CN212018796U - Dielectric barrier discharge plasma passivation device - Google Patents

Abstract

The utility model discloses a dielectric barrier discharge plasma passivation device, which comprises an insulating supporting plate, wherein at least one limiting groove is formed on the surface of the insulating supporting plate; the negative electrode is arranged on the insulating supporting plate, corresponds to the position of the limiting groove and extends to the upper part of the groove bottom of the limiting groove; the blocking medium sleeve is positioned above the insulating supporting plate, and the opening area of the lower end of the blocking medium sleeve meets the requirement of covering a notch of a limiting groove; a positive electrode disposed within the barrier dielectric sleeve; and the moving device drives the blocking dielectric sleeve to move right above the limiting groove and keeps a certain discharge air gap. The scheme can take the workpiece as a negative electrode, combines the liftable positive electrode and the blocking dielectric sleeve, can effectively utilize the dielectric barrier discharge plasma principle, continuously generates plasma between the metal workpiece and the blocking dielectric sleeve under the normal pressure condition so as to directly clean the surface of the metal workpiece and form a passivation layer on the surface of the workpiece, can greatly improve the corrosion resistance of the workpiece, and prolongs the service life of the workpiece.

Description

Dielectric barrier discharge plasma passivation device

Technical Field

The utility model belongs to the technical field of automobile parts processing equipment and specifically relates to dielectric barrier discharge plasma passivation device.

Background

At present, the processed coil shell (the coil shell for automobile turbocharging and made of conductive metal material) is usually required to be cleaned and then packaged,

one possible cleaning process includes the following steps: ultrasonic cleaning, rinsing and industrial oven drying.

Another possible cleaning process includes the following processes: automatic spray cleaning, ultrasonic cleaning, spray rinsing and high-pressure air water cutting.

In any process, pollutants on the surface of the coil shell are often not completely removed, and the residual pollutants are easy to cause premature corrosion and rust of products.

With the development of other cleaning processes, such as plasma cleaning, conventional plasma cleaning is to generate high-energy disordered plasma by starting a radio frequency power supply under a certain pressure in a vacuum cavity, and bombard the surface of a cleaned product by the plasma so as to achieve the cleaning purpose.

However, the conventional plasma cleaning machine has a complex structure, requires a complex cavity structure, and needs to be realized under a certain pressure condition, and Dielectric Barrier Discharge (DBD) is a non-equilibrium gas Discharge, also called Dielectric Barrier corona Discharge or silent Discharge, having an insulating Dielectric inserted into a Discharge space, which can generate low-temperature plasma at normal pressure, so the Dielectric Barrier Discharge plasma apparatus has been developed as an apparatus for material surface treatment.

An atmospheric pressure double dielectric barrier flat-mouth type active radical cleaning system as disclosed in application No. 2009102496104, which has a structure that the plasma generated is blown to the surface to be cleaned between a high voltage electrode and a grounding electrode through an air inlet channel and through air flow, in this structure, the plasma is not directly generated around the workpiece, but the air flow is formed through an air source and the air inlet channel to effectively move the plasma to the surface to be cleaned to complete the cleaning, and this way, too, will reduce the concentration of the plasma and increase the loss of the plasma, and at the same time, a certain conveying time is required, resulting in relatively low cleaning efficiency, and a complicated air supply pipeline and structure are required.

Since the air blowing passage is located at the gap between the ground electrode and the high voltage electrode, if a batch cleaning is to be performed, it is necessary to add an air blowing passage at each of the ground electrode and the high voltage electrode, and therefore the cost of equipment for realizing the batch cleaning will be further increased.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a dielectric barrier discharge plasma passivation device for solving the above problems in the prior art.

The purpose of the utility model is realized through the following technical scheme:

a dielectric barrier discharge plasma passivation device,

the surface of the insulating supporting plate is provided with at least one limiting groove;

the negative electrode is arranged on the insulating supporting plate, corresponds to the position of the limiting groove and extends to the position above the groove bottom of the limiting groove;

the blocking medium sleeve is positioned above the insulating supporting plate, and the area of an opening at the lower end of the blocking medium sleeve meets the requirement of covering a notch of the limiting groove;

a positive electrode disposed within the barrier dielectric sleeve;

and the moving device drives the blocking dielectric sleeve to move right above the limiting groove and keeps a certain discharge air gap.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, the insulating support plate is erected on a group of supports of the rack, and the group of supports form a limiting space with an inverted trapezoidal longitudinal section.

