CN219369076U

CN219369076U - Leak detection frock

Info

Publication number: CN219369076U
Application number: CN202320364132.7U
Authority: CN
Inventors: 冯卫东; 蔡广云; 江顺
Original assignee: Hefei Weirui Technology Co ltd
Current assignee: Hefei Weirui Technology Co ltd
Priority date: 2023-02-27
Filing date: 2023-02-27
Publication date: 2023-07-18
Anticipated expiration: 2033-02-27

Abstract

The utility model discloses a leakage detection tool, and belongs to the technical field of tool equipment. The leakage detection tool comprises a tool body, wherein one end of the tool body is used for being connected with a base to be detected, and the other end of the tool body is communicated with a vacuum pumping device; the tool body comprises an upper connecting pipe, a middle connecting pipe and a lower locking piece, and the upper connecting pipe, the middle connecting pipe and the lower locking piece are sequentially detachably connected. The utility model can be disassembled and assembled, thereby being convenient for installation.

Description

Leak detection frock

Technical Field

The utility model relates to the technical field of tool equipment, in particular to a leakage detection tool.

Background

The film Plating (PECVD) process in the manufacture of thin film transistor liquid crystal display (TFT-LCD) is a film deposition technique which uses chemical reaction to generate solid product from reactant (gas) and deposit the solid product on the surface of a substrate, and uses the activity of plasma to promote the reaction so that the chemical reaction can be carried out at a lower temperature.

The Process Chamber (Process Chamber) controls all the processes of the chemical vapor deposition Process on one glass, and is mainly composed of a reaction Chamber Lid (Chamber Lid) and a reaction Chamber Body (Chamber Body). A SUSCEPTOR (S/S) is one of the key components of a reaction Chamber (Chamber Body) and functions as: 1. as a lower plate of the parallel capacitor; 2. a support member as a substrate; 3. has heating function, and provides temperature conditions for the reaction; 4. can move up and down, and provides reaction Spacing (Spacing) conditions for the reaction.

The S/S is replaced frequently, and the program and cleaning requirements of each system can be continuously seen, and particles, arc breakdown, color-changing spots and wrong operation indicate that the S/S needs to be replaced. The replaced S/S can be returned to the supply end for maintenance and cleaning, and leakage detection is needed before and after the S/S maintenance, so that the S/S is ensured to be free from leakage, and the internal seal is good. However, other parts of the S/S body except the pipe part is communicated with the outside are sealed, so that leakage detection can only pass through the pipe part, a plurality of wires such as heating wires can be exposed above the pipe part, and the conventional integral leakage detection tool is generally inconvenient to install.

Disclosure of Invention

1. Technical problem to be solved by the utility model

Aiming at the problem that an integrated leak detection tool for detecting base leakage in the prior art is inconvenient to install, the utility model provides the leak detection tool which can be assembled and disassembled, so that the leak detection tool is convenient to install.

2. Technical proposal

In order to achieve the above purpose, the utility model provides a leak detection tool, which comprises a tool body, wherein one end of the tool body is used for being connected with a base to be detected, and the other end of the tool body is communicated with a vacuum pumping device; the tool body comprises an upper connecting pipe, a middle connecting pipe and a lower locking piece, wherein the upper connecting pipe, the middle connecting pipe and the lower locking piece are sequentially and detachably connected.

Further, one end of the upper connecting pipe is provided with a connecting hole, and the other end of the upper connecting pipe is in threaded connection with the middle connecting pipe.

Further, the connecting hole is connected with the KF connector and is connected with the vacuumizing equipment through the KF connector.

Further, an internal thread is arranged at one end of the middle connecting pipe, which is connected with the upper connecting pipe, and a matched external thread is correspondingly arranged at the end part of the upper connecting pipe; the end part of the middle connecting pipe is provided with a mounting groove, a first sealing piece is mounted in the mounting groove, and when the upper connecting pipe is screwed with the middle connecting pipe, the connecting part of the upper connecting pipe and the middle connecting pipe is sealed by the first sealing piece.

Further, one end of the middle connecting pipe far away from the upper connecting pipe is in threaded connection with the lower locking piece; the end of the middle connecting pipe, which is connected with the lower locking piece, is provided with external threads, the end of the lower locking piece is correspondingly provided with internal threads, and the end of the middle connecting pipe can be screwed into the end of the lower locking piece.

Further, the end portion of the middle connecting pipe connected with the lower locking piece is provided with a mounting groove, the mounting groove is provided with a second sealing piece, and when the tool body is mounted on the base to be detected, the second sealing piece seals the joint of the tool body and the base.

Further, a check ring is arranged at the joint of the middle connecting pipe and the lower locking piece and used for supporting the second sealing piece.

Further, the connection parts of the middle connecting pipe and the lower locking piece are respectively provided with a chamfer angle.

Further, the outer side surface of the lower locking piece is provided with knurling.

3. Advantageous effects

Compared with the prior art, the technical scheme provided by the utility model has the following beneficial effects:

(1) According to the leakage detection tool disclosed by the utility model, the tool body is used for connecting the base with the vacuumizing equipment so as to detect whether the base leaks or not. The tool body adopts split type upper connecting pipe, middle connecting pipe and lower part retaining member to can dismantle in proper order between them and connect, detachable structure makes the very long tool body split of length be a plurality of shorter tool parts structure, when facing the condition of base pipe portion top can expose many electric wires such as heater wire, can install more conveniently. In addition, the