer to the first axial position closer to the pressure chamber 1 located. This position is referred to as the second axial position. In this second axial position is the probe 18 no longer in contact with the associated contact point on the housing of the integrated circuit. The first paragraph 14 ₁ of the contact pin 12 can do this over the first section 13 ₁ the first implementation 37 stick out or within the first section 13 ₁ or within the second section 13 ₁ the first implementation 37 are located.

This pressure level corresponds to a second pressure level, which is reduced in a first case compared to the first pressure level and also by the first pneumatic pump 4 ₁ and the first pressure regulating valve 5 ₁ is set.

In a second case, the second pressure level corresponds to the pressure level in the outer space of the pressure chamber 1 and is done by turning off the first pneumatic pump 4 ₁ and / or by pressure regulation to ambient pressure level by the first pressure regulating valve 5 ₁ realized. In the first and second case, the contact pin returns 12 due to gravity from the first axial position to the second axial position. In a third case, the second pressure level corresponds to a vacuum level in relation to the ambient pressure level in the outer space of the pressure chamber 1 ,

In the third case is in the pressure chamber 1 a vacuum level with respect to the ambient pressure level in the outer space of the pressure chamber 1 through the second pneumatic pump 4 ₂ and the second pressure regulating valve 5 ₂ realized. This third case is particularly applicable when the contact pin 12 due to its location to the pressure chamber 1 no gravity in the direction of the pressure chamber 1 experiences. This is for example when he is horizontal to the pressure chamber 1 in a first sleeve 11 in a side plate in the housing 2 or if he is below the pressure chamber 1 in a first sleeve 11 in a lower plate 22 is mounted axially movable.

That end 18 the first sleeve 11 that from the contact pin 12 is removed, is preferably in a third passage 8 in the housing 2 , preferably in a housing plate 2 ₂ of the housing 2 , precisely fixed. In such a preferred implementation is the end 18 the first sleeve 11 closed. A signal line 9 is by means of the above Connection technologies at this end 18 the first sleeve 11 attached.

In an alternative implementation, that ends from the contact pin 12 distant end 36 the first sleeve 11 in the pressure chamber 1 , One in this alternative realization at the end 18 the first sleeve 11 attached signal line 9 is via a sealed bore in the housing 2 , which is not shown in all figures, in the outer space of the pressure chamber 1 guided and with a contact point of a circuit board 10 connected.

By that the probe 18 opposite end 17 of the contact pin 12 in direct contact with the temperature-controlled pressure medium of the pressure chamber 1 is, there is a heat transfer between the pressure medium of the pressure chamber 1 and the contact pin 12 , In this way, the temperature of the contact pin can be controlled by a temperature control of the pressure medium 12 to match the temperature level of the housing of the integrated circuit to be tested. An undesirable heat dissipation from the integrated circuit housing to the contact pin 12 or an undesirable heat supply from the contact pin 12 to the housing of the integrated circuit can thus be advantageously avoided.

The integrated circuit or the housing of the integrated circuit thus ideally remains at the set test temperature. If the integrated circuit is tested in temperature cycles, such as those used in burn-in tests, then the temperature controller is 19 to control the temperature of the pressure medium with the same temperature cycles.

A faster following of the contact pin 12 on the changed temperature level of the pressure medium in the pressure chamber 1 takes place in that within the contact pin 12 at least a first air duct 20 ₁ . 20 ₂ . 20 ₃ and 20 _{4 is} provided. Each of these first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ each extending from the pressure chamber facing the end 17 of the contact pin 12 over a certain longitudinal extent in the second section 13 ₂ of the contact pin.

In the in the 2A and 2 B shown first embodiment of a contact module according to the invention 7 are the individual first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ each as a recess on the cylinder outer circumferential surface of the contact pin 12 realized. Each recess is in each case of an inner wall of the first sleeve 11 in the area of the second section 13 ₂ the first implementation 37 locked. The individual recesses of the first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ are each preferably arranged at equidistant angular distances from one another.

Between the second section 13 ₂ the first implementation 37 ie the interior of the first sleeve 11 in the area of the second section 13 ₂ the first implementation 37 , and the exterior of the pressure chamber 1 run a plurality of likewise arranged in equidistant angle sections to each other second air channels 21 ₁ and 21 ₂ , The number of second air channels 21 ₁ and 21 ₂ is opposite to the number of first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ reduced. In this way it is ensured that at any orientation of the contact pin 12 within the first sleeve 11 and at a certain axial position of the contact pin 12 in the associated first sleeve 11 every second air duct 21 ₁ and 21 ₂ at least partially with at least one of the first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 _{4 is} connected.

