CN221588686U - Multi-shaft chemical vapor deposition furnace - Google Patents
Multi-shaft chemical vapor deposition furnace Download PDFInfo
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- CN221588686U CN221588686U CN202323545331.7U CN202323545331U CN221588686U CN 221588686 U CN221588686 U CN 221588686U CN 202323545331 U CN202323545331 U CN 202323545331U CN 221588686 U CN221588686 U CN 221588686U
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 69
- 238000000151 deposition Methods 0.000 claims abstract description 54
- 230000008021 deposition Effects 0.000 claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 8
- 235000011089 carbon dioxide Nutrition 0.000 claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 2
- 210000001061 forehead Anatomy 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of deposition furnaces and discloses a multi-shaft chemical vapor deposition furnace, which comprises a cylinder deposition furnace, wherein a water storage tank is fixedly connected to the outer wall of the cylinder deposition furnace, a dry ice machine is fixedly connected to the right side of the top end of the outer wall of the water storage tank, an ice leakage pipe is communicated with the middle part of the front side of the ice dryer, a water tank is communicated with the front end of the ice leakage pipe, a water pump is communicated with the middle part of the left side of the water tank, an output end of the water pump is communicated with a water inlet pipe, the rear end of the water inlet pipe is communicated with the outer wall of the water storage tank, and a temperature detector is fixedly connected to the left side of the top of the cylinder deposition furnace. According to the utility model, the plate, the heating rod, the heating wire, the temperature detector, the display, the ice drier, the ice leakage pipe, the water tank, the water pump, the water inlet pipe and the like are mutually matched, so that the temperature inside the deposition furnace can be effectively controlled, and the conditions of high or low temperature are avoided, and the processing quality and effect are influenced.
Description
Technical Field
The utility model relates to the technical field of deposition furnaces, in particular to a multi-shaft chemical vapor deposition furnace.
Background
A deposition furnace is an apparatus for depositing thin films or coatings on solid surfaces or other substrates, which has wide application in the fields of materials science, nanotechnology, semiconductor industry, etc., for preparing materials with specific properties, while the deposition furnace is usually equipped with high temperature heating for providing the high temperature conditions required for the deposition process. This may be achieved by means of resistive heating, inductive heating, etc.
Searching, chinese patent bulletin number: CN212770943U discloses a multi-station chemical vapor deposition furnace. A multi-station chemical vapor deposition furnace comprising: a furnace body; the hollow pipe is fixedly arranged in the furnace body, and one end of the hollow pipe extends out of the furnace body; the feeding cylinder is slidably arranged in the hollow pipe; the first motor is fixedly arranged on one side of the furnace body; the first conical gear is fixedly arranged on an output shaft of the first motor; the internal thread sleeve is rotatably arranged in the hollow pipe, and one end of the internal thread sleeve extends out of the furnace body; the second conical gear is fixedly sleeved on the inner threaded sleeve, and the first conical gear is meshed with the second conical gear; and the external thread pipe is arranged in the internal thread sleeve in a threaded manner. The multi-station chemical vapor deposition furnace provided by the utility model has the advantages of convenience in use and capability of automatically receiving and transmitting the feeding pipe, but the structure does not consider that the temperature inside the deposition furnace can be effectively controlled, so that the temperature inside the deposition furnace can sometimes fluctuate, the processing effect of equipment is affected, and the utilization rate of the equipment is reduced.
Disclosure of utility model
In order to overcome the defects, the utility model provides a multi-axis chemical vapor deposition furnace, and aims to solve the problem that the temperature in the deposition furnace can be fluctuated sometimes because the temperature in the deposition furnace can not be effectively controlled in the prior art, so that the processing effect of equipment is affected.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a multiaxis chemical vapor deposition stove, includes cylinder deposition stove, the outer wall fixedly connected with water storage tank of cylinder deposition stove, the equal fixedly connected with dry ice machine in outer wall top right side of water storage tank, the front side middle part intercommunication of dry ice machine has the ice leakage pipe, the front end intercommunication of ice leakage pipe has the water tank, the left side middle part intercommunication of water tank has the water pump, the output intercommunication of water pump has the inlet tube, the rear end of inlet tube is linked together with the outer wall of water storage tank, the top left side fixedly connected with temperature detector of cylinder deposition stove, temperature detector's top fixedly connected with display, the equal fixedly connected with heating rod in inside left and right sides of cylinder deposition stove, the equal fixedly connected with heater strip in inside upper and lower sides of cylinder deposition stove, the left side of cylinder deposition stove is provided with unloading mechanism.
