CN221149980U

CN221149980U - Wafer lifting device

Info

Publication number: CN221149980U
Application number: CN202322677636.7U
Authority: CN
Inventors: 郭继伟; 王妍智
Original assignee: Beijing U Precision Tech Co Ltd
Current assignee: Beijing U Precision Tech Co Ltd
Priority date: 2023-10-07
Filing date: 2023-10-07
Publication date: 2024-06-14
Anticipated expiration: 2033-10-07

Abstract

The utility model provides a wafer lifting device, which comprises a support frame and a driving part, wherein the support frame is fixedly provided with a plurality of support pins which are arranged at intervals and used for supporting a wafer; the driving part comprises a cylinder body, an elastic telescopic pipe is arranged in the cylinder body, one end of the elastic telescopic pipe is connected with the bottom surface of the cylinder body in a sealing way and communicated with an external energy source, and the other end of the elastic telescopic pipe is connected with the supporting frame in a sealing way and used for driving the supporting frame to move along a first direction; the energy source is an air source or a hydraulic source, and the first direction is the expansion direction of the elastic telescopic pipe. Compared with motor driving, the wafer lifting device provided by the utility model adopts a hydraulic source or an air pressure source for driving, does not need to design a cooling structure for cooling and radiating, and has the advantages of simple structure and low cost.

Description

Wafer lifting device

Technical Field

The utility model relates to the field of chip manufacturing, in particular to a wafer lifting device.

Background

In the process flow of chip manufacturing, the transmission and the handling of wafers are common operations, such as wafer bonding and photolithography, in which the processed wafers are removed from the chuck and then taken out of the apparatus to enter the next flow. The wafer is usually fixed on the chuck by electrostatic adsorption or vacuum adsorption, and when the wafer is taken, the wafer needs to be lifted from the surface of the chuck to be separated from the chuck so that the wafer fork extends to the back surface of the wafer to transfer the wafer, thus a wafer lifting device is required to complete the lifting action of the wafer.

In the prior art, the wafer supporting pin adopts motor driving, a driving motor and a power supply cable are needed for the motor driving structure, and cooling water dissipates heat of the motor, so that the motor driving structure is complex, and particularly, the extreme ultraviolet lithography equipment has very strict requirements on temperature and vacuum, and the requirement on heating of the motor in the vacuum is also improved, so that the design and manufacturing difficulty is increased.

Disclosure of utility model

The utility model provides a wafer lifting device, which is used for solving the technical problems that in the prior art, a wafer supporting pin is driven by a motor, a cooling structure is required to be arranged for cooling the motor, and the complexity and the design difficulty of the wafer lifting device are increased.

The utility model provides a wafer lifting device, comprising:

the support frame is fixedly provided with support pins, and the support pins are provided with a plurality of support pins and are arranged at intervals and used for supporting the wafer;

The driving part comprises a cylinder body, an elastic telescopic pipe is arranged in the cylinder body, one end of the elastic telescopic pipe is connected with the bottom surface of the cylinder body in a sealing way and communicated with an external energy source, and the other end of the elastic telescopic pipe is connected with the supporting frame in a sealing way and used for driving the supporting frame to move along a first direction;

The energy source is an air source or a hydraulic source, and the first direction is the expansion direction of the elastic telescopic pipe.

Compared with motor driving, the wafer lifting device provided by the utility model adopts a hydraulic source or an air pressure source for driving, does not need to design a cooling structure for cooling and radiating, and has the advantages of simple structure and low cost.

Further, the energy source is an air source; the driving part comprises an air pressure pipeline, one end of the air pressure pipeline is communicated with the elastic telescopic pipe, the other end of the air pressure pipeline is communicated with the air outlet end of the air charging device, the air outlet end of the air charging device is provided with a first valve, and the air inlet end of the air charging device is communicated with the air source.

The wafer lifting device provided by the utility model adopts pneumatic drive, and compared with a hydraulic source, the wafer lifting device has the advantages of simple structure, cleanliness, sensitive action and buffering effect; the air pressure driving is adopted to change the air pressure in the elastic telescopic pipe, so that the elastic telescopic pipe is stretched, and the supporting frame is driven to drive the supporting pin to lift.

Further, the other end of the air pressure pipeline is also communicated with the air inlet end of the air extractor, and the air inlet end of the air extractor is provided with a second valve. So set up, promote the exhaust efficiency of gas in the flexible extension pipe.

Further, the other end of the air pressure pipeline is connected with a three-way pipe and is communicated with the first end of the three-way pipe, the air outlet end of the air charging device is communicated with the second end of the three-way pipe, and the air inlet end of the air extracting device is communicated with the third end of the three-way pipe.

