CN221261503U - Grating interference exposure system - Google Patents
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Abstract
The application discloses a grating interference exposure system, which relates to the field of holographic grating manufacture, and comprises a light emitting device, a phase detection device and at least two groups of phase modulation components, wherein the light emitting device is used for emitting two coherent light beams, the two coherent light beams are transmitted through different paths and then interfere to form interference fringes, the phase detection device is used for collecting interference fringes formed by light rays corresponding to each wavelength in the interference fringes and determining phase drift amount corresponding to the light rays with each wavelength, the phase modulation components are arranged in the light emitting device and are connected with the phase detection device, and each group of phase modulation components correspondingly acquire the phase drift amount of the light rays with one wavelength and modulate the wavelength of the corresponding light rays based on the phase drift amount so as to compensate the phase drift. Therefore, the grating interference exposure system can carry out independent modulation on the phase of the light rays with each wavelength, so that the constant phase of the light rays with each wavelength in the exposure process of the multi-wavelength interference exposure system is realized, and the holographic grating interference exposure quality is improved.
Description
Technical Field
The application relates to the field of holographic grating manufacturing, in particular to a grating interference exposure system.
Background
In the field of augmented reality (Augmented Reality, AR) optical waveguide display, there are various optical waveguide schemes, such as geometric optical waveguide, relief grating waveguide scheme, holographic grating waveguide scheme, etc., and surface relief grating waveguide is usually displayed in a single waveguide sheet, so that full color display of RGB color mode requires superposition of multiple waveguide sheets, resulting in thicker thickness of the display waveguide. In contrast, the volume holographic grating waveguide has the advantage that color display can be achieved by a single piece, and the volume of the display waveguide can be made smaller.
The traditional exposure mode of the holographic grating is interference exposure, and phase shift is very easy to occur to interference exposure stripes in the interference exposure process, so that phase stabilization of the interference exposure stripes needs to be controlled, namely phase locking operation is performed. But the phase locking of a multi-wavelength interference exposure system manufactured for volume holographic gratings is not a very mature solution due to the different phase shifts generated by the different wavelengths of light under the same conditions.
Disclosure of utility model
Based on the above background, an embodiment of the present application provides a grating interference exposure system, including: the light-emitting device is used for emitting two coherent light beams, each coherent light beam comprises light rays with at least two wavelengths, and the two coherent light beams are transmitted through different paths and then interfere to form interference fringes; the phase detection device is arranged on a propagation light path after two coherent light beams form interference fringes, and is used for collecting interference fringes formed by light rays corresponding to each wavelength in the interference fringes and determining phase drift amount corresponding to the light rays of each wavelength based on the interference fringes of each wavelength; the phase modulation components are arranged in the light-emitting device, connected with the phase detection device, arranged on the light rays with one wavelength corresponding to each group of phase modulation components, and used for acquiring and modulating the phase of the light rays with the corresponding wavelength based on the phase drift amount of the light rays with the corresponding wavelength so as to compensate the phase drift of the light rays with the corresponding wavelength.
Optionally, the phase detection device includes: the device comprises a light combining device, at least two first optical filters and at least two first detectors, wherein each first optical filter corresponds to light with one wavelength, and each first detector corresponds to one first optical filter; the two coherent light beams are overlapped again by the light combining device after being transmitted by different paths, and interference fringes are formed; each first optical filter is arranged behind the light combining device along the transmission direction of the interference fringes and is used for filtering the interference fringes so as to separate interference fringes with corresponding wavelengths and enable the interference fringes to be shot to the corresponding first detector; the first detector obtains the phase drift amount of the light rays with the corresponding wavelengths based on the received interference fringes with the corresponding wavelengths.
Optionally, the phase detection device includes: the light splitting and combining device comprises a light splitting and combining component, at least two second optical filters and at least two second detectors, wherein each second optical filter corresponds to light with one wavelength, and each second detector corresponds to one second optical filter; the two coherent light beams are transmitted through different paths and then overlapped for multiple times through the light splitting and combining component to form at least two interference fringes; each second optical filter is arranged behind the light splitting and combining assembly along the transmission direction of one interference fringe and is used for filtering the interference fringe so as to separate the interference fringe with the corresponding wavelength and enable the interference fringe to be shot to the corresponding second detector; the second detector obtains the phase drift amount of the light rays with the corresponding wavelengths based on the received interference fringes with the corresponding wavelengths.
Optionally, the phase detection device is a color CCD camera.