In this way, at least one of the number of second air channels 21 ₁ and 21 ₂ corresponding number of direct air connections between the pressure chamber 1 and the outside of the pressure chamber 1 in front.

The axial position of the contact pin 12 in the associated first sleeve 11 is in the contacting state of the contact pin 12 depending on the location of the integrated circuit package to the contact system and may vary over a certain range. Thus, the longitudinal extent of each first air channel 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ in the second section 14 ₂ of the contact pin 12 and the axial position of the second air channels 21 ₁ and 21 ₂ through the first sleeve 11 in the second section 13 ₂ the first implementation 37 interpreted as meaning that a direct connection between each second air duct and at least one of the first air ducts is realized. In particular, the longitudinal extent of each first air channel 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ in the second section 14 ₂ of the contact pin 12 long enough.

Due to the direct air connection between the individual first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ and the associated second air channels 21 ₁ and 21 ₂ In each case, there is an air flow of the temperature-controlled pressure medium between the pressure chamber 1 and the outside of the pressure chamber 1 , This air flow additionally causes a heat convection between the tempered pressure medium and the contact pin 12 , which accelerated tempering of the contact pin 12 allowed on the temperature level of the pressure medium. This heat convection extends over the entire longitudinal extent of the individual first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ inside the contact pin 12 ,

In the 3A and 3B is a second embodiment of a contact module according to the invention 7 ' shown. Identical features to the first embodiment have identical reference numerals and will not be described repeatedly.

In the second embodiment of the contact module according to the invention 7 ' become the first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ through one for all first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ each common first bore 22 in the longitudinal direction of the contact pin 12 and by a respective second bore 22 ₁ , 22 ₂ , 22 ₃ and 22 ₄ in the transverse direction of the contact pin 12 realized.

The common first bore 22 runs inside the contact pin, preferably in the center of the contact pin 12 , from the pressure chamber facing end 17 of the contact pin 12 over a certain longitudinal extent in the second section 14 ₂ of the contact pin 12 , At the end of this longitudinal extension of the first hole 22 lead several second holes 23 ₁ . 23 ₂ . 23 ₃ and 23 ₄ , which are preferably arranged in equidistant angle sections, from the inside to the outer circumferential surface of the contact pin 12 ,

Second air channels 21 ₁ and 21 ₂ in the first sleeve 11 between the second section 13 ₂ the first implementation 37 and the outside of the pressure chamber 1 are preferably arranged in equidistant angle sections to each other. The number of second air channels 21 ₁ and 21 ₂ is also opposite to the number of first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ reduced. In this way it is also ensured that at any orientation of the contact pin 12 within the first sleeve 11 and at a certain axial position of the contact pin 12 in the associated first sleeve 11 every second air duct 21 ₁ and 21 ₂ at least partially with at least one second bore 23 ₁ . 23 ₂ . 23 ₃ and 23 _{4 of} a first air channel 20 ₁ . 20 ₂ . 20 ₃ and 20 _{4 is} connected. In this way is also at least one of the number of second air channels 21 ₁ and 21 ₂ corresponding number of direct air connections between the pressure chamber 1 and the outside of the pressure chamber 1 in front.

The second holes 23 ₁ . 23 ₂ . 23 ₃ and 23 ₄ preferably each have an elliptical cross-sectional profile, wherein the longer axis of the elliptical cross-sectional profile in the longitudinal direction of the contact pin 12 and the shorter axis of the elliptical cross-sectional profile in the circumferential direction of the contact pin 12 extend.

In this way it is ensured that at different axial positions of the contact pin 12 within the first sleeve 11 in the case of different distances between the contact points to be contacted to the contact system always an air connection between each second air duct 21 ₁ and 21 ₂ and at least one second bore 23 ₁ . 23 ₂ . 23 ₃ and 23 _{4 of} a first air channel 20 ₁ . 20 ₂ . 20 ₃ and 20 _{4 is} realized.

