CN220552969U

CN220552969U - Universal meter simulation system of testing machine

Info

Publication number: CN220552969U
Application number: CN202321526616.3U
Authority: CN
Inventors: 刘青贺; 吴玉春; 刘彩虹
Original assignee: Hangzhou Changchuan Technology Co Ltd
Current assignee: Hangzhou Changchuan Technology Co Ltd
Priority date: 2023-06-14
Filing date: 2023-06-14
Publication date: 2024-03-01
Anticipated expiration: 2033-06-14

Abstract

The application relates to a test machine universal meter analog system, include: the reference source module is used for connecting at least one service board card of the testing machine; the ADC module is used for being connected with at least one service board card of the tester; the controller is connected with the reference source module and the ADC module; the communication module is connected with the controller and the upper computer; the reference source module outputs voltage calibration service modules on the service board cards with different gears; the controller receives sampling data obtained by collecting output data of the service board card by the ADC module, and uploads the sampling data to the upper computer through the communication module. The service board card of the tester is calibrated through the reference source module and the ADC module, the connection mode with the service board card does not need to be changed frequently, a plurality of service board cards can be calibrated in parallel at the same time, and the calibration efficiency is improved.

Description

Universal meter simulation system of testing machine

Technical Field

The application relates to the technical field of equipment calibration, in particular to a universal meter simulation system of a testing machine.

Background

The automatic semiconductor test includes utilizing the tester to detect various parameter indexes of semiconductor device and eliminating defective products to control the outgoing quality of semiconductor device. The tester comprises a plurality of service boards, when the tester tests the chip, data (voltage or current) can be output, and in order to ensure the accuracy of the output data and prevent the output data from being too large or too small, the tester needs to calibrate the data and then test the semiconductor device, so that the accuracy of the output data can be ensured to prevent the semiconductor device from being damaged, and the like.

The traditional test machine calibration mode is to externally calibrate each service board card of the test machine one by one through an external universal meter, and each service board card tested needs to change the connection mode of the universal meter, so that the time and labor are consumed, and the defect of low calibration efficiency exists.

Disclosure of Invention

In view of the foregoing, it is desirable to provide a test machine multimeter simulation system that improves calibration efficiency.

A test machine multimeter simulation system comprising:

the reference source module is used for connecting at least one service board card of the testing machine;

an ADC (analog-to-Digital Conversion) module for connecting to at least one service card of the tester;

the controller is connected with the reference source module and the ADC module;

the communication module is connected with the controller and the upper computer; the reference source module outputs voltage calibration service modules on the service board cards with different gears; and the controller receives sampling data obtained by collecting the output data of the service board card by the ADC module, and uploads the sampling data to the upper computer through the communication module.

In one embodiment, the reference source module includes a voltage reference source and a resistance reference source.

In one embodiment, the voltage reference source is a reference source having a plurality of output voltages and the resistive reference source is a reference source having a plurality of output resistances.

In one embodiment, the analog system of the multimeter of the test machine further comprises a DAC (Digital-to-Analogue Conversion) module, wherein the DAC module is connected with the controller and is further used for being connected with at least one service board card of the test machine.

In one embodiment, the reference source module, the ADC module, and the DAC module are all connected to the service board card through a back board of the tester.

In one embodiment, the test machine multimeter simulation system further comprises a temperature detection module connected with the controller, wherein the temperature detection module monitors the temperature of the test machine multimeter simulation system and/or the service board card and sends monitoring temperature data to the controller, and the controller controls the reference source module, the ADC module and the DAC module to stop working when the monitoring temperature data is greater than a set temperature threshold.

In one embodiment, the controller is connected to the temperature detection module via an I2C (Inter-Integrated Circuit) bus.

In one embodiment, the test machine multimeter simulation system further comprises a memory module coupled to the controller.

In one embodiment, the controller is connected to the ADC module, the DAC module, the memory module, and the communication module via an SPI (Serial Peripheral Interface ) bus.

