CN219562540U - Flexible loading device - Google Patents

Abstract

The utility model discloses a flexible loading device which comprises a processing fixing mechanism and a sliding mechanism, wherein a rotatable workpiece is arranged on the processing fixing mechanism, the processing fixing mechanism is arranged on the sliding mechanism in a sliding manner along a first direction, one end of the processing fixing mechanism, which is opposite to the workpiece, is connected with the sliding mechanism through the flexible loading mechanism, and the flexible loading mechanism is connected with the processing fixing mechanism through a force sensor; the utility model has the advantages that: flexible loading is achieved, while measurement of the loaded load can be achieved.

Description

Flexible loading device

Technical Field

The utility model relates to the technical field of grinding machine equipment, in particular to a flexible loading device.

Background

The semiconductor industry is the industry with serious neck blocking phenomenon in the core technology in China at present, wherein special semiconductor processing equipment is an important link for restricting the development of semiconductor technology in China, and is also an important field for supporting related industry and technical planning policies in China. Thinning is an important process step in semiconductor manufacturing. At present, thinning is generally finished by adopting a grinding wheel or a fixed abrasive grinding tool and other processing tools in a self-rotation grinding mode, the processing tools have important influence on the removal efficiency and the surface quality of thinning processing, and the performance of the processing tools needs to be researched through grinding processing experiments. The special thinning grinder for the semiconductor substrate has higher price, and meanwhile, a fixed feeding speed mode is adopted, so that the influence of grinding force on the processing performance of a processing tool cannot be analyzed, and the grinding tool is in rigid contact with a workpiece; the grinding machine adopting the fixed load mode generally adopts a cylinder pressurizing mode to carry out load control, has a complex structure and high cost, and is difficult to meet the increasingly-growing demands of research, development and test of the semiconductor substrate thinning processing tool.

In summary, the existing semiconductor substrate processing test device can perform higher-precision setting treatment on the processing feed, but has complex structure and high cost, the workpiece and the grinding tool are generally in rigid contact, and the surface of the processed workpiece is possibly damaged to a certain extent due to vibration in the precise processing process, especially in the dry grinding process, so that the processing quality is affected. For example, CN202344362U discloses a sapphire thinning machine with a horizontal layout, a grinding wheel shaft adopts a stepping motor and a ball screw mechanism to control feeding speed and displacement, and a workpiece and a grinding tool are in rigid contact, so that flexible loading cannot be realized.

Disclosure of Invention

The technical problem to be solved by the utility model is that the semiconductor substrate processing test device in the prior art has complex structure and high cost, the workpiece and the grinding tool are in rigid contact generally, and the surface of the processed workpiece is possibly damaged to a certain extent due to vibration in the precision processing process, especially in the dry grinding processing process, so that flexible loading cannot be realized.

The utility model solves the technical problems by the following technical means: the utility model provides a flexible loading device, includes processing fixed establishment and slide mechanism install rotatable work piece on the processing fixed establishment, processing fixed establishment slides along first direction and sets up on slide mechanism, processing fixed establishment dorsad work piece's one end pass through flexible loading mechanism with slide mechanism connects, flexible loading mechanism with processing fixed establishment passes through force sensor connection.

The beneficial effects are that: the utility model has simple structure, low cost and easy realization. The sliding position of the sliding mechanism is adjusted by driving the processing fixing mechanism to slide relative to the sliding mechanism, so that the compression displacement of the flexible loading mechanism is adjusted, the adjustment of the contact load between the grinding tool and the workpiece is realized, the grinding force is easy to control, the workpiece is not in rigid contact with the grinding tool, meanwhile, the buffer damping effect is provided for the extrusion of the sliding mechanism in the first direction by the flexible loading mechanism, the contact damage of the grinding tool and the workpiece is prevented, and the flexible loading is realized.

Further, the sliding mechanism comprises a first sliding table in sliding fit with the machining fixing mechanism and a second sliding table in sliding fit with the first sliding table, a first motor is arranged on the second sliding table, the first motor is connected with the first sliding table through a screw-nut pair structure, and the first sliding table and the second sliding table slide along a first direction; the first sliding table is in sliding fit with the processing fixing mechanism through a sliding rail and a sliding block structure.

