CN211800909U - Micro-fluidic detection chip - Google Patents

Abstract

The utility model provides a microfluidic detection chip, comprising a flow channel plate, a micro pump, a front cover layer, a back cover layer and a plurality of micro valves, wherein the front side of the flow channel plate is provided with a detection cavity and a waste liquid cavity cavity and a plurality of sample feeding cavities, the back is provided with a micro-pump cavity, the bottom of the sample feeding cavity is provided with a liquid inlet hole that penetrates the flow channel plate up and down, and the micro-pump is placed in the micro-pump cavity Inside, the micro-valve and the liquid inlet hole have at least a complementary shape. When the micro-valve is inserted into the liquid inlet hole, the liquid in the sample adding cavity cannot flow to the liquid inlet through the liquid inlet hole. Describe the runners on the back of the runner plate. The microfluidic detection chip of the utility model has a stable and reliable microfluidic flow channel, and is equipped with a micropump and a simple and operable microvalve, which can conveniently realize the switching of multi-channel liquid circuits. It can easily control the volume of reagents such as samples flowing through the detection cavity, and can quantitatively measure the concentration of the substance to be tested in the sample in a relatively short time.

Description

A microfluidic detection chip

technical field

The utility model belongs to the fields of biochemical detection and microfluidic control, and relates to a microfluidic detection chip.

Background technique

Biochemical detection refers to the detection of target solutions by biological or chemical methods. Microfluidic chip technology (microfluidics), also known as lab on a chip (lab on a chip), integrates basic operating units such as sample preparation, reaction, separation, detection, etc. The entire process of reaction and analysis is automatically completed on a chip with micron-scale microchannels.

How to provide a micro-valve structure that can be easily operated to realize convenient switching between multiple liquid paths of a microfluidic detection chip has become an important technical problem to be solved urgently by those skilled in the art.

Utility model content

The purpose of the utility model is to provide a microfluidic detection chip, which is used to solve the problem of inconvenient switching of multiple liquid paths in the microfluidic detection chip in the prior art.

In order to achieve the above purpose and other related purposes, the present invention provides a microfluidic detection chip, comprising:

A flow channel plate, the front of the flow channel plate is provided with a detection cavity, a waste liquid cavity and a plurality of sample addition cavity, the back of the flow channel plate is provided with a micro pump cavity, wherein the bottom of the sample addition cavity is There is a liquid inlet hole that penetrates the flow channel plate up and down, and a flow channel connection hole that penetrates the flow channel plate up and down is arranged between the detection cavity and the sample addition cavity. The flow channel connection holes are communicated through the flow channel provided on the front of the flow channel plate, and the flow channel connection hole and the liquid inlet hole are communicated through the flow channel provided on the back of the flow channel plate. The bottom surface of the micropump cavity is provided with a waste liquid output hole and a waste liquid input hole that penetrate the flow channel plate up and down, the waste liquid output hole is communicated with the detection cavity, and the waste liquid input hole is connected with the waste liquid input hole. The waste liquid cavity is connected;

A micro-pump, placed in the micro-pump cavity, the front of the micro-pump is provided with a fluid inlet and a fluid outlet, the fluid inlet communicates with the waste liquid output hole, and the fluid outlet and the waste liquid input hole connected;

The front cover layer is located on the front of the flow channel plate and covers the detection cavity, the flow channel connection hole, the waste liquid output hole, the waste liquid input hole and the flow channel on the front side of the flow channel plate ;

The back cover layer is located on the back of the flow channel plate and covers the liquid inlet hole, the flow channel connection hole and the flow channel on the back of the flow channel plate;

A plurality of micro-valves, the micro-valve and the liquid inlet hole have at least a section of complementary shape, when the micro-valve is inserted into the liquid inlet hole, the liquid in the sample adding cavity cannot pass through the liquid inlet The holes flow to the flow channels on the back of the flow plate.

Optionally, both the liquid inlet hole and the micro-valve have a section of inclined sidewall that slopes inward from top to bottom. When the micro-valve is inserted into the liquid inlet hole, the inclination of the liquid inlet hole is The side walls are in close contact with the inclined side walls of the microvalve.

Optionally, the cross-sections of the liquid inlet hole and a section of the micro-valve with inclined side walls are both circular or polygonal.