Optionally, the light emitting device includes: the system comprises a first light combination component, a first light splitting component, at least two groups of transmission components and at least two lasers, wherein each laser is used for emitting light rays with one wavelength, the first light combination component, the first light splitting component and the transmission components are sequentially arranged on a light emitting path of the laser, the first light combination component is used for combining the light rays emitted by a plurality of the lasers to obtain one beam of multi-wavelength light rays, and the first light splitting component is used for splitting the multi-wavelength light rays to obtain two beams of coherent light beams; the transmission component corresponds to light rays with one wavelength and comprises a third optical filter, a fourth optical filter, a first reflector and a second reflector; the third optical filter is arranged on the transmission optical path of the coherent light beam and is used for separating the light rays with the corresponding wavelength and the light rays with other wavelengths from the coherent light beam; the first reflector is arranged behind the third optical filter along the transmission direction of the light rays with the corresponding wavelengths and is used for changing the transmission direction of the light rays with the corresponding wavelengths to be directed to the fourth optical filter, and the second reflector is arranged behind the third optical filter along the transmission direction of the light rays with other wavelengths and is used for changing the transmission direction of the light rays with other wavelengths to be directed to the fourth optical filter; the fourth optical filter is arranged behind the first reflector and the second reflector along the transmission direction of the light rays with the corresponding wavelength and the light rays with other wavelengths, and is used for recombining the light rays with the corresponding wavelength and the light rays with other wavelengths into the coherent light beam.
Optionally, the phase modulation component includes: the displacement modulation device is arranged on the first reflector of the transmission assembly corresponding to the light rays with the corresponding wavelengths and is used for modulating the displacement of the first reflector of the transmission assembly so as to adjust the phase difference of the light rays with the corresponding wavelengths.
Optionally, the light emitting device includes: the device comprises a second light combination component, a third light combination component, at least two lasers and at least two second light splitting components, wherein each laser is used for emitting light rays with one wavelength; each second light splitting component is correspondingly arranged on a light emitting path of one laser, and is used for splitting light rays emitted by the laser to obtain first coherent light and second coherent light, the transmission directions of the first coherent light corresponding to each laser are the same, and the transmission directions of the second coherent light corresponding to each laser are the same; the second light combining component is arranged on the transmission paths of the plurality of first coherent light beams and is used for combining the plurality of first coherent light beams into one coherent light beam, and the third light combining component is arranged on the transmission paths of the plurality of second coherent light beams and is used for combining the plurality of second coherent light beams into the other coherent light beam.
Optionally, each set of the phase modulation components includes: and the two frequency modulation devices of each group of phase modulation assembly are respectively arranged on the transmission paths of the first coherent light and the second coherent light corresponding to one laser and are used for modulating the frequency difference of the first coherent light and the second coherent light so as to adjust the phase difference of the light rays with corresponding wavelengths.
Optionally, the grating interference exposure system further comprises a third light splitting device, a fourth light splitting device and a grating substrate; the third light splitting device is arranged on a light path of a beam of the coherent light beam emitted to the phase detection device by the light emitting device and is used for splitting the coherent light beam to obtain a first interference light beam and a second interference light beam; the fourth light splitting device is arranged on the optical path of the other coherent light beam emitted to the phase detection device by the light emitting device and used for splitting the coherent light beam to obtain a third interference light beam and a fourth interference light beam; the first and third interference beams forming an interference exposure field on the grating substrate; the second interference beam and the fourth interference beam interfere to form the interference fringes.
Therefore, the grating interference exposure system provided by the embodiment of the application comprises a light emitting device, a phase detection device and at least two groups of phase modulation components, wherein the light emitting device is used for emitting two coherent light beams, the two coherent light beams are transmitted through different paths and then interfere to form interference fringes, the phase detection device can collect interference fringes formed by light rays corresponding to each wavelength in the interference fringes and determine phase drift amount corresponding to the light rays with each wavelength, the phase modulation components are arranged in the light emitting device and connected with the phase detection device, and each group of phase modulation components correspondingly acquire the phase drift amount of the light rays with one wavelength and modulate the wavelength of the corresponding light rays based on the phase drift amount so as to compensate the phase drift. Therefore, by arranging a plurality of groups of phase modulation components, the phase of each wavelength of light is modulated independently, so that the constant phase of each wavelength of light in the exposure process of the multi-wavelength interference exposure system is realized, and the interference exposure quality of the holographic grating is improved.
Additional features and advantages of embodiments of the application will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of embodiments of the application. The objectives and other advantages of embodiments of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic structural diagram of a grating interference exposure system according to an embodiment of the application.
Fig. 2 shows a schematic structure of a phase detecting device according to an embodiment of the present application.
Fig. 3 shows a schematic diagram of another phase detection device according to an embodiment of the present application.
FIG. 4 shows a schematic diagram of another grating interference exposure system according to an embodiment of the application.
Detailed Description
In order to make the present application better understood by those skilled in the art, the following description will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 shows a schematic structural diagram of a grating interference exposure system according to an embodiment of the application, including: a light emitting device 110, a phase detection device 120 and at least two sets of phase modulation components 130.
The light emitting device 110 is configured to emit two coherent light beams, where the two coherent light beams propagate through different paths and interfere to form interference fringes. Specifically, the coherent light refers to two beams of light with the same frequency and vibration direction and capable of interfering, the two beams of coherent light may be a coherent light beam L1 and a coherent light beam L2, the coherent light beam L1 has at least two wavelengths, the coherent light beam L2 has at least two wavelengths, and the coherent light beam L1 and the coherent light beam L2 have the same wavelength, so that part of light beams with the same wavelength in the coherent light beam L1 and the coherent light beam L2 can interfere with each other and generate interference fringes with the same wavelength, that is, interference fringes formed by light rays with at least two wavelengths are included in interference fringes formed by interference of the coherent light beam L1 and the coherent light beam L2.