Preferably, in the dielectric barrier discharge plasma passivation device, the insulating supporting plate is positioned by a positioning device, and the positioning device drives the limiting groove to be coaxial with the barrier dielectric sleeve. The positioning device comprises positioning cylinders which are oppositely arranged, cylinder shafts of the positioning cylinders are opposite and are respectively connected with a push plate, and limiting parts are symmetrically arranged on two sides of the push plate.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, a conductive plate connected to the negative electrode is disposed at the bottom of the insulating support plate.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, the negative electrode is a probe.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, each of the limiting grooves is provided with at least three negative electrodes distributed in an equilateral polygon.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, the barrier dielectric sleeve is connected to an insulating plate through a bolt screwed to a positive electrode in the barrier dielectric sleeve, and the insulating plate is connected to a lifting cylinder for driving the insulating plate to lift.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, the number of the support is plural, the lifting cylinder is fixed on a support, and the support is fixed on a translation device for driving the support to switch over the plural groups of the support.

Preferably, in the dielectric barrier discharge plasma passivation apparatus, the positive electrode includes a groove body, a boss located in the groove is arranged at the bottom of the groove body, and the barrier dielectric sleeve has a structure similar to that of the positive electrode.

The utility model discloses technical scheme's advantage mainly embodies:

1. this scheme design is exquisite, moreover, the steam generator is simple in structure, bottom at the spacing groove sets up the negative electrode, can effectually make the work piece be connected with the power, thereby make the work piece become the negative electrode, combine the positive electrode of liftable and block dielectric sleeve, can effectively utilize dielectric barrier discharge plasma principle, continuously generate plasma between metal work piece and block dielectric sleeve under the ordinary pressure condition and wash and form the passivation layer with the direct surface to metal work piece and at the surface of work piece, do not need to carry out plasma through the air current and carry, can not produce the reduction and the loss of plasma concentration, the corrosion resisting property of improvement work piece that can be very big, the life of extension work piece, the yields of messenger's product promotes by a wide margin. Meanwhile, the structure can conveniently realize batch processing, and can greatly improve the processing efficiency.

2. By adopting the plasma cleaning technology, the waste liquid discharge in the conventional treatment can be reduced, and the polluted organic matters are volatilized in a trace gaseous state after being ionized by the plasma, so that the method is good in environmental friendliness.

3. The negative electrode of the scheme adopts the probe, so that the conduction stability and reliability of the negative electrode and a workpiece can be ensured, and meanwhile, a plurality of negative electrodes are matched with one workpiece, so that other negative electrodes can be normally conducted even if the conduction effect of part of the negative electrodes is poor, and the working stability is further ensured; in addition, the negative electrodes are connected with the discharge power supply through the same conductive plate, so that wiring can be effectively simplified, and the electrical connection rate is improved.

4. The appearance design of the positive electrode and the blocking medium sleeve can effectively meet the requirement of cleaning the inner surface and the outer surface of the annular workpiece at the same time. Meanwhile, the blocking medium sleeve is assembled in a split mode, and the positive electrode can be wrapped and disassembled conveniently.

5. The design of the positioning device can effectively ensure that each limit groove is coaxial with the blocking medium sleeve, so that the blocking medium sleeve is effectively sleeved on the periphery of a workpiece and keeps a set discharge air gap, and the realization of cleaning and passivation is ensured.

6. The glue bodies of the plurality of stations are coaxial, and an off-line processing mode is adopted, so that the production working rhythm of the product is improved, and the processing efficiency is improved.

Drawings

Fig. 1 is a longitudinal sectional view of an end view of the present invention;

fig. 2 is a front longitudinal sectional view of the present invention;

fig. 3 is a cross-sectional view of a positive electrode of the present invention;

fig. 4 is a cross-sectional view of a barrier media cover of the present invention;

FIG. 5 is an enlarged view of area A of FIG. 1;

fig. 6 is an end view of the present invention;

fig. 7 is a top view of the present invention;

fig. 8 is a schematic view of a base of the present invention;

fig. 9 is a top view of a position limiting member of the positioning device of the present invention;

fig. 10 is a front view of the present invention;

fig. 11 is a schematic view of the working state of the present invention.

