CN222001135U - Pipeline structure with drying function - Google Patents

Abstract

The utility model discloses a pipeline structure with a drying function, and belongs to the technical field of semiconductor cleaning; comprises a liquid mixing tank; the liquid supply pipeline is connected between the liquid outlet and the liquid inlet of the liquid mixing tank; the first end and the second end of the tee pipe fitting are connected to the liquid supply pipeline; and the drying pipeline is connected with the third end of the three-way pipe fitting. The beneficial effects of the technical scheme are as follows: due to the adoption of the technical scheme, the pipeline drying function is increased, when the pipeline is required to be disassembled, the storage quantity of chemical liquid in the pipeline is reduced as much as possible, the direct contact of constructors with the chemical liquid during construction is avoided, and the risk during construction is reduced.

Description

Pipeline structure with drying function

Technical Field

The utility model relates to the technical field of semiconductor cleaning, in particular to a pipeline structure with a drying function.

Background

Wet cleaning apparatuses generally include tank cleaning apparatuses and single-piece cleaning apparatuses, but regardless of the apparatuses, a circulation liquid supply pipe system is one of the important components thereof, simply referred to as a pipe system, which is generally composed of components such as a transfusion pipe, a manual valve, a pneumatic diaphragm valve, a pump, a filter, a flowmeter, and the like.

In the prior art, as shown in fig. 1 and 2, the flow of the liquid supply pipeline 2 is that the liquid medicine firstly enters the liquid mixing tank 21, the circulating pump 22 pumps the liquid for circulation, heating is performed, the temperature is controlled, and the liquid supply is started after the temperature, the concentration and the like reach standards. In general, for an apparatus that has been subjected to acid, the pipe structure will not be disassembled, and generally, only when some articles to be replaced in the pipe system are replaced at a specific maintenance stage, the articles will be disassembled and replaced. Before the disassembly and replacement actions of the pipeline system, the pipeline is generally required to be circularly cleaned by deionized water until the PH value of the liquid flowing out of the pipeline is close to neutral, the materials to be replaced are disassembled and installed, but a large amount of water containing a small amount of chemical liquid still exists in the pipeline at the moment, and when the disassembly actions are carried out, the liquid in the pipeline can be sprayed out, and constructors can directly contact the liquid. Although the constructor is required to wear the protective tool when carrying out related operations, once the protective tool is damaged, the constructor is at risk of being injured by chemical liquid medicine, and potential safety hazards exist.

Disclosure of utility model

The utility model aims to provide a pipeline structure with a drying function, which solves the technical problems;

a pipeline structure with a drying function comprises,

A liquid mixing tank;

the liquid supply pipeline is connected between the liquid outlet and the liquid inlet of the liquid mixing tank;

the first end and the second end of the tee pipe fitting are connected to the liquid supply pipeline;

And the drying pipeline is connected with the third end of the three-way pipe fitting.

Preferably, the drying device further comprises a first valve body arranged on the drying pipeline, and an inlet end of the first valve body is connected with drying gas.

Preferably, the air filter is arranged on the drying pipeline, and the air filter is positioned on the air outlet side of the first valve body.

Preferably, the air filter further comprises a second valve body, wherein the second valve body is arranged on the drying pipeline and is close to the three-way pipe fitting and positioned on the air outlet side of the air filter.

Preferably, the gas filter further comprises a third valve body and a fourth valve body, wherein the third valve body and the fourth valve body are sequentially arranged between the gas filter and the second valve body.

Preferably, the first valve body is a manual valve, the second valve body is a check valve, the third valve body is a pressure regulating valve, and the fourth valve body is a pneumatic diaphragm valve.

Preferably, the air dryer further comprises a first flowmeter arranged on the drying pipeline and located between the fourth valve body and the second valve body.

Preferably, the first flow meter is a gas flow meter.

Preferably, the device further comprises a circulating pump which is arranged on the liquid supply pipeline and is close to the liquid outlet of the liquid mixing tank.

Preferably, the liquid supply device further comprises a heater arranged on the liquid supply pipeline.