Further, the wafer lifting device further comprises a stroke detection module and a control module, wherein the stroke detection module is electrically connected with the control module, the first valve and the second valve are electrically connected with the control module, and the stroke detection module is used for detecting the stroke of the supporting frame. So set up, realize atmospheric pressure closed loop control, and then realize the automatic rising of backing pin.

Further, the stroke detection module comprises a limit sensor which is arranged on the cylinder body and used for detecting the stroke of the support frame;

And/or, the stroke detection module comprises a grating ruler sensor, and comprises a scale grating and a grating reading head, wherein the scale grating is installed on the cylinder body, the grating reading head is installed on the support frame, and the scale grating and the grating reading head are used for detecting the stroke of the support frame.

Further, the cylinder body is kept away from the one end of support frame has set firmly first flange, first flange is followed the outer peripheral face of cylinder body outwards extends, first flange is equipped with the guiding hole, the guiding hole with supporting pin sliding connection just the guiding hole with the supporting pin one-to-one. The guide holes are formed in the way, so that the guide holes provide guide for lifting of the support pins, the support pins are prevented from inclining, and the lifting stability of the support pins is enhanced.

Further, the first flange is fixedly provided with a boss, and the guide hole is formed in the boss.

Further, the support frame includes support body and flange portion, the support body connect in the flexible pipe, the flange portion is followed the outer peripheral face of support body outwards protrudes, the supporting pin set firmly in flange portion just runs through flange portion.

Further, the bracket body is provided with a groove, an opening of the groove faces the cylinder body, and the inner wall surface of the groove is abutted with the outer wall surface of the cylinder body. So set up, the recess provides the direction for the lift of support frame, the stability of reinforcing support frame lift.

Drawings

FIG. 1 is a cross-sectional view of a wafer lift apparatus according to an embodiment of the present utility model;

Fig. 2 is a schematic view of a part of a structure of a wafer lifting device according to an embodiment of the present utility model;

Reference numerals illustrate:

10. A support frame; 110. a bracket body; 111. a support pin; 120. a flange portion; 210. a cylinder; 220. an elastic telescopic tube; 230. a first flange; 240. a boss; 241. a guide hole; 250. an air pressure pipeline; 260. an inflator; 261. a first valve; 270. an air extracting device; 271. a second valve; 280. a three-way pipe; 310. a limit sensor; 320. a grating ruler sensor; 321. a scale grating; 322. a grating reading head.

Detailed Description

In order that the above objects, features and advantages of the present utility model will be readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings 1-2.

In the prior art, a motor driving supporting pin is generally adopted, and heat is generated due to the fact that a driving motor and a power supply cable are needed for motor driving, so that the generated heat affects the performance of a wafer, a cooling structure is needed to cool the motor and the like, and the complexity and the design difficulty of the wafer lifting device are increased.

The embodiment of the utility model provides a wafer lifting device, referring to the attached drawings, the wafer lifting device comprises a support frame 10 and a driving part, wherein the support frame 10 is fixedly provided with a plurality of support pins 111, and the support pins 111 are arranged at intervals and used for supporting a wafer; the driving part comprises a cylinder body 210, an elastic extension tube 220 is arranged in the cylinder body 210, one end of the elastic extension tube 220 is connected with the bottom surface of the cylinder body 210 in a sealing way and communicated with an external energy source, and the other end of the elastic extension tube is connected with the support frame 10 in a sealing way and used for driving the support frame 10 to move along a first direction; the energy source is an air source or a hydraulic source, and the first direction is the expansion and contraction direction of the elastic telescopic tube 220.

In one embodiment of the present utility model, the number of the support pins 111 is 3, and the contact points between the 3 support pins 111 and the wafer are not collinear.

It should be noted that, when the pressure in elastic extension tube 220 increases, elastic extension tube 220 may be elongated; as the pressure within flexible tube 220 decreases, flexible tube 220 shortens.

Note that, the material of elastic tube 220 is not limited, and may be a metal material, a PU material, or a PVC material.

Compared with motor driving, the wafer lifting device provided by the embodiment of the utility model adopts a hydraulic source or an air pressure source for driving, does not need to design a cooling structure for cooling and radiating, and has the advantages of simple structure and low cost.

In the embodiment of the utility model, the energy source is an air source; the driving component comprises an air pressure pipeline 250, one end of the air pressure pipeline 250 is communicated with the elastic extension pipe 220, the other end of the air pressure pipeline is communicated with the air outlet end of the air charging device 260, the air outlet end of the air charging device 260 is provided with a first valve 261, and the air inlet end of the air charging device 260 is communicated with an air source. The first valve 261 is used to control the on/off of the inflator 260 and the pneumatic line 250.

The wafer lifting device provided by the embodiment of the utility model adopts pneumatic drive, and has the advantages of simple structure, cleanness, sensitive action and buffering effect compared with a hydraulic source; the air pressure in the elastic telescopic tube 220 is changed by adopting air pressure driving, so that the elastic telescopic tube 220 stretches and contracts, and the supporting frame 10 is driven to drive the supporting pin 111 to lift.