Detailed Description

Objects, advantages and features of the present invention will be illustrated and explained by the following non-limiting description of preferred embodiments. These embodiments are merely exemplary embodiments for applying the technical solutions of the present invention, and all technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the scope of the present invention.

In the description of the embodiments, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the embodiment, the operator is used as a reference, and the direction close to the operator is a proximal end, and the direction away from the operator is a distal end.

The dielectric barrier discharge plasma passivation apparatus disclosed in the present invention is described below with reference to the accompanying drawings, and the following description is taken as an example of the apparatus used for the coil housing, and of course, the apparatus can also be used for other annular workpieces or cylindrical members, as shown in fig. 1, which includes

The insulation support plate comprises an insulation support plate 1, wherein at least one limiting groove 11 is formed in the surface of the insulation support plate 1;

the negative electrode 2 is arranged on the insulating supporting plate 1, corresponds to the position of the limiting groove 11 and extends to the upper part of the groove bottom of the limiting groove 11;

the blocking dielectric sleeve 3 is positioned above the insulating supporting plate 1, and the opening area of the lower end of the blocking dielectric sleeve 3 meets the requirement of covering a notch of the limiting groove 11;

a positive electrode 4 disposed within the barrier dielectric sleeve 3;

and the moving device 5 drives the blocking dielectric sleeve 3 to move right above the limiting groove 11 and keeps a certain discharge air gap.

When in use, the negative electrode 2 and the positive electrode 4 are respectively connected to the negative electrode and the positive electrode of a discharge power supply 20, which may be any known power supply, such as a high-frequency high-voltage power supply, and is not described herein again.

The insulating supporting plate 1 may be a flat plate made of various insulating materials, for example, a rectangular plate or a circular plate made of teflon or quartz, preferably, a rectangular plate, the insulating supporting plate 1 is provided with a plurality of limiting grooves 11, depths of the limiting grooves 11 are set as required, the limiting grooves 11 may be arranged as required, for example, they form a plurality of coaxial rings or are arranged in rows or columns, or may be arranged randomly, and when they are arranged in columns, the limiting grooves 11 in adjacent columns are arranged in a staggered manner. Of course, in other embodiments, the limiting groove 11 may be replaced by a protrusion matching with the inner hole of the coil housing.

Each of the limiting grooves 11 is provided with at least one negative electrode 2, as shown in fig. 1 and fig. 2, preferably at least three negative electrodes, and each of the negative electrodes is in a regular polygon shape, and they are close to the groove wall of the limiting groove 11, so that when the coil housing can be placed in the limiting groove, each of the negative electrodes 2 can be abutted against the bottom of the side wall of the coil housing to achieve reliable conduction, and meanwhile, a plurality of negative electrodes provide stable support for the coil housing, and the negative electrode 2 can be made of various known conductive materials, and can be a conductive rod, or a conductive body with certain elasticity, preferably a probe, so that when the coil housing is placed thereon, the top of the probe can be effectively attached to the coil housing by the elasticity of the probe, and the effectiveness of conduction is ensured.

Because the insulating supporting plate 1 is provided with the plurality of negative electrodes 2, each negative electrode 2 needs to be connected with the discharge power supply 20, and at this time, if the negative electrodes 2 are connected by the conducting wires respectively, the connection operation is complicated, so as shown in fig. 1 and fig. 2, the bottom of the insulating supporting plate 1 is provided with the conducting plate 8 connected with the lower end of each negative electrode 2, the conducting plate 8 and the insulating supporting plate 1 are fixed by bolts, the bolts do not penetrate through the insulating supporting plate 1, each negative electrode 2 is inserted into the through holes on the conducting plate 8 and is connected with the hole wall in an interference fit manner, and when the discharge power supply is in operation, the conducting plate 8 is connected with the discharge power supply, for example, the negative chuck of the discharge power supply is clamped on the bolts which are screwed with the conducting plate 8 and the insulating supporting plate 1.

Of course, in other embodiments, the conductive plate 8 may also be a conductive adhesive tape, which is fixed on the bottom of the insulating support plate 1 by a conductive glue, and the lower end of the negative electrode 2 extends to the lower side of the insulating support plate 1 to be abutted with the conductive adhesive tape for electrical connection.

