CN219544839U - Silicon wafer transfer device - Google Patents

Abstract

The utility model provides a silicon chip transfer device, includes the transfer case, and transfer case bottom is equipped with the wheel, and transfer case lateral wall is connected with the handrail, is equipped with the drain valve on the transfer case bottom plate, and transfer case inner wall is equipped with the wedge dog, and the relative one side of wedge fixed dog is equipped with the wedge and removes the dog, and the wedge removes the dog and be connected with the slide bar, and the slide bar slidable ground sets up on the lateral wall of transfer case, and the slide bar passes through the retaining member and is fixed with the lateral wall of transfer case. The transfer box is manufactured into the movable transfer vehicle, so that the traditional operation mode of transferring by adopting the glue box is replaced; the transfer box is provided with a drain valve, so that the water draining and changing operation is convenient, and the labor intensity is greatly reduced; the wedge-shaped movable stop block and the wedge-shaped fixed stop block are used for clamping the silicon wafers to be transferred, so that the movement of the silicon wafers is avoided, and the stability of the silicon wafers in the transfer process is improved.

Description

Silicon wafer transfer device

Technical Field

The utility model belongs to the technical field of silicon wafer degumming and transferring, and particularly relates to a silicon wafer transferring device.

Background

At present, in the links of silicon wafer degumming and inserting sheets, the silicon wafer to be inserted is transported mainly by adopting a glue box transportation mode. The specific mode is as follows: the silicon wafers with the rubbed glue are intensively placed in a small plastic glue box filled with water, and then the glue box is transported to the inserting piece end by a trolley.

With the technical progress of industry, the silicon wafer size is continuously increased, the loading capacity of the wire cutting machine is continuously increased, and the number of the silicon wafers per blade is continuously increased. The groove distance of the guide wheel is continuously reduced, the silicon wafer is continuously thinned, and the number of the silicon wafers is continuously increased. The size of the glue box is increased along with the increasing number of the sheets. The silicon powder is enriched in the middle of the stripped silicon wafer, and the stripped silicon wafer is required to be soaked in water during transferring in a glue wiping and inserting link in order to avoid hidden pollution. With the development of industry, the defect of the traditional mode of transferring silicon wafers by adopting a glue box is continuously revealed. The specific disadvantages are as follows:

1) The number of silicon wafers is continuously increased, the size of the silicon wafers is continuously enlarged, so that the transferring glue box is continuously enlarged, and the problem that the enlarged glue box is frequently changed in water is highlighted. Staff lifts case and trades water weight more and more, intensity of labour is bigger and bigger. The water changing operation with higher and higher labor intensity brings great potential safety hazard, so that the wafer damage accident can occur when staff operate carelessly, and the safety accidents such as injury and the like can occur when staff are serious.

2) Along with the increase of the quantity of the silicon wafers transported each time, the stability of the silicon wafer placement is also a problem to be considered, the existing placement method is to vertically place the silicon wafers in the transport box, the silicon wafers are obliquely abutted against the inner wall of the transport box, the existing placement scheme does not take steady measures, the silicon wafers can slide, and the silicon wafers are easy to crack, break edges and other anomalies.

Disclosure of Invention

In view of the technical problems existing in the background technology, the silicon wafer transfer device provided by the utility model has the advantages that the transfer box is manufactured into a movable transfer vehicle, so that the traditional operation mode of transferring by adopting the glue box is replaced; the transfer box is provided with a drain valve, so that the water draining and changing operation is convenient, and the labor intensity is greatly reduced; the wedge-shaped movable stop block and the wedge-shaped fixed stop block are used for clamping the silicon wafers to be transferred, so that the movement of the silicon wafers is avoided, and the stability of the silicon wafers in the transfer process is improved.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the utility model provides a silicon chip transfer device, includes the transfer case, and transfer case bottom is equipped with the wheel, and transfer case lateral wall is connected with the handrail, is equipped with the drain valve on the transfer case bottom plate, and transfer case inner wall is equipped with the wedge dog, and the relative one side of wedge fixed dog is equipped with the wedge and removes the dog, and the wedge removes the dog and be connected with the slide bar, and the slide bar slidable ground sets up on the lateral wall of transfer case, and the slide bar passes through the retaining member and is fixed with the lateral wall of transfer case.

In the preferred scheme, the retaining member include an external screw thread section of thick bamboo, an external screw thread section of thick bamboo is equipped with the bifurcation mouth, an external screw thread section of thick bamboo cooperatees with the lock nut and is used for fixed the slide bar.

In the preferred proposal, the outer end part of the sliding rod is provided with a handle.

In the preferred scheme, the slide bar set up in the lateral wall of transfer box and lean on upper position, the end connection L type adapter rod of slide bar, L type adapter rod is connected with wedge removal dog.

The following beneficial effects can be achieved in this patent:

1. the transfer box is manufactured into the movable transfer vehicle, and the traditional operation mode of transferring by adopting the glue box is replaced. The transfer box is provided with the drain valve, so that the water draining and changing operation is convenient, the labor intensity is greatly reduced, and the potential safety hazard of injuring people by smashing in the transfer process is reduced.

2. The wedge-shaped movable stop block and the wedge-shaped fixed stop block are used for clamping the silicon wafers to be transferred, so that the movement of the silicon wafers is avoided, and the stability of the silicon wafers in the transfer process is improved. In addition, the position of the wedge-shaped movable stop block can be adaptively adjusted, namely, the position of the wedge-shaped movable stop block can be adjusted at any time according to the quantity of the transferred silicon wafers.