In the following, a third embodiment of an inventive contact module 7 " with a contact pin and a contact socket for contacting a coaxial contact on the housing of the integrated circuit on the basis of 4A . 4B and 4C explains:

The the contact pin 12 and the associated first sleeve 11 characteristics correspond to the characteristics of the 2A . 2 B . 3A and 3B each presented embodiments of a contact module according to the invention for contacting a single contact point on the housing of the integrated circuit and will not be explained repeatedly below.

Coaxial to the first sleeve 11 are an insulator part 24 and a second implementation 25 arranged. The second implementation 25 is here as a sleeve-shaped space between a second sleeve 26 and the insulator part 24 educated. In the second implementation 25 is a contact socket 28 guided axially movable.

In one of the pressure chamber 1 facing away from the first section 27 ₁ the second implementation 25 has the second sleeve 26 in a preferred embodiment, a first inner diameter and in one of the pressure chamber 1 facing the second section 27 ₂ the second implementation 25 a larger compared to the first inner diameter second inner diameter.

This contact socket 28 has a first, the pressure chamber 1 facing away from the first section 29 ₁ and one to the first section 29 ₁ subsequent second section 29 ₂ on. The outer diameter of the first section 29 ₁ is opposite the outer diameter of the second section 29 ₂ reduced.

The outer diameter of the second section 29 ₂ the contact socket 28 corresponds to the inner diameter of the second sleeve 26 in the second section 27 ₂ the second implementation 25 , The outer diameter of the first section 29 ₁ the contact socket 28 corresponds in the in the 4A . 4B and 4C illustrated variant of a contact module according to the invention 7 " the inner diameter of the second sleeve 26 in the first part 27 ₁ the second implementation 25 ,

At the height of the first sleeve 11 respectively provided openings 16 ie in a subsection of the contact module 7 " who is within the pressure chamber 1 are also in the second sleeve 26 openings 30 intended. Preferably, the number of openings corresponds 16 in the first sleeve 11 the number of openings 30 in the second sleeve 26 , In addition, the openings 30 in the first sleeve 26 preferably in a same phase position as the openings 16 in the first sleeve 11 arranged in the pressure chamber 1 located pressure medium in the same way to that of the pressure chamber 1 facing the end 17 of the contact pin 12 and to the pressure chamber 1 facing the end 31 the contact socket 28 respectively.

The insulator part 24 extends in the longitudinal direction of the first passage 37 or the second implementation 25 from the openings 16 in the first sleeve 11 up to the second air channels 21 ₁ and 21 ₂ through the first sleeve 11 in the area of the second section 13 ₂ the first implementation 37 , Only in the area between the openings 16 the first sleeve 11 or the openings 30 the second sleeve 26 and the pressure chamber 1 facing the end 31 the contact socket 28 the insulator part extends 24 , like out 4B shows, in the transverse direction between the first and second sleeve 11 and 28 to first and second sleeve 11 and 28 support each other.

So that a pressure medium from the pressure chamber 1 over the openings 30 in the second sleeve 28 to the pressure chamber facing end 31 the contact socket 28 can reach, are in the insulator part 24 in the area between the openings 30 the second sleeve 26 and the pressure chamber 1 facing the end 31 the contact socket 28 a plurality of passages preferably arranged in equidistant angular sections 32 ₁ . 32 ₂ . 32 ₃ and 32 ₄ provided. These passages 32 ₁ . 32 ₂ . 32 ₃ and 32 ₄ are preferably realized as slots. Alternatively, other cross-sectional profiles for the passages 32 ₁ . 32 ₂ . 32 ₃ and 32 _{4 are} realized. The number of passes 32 ₁ . 32 ₂ . 32 ₃ and 32 ₄ is suitable to choose.

Between the inner wall of the second sleeve 26 in the second section 27 _{2 of} the second implementation 25 , the outer cylindrical outer surface of the first section 29 ₁ the contact socket 28 , the pressure chamber facing end face of the second sleeve 26 in the transition between the first and second sections of the second implementation 25 and the pressure chamber facing away from the end face of the second section 29 ₂ the contact socket 28 also forms analogous to the contact pin 12 a cavity with a compressible air. The compressibility of the air realized in this case the damping effect of a coil spring, according to the invention for the contact socket 28 is not required.