Optionally, the side wall of the liquid inlet hole is vertical, and the side wall of the part of the microvalve inserted into the liquid inlet hole is vertical.

Optionally, the cross section of the liquid inlet hole and the cross section of the part of the microvalve inserted into the liquid inlet hole are both circular or polygonal.

Optionally, when the microvalve is inserted into the liquid inlet hole and the axes are coincident, the distance between the outer wall of the microvalve and the inner wall of the liquid inlet hole is less than 0.02 mm.

Optionally, the micropump includes any one of a thermal bubble micropump, a syringe pump, a peristaltic pump and a piezoelectric pump.

Optionally, the front cover layer includes a pressure film, and the back cover layer includes a pressure film.

As mentioned above, the microfluidic detection chip of the present invention has a stable and reliable microfluidic flow channel, and is equipped with a micropump and a simple and operable microvalve, which can easily realize the switching of multi-channel liquid circuits. The coordinated work of the micropump can easily control the volume of the sample and other reagents flowing through the detection cavity, and can quantitatively measure the concentration of the substance to be tested in the sample in a relatively short period of time.

Description of drawings

Figure 1 shows a top view of the flow channel plate.

Figure 2 shows a bottom view of the flow plate.

Figure 3 shows a schematic diagram of a silicon wafer used to detect signals.

FIG. 4 is a three-dimensional structural view of the micropump.

FIG. 5 is a schematic diagram showing the structure of the front cover layer.

FIG. 6 is a schematic diagram showing the structure of the back cover layer.

FIG. 7 is a schematic diagram of the three-dimensional structure of the microvalve.

FIG. 8 shows an assembly alignment method of the microfluidic detection chip.

FIG. 9 is a schematic diagram showing the structure of the microfluidic detection chip after the assembly is completed.

FIG. 10 and FIG. 11 are respectively two cross-sectional views of the assembled microfluidic detection chip.

FIG. 12 is a cross-sectional view of the portion where the flow channel plate has the sample adding cavity and the liquid inlet hole.

Figure 13 shows a cross-sectional view of the microvalve when the microvalve is above the inlet hole but not inserted into the inlet hole.

Figure 14 shows a cross-sectional view of the microvalve when inserted into the liquid inlet hole.

15 and 16 are schematic diagrams showing that the side wall of the liquid inlet hole is in a vertical state, and the side wall of the part of the microvalve inserted into the liquid inlet hole is also vertical.

Component label description

1 runner plate

101 Detect cavity

102 Waste liquid cavity

103 Filling cavity

104 Micro pump cavity

105 Inlet hole

106 runner connection hole

107 runner

108 runner

109 Waste liquid output hole

110 Waste liquid input hole

111 runner

2 Micropumps

201 Fluid Inlet

202 Fluid Outlet

3 Front cover

301 Opening

4 Back cover

5 Microvalve

6 silicon wafers

Detailed ways

The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

See Figures 1 through 16. It should be noted that the drawings provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, and only the components related to the present invention are shown in the drawings instead of the number of components in the actual implementation, In the drawing of shape and size, the type, quantity and proportion of each component can be arbitrarily changed in actual implementation, and the component layout may also be more complicated.

Example 1

This embodiment provides a microfluidic detection chip, including a flow channel plate 1 , a micropump 2 , a front cover layer 3 , a back cover layer 4 and a plurality of microvalves 5 .

Please refer to FIGS. 1 and 2 , wherein FIG. 1 is a top view of the flow channel plate 1 , and FIG. 2 is a bottom view of the flow channel plate 1 . The front of the flow channel plate 1 is provided with a detection cavity 101, a waste liquid cavity 102 and a plurality of sample addition cavity 103, and the back of the flow channel plate 1 is provided with a micro pump cavity 104, wherein the sample addition cavity 104 is provided. The bottom of the cavity 103 is provided with a liquid inlet hole 105 that penetrates the flow channel plate 1 up and down, and between the detection cavity 101 and the sample addition cavity 103 is a flow channel connection hole that penetrates the flow channel plate 1 up and down. 106, the detection cavity 101 and the flow channel connection hole 106 are communicated through the flow channel 107 provided on the front surface of the flow channel plate 1, and the flow channel connection hole 106 and the liquid inlet hole 105 are connected Connected through the flow channel 108 provided on the back of the flow channel plate 1, the bottom surface of the micro-pump cavity 104 is provided with a waste liquid output hole 109 and a waste liquid input hole 110 that penetrate the flow channel plate 1 up and down. The waste liquid output hole 109 communicates with the detection cavity 101 , and the waste liquid input hole 110 communicates with the waste liquid cavity 102 .