The phase detecting device 120 is disposed on a propagation optical path after the interference fringes are formed by the coherent light beam L1 and the coherent light beam L2, and is configured to collect interference fringes formed by light rays corresponding to each wavelength in the interference fringes, so that a phase drift amount corresponding to a specified light ray of each wavelength can be determined based on the interference fringes of each wavelength; the phase modulation components 130 are disposed in the light emitting device 110 and connected to the phase detection device 120, and each group of phase modulation components 130 corresponds to a wavelength of light, is configured to obtain a phase shift amount of the light with a corresponding wavelength, and modulate the phase of the light with a corresponding wavelength based on the phase shift amount of the light with a corresponding wavelength to compensate for the phase shift.
Illustratively, the coherent light beam L1 includes light rays having a wavelength of λ 1 and a wavelength of λ 2, the coherent light beam L2 also includes light rays having a wavelength of λ 1 and a wavelength of λ 2, When the coherent light beam L1 interferes with the coherent light beam L2 to form interference fringes, the interference fringes comprise interference fringes with the wavelength lambda 1 formed by the interference of the coherent light beam L1 with the wavelength lambda 1 and the coherent light beam L2, interference fringes with the wavelength lambda 2 formed by the interference of the coherent light beam L1 with the wavelength lambda 2, Thus, the interference fringes of different wavelengths can be collected by the phase detecting device 120, and the phase shift amount corresponding to the interference fringes of the wavelength lambda 1 and the phase shift amount corresponding to the interference fringes of the wavelength lambda 2 are obtained, further, the phase modulating component 130 receives the phase shift amounts sent by the phase detecting device 120, adjusts the phase difference of the light of the corresponding wavelength based on the phase shift amounts of each wavelength, For example, if the interference fringe detected by the phase detecting device 120 reflects that the phase shift amount corresponding to the interference fringe of the wavelength λ 1 is not zero, it is indicated that the coherent light beams L1 and L2 with the wavelength λ 1 have phase shifts during propagation, and then the phase modulating component 130 receives the phase shift amount corresponding to the interference fringe with the wavelength λ 1 and adjusts the phase difference between the coherent light beams L1 and L2 with the wavelength λ 1 accordingly. it will be appreciated that the case where the coherent light beams L1 and L2 have more than two wavelengths may still refer to the above examples, and will not be described herein.
As an embodiment, the light emitting device 110 may include a first light combining component 111, a first light splitting component 112, at least two groups of transmission components 113 and at least two lasers 114, where each laser 114 is configured to emit light with one wavelength, the first light combining component 111, the first light splitting component 112 and the transmission components 113 are sequentially disposed on an optical path of the laser 114, the first light combining component 111 is configured to combine light emitted by the multiple lasers 114 to obtain a multi-wavelength light beam, and the first light splitting component 112 is configured to split the multi-wavelength light beam to obtain a coherent light beam L1 and a coherent light beam L2.
The first light combining component 111 may include a plurality of dichroic filters 115, where each dichroic filter 115 is correspondingly disposed on a light-emitting path of one laser 114 and can reflect light rays with wavelengths emitted by the corresponding laser 114 and transmit light rays with other wavelengths, so that a plurality of light rays with different wavelengths emitted by the lasers 114 are combined into a beam of multi-wavelength light beam, the first light splitting component 112 may be a light splitting prism, and is configured to split the combined multi-wavelength light beam into a coherent light beam L1 and a coherent light beam L2, where it can be understood that the coherent light beam L1 and the coherent light beam L2 each include light rays with wavelengths emitted by each laser.
The transmission component 113 is configured to separate light with a specific wavelength and light with other wavelengths from the coherent light beam, so that the light with the specific wavelength can be modulated in phase by the phase modulation component, and then the light with the specific wavelength and the light with other wavelengths are recombined into a coherent light beam. Specifically, the number of transmission elements 113 may be related to the number of wavelengths that the coherent light beam has, each group of transmission elements 113 corresponds to one wavelength of light, i.e. when the coherent light beam has two wavelengths, the light emitting device includes two groups of transmission elements, and so on. Each of the transmission assemblies 113 may include a third optical filter 116, a fourth optical filter 117, a first reflector 118 and a second reflector 119, where the third optical filter 116 and the fourth optical filter 117 can reflect light beams with specific wavelengths and transmit light beams with other wavelengths, specifically, the third optical filter 116 separates light beams with corresponding wavelengths and light beams with other wavelengths from the coherent light beams, the first reflector 118 is disposed behind the third optical filter 116 along the transmission direction of the light beams with corresponding wavelengths, and is used for changing the transmission direction of the light beams with corresponding wavelengths to point to the fourth optical filter 117, the second reflector 119 is disposed behind the third optical filter 116 along the transmission direction of the light beams with other wavelengths, and is used for changing the transmission direction of the light beams with other wavelengths to point to the fourth optical filter 117, that is, when the coherent light beams pass through the transmission assembly 113, the light beams with corresponding wavelengths are separated into light beams with corresponding wavelengths and light beams with other wavelengths through the third optical filter 116, and the light beams with other wavelengths reach the fourth optical filter 117 after being reflected by the first reflector 118, and the light beams with other wavelengths reach the fourth optical filter 117 after being reflected by the second reflector 119, and the light beams with different wavelengths are further transmitted from the optical filter assembly.
