CN221453684U - Outer cavity structure of slide boat cleaning device and slide boat cleaning device - Google Patents

Abstract

The utility model discloses an outer cavity structure of a slide boat cleaning device and the slide boat cleaning device, and belongs to the technical field of silicon wafer production. The outer cavity structure of the slide boat cleaning device comprises an outer shell, a vacuum cavity is arranged in the outer shell, and an inner shell with a reaction cavity is arranged in the vacuum cavity; the first opening is arranged on the shell and communicated with the vacuum cavity, and is used for taking and placing a slide boat to be cleaned; the vacuum port is arranged on the shell and communicated with the vacuum cavity, and is used for vacuumizing the vacuum cavity; the air blowing port is arranged on the shell and communicated with the vacuum cavity, and is used for introducing air into the vacuum cavity; a first seal for sealing the first opening. The outer shell is used for protecting the inner shell with the reaction cavity, and before cleaning, the vacuum cavity is vacuumized through the vacuum port, so that a clean environment is maintained in the vacuum cavity; after the cleaning is finished, air is introduced through the air blowing port, so that the pressure in the vacuum cavity is equal to the external pressure, and the first sealing element is convenient to open.

Description

Outer cavity structure of slide boat cleaning device and slide boat cleaning device

Technical Field

The utility model relates to the technical field of silicon wafer production, in particular to an outer cavity structure of a slide boat cleaning device and the slide boat cleaning device.

Background

The slide glass boat (quartz boat, graphite boat) is used as a carrier for carrying the silicon wafers into the reaction cavity to carry out vapor deposition reaction, however, the reaction gas is deposited on the surface of the silicon wafers and also deposited on the surface of the slide glass boat. When the slide boat works for a certain number of times, after the film on the surface of the slide boat reaches a certain thickness, the slide boat needs to be disassembled into a plurality of boat leaves to be conveyed into a cleaning pool containing an acid or alkali cleaning agent, the film on the boat surface of the slide boat is cleaned, and the slide boat after cleaning is dried and assembled.

In the related art, when the slide boat is cleaned, the slide boat needs to be disassembled, cleaned and dried and then assembled, so that the cleaning efficiency of the slide boat is low.

To this end, the applicant devised an external cavity structure of a slide boat cleaning device and a slide boat cleaning device to solve the above-mentioned problems.

Disclosure of utility model

One of the purposes of the present utility model is to provide an outer cavity structure of a slide boat cleaning device, which is used for protecting a reaction cavity and enabling the working environment around the reaction cavity to reach the required cleanliness.

The utility model also aims to provide a slide boat cleaning device which does not need to be assembled after being disassembled, cleaned and dried, has high cleaning efficiency, can protect the reaction cavity and ensures that the working environment around the reaction cavity reaches the required cleanliness.

In order to achieve the above object, the following technical scheme is provided:

Slide glass boat belt cleaning device's outer chamber structure includes:

the vacuum chamber is internally provided with an outer shell, and the inner shell with a reaction cavity is arranged in the vacuum chamber;

The first opening is arranged on the shell and communicated with the vacuum cavity, and is used for taking and placing a slide boat;

The vacuum port is arranged on the shell and communicated with the vacuum cavity, and the vacuum port is used for vacuumizing the vacuum cavity;

The air blowing port is arranged on the shell and communicated with the vacuum cavity, and is used for introducing air into the vacuum cavity;

a first seal for sealing the first opening.

As an alternative to the external cavity structure of the slide boat cleaning device, the housing has a first flange, the first flange is disposed around the first opening, and the first sealing member abuts against the first flange.

As an alternative scheme of the outer cavity structure of the slide boat cleaning device, the slide boat cleaning device further comprises a third opening, wherein the third opening is formed in the outer shell and is communicated with the vacuum cavity, and the inner shell is placed in the vacuum cavity through the third opening.

As an alternative to the external cavity structure of the slide boat cleaning device, the slide boat cleaning device further comprises a third sealing member with a reinforcing structure, and the third sealing member is sealed and covers the third opening.

As an alternative scheme of the outer cavity structure of the slide boat cleaning device, the reinforcing structure comprises a first reinforcing rib plate and a second reinforcing rib plate, a plurality of the first reinforcing rib plates are parallel and are arranged on the outer wall surface of the third sealing element at intervals, and a plurality of the second reinforcing rib plates are parallel and are arranged on the outer wall surface of the third sealing element at intervals.