Still further, processing fixed establishment include with first slip table sliding fit's first platform, first servo motor and cavity unit head are installed to first platform top fixed mounting, install the unit head shafting on the cavity unit head, the one end of unit head shafting is provided with the ring flange, the work piece with ring flange fixed fit, first servo motor's output with unit head shafting transmission fit.

Furthermore, the flange plate is coaxially fixed with a microporous ceramic sucker, the other end of the power head shafting is fixedly connected with a high-speed rotary joint, the inside of the power head shafting is of a hollow structure, and the high-speed rotary joint is connected to a vacuum system.

Further, the flange plate and the microporous ceramic sucker are detachably fixed through bolts.

Further, the flange plate is fixedly connected with the trimming plate through the bolts.

Still further, the vacuum system comprises a vacuum pump connected with the high-speed rotary joint through a pipeline, and a throttle valve and a vacuum gauge are respectively arranged on the pipeline.

Further, one end of the first platform, which is opposite to the workpiece, is provided with a first vertical plate, a second vertical plate is arranged on the first sliding table, the force sensor is fixed on the first vertical plate, and two ends of the flexible loading mechanism are respectively and fixedly matched with the force sensor and the second vertical plate.

Still further, the flexible loading mechanism is a damper secured between the force sensor and the second riser.

Still further, flexible loading mechanism includes the fly leaf parallel with the second riser, the fly leaf can follow first direction and slide on first slip table, the fly leaf with force transducer fixed connection, be provided with at least one damping slide along the horizontal direction on the side that second riser and fly leaf are relative respectively, it is provided with damping slider to slide on the damping slide, the both ends of damping slide are provided with the articulated shaft respectively and with the attenuator of damping slider butt, the articulated shaft articulates the one end of fixed connecting rod respectively, two connecting rod cross hinge connect to form on the damping slider and cut fork structure.

The utility model has the advantages that:

(1) The utility model has simple structure, low cost and easy realization. The sliding position of the sliding mechanism is adjusted by driving the processing fixing mechanism to slide relative to the sliding mechanism, so that the compression displacement of the flexible loading mechanism is adjusted, the adjustment of the contact load between the grinding tool and the workpiece is realized, the grinding force is easy to control, the workpiece is not in rigid contact with the grinding tool, meanwhile, the buffer damping effect is provided for the extrusion of the sliding mechanism in the first direction by the flexible loading mechanism, the contact damage of the grinding tool and the workpiece is prevented, and the flexible loading is realized.

(2) When the flexible loading structure is used for loading, the first platform moves in a direction away from the grinding tool, so that the force sensor and the flexible loading mechanism are extruded, the movable plate is compressed to be close to the second vertical plate, two connecting rods on the scissor structure are driven to be compressed and opened, and the damping sliding block is extruded outwards, so that flexible loading is provided. Compared with a flexible loading mechanism formed by single dampers, the flexible loading mechanism has better structural stability in the flexible loading process, and can effectively reduce vibration of an experiment platform in the dry grinding process, so that the processing process is more stable.

Drawings

FIG. 1 is a schematic view of a grinding test platform disclosed in embodiment 1 of the present utility model;

fig. 2 is a schematic diagram of a load control module of a grinding test platform according to embodiment 1 of the present utility model;

FIG. 3 is a schematic view of a sliding mechanism of a flexible loading device according to embodiment 1 of the present utility model;

FIG. 4 is a schematic view of a processing and fixing mechanism of a flexible loading device according to embodiment 1 of the present utility model;

FIG. 5 is a schematic diagram of a flexible loading device according to embodiment 1 of the present utility model, in which a power head shaft system is engaged with a workpiece;

FIG. 6 is a schematic diagram of a microporous ceramic sucker of a flexible loading device according to embodiment 1 of the present utility model;

fig. 7 is a schematic diagram of a state of matching a power head shafting and a trimming disc of the flexible loading device disclosed in embodiment 1 of the present utility model;

FIG. 8 is a schematic diagram of a vacuum system of a flexible loading apparatus according to embodiment 1 of the present utility model;

FIG. 9 is a schematic diagram of a grinding test platform according to embodiment 2 of the present utility model;

FIG. 10 is a schematic view of a flexible loading mechanism of a flexible loading device according to embodiment 2 of the present utility model;