In one embodiment, the controller is connected to the reference source module through an IO (input/output) port.

According to the universal meter simulation system of the tester, the reference source module and the ADC module are connected with at least one service board card of the tester, and the reference source module outputs voltage of different gears to calibrate the service modules on the service board card; the controller receives sampling data obtained by collecting output data of the service board card by the ADC module, and uploads the sampling data to the upper computer through the communication module. The service board card of the tester is calibrated through the reference source module and the ADC module, the connection mode with the service board card does not need to be changed frequently, a plurality of service board cards can be calibrated in parallel at the same time, and the calibration efficiency is improved.

Drawings

FIG. 1 is a block diagram of a test machine multimeter simulation system in one embodiment;

FIG. 2 is a block diagram of another embodiment of a test machine multimeter simulation system;

FIG. 3 is a schematic diagram of an external calibration flow for a multimeter simulation system of a test machine in one embodiment;

FIG. 4 is a schematic diagram of a self-calibration flow of a multimeter simulation system of a test machine in one embodiment.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

It is to be understood that in the following embodiments, "connected" is understood to mean "electrically connected", "communicatively connected", etc., if the connected circuits, modules, units, etc., have electrical or data transfer between them.

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and the like, specify the presence of stated features, integers, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, operations, elements, components, or groups thereof. Also, the term "and/or" as used in this specification includes any and all combinations of the associated listed items.

In the current calibration process of the testing machine, a user needs to be externally connected with the universal meter for calibration, the large workload of a user can be increased when the universal meter is connected (four lines or two lines are switched for data calibration), the universal meter occupies the use space of equipment, data calibration can only be carried out on one service board in each calibration, more service boards consume more calibration time, the productivity of a testing chip of the testing machine is reduced, and the production efficiency is influenced.

Aiming at the problems that the current test machine board card has overlong calibration time, a user needs to manually connect a multimeter connecting wire and the like during each calibration, the multimeter occupies large space, the calibration precision is low and the like, the application provides a test machine multimeter simulation system, a quasi-source module and an ADC module are connected with at least one service board card of a test machine, and a reference source module outputs service modules on voltage calibration service board cards with different gears; the controller receives sampling data obtained by collecting output data of the service board card by the ADC module, and uploads the sampling data to the upper computer through the communication module. The service board card of the tester is calibrated through the reference source module and the ADC module, the connection mode with the service board card does not need to be frequently changed, the parallel calibration of a plurality of service board cards can be supported, the calibration efficiency is improved, the calibration precision is improved for the tester to calibrate at any time, the operation of externally connecting a universal meter by a user is reduced, the service board card calibration time is shortened, and the space occupied by the universal meter can be saved.

In one embodiment, as shown in fig. 1, a universal meter simulation system of a testing machine is provided, which includes a reference source module 110, an ADC module 120, a controller 130 and a communication module 140, where the reference source module 110 and the ADC module 120 are used for connecting at least one service board card of the testing machine, the controller 130 is connected with the reference source module 110 and the ADC module 120, and the communication module 140 is connected with the controller 130 and an upper computer. The reference source module 110 outputs voltage calibration service modules on the service board cards with different gears; the controller 130 receives the sampled data obtained by the ADC module 120 collecting the output data of the service board card, and uploads the sampled data to the host computer through the communication module 140.

In particular, the service module of the service card may include at least one of a DAC, an ADC, and a resistor. The controller 130 may be any programmable logic device such as FPGA (Field Programmable Gate Array ), CPU (Central Processing Unit, central processing unit), MCU (Micro Control Unit ), etc., and in this embodiment, the controller 130 is an MCU. The MCU can be embedded on a communication board card of the testing machine, so that the space is saved.