As shown in fig. 1, the number of the blocking dielectric sleeves 3 is the same as the number of the limiting holes 11, the positions of the blocking dielectric sleeves are in one-to-one correspondence, each blocking dielectric sleeve 3 is internally provided with one positive electrode 4, as shown in fig. 3, each positive electrode 4 comprises a groove body 41, an internal groove of each groove body 41 can be a circular or other square groove, specifically, the internal groove is matched with the shape of a coil shell to be processed, the groove openings of the internal groove are arranged in the same direction, a boss 42 positioned in the groove is arranged at the bottom of each groove body 41, the boss 42 is in a convex shape, and a connecting screw hole 43 is formed at the bottom of each groove body.

As shown in fig. 4, the blocking dielectric sleeve 3 has a structure similar to that of the positive electrode 4, the blocking dielectric sleeve 3 includes a main body 32 and a cover 33 enclosing to form an accommodating space 31 having a shape consistent with that of the positive electrode 4, the main body 32 includes an outer cover 321, a middle cover 322 and an inner convex groove 323 arranged at intervals, and the bottoms of the outer cover 321 and the middle cover 322 are connected by a bottom ring 324 to form a slot 325 for inserting the side wall 411 of the groove body 41 of the positive electrode 4. The height of the middle cover 321 is close to the groove depth of the groove body 41, the upper end of the middle cover is lower than the upper end of the outer cover 321, and the middle ring 326 is connected with the upper end of the inner convex groove 323, so that a coil shell slot 327 is formed for inserting the coil shell, the width of the coil shell slot 327 is larger than the wall thickness of the coil shell, and the boss 42 of the positive electrode 4 is embedded in the inner convex groove 323. The cover 33 comprises a top plate 331 and a sleeve body 332, a through hole 333 coaxial with the connecting screw hole 43 on the positive electrode 4 and having a diameter not smaller than the connecting screw hole 43 is formed in the top plate 331, the cover 33 can be screwed with the thread on the inner wall of the outer cover 321 through the thread on the outer wall of the sleeve body 332, and simultaneously, the bottom of the sleeve body 332 abuts against the positive electrode 4. Of course, in other embodiments, the cover 33 may be bonded or connected with the main body 32 by interference fit, or screwed, etc.

Therefore, when cleaning, the groove 41 of the positive electrode 4 can be sleeved on the periphery of the coil shell, and meanwhile, the boss 42 can be inserted into the inner hole of the coil shell, so that the inner wall and the outer wall of the coil shell can be effectively cleaned and passivated simultaneously, and the cleaning efficiency, the passivation efficiency and the coverage are improved.

And, as shown in fig. 1 and 5, each of the barrier dielectric sleeves 3 is fixed on an insulating plate 10 by a bolt 9 screwed in a connecting screw hole 43 of the positive electrode 4, the insulating plate 10 can be made of various insulating and plasma corrosion resistant materials, such as quartz, teflon, etc., and the insulating plate 10 is connected with the moving device 5.

In an embodiment, if the insulation supporting plate 1 is one, each blocking dielectric sleeve 3 on the insulation plate 10 corresponds to and is coaxial with one limiting hole 11, at this time, all the blocking dielectric sleeves 3 can be sleeved on the periphery of the coil housing in the limiting holes by only lowering the insulation plate 10, and therefore, the moving device 5 only needs to drive the insulation plate 10 to move up and down, so that the moving device 5 may be a lifting device 51 capable of generating longitudinal movement, such as an air cylinder, an oil cylinder, an electric cylinder, or the like.

In a preferred embodiment, in order to improve the overall processing cycle, as shown in fig. 6 and 7, the insulating supporting plate 1 may be multiple, and they are respectively mounted on a set of supporting seats 61 of the frame 6, as shown in fig. 8, each supporting seat 61 includes a bottom plate 611, a stopper 612 is disposed on the bottom plate 611, a face of the stopper 612 facing the opposite supporting seat 61 is an inclined face 613, and a set of supporting seats 61 forms a limiting space 62 with an inverted trapezoid longitudinal section, so that when the insulating supporting plate 1 is placed on the supporting seat 61, the insulating supporting plate 1 can move onto the bottom plate 611 under the guide of the inclined face 613 and is limited by a set of stoppers 612.