As an alternative to the outer cavity structure of the slide boat cleaning device, the outer side wall of the housing is provided with a third reinforcing rib plate.

As an alternative to the external cavity structure of the slide boat cleaning device, the external wall surface of the third sealing member and/or the external wall surface of the housing are/is provided with cooling flow channels.

As an alternative scheme of the outer cavity structure of the slide boat cleaning device, heating devices are arranged on the two sides of the shell and the inner wall surface of the bottom.

As an alternative to the outer cavity structure of the slide boat cleaning device, the housing is made of stainless steel.

The slide boat cleaning device comprises an inner shell, a plasma generator and the outer cavity structure of the slide boat cleaning device, wherein the inner shell is arranged in an outer shell of the outer cavity structure of the slide boat cleaning device, and the plasma generator is arranged on the outer shell and is communicated with a reaction cavity of the inner shell.

Compared with the prior art, the utility model has the beneficial effects that:

According to the outer cavity structure of the slide boat cleaning device, the vacuum cavity is arranged in the outer shell, the inner shell with the reaction cavity is placed in the vacuum cavity, the first opening is formed in the outer shell, so that the slide boat to be cleaned can be conveniently taken and placed, and the first sealing piece can seal the first opening and is used for guaranteeing the tightness of the outer shell; the vacuum port and the air blowing port are arranged on the shell. Before cleaning, the vacuum cavity is vacuumized through the vacuum port, so that a clean environment is maintained in the vacuum cavity; after the cleaning is finished, a purge gas is introduced into the vacuum cavity through the gas blowing port so as to increase the pressure in the vacuum cavity, so that the pressure in the vacuum cavity is leveled with the external pressure, and the first sealing element is conveniently opened.

When the slide boat cleaning device provided by the embodiment of the utility model is used for cleaning the slide boat, the slide boat is directly and integrally placed in the reaction cavity, and the slide boat is cleaned by utilizing the chemical reaction of the cleaning gas and the deposited film on the slide boat. The utility model adopts a double-cavity design, the inner shell is arranged in the outer shell, and the inner shell can be protected by the outer shell; vacuumizing a vacuum cavity between the inner shell and the outer shell for maintaining a clean environment; through the airtight protection of shell to the inner shell, can also avoid the cleaning gas to escape the shell, the feature of environmental protection is better.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic view of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 2 is an exploded view of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 3 is a cross-sectional view of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 4 is an enlarged view of a portion a in fig. 3.

Fig. 5 is a cross-sectional view of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 6 is an assembly schematic of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 7 is a partial enlarged view at B in fig. 6.

Fig. 8 is a top view of a slide boat cleaning apparatus according to an embodiment of the present utility model.

Fig. 9 is a cross-sectional view taken along A-A in fig. 8.

Fig. 10 is a partial enlarged view at C in fig. 9.

Fig. 11 is a partial enlarged view at D in fig. 9.

Fig. 12 is an assembly view of the outer and inner chamber structures of the boat cleaning device in accordance with an embodiment of the present utility model.

Fig. 13 is a schematic view of the structure of the outer chamber of the wafer boat cleaning apparatus according to the embodiment of the present utility model.

Fig. 14 is a front view of an outer cavity structure of a boat cleaning device in accordance with an embodiment of the present utility model.

Fig. 15 is a top view of an outer chamber structure of a boat cleaning apparatus in accordance with an embodiment of the present utility model.

FIG. 16 is a cross-sectional view taken in the direction B-B of FIG. 15;

Fig. 17 is a schematic view of the structure of the inner cavity of the boat cleaning device according to the embodiment of the utility model.

Fig. 18 is a front view showing the structure of the inner cavity of the boat cleaning device in the embodiment of the present utility model.

Fig. 19 is a top view showing the structure of the inner cavity of the boat cleaning device in the embodiment of the present utility model.

Fig. 20 is a cross-sectional view taken along the direction C-C in fig. 19.