It will be appreciated that the type of reference source module 110 is also not unique, and that, for example, as shown in FIG. 2, reference source module 110 may include, in particular, a voltage reference source 112 and a resistance reference source 114. In this embodiment, the voltage reference source 112 is a reference source having a plurality of output voltages, and the resistance reference source 114 is a reference source having a plurality of output resistances. Specifically, the voltage pins of the voltage reference source 112 include +7v pin, +5v pin, +2.5v pin, +1.25v pin, 0V pin, -1.25v pin, -2.5v pin, -5V pin and-7V pin, and the resistance reference source 114 includes more than two resistors, which may have different resistance values of part of the resistors and the same resistance value of part of the resistors; the resistances of the resistors may be different from each other. Further, each voltage pin of the voltage reference source 112 may be connected to the controller 130 through a corresponding control switch, and each resistor pin of the resistor reference source 114 may be connected to the controller 130 through a corresponding control switch. By adjusting the on-off of the control switches, the switchable voltage reference source 112 outputs different voltages to the service board, and the switchable resistance reference source 114 switches different resistances into the service board. The type of the control switch is not unique, and in this embodiment, the control switch may be a relay, and the on-off switch is switched according to the instruction of the controller 130.

In one embodiment, as shown in FIGS. 1 and 2, the tester multimeter analog system further comprises a DAC module 150, the DAC module 150 being coupled to the controller 130 and further configured to couple to at least one service board card of the tester.

Specifically, when the service board card data calibration is performed, power supplies with different gears are required to be externally connected, and service modules on the service board are calibrated by outputting voltage with different gears through the power supplies. In this application, the reference source module 110 and the DAC module 150 can replace the function of an external power supply, provide voltages with different gear positions for each service board card, and provide the same voltages for a plurality of service boards during calibration, so as to be used for synchronous calibration. The ADC module 120 collects output data (voltage or current) of each service board card, and reports the collected data to a service layer of the upper computer, so as to facilitate data calibration operation.

The reference source module 110, the ADC module 120 and the DAC module 150 may be directly connected or indirectly connected to a service board card of the testing machine. In this embodiment, the reference source module 110, the ADC module 120 and the DAC module 150 are all connected to the service board card through the back board of the tester. As shown in fig. 1 and fig. 2, the back board is connected with relevant modules of the service board card and the multimeter simulation system of the testing machine through a high-end output line HF, a high-end measuring line HS, a low-end measuring line LS, a protection line GUARD, an output testing line FM and a GTX bus, so as to perform data transmission and signal transmission.

The communication module 140 may be directly or indirectly connected to the host computer. In this embodiment, the communication module 140 is connected to the FPGA through an SPI bus, the FPGA is connected to the COM-E module through a PCIE bus, and the COM-E module is connected to the host computer through the internet. In addition, the backboard is also connected with a universal meter through a high-end output line HF, a high-end measuring line HS, a low-end measuring line LS and a protection line GUARD, and the universal meter is connected with a COM-E module through a GPIB bus.

In the multimeter simulation system of the testing machine, the reference source module 110 and the ADC module 120 are connected with at least one service board card of the testing machine, and the reference source module 110 outputs the service modules on the voltage calibration service board cards with different gears; the controller 130 receives the sampled data obtained by the ADC module 120 collecting the output data of the service board card, and uploads the sampled data to the host computer through the communication module 140. The service board card of the tester is calibrated through the reference source module 110 and the ADC module 120, the connection mode with the service board card is not required to be changed frequently, a plurality of service board cards can be calibrated in parallel at the same time, and the calibration efficiency is improved.

In one embodiment, the test machine multimeter simulation system further comprises a temperature detection module 160 connected to the controller 130, the temperature detection module 160 monitors the temperature of the test machine multimeter simulation system and/or the service board card, sends monitoring temperature data to the controller 130, and controls the reference source module 110, the ADC module 120 and the DAC module 150 to stop working when the monitoring temperature data is greater than a set temperature threshold.