An escape of the air in the cavity in the outer space of the pressure chamber 1 with an additional axial movement of the contact socket 28 in the direction of the contact point to be contacted on the housing of the integrated circuit, as in 4C is shown, over at least one passage 33 ₁ , preferably several passes 33 ₁ and 33 ₂ in the second sleeve 26 in the area of the first section 27 ₁ the second implementation 25 realized. These passages 33 ₁ and 33 ₂ may preferably be slit-shaped. Alternatively, an escape of the air in the cavity in the outer space of the pressure chamber 1 can also be realized via a passage extending through an inner diameter of the second sleeve 26 in the area of the first section 27 ₁ the second implementation 25 which forms opposite to the outer diameter of the first section 29 ₁ the contact socket 28 is reduced.

In a further embodiment, the second sleeve 26 on the second section 27 ₂ the second implementation 25 limited. In the area of the first section 27 ₁ the second implementation 25 a separate third sleeve is provided which has the same geometry and the same characteristics as above for the second sleeve 26 in the area of the first section 27 ₁ the second implementation 25 were named. The third sleeve is in this case by means of interference fit, gluing or screwing with the second sleeve 26 and / or the inner wall of the respective through-bore 6 ₁ . 6 ₂ and 6 ₃ in the case 2 the pressure chamber 1 connected.

A temperature of the contact socket 28 to the temperature level of the pressure chamber 1 on the one hand by a heat transfer from the pressure medium within the second sleeve 26 on the contact socket 28 at the pressure chamber facing the end 31 the contact socket 28 , On the other hand, the contact socket 28 additionally tempered by air streams passing through the individual first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 _{4 of} the contact pin 12 and through the second air channels 21 ₁ and 21 ₂ through the first sleeve 11 guided and along the inner wall of the first section 29 ₁ the contact socket 28 be directed.

A second embodiment of a contact system 100 'according to the invention will be described below with reference to FIGS 5 described:

In the case 2 the pressure chamber 1 is for every contact pin 12 ₁ . 12 ₂ and 12 ₃ one through hole each 6 ₁ ' . 6 ₂ ' and 6 ₃ ' provided, the interior of each as a further embodiment of a first implementation 37 ' for the associated contact pin 12 ₁ . 12 ₂ and 12 ₃ serves. Each of these first executions 37 ' , ie each interior of a through hole 6 ₁ ' . 6 ₂ ' and 6 ₃ ' , Each has a first chamber facing away from the pressure chamber 13 ₁ ' with a smaller inner diameter and a pressure chamber facing second section 13 ₂ ' with a larger inside diameter.

Every through hole 6 ₁ ' . 6 ₂ ' and 6 ₃ ' can thus be realized on the one hand as a stepped through-hole.

Another realization, as in 5 is shown, includes a through hole, each having a larger, the inner diameter of the second portion 13 ₂ ' the first implementation 37 ' corresponding inner diameter and in each case a third sleeve 38 with a smaller, the inner diameter of the first section 13 ₁ ' the first implementation 37 ' corresponding inner diameter. The third sleeve 38 is fixed at the pressure chamber facing away from the end of the respective through hole accurately fitting to the through hole. The fixation of the third sleeve 38 at the respective through-hole, for example, by press-fitting, gluing or screwing.

In a pressure chamber facing portion of the second section 13 ₂ ' the first implementation 37 ' , ie, the through hole, a portion of a second embodiment of a first sleeve 11 'is fixed accurately. The second embodiment of the first sleeve 11 'is an open sleeve in the direction of the housing of the integrated circuit to be tested and corresponds in the direction of the pressure chamber 1 the first embodiment of the first sleeve 11 , The contact pin 12 is in analogy to the first embodiment of the first sleeve 11 axially movable in the first sleeve 11 'out.

Thus, the interior of the third sleeve forms 38 the first section 13 ₁ ' the first implementation 37 ' , which has a passage for the contact pin 12 for contacting a contact point on the housing of an integrated circuit. The partial section of the through hole, not from the third sleeve 38 is occupied, and the interior of the first sleeve 11 'together form the second section 13 ₂ ' the first implementation 37 ' in which the contact pin 12 ₁ . 12 ₂ and 12 ₃ is guided axially movable.