Reference numerals:

1. An inner case; 2. a housing; 3. a vacuum chamber; 4. a first seal; 5. a second seal; 6. an air intake duct; 7. an exhaust duct; 8. a plasma generator; 9. a heating device; 10. a first elastic member; 11. a flow equalizing plate; 1101. flow equalizing holes; 12. a third seal; 13. a fourth seal; 14. a second elastic member; 15. a support; 16. a locking mechanism; 161. a first limiting member; 162. a second limiting piece; 163. a cylinder; 164. a linear guide rail; 165. a slide block; 17. a first bellows; 18. a second bellows; 19. a flow homogenizing plate; 20. a protective plate; 211. a first interface; 212. a first reinforcing rib; 213. a second reinforcing rib; 214. a first through hole; 215. a second through hole; 216. a third reinforcing rib; 22. a first fastener; 23. a first seal ring; 24. a fixing member; 241. a first connection hole; 25. a third fastener; 26. a cooling flow passage; 271. a second interface; 272. a first reinforcing rib; 273. a second reinforcing rib; 28. a second fastener; 29. a closing plate; 30. a hanging ring;

101. A reaction chamber; 1011. a first chamber; 1012. a second chamber; 1013. a third chamber; 102. a second opening; 103. a fourth opening; 104. a second flanging; 1041. a second connection hole;

201. A first opening; 202. a vacuum port; 203. an air blowing port; 204. a third opening; 205. and a first flanging.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; either mechanically or electrically. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In order to avoid the situation that the slide boat is disassembled, cleaned and dried and then assembled, the slide boat has low cleaning efficiency and complex operation, and is used for protecting the reaction chamber, the embodiment provides an outer chamber structure of the slide boat cleaning device and the slide boat cleaning device, and the specific contents of the embodiment are described in detail below with reference to fig. 1 to 20.

In some application scenarios, as shown in fig. 2 and fig. 12 to 16, the outer cavity structure of the slide boat cleaning device includes an outer shell 2, a vacuum cavity 3 is provided in the outer shell 2, and the vacuum cavity 3 is used for placing an inner shell 1 with a reaction cavity 101. The first opening 201 is formed on the housing 2 and is communicated with the vacuum chamber 3, and the first opening 201 is used for taking and placing the slide boat 200. A vacuum port 202 is formed in the housing 2 and communicates with the vacuum chamber 3, and the vacuum port 202 is used for evacuating the vacuum chamber 3. The air blowing port 203 is arranged on the shell 2 and is communicated with the vacuum cavity 3, and the air blowing port 203 is used for introducing air into the vacuum cavity 3. The first seal 4 is used to seal the first opening 201. The housing 2 has a first flange 205, the first flange 205 being arranged around the first opening 201, the first sealing element 4 resting on the first flange 205. The third opening 204 is opened on the outer shell 2 and is communicated with the vacuum cavity 3, and the inner shell 1 is placed in the vacuum cavity 3 through the third opening 204.

A third seal 12 with a reinforcing structure may be used to seal the cover over the third opening 204. The third opening 204 is sealed by the third sealing member 12, and the reinforcing structure is added to the third sealing member 12, so that the structural strength of the whole third sealing member 12 can be improved. After the vacuum cavity 3 formed between the inner shell 1 and the outer shell 2 is vacuumized, the outer cavity structure can safely and stably bear the atmospheric pressure, and structural deformation of the outer cavity structure is avoided.

Preferably, the housing 2 in this embodiment is made of stainless steel material, improving the corrosion resistance and strength of the housing 2.

Illustratively, the reinforcing structure includes a first reinforcing rib 212 and a second reinforcing rib 213. The plurality of first reinforcing ribs 212 are provided in parallel and at intervals on the outer wall surface of the third seal 12, and the plurality of second reinforcing ribs 213 are provided in parallel and at intervals on the outer wall surface of the third seal 12. The specific number of the first reinforcing ribs 212 and the second reinforcing ribs 213 may be designed according to the actual use situation, and is not limited thereto.

Specifically, the first reinforcing ribs 212 are crisscrossed with the second reinforcing ribs 213 in the present embodiment. The first reinforcing rib 212 and the second reinforcing rib 213 are connected at the intersections to form a net-like support structure, further improving the structural strength of the third seal member 12.

Further, the first reinforcing rib 212 and/or the second reinforcing rib 213 are provided with first through holes 214. By adding the first through hole 214, the third sealing element 12 can be conveniently lifted by a lifting machine, and the carrying is convenient. By providing a plurality of first through holes 214, a weight reduction effect can also be achieved.