Taking the example that the light emitting device 110 includes two lasers 114 and two transmission components 113, one laser emits light with a wavelength lambda 1, the other laser emits light with a wavelength lambda 2, the third filter and the fourth filter included in one transmission component can reflect light with a wavelength lambda 1 and transmit light with a wavelength lambda 2, The other transmission component comprises a third filter and a fourth filter which can reflect the light with the wavelength lambda 2 and transmit the light with the wavelength lambda 1, and the first light combination component correspondingly comprises two dichroic filters which are arranged on the light outgoing path of the laser emitting the light with the wavelength lambda 1, The dichroic filter provided on the light-emitting path of the laser emitting light of wavelength λ 2 is capable of reflecting light of wavelength λ 1 and transmitting light of wavelength λ 2, and is capable of reflecting light of wavelength λ 2 and transmitting light of wavelength λ 1. Therefore, the light beams with different wavelengths emitted by the two lasers are combined by the first light combining component 111 to form a beam of light with a wavelength lambda 1 and a wavelength lambda 2, and the light beams are separated into coherent light beams by the first light splitting component 112 to obtain a coherent light beam L1 and a coherent light beam L2, wherein the coherent light beam L1 and the coherent light beam L2 both comprise light beams with a wavelength lambda 1 and a wavelength lambda 2; When the coherent light beam L1 propagates to the transmission component 113, the light beam with the wavelength lambda 1 is reflected and separated by the third filter 116, and then reaches the fourth filter 117 after being reflected by the first reflector 118, the light beam with the wavelength lambda 2 is transmitted by the third filter 116 and is emitted to the first emitter 118, and then reaches the fourth filter 117 after being reflected by the second reflector 119, Further, the light beams of the wavelength λ 1 and the wavelength λ 2 are recombined by the fourth filter 117 to obtain the coherent light beam L1, and similarly, the coherent light beam L2 is emitted after the same transmission process in the transmission unit. therefore, the light emitting device can emit two coherent light beams outward and form interference fringes.
As an embodiment, the phase modulation components 130 are displacement modulation devices, and each displacement modulation device is used for modulating the phase shift of the light beam with one wavelength, that is, the number of the phase modulation components 130 is related to the number of wavelengths of the coherent light beam, and in the case that the transmission component 113 includes the third optical filter 116, the fourth optical filter 117, the first reflector 118 and the second reflector 119, each displacement modulation device is disposed on the first reflector 118 of one transmission component 113, and the displacement modulation device correspondingly adjusts the phase of the light beam with the corresponding wavelength capable of reaching the first reflector 118 and being reflected by controlling the displacement offset and the change of the angle offset of the first reflector 118, where the phase of the light beam and the displacement offset and the angle offset of the first reflector are as shown in the following formula:
Where θ is the angular offset of the first mirror, d is the displacement offset of the first mirror, and Δφ is the phase change of the light of the corresponding wavelength reflected by the first mirror.
As an embodiment, the phase modulation component 130 further includes a controller 131, which may be a smart terminal. The controller 131 is connected with the phase detecting device 120 and each displacement modulating component, the phase detecting device 120 feeds back the phase drift amount corresponding to each wavelength of light to the controller 131, the controller 131 uses the displacement required by the first reflecting mirror for compensating the phase drift according to the set phase-locking target phase and the phase drift amount and the compensation algorithm Jie Suanchu as a driving signal, the driving signal is sent to the displacement modulating component corresponding to the first reflecting mirror, and the displacement modulating component drives the first reflecting mirror to move based on the driving signal, so that the optical path difference of the coherent light beam is changed, and the phase is kept relatively constant.
As an embodiment, the phase detection device 120 may be a color CCD camera.
Specifically, the method for determining the phase shift amount corresponding to the specified light of each wavelength by using the color CCD camera may be: shooting multi-wavelength interference fringes and solving to obtain interference fringes corresponding to each wavelength of appointed light, shooting multi-wavelength color interference fringes by a color CCD camera and transmitting the color interference fringes to a computer, reading the color interference fringes by the computer and carrying out RGB three-channel color separation on an image to obtain RGB three-channel color values at each position and generating interference fringes corresponding to each color. The color CCD camera shoots color interference fringes at a plurality of moments so that a computer separates colors to obtain interference fringes corresponding to each color at different moments, therefore, the phase drift amount of light rays with corresponding wavelengths can be obtained by comparing the changes of the interference fringes with single wavelengths at different moments, further, the change of the light intensity of the interference fringes with single wavelengths at a certain point can be detected, and the change of the light intensity voltage is used as the phase drift amount of the light rays with the wavelengths.