Every contact pin 12 ₁ . 12 ₂ and 12 ₃ each has several first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ , each as a recess on the cylinder jacket outer surface of the second section 14 ₂ of the respective contact pin 12 ₁ . 12 ₂ and 12 ₃ from the pressure chamber facing the end 17 realized over a certain longitudinal extent. These recesses are executed at their end facing away from the pressure chamber each conical or frusto-conical. Air flows through the first air channels 20 ₁ . 20 ₂ . 20 ₃ and 20 ₄ flow evenly through second air passages, which are passages in the third sleeve 38 are realized. These passages in the third sleeve 38 are equivalent to those in 4C illustrated passageways 33 ₁ and 33 ₂ in the second sleeve 26 in the area of the first section 27 ₁ the second implementation 25 executed. In this way, on the one hand, a centering of the respective contact pin 12 ₁ . 12 ₂ and 12 ₃ in the first implementation 37 ' realized. On the other hand, via convection an accelerated temperature of the respective contact pin 12 ₁ . 12 ₂ and 12 ₃ to the temperature level of the pressure medium 1 realized.

In the 6A . 6B and Fig. 6C shows a third embodiment of a contact system 100 "according to the invention 2 the pressure chamber 1 is for each contact module 7 ₁ ''' . 7 ₂ ''' and 7 ₃ '''' in each case a first through-hole 6 ₁ ", 6 ₂ " and 6 ₃ "are provided, structurally the first through-hole presented in the second embodiment of the contact system 100" according to the invention 6 ₁ ' . 6 ₂ ' and 6 ₃ ' correspond. Because the first through holes 6 ₁ " . 6 ₂ " and 6 ₃ " of the third embodiment of contact system 100 "according to the invention for contact modules 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' are used in each case a contact pin and a contact socket and thus only have a larger diameter, is omitted at this point to a detailed repeated description and to the corresponding description of the first through holes 6 ₁ ' . 6 ₂ ' and 6 ₃ ' in the second embodiment of the contact system 100 "according to the invention, and also the external circuitry of the pressure chamber 1 does not change in the third embodiment with respect to the first and second embodiments of the contact system according to the invention, so that here is a detailed description is omitted and reference is made in this regard to the description of the first and second embodiments.

The third embodiment of a contact module used in the third embodiment of the contact system 100 "according to the invention 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' each having a contact pin and a contact socket is similar to the second embodiment of a contact module 7 " according to the 4A to 4C so that only the differences are explained below:

Each contact module 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' The third embodiment is fixed in an associated stepped through hole 6 ₁ ", 6 ₂ " and 6 ₃ "fit.

The space between the stepped through-hole 6 ₁ ", 6 ₂ " and 6 ₃ "and the insulator part 24 of the associated contact module 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' forms a second implementation 25 ' , This second implementation 25 ' according to 6C a pressure chamber facing away from the first section 27 ₁ ' with a first inner diameter and a pressure chamber facing the second section 27 ₂ ' with a relation to the first inner diameter larger second inner diameter.

In the cylinder inner wall of the stepped through-holes 6 ₁ " . 6 ₂ " and 6 ₃ " in the area of the first section 27 ₁ ' the second implementation 25 ' are according to 6B a plurality of recesses preferably arranged in equidistant angular sections and running in the longitudinal direction of the second passage 34 ₁ and 34 ₂ intended. These allow escape of the cavity between the second sleeve 26 , the first section 29 ₁ the contact socket 28 the pressure chamber facing away from the end face of the second section 29 ₂ the contact socket 28 and the pressure chamber facing end face of the respective stepped through-hole 6 ₁ ", 6 ₂ " and 6 ₃ "in the transition between the first and the second portion of the second passage 25 ' located air in the outer space of the pressure chamber 1 ,

The second sleeve 26 every contact module 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' is completely within the range of the second section 27 ₂ ' the second implementation 25 ' in the stepped through hole 6 ₁ ''' . 6 ₂ ''' and 6 ₃ ''' inserted.

The contact socket 28 is in the associated second implementation 25 ' axially movable.

In the third embodiment of the contact module according to the invention 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' are in addition to the openings 30 in the direction of the contact socket 28 additional openings 35 in the second sleeve 28 intended. These additional openings 35 allows the use of an insulator part 24 so that in the area of mutual support of the first and second sleeve 11 and 28 no passages 32 ₁ . 32 ₂ . 32 ₃ and 32 _{4 are} required.

The remaining features of the third embodiment of the contact module according to the invention 7 ₁ ''' . 7 ₂ ''' and 7 ₃ ''' correspond to the second embodiment of the contact module according to the invention 7 " and are therefore not explained in detail here.