Further, the outer side wall of the housing 2 is provided with a plurality of third reinforcing ribs 216, and the third reinforcing ribs 216 are provided with second through holes 215. The plurality of third reinforcing ribs 216 are fixedly provided on the outer wall surface of the housing 2, thereby improving the structural strength of the housing 2. The third reinforcing rib plate 216 is provided with a plurality of second through holes 215, which not only can play a role in convenient lifting, but also can play a role in weight reduction.

Further, the outer wall surface of the third seal 12 and/or the outer wall surface of the housing 2 are provided with cooling flow passages 26. Illustratively, as shown in fig. 13, the outer wall surface of the third seal 12 and the outer wall surface of the housing 2 are both provided with the cooling flow passage 26. As shown in fig. 14, heating devices 9 are provided on both sides of the housing 2 and on the inner wall surface of the bottom. The outer shell 2 is made of stainless steel, can bear the difference between internal pressure and external pressure, and effectively protects the inner shell 1.

In this embodiment, as shown in fig. 13, the outer cavity structure of the slide boat cleaning device further includes a plurality of protection plates 20, a plurality of first interfaces 211 are disposed on the third sealing member 12, and a plurality of protection plates 20 are sealed and cover on a plurality of corresponding first interfaces 211. The third sealing member 12 is provided with a plurality of first interfaces 211, so that the arrangement mode of the plurality of plasma generators 8 is satisfied, and the plurality of plasma generators 8 can be arranged in a horizontal direction or along the diagonal line of the third sealing member 12, and the arrangement mode is not limited in any way. The protection plate 20 is sealed and arranged on the first interface 211 without the plasma generator 8, so that the tightness of the external cavity mechanism is ensured.

In this embodiment, as shown in fig. 13 and 16, the outer cavity structure of the slide boat cleaning device further includes a first fastener 22 and a first sealing ring 23, where the first fastener 22 passes through the third sealing member 12 to be connected to the housing 2, and the first sealing ring 23 is sandwiched between the contact surface of the third sealing member 12 and the contact surface of the housing 2. Illustratively, the first fastener 22 may be, but is not limited to, a set screw or rivet.

In some application scenarios, as shown in fig. 12 to 20, in the inner cavity structure of the slide boat cleaning device, the fourth sealing member 13 with the first reinforcing ribs 272 and the second reinforcing ribs 273 is used to seal the third opening 204, and the fourth sealing member 13 is further provided with a lifting hole 30 and a second interface 271. Wherein the fourth seal 13 is fixed to the inner housing 1 by means of the second fastening member 28, the second port 271 is concealed by means of the closure plate 29. Wherein, the fixing piece 24 is arranged on the inner wall surface of the shell 2, the fixing piece 24 is provided with a first connecting hole 241, the second flanging 104 is provided with a second connecting hole 1041, and the third fastener 25 passes through the second connecting hole 1041 to be connected with the first connecting hole 241. The third fastener 25 is illustratively a fastening screw.

In other applications, as shown in fig. 1 to 5, a slide boat cleaning apparatus 100 according to an embodiment of the present utility model includes an inner case 1, an outer case 2, a sealing assembly, and a vent pipe. The inner housing 1 is disposed in the outer housing 2 and defines a vacuum chamber 3 with the outer housing 2, the outer housing 2 has a first opening 201 communicating with the vacuum chamber 3 and a vacuum port 202, the vacuum port 202 is used for evacuating the vacuum chamber 3, and the inner housing 1 has a reaction chamber 101 and a second opening 102 communicating with the reaction chamber 101. Optionally, the casing 2 further has an air outlet 203 in communication with the vacuum chamber 3, and the air outlet 203 is used for introducing a gas into the vacuum chamber 3, where the gas may be a reaction gas, a purge gas, or an equilibrium gas, etc. Before cleaning, the vacuum cavity 3 is vacuumized through the vacuum port 202, so that a clean environment is maintained in the vacuum cavity 3; after the cleaning is completed, a purge gas is introduced into the vacuum chamber 3 through the gas-blowing port 203 to increase the pressure in the vacuum chamber 3, so that the pressure in the vacuum chamber 3 is leveled with the external pressure, and the first sealing member 4 and the second sealing member 5 are opened.