Specifically, the method for determining the phase shift amount corresponding to the specified light of each wavelength by using the color CCD camera may also be: the color CCD camera shoots interference fringes of light rays with various wavelengths respectively at different moments, if the interference fringes with three wavelengths at a certain moment are wanted, the shooting is needed for three times, so that the phase drift amount of the light rays with corresponding wavelengths can be obtained by comparing the changes of the interference fringes with single wavelengths at different moments, further, the change of the light intensity of the interference fringes with single wavelengths at a certain point can be detected, and the change of the light intensity voltage is used as the phase drift amount of the light rays with the wavelengths. It will be appreciated that when the optical intensity voltage value is to be used to characterize the phase shift, the phase lock target phase set in the controller is also represented by the phase lock voltage value.
As an implementation manner, referring to fig. 2, fig. 2 shows a schematic structural diagram of a phase detection device according to an embodiment of the present application, where the phase detection device 120 includes a light combining device 121, at least two first detectors 122, and at least two first filters 123, each first filter 123 corresponds to a light beam with a wavelength, and each first detector 122 corresponds to a first filter 123; and the number of first filters 123 and first detectors 122 corresponds to the number of wavelengths present in the coherent light beam. Specifically, the coherent light beam L1 and the coherent light beam L2 are overlapped again through the light combining device 121 to form interference fringes, the first optical filter 123 is disposed behind the light combining device 121 along the transmission direction of the interference fringes, and the first optical filter 123 is capable of transmitting light rays of a specific wavelength and reflecting light rays of other wavelengths, and the wavelengths of the light rays transmitted by each first optical filter 123 are different, so that the first optical filter 123 is capable of filtering the interference fringes and separating interference fringes of corresponding wavelengths to emit the interference fringes to the first detector 122, and in particular, the plurality of first optical filters 123 are disposed at different positions of the interference fringes; each first detector 122 is correspondingly disposed in the transmission direction of the interference fringe of the corresponding wavelength emitted by each first optical filter 123, so that the first detector 122 can receive the interference fringe of the corresponding wavelength and obtain the phase shift amount of the light of the corresponding wavelength. Thus, the phase detection device 120 can obtain the phase shift amount of the light rays of all wavelengths contained in the two coherent light beams, and the first detector may be a photodetector, for example.
For example, when the coherent light beam includes a coherent light beam L1 and a coherent light beam L2, and the coherent light beam L1 and the coherent light beam L2 are light beams having a wavelength λ 1 and a wavelength λ 2, the number of the first optical filter 123 and the number of the first detectors 122 are two, the coherent light beam L1 and the coherent light beam L2 are combined by the light combining device 121 to form interference fringes having a wavelength λ 1 and a wavelength λ 2, one first optical filter 123 can filter the light beam having a wavelength λ 1, the other first optical filter 123 can filter the light beam having a wavelength λ 2, so that the first detector 122 disposed on the light outgoing path of the first optical filter 123 can detect the interference fringes having a wavelength λ 1 and the interference fringes having a wavelength λ 2, and obtain the phase shift amounts of the interference fringes corresponding to the respective wavelengths, so that the phase detection device 120 can obtain the phase shift amounts of the coherent light beam.
Referring to fig. 3 as an implementation manner, fig. 3 shows a schematic structural diagram of another phase detection device according to an embodiment of the present application, and the phase detection device 120 includes: the light splitting and combining assembly 124, at least two second detectors 125 and at least second optical filters 126, each second optical filter 126 corresponds to light with one wavelength, each second detector 125 corresponds to one second optical filter 126, the number of the second detectors 125 is the same as the number of the second optical filters 126, and the number of the second detectors 125 and the number of the second optical filters 126 correspond to the number of wavelengths in the coherent light beam. Specifically, the beam splitting and combining assembly 124 includes at least a plurality of beam splitting prisms and a beam combiner, the beam splitting prisms are configured to split light rays with different propagation paths from the coherent light beams, the beam combiner is configured to combine the light rays with different propagation paths into the coherent light beams again and form interference fringes, so the beam splitting and combining assembly can make two coherent light beams emitted by the light emitting device form a plurality of interference fringes at a plurality of positions, the second optical filter 126 can transmit light rays with a specific wavelength and reflect light rays with other wavelengths, and each second optical filter 126 is disposed on the beam splitting and combining assembly 124 along a transmission direction of one interference fringe, so that the transmitted wavelengths are different. Therefore, the coherent light beam is split by the beam splitting and combining component 124 to form a plurality of interference fringes with multiple wavelengths, each interference fringe reaches one second optical filter 126, and then the interference fringes with the wavelength corresponding to the second optical filter 126 are separated, and each second detector 125 detects the interference fringe with the corresponding wavelength to obtain the phase shift of the light with the corresponding wavelength. Thus, the phase detection device 120 can obtain the phase shift amount of the light rays of all wavelengths contained in the two coherent light beams, and the second detector may be a photodetector, for example.