Specifically, the detection cavity 101 of the flow channel plate 1 can be used to detect the concentration of the detected substance in an unknown solution. For example, the silicon wafer 6 (as shown in FIG. 3 ) for detecting signals can be placed in the flow channel into the detection cavity 101 of the track plate 1 to complete the required detection.

As an example, the waste liquid output hole 109 is communicated with the detection cavity 101 through a section of the flow channel 111 provided with the front surface of the flow channel plate 1 . Each of the flow channel connection holes 106 may be connected to the detection cavity 101 through an independent flow channel, or may be connected to the detection cavity 101 through a finally merged flow channel. FIG. 1 shows the situation that each of the flow channel connection holes 106 is connected to the detection cavity 101 through the finally merged flow channel 107

As an example, the material of the flow channel plate 1 includes but is not limited to acrylic.

As an example, the size of the flow channel plate 1 is 80mm*60mm*10mm, the size of the sample adding cavity 103 is 10mm*10mm*3mm, the width and height of each flow channel is 1mm*0.2mm, the waste liquid The size of the cavity 102 is 15mm*15mm*3mm, and the size of the silicon wafer 6 placed in the detection cavity 101 is 5.2mm*5.2mm*0.5mm.

It should be pointed out that for different reaction systems, the number of sample addition cavities is not limited to 3, and the flow channel plate and each cavity in it can be adjusted according to the number of sample addition cavities and the volume of the tested solution. The specific size of the flow channel should not unduly limit the protection scope of the present invention.

Please refer to FIG. 4 , which is a three-dimensional structural diagram of the micropump 2 . The micro-pump 2 is placed in the micro-pump cavity 104 on the back of the flow channel plate 1 to drive fluid. The front of the micro-pump 2 is provided with a fluid inlet 201 and a fluid outlet 202. The fluid inlet 201 is connected to the fluid inlet 201. The waste liquid output hole 109 of the flow channel plate 1 is connected to receive the waste liquid flowing out from the detection cavity 101 , and the fluid outlet 202 is connected to the waste liquid input hole 110 of the flow channel plate 1 . connected to pump the waste liquid into the waste liquid cavity 102 .

As an example, the micropump 2 includes, but is not limited to, any one of a thermal bubble micropump, a syringe pump, a peristaltic pump and a piezoelectric pump. In this embodiment, the micropump 2 is a thermal bubble micropump as an example, the size radius of the fluid inlet and the fluid outlet of the thermal bubble micropump is 0.5mm, and the center distance between the two ports is 4.58mm. In other embodiments, the size and distance of the fluid inlet and outlet can also be adjusted as required, which should not unduly limit the protection scope of the present invention.

Please refer to FIG. 5 , which is a schematic structural diagram of the front cover layer 3 . The front cover layer 3 is located on the front of the flow channel plate 1 and covers the detection cavity 101 , the flow channel connection holes 106 , and the The waste liquid output hole 109 , the waste liquid input hole 110 and the flow channel on the front of the flow channel plate 1 .

As an example, the front cover layer 3 includes, but is not limited to, a pressure film.

As an example, the front cover layer 3 is a whole piece, and the front cover layer 3 is provided with an opening 301 at a position opposite to the waste liquid cavity 102 and the sample addition cavity 103 .

In other embodiments, the front cover layer 3 may also be multiple pieces, for example, the part covering the detection cavity 101 may be a single piece, so that other parts of the microfluidic detection chip can be pre-assembled. At a specific time, a silicon wafer or other carrier for signal detection is placed in the detection cavity 101, and the protection scope of the present invention should not be unduly limited here.

Please refer to FIG. 6 , which is a schematic structural diagram of the back cover layer 4 . The back cover layer 4 is located on the back of the flow channel plate 1 and covers the liquid inlet hole 105 , the flow channel connection hole 106 and all the other components. Describe the flow channel on the back of the flow channel plate 1.

As an example, the back cover layer 4 includes, but is not limited to, a pressure film.

As an example, the back cover layer 4 is a whole piece.

