CN220827452U

CN220827452U - Supporting device and coating equipment

Info

Publication number: CN220827452U
Application number: CN202322649835.7U
Authority: CN
Inventors: 祁文杰; 张武; 刘群
Original assignee: Laplace Xi'an Technology Co ltd
Current assignee: Laplace Xi'an Technology Co ltd
Priority date: 2023-09-28
Filing date: 2023-09-28
Publication date: 2024-04-23
Anticipated expiration: 2033-09-28

Abstract

The utility model belongs to the technical field of silicon wafer processing, and discloses a supporting device and coating equipment. The supporting device comprises a first mounting piece, a second mounting piece and a supporting piece, wherein the second mounting piece is arranged above the first mounting piece, and the supporting piece is rotatably arranged at one end, far away from the first mounting piece, of the second mounting piece and is used for supporting the carrier plate. At the in-process that the support plate removed, support piece can provide the support to the support plate, avoids the support plate to appear bending deformation, and then ensures the safety of the silicon chip on the support plate, effectively avoids the piece to appear in the silicon chip, and then promotes the yield of silicon chip.

Description

Supporting device and coating equipment

Technical Field

The utility model relates to the technical field of silicon wafer processing, in particular to a supporting device and coating equipment.

Background

Along with the expansion of the productivity of PVD single machine, on one hand, the production takt of equipment needs to be improved, and on the other hand, a large-size carrier plate needs to be used so as to accelerate the production efficiency of silicon wafers.

At present, along with the increase of the size of the carrier plate, the span of the carrier plate is increased, so that the deformation of the carrier plate is increased, and the increase of the deformation of the carrier plate can directly influence the quality of the coating film and increase the fragment rate. The deformation of the carrier plate is usually reduced by increasing the strength of the cross beam on the carrier plate in the prior art, but the carrier plate is increased in weight due to the mode, and the cost of related matched parts is also increased.

Therefore, a supporting device and a coating apparatus are needed to solve the above problems.

Disclosure of utility model

The utility model aims to provide a supporting device and a coating device, which can have a good supporting effect on a carrier plate, effectively avoid deformation of the carrier plate, avoid silicon chip fragments and ensure coating quality.

To achieve the purpose, the utility model adopts the following technical scheme:

The support device is used for supporting the carrier plate and comprises a first mounting piece, a second mounting piece and a support piece, wherein the first mounting piece comprises a first surface and a second surface which are oppositely arranged, the first surface faces the carrier plate, the second mounting piece is arranged on the first surface, the support piece is rotatably arranged at one end, far away from the first mounting piece, of the second mounting piece, and the support piece is used for supporting the carrier plate.

As an alternative technical solution, rolling friction is provided between the support and the carrier plate.

As an alternative solution, the support is a structural member with a certain deformability.

As an alternative solution, the second mounting member can be reciprocally moved in a first direction towards or away from the first surface, wherein the first direction is a thickness direction of the carrier plate.

As an optional technical scheme, the supporting device further comprises a damping component, the damping component is arranged between the first mounting piece and the second mounting piece, and the damping component can be elastically deformed to absorb vibration of the carrier plate in the moving process along the supporting piece.

As an optional technical scheme, the damping component comprises a connecting piece and an elastic piece sleeved on the periphery of the connecting piece, one end of the connecting piece is fixedly arranged on the first mounting piece, the second mounting piece is slidably arranged on the other end of the connecting piece along the first direction, two ends of the elastic piece are respectively abutted to the first mounting piece and the second mounting piece, so that the second mounting piece can be close to or far away from the first surface in a reciprocating manner along the first direction, and the elastic piece is used for absorbing vibration of the carrier plate in the moving process along the supporting piece.

As an alternative technical scheme, the second mounting piece is provided with a first chute; the connecting piece includes the relative first end and the second end that set up in first direction, and first end fixed setting is in first installed part, and the second end is followed first direction slidable and is set up in first spout, and the second end is formed with first spacing portion, and first spacing portion is arranged in preventing that the second end from breaking away from in the first spout.

As an optional technical solution, the supporting device further includes a guide member, one end of the guide member is disposed on the first mounting member, and the second mounting member is slidably disposed on the other end of the guide member along the first direction, so that the second mounting member can be reciprocally moved along the first direction to be close to or far from the first surface.

As an alternative technical scheme, the second installation piece is provided with a second chute; the guide piece comprises a third end and a fourth end which are oppositely arranged in the first direction, the third end is fixedly arranged on the first installation piece, the fourth end is slidably arranged in the second chute along the first direction, the fourth end is provided with a second limiting part, and the second limiting part is used for limiting the fourth end to be separated from the second chute.