At this point it should be noted that the housing 2 in such an embodiment of a contact system according to the invention with coaxial contacting not only be made of an electrically insulating material, but preferably also of an electrically conductive material. With such a material selection can over the entire housing 2 a common ground potential for the individual contact socket can be realized.

In 7 a further embodiment 100 '''of a contact system according to the invention is shown, which for coaxial contact modules 7 " according to the 4A to 4C can be used. Alternatively, this is another embodiment 100 ' a contact system according to the invention also for coaxial contacting, as shown in the 6a to 6C is shown, can be used.

The pressure chamber 1 Here is divided by the interposition of a further housing plate 2 ₄ in two pressure chambers 1 ₁ and 1 ₂ . The further housing plate 2 ₄ has for this purpose for each coaxial contact module 7 " each a suitably dimensioned and positioned hole. Each pressure chamber 1 ₁ and 1 ₂ each has a separate first and second access 3 ₁₁ and 3 ₂₁ and 3 ₁₂ and 3 ₂₂ for the supply or discharge of a pressure medium.

In this way, in each pressure chamber 1 ₁ and 1 ₂ each set a specific pressure level for the pressure medium. Thus, the individual contact pins can be pressed with a different contact pressure on the contact points on the housing of the integrated circuit to be tested than the associated contact sockets. This is particularly necessary if the pins require a higher contact pressure to dissolve the oxidation layers due to strong oxidation phenomena at the associated contact points.

Although the present invention has been fully described above with reference to preferred embodiments, it is not limited thereto but is modifiable in a variety of manners.

LIST OF REFERENCE NUMBERS

1

pressure chamber

2

casing

2 ₁ , 2 ₂

upper and lower housing plate

3 ₁ , 3 ₂

first and second access

4 ₁ , 4 ₂

Pneumatic pump

5 ₁ , 5 ₂

Pressure control valve

6 ₁ , 6 ₂ , 6 ₃

first through hole

6 ₁ ', 6 ₂ ', 6 ₃ '

first through hole

7, 7 ₁ , 7 ₂ , 7 ₃

first embodiment of a contact module

7 '

second embodiment of a contact module

7 "

third embodiment of a contact module

8 ₁ , 8 ₂ , 8 ₃

second embodiment of a contact module

9 ₁ , 9 ₂ , 9 ₃

signal lines

10

circuit board

11

first sleeve

12, 12 ₁ , 12 ₂ , 12 ₃

contact pins

13 ₁ , 13 ₂

first and second sections of a first embodiment of a first implementation

13 ₁ ', 13 ₂ '

first and second sections of a second embodiment of a first implementation

14 ₁ , 14 ₂

first and second section of a contact pin

15

shoulder

16

opening

17

the pressure chamber facing the end of the contact pin

18

probe

19

thermostat

20 ₁ , 20 ₂ , 20 ₃

first air channels

21 ₁ , 21 ₂

second air channels

22

first hole

23 ₁ , 23 ₂ , 23 ₃

second hole

24

Insulation

25

first embodiment of a second implementation

25 '

second embodiment of a second implementation

26

second sleeve

27 ₁ , 27 ₂

first and second sections of a first embodiment of a second implementation

27 ₁ ', 27 ₂ '

first and second sections of a second embodiment of a second implementation

28

Contact socket

29 ₁ , 29 ₂

first and second sections of the contact socket

30

openings

31

the pressure chamber facing the end of the contact socket

32 ₁ , 32 ₂ , 32 ₃

Passages in the insulator part

33 ₁ , 33 ₂

Passages in the second sleeve in the region of the first portion of the second passage

34 ₁ , 34 ₂

Recesses in the stepped through holes in the region of the first section of the second implementation

35

additional openings

36

away from the probe end of the contact pin

37

first embodiment of a first implementation

37 '

second embodiment of a first implementation

38

third sleeve

200

Housing of the integrated circuit

201 ₁ , 201 ₂ , 201 ₃

Contact points on the housing of the integrated circuit

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 6624645 B2 [0002]
• US 7555834 B2 [0002]
• US 5324205 A1 [0002]

Claims (20)