As a further description of the above technical solution:
The blanking mechanism comprises a servo motor, the right side of the servo motor is fixedly connected to the left side of the cylinder deposition furnace, the output end of the servo motor is fixedly connected with a gear II, the outer wall of the gear II is connected with a gear I in a meshed mode, the inner part of the gear I is fixedly connected with a threaded sleeve, the inner thread of the threaded sleeve is connected with a threaded rod, the left end of the threaded rod penetrates through the cylinder deposition furnace and is fixedly connected with a push plate, the right side of the threaded sleeve is fixedly connected with an industrial plate, the middle lower part of the left side of the cylinder deposition furnace is fixedly connected with an L-shaped column, and the top of the L-shaped column is in sliding connection with the forehead of the industrial plate.
As a further description of the above technical solution:
The right side of the outer wall of the cylinder deposition furnace is connected with a baffle through threads, and the middle of the right side of the baffle is fixedly connected with a handle.
As a further description of the above technical solution:
The left side fixedly connected with stopper of threaded rod, the front and back side of push pedal and the inside front and back side sliding connection of cylinder deposition furnace.
As a further description of the above technical solution:
the middle part of the rear side of the ice drier is communicated with a water inlet.
As a further description of the above technical solution:
The bottom of the outer wall of the water storage tank is fixedly connected with a T-shaped column, the front side and the rear side of the top of the T-shaped column are fixedly connected with illuminating lamps, and the right side of the top of the T-shaped column is fixedly connected with a storage battery.
As a further description of the above technical solution:
The right ends of the front side and the rear side of the cylinder deposition furnace are communicated with an air outlet rod, and the outer wall of the water tank is fixedly connected with a protective shell.
As a further description of the above technical solution:
The middle part of the inner side of the cylinder deposition furnace is fixedly connected with a placing plate.
The utility model has the following beneficial effects:
1. According to the utility model, the plate, the heating rod, the heating wire, the temperature detector, the cylinder deposition furnace, the display, the ice drier, the ice leakage pipe, the water tank, the water pump, the water inlet pipe and the like are mutually matched, so that the temperature inside the deposition furnace can be effectively controlled, the conditions of high or low temperature are avoided, and the processing quality and effect are influenced.
2. According to the utility model, the servo motor, the first gear, the second gear, the threaded sleeve, the I-shaped plate, the L-shaped column, the I-shaped plate and the like are mutually matched, so that the situation that an operator is required to manually take out materials is avoided, meanwhile, the danger to the operation cannot be caused by high temperature, and certain safety is improved.
Drawings
FIG. 1 is a perspective view of the front side of a cylinder deposition furnace of a multi-axis chemical vapor deposition furnace according to the present utility model;
FIG. 2 is a split view of a water tank structure of a multi-axis chemical vapor deposition furnace according to the present utility model;
Fig. 3 is a diagram showing a push plate structure of a multi-axis chemical vapor deposition furnace according to the present utility model.
Legend description:
1. A cylinder deposition furnace; 2. a blanking mechanism; 201. a limiting block; 202. a threaded rod; 203. a first gear; 204. a threaded sleeve; 205. a second gear; 206. a servo motor; 207. an L-shaped column; 208. a I-shaped plate; 209. a push plate; 3. a baffle; 4. a handle; 5. an air outlet rod; 6. a storage battery; 7. an ice leakage pipe; 8. a lighting lamp; 9. a T-shaped column; 10. a water tank; 11. a protective shell; 12. a water pump; 13. a display; 14. a water storage tank; 15. an ice dryer; 16. a water inlet; 17. a water inlet pipe; 18. a heating rod; 19. a heating wire; 20. a temperature detector; 21. the plate is placed.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-3, an embodiment of the present utility model is provided: the multi-shaft chemical vapor deposition furnace comprises a cylinder deposition furnace 1, wherein the outer wall of the cylinder deposition furnace 1 is fixedly connected with a water storage tank 14, the right side of the top end of the outer wall of the water storage tank 14 is fixedly connected with a dry ice machine 15, the middle part of the front side of the dry ice machine 15 is communicated with an ice leakage pipe 7, the front end of the ice leakage pipe 7 is communicated with a water tank 10, the middle part of the left side of the water tank 10 is communicated with a water pump 12, the output end of the water pump 12 is communicated with a water inlet pipe 17, the rear end of the water inlet pipe 17 is communicated with the outer wall of the water storage tank 14, the left side of the top of the cylinder deposition furnace 1 is fixedly connected with a temperature detector 20, the top of the temperature detector 20 is fixedly connected with a display 13, the left and right sides of the inside of the cylinder deposition furnace 1 are fixedly connected with heating rods 18, the upper and lower sides of the inside of the cylinder deposition furnace 1 are fixedly connected with heating wires 19, the left side of the cylinder deposition furnace 1 is provided with a blanking mechanism 2, the right side of the outer wall of the cylinder deposition furnace 1 is in threaded connection with a baffle 3, and the middle of the right side of the baffle 3 is fixedly connected with a handle 4;
Specifically, in the design of the ice leakage pipe 7, the front end communication water tank 10 is an important detail. The water tank 10 not only provides necessary water source, but also plays a key regulation role in the whole refrigeration process, and through controlling the water level of the water tank 10, the flow of the cooling liquid passing through the ice leakage pipe 7 can be effectively managed, so that the cooling effect is optimized, the water pump 12 is used for conveying the water in the water tank 10 to the water inlet pipe 17, so that the cooling effect is influenced, the temperature detector 20 is another important monitoring device, the temperature detector 20 monitors the temperature in the cylinder deposition furnace 1 in real time, and transmits data to the display 13, so that an operator can intuitively know the real-time temperature in the furnace, and adjust according to the requirement.