Please refer to FIG. 7 , which is a schematic three-dimensional structure diagram of the microvalve 5 . The micro-valve 5 and the liquid inlet hole 105 have at least a complementary shape. When the micro-valve 5 is inserted into the liquid inlet hole 105, the liquid in the sample adding cavity 103 cannot pass through the liquid inlet. The holes 105 flow to the flow channels on the back of the flow channel plate 1, so that multi-channel liquid path switching can be realized. The operation of the micro-valve 5 can be performed manually or by a mechanical arm, and the protection scope of the present invention should not be excessively limited here.

As an example, the material of the microvalve 5 includes but is not limited to any one of acrylic and polydimethylsiloxane (PDMS).

Please refer to FIG. 8 , which shows an assembly alignment method of the microfluidic detection chip.

As an example, in the process of assembling the microfluidic detection chip, the micropump 2 can be firstly bonded to the Inside the micro-pump cavity 104 (wherein, the fluid inlet 201 of the micro-pump 2 communicates with the waste liquid output hole 109 at the bottom of the micro-pump cavity 104, and the fluid outlet 202 of the micro-pump 2 communicates with the The waste liquid input hole 110 at the bottom of the micro-pump cavity 104 is connected), and the antibody-modified silicon wafer 6 is placed in the detection cavity 101 (the silicon wafer can also be bonded to the detection cavity 101 by an adhesive). Check the bottom of the cavity), and then connect the pressure film (the front cover layer 3 and the back cover layer 4) to the front and back sides of the flow channel plate 1 through pressure extrusion.

Please refer to FIG. 9 , which is a schematic structural diagram of the microfluidic detection chip after the assembly is completed, wherein one microvalve 5 is in a released state to open the corresponding liquid path, and the other microvalves are placed in the corresponding liquid inlet holes to make the corresponding liquid path open. The fluid circuit is cut off.

Please refer to FIG. 10 and FIG. 11 , which are respectively two cross-sectional views of the assembled microfluidic detection chip.

Please refer to FIGS. 12 to 14 , wherein, FIG. 12 is a cross-sectional view of the portion of the flow channel plate 1 having the sample adding cavity 103 and the liquid inlet hole 105 , and FIG. 13 is the microvalve 5 Fig. 14 is a cross-sectional view of the micro-valve 5 when it is above the liquid inlet hole 105 but not inserted into the liquid inlet hole 105 .

As an example, the liquid inlet hole 105 and the micro-valve 5 both have a section of inclined side wall that is inclined inward from top to bottom, that is, the contact part of the liquid inlet hole 105 and the micro-valve 5 is tapered , when the micro valve 5 is inserted into the liquid inlet hole 105 , the inclined side wall of the liquid inlet hole 105 is in close contact with the inclined side wall of the micro valve 5 .

As an example, when the microvalve 5 is inserted into the liquid inlet hole 105 , the bottom surface of the microvalve 5 may reach the plane where the bottom surface of the flow channel plate 1 is located, or may not reach the bottom surface of the flow channel plate 1 . flat. As shown in FIG. 14 , it is shown that when the microvalve 5 is inserted into the liquid inlet hole 105 , the bottom surface of the microvalve 5 does not reach the plane where the bottom surface of the flow channel plate 1 is located, which is more favorable for downward movement. Pressure is applied so that the microvalve 5 is in close contact with the side wall of the liquid inlet hole.

As an example, the cross-section of the liquid inlet hole 105 and a section of the micro-valve 5 with inclined side walls are both circular or polygonal. Correspondingly, the corresponding parts of the micro-valve 5 are truncated or truncated shape.

Please refer to FIG. 15 and FIG. 16. In another embodiment, the side wall of the liquid inlet hole 105 can also be vertical, and the side wall of the part of the micro valve 5 inserted into the liquid inlet hole 105 is also vertical. .

As an example, as shown in FIG. 16 , when the side wall of the liquid inlet hole 105 is vertical, when the microvalve 5 is inserted into the liquid inlet hole 105 and the axes are coincident, the outer wall of the microvalve 5 and the The distance between the inner walls of the liquid inlet holes 105 is less than 0.02mm, that is to say, the size of the micro valve 5 is slightly smaller than the size of the liquid inlet port 105, so that the micro valve 5 can be put into the liquid inlet At the same time, the effect of a micro-valve can be achieved by relying on the difference in the flow resistance at the liquid inlet 105 .

