CN221486448U - Loading and unloading device based on front opening type wafer conveying box - Google Patents
Loading and unloading device based on front opening type wafer conveying box Download PDFInfo
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- CN221486448U CN221486448U CN202322543773.1U CN202322543773U CN221486448U CN 221486448 U CN221486448 U CN 221486448U CN 202322543773 U CN202322543773 U CN 202322543773U CN 221486448 U CN221486448 U CN 221486448U
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- wafer transfer
- front opening
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- 238000012546 transfer Methods 0.000 claims abstract description 29
- 238000001179 sorption measurement Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000003825 pressing Methods 0.000 claims description 15
- 230000001939 inductive effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 37
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000006698 induction Effects 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a loading and unloading device based on a front opening wafer transfer box, which comprises a machine base, wherein a loading device and a cover taking mechanism are arranged on the machine base; the feeding device comprises a first sliding seat and a first electric cylinder for driving the first sliding seat to horizontally slide relative to the base; the first sliding seat is provided with a positioning mechanism for positioning the wafer conveying box; the cover taking mechanism comprises a second sliding seat and a second electric cylinder for driving the second sliding seat to vertically slide relative to the base; the second sliding seat is provided with a substrate, and the substrate is provided with an unlocking mechanism and an adsorption mechanism. According to the front-opening wafer transfer box-based loading and unloading device, the loading device and the cover taking mechanism are arranged, and through the cooperative movement of the loading device and the cover taking mechanism, the operations of unlocking, detaching and abdicating the cover of the wafer transfer box can be realized, so that an external wafer transfer manipulator can execute the operations of taking and placing wafers, manual operation is not needed in the whole process, personnel safety can be ensured, and production efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of automation equipment, in particular to a loading and unloading device based on a front opening wafer transfer box.
Background
In the semiconductor manufacturing industry, wafers are stored in sealed and clean wafer cassettes and transported to corresponding stations for processing and testing by manual handling or automatic overhead travelling crane system transport. With the continuous development of technology, the size specification of single wafer is continuously increased, and the 12-inch wafer specification is the mainstream wafer specification in the future. For large-size 12 inch wafers, a front opening unified pod is generally used for storage and transport. The front opening unified pod adds a closed front cover plate relative to a conventional pod. This means that the wafer loading machine must be added with an automatic cap-taking function, otherwise, only manual cap-taking can be performed, and the addition of manual intervention means increased risk. The handling device designed for front opening pods meets market needs.
Disclosure of Invention
The utility model aims to: in order to overcome the defects in the prior art, the utility model provides a front-opening wafer transfer box-based loading and unloading device capable of automatically disassembling a box cover.
The technical scheme is as follows: in order to achieve the above purpose, the loading and unloading device based on the front opening wafer transfer box comprises a machine base, wherein a feeding device and a cover taking mechanism are arranged on the machine base;
The feeding device comprises a first sliding seat and a first electric cylinder for driving the first sliding seat to horizontally slide relative to the base; the first sliding seat is provided with a positioning mechanism for positioning the wafer conveying box;
the cover taking mechanism comprises a second sliding seat and a second electric cylinder for driving the second sliding seat to vertically slide relative to the base; the second sliding seat is provided with a base plate, and the base plate is provided with an unlocking mechanism and an adsorption mechanism.
Further, the base plate can slide relative to the second sliding seat, the sliding of the base plate is driven by the first cylinder, and the sliding direction of the base plate is parallel to the sliding direction of the first sliding seat.
Further, the positioning mechanism comprises a plurality of positioning pins, a pressing plate and a second cylinder for driving the pressing plate to do telescopic motion and rotary motion.
Further, at least one induction sensor is also installed on the first sliding seat.
Further, the feeding device further comprises a base fixed relative to the base, and a first sliding rail is fixed on the first sliding base; the base is fixed with a first sliding block, and the first sliding rail is in sliding fit with the first sliding block.
Further, a second sliding rail is fixed on the base, and a second sliding block which is in sliding fit with the second sliding rail is fixed on the second sliding seat; the second electric cylinder is connected with the second sliding seat through a movable joint.
Further, a plurality of guide posts are fixed on the base plate, and sliding bearings in sliding fit with the guide posts are fixed on the second sliding seat.
Further, the unlocking mechanism comprises an unlocking fork with a protruding rod and a rotary cylinder capable of driving the unlocking fork to rotate.
Further, the adsorption mechanism is a sucker.
Further, the machine base is T-shaped and is provided with a transverse plate and a vertical plate, the feeding device is arranged on the transverse plate, and the cover taking mechanism is arranged on the vertical plate.