Referring to fig. 2, the blanking mechanism 2 includes a servo motor 206, wherein the right side of the servo motor 206 is fixedly connected to the left side of the cylinder deposition furnace 1, the output end of the servo motor 206 is fixedly connected with a gear two 205, the outer wall of the gear two 205 is in meshed connection with a gear one 203, the interior of the gear one 203 is fixedly connected with a threaded sleeve 204, the interior of the threaded sleeve 204 is in threaded connection with a threaded rod 202, the left end of the threaded rod 202 penetrates through the cylinder deposition furnace 1 and is fixedly connected with a push plate 209, the right side of the threaded sleeve 204 is fixedly connected with a working plate 208, the middle lower part of the left side of the cylinder deposition furnace 1 is fixedly connected with an L-shaped column 207, the top of the L-shaped column 207 is in sliding connection with the forehead of the working plate 208, the left side of the threaded rod 202 is fixedly connected with a limiting block 201, and the front and rear sides of the push plate 209 are in sliding connection with the front and rear sides of the interior of the cylinder deposition furnace 1;
Specifically, the gear one 203 is meshed with the outer wall of the gear two 205, a threaded sleeve 204 is fixed in the gear one 203, a threaded rod 202 is connected with the threaded sleeve 204 in a threaded manner, a push plate 209 penetrates through and is fixed at the left end, an I-shaped plate 208 is fixed at the right side, an L-shaped column 207 is fixed at the left side in the lower part of the cylinder deposition furnace 1, the top of the L-shaped column 207 is in sliding connection with the inside of the I-shaped plate 208, a limiting block 201 is fixed at the left side, and the push plate 209 is in sliding connection with the front side and the back side in the cylinder deposition furnace 1.
Referring to fig. 1-2, a water inlet 16 is communicated with the middle of the rear side of a dry ice machine 15, a T-shaped column 9 is fixedly connected to the bottom of the outer wall of a water storage tank 14, a storage battery 6 is fixedly connected to the right side of the top of the T-shaped column 9, a lighting lamp 8,T is fixedly connected to the front and rear sides of the top of the T-shaped column 9, an air outlet rod 5 is communicated with the right end of the front and rear sides of a cylinder deposition furnace 1, a protective shell 11 is fixedly connected to the outer wall of a water tank 10, and a placing plate 21 is fixedly connected to the middle of the inner side of the cylinder deposition furnace 1;
Specifically, fix on T shape post 9 through light 8 to can be convenient for operating personnel use equipment at night, thereby support cylinder deposition furnace 1 through the cooperation of T shape post 9, thereby play stable effect, protect through the protective housing 11 water tank 10 that can be fine, can put into the surface with the material that needs processing through placing board 21 at last.