Specifically, the specific value of the set temperature threshold is not unique, and can be set according to actual needs. A temperature detection module 160 is provided on the multimeter analog system and/or the service card for temperature monitoring. For example, when the multimeter simulation system works, the temperature monitoring can be performed on the power supply and the position on the board where heat is easy to generate, the temperature detection module 160 monitors the temperature change of the board during the operation in real time, when the temperature value is higher than the alarm threshold, the controller 130 cuts off the working state, and can report abnormal information to the upper computer to prompt a user for specific reasons, at the moment, the user wants to continue to use the device, the system does not respond at all, and at the moment, the system is prompted to have too high temperature, and in the temperature cooling, when the temperature value is reduced to be within a safe range, the system can be reused.

In one embodiment, the tester multimeter simulation system further comprises a memory module 170 coupled to the controller 130. The storage module 170 may be a Flash memory or other types of memory. In order to ensure the measurement accuracy of the multimeter simulation system, the multimeter simulation system also supports a real-time automatic calibration mechanism, and stores calibrated data parameters in a storage module to wait for the next automatic calibration.

It will be appreciated that the specific manner of connection of the controller 130 to other associated modules is not unique. In one embodiment, as shown in fig. 1 and 2, the controller is connected to the reference source module 110 through an IO port. The controller 130 is also connected to the temperature detection module 160 via an I2C bus. Further, the controller 130 is connected to the ADC module 120, the DAC module 150, the memory module 170, and the communication module 140 through an SPI bus.

Specifically, as shown in fig. 3 and 4, the processing mechanism of the test machine multimeter simulation system includes the steps of:

s1, providing a data acquisition function for each service board card of the tester.

The universal meter has the functions of measuring voltage and current, the ADC module and the DAC module of the universal meter analog system are combined to provide the functions of measuring voltage and current, the voltage measurement can realize the positive and negative 13V voltage range, the current gear can be switched from 200mA to 5uA and the like, and the requirements of voltage and current measurement are met.

When the multimeter simulation system measures the service board card signal, the voltage and current signals output by the service board card are collected through the relevant channels in the high-end output line HF, the high-end measuring line HS, the low-end measuring line LS and the output measuring line FM of the backboard, and the obtained voltage signals are transmitted to the upper computer, and the upper computer performs calibration processing on the obtained voltage signals.

S2, providing different power rails for the service board card.

When the service board card is calibrated, an external power supply is required to calibrate the service module of the service board card. In the universal meter simulation system, the reference source module and the DAC module can provide voltage signals with different gears and are used for supporting a service board card to calibrate a self calibration link; the reference source module can provide voltage signals of different gears and ensure the stability of voltage output; the DAC module can randomly switch positive and negative 13V voltage signals, and data self-calibration can be carried out by the aid of the reference source module and the ADC module to ensure the output voltage accuracy in order to ensure the output stability of the voltage signals.

In addition, the controller can also collect the voltage signal of the DAC module by using the ADC module and calibrate the voltage signal of the reference source module, so that the voltage signal output by the DAC module is more stable.

S3, monitoring the temperature of the multimeter simulation system.

When the universal meter simulation system works, the DAC module and the reference source module generate heat, in order to prevent the system from working for too long, the temperature rise is caused to influence the stability and the service life of the system, and when the temperature value of the system exceeds a set threshold value, all the working modules on the system are cut off to perform power-down processing, and abnormal conditions of the system are reported to give an alarm, so that a user is informed that the universal meter simulation system is too high in working environment, equipment is powered down emergently, and the system works after waiting for cooling for a period of time.

S4, automatically calibrating a multimeter simulation system.

The multimeter simulation system provides functions of measurement, voltage signal output and the like for the service board card when the chip measurement is not performed by the tester. In order to ensure the accuracy of the self-precision of the multimeter simulation system, the self-calibration work is performed after the system is powered on, a user is notified of the self-calibration completion, calibration data is written into the memory module, and the next self-calibration operation is waited. When a user needs to use the multimeter simulation system, the system exits from the self-calibration mode, is switched to the last self-calibration passing mode, and starts to provide the measurement function and the voltage signal output function of the multimeter for the service board card.

S5, the multimeter simulates a self-calibration voltage signal output function of the system.