Contact system (100, 100 ', 100 ") with at least one pneumatically actuated contact pin (12 ₁ , 12 ₂ , 12 ₃ ), a pressure chamber (1), one in a housing (2) of the pressure chamber (1) for each contact pin (12 ₁ , 12 ₂ , 12 ₃ ) respectively provided first passage (37, 37 '), wherein each contact pin (12 ₁ , 12 ₂ , 12 ₃ ) each have a first portion (14 ₁ ) having a first outer diameter and one to the first portion (14 ₁ ) has a second second section (14 ₂ ) adjoining the first outer diameter, wherein each first passage (37; 37 ') has a first section (13 ₁ ; 13 ₁ ') facing away from the pressure chamber (1) having a first inner diameter and a second section (13 ₂ , 13 ₂ ') facing the pressure chamber (1) with a larger second inner diameter than the first inner diameter, the second section (14 ₂ ) of each contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in the second Ab cut (13 ₂ ; 13 ₂ ') of the first passage (37, 37') is guided axially movable and for contacting the first portion (14 ₁ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in the first section (13 ₁ , 13 ₁ ') a predetermined axial position of each contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in the associated first passage (37, 37 ') to a certain pressure level of a pressure medium in the pressure chamber (37; 1) corresponds, wherein the pressure medium is temperature controlled. Contact system (100, 100 ', 100 ") Claim 1 , characterized in that between the second portion (13 ₂ , 13 ₂ ') of the first passage (37, 37') and an outer space of the pressure chamber (1) at least a second air channel (21 ₁ , 21 ₂ ) is provided for certain axial positions of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in the associated first passage (37, 37 ') are each connected to at least one first air passage (20 ₁ , 20 ₂ , 20 ₃ ), each of one of Pressure chamber (1) facing the end (18) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) over a certain longitudinal extent in the second portion (14 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) extends. Contact system (100, 100 ', 100 ") Claim 2 Characterized in that each first air passage (20 _1, 20 _2, 20 ₃₎ extending in the longitudinal direction on an outer cylindrical lateral surface in the second portion (14 ₂₎ of the contact pin (12 _1, 12 _2, 12 ₃₎ in each recess of an inner wall of the second portion (13 ₂ ) of the first passage (37, 37 ') is closed. Contact system (100, 100 ', 100 ") Claim 3 , characterized in that each recess at its the pressure chamber (1) facing away from each end has a conical or frusto-conical shape. Contact system (100, 100 ', 100 ") Claim 2 , characterized in that each first air channel (20 ₁ , 20 ₂ , 20 ₃ ) in each case one for each first air channel (20 ₁ , 20 ₂ , 20 ₃ ) together in the longitudinal direction within the second portion (14 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) extending first bore (22) and an adjoining, in the transverse direction of the second portion (14 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) extending second bore (23 ₁ , 23 ₂ , 23 ₃ ). Contact system (100, 100 ', 100 ") according to one of Claims 1 to 5 , characterized in that each to a respective contact pin (12 ₁ , 12 ₂ , 12 ₃ ) associated first passage (37, 37 ') each as a stepped through hole (6 ₁ ', 6 ₂ ', 6 ₃ ') realized first implementation (37 ') in the housing (2) of the pressure chamber (1). Contact system (100, 100 ', 100 ") Claim 6 , characterized in that a partial section of a first sleeve (11 ') in a portion of the second portion (13 ₂ ') as a stepped through hole (6 ₁ ', 6 ₂ ', 6 ₃ ') realized first implementation (37') fit is fixed and the respective contact pin (12 ₁ , 12 ₂ , 12 ₃ ) with its second portion (14 ₂ ) in the associated first sleeve (11 ') is guided axially movable. Contact system (100, 100 ', 100 ") according to one of Claims 1 to 5 , characterized in that each to a respective contact pin (12 ₁ , 12 ₂ , 12 ₃ ) associated with the first passage (37) is an interior of a first sleeve (11), wherein the first sleeve (11) in an appropriate through-hole ( 6 ₁ , 6 ₂ , 6 ₃ ) in the housing (2) of the pressure chamber (1) is fixed. Contact system (100, 100 ', 100 ") Claim 7 or 8th , characterized in that in the pressure chamber (1) befindlicher and by the associated contact pin (12 ₁ , 12 ₂ , 12 ₃ ) vacant portion of each first sleeve (11; 11 ') each having at least one opening (16). Contact system (100, 100 ', 100 ") according to one of Claims 7 to 9 , characterized in that at each first sleeve (11, 11 ') or each contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in each case a signal line (9; 9 ₁ , 9 ₂ , 9 ₃ ) is fixed. Contact