CN2138242Y

CN2138242Y - SF6 air filling, recovering and purifying apparatus

Info

Publication number: CN2138242Y
Application number: CN 92218410
Authority: CN
Inventors: 陆剑飞
Original assignee: Individual
Current assignee: Individual
Priority date: 1992-07-21
Filing date: 1992-07-21
Publication date: 1993-07-14
Anticipated expiration: 2002-07-21

Abstract

The utility model relates to an SF6 gas charging, discharging, recovering and purifying device which is gas charging, discharging, recovering and purifying equipment. The device makes use of the method of combining flowing purification and storage purification, so the purification effect is good, and gas after recovery and purification can be reused directly. An air outlet of a vacuum air pump is provided with a purification device, so environmental contamination and the wastage of SF6 can be reduced. An upper high-pressure gas storage tank and a lower high-pressure gas storage tank are connected through pipelines and valves. A copper mesh drum is arranged in the upper high-pressure gas storage tank, and an F3 adsorbent and an electric heater are arranged in the copper mesh drum. Besides adopting a molecular sieve filter, the purification of pipeline flowing gas adopts an A stage slight oil fog filter, a T stage main pipeline filter, an adsorption type dryer, etc.

Description

SF6 air filling, recovering and purifying apparatus

The utility model belongs to the equipment that a kind of gas charges and discharge, reclaims and purifies, particularly SF ₆The device that gas charges and discharge, reclaims and purifies.

Have in the same category of device of homemade or introduction SF now ₆Gas cleaning is with the molecular sieve filter that purifies in the pipe-line system liquid gas to be carried out adsorption cleaning, through the SF of such adsorption cleaning ₆Gas does not generally reach the requirement of directly using once more, is directly entered the residual SF of atmosphere by vacuum pump ₆Often contain SO in the gas ₂With fluorides such as HF, both befouling environment had been wasted a part of SF again ₆Gas.

The purpose of this utility model is: a kind of SF is provided ₆Gas charges and discharge, the design proposal of recovery and purification plant, this device adopts and flows purification and store the method that purification combines, and purifying effect is relatively good, and the gas behind the reclaiming clean can directly reuse, the vacuum pump relief opening is provided with purification plant, has reduced pollution and SF to environment ₆The waste of gas.

Specific embodiments of the present utility model is: SF ₆Gas charges and discharge, recovery and purification plant be by container, valve.Compressor, vacuum pump, heat exchanger, high pressure tank and molecular sieve filter are connected with pipeline, the air outlet of vacuum pump is parallel with purification plant and ball valve, there is pipeline to be connected between two high pressure tanks up and down, the copper mesh inner core is housed in the last high pressure tank, in the tube F is housed with valve ₃Sorbent and electric heater.Following high pressure tank and compressor chamber are in series with valve with pipeline, heat exchanger, the little oil mist filter of A level, T level main line filter, be in series with valve with pipeline between container and the compressor, buffer, molecular sieve filter, valve, there is valve to be connected between the main line filter of the outlet of last high pressure tank and vacuum pump outlet purification plant with pipeline, use pipeline between container and vacuum pump suction port, valve is connected with electromagnetism band gas charging valve, the electromagnetism band gas charging valve and the compressor chamber of vacuum pump suction port have pipeline to be connected with valve, there is pipeline to be connected between following high pressure tank and compressor inlet, has valve to be connected between the little oil mist filter outlet of A level and the molecular sieve filter with pipeline with valve.The purification plant of vacuum pump air outlet is in series with pipeline by ball valve, T level in-line filter, absorption drier, buffer, ball valve and air pump.Last high pressure tank is 2/3 of a following high-pressure gas tank volume.The volume of copper mesh inner core is 1/2 of a last high-pressure gas tank volume.Be connected with one-way valve with pipeline between the sealing of the tank filler sleeve of compressor, crankcase and one-level suction port.

The utility model has the advantages that: the relief opening of vacuum pump is provided with purification plant, prevents or has reduced the pollution of discharging to environment; In the last high pressure tank F is housed ₃Sorbent has adopted the little oil mist filter of A level, T level main line filter, buffer in the pipeline, circulation purifies with storing purification and combines, and has improved purifying effect; Adopt LSHC serial model No. compressor, improved compression efficiency, volume is little, in light weight, and noise is low, and compressor has been advanced improvement, has prevented SF in the crankcase ₆Gas excessive reduced the pollution and the SF of environment ₆The waste of gas.

Below in conjunction with drawings and Examples the utility model is further specified:

Fig. 1, SF ₆Gas charges and discharge and reclaims and the purification plant diagrammatic sketch,

Fig. 2, compressor diagrammatic sketch,

Fig. 3, molecular sieve filter diagrammatic sketch,

Fig. 4, buffer diagrammatic sketch,

Fig. 5, heat exchanger diagrammatic sketch,

Among the figure: 1, container to be recycled or charge into, 2,4,5,9,11,13,25,27, Bellows valve, 3,16,19,20,21,36, ball valve, 6,17, buffer, 7, molecular sieve filter, 8,12, pressure gauge, 10, compressor, 14, air pump, 15, absorption drier, 18,30, T level main line filter, 22, vacuum pump, 23, electromagnetism band gas charging valve, 24, McLeod gage, 26,31, safety valve, 28, heat exchanger, 29, the little oil mist filter of A level, 32, last high pressure tank, 33, the copper mesh inner core, 34, electric heater, 35, F ₃Sorbent, 37, level meter, 38, high pressure tank down, 39, relief opening, 40, suction port, 41, tank filler sleeve, 42, connecting tube, 43, crankcase, 44, import, 45, outlet, 46, urceolus, 47, inner core, 48, molecular sieve, 49, wire netting, 50, advance or export, 51, wire netting, 52, stack shell, 53, outer tube, 54, radiating fin, 55, advance or export, 56, interior pipe.