A sealing assembly is detachably connected to at least one of the inner and outer shells 1, 2, the sealing assembly comprising a first sealing member 4 for sealing the first opening 201 and a second sealing member 5 for sealing the second opening 102, the first sealing member 4 being arranged to seal the first opening 201. The vent pipe is communicated with the reaction chamber 101, and is used for conveying the cleaning gas into the reaction chamber 101 and discharging the reacted cleaning gas out of the reaction chamber 101.

For example, the first sealing member 4 may be detachably connected to the outer housing 2 by a connection such as a bolt connection or a plug connection, and the second sealing member 5 may be detachably connected to the inner housing 1 by a connection such as a bolt connection or a plug connection.

In short, in the use process of the slide boat cleaning device 100 according to the embodiment of the present utility model, the first sealing member 4 and the second sealing member 5 are opened, and the slide boat 200 to be cleaned is conveyed into the outer casing 2 through the first opening 201 and then conveyed into the reaction chamber 101 of the inner casing 1 through the second opening 102; the second opening 102 is then sealed by the second seal 5, and the first opening 201 is sealed by the first seal 4; vacuum is then applied to the vacuum chamber 3 through the vacuum port 202 by means of a vacuum pump; finally, cleaning gas is introduced into the reaction chamber 101 through the air duct to perform chemical reaction with the film on the surface of the slide boat 200, so as to remove the film deposited on the surface of the slide boat 200. The reaction gas generated by the cleaning gas slide boat 200 and unreacted cleaning gas are discharged from the reaction chamber 101 through the vent pipe, and after the slide boat 200 is cleaned, the first sealing member 4 and the second sealing member 5 are opened to take out the slide boat 200, thereby completing the cleaning of the slide boat 200.

Therefore, when the slide boat cleaning device 100 in the embodiment of the utility model cleans the slide boat 200, the slide boat 200 is directly placed in the reaction chamber 101 as a whole, and the slide boat 200 is cleaned by using the chemical reaction between the cleaning gas and the deposited film on the slide boat 200.

Therefore, the slide boat cleaning apparatus 100 according to the embodiment of the utility model has the advantages of high cleaning efficiency and the like.

In some embodiments, the slide boat cleaning apparatus 100 according to the embodiments of the present utility model includes a plasma generator 8, where the plasma generator 8 is disposed outside the housing 2 and is connected to an inlet end of the ventilation pipe, and the plasma generator 8 is configured to ionize a fluorine-containing gas into a fluorine ion gas and introduce the fluorine ion gas into the reaction chamber 101 as a cleaning gas. Specifically, the number of plasma generators 8 is not limited to two, nor is the position on the diagonal.

For example, the fluorine-containing gas may be one or more of CF4, CHF3, SF6, NF3, C2, F6, and the fluorine-containing gas is ionized into a fluorine ion gas by the plasma generator 8 and reacts with the deposited film on the carrier boat 200 as a cleaning gas. It can be appreciated that, because the film on the slide boat 200 is silicon ions, fluorine ions and silicon ions are easy to react to generate fluorinated silicon gas, so that the slide boat 200 is prevented from being washed by the acid or alkali detergent in the related art to generate irreversible corrosion reaction, which is beneficial to prolonging the service life of the slide boat 200.

In some embodiments, as shown in fig. 2 to 5, the slide boat cleaning apparatus 100 according to the embodiment of the present utility model includes a heating device 9, where the heating device 9 is connected to the inner case 1 and is used to heat the reaction chamber 101 to stabilize the reaction temperature in the reaction chamber 101, so that the cleaning gas and silicon ions on the slide boat 200 can stably chemically react to quickly clean the deposited film on the slide boat 200.

Alternatively, as shown in fig. 4 and 5, the heating means 9 is a heating plate provided on the outer wall surface of the inner case 1.

For example, the heating plate may be a heating wire plate provided on the plate, and the heating plate may be fixed on the inner and outer wall surfaces by means of bonding, binding, or the like, so that the heating device 9 is convenient to install. In addition, by setting the heating device 9 as a heating plate, the contact area between the heating plate and the inner shell 1 can be increased, so that the temperature distribution in the reaction chamber 101 is more uniform, and the cleaning uniformity of the cleaning gas is improved.