FIG. 11 is a schematic view of a flexible loading device movable plate according to embodiment 2 of the present utility model;

fig. 12 is a schematic view of a second vertical plate of a flexible loading device according to embodiment 2 of the present utility model.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions in the embodiments of the present utility model will be clearly and completely described in the following in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

The utility model provides a flexible loading device which is a part of a grinding experiment platform, and is combined with fig. 1 and 2, wherein the grinding experiment platform comprises a grinding tool fixing mechanism 1, a machining fixing mechanism 2, a sliding mechanism 3 and a load control module 4, wherein the machining fixing mechanism 2 and the sliding mechanism 3 form the flexible loading device, and the whole grinding experiment platform is integrally introduced below, so that the flexible loading device related to the utility model is indirectly and in detail introduced. In combination with fig. 1 and fig. 2, this embodiment provides a grinding test platform, install rotatable grinding apparatus 11 and work piece 21 on grinding apparatus fixture 1 and the processing fixture 2 respectively, grinding apparatus 11 surface is towards the surface to be processed of work piece 21, processing fixture 2 slides along first direction and sets up on slide mechanism 3, the axial of grinding apparatus 11 is parallel with first direction, the one end that processing fixture 2 was facing away from work piece 21 is passed through flexible loading mechanism 31 with slide mechanism 3 is connected, flexible loading mechanism 31 with processing fixture 2 passes through force sensor 32 and is connected, force sensor 32 and load control module 4 communication connection, load control module 4 can drive processing fixture 2 slides along first direction on slide mechanism 3.

In this embodiment, the grinding tool 11 and the workpiece 21 can both rotate to realize rapid grinding of the workpiece 21, the load control module 4 drives the processing fixing mechanism 2 to slide relative to the sliding mechanism 3 to adjust the position, so as to adjust the relative distance between the workpiece 21 and the grinding tool 11, and further adjust the grinding force, meanwhile, the flexible loading mechanism 31 enables the workpiece 21 to be pressed in a first direction to adjust the position, so as to prevent the grinding tool 11 from being damaged by contact with the workpiece 21, the load control module 4 determines the pressure born by the current workpiece 21 by detecting the detection value of the force sensor 32, so that the experimental data of the pressure and the grinding result are conveniently collected, the position of the processing fixing mechanism 2 can be timely adjusted according to the safety threshold of processing, the workpiece 21 is prevented from being damaged due to overlarge pressure, and particularly, the processing fixing mechanism 2 can be controlled to be far away from the grinding tool 11 along the first direction when the pressure is overlarge, and the processing fixing mechanism 2 is controlled to be close to the grinding tool 11 along the first direction when the pressure is too small and cannot be effectively ground.

Referring to fig. 1 and 3, the sliding mechanism 3 includes a first sliding table 33 slidably engaged with the processing fixing mechanism 2, and a second sliding table 34 slidably engaged with the first sliding table 33, a first motor 341 is disposed on the second sliding table 34, the first motor 341 is engaged with the first sliding table 33 through a screw-nut pair driving mechanism, and the first sliding table 33 is slidably engaged with the second sliding table 34 along a first direction to prevent rotation thereof, so that the first sliding table 33 can slide along the first direction under the driving of the first motor 341, and meanwhile, the surface of the first sliding table 33 is slidably engaged with the first platform 22 of the processing fixing mechanism 2 through a sliding rail and sliding block structure.

Referring to fig. 1 and fig. 4 again, a first servo motor 23 and a hollow power head 24 are fixedly installed above the first platform 22, a power head shaft system 25 is installed on the hollow power head 24, a flange 251 is disposed at one end of the power head shaft system 25 facing the grinding tool 11, the workpiece 21 is fixedly matched with the flange 251, and an output end of the first servo motor 23 is in transmission fit with the power head shaft system 25.

Specifically, the power head shaft system 25 passes through the housing of the hollow power head 24, free rotation of the power shaft system 25 and the housing of the hollow power head 24 can be realized through a bearing and other structures, a belt wheel 26 is fixedly connected to the end of the power head shaft system 25 and the output end of the first servo motor 23 respectively, and the two belt wheels are connected through a belt 261 to realize transmission.