SF ₆Gas fully reclaim and the purification plant (see figure 1) by container 1, buffer 6, molecular sieve filter 7, compressor 10, T level main line filter 30, the little oil mist filter 29 of A level, heat exchanger 28, last high pressure tank 32, following high pressure tank 38, vacuum pump 22, T level main line filter 18, absorption drier 15, buffer 17,

air pump

14 and 8 Bellows valves, 6 ball valves, an electromagnetism band gas charging valve, two safety valves, connect with pipeline by connecting means shown in Figure 1, the serial model No. of compressor is LSHC20B or 30A, 40A, vacuum pump is a 2X series mechanical vacuum pump, and last high pressure tank is 2/3 of a following high-pressure gas tank volume.Copper mesh inner core 33 is housed in the last high pressure tank, and the volume of copper mesh inner core is to go up 1/2 of high-pressure gas tank volume, in the copper mesh inner core F is housed ₃Sorbent 35 and electric heater 34, electric heater 34 models are SRS4, connect the 380V power supply through power line, rise and store catharsis, the model of Bellows valve is WJW24, and buffer is that steel pipe is made (see figure 4), and pipe is through φ 133 * 5mm, long 300mm, air pump is the DLB-65 type, and safety valve adopts the AHW type, and electromagnetism band gas charging valve adopts the DDC-JQ type, molecular sieve filter is seen Fig. 3, and heat exchanger is seen Fig. 5.

Working procedure of the present utility model is:

1, device proper vacuumizes: open valve 21, start vacuum pump 22, open electromagnetism band gas charging valve 23, open valve 9,11,13, device proper is vacuumized reach 13.3 handkerchiefs, close above-mentioned valve and vacuum pump.

2, container 1 vacuumizes: open valve 21, start straight empty pump 22, open electromagnetism band gas charging valve 23 and valve 2, make container 1 interior vacuum reach 13.3 handkerchiefs, close above-mentioned valve and vacuum pump.

3,

high pressure tank

32 and 38 vacuumizes: open valve 21, start vacuum pump 22, open electromagnetism band gas charging valve 23 and valve 3,5, make to vacuumize in the gas holder to reach 13.3 handkerchiefs, close above-mentioned valve and vacuum pump.

4, by

high pressure tank

32 and 38 to container 1 inflation: open reach authorized pressure in

valve

3,27,9,4, the container after, throttle down 3,27,9,4.

5, reclaim gas to high

pressure gas holder

38,32 by container 1: start compressor 10,

open valve

4,11,27,3,36, when machine to be compressed can't reclaim, throttle down 4,11,27, valve, 3,36 is not related to, and stops compressor.

6, container 1 residual gas emptying purified treatment: open air pump 14,

valve

16,20 starts vacuum pump 22, opens electromagnetism band gas charging valve 23, valve 2, treat that degree of vacuum reaches 13.3 handkerchiefs in the container 1, throttle down 2 stops vacuum pump 22, close electromagnetism band gas charging valve 23,

closing valve

20,16, blowing-out pump 14.

7, other gaseous matter in the high pressure tank 32 on the row:

closing valve

3,36, open valve 16,19,5, the pump 14 that blows in, treating does not have when pressure, closing valve 16,19,5 and air pump 14 in the gas holder 32.

8, go up other gaseous matter of high pressure tank 32 rows of vacuumizing: throttle down 3,36, open air pump 14 and

valve

16,20, start vacuum pump 22, open electromagnetism band gas charging valve 23 and valve 5, other gaseous matter clears in last high pressure tank 32, throttle down 5 and electromagnetism band vacuum gas filling valve 23 stop vacuum pump 22,

close door

20,16 and air pump 14.

9, by

high pressure tank

32,38 to container 1 force feed gas.

Open valve

4,9,25, start compressor 10, when waiting to hold pressure in the gas 1 and reaching specified value, throttle down 25,9,4 stops compressor 10.

Claims

1, SF ₆Gas charges and discharge recovery and purification plant is connected with pipeline by container, valve, compressor, vacuum pump, heat exchanger, high pressure tank and molecular sieve filter, it is characterized in that: the air outlet of vacuum pump is parallel with purification plant and ball valve, there is pipeline to be connected between two high pressure tanks up and down with valve, the copper mesh inner core is housed in the last high pressure tank, in the tube F is housed ₃Sorbent and electric heater, following high pressure tank and compressor chamber are in series with valve with pipeline, heat exchanger, little oil mist filter of A level and T level main line filter, be in series with valve with pipeline between container and the compressor, buffer, molecular sieve filter, valve, there is valve to be connected between the main line filter of the outlet of last high pressure tank and vacuum pump outlet purification plant with pipeline, use pipeline between container and vacuum pump suction port, valve is connected with electromagnetism band gas charging valve, vacuum pump suction port electromagnetism band gas charging valve has pipeline to be connected with valve with compressor chamber, there is pipeline to be connected between following high pressure tank and compressor inlet, has valve to be connected between the little oil mist filter outlet of A level and molecular sieve filter with pipeline with valve.

2, according to the said device of claim 1, it is characterized in that: the purification plant of vacuum pump air outlet is in series with pipeline by ball valve, T level main line filter, absorption drier, buffer, ball valve and air pump.

3, according to the said device of claim 1, it is characterized in that: last high pressure tank is 2/3 of a following high-pressure gas tank volume.

4, according to claim 1 or 3 said devices, it is characterized in that: the volume of copper mesh inner core is 1/2 of a last high-pressure gas tank volume.

5, according to the said device of claim 1, it is characterized in that: be connected with one-way valve with pipeline between the sealing of the tank filler sleeve of compressor, crankcase and one-level suction port.