Working principle: the processing material is placed on the placing plate 21, thereby can cooperate to start heating rod 18 and heater strip 19 to carry out processing to the material, thereby cooperation temperature detector 20 detects the inside temperature of cylinder deposit stove 1, then cooperate and watch on with numerical value transmission to display 13, when inside temperature is too high, thereby the dry ice of making on cooperation ice dryer 15 flows to the inside of water tank 10 through leaking ice pipe 7, thereby cooperation carries out the refrigeration with the inside water source of water tank 10, cooperation water pump 12 and inlet tube 17 mutually support afterwards, at last carry cold water to the inside of water storage tank 14, thereby the temperature that produces the outer wall of cylinder deposit stove 1 is cooled down, thereby make inside temperature effectively reduce, and then realized can effectually controlling the inside temperature of deposit stove, avoid appearing or the condition of high or low, influence the quality and the effect of processing, then start servo motor 206, the cooperation rotates gear one 203 and gear two 205, cooperation thread sleeve 204 and worker's plate 208's inside, make thread sleeve 204 rotate and slide in the inside of cooperation L shape post 207, make the inside thread sleeve 208 slide, thereby the people need not move the danger in the position of the thread sleeve is moved under the same, and the high-speed plate is avoided moving the thread plate is moved, and the danger is taken out to the position is avoided, and the people need to move the danger is moved under the thread plate is moved, and the manual plate is moved, and the safety is moved in the position is moved under the thread plate is moved, and is moved in the manual is moved in the position is moved.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (8)
1. A multi-axis chemical vapor deposition furnace comprising a cylinder deposition furnace (1), characterized in that: the utility model discloses a cylinder deposit stove, including cylinder deposit stove, temperature detector (20) are connected with in the outer wall fixedly connected with water storage tank (14) of cylinder deposit stove (1), the front side middle part intercommunication of water storage tank (14) has ice leaking pipe (7), the front end intercommunication of ice leaking pipe (7) has water tank (10), the left side middle part intercommunication of water tank (10) has water pump (12), the output intercommunication of water pump (12) has inlet tube (17), the rear end of inlet tube (17) is linked together with the outer wall of water storage tank (14), the top left side fixedly connected with temperature detector (20) of cylinder deposit stove (1), the top fixedly connected with display (13) of temperature detector (20), the inside left and right sides of cylinder deposit stove (1) all fixedly connected with heating rod (18), the inside upside of cylinder deposit stove (1) is fixedly connected with cylinder heater strip (19), the left side of cylinder deposit stove (1) is provided with unloading mechanism (2).
2. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: unloading mechanism (2) include servo motor (206), servo motor (206) right side fixedly connected with is in the left side of cylinder deposition furnace (1), servo motor (206) output fixedly connected with gear two (205), gear two (205) outer wall meshing is connected with gear one (203), the inside fixedly connected with screw thread sleeve (204) of gear one (203), screw thread sleeve (204)'s inside threaded connection has threaded rod (202), the left end of threaded rod (202) runs through cylinder deposition furnace (1) and fixedly connected with push pedal (209), lower part fixedly connected with worker board (208) in the left side of screw thread sleeve (204), the top of L shape post (207) and the internal sliding connection of worker board (208).
3. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: the right side of the outer wall of the cylinder deposition furnace (1) is connected with a baffle (3) in a threaded manner, and the middle of the right side of the baffle (3) is fixedly connected with a handle (4).
4. A multi-axis chemical vapor deposition furnace according to claim 2, wherein: the left side of threaded rod (202) fixedly connected with stopper (201), the front and back side of push pedal (209) is slided with the inside front and back of cylinder deposition furnace (1) and is connected.
5. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: the middle part of the rear side of the dry ice machine (15) is communicated with a water inlet (16).
6. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: the bottom of the outer wall of the water storage tank (14) is fixedly connected with a T-shaped column (9), the front side and the rear side of the top of the T-shaped column (9) are fixedly connected with an illuminating lamp (8), and the right side of the top of the T-shaped column (9) is fixedly connected with a storage battery (6).
7. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: the right ends of the front side and the rear side of the cylinder deposition furnace (1) are communicated with an air outlet rod (5), and the outer wall of the water tank (10) is fixedly connected with a protective shell (11).
8. The multi-axis chemical vapor deposition furnace according to claim 1, wherein: the middle part of the inner side of the cylinder deposition furnace (1) is fixedly connected with a placing plate (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323545331.7U CN221588686U (en) | 2023-12-26 | 2023-12-26 | Multi-shaft chemical vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323545331.7U CN221588686U (en) | 2023-12-26 | 2023-12-26 | Multi-shaft chemical vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221588686U true CN221588686U (en) | 2024-08-23 |
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ID=92397933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323545331.7U Active CN221588686U (en) | 2023-12-26 | 2023-12-26 | Multi-shaft chemical vapor deposition furnace |
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| Country | Link |
|---|---|
| CN (1) | CN221588686U (en) |
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2023
- 2023-12-26 CN CN202323545331.7U patent/CN221588686U/en active Active
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