Referring to fig. 4 and 5 again, a microporous ceramic suction cup 5 is coaxially fixed at one end of the flange 251 facing the grinding tool 11, the power head shaft system 25 is of a hollow structure, a connecting piece 252 is arranged on a belt pulley 26 connected with the power head shaft system 25, the connecting piece 252 is fixedly connected with a fixed end of a high-speed rotary joint 27 in a screwed manner, the rotary end of the high-speed rotary joint 27 is communicated with a vacuum system, and the rotary end of the high-speed rotary joint 27 can rotate freely relative to the fixed end, so that negative pressure is provided for the microporous ceramic suction cup 5 through the vacuum system, and the connection positions of the microporous ceramic suction cup 5, the flange 251, the power head shaft system 25, the belt pulley 26 and the high-speed rotary joint 27 can be provided with necessary sealing structures to prevent air leakage as required, and the workpiece is adsorbed and fixed on the microporous ceramic suction cup 5 through the negative pressure generated by the vacuum system.

Further, referring to fig. 5, the flange 251 and the microporous ceramic suction cup 5 are detachably connected by bolts 252, specifically, the flange 251 and the microporous ceramic suction cup 5 are attached and fixed along a first direction, a plurality of bolts 252 are screwed along a circle on the fixing surface, and the bolts 252 penetrate through the flange 251 and the microporous ceramic suction cup 5 along the first direction to be fixed.

Referring to fig. 6, the end surface of the microporous ceramic suction cup 5 is settled to form a containing groove 51, the workpiece 11 can be placed in the containing groove 51, and the surface of the containing groove 51 is densely covered with a microporous structure, so that the workpiece 11 is adsorbed and fixed.

Referring to fig. 7, the flange 251 may be detachably connected to the trimming disc 6, the fixing manner is the same as that of the microporous ceramic suction disc 5, the surface of the trimming disc 6 is diamond, the surface of the grinding tool 11 may be ground, after the grinding tool 11 works for a period of time, the surface is filled with grinding dust generated by grinding, the surface roughness is affected, the grinding effect is further affected, and the workpiece 21 is replaced by the trimming disc 6, so that the grinding tool 11 can be trimmed, and the working effect is maintained.

Referring to fig. 8, the vacuum system in this embodiment includes a vacuum pump 271 connected with the high-speed rotary joint 27 through a pipe on which a throttle valve 272 and a vacuum gauge 273 may be further provided.

Referring to fig. 1 and fig. 3 again, a first vertical plate 28 is disposed at one end of the first platform 22 facing away from the grinding tool 11, a second vertical plate 35 is disposed on the first sliding table 33, the force sensor 32 is fixed on the first vertical plate 28, two ends of the flexible loading mechanism 31 are respectively fixedly matched with the force sensor 32 and the second vertical plate 35, in this embodiment, the flexible loading mechanism 31 is a damper, so that a buffering damping effect is provided for axial extrusion of the sliding mechanism 3, and the workpiece 21 is protected.

Further, for convenience in performing grinding experimental analysis, the second sliding table 34 is further slidably fixed on the second platform 36 along a second direction, where the second direction is that the first direction is in the same horizontal plane and is perpendicular to the first direction, the second platform 36 is slidably matched with the second sliding table 34 through a screw-nut pair structure driven by a second motor (not shown), and the first motor 341 and the second motor both control working states thereof through the automatic load control module, so that adjustment of the position of the workpiece 21 in the horizontal plane is achieved, and convenience in performing experimental analysis is achieved.

Referring to fig. 2, the load control module 4 includes a transmitter 41, an acquisition card 42, a 485 hub 43, a control board 44, a motor driving board 45 and an upper computer 46, where the transmitter 41 is electrically connected with the force sensor 32, the transmitter 41 converts a received force signal into an electric signal and transmits the electric signal to the acquisition card 42, the acquisition card 42 converts the electric signal into a digital signal and transmits the digital signal to the 485 hub 43, the 485 hub 43 has the main function of reproducing, shaping and amplifying the received signal, the 485 hub 43 guides the data into the upper computer 46 on one hand, and feeds back the data to a singlechip development board, namely the control board 44, the control board 44 changes the received signal into a burning of starting execution program, and the control board 44 is electrically connected with the first motor 341 and the second motor through the motor driving board 45 according to the control of the program, so as to realize the adjustment of the position of the processing fixing mechanism 2. It should be noted that the load control module 4 is not protected by the present utility model, nor is it a major improvement of the present utility model, but is merely listed here for clarity of showing the complete components of the grinding platform, and is not protected by the built-in program, and may be implemented using any of the existing technologies.

