CN212335354U

CN212335354U - Tubular annealing furnace of heat treatment process

Info

Publication number: CN212335354U
Application number: CN202020459926.8U
Authority: CN
Inventors: 王强
Original assignee: JIANGSU TRI-M SPECIAL METALS CO LTD
Current assignee: JIANGSU TRI-M SPECIAL METALS CO LTD
Priority date: 2020-04-01
Filing date: 2020-04-01
Publication date: 2021-01-12
Anticipated expiration: 2030-04-01

Abstract

The utility model discloses a heat treatment process's tubular annealing stove, the induction cooker comprises a cooker bod, one side of furnace body is provided with heat recovery unit, heat recovery unit comprises the play tuber pipe, one side fixedly connected with fan of furnace body, the air inlet end cover of fan has connect the exhaust column, the one end of exhaust column runs through top one side of furnace body, and the one end of exhaust column extends to in the inner chamber of furnace body, the air-out end cover of fan has connect out the tuber pipe, one side of furnace body is provided with the drying cabinet, one side that the one end that goes out the tuber pipe runs through the drying cabinet extends to in the inner chamber of drying cabinet, the fixed joint in inner wall top of drying cabinet has the filter screen, the top of filter screen is provided with the drier package, the inner wall below both sides fixedly connected with. The utility model discloses a cooperation of drying cabinet, drier package and slide is used, has realized carrying out the purpose of drying to the tubular product with the heat recovery of the inside production of annealing stove, has reduced the loss of energy, has improved the practicality of device.

Description

Tubular annealing furnace of heat treatment process

Technical Field

The utility model relates to the technical field of annealing furnaces, in particular to a tubular annealing furnace of heat treatment process.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. Annealing is generally used to improve the plasticity and toughness of a substance, simultaneously soften it, homogenize chemical components, remove residual and stress, and an annealing process is to heat a substance to a certain temperature, hold for a certain time, and then cool at a certain speed.

In the annealing process, annealing stove inside can produce a large amount of heats, and current annealing stove does not have fine heat reclamation device, leads to the heat of production to scatter and disappear in a large number, leads to the loss of energy, is unfavorable for the environmental protection, need dry in advance to more moist work piece before putting into furnace with the work piece in addition, and the stoving work piece need consume more energy, increases the cost of operation.

Disclosure of Invention

An object of the utility model is to provide a tubular annealing furnace of heat treatment process to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a heat treatment process's tubular annealing stove, one side of furnace body is provided with heat reclamation device, heat reclamation device comprises the tuber pipe, one side fixedly connected with fan of furnace body, the air inlet end cover of fan has connect the exhaust column, the one end of exhaust column runs through top one side of furnace body, and the one end of exhaust column extends to in the inner chamber of furnace body, the air-out end cover of fan has connect out the tuber pipe, the middle part of tuber pipe has cup jointed the check valve, one side of furnace body is provided with the drying cabinet, the one end of tuber pipe runs through the drying cabinet and extends to in the inner chamber of drying cabinet, the fixed joint of inner wall top of drying cabinet has the filter screen, the top of filter screen is provided with the drier package, the inboard bilateral symmetry fixedly connected with fixed block below the inner wall of drying cabinet, two there is the slide through spout sliding connection between the fixed block, one end of the sliding plate is connected with one side of the drying box in a sliding and penetrating mode.

Preferably, one side fixedly connected with of furnace body bears the box, bear inner wall one side fixedly connected with driving motor of box, driving motor's output shaft is connected with the bull stick through the shaft coupling transmission, one side that the one end of bull stick runs through the furnace body extends to the inside of furnace chamber, just the one end of bull stick is passed through the bearing and is connected with the inner wall one side rotation of furnace chamber, the fixed cylinder that has cup jointed of outer wall of bull stick, one side of cylinder is provided with the cover, one side of cover is provided with locking mechanical system, the inner wall fixedly connected with abrasionproof pad of cylinder.

Preferably, an air outlet pipe is fixedly inserted and connected to one side of the top of the drying box.

Preferably, the inner wall of the furnace body is fixedly connected with refractory bricks, the inner side of the furnace body is provided with a furnace chamber, a heat preservation layer is arranged between the furnace body and the furnace chamber, a plurality of heating wires are arranged in the inner wall of the furnace chamber at equal intervals, and the plurality of heating wires are electrically connected with an external power supply through an external switch.