Further, when the insulating supporting plate 1 is placed on the support 61, the position of the insulating supporting plate is often random, and the horizontal position of the blocking medium sleeve 3 is fixed, so that each limiting hole 11 on the insulating supporting plate 1 may not be coaxial with one blocking medium sleeve 3, and at this time, registration cannot be achieved, and therefore, as shown in fig. 6 and 7, a positioning device 7 for positioning the insulating supporting plate 1 is further provided on the rack 6, and the positioning device 7 drives each limiting groove 11 on the insulating supporting plate 1 to be coaxial with one blocking medium sleeve 3.

In detail, the positioning device 7 includes positioning cylinders 71 disposed oppositely, cylinder axes of the positioning cylinders are opposite and are respectively connected with a push plate 72, both sides of each push plate 72 are symmetrically provided with limiting members 73, as shown in fig. 9, each limiting member 73 includes a supporting plate 731 whose top surface is level with the top surface of the bottom plate 611 and a blocking piece 732 located outside the supporting plate 731, the supporting plate 731 is integrally formed with a connecting portion 733 for connecting the push plate 72, and a distance between the blocking pieces 732 of the two limiting members 73 is equal to a width or a length of the insulating supporting plate 1, and meanwhile, a distance between inlet ends of the two blocking pieces 732 is greater than a distance between inner ends, so that the insulating supporting plate 1 can be ensured to enter between the two blocking pieces 732 to realize limiting.

Since there are a plurality of processing stations, the insulating plate 10 needs to be able to be lifted and lowered and translated to different processing stations, and therefore, as shown in fig. 10, the moving device 5 includes a translation mechanism for driving the lifting device 51 to move in addition to the lifting device 51.

As shown in fig. 10, the lifting cylinder 51 is fixed to a support 52, the support 52 is fixed to a translation device 53 for driving the support 52 to switch over a plurality of sets of the supports 61, the translation device 53 can be various known devices or structures, for example, it can be a fixed position linear module or an electric cylinder, and the support 52 is fixed to a slide block of the linear module or the electric cylinder.

Preferably, as shown in fig. 10, the translation device 53 includes a stand 531, two rotatable ground rollers 532 are disposed on the stand 531 with a gap, one of the two ground rollers 532 is connected to a motor 533 fixed on the stand 531, the motor 533 is preferably a stepping motor or a servo motor, the two ground rollers 532 are connected by a belt 534, a circumferential surface of the ground roller 532 has teeth, an inner surface of the belt 533 has teeth engaged with the teeth of the ground roller 532, so that the belt 534 can be prevented from slipping, and the belt 534 is connected to the bracket 52 by a connection member, which includes screwed upper and lower plates, the upper or lower plate has teeth engaged with the teeth of the belt, and can be screwed through the belt 534, and the bracket 52 is slidably disposed on two guide rails 535 on the stand 531.

Thus, in operation, the motor 533 drives the roller 532 to rotate, thereby driving the belt 534 to rotate, and the belt 534 moves to drive the bracket 52 to reciprocate along the rail 535.

The passivation method of the dielectric barrier discharge plasma passivation device is specifically described below, and comprises the following steps:

s1, providing the dbd plasma passivation apparatus of the above embodiment, connecting the negative electrode of the discharge power source 20 with the conductive plate 8 through the conducting wire, and connecting the positive electrode of the discharge power source 20 with the bolt 9 through the conducting wire, so that the positive electrode 4 and the negative electrode 2 are respectively connected with the positive electrode and the negative electrode of the discharge power source 20, as shown in fig. 11.

And S2, manually or through automatic equipment, placing a group of coil shells 30 in the limiting grooves 11 of the insulating supporting plate 1, wherein the coil shells 30 press the negative electrodes 2 and are communicated with the negative electrodes 2.

S3, the insulation support plate 1 with the coil housing 30 is then placed on the base 61.

S4, the two positioning cylinders 71 are activated to drive the stoppers 73 at their front ends to move toward the insulating supporting plate 1, so that the two stoppers 73 clamp and position the insulating supporting plate 1, and after clamping, the cylinder shafts of the two positioning cylinders 71 can be retracted or kept in a clamped state.

S5, the motor 533 of the moving device 5 is started to drive the insulating plate 10 to move to the insulating supporting plate 1, and each blocking dielectric sleeve 3 on the insulating plate 10 is coaxial with one of the limiting grooves 11, and then the lifting device 51 drives the insulating plate 10 to move down, so that the blocking dielectric sleeve 3 on the insulating plate moves down to be sleeved on the periphery of the coil housing and keep a gap of 1mm ± 0.2mm with the coil housing, as shown in fig. 11.