The working process of the grinding test platform provided in this embodiment is as follows,

the grinding tool fixing mechanism 1 is fixedly provided with the grinding tool 11 all the time, and the hollow power head 24 driven by the first servo motor 23 can be fixedly provided with the micropore ceramic sucker 5 and also can be fixedly provided with the trimming disc 6, and the grinding tool 11 and the trimming disc can be quickly replaced. The specific flow is as follows:

(1) The microporous ceramic suction cup 5 is fixed on the power head shafting 25, the microporous ceramic suction cup 25 adsorbs a lamellar workpiece 21, the first servo motor 23 drives the power head shafting 25 to rotate, thereby enabling the workpiece 21 to rotate, the grinding tool fixing mechanism 1 controls the grinding tool 11 to rotate, the workpiece 21 moves along a first direction to be in contact with the grinding tool 11 through the sliding mechanism 3, processing of the workpiece 21 is achieved, in the processing process, the first motor 341 installed at the end part of the second sliding table 34 can enable the first sliding table 3 to slide along the first direction relative to the second sliding table 34, thereby driving the flexible loading mechanism 31 to move so as to enable the first platform 22 to slide along the first direction to adjust the position, thereby adjusting the distance between the grinding tool 11 and the workpiece 21, and further adjusting the grinding load, but if the contact between the grinding tool 11 and the workpiece 21 is too tight, the grinding load is too large, the workpiece abrasion is possibly caused, or the grinding effect cannot be achieved on the workpiece 21 when the strength is too small, therefore, the force signal transmitted by the automatic control module is collected, the first motor 341 is controlled to rotate when the force signal exceeds the range according to the built-in program of the second sliding table 34, the preset force signal is controlled to slightly far away from the first motor 341, the workpiece 21 is slightly far away from the preset motor 11, the grinding load is slightly is prevented from the grinding the preset control plate when the preset load is slightly is controlled to be lower than the preset load control plate 21, and the grinding load is not fully controlled to avoid the grinding the workpiece 11. The second sliding table 34 can be controlled to slide along the second direction, so that the positions of the grinding tool 11 and the workpiece 21 can be adjusted in the whole plane, and the grinding process can be flexibly performed.

(2) The surface of the grinding tool 11 is rough, after a period of processing, the grinding tool 11 is blocked, and the grinding tool 11 needs to be trimmed, so that the microporous ceramic sucker 5 on the hollow power head 24 is taken down and changed into a trimming disc 6, and the grinding tool 11 is ground and cleaned through diamond on the surface of the trimming disc 6, so that the trimming of the grinding tool 11 is realized. The working principle of the microporous ceramic suction cup 5 is the same as that of the microporous ceramic suction cup 5, and a detailed description is omitted.

(3) After finishing the grinding tool 141, changing the finishing disc 6 on the hollow power head 24 into a microporous ceramic sucking disc 5, sucking the workpiece 21, and then rotating and friction-contacting the grinding tool 11 and the workpiece to continue the processing of the workpiece. It should be noted that, during the grinding process of the workpiece, a certain degree of damage may be caused to the surface of the workpiece due to vibration, which affects the processing quality, and at this time, the relative sliding between the first platform 22 and the first sliding table 33 can reduce the pressure and avoid the damage. When the vibration is stronger, the first platform 22 can reciprocate relative to the first sliding table 33 due to the vibration, and at the moment, the damper of the flexible loading mechanism can generate elastic displacement, so that vibration impact and collision of the mechanical device during operation are effectively buffered, the mechanical action is stable, the surface damage of a workpiece caused by the strong vibration is avoided, and flexible loading is realized.

Example 2

The difference between this embodiment and embodiment 1 is that the specific structure of the flexible loading mechanism 31 is different, as shown in fig. 9 to 12, the flexible loading mechanism 31 includes a movable plate 37 parallel to the second vertical plate 35, the movable plate 37 can slide on the first sliding table 33 along the first direction, the movable plate 37 is fixedly connected with the force sensor 32, at least one damping slide 351 is provided on opposite sides of the second vertical plate 35 and the movable plate 37 along the horizontal direction (i.e. the second direction), a damping slide block 352 is slidably provided on the damping slide 351, two ends of the damping slide 351 are respectively provided with a hinge shaft 353 and a damper 354 abutting against the damping slide block 352, one end of a fixed link 355 is hinged on the hinge shaft 353 of the second vertical plate 35 and the movable plate 37, the two fixed links 355 are mutually intersected, the other end is hinged to the damping slide block 352 to form a scissor structure, if necessary, the center points of the two fixed links 355 can also be hinged together, in order to keep balance, and the two scissor structures are respectively provided on the second vertical plate 35 and the movable plate 37 to form two supporting groups.