The beneficial effects are that: according to the front-opening wafer transfer box-based loading and unloading device, the loading device and the cover taking mechanism are arranged, and through the cooperative movement of the loading device and the cover taking mechanism, the operations of unlocking, detaching and abdicating the cover of the wafer transfer box can be realized, so that an external wafer transfer manipulator can execute the operations of taking and placing wafers, manual operation is not needed in the whole process, personnel safety can be ensured, and production efficiency is improved.
Drawings
FIG. 1 is a first view block diagram of a front opening unified pod-based handling device;
FIG. 2 is a second view block diagram of a front opening unified pod-based handling device;
FIG. 3 is a block diagram of a loading device;
FIG. 4 is a block diagram of a loading device without a first slide seat portion;
FIG. 5 is a partial block diagram of the cover removing mechanism;
fig. 6 is a structural view of the cover removing mechanism without the second sliding seat and the second electric cylinder part.
In the figure: 1-a stand; 2-a feeding device; 21-a first slide seat; 22-a first electric cylinder; 23-locating pins; a 24-induction sensor; 25-pressing plates; 26-a second cylinder; 27-a first slider; 28-a first slide rail; 29-a base; 3-a cover taking mechanism; 31-a second sliding seat; 32-a second electric cylinder; 33-a substrate; 34-an unlocking mechanism; 34 a-unlocking a fork; 34 b-a rotary cylinder; 35-an adsorption mechanism; 36-a first cylinder; 37-a second slide rail; 38-a second slider; 39-a movable joint; 310-guide posts; 311-plain bearings.
Detailed Description
The utility model will be further described with reference to the accompanying drawings.
The loading and unloading device based on the front opening wafer transfer box as shown in fig. 1-2 comprises a machine base 1, wherein a loading device 2 and a cover taking mechanism 3 are arranged on the machine base 1; the machine base 1 is T-shaped and is provided with a transverse plate and a vertical plate, the feeding device 2 is arranged on the transverse plate, and the cover taking mechanism 3 is arranged on the vertical plate.
As shown in fig. 3-4, the feeding device 2 includes a first sliding seat 21 and a first electric cylinder 22 for driving the first sliding seat 21 to horizontally slide relative to the base 1; specifically, the feeding device 2 further includes a base 29 fixed relative to the base 1, and a first sliding rail 28 is fixed on the first sliding seat 21; the base 29 is fixed with a first slider 27, and the first slide rail 28 is slidably matched with the first slider 27.
A positioning mechanism for positioning the wafer transfer box is mounted on the first sliding seat 21; the positioning mechanism comprises a plurality of positioning pins 23, a pressing plate 25 and a second air cylinder 26 for driving the pressing plate 25 to do telescopic motion and rotational motion. The bottom plate of the wafer transfer box is provided with a pin hole and a D-shaped hole. When the wafer transfer box is not placed on the first sliding seat 21, the pressing plate 25 is in an extending state, after the wafer transfer box is placed on the wafer transfer box, each pin hole is respectively matched with each positioning pin 23, the pressing plate 25 extends into the D-shaped hole, and then the second air cylinder 26 operates to enable the pressing plate 25 to rotate 90 degrees and retract, so that the pressing plate 25 can press the bottom plate of the wafer transfer box to fix the wafer transfer box. The first sliding seat 21 is further provided with at least one induction sensor 24, and in this embodiment, the first sliding seat 21 is provided with three induction sensors 24 to ensure that the device starts the uncapping operation after the wafer transfer box is installed in place.
As shown in fig. 2, the cover removing mechanism 3 includes a second sliding seat 31 and a second electric cylinder 32 for driving the second sliding seat 31 to slide vertically relative to the base 1; specifically, a second sliding rail 37 is fixed on the base 1, and a second sliding block 38 that is in sliding fit with the second sliding rail 37 is fixed on the second sliding seat 31; the second electric cylinder 32 is connected to the second sliding seat 31 through a movable joint 39.
As shown in fig. 5-6, the second sliding seat 31 is provided with a base plate 33, the base plate 33 is provided with an unlocking mechanism 34 and an adsorption mechanism 35, and the adsorption mechanism 35 is a sucking disc. The base plate 33 is slidable with respect to the second slide seat 31, the sliding of which is driven by the first cylinder 36, and the sliding direction of which is parallel to the sliding direction of the first slide seat 21. Specifically, a plurality of guide posts 310 are fixed on the base plate 33, and a sliding bearing 311 slidably engaged with the guide posts 310 is fixed on the second sliding seat 31.
The unlocking mechanism 34 includes an unlocking fork 34a with a protruding lever, and further includes a rotary cylinder 34b capable of driving the unlocking fork 34a to rotate. The wafer transfer box cover is fixed by the connecting rod lock, the lock core of the connecting rod lock is provided with a jack for embedding a protruding rod, and after the protruding rod of the unlocking fork hand 34a is embedded into the jack on the lock core, the rotating cylinder 34b operates to enable the unlocking fork hand 34a to rotate, so that the connecting rod lock can be unlocked.