It should be noted that FIG. 16 shows the situation in which the bottom surface of the microvalve 5 is in contact with the back cover layer 4 when the microvalve 5 is inserted into the liquid inlet hole 105. In other embodiments, When the microvalve 5 is inserted into the liquid inlet hole 105 , the bottom surface of the microvalve 5 may not be in contact with the back cover layer 4 .

As an example, the cross section of the liquid inlet hole 105 and the cross section of the part where the micro valve 5 is inserted into the liquid inlet hole 105 are both circular or polygonal. Correspondingly, the corresponding The parts are cylindrical or prismatic.

It should be noted that, in other embodiments, the contours of the microvalve 5 and the liquid inlet hole 105 may also be in other shapes, as long as the shapes are complementary so that when the microvalve 5 is inserted into the liquid inlet hole 105 The liquid circuit can be cut off during the middle, and the protection scope of the present invention should not be excessively limited here.

The microfluidic detection chip of this embodiment has a stable and reliable microfluidic flow channel, and is equipped with a micropump and a simple and operable microvalve, which can easily realize the switching of multi-channel liquid circuits. Through the coordination of the microvalve and the micropump It can easily control the volume of the sample and other reagents flowing through the detection cavity, and can quantitatively measure the concentration of the substance to be tested in the sample in a relatively short time.

Embodiment 2

In this embodiment, the microfluidic detection chip described in Embodiment 1 is used to detect small molecule samples.

Please refer to Fig. 9 and Fig. 10, the microfluidic detection chip has three liquid inlet cavities, three conical microvalves for switching liquid paths, flow channels, and a modified primary antibody is placed in order from right to left. Silicon wafer reaction cavity, thermal bubble micropump and waste liquid cavity.

Add excess test sample, labeled secondary antibody, and washing solution to the three liquid inlet cavities, respectively. The first step is to block the liquid inlet of the liquid inlet cavity containing the secondary antibody and cleaning solution with a conical acrylic microvalve, turn on the thermal bubble micropump until the calculated sample volume to be tested is passed, and close the thermal bubble micropump. The second step is to use the same acrylic microvalve to block the liquid inlet of the liquid inlet cavity containing the tested sample and the labeled secondary antibody, turn on the thermal bubble micropump, clean the excess test sample, and close the thermal bubble micropump. Pump. Step 3: Continue to use the acrylic micro-valve to block the liquid inlet of the liquid inlet cavity containing the sample to be tested and the cleaning solution, turn on the hot-bubble micro-pump until the calculated volume of the secondary antibody reagent is passed, and turn off the hot-bubble micro-pump . The fourth step is to repeat the operation of the second step, the only difference is that this time is to wash the excess secondary antibody reagent. Finally, in the fifth step, place the microfluidic detection chip after the reaction is completed under an instrument specially designed to read the fluorescence intensity to read the fluorescence value, and each different fluorescence value corresponds to a corresponding sample concentration.

Embodiment 3

In this example, the microfluidic detection chip described in Example 1 is used to detect samples by sandwich enzyme-linked immunosorbent assay.

The microfluidic detection chip required in this embodiment is roughly the same as the microfluidic detection chip shown in FIG. 9 , except that the number of required liquid inlet cavities is changed from three to four.

The specific detection process is as follows: antigens, namely sample reagent, antibody B reagent paired with primary antibody, secondary antibody reagent and cleaning solution, are respectively added into the four liquid inlet cavities. According to the operation of Example 2, the sample reagent, the cleaning solution, the antibody B reagent, the cleaning solution, the secondary antibody reagent, and the cleaning solution are sequentially passed through. Then, place the microfluidic detection chip under an instrument specially designed to read the fluorescence intensity to read the fluorescence value to obtain the corresponding sample concentration.

Embodiment 4

In this embodiment, the microfluidic detection chip described in Embodiment 1 is used to detect samples by chemiluminescence immunoassay.

The microfluidic detection chip required in this embodiment is roughly the same as the microfluidic detection chip shown in FIG. 9 , except that the number of required liquid inlet cavities is changed from three to five.