Preferably, in some application scenarios, the heating device 9 is arranged on the corresponding side wall and/or bottom wall of the housing 2, so that the heating effect can be achieved, and the assembly and the disassembly are convenient. Alternatively, the heating means 9 may be mounted on any one or a combination of three side walls of the housing.

Specifically, as shown in fig. 13, 14 and 16, heating devices 9 are provided on both sides and the inner wall surface of the bottom of the housing 2. Still further, the outer cavity structure of the slide boat cleaning device further comprises a cooling flow channel 26, and both the outer wall surface of the third sealing member 12 and the outer wall surface of the housing 2 are provided with the cooling flow channel 26 for cooling the outer wall of the outer cavity structure of the slide boat cleaning device. A plurality of cooling flow channels 26 are arranged on the outer wall surfaces of the third sealing piece 12 and the outer wall surface of the shell 2, so that the ambient temperature around the outer cavity structure of the slide boat cleaning device is prevented from being increased.

In some embodiments, the first opening 201 and the second opening 102 are overlapped, the first sealing member 4 and the second sealing member 5 are connected through the first elastic member 10, and when the first sealing member 4 seals the first opening 201 and the second sealing member 5 seals the second opening 102, the first elastic member 10 is elastically compressed.

For example, as shown in fig. 1, 2 and 3, the first elastic member 10 may be a rubber member or a spring member. When the first sealing element 4 and the second sealing element 5 are installed, the second sealing element 5 is firstly contacted with the inner shell 1 to block the second opening 102, and after the second sealing element 5 blocks the second opening 102, the first sealing element 4 is pushed continuously to compress the first elastic element 10, and the first sealing element 4 is pushed to be contacted with the outer shell 2 to block the first opening 201. After the first sealing member 4 and the second sealing member 5 are installed, the first elastic member 10 has an elastic force towards the second sealing member 5, which is favorable for improving the sealing performance of the second sealing member 5 and preventing the cleaning gas in the reaction chamber 101 from escaping out of the second opening 102 to pollute the environment, so that the slide boat cleaning device 100 in the embodiment of the utility model has better environmental protection.

In some embodiments, as shown in fig. 3, the housing 2 has a first flange 205 thereon, the first flange 205 being disposed around the first opening 201, and the first seal 4 abutting against the first flange 205.

For example, as shown in fig. 3, the first seal 4 is in a cap shape, and the provision of the first flange 205 can increase the contact area between the first seal 4 and the housing 2, which is advantageous in improving the sealing effect of the first seal 4.

Preferably, as shown in fig. 6 and 7, the slide boat cleaning device 100 further includes a locking mechanism 16, where the locking mechanism 16 includes a first limiting member 161 and a second limiting member 162, the first limiting member 161 is fixedly disposed on the first flange 205, the second limiting member 162 is slidably disposed on the first sealing member 4, and a limiting surface of the second limiting member 162 can selectively be locked or unlocked by being attached to or separated from a limiting surface of the first limiting member 161. In this embodiment, the surface of the first limiting member 161 is provided with a first inclined surface, and the surface of the second limiting member 162 is provided with a second inclined surface, and when the first inclined surface and the second inclined surface approach each other, the first inclined surface and the second inclined surface are attached (similar to the attachment of the inclined surfaces of the wedges).

Further, as shown in fig. 7, the first sealing member 4 is provided with a cylinder 163 and a linear guide rail 164, the second limiting member 162 is fixedly provided with a slider 165, the slider 165 is slidably connected with the linear guide rail 164, the telescopic end of the cylinder 163 is connected with the second limiting member 162, and the second limiting member 162 can slide along a straight line by the operation of the cylinder 163.

In some embodiments, the inner shell has a second flange 104 thereon, the second flange 104 being disposed around the second opening 102, the second seal 5 resting on the second flange 104.

For example, as shown in fig. 3, the second seal 5 is in a cap shape, and the provision of the second flange 104 can increase the contact area between the second seal 5 and the inner casing, which is advantageous in improving the sealing effect of the second seal 5.

In other embodiments, the first seal 4 and the second seal 5 may also be plug-shaped, the first seal 4 being inserted over the first opening 201 to seal the first opening 201, the second seal 5 being inserted over the second opening 102 to seal the second opening 102.