For example, when the coherent light beam includes coherent light beams L1 and L2, and the coherent light beams L1 and L2 are light beams having a wavelength λ 1, a wavelength λ 2, and a wavelength λ 3, the number of the second filters 126 and the number of the second detectors 125 are three, the coherent light beams L1 and L2 are split by the splitting and combining component 124 to form a plurality of first coherent light beams L3, and the first coherent light beams L3 have a wavelength λ 1, a wavelength λ 2, and a wavelength λ 3, further, the first coherent light beams L3 enter the second filters 126 at different positions, for example, one second filter 126 can filter the light beam having a wavelength λ 1, the other second filter 126 can filter the light beam having a wavelength λ 2, and the other second filter 126 can filter the light beam having a wavelength λ 3, so that the second detectors 125 disposed on the light path of the second filters 126 can detect interference fringes of the wavelength 1, the interference fringes of the wavelength λ 2, and the interference fringes of the wavelength λ 3, and the respective phase shift amounts of the interference fringes can be obtained, so that the respective phase shift amounts of the coherent light beams 120 can be obtained.
As an embodiment, the grating interference exposure system further includes a third spectroscopic device 140, a fourth spectroscopic device 150, and a grating substrate 160, where the third spectroscopic device 140 is disposed on an optical path where the coherent light beam L1 emitted from the light emitting device 110 is emitted to the phase detecting device 120 by the light emitting device 110, and splits the coherent light beam L1 again to obtain a first interference light beam and a second interference light beam, and the fourth spectroscopic device 150 is disposed on an optical path where the coherent light beam L2 emitted from the light emitting device 110 is emitted to the phase detecting device 120 by the light emitting device 110, and splits the coherent light beam L2 again to obtain a third interference light beam and a fourth interference light beam, so that the first interference light beam and the third interference light beam form an interference exposure field on the grating substrate 160, and the second interference light beam and the fourth interference light beam interfere to form an interference fringe and are collected by the phase detecting component 120. Since the first and second interference beams are split from the coherent light beam L1 and the third and fourth interference beams are split from the coherent light beam L2, the first interference beam has the same wavelength and phase as the second interference beam and the third interference beam has the same wavelength and phase as the fourth interference beam, and thus, when the second and fourth interference beams are phase-locked by adjusting the phase shift of the light rays of the respective wavelengths by the phase detecting means 120 and the phase modulating means 130, the first and third interference beams are also phase-locked at the same time, and the first and third interference beams have the same wavelength as the coherent light beam, i.e., the interference exposure field formed by them is a multi-wavelength interference exposure field, thereby enabling multi-wavelength exposure to manufacture a volume hologram.
Therefore, the grating interference exposure system provided by the embodiment of the application comprises a light emitting device, a phase detection device and at least two groups of phase modulation components, wherein the light emitting device is used for emitting two coherent light beams, the two coherent light beams are transmitted through different paths and then interfere to form interference fringes, the phase detection device can collect interference fringes formed by light rays corresponding to each wavelength in the interference fringes and determine phase drift amount corresponding to the light rays with each wavelength, the phase modulation components are arranged in the light emitting device and connected with the phase detection device, and each group of phase modulation components correspondingly acquire the phase drift amount of the light rays with one wavelength and modulate the wavelength of the corresponding light rays based on the phase drift amount so as to compensate the phase drift. Therefore, by arranging a plurality of groups of phase modulation components, the phase of each wavelength of light is modulated independently, so that the constant phase of each wavelength of light in the exposure process of the multi-wavelength interference exposure system is realized, and the interference exposure quality of the holographic grating is improved.
Referring to fig. 4, fig. 4 is a schematic structural diagram of another grating interference exposure system according to an embodiment of the application, including: the light emitting device 210, the phase detecting device 220 and the phase modulating element 230 may refer to the above embodiments for specific implementation of the phase detecting device 220, which is not described herein.
As an embodiment, the light emitting device 210 may include a second light combining component 211, a third light combining component 214, at least two lasers 212, and at least two second light splitting components 213, wherein each laser 212 is configured to emit light of one wavelength.
The second beam splitter 213 is correspondingly disposed on the light-emitting path of the first laser 212, and is configured to split the light emitted thereto into a first coherent light beam and a second coherent light beam with the same wavelength, phase and transmission direction, and the second beam splitter 213 may be a beam splitter prism, for example. It will be appreciated that each first laser 212 is split by a second splitting component 213, and that each first laser 212 corresponds to a first coherent light and a second coherent light having their emission wavelengths.
The second light combining component 211 is disposed on the transmission paths of the first coherent light beams of the first lasers 212 after being split, the third light combining component 214 is disposed on the transmission paths of the second coherent light beams of the first lasers 212 after being split, the second light combining component 211 is configured to re-combine the first coherent light beams, and the third light combining component 214 re-combines the second coherent light beams, so as to obtain two coherent light beams with multiple wavelengths. Further, the second light combining component 211 and the third light combining component 214 may include a plurality of dichroic filters, and the dichroic filters reflect light rays with wavelengths corresponding to the laser 212 and transmit light rays with other wavelengths.