Drawings

The utility model is further illustrated by the following examples in conjunction with the accompanying drawings:

FIG. 1 is a front view of the present utility model (with the locking member unlocked);

fig. 2 is a front view of the present utility model (the locking member is locked).

In the figure: the transfer box 1, wheels 2, handrails 3, a drain valve 4, a wedge-shaped fixed stop block 5, a wedge-shaped movable stop block 6, a slide bar 7, a locking piece 8, a handle 9 and a silicon wafer 10.

Detailed Description

Example 1:

the preferred scheme is as shown in fig. 1-2, a silicon chip transfer device, including transfer case 1, transfer case 1 bottom is equipped with wheel 2, and transfer case 1 lateral wall is connected with handrail 3, is equipped with drain valve 4 on the transfer case 1 bottom plate, and transfer case 1 inner wall is equipped with wedge dog 5, and the opposite side of wedge fixed dog 5 is equipped with wedge and removes dog 6, and wedge removes dog 6 and slide bar 7 to be connected, and slide bar 7 slidable ground sets up on the lateral wall of transfer case 1, and slide bar 7 is fixed with the lateral wall of transfer case 1 through retaining member 8.

The transfer box 1 in this embodiment has the following dimensions: 840mm by 600mm by 3800 mm; the model of the drain valve 4 is: 1-1/4 (DN 32) stainless steel drainage ball valve; the handrail 3 is a ∅ mm x 2mm circular tube, and the corners are in arc transition connection; the bearing of the whole device is larger than or equal to 300kg.

Preferably, a stainless steel storage box with the thickness of 200mm and 150mm and 30mm can be arranged on the outer wall of the transfer box 1 and used for placing a silicon wafer work-following sheet, so that the work-following sheet can be prevented from being scattered everywhere or wetted and lost by dirty water.

The transfer box 1 is made of stainless steel, and all welding seams are smooth and flat and have no defects of slag inclusion, air holes and the like.

The wheel 2 adopts a 6 inch polyurethane wheel, the front wheel is a universal wheel with brake, the rear wheel is a directional wheel, and the transportation is convenient.

Further, the locking member 8 comprises an external thread cylinder provided with a bifurcation, and the external thread cylinder is matched with the locking nut for fixing the slide rod 7. When the lock nut is mounted on the external thread cylinder with the fork opening, the external thread cylinder can be deformed, so that the slide rod 7 is clamped. The wedge-shaped movable stop block 6 and the wedge-shaped fixed stop block 5 are used for clamping the silicon wafers to be transferred, so that the movement of the silicon wafers is avoided, and the stability of the silicon wafers in the transfer process is improved.

Further, the outer end of the slide bar 7 is provided with a grip 9. The position of the wedge-shaped moving stop 6 is conveniently adjusted.

Further, the sliding rod 7 is arranged at the upper position of the side wall of the transfer box 1, the end part of the sliding rod 7 is connected with an L-shaped transfer rod, and the L-shaped transfer rod is connected with the wedge-shaped moving stop block 6. The transfer box 1 needs to be filled with water, and in order to avoid water leaking from the locking member 8, the position of the locking member 8 is adjusted to a position above the transfer box 1.

Preferably, before the transfer device is used, a layer of ground mat or silica gel mat is paved at the bottom of the transfer box 1, and a layer of silica gel mat is adhered to the periphery of the transfer box 1. When in use, the silicon wafer and the transfer silicon wafer can be placed after about half of water is added into the transfer box 1. When the water black in the tank needs to be replaced, the drain valve below the water black tank is unscrewed to finish the drainage operation. The transfer box 1 has reasonable design of height and size, is convenient for manual sheet placement, sheet loading and transfer, does not need to be bent deeply, and is convenient for drainage and simple to operate.

The above embodiments are only preferred embodiments of the present utility model, and should not be construed as limiting the present utility model, and the scope of the present utility model should be defined by the claims, including the equivalents of the technical features in the claims. I.e., equivalent replacement modifications within the scope of this utility model are also within the scope of the utility model.

Claims (4)

1. The utility model provides a silicon chip transfer device, includes transfer box (1), its characterized in that: transfer case (1) bottom is equipped with wheel (2), transfer case (1) lateral wall is connected with handrail (3), be equipped with drain valve (4) on transfer case (1) bottom plate, transfer case (1) inner wall is equipped with wedge dog (5), the opposite side of wedge fixed dog (5) is equipped with wedge and removes dog (6), wedge removes dog (6) and is connected with slide bar (7), slide bar (7) slidable ground sets up on the lateral wall of transfer case (1), slide bar (7) are fixed with the lateral wall of transfer case (1) through retaining member (8).

2. The wafer transfer device of claim 1, wherein: the locking piece (8) comprises an external thread cylinder, the external thread cylinder is provided with a bifurcation, and the external thread cylinder is matched with the locking nut to fix the sliding rod (7).

3. The wafer transfer device of claim 1, wherein: the outer end of the slide bar (7) is provided with a handle (9).

4. The wafer transfer device of claim 1, wherein: the sliding rod (7) is arranged at the upper position of the side wall of the transfer box (1), the end part of the sliding rod (7) is connected with an L-shaped transfer rod, and the L-shaped transfer rod is connected with the wedge-shaped moving stop block (6).