Optionally, the slide boat cleaning apparatus 100 according to the embodiment of the present utility model further includes a support member 15, where the support member 15 is provided at the bottom end of the outer casing 2 to support the inner casing 1, so that the inner casing 1 is convenient to install.

In some embodiments, the vent comprises an inlet conduit 6 and an outlet conduit 7, the inlet end of the inlet conduit 6 being disposed outside the housing 2 and adapted to communicate with the purge gas, the outlet end of the inlet conduit 6 extending into the reaction chamber 101, the inlet end of the outlet conduit 7 communicating with the reaction chamber 101, the outlet end of the outlet conduit 7 extending outside the housing 2. Preferably, as shown in fig. 9 to 11, in the present embodiment, the slide boat cleaning apparatus 100 includes a first bellows 17 and a second bellows 18. One end of the first corrugated pipe 17 is connected with the outer wall surface of the inner shell 1, the other end of the first corrugated pipe 17 is connected with the inner wall surface of the outer shell 2, and the air inlet pipeline 6 penetrates through the corrugated pipe 17. One end of the second corrugated tube 18 is connected with the outer wall surface of the inner shell 1, the other end of the second corrugated tube 18 penetrates through the outer shell 2 and is connected with the outer wall surface of the outer shell 2, and the exhaust pipeline 7 penetrates through the second corrugated tube 18. By adding the first bellows 17 and the second bellows 18, not only is cleaning gas prevented from entering the vacuum chamber 3, but also errors in installation engineering and thermal expansion displacement of the inner shell 1 and the outer shell 2 after heating are compensated.

In some embodiments, the slide boat cleaning device 100 of the present utility model includes a flow equalization plate 11, wherein a plurality of flow equalization holes 1101 are arranged on the flow equalization plate 11 at intervals, and the flow equalization plate 11 is arranged in the reaction chamber 101 and divides the reaction chamber 101 into a first chamber 1011 and a second chamber 1012. The first chamber 1011 communicates with the outlet end of the air intake duct 6, the second chamber 1012 communicates with the inlet end of the air exhaust duct 7, and the second chamber 1012 is for accommodating the slide boat 200.

As shown in fig. 3 and 4, the cleaning gas flowing out from the outlet end of the air inlet pipe 6 firstly enters the first chamber 1011, and enters the second chamber 1012 through the flow equalizing holes 1101 on the flow equalizing plate 11 to clean the slide boat 200 placed in the second chamber 1012. The uniformity of the distribution of the cleaning gas in the second chamber 1012 can be improved by arranging the flow equalization plate 11 for flow equalization, so that the cleaning effect of the cleaning gas on the slide boat 200 is improved. Preferably, as shown in fig. 8 to 11, the slide boat cleaning device further includes a flow homogenizing plate 19, a plurality of flow homogenizing holes are arranged on the flow homogenizing plate 19 at intervals, the flow homogenizing plate 19 and the flow homogenizing plate 11 are arranged in the reaction chamber 101 and divide the reaction chamber 101 into a first chamber 1011, a second chamber 1012 and a third chamber 1013, the first chamber 1011 is communicated with an outlet end of the air inlet pipeline 6, the third chamber 1013 is communicated with an inlet end of the air outlet pipeline 7, and the second chamber 1012 is used for accommodating the slide boat. Specifically, the flow equalizing plate 11 is located at the upper half of the reaction chamber 101, the flow equalizing plate 19 is located at the lower half of the reaction chamber 101, and by adding the flow equalizing plate 19 and the flow equalizing plate 11, both the inlet air and the outlet air are homogenized, so that the cleaning gas uniformly flows through the slide boat 200 to be cleaned.

In some embodiments, the outer housing 2 further has a third opening 204, the inner housing 1 further has a fourth opening 103, the boat washing apparatus 100 further includes a third seal 12 and a fourth seal 13, the third seal 12 is detachably connected to the inner housing 1 to open or close the third opening 204, a first chamber 1011 is formed between the third seal 12 and the flow equalization plate 11, and the fourth seal 13 is detachably connected to the outer housing 2 to open or close the fourth opening 103.