Taking the light emitting device 210 including two lasers 212, two second light combining components 211 and two third light combining components 214 as an example, one laser emits light with a wavelength of λ 1, the other laser emits light with a wavelength of λ 2, the second light combining component 211 corresponding to the laser emitting light with a wavelength of λ 1 can reflect light with a wavelength of λ 1 and transmit light with a wavelength of λ 2, the second light combining component 211 corresponding to the laser emitting light with a wavelength of λ 2 can reflect light with a wavelength of λ 2 and transmit light with a wavelength of λ 1, and the third light combining component 214 is the same, so that the light emitted by each laser 212 can be split by the corresponding second light splitting component 213 and then combined by the second light combining component 213 to finally form a coherent light beam L1 and a coherent light beam L2, and the coherent light beam L1 and the coherent light beam L2 each have light beams with a wavelength of λ 1 and a wavelength of λ 2. Therefore, the light emitting device can emit two coherent light beams outward and form interference fringes.
As an embodiment, the phase modulation component 230 includes two frequency modulation components, and the two frequency modulation devices of each group of phase modulation components 230 are respectively disposed on the propagation paths of the first coherent light and the second coherent light obtained by the laser 212 after being split by the second splitting component 213, and the frequency modulation devices are used to adjust the frequency variation of the first coherent light and the second coherent light so as to correspond to the phase of the light with the corresponding wavelength. Further, the phase modulation component 230 further includes a controller 231, the controller 231 may be an intelligent terminal, and the controller 232 is connected to the phase detection device 220 and each frequency modulation component, the phase detection device 220 feeds back a phase shift amount corresponding to a specified light of each wavelength to the controller 231, the controller 231 calculates a frequency variation amount required by the light of the corresponding wavelength to compensate the phase shift according to a compensation algorithm according to a set phase-locked target phase and the phase shift amount as a driving signal, and sends the driving signal to the frequency modulation component on the light of the corresponding wavelength, so that the frequency modulation component adjusts the frequency of the light based on the driving signal, thereby changing the frequency difference of the coherent light beam to keep the phase relatively constant.
As an embodiment, the grating interference exposure system further includes a third beam splitter 240, a fourth beam splitter 250, and a grating substrate 260, where the third beam splitter 240 is disposed on an optical path where the coherent light beam L1 emitted from the light emitting device 210 is emitted to the phase detecting device 220 by the light emitting device 210, and splits the coherent light beam L1 again to obtain a first interference light beam and a second interference light beam, the fourth beam splitter 250 is disposed on an optical path where the coherent light beam L2 emitted from the light emitting device 210 is emitted to the phase detecting device 220 by the light emitting device 110, and splits the coherent light beam L2 again to obtain a third interference light beam and a fourth interference light beam, so that the first interference light beam and the third interference light beam form an interference exposure field on the grating substrate 260, and the second interference light beam and the fourth interference light beam interfere to form an interference fringe and are collected by the phase detecting component 220. Since the first and second interference beams are split from the coherent light beam L1 and the third and fourth interference beams are split from the coherent light beam L2, the first interference beam has the same wavelength and phase as the second interference beam and the third interference beam has the same wavelength and phase as the fourth interference beam, and thus, when the second and fourth interference beams are phase-locked by adjusting the phase shift of the light rays of the respective wavelengths by the phase detecting means 220 and the phase modulating means 230, the first and third interference beams are also phase-locked at the same time, and the first and third interference beams have the same wavelength as the coherent light beam, i.e., the interference exposure field formed thereof is a multi-wavelength interference exposure field, thereby enabling multi-wavelength exposure to manufacture a volume hologram.
Therefore, the grating interference exposure system provided by the embodiment of the application comprises a light emitting device, a phase detection device and a phase modulation component, wherein the light emitting device is used for emitting a coherent light beam, the coherent light beam comprises appointed light rays with at least two wavelengths, the phase detection device is arranged on a propagation light path of the coherent light beam, interference fringes formed by the appointed light rays with each wavelength can be collected, the phase drift amount corresponding to the appointed light rays with each wavelength is determined based on the interference fringes with each wavelength, and the phase modulation component is arranged in the light emitting device and connected with the phase detection device, so that the phase of the light rays with each wavelength is constant in the exposure process of the multi-wavelength interference exposure system, and the holographic grating interference exposure quality is improved.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the application has been described in detail with reference to the foregoing embodiments, it will be appreciated by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not drive the essence of the corresponding technical solutions to depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (9)
1. A grating interference exposure system, comprising:
The light-emitting device is used for emitting two coherent light beams, each coherent light beam comprises light rays with at least two wavelengths, and the two coherent light beams are transmitted through different paths and then interfere to form interference fringes;
The phase detection device is arranged on a propagation light path after two coherent light beams form interference fringes, and is used for collecting interference fringes formed by light rays corresponding to each wavelength in the interference fringes and determining phase drift amount corresponding to the light rays of each wavelength based on the interference fringes of each wavelength;
And the phase modulation components are arranged in the light-emitting device and connected with the phase detection device, each group of phase modulation components corresponds to light rays with one wavelength and is used for acquiring and modulating the phase of the light rays with the corresponding wavelength based on the phase drift amount of the light rays with the corresponding wavelength so as to compensate the phase drift of the light rays with the corresponding wavelength.