Referring to fig. 1, in the embodiment of the present utility model, the other end of the air pressure pipeline 250 is further connected to the air inlet end of the air extractor 270, and the air inlet end of the air extractor 270 is provided with a second valve 271, where the second valve 271 is used for controlling the on-off of the air extractor 270 and the air pressure pipeline 250. So configured, the evacuation efficiency of the gas in flexible bellows 220 is improved.

Referring to fig. 1, in the embodiment of the present utility model, the other end of the pneumatic pipeline 250 is connected to a three-way pipe 280 and is connected to a first end of the three-way pipe 280, an air outlet end of the air charging device 260 is connected to a second end of the three-way pipe 280, and an air inlet end of the air extracting device 270 is connected to a third end of the three-way pipe 280.

In the embodiment of the present utility model, the wafer lifting device further includes a stroke detection module and a control module, the stroke detection module is electrically connected to the control module, the first valve 261 and the second valve 271 are both electrically connected to the control module, and the stroke detection module is used for detecting the stroke of the support frame 10. By this arrangement, the air pressure closed-loop control is realized, and the automatic lifting of the support pins 111 is further realized.

In an embodiment of the present utility model, the stroke detection module includes a limit sensor 310, which is mounted on the cylinder 210 and is used for detecting the stroke of the support frame 10.

It should be noted that, the limit sensor 310 is electrically connected with the first valve 261 through a control module, and controls the flow of the gas entering the elastic extension tube 220, so as to control the stroke of the elastic extension tube 220, and further adjust the support frame 10 to drive the support pin 111 to lift; limit sensor 310 is electrically connected to second valve 271, and controls the flow of air discharged from elastic extension tube 220, thereby realizing stroke control of elastic extension tube 220, and further adjusting support frame 10 to drive support pin 111 to lift.

Referring to fig. 1, in another embodiment of the present utility model, the stroke detection module includes a grating scale sensor 320, which includes a scale grating 321 and a grating reading head 322, where the scale grating 321 is mounted on the cylinder 210, the grating reading head 322 is mounted on the support frame 10, and the scale grating 321 and the grating reading head 322 are used for detecting the stroke of the support frame 10.

It should be noted that, the grating ruler sensor 320 is electrically connected with the first valve 261 through the control module, controls the flow of the gas entering the elastic extension tube 220, realizes the stroke control of the elastic extension tube 220, and further adjusts the support frame 10 to drive the support pin 111 to lift; the grating ruler sensor 320 is electrically connected with the second valve 271, controls the flow of air discharged from the elastic telescopic tube 220, realizes the stroke control of the elastic telescopic tube 220, and further adjusts the supporting frame 10 to drive the supporting pin 111 to lift.

Referring to fig. 1, in the embodiment of the present utility model, a first flange 230 is fixedly disposed at one end of the cylinder 210 far away from the support frame 10, the first flange 230 extends outwards along the outer circumferential surface of the cylinder 210, the first flange 230 is provided with guide holes 241, the guide holes 241 are slidably connected with the support pins 111, and the guide holes 241 are in one-to-one correspondence with the support pins 111. The guide holes 241 are provided to guide the lifting of the support pins 111, prevent the support pins 111 from tilting, and enhance the lifting stability of the support pins 111.

Referring to fig. 1, in the embodiment of the present utility model, a boss 240 is fixed to the first flange 230, and a guide hole 241 is formed in the boss 240.

Referring to fig. 1, in the embodiment of the present utility model, the support frame 10 includes a frame body 110 and a flange portion 120, wherein the frame body 110 is connected to an elastic extension tube 220, the flange portion 120 protrudes outwards along the outer peripheral surface of the frame body 110, and a support pin 111 is fixedly arranged on the flange portion 120 and penetrates through the flange portion 120.

Referring to fig. 1, in an embodiment of the present utility model, the bracket body 110 has a columnar structure, the flange portion 120 has an annular structure, and the support pins 111 are arranged at intervals in the annular structure.

Referring to fig. 2, in another embodiment of the present utility model, the flange portion 120 includes at least 3 protrusions, which are spaced along the circumference of the bracket body 110, and the supporting pins 111 are respectively disposed on and penetrate through the protrusions.

In the embodiment of the present utility model, the bracket body 110 has a groove, an opening of the groove faces the cylinder 210, and an inner wall surface of the groove abuts against an outer wall surface of the cylinder 210. So set up, the recess provides the direction for the lift of support frame 10, reinforcing support frame 10 stability of going up and down.