And S6, starting discharge for a period of time by the discharge power supply 20, ionizing air between the barrier dielectric sleeve and the coil housing 30 to form plasma, cleaning the inner and outer surfaces of the coil housing 30, generating a micro-nano passivation layer on the surface of the coil housing 30, and turning off the discharge power supply after passivation.

And S7, driving the blocking medium sleeve 3 to move upwards to other stations to be processed by the lifting device of the moving device 5, if the positioning device keeps the clamping state in the step S4, starting the positioning device to release the clamping and fixing of the insulating supporting plate 1, and then moving the insulating supporting plate 1 out of the base for blanking.

And S8, repeating S2-S7, thereby completing the alternating work of the three stations.

Of course, the above-mentioned processes of steps S1-S8 are not only limited to the sequence, and in other embodiments, for example, the insulating support plate 1 may be placed on the base 61 and then connected to the negative electrode of the discharge power source and the coil housing 30, and the specific sequence may be adjusted as required.

In the whole operation process of the apparatus, whether the insulating supporting plate 1 is placed on the base and the moving position of the insulating plate 10 can be determined by a control device, such as a PLC system, in combination with a sensor (not shown in the figure), so as to control the start-stop and operating state switching of the positioning cylinder of the positioning device, the motor of the moving device 5 and the discharging power supply 20.

The utility model has a plurality of implementation modes, and all technical schemes formed by adopting equivalent transformation or equivalent transformation all fall within the protection scope of the utility model.

Claims (9)

1. Dielectric barrier discharge plasma passivation device, its characterized in that: comprises that

The insulation support plate (1), wherein at least one limiting groove (11) is formed on the surface of the insulation support plate (1);

the negative electrode (2) is arranged on the insulating supporting plate (1), corresponds to the position of the limiting groove (11) and extends to the position above the groove bottom of the limiting groove (11);

the blocking medium sleeve (3) is positioned above the insulating supporting plate (1), and the area of an opening at the lower end of the blocking medium sleeve (3) meets the requirement of covering a notch of the limiting groove (11);

a positive electrode (4) disposed within the barrier dielectric sleeve (3);

and the moving device (5) drives the blocking dielectric sleeve (3) to move right above the limiting groove (11) and keeps a discharge air gap.

2. The dielectric barrier discharge plasma passivation apparatus according to claim 1, wherein: the insulating supporting plate (1) is erected on a group of supports (61) on the rack (6), and the group of supports (61) form a limiting space with an inverted trapezoidal longitudinal section.

3. The dielectric barrier discharge plasma passivation apparatus according to claim 2, characterized in that: the insulation supporting plate (1) is positioned through a positioning device (7), and the positioning device (7) drives the limiting groove (11) to be coaxial with the blocking medium sleeve (3).

4. The dielectric barrier discharge plasma passivation apparatus according to claim 1, wherein: and the bottom of the insulating supporting plate (1) is provided with a conductive plate (8) connected with the negative electrode (2).

5. The dielectric barrier discharge plasma passivation apparatus according to claim 1, wherein: the negative electrode (2) is a probe.

6. The dielectric barrier discharge plasma passivation apparatus according to claim 1, wherein: at least three negative electrodes (2) distributed in an equilateral polygon shape are correspondingly arranged in each limiting groove (11).

7. The dielectric barrier discharge plasma passivation apparatus according to claim 1, wherein: the blocking medium sleeve (3) is connected with an insulating plate (10) through a bolt (9) screwed to the positive electrode (4) in the blocking medium sleeve (3), and the insulating plate (10) is connected with the moving device (5).

8. The dielectric barrier discharge plasma passivation apparatus according to claim 2, characterized in that: the device is characterized in that the supports (61) are in multiple groups, the moving device (5) comprises a lifting cylinder (51) fixed on a support (52), and the support (52) is fixed on a translation device (53) for driving the support (61) to switch over the multiple groups.

9. The dielectric barrier discharge plasma passivation apparatus according to any one of claims 1 to 8, characterized in that: the positive electrode (4) comprises a groove body (41), a boss (42) located in the groove is arranged at the bottom of the groove body (41), and the blocking medium sleeve (3) has a structure similar to that of the positive electrode (4).

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