As an alternative technical solution, the guiding elements comprise two guiding elements, which are respectively arranged at two sides of the damping component.

The utility model also discloses a coating device which comprises a cavity and the supporting device, wherein the cavity is used for accommodating the carrier plate; the supporting device is arranged in the cavity and used for supporting the carrier plate.

As an optional technical scheme, a plurality of supporting devices are arranged, and the plurality of supporting devices are arranged at intervals along the second direction and/or the third direction; the second direction is the width direction of the carrier plate, and the third direction is the length direction of the carrier plate.

The utility model has the beneficial effects that:

According to the supporting device provided by the embodiment of the utility model, the supporting piece and the second mounting piece are arranged, the supporting piece is rotatably arranged on the second supporting piece, and when the carrier plate moves, the supporting piece is contacted with the carrier plate, and can provide support for the carrier plate so as to prevent the carrier plate from deforming.

Compared with the prior art, the coating equipment has the advantages that the advantages are the same as those of the supporting device, and the description is omitted here.

Drawings

FIG. 1 is a schematic view of a supporting device for supporting a carrier plate according to an embodiment of the present utility model;

FIG. 2 is an enlarged view of a portion of FIG. 1A;

FIG. 3 is a side view of a support device supporting a carrier plate according to an embodiment of the present utility model;

FIG. 4 is an enlarged view of a portion of B in FIG. 3;

FIG. 5 is a schematic view of a supporting device according to an embodiment of the present utility model;

fig. 6 is an exploded view of a support device according to an embodiment of the present utility model.

In the figure:

1. A support device; 2. a carrier plate;

10. A first mounting member; 11. a first surface; 12. a second surface; 13. a connection hole;

20. a second mounting member; 21. a first chute; 22. a second chute;

30. A support;

40. a shock absorbing assembly; 41. a connecting piece; 411. a first end; 412. a second end; 42. an elastic member;

43. A guide member; 431. a third end; 432. a fourth end; 433. and a first limit part.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1 to 4, in this embodiment, a plating apparatus is provided, which includes a cavity for accommodating a carrier plate 2 and a supporting device 1, where the supporting device 1 is mounted on the cavity, and the supporting device 1 is used for supporting the carrier plate 2. The support beam is arranged on one surface of the carrier plate 2 facing the support device 1, the support device 1 provides support for the support beam, the bending deformation phenomenon of the carrier plate 2 is avoided, the phenomenon of fragments of silicon wafers on the carrier plate 2 is avoided, the safety of the silicon wafers in the film coating process is ensured, and the wafer forming rate of the silicon wafers is improved.

In this embodiment, since the size of the carrier plate 2 is large, a plurality of supporting devices 1 are provided in the plating apparatus, and the number and positions of the supporting devices 1 can be specifically set according to actual use. For example, the plurality of supporting devices 1 are arranged at intervals along the second direction, while the plurality of supporting devices 1 are arranged at intervals along the third direction; or a plurality of supporting devices 1 are arranged at intervals along the second direction; or a plurality of supporting means 1 are arranged at intervals along the third direction. The second direction is the width direction of the carrier plate 2, and the third direction is the length direction of the carrier plate 2. Optionally, when the plurality of supporting devices 1 are arranged, the distances between two adjacent supporting devices 1 are the same, so that the supporting of the carrier plate 2 is uniform, and the stability of the carrier plate 2 is further ensured.

As shown in fig. 5, the supporting device 1 includes a first mounting member 10, a second mounting member 20 and a supporting member 30, where the first mounting member 10 includes a first surface 11 and a second surface 12 that are disposed opposite to each other, the first surface 11 faces the carrier plate 2, the first mounting member 10 is provided with a connection hole 12, and the supporting device 1 is fixed in a cavity of the coating apparatus through the connection hole 12, so that a position of the supporting device 1 is fixed, and stability during use of the supporting device 1 is ensured. The second mounting member 20 is disposed on the first surface 11, the supporting member 30 is rotatably mounted on an end of the second mounting member 20 away from the first mounting member 10, and the supporting member 30 is used for supporting the carrier 2. The support 30 rotates relative to the second mount 20 when the support 30 is subjected to the friction of the carrier plate 2.

Referring to fig. 3, 4 and 5, in the actual working process, the support member 30 is supported below the carrier plate 2, when the carrier plate 2 is driven by the external moving device to move, the support member 30 can be always in contact with the carrier plate 2, and the support member 30 can rotate relative to the carrier plate 2, so that the carrier plate 2 can move smoothly, and meanwhile, the support member 30 is supported below the carrier plate 2, so that deformation of the carrier plate 2 can be avoided, and further, the silicon wafer on the carrier plate 2 is prevented from being damaged due to the deformation of the carrier plate 2.