The beneficial effects of the utility model are as follows: due to the adoption of the technical scheme, the pipeline drying function is increased, when the pipeline is required to be disassembled, the storage quantity of chemical liquid in the pipeline is reduced as much as possible, the direct contact of constructors with the chemical liquid during construction is avoided, and the risk during construction is reduced.

Drawings

FIG. 1 is a schematic diagram of a prior art piping structure;

FIG. 2 is a workflow diagram of a prior art piping structure;

FIG. 3 is a schematic diagram of a pipeline structure with a drying function according to the present utility model;

fig. 4 is a flow chart of the operation of the pipe structure with drying function of the present utility model.

In the accompanying drawings: 1. a drying pipeline; 11. a first valve body; 12. a gas filter; 13. a third valve body; 14. a fourth valve body; 15. a first flowmeter; 16. a second valve body; 17. a three-way pipe fitting; 2. a liquid supply pipeline; 21. a liquid mixing tank; 22. and a circulation pump.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.

A pipeline structure with a drying function, as shown in fig. 3, comprises,

A liquid mixing tank 21;

A liquid supply pipeline 2, wherein the liquid supply pipeline 2 is connected between a liquid outlet and a liquid inlet of the liquid mixing tank 21;

the first end and the second end of the three-way pipe fitting 17 are connected to the liquid supply pipeline 2;

And the drying pipeline 1 is connected with the third end of the three-way pipe fitting 17.

The utility model provides a pipeline structure with a drying function, which is used for drying pipelines, and the structure for drying the pipelines is added in the original pipeline structure, so that the drying action is carried out in the pipeline after the pipeline is cleaned by deionized water each time when the pipeline needs to be disassembled, no liquid is in the pipeline during the disassembly, and the harm of chemical liquid to constructors is avoided.

In a preferred embodiment, the drying device further comprises a first valve body 11 arranged on the drying pipeline 1, and an inlet end of the first valve body 11 is connected with the drying gas.

Specifically, the drying gas is nitrogen so as to carry out pipeline drying treatment and prolong the service life of the pipeline.

In a preferred embodiment, the air filter 12 is further provided on the drying pipeline 1, and the air filter 12 is located on the air outlet side of the first valve body 11.

Specifically, the gas filter 12 must be a high-precision filter, which can effectively filter impurities in the gas and prevent impurities in the gas at the factory end from polluting the liquid supply pipeline 2.

In a preferred embodiment, the air filter further comprises a second valve body 16 which is arranged on the drying pipeline 1 and is close to the three-way pipe fitting 17 and positioned on the air outlet side of the air filter 12;

The gas filter further comprises a third valve body 13 and a fourth valve body 14, wherein the third valve body 13 and the fourth valve body 14 are sequentially arranged between the gas filter 12 and the second valve body 16;

The first valve body 11 is a manual valve, the second valve body 16 is a check valve, the third valve body 13 is a pressure regulating valve, and the fourth valve body 14 is a pneumatic diaphragm valve.

Specifically, the first valve body 11 is a manual valve, and is a switch for controlling the gas entering the pipeline, so that the operation and the maintenance are convenient; because the drying pipeline 1 is connected into the liquid supply pipeline 2 through the three-way pipe fitting 17, the drying pipeline 1 is in danger of being corroded by chemical liquid medicine at any time, the model of the second valve body 16 is required to be provided with a check valve with acid-resistant and alkali-resistant chemical liquid property, namely a one-way valve, so that the check valve is prevented from being corroded by chemical liquid in the liquid supply pipeline 2, and then the valve is damaged, and even components at the front section of the check valve are influenced; the third valve body 13 is a pressure regulating valve, so that the pressure of gas can be stabilized, and the normal operation of the system is ensured; the pneumatic diaphragm valve can realize quick switching and adjustment, and meanwhile, the pneumatic diaphragm valve has good sealing performance and can effectively prevent leakage.