2. The grating interference exposure system according to claim 1, wherein the phase detection device comprises a light combining device, at least two first optical filters and at least two first detectors, each of the first optical filters corresponding to light of one wavelength, each of the first detectors corresponding to one of the first optical filters;
the two coherent light beams are overlapped again by the light combining device after being transmitted by different paths, and interference fringes are formed;
Each first optical filter is arranged behind the light combining device along the transmission direction of the interference fringes and is used for filtering the interference fringes so as to separate interference fringes with corresponding wavelengths and enable the interference fringes to be shot to the corresponding first detector;
the first detector obtains the phase drift amount of the light rays with the corresponding wavelengths based on the received interference fringes with the corresponding wavelengths.
3. The grating interference exposure system according to claim 1, wherein the phase detection device comprises a light splitting and combining assembly, at least two second optical filters and at least two second detectors, each of the second optical filters corresponding to light of one wavelength, each of the second detectors corresponding to one of the second optical filters;
The two coherent light beams are transmitted through different paths and then overlapped for multiple times through the light splitting and combining component to form at least two interference fringes;
Each second optical filter is arranged behind the light splitting and combining assembly along the transmission direction of one interference fringe and is used for filtering the interference fringe so as to separate the interference fringe with the corresponding wavelength and enable the interference fringe to be shot to the corresponding second detector;
the second detector obtains the phase drift amount of the light rays with the corresponding wavelengths based on the received interference fringes with the corresponding wavelengths.
4. The grating interference exposure system of claim 1, wherein the phase detection device is a color CCD camera.
5. The grating interference exposure system according to claim 1, wherein the light-emitting device comprises a first light-combining component, a first light-splitting component, at least two groups of transmission components and at least two lasers, each of the lasers is used for emitting light rays with one wavelength, the first light-combining component, the first light-splitting component and the transmission components are sequentially arranged on a light-emitting path of the lasers, the first light-combining component is used for combining the light rays emitted by a plurality of the lasers to obtain a plurality of wavelength light rays, and the first light-splitting component is used for splitting the plurality of wavelength light rays to obtain two coherent light beams;
The transmission component corresponds to light rays with one wavelength and comprises a third optical filter, a fourth optical filter, a first reflector and a second reflector;
The third optical filter is arranged on the transmission optical path of the coherent light beam and is used for separating the light rays with the corresponding wavelength and the light rays with other wavelengths from the coherent light beam;
The first reflector is arranged behind the third optical filter along the transmission direction of the light rays with the corresponding wavelengths and is used for changing the transmission direction of the light rays with the corresponding wavelengths to be directed to the fourth optical filter, and the second reflector is arranged behind the third optical filter along the transmission direction of the light rays with other wavelengths and is used for changing the transmission direction of the light rays with other wavelengths to be directed to the fourth optical filter;
The fourth optical filter is arranged behind the first reflector and the second reflector along the transmission direction of the light rays with the corresponding wavelength and the light rays with other wavelengths, and is used for recombining the light rays with the corresponding wavelength and the light rays with other wavelengths into the coherent light beam.
6. The grating interference exposure system according to claim 5, wherein the phase modulation assembly comprises a displacement modulation device disposed on the first reflector of the transmission assembly corresponding to the light of the corresponding wavelength for modulating a displacement of the first reflector of the transmission assembly to adjust a phase difference of the light of the corresponding wavelength.
7. The grating interference exposure system according to claim 1, wherein the light emitting device comprises a second light combining assembly, a third light combining assembly, at least two lasers, each for emitting light of one wavelength, and at least two second light splitting assemblies;
Each second light splitting component is correspondingly arranged on a light emitting path of one laser, and is used for splitting light rays emitted by the laser to obtain first coherent light and second coherent light, the transmission directions of the first coherent light corresponding to each laser are the same, and the transmission directions of the second coherent light corresponding to each laser are the same;
the second light combining component is arranged on the transmission paths of the plurality of first coherent light beams and is used for combining the plurality of first coherent light beams into one coherent light beam, and the third light combining component is arranged on the transmission paths of the plurality of second coherent light beams and is used for combining the plurality of second coherent light beams into the other coherent light beam.
8. The grating interference exposure system according to claim 7, wherein each group of the phase modulation components comprises two frequency modulation devices, and the two frequency modulation devices of each group of the phase modulation components are respectively arranged on the transmission paths of the first coherent light and the second coherent light corresponding to one laser, and are used for modulating the frequency difference between the first coherent light and the second coherent light so as to adjust the phase difference of the light rays with corresponding wavelengths.
9. The grating interference exposure system of claim 1, further comprising a third beam-splitting device, a fourth beam-splitting device, and a grating substrate;
The third light splitting device is arranged on a light path of a beam of the coherent light beam emitted to the phase detection device by the light emitting device and is used for splitting the coherent light beam to obtain a first interference light beam and a second interference light beam;
The fourth light splitting device is arranged on the optical path of the other coherent light beam emitted to the phase detection device by the light emitting device and used for splitting the coherent light beam to obtain a third interference light beam and a fourth interference light beam;
The first and third interference beams forming an interference exposure field on the grating substrate;
the second interference beam and the fourth interference beam interfere to form the interference fringes.
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| CN202322384649.5U CN221261503U (en) | 2023-08-30 | 2023-08-30 | Grating interference exposure system |
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