system (100, 100 ', 100 ") according to one of Claims 7 to 10 , characterized in that that end of each first sleeve (11; 11), which is remote from the associated contact pin (12 ₁ , 12 ₂ , 12 ₃ ), in each case in an associated third passage (8) in the housing (2) of the pressure chamber (1) is fixed accurately fit. Contact system (100, 100 ', 100 ") according to one of Claims 1 to 11 , characterized in that in the housing (2) of the pressure chamber (1) concentrically to each first passage each an insulator part (24) and a second passage (25; 25 ') are provided, in which a contact socket (28) is axially movable. Contact system (100, 100 ', 100 ") according to one of Claims 1 to 12 , characterized in that the pressure chamber (1) has a first access (3 ₁ ) for establishing a first pressure level in the pressure chamber (1), in particular a relation to the pressure level in the outer space of the pressure chamber (1) higher pressure levels, and a second access (3 ₂ ) for establishing a second pressure level in the pressure chamber (1), in particular a relation to the pressure level in the outer space of the pressure chamber (1) lower pressure levels comprises. Contact module (7; 7 '; 7 ") with a pneumatically controllable contact pin (12 ₁ , 12 ₂ , 12 ₃ ) and a first sleeve (11), wherein the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) each have a first portion (14 ₁ ) having a first outer diameter and a second portion (14 ₂ ) adjoining the first portion (14 ₁ ) with a larger second outer diameter than the first outer diameter, an inner space of the first sleeve (11) having a first passage (14). 37) for the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) and a first portion (13 ₁ ) having a first inner diameter and a second portion (14 ₂ ) having a larger compared to the first inner diameter second inner diameter, wherein the second Section (14 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) in the second portion (13 ₂ ) of the first passage (37) is guided axially movable and for contacting the first portion (14 ₁ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃₎ is carried out (in the first section 13 ₁₎ of the first bushing (37), wherein an axial position of the contact pin (12 _1, 12 _2, 12 ₃₎ (in the first sleeve 11) to a pressure level of a pressure medium at the end (18) of the second portion (14 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) corresponds, wherein the pressure medium is temperature-controlled. Contact module (7; 7 '; 7 ") after Claim 14 , characterized in that at least one second air channel (21 ₁ , 21 ₂ ) extending between the second portion (13 ₂ ) of the first passage (37) and an outer space of the first sleeve (11) for certain axial positions of the contact pin ( 12 ₁ , 12 ₂ , 12 ₃ ) in the first sleeve (11) is connected to at least one first air channel (20 ₁ , 20 ₂ , 20 ₃ ), which extends from the end (18) of the second section (13 ₂ ) of the contact pin (13 12 ₁ , 12 ₂ , 12 ₃ ) over a certain longitudinal extension in the second section (13 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) extends. Contact module (7; 7 ";7") after Claim 15 Characterized in that each first air passage (20 _1, 20 _2, 20 ₃₎ extending in the longitudinal direction on an outer cylindrical lateral surface in the second portion (13 ₂₎ of the contact pin (12 _1, 12 _2, 12 ₃₎ in each recess. Contact module (7; 7 '; 7 ") after Claim 15 , characterized in that each first air duct (20 ₁ , 20 ₂ , 20 ₃ ) in each case one for each first air duct (20 ₁ , 20 ₂ , 20 ₃ ) together in the longitudinal direction of the second portion of the contact pin extending first bore (22) and a adjoining, in the transverse direction of the second portion (13 ₂ ) of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) extending second bore (23 ₁ , 23 ₂ , 23 ₃ ). Contact module (7; 7 '; 7 ") according to one of Claims 14 to 17 , characterized in that in one of the contact pin (12 ₁ , 12 ₂ , 12 ₃ ) vacant portion of the second portion (13 ₁ ) of the first passage (37) at least one opening (16) to the interior of the first sleeve (11) is provided , Contact module (7; 7 '; 7 ") according to one of Claims 14 to 18 , characterized in that each recess at its the pressure chamber (1) facing away from each end has a conical or frusto-conical shape. Contact module (7; 7 '; 7 ") according to one of Claims 14 to 19 , characterized in that concentrically to the first sleeve (11) an insulator part (24) and a second sleeve (26) are arranged, wherein between the insulator part (24) and the second sleeve (26) has a contact bush (28) is axially movable.

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