The utility model provides a working principle of a wafer lifting device, which comprises the following steps:

the initial state is that the first valve 261 and the second valve 271 are in a closed state;

And (3) lifting control of the supporting pin 111: first valve 261 is opened, and inflation device 260 inflates elastic extension tube 220, and as the air pressure in elastic extension tube 220 increases, elastic extension tube 220 stretches, driving support frame 10 to rise; the grating ruler sensor 320 measures the position of the support frame 10 and feeds back the position to the control module, the limit sensor 310 monitors the position of the support frame 10, if the support frame 10 moves to the target position, the control module controls the first valve 261 to be closed, the inflation device 260 stops inflation, and the lifting action of the support pins 111 is completed;

And the support pin 111 is controlled to descend: opening second valve 271, evacuating device 270 evacuates air from flexible tube 220, and as the air pressure in flexible tube 220 decreases, flexible tube 220 contracts, driving support frame 10 to descend; the grating ruler sensor 320 measures the position of the support frame 10 and feeds back to the control module, the limit sensor 310 monitors the position of the support frame 10, if the support frame 10 moves to the target position, the control module controls the second valve 271 to be closed, the air extractor 270 stops extracting air, and the descending action of the support pins 111 is completed.

Although the present utility model is disclosed above, the present utility model is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the utility model, and the scope of the utility model should be assessed accordingly to that of the appended claims.

Claims

1. A wafer lift apparatus, comprising:

The support frame (10) is fixedly provided with support pins (111), and the support pins (111) are provided with a plurality of support pins and are arranged at intervals and used for supporting the wafer;

the driving component comprises a cylinder body (210), an elastic telescopic tube (220) is arranged in the cylinder body (210), one end of the elastic telescopic tube (220) is connected with the bottom surface of the cylinder body (210) in a sealing way and communicated with an external energy source, and the other end of the elastic telescopic tube is connected with the support frame (10) in a sealing way and is used for driving the support frame (10) to move along a first direction;

The energy source is an air source or a hydraulic source, and the first direction is the expansion direction of the elastic expansion pipe (220).

2. The wafer lift apparatus of claim 1, wherein the energy source is an air source; the driving part comprises an air pressure pipeline (250), one end of the air pressure pipeline (250) is communicated with the elastic telescopic pipe (220), the other end of the air pressure pipeline is communicated with the air outlet end of the air charging device (260), the air outlet end of the air charging device (260) is provided with a first valve (261), and the air inlet end of the air charging device (260) is communicated with the air source.

3. The wafer lift apparatus of claim 2, wherein the other end of the pneumatic line (250) is further connected to an air inlet end of an air extractor (270), and the air inlet end of the air extractor (270) is provided with a second valve (271).

4. The wafer lift apparatus of claim 3, wherein the other end of the pneumatic line (250) is connected to a tee pipe (280) and is connected to a first end of the tee pipe (280), the air outlet end of the air charging device (260) is connected to a second end of the tee pipe (280), and the air inlet end of the air exhaust device (270) is connected to a third end of the tee pipe (280).

5. The wafer lift apparatus of claim 4, further comprising a stroke detection module and a control module, the stroke detection module being electrically connected to the control module, the first valve (261) and the second valve (271) each being electrically connected to the control module, the stroke detection module being configured to detect a stroke of the support frame (10).

6. The wafer lift apparatus of claim 5, wherein the travel detection module includes a limit sensor (310) mounted to the cylinder (210) for detecting a travel of the support frame (10);

And/or, the stroke detection module comprises a grating ruler sensor (320) which comprises a scale grating (321) and a grating reading head (322), wherein the scale grating (321) is installed on the cylinder body (210), the grating reading head (322) is installed on the support frame (10), and the scale grating (321) and the grating reading head (322) are used for detecting the stroke of the support frame (10).

7. The wafer lifting device according to any one of claims 1 to 6, wherein a first flange (230) is fixedly arranged at one end of the cylinder body (210) away from the support frame (10), the first flange (230) extends outwards along the outer circumferential surface of the cylinder body (210), the first flange (230) is provided with a guide hole (241), the guide hole (241) is in sliding connection with the support pin (111), and the guide hole (241) corresponds to the support pin (111) one by one.

8. The wafer lift apparatus of claim 7, wherein the first flange (230) has a boss (240) fixedly disposed thereon, and the guide hole (241) is disposed on the boss (240).

9. The wafer lift apparatus of any one of claims 1-6, wherein the support frame (10) includes a support body (110) and a flange portion (120), the support body (110) is connected to the elastic extension tube (220), the flange portion (120) protrudes outward along an outer peripheral surface of the support body (110), and the support pin (111) is fixedly provided to the flange portion (120) and penetrates the flange portion (120).

10. The wafer lift apparatus of claim 9, wherein the holder body (110) has a groove, an opening of the groove faces the cylinder (210), and an inner wall surface of the groove abuts against an outer wall surface of the cylinder (210).