The working process of the embodiment is as follows: when the vibration of the device is strong, the first platform 22 moves towards the direction far away from the grinding tool 11, so that the pressure sensor 32 and the flexible loading mechanism 31 are pressed, the movable plate 37 is compressed to be close to the second vertical plate 35, so that the two connecting rods 355 on the scissor structure are driven to be compressed and opened, the damping sliding blocks 352 are pressed outwards, and the damping sliding blocks are damped and buffered under the action of the damper 354, so that the vibration impact and the collision of the mechanical device in operation can be effectively reduced, and the mechanical action is stable.

The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims (10)

1. The flexible loading device is characterized by comprising a processing fixing mechanism and a sliding mechanism, wherein a workpiece capable of rotating is arranged on the processing fixing mechanism, the processing fixing mechanism is arranged on the sliding mechanism in a sliding manner along a first direction, one end, opposite to the workpiece, of the processing fixing mechanism is connected with the sliding mechanism through the flexible loading mechanism, and the flexible loading mechanism is connected with the processing fixing mechanism through a force sensor.

2. The flexible loading device according to claim 1, wherein the sliding mechanism comprises a first sliding table in sliding fit with the processing fixing mechanism, and a second sliding table in sliding fit with the first sliding table, a first motor is arranged on the second sliding table, the first motor is connected with the first sliding table through a screw-nut pair structure, and the first sliding table and the second sliding table slide along a first direction; the first sliding table is in sliding fit with the processing fixing mechanism through a sliding rail and a sliding block structure.

3. The flexible loading device according to claim 2, wherein the processing fixing mechanism comprises a first platform in sliding fit with the first sliding table, a first servo motor and a hollow power head are fixedly installed above the first platform, a power head shaft system is installed on the hollow power head, a flange plate is arranged at one end of the power head shaft system, the workpiece is in fixed fit with the flange plate, and an output end of the first servo motor is in transmission fit with the power head shaft system.

4. A flexible loading device according to claim 3, wherein the flange is coaxially fixed with a microporous ceramic chuck, the other end of the power head shaft is fixedly connected with a high-speed rotary joint, the inside of the power head shaft is of a hollow structure, and the high-speed rotary joint is connected to a vacuum system.

5. The flexible loading device of claim 4, wherein the flange and the microporous ceramic cup are removably secured by bolts.

6. A flexible loading unit as recited in claim 5, wherein said flange is fixedly attached to said trimming disk by said bolts.

7. A flexible loading unit as claimed in claim 4 wherein the vacuum system comprises a vacuum pump connected to the high speed swivel via a conduit, the conduit further having a throttle valve and a vacuum gauge respectively.

8. A flexible loading device according to claim 3, wherein a first vertical plate is arranged at one end of the first platform facing away from the workpiece, a second vertical plate is arranged on the first sliding table, the force sensor is fixed on the first vertical plate, and two ends of the flexible loading mechanism are respectively fixedly matched with the force sensor and the second vertical plate.

9. A flexible loading unit as recited in claim 8, wherein the flexible loading mechanism is a damper secured between the force sensor and the second riser.

10. The flexible loading device according to claim 8, wherein the flexible loading mechanism comprises a movable plate parallel to a second vertical plate, the movable plate can slide on a first sliding table along a first direction, the movable plate is fixedly connected with the force sensor, at least one damping slide way is respectively arranged on opposite side surfaces of the second vertical plate and the movable plate along a horizontal direction, a damping slide block is slidably arranged on the damping slide way, two ends of the damping slide way are respectively provided with a hinge shaft and a damper abutted to the damping slide block, the hinge shafts are respectively hinged with one end of a fixed connecting rod, and two connecting rods are connected to the damping slide block in a cross hinge manner to form a scissor structure.