Preferably, one side of the top of the furnace body is hinged with a furnace door through a hinge, one side of the furnace door is fixedly connected with a sealing gasket, and the bottom of the furnace body is fixedly connected with a supporting seat.

Preferably, the driving motor is electrically connected with an external power supply through an external switch.

The utility model discloses a technological effect and advantage:

(1) the utility model realizes the recovery of the heat generated in the annealing furnace by the matching use of the drying box, the drying agent bag and the sliding plate, and is used for drying the pipe needing annealing, thereby reducing the energy loss and improving the practicability of the device;

(2) the utility model discloses a setting of cylinder is put into tubular product and is rotated in the cylinder, and tubular product is heated more evenly to the annealing effect of tubular product has been improved.

Drawings

Fig. 1 is a schematic view of the three-dimensional structure of the present invention.

Fig. 2 is a schematic front sectional view of the present invention.

Fig. 3 is a schematic view of the sectional structure of the side of the furnace body of the present invention.

In the figure: 1. a furnace body; 101. a carrying box; 2. a furnace chamber; 201. an electric heating wire; 3. a heat-insulating layer; 4. a drive motor; 5. a rotating rod; 6. a drum; 7. a cylinder cover; 8. a fan; 9. an air outlet pipe; 901. a one-way valve; 10. a drying oven; 11. a desiccant bag; 12. a fixed block; 13. a slide plate; 14. an air outlet pipe; 15. a furnace door; 16. and (4) supporting the base.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a tubular annealing furnace of heat treatment process as shown in figures 1-3, which comprises a furnace body 1, one side of the furnace body 1 is provided with a heat recovery device, the heat recovery device is composed of an air outlet pipe 9, one side of the furnace body 1 is fixedly connected with a fan 8, the fan 8 is electrically connected with an external power supply through an external switch, the air inlet end of the fan 8 is sleeved with an exhaust pipe, one end of the exhaust pipe runs through one side of the top of the furnace body 1, one end of the exhaust pipe extends into the inner cavity of the furnace body 1, the air outlet end of the fan 8 is sleeved with the air outlet pipe 9, the middle part of the air outlet pipe 9 is sleeved with a check valve 901, the check valve 901 is arranged to avoid the phenomenon that the air flows back, one side of the furnace body 1 is provided with a drying box 10, one end of the air outlet pipe 9 runs through the drying box 10 and extends into the inner cavity of the drying box, the drying agent bag 11 is arranged to absorb water vapor contained in gas generated inside the furnace body 1, so that the phenomenon that the water vapor enters the lower part of the drying box 10 to cause the pipe to be annealed to become wet and cause the annealing operation to generate danger is avoided, the fixed blocks 12 are symmetrically and fixedly connected to two sides below the inner wall of the drying box 10, a sliding plate 13 is connected between the two fixed blocks 12 in a sliding mode through a sliding groove, one end of the sliding plate 13 is connected with one side of the drying box 10 in a sliding and inserting mode to place the pipe on the sliding plate 13, and the pipe is sent into the drying box 10 to be;

one side of the furnace body 1 is fixedly connected with a bearing box 101, one side of the inner wall of the bearing box 101 is fixedly connected with a driving motor 4, the outer wall of the output shaft of the driving motor 4 is fixedly sleeved with a speed reducer, the driving motor 4 is electrically connected with an external power supply through an external switch, the output shaft of the driving motor 4 is connected with a rotating rod 5 through a coupling transmission, one end of the rotating rod 5 penetrates through one side of the furnace body 1 and extends to the inside of the furnace chamber 2, one end of the rotating rod 5 is rotatably connected with one side of the inner wall of the furnace chamber 2 through a bearing, the outer wall of the rotating rod 5 is fixedly sleeved with a roller 6, one side of the roller 6 is provided with a cylinder cover 7, the inner wall of the roller 6 is fixedly connected with an anti-abrasion pad, the driving motor 4 drives the roller 6 to rotate, all parts of the pipe are uniformly, so as to control the air pressure inside the drying oven 10, the air outlet pipe 14 is communicated with the outside air, thereby keeping the pressure inside the drying oven 10 balanced, the inner wall of the oven body 1 is fixedly connected with a refractory brick, the inner side of the oven body 1 is provided with an oven cavity 2, a heat preservation layer 3 is arranged between the oven body 1 and the oven cavity 2, the inner wall of the oven cavity 2 is provided with a plurality of heating wires 201, the plurality of heating wires 201 are arranged at equal intervals, the plurality of heating wires 201 heat the inside of the oven body 1 to facilitate the annealing operation, the plurality of heating wires 201 are electrically connected with an external power supply through an external switch, one side of the top of the oven body 1 is hinged with an oven door 15 through a hinge, the top of the oven door 15 is fixedly connected with a handle to facilitate the opening of the oven door 15, one side of the oven door 15 is fixedly connected with a sealing gasket which ensures, so that the annealing furnace keeps stable placement.