The multimeter simulation system is provided with 9 paths of different voltage signals, can support the output of fixed voltage signals and provides voltage signals required by a service board card; meanwhile, the DAC module is supported to be used for outputting voltage signals of different gears; the output voltage signal can support the calibration of external instruments and meters, and can also adopt the measurement function of the system to calibrate.

S6, self-calibrating a voltage measurement function of the multimeter analog system.

The universal meter simulates a system voltage measurement function, can calibrate by means of an external signal source, and can calibrate by means of a voltage signal output function; the ADC module of the multimeter analog system can measure voltage signals and can also meet the measurement of current signals. After the self-calibration mode is started, the ADC module performs calibration by means of a voltage reference source, 9 paths of different voltage signals are respectively input into the ADC module, and the measurement accuracy of the ADC module is improved by using the different voltage signals; the ADC module can also be used for measuring different voltage signals output by the DAC module, and voltage signal sources with different gears are output by the DAC module, so that measurement precision in different ranges can be met, and measured error values are compensated to output parameters of the DAC module, so that the precision is more accurate.

S7, self-calibrating a current measurement function of the multimeter analog system.

The universal meter simulates a current measurement function of a system, the current measurement function can be calibrated by means of a resistance reference source, voltage signals are output by the DAC module after calibration and act on the resistance reference source, the DAC module outputs voltage signals of different gears, measurement of current signals of different gears is met, a measured current compensation value is compensated to a current measurement channel, and therefore accuracy of the current measurement function meets measurement indexes.

After all self-calibration flows are completed, the measurement precision of the multimeter simulation system meets the requirements, and the precision conditions of voltage measurement, current measurement and voltage signal output are met.

Above-mentioned test machine universal meter analog system has following advantage:

1. the user does not need to connect the universal meter to calibrate the business board card after using the testing machine, thereby saving the equipment space occupied by the universal meter.

2. The multimeter simulation system can perform self-calibration at any time, ensure self measurement and output precision, and can provide accurate different voltage values for each business board card.

3. The multimeter simulation system can detect own abnormal conditions, and the problems of precision reduction and the like caused by overhigh temperature are prevented.

4. The method provides accurate voltage values for service board card calibration, meets the power supply rails of different gears, and realizes switching of any voltage values.

5. When the service boards need to use the same voltage, the multimeter simulation system can simultaneously provide the same voltage for a plurality of service boards, and the calibration efficiency and the calibration precision are improved.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples merely represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the utility model. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims

1. A test machine multimeter simulation system comprising:

the ADC module is used for being connected with at least one service board card of the testing machine;

2. The tester multimeter analog system of claim 1 wherein the reference source module comprises a voltage reference source and a resistance reference source.

3. The tester multimeter analog system of claim 2, the voltage reference source being a reference source having a plurality of output voltages, the resistance reference source being a reference source having a plurality of output resistances.

4. The tester multimeter analog system of claim 1 further comprising a DAC module coupled to the controller and further configured to couple to at least one service board card of the tester.

5. The tester multimeter analog system of claim 4 wherein the reference source module, the ADC module, and the DAC module are each coupled to the service board card through a back plane of the tester.

6. The system of claim 4, further comprising a temperature detection module coupled to the controller, wherein the temperature detection module monitors a temperature of the system and/or the service board, and sends monitored temperature data to the controller, wherein the controller controls the reference source module, the ADC module, and the DAC module to stop operating when the monitored temperature data is greater than a set temperature threshold.

7. The test machine multimeter simulation system of claim 6 wherein said controller is coupled to said temperature detection module via an I2C bus.

8. The test machine multimeter simulation system of claim 4 further comprising a memory module coupled to the controller.

9. The tester multimeter analog system of claim 8, wherein the controller is coupled to the ADC module, the DAC module, the memory module, and the communication module via an SPI bus.

10. The test machine multimeter simulation system of any one of claims 1-9 wherein said controller is connected to said reference source module through an IO port.