When the flow equalization plate 11 is installed, only the third sealing piece 12 and the fourth sealing piece 13 are required to be detached, and the flow equalization plate 11 is arranged in the reaction cavity 101 through the third opening 204 and the fourth opening 103 for installation, so that the installation efficiency of the flow equalization plate 11 is improved.

In some embodiments, the third opening 204 is overlapped with the fourth opening 103, the third sealing member 12 is connected to the fourth sealing member 13 through the second elastic member 14, and when the third sealing member 12 seals the third opening 204 and the fourth sealing member 13 seals the second opening 102, the second elastic member 14 is elastically compressed.

For example, as shown in fig. 1, 2 and 3, the second elastic member 14 may be a rubber member or a spring member. When the third sealing element 12 and the fourth sealing element 13 are installed, the fourth sealing element 13 is firstly contacted with the inner shell 1 and seals the fourth opening 103, after the fourth sealing element 13 seals the fourth opening 103, the third sealing element 12 is pushed continuously to compress the second elastic element 14, and the third sealing element 12 is pushed to be contacted with the outer shell 2 and seals the third opening 204. After the third sealing member 12 and the fourth sealing member 13 are installed, the second elastic member 14 has an elastic force towards the fourth sealing member 13, so that the sealing performance of the fourth sealing member 13 can be improved, and the cleaning gas in the reaction chamber 101 is prevented from flowing out of the fourth opening 103 to pollute the environment, so that the slide boat cleaning device 100 in the embodiment of the utility model has better environmental protection.

Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Claims (10)

1. Slide glass boat belt cleaning device's outer chamber structure, its characterized in that includes:

An outer shell (2) is internally provided with a vacuum cavity (3), and the vacuum cavity (3) is internally used for placing an inner shell (1) with a reaction cavity (101);

a first opening (201) which is arranged on the shell (2) and is communicated with the vacuum cavity (3), wherein the first opening (201) is used for taking and placing a slide boat (200);

A vacuum port (202) which is arranged on the shell (2) and is communicated with the vacuum cavity (3), wherein the vacuum port (202) is used for vacuumizing the vacuum cavity (3);

an air blowing port (203) which is arranged on the shell (2) and is communicated with the vacuum cavity (3), wherein the air blowing port (203) is used for introducing air into the vacuum cavity (3);

-a first seal (4) for sealing the first opening (201).

2. The slide boat cleaning apparatus according to claim 1, wherein the housing (2) has a first flange (205), the first flange (205) is disposed around the first opening (201), and the first sealing member (4) is abutted against the first flange (205).

3. The slide boat cleaning apparatus according to claim 1, further comprising a third opening (204), the third opening (204) being opened on the outer housing (2) and communicating with the vacuum chamber (3), the inner housing (1) being placed in the vacuum chamber (3) through the third opening (204).

4. The slide boat cleaning apparatus as set forth in claim 3, further comprising a third seal (12) with a reinforcing structure, the third seal (12) sealing cover being provided on the third opening (204).

5. The slide boat cleaning apparatus according to claim 4, wherein the reinforcement structure includes a first reinforcement rib (212) and a second reinforcement rib (213), a plurality of the first reinforcement ribs (212) being disposed in parallel and spaced apart from an outer wall surface of the third seal (12), a plurality of the second reinforcement ribs (213) being disposed in parallel and spaced apart from an outer wall surface of the third seal (12).

6. The slide boat cleaning apparatus according to claim 4 or 5, wherein an outer side wall of the housing (2) is provided with a third reinforcing rib (216).

7. The slide boat cleaning apparatus according to claim 4, wherein the outer wall surface of the third seal member (12) and/or the outer wall surface of the housing (2) are each provided with a cooling flow passage (26).

8. The external cavity structure of the slide boat cleaning device according to claim 1, wherein the housing (2) is provided with a heating device (9) at a position corresponding to the side wall and/or the bottom wall.

9. The slide boat cleaning apparatus according to claim 1, wherein the housing (2) is made of stainless steel.

10. Slide boat cleaning device (100), characterized by comprising an inner shell (1), a plasma generator (8) and an outer cavity structure of the slide boat cleaning device according to any one of claims 1-9, wherein the inner shell (1) is arranged in an outer shell (2) of the slide boat cleaning device, and the plasma generator (8) is arranged on the outer shell (2) and is communicated with a reaction cavity (101) of the inner shell (1).