Further specifically, the function of the drying pipeline 1 is simple to install, only one three-way pipeline is needed to be arranged in a conventional pipeline system, the drying pipeline 1 can be connected through the three-way joint, and the use logic is easy to realize, as shown in fig. 4, after the drying pipeline 1 is cleaned by deionized water, components such as a hand valve, a high-purity filter and a one-way valve are opened, so that the whole internal pipeline can be purged by high-purity nitrogen, and all liquid existing in the pipeline is discharged.

More specifically, the introduced gas is high-purity nitrogen, the function of drying the pipeline cannot influence the function of the original pipeline system, and meanwhile, a high-precision filter is additionally arranged on the part of the drying pipeline 1, so that the pipeline is blown dry by adopting the gas and cannot pollute the original pipeline system.

In a preferred embodiment, the device further comprises a first flowmeter 15 arranged on the drying pipeline 1 and positioned between the fourth valve body 14 and the second valve body 16;

the first flow meter 15 is a gas flow meter.

Specifically, the first flow meter 15 can know the flow of the gas in the pipeline to control the flow rate.

In a preferred embodiment, the device also comprises a circulating pump 22 which is arranged on the liquid supply pipeline 2 and is close to the liquid outlet of the liquid mixing tank 21;

The device also comprises a heater which is arranged on the liquid supply pipeline 2.

In particular, the circulation pump 22 can assist the circulation flow of the liquid in the liquid supply line 2, so as to maintain uniform mixing of the liquid and avoid stratification or sedimentation of the liquid; the heater may provide thermal energy to heat the liquid to a desired temperature for subsequent liquid supply.

In summary, the application provides a pipeline structure with a drying function, which is used for drying pipelines, wherein the original pipeline system of a machine is additionally provided with the structure for drying the pipelines, when certain objects to be replaced periodically in the pipeline system are replaced, deionized water is used for cleaning the inside of the pipeline, and then liquid in the pipeline is discharged through nitrogen, so that no chemical liquid is in the pipeline during disassembly, the probability of direct contact between constructors and the chemical liquid is reduced, and the safety is enhanced.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims (10)

1. A pipeline structure with a drying function is characterized by comprising,

A liquid mixing tank (21);

the liquid supply pipeline (2) is connected between the liquid outlet and the liquid inlet of the liquid mixing tank (21);

The first end and the second end of the three-way pipe fitting (17) are connected to the liquid supply pipeline (2);

and the drying pipeline (1) is connected with the third end of the three-way pipe fitting (17).

2. The pipeline structure with the drying function according to claim 1, further comprising a first valve body (11) arranged on the drying pipeline (1), wherein an inlet end of the first valve body (11) is connected with drying gas.

3. The pipeline structure with the drying function according to claim 2, further comprising a gas filter (12) arranged on the drying pipeline (1), wherein the gas filter (12) is positioned on the gas outlet side of the first valve body (11).

4. A pipeline structure with a drying function according to claim 3, further comprising a second valve body (16) arranged on the drying pipeline (1), close to the three-way pipe fitting (17) and positioned on the air outlet side of the air filter (12).

5. The pipeline structure with the drying function according to claim 4, further comprising a third valve body (13) and a fourth valve body (14), wherein the third valve body (13) and the fourth valve body (14) are sequentially arranged between the gas filter (12) and the second valve body (16).

6. The pipeline structure with the drying function according to claim 5, wherein the first valve body (11) is a manual valve, the second valve body (16) is a check valve, the third valve body (13) is a pressure regulating valve, and the fourth valve body (14) is a pneumatic diaphragm valve.

7. The pipeline structure with the drying function according to claim 5, further comprising a first flowmeter (15) arranged on the drying pipeline (1) and positioned between the fourth valve body (14) and the second valve body (16).

8. The piping structure with drying function according to claim 7, characterized in that said first flowmeter (15) is a gas flowmeter.

9. The pipeline structure with the drying function according to claim 7, further comprising a circulating pump (22) arranged on the liquid supply pipeline (2) and close to a liquid outlet of the liquid mixing tank (21).

10. The pipeline structure with the drying function according to claim 9, further comprising a heater arranged on the liquid supply pipeline (2).