In the above structure, the process of taking the cover of the wafer transfer box is as follows: first, the wafer cassette is fixed to the first slide base 21, and the first cylinder 22 moves the first slide base 21 toward the substrate 33 so that the lid of the wafer cassette abuts against the substrate 33; then, the adsorption mechanism 35 adsorbs the box cover, the unlocking mechanism 34 unlocks the connecting rod lock, the first air cylinder 36 retracts the base plate 33 to drive the box to separate from the box body, and finally, the second electric cylinder 32 enables the second sliding seat 31 to move downwards, so that the box cover does not shade the box body any more, and the wafer conveying box can be subjected to the operation of loading and unloading wafers.
The foregoing is only a preferred embodiment of the utility model, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present utility model, and such modifications and adaptations are intended to be comprehended within the scope of the utility model.
Claims (9)
1. The loading and unloading device based on the front opening wafer transfer box is characterized by comprising a machine base (1), wherein a feeding device (2) and a cover taking mechanism (3) are arranged on the machine base (1);
The feeding device (2) comprises a first sliding seat (21) and a first electric cylinder (22) for driving the first sliding seat (21) to horizontally slide relative to the base (1); the first sliding seat (21) is provided with a positioning mechanism for positioning the wafer conveying box;
The cover taking mechanism (3) comprises a second sliding seat (31) and a second electric cylinder (32) for driving the second sliding seat (31) to vertically slide relative to the base (1); a substrate (33) is mounted on the second sliding seat (31), and an unlocking mechanism (34) and an adsorption mechanism (35) are mounted on the substrate (33);
The positioning mechanism comprises a plurality of positioning pins (23), a pressing plate (25) and a second cylinder (26) for driving the pressing plate (25) to do telescopic movement and rotary movement;
The bottom plate of the wafer conveying box is provided with a pin hole and a D-shaped hole; when the wafer transfer box is not placed on the first sliding seat (21), the pressing plate (25) is in an extending state; after the wafer transfer box is placed in place, each pin hole is matched with each locating pin (23) respectively, the pressing plate (25) stretches into the D-shaped hole, the pressing plate (25) is in a retracted state and rotates by 90 degrees, and therefore the pressing plate (25) presses the bottom plate of the wafer transfer box to fix the wafer transfer box.
2. Handling device based on front opening unified pods according to claim 1 wherein the base plate (33) is slidable with respect to the second slide seat (31), the sliding of which is driven by a first cylinder (36) and the sliding direction is parallel to the sliding direction of the first slide seat (21).
3. Handling device based on front opening unified pods according to claim 1 wherein the first slide seat (21) is further provided with at least one inductive sensor (24).
4. Handling device based on front opening wafer transfer cassettes according to claim 1, characterized in that the loading device (2) further comprises a base (29) fixed with respect to the base (1), on which first slide (21) a first slide rail (28) is fixed; the base (29) is fixedly provided with a first sliding block (27), and the first sliding rail (28) is in sliding fit with the first sliding block (27).
5. Handling device based on front opening wafer transfer cassettes according to claim 1, characterized in that a second slide rail (37) is fixed on the base (1), and a second slider (38) in sliding fit with the second slide rail (37) is fixed on the second slide seat (31); the second electric cylinder (32) is connected with the second sliding seat (31) through a movable joint (39).
6. Handling device based on front opening unified pods according to claim 2 wherein a plurality of guide posts (310) are fixed to the base plate (33) and a sliding bearing (311) is fixed to the second slide base (31) in sliding engagement with the guide posts (310).
7. The front opening unified pods-based handling device of claim 1 wherein the unlocking mechanism (34) includes an unlocking fork (34 a) with a raised bar and further including a rotating cylinder (34 b) capable of driving the unlocking fork (34 a) to rotate.
8. Handling device based on front opening unified pods according to claim 1 wherein the suction means (35) is a suction cup.
9. Handling device based on front opening wafer transfer cassettes according to claim 1, characterized in that the frame (1) is T-shaped with a cross plate and a riser, the loading device (2) is mounted on the cross plate, and the cover taking mechanism (3) is mounted on the riser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322543773.1U CN221486448U (en) | 2023-09-19 | 2023-09-19 | Loading and unloading device based on front opening type wafer conveying box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322543773.1U CN221486448U (en) | 2023-09-19 | 2023-09-19 | Loading and unloading device based on front opening type wafer conveying box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221486448U true CN221486448U (en) | 2024-08-06 |
Family
ID=92356270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322543773.1U Active CN221486448U (en) | 2023-09-19 | 2023-09-19 | Loading and unloading device based on front opening type wafer conveying box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221486448U (en) |
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2023
- 2023-09-19 CN CN202322543773.1U patent/CN221486448U/en active Active
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