The specific detection process is as follows: antigens, namely sample reagents, antibody B reagents paired with primary antibodies, secondary antibody reagents, luminescent substrate reagents and cleaning solutions, are respectively added to the five liquid inlet cavities. According to the operation of Example 2, the sample reagent, the cleaning solution, the antibody B reagent, the cleaning solution, the secondary antibody reagent, the cleaning solution, and the luminescent substrate reagent are sequentially passed through, and the reaction is allowed to stand for a certain period of time. Then, place the microfluidic detection chip under an instrument specially designed to read the fluorescence intensity to read the fluorescence value to obtain the corresponding sample concentration.

In summary, the microfluidic detection chip of the present invention has a stable and reliable microfluidic flow channel, and is equipped with a micropump and a simple and operable microvalve, which can easily realize the switching of multi-channel liquid circuits. The coordinated work with the micropump can conveniently control the volume of the sample and other reagents flowing through the detection cavity, and can quantitatively measure the concentration of the substance to be tested in the sample in a relatively short period of time. Therefore, the utility model effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

The above-mentioned embodiments merely illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.

Claims (8)

1. a microfluidic detection chip, is characterized in that, comprises: A flow channel plate, the front of the flow channel plate is provided with a detection cavity, a waste liquid cavity and a plurality of sample addition cavity, the back of the flow channel plate is provided with a micro pump cavity, wherein the bottom of the sample addition cavity is There is a liquid inlet hole that penetrates the flow channel plate up and down, and a flow channel connection hole that penetrates the flow channel plate up and down is arranged between the detection cavity and the sample addition cavity. The flow channel connection holes are communicated through the flow channel provided on the front of the flow channel plate, and the flow channel connection hole and the liquid inlet hole are communicated through the flow channel provided on the back of the flow channel plate. The bottom surface of the micropump cavity is provided with a waste liquid output hole and a waste liquid input hole that penetrate the flow channel plate up and down, the waste liquid output hole is communicated with the detection cavity, and the waste liquid input hole is connected with the waste liquid input hole. The waste liquid cavity is connected; A micro-pump, placed in the micro-pump cavity, the front of the micro-pump is provided with a fluid inlet and a fluid outlet, the fluid inlet communicates with the waste liquid output hole, and the fluid outlet and the waste liquid input hole connected; The front cover layer is located on the front of the flow channel plate and covers the detection cavity, the flow channel connection hole, the waste liquid output hole, the waste liquid input hole and the flow channel on the front side of the flow channel plate ; The back cover layer is located on the back of the flow channel plate and covers the liquid inlet hole, the flow channel connection hole and the flow channel on the back of the flow channel plate; A plurality of micro-valves, the micro-valve and the liquid inlet hole have at least a section of complementary shape, when the micro-valve is inserted into the liquid inlet hole, the liquid in the sample adding cavity cannot pass through the liquid inlet The holes flow to the flow channels on the back of the flow plate. 2 . The microfluidic detection chip according to claim 1 , wherein the liquid inlet hole and the microvalve both have a section of inclined sidewalls that are inclined inward from top to bottom. When the microvalve is inserted into When the liquid inlet hole is in the liquid inlet hole, the inclined side wall of the liquid inlet hole is in close contact with the inclined side wall of the micro valve. 3 . The microfluidic detection chip according to claim 2 , wherein the cross-sections of the liquid inlet hole and a section of the microvalve with inclined side walls are both circular or polygonal. 4 . 4 . The microfluidic detection chip according to claim 1 , wherein the side wall of the liquid inlet hole is vertical, and the side wall of the part of the microvalve inserted into the liquid inlet hole is vertical. 5 . 5 . The microfluidic detection chip according to claim 4 , wherein the cross section of the liquid inlet hole and the cross section of the part where the microvalve is inserted into the liquid inlet hole are both circular or uniform. 6 . in the shape of a polygon. 6 . The microfluidic detection chip according to claim 4 , wherein when the microvalve is inserted into the liquid inlet hole and the axes are coincident, the outer wall of the microvalve and the inner wall of the liquid inlet hole The distance between them is less than 0.02mm. 7 . The microfluidic detection chip according to claim 1 , wherein the micropump comprises any one of a thermal bubble micropump, a syringe pump, a peristaltic pump and a piezoelectric pump. 8 . 8 . The microfluidic detection chip according to claim 1 , wherein the front cover layer comprises a pressure film, and the back cover layer comprises a pressure film. 9 .

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