The utility model discloses the theory of operation: during the use, open earlier furnace gate 15 and cover 7 and put into the inside of cylinder 6 with tubular product, close cover 7 and furnace gate 15, open the switch of heating wire 201, heating wire 201 heats the inside of furnace chamber 2, open the switch of driving motor 4, the output shaft of driving motor 4 rotates and drives bull stick 5 and rotate, bull stick 5 drives cylinder 6 and rotates, thereby drive tubular product and rotate, make its thermally equivalent, pulling slide 13, pull out slide 13, put tubular product on slide 13, then push slide 13 into the inside of drying cabinet 10, open the switch of fan 8, fan 8 inhales the inside of drying cabinet 10 with the heat that the inside of furnace body 1 produced, drier package 11 absorbs the moisture that contains in the heat and dries, the gas after the drying is dried tubular product.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The utility model discloses the standard parts that use all can purchase from the market, and dysmorphism piece all can be customized according to the record of the description with the drawing.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The tubular annealing furnace comprises a furnace body (1) and is characterized in that a heat recovery device is arranged on one side of the furnace body (1) and consists of an air outlet pipe (9), a fan (8) is fixedly connected on one side of the furnace body (1), an air inlet end of the fan (8) is sleeved with an air exhaust pipe, one end of the air exhaust pipe penetrates through one side of the top of the furnace body (1), one end of the air exhaust pipe extends into an inner cavity of the furnace body (1), an air outlet pipe (9) is sleeved on an air outlet end of the fan (8), a check valve (901) is sleeved in the middle of the air outlet pipe (9), a drying box (10) is arranged on one side of the furnace body (1), one end of the air outlet pipe (9) penetrates through the drying box (10) and extends into the inner cavity of the drying box (10), a filter screen is fixedly clamped above the inner wall of the drying box (10), the top of filter screen is provided with drier package (11), the inner wall below bilateral symmetry fixedly connected with fixed block (12) of drying cabinet (10), two there are slide (13) through spout sliding connection between fixed block (12), the one end of slide (13) alternates with one side slip of drying cabinet (10) and is connected.

2. The tube annealing furnace of the heat treatment process according to claim 1, wherein one side of the furnace body (1) is fixedly connected with a bearing box (101), one side of the inner wall of the bearing box (101) is fixedly connected with a driving motor (4), an output shaft of the driving motor (4) is connected with a rotating rod (5) through a coupling transmission, one end of the rotating rod (5) penetrates through one side of the furnace body (1) and extends to the inside of the furnace chamber (2), one end of the rotating rod (5) is rotatably connected with one side of the inner wall of the furnace chamber (2) through a bearing, the outer wall of the rotating rod (5) is fixedly sleeved with a roller (6), one side of the roller (6) is provided with a cylinder cover (7), and the inner wall of the roller (6) is fixedly connected with an anti-abrasion pad.

3. The tube annealing furnace for heat treatment process according to claim 1, wherein an air outlet tube (14) is fixedly inserted and connected to one side of the top of the drying box (10).

4. The tube annealing furnace for the heat treatment process according to claim 1, wherein the inner wall of the furnace body (1) is fixedly connected with refractory bricks, the inner side of the furnace body (1) is provided with a furnace chamber (2), a heat insulation layer (3) is arranged between the furnace body (1) and the furnace chamber (2), the inner wall of the furnace chamber (2) is provided with a plurality of heating wires (201), the plurality of heating wires (201) are arranged at equal intervals, and the plurality of heating wires (201) are electrically connected with an external power supply through an external switch.

5. The tube annealing furnace for the heat treatment process according to claim 1, wherein one side of the top of the furnace body (1) is hinged with a furnace door (15) through a hinge, one side of the furnace door (15) is fixedly connected with a sealing gasket, and the bottom of the furnace body (1) is fixedly connected with a supporting seat (16).

6. The tube annealing furnace for heat treatment process according to claim 2, wherein the driving motor (4) is electrically connected to an external power source through an external switch.