In some embodiments, there is rolling friction between the support 30 and the carrier plate 2. For example, a roller is used for the support 30. The rolling friction is adopted between the rollers and the carrier plate 2, so that the existence of the supporting piece 30 can not influence the normal movement of the carrier plate 2, the abrasion of the carrier plate 2 and the supporting piece 30 can be reduced, the service lives of the supporting piece 30 and the carrier plate 2 are further ensured, and the cost is reduced.

In some embodiments, the support 30 is a structural member having a certain deformability. For example, the supporting member 30 is made of polyurethane, which not only can provide support for the carrier plate 2, but also can buffer the vibration of the carrier plate 2 during the movement of the carrier plate 2, so as to further ensure the safety of the silicon wafer on the carrier plate 2 during the movement of the carrier plate 2. Of course, the support 30 is not limited to polyurethane, and in other embodiments, the support 30 may be made of other materials having deformation capabilities, such as: rubber, etc., and are not described in detail herein.

Referring to fig. 5 and 6, in actual use, if the carrier plate 2 is subjected to excessive vibration during movement, the support device 1 further includes a shock absorbing assembly 40 to ensure movement stability of the carrier plate 2. The damper 40 is disposed between the second mounting member 20 and the first mounting member 10, and the damper 40 can be elastically deformed, so as to buffer the vibration of the carrier 2, where the second mounting member 20 can be reciprocally moved along the first direction to approach or separate from the first surface 11. In this embodiment, the supporting device 1 has a buffering effect, and ensures the stability of the movement of the carrier plate 2.

Referring to fig. 5, in some embodiments, the shock absorbing assembly 40 includes a connecting member 41 and an elastic member 42 sleeved on the outer periphery of the connecting member 41, one end of the connecting member 41 is fixedly connected to the first mounting member 10, the second mounting member 20 is slidably disposed on the other end of the connecting member 41 along the first direction, two ends of the elastic member 42 respectively abut against the first mounting member 10 and the second mounting member 20, so that the second mounting member 20 can approach or separate from the first surface 11 along the first direction, and the elastic member 42 is used for buffering the shock of the carrier plate 2. Alternatively, in the present embodiment, the elastic member 42 is a spring.

Referring to fig. 6, illustratively, the second mounting member 20 is provided with a first sliding slot 21, the connecting member 41 includes a first end 411 and a second end 412 disposed opposite to each other in a first direction, the first end 411 is fixedly disposed on the first mounting member 10, and the second end 412 is slidably disposed in the first sliding slot 21 along the first direction. The tip of second end 412 is provided with first spacing portion, and the size of first spacing portion is greater than the groove diameter of first spout 21, and first spacing portion is arranged in preventing that second end 412 from breaking away from first spout 21, ensures the normal operating condition of second installed part 20, avoids second installed part 20 to deviate from second end 412 of connecting piece 41, influences the shock attenuation effect. In this embodiment, the second mounting member 20 slides down along the connecting member 41, so that the second mounting member 20 compresses the elastic member 42, and the elastic member 42 is used to absorb the vibration of the carrier plate 2 during the movement along the supporting member 30, thereby ensuring the stability of the movement of the carrier plate 2.

It should be noted that, the shock absorbing assembly 40 is not limited to the above structure, and in other embodiments, the shock absorbing assembly 40 may be other components with a shock absorbing effect, for example: hydraulic buffer shock absorber etc. hydraulic buffer shock absorber sets up between first installed part 10 and second installed part 20, and when the vibrations of carrier plate 2 were great, carrier plate 2 was transmitted vibrations to support piece 30, and support piece 30 is transmitted vibrations to second installed part 20, and hydraulic buffer shock absorber can absorb the vibrations that second installed part 20 transmitted, avoids carrier plate 2 to appear great vibrations, and then ensures the safety of silicon chip.

In some embodiments, with continued reference to fig. 6, the support device 1 further includes a guide member 43, one end of the guide member 43 is disposed on the first mounting member 10, and the second mounting member 20 is slidably disposed on the other end of the guide member 43 along the first direction, so that the second mounting member 20 can reciprocally move in the first direction toward or away from the first surface 11. The guide member 43 can provide a guiding function for the movement of the second mounting member 20, and promote the smoothness of the movement of the second mounting member 20 when the second mounting member 20 moves back and forth in the first direction. Alternatively, two guide members 43 are provided, and two guide members 43 are provided on both sides of the damper assembly 40, respectively.

Referring to fig. 6, illustratively, the second mounting member 20 is provided with a second chute 22, the guide member 43 includes a third end 431 and a fourth end 432 opposite to each other in the first direction, the third end 431 is fixedly disposed on the first mounting member 10, and the fourth end 432 is slidably disposed on the second chute 22 along the first direction. The end of the fourth end 432 is provided with a second limiting portion 433, the size of the second limiting portion 433 is greater than the groove diameter of the second chute 22, and the second limiting portion 433 is used for preventing the fourth end 432 from separating from the second chute 22, so as to ensure the stability of the connection between the second mounting member 20 and the first mounting member 10, and ensure the damping effect of the damping assembly 40.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. Support device for supporting a carrier plate (2), characterized in that the support device (1) comprises:

a first mounting (10) comprising a first surface (11) and a second surface (12) arranged opposite each other, the first surface (11) facing the carrier plate (2);

a second mounting member (20) provided on the first surface (11);

The support piece (30) is rotatably arranged at one end, far away from the first mounting piece (10), of the second mounting piece (20), and the support piece (30) is used for supporting the carrier plate (2).

2. Support device according to claim 1, characterized in that there is rolling friction between the support (30) and the carrier plate (2).

3. Support device according to claim 1, characterized in that the support (30) is a structural member with a certain deformability.

4. Support device according to claim 1, wherein the second mounting member (20) is reciprocally movable towards or away from the first surface (11) in a first direction, wherein the first direction is the thickness direction of the carrier plate (2).

5. The support device according to claim 4, wherein the support device (1) further comprises a shock absorbing assembly (40), the shock absorbing assembly (40) being arranged between the first mounting member (10) and the second mounting member (20), the shock absorbing assembly (40) being capable of undergoing elastic deformation to absorb shocks occurring during movement of the carrier plate (2) along the support member (30).

6. The supporting device according to claim 5, wherein the damping component (40) comprises a connecting piece (41) and an elastic piece (42) sleeved on the periphery of the connecting piece (41), one end of the connecting piece (41) is fixedly arranged on the first mounting piece (10), the second mounting piece (20) is slidably arranged on the other end of the connecting piece (41) along the first direction, two ends of the elastic piece (42) are respectively abutted against the first mounting piece (10) and the second mounting piece (20), so that the second mounting piece (20) can be close to or far away from the first surface (11) in a reciprocating manner along the first direction, and the elastic piece (42) is used for absorbing vibration generated in the moving process of the carrier plate (2) along the supporting piece (30).

7. The support device according to claim 6, wherein the second mounting member (20) is provided with a first chute (21); the connecting piece (41) comprises a first end (411) and a second end (412) which are oppositely arranged in the first direction, the first end (411) is fixedly arranged in the first mounting piece (10), the second end (412) is slidably arranged in the first sliding groove (21) along the first direction, the second end (412) is provided with a first limiting part, and the first limiting part is used for preventing the second end (412) from being separated from the first sliding groove (21).

8. The support device according to claim 5, wherein the support device (1) further comprises a guide member (43), one end of the guide member (43) being provided to the first mounting member (10), and the second mounting member (20) being slidably provided to the other end of the guide member (43) in the first direction so that the second mounting member can be reciprocally moved in the first direction toward or away from the first surface.

9. The support device according to claim 8, wherein the second mounting member (20) is provided with a second chute (22); the guide piece (43) comprises a third end (431) and a fourth end (432) which are oppositely arranged in the first direction, the third end (431) is fixedly arranged in the first installation piece (10), the fourth end (432) is slidably arranged in the second sliding groove (22) along the first direction, the fourth end (432) is provided with a second limiting part (433), and the second limiting part (433) is used for preventing the fourth end (432) from being separated from the second sliding groove (22).

10. Support device according to claim 8, wherein said guides (43) comprise two, two of said guides (43) being provided on either side of said damper assembly (40).

11. Coating device comprising a cavity, characterized in that it further comprises a support means (1) according to any one of claims 1 to 9, said cavity being intended to house said carrier plate (2); the support device (1) is arranged in the cavity, and the support device (1) is used for supporting the carrier plate (2).

12. Coating apparatus according to claim 11, characterized in that the support means (1) are provided in a plurality, a plurality of the support means (1) being arranged at intervals in the second direction and/or in the third direction; the second direction is the width direction of the carrier plate (2), and the third direction is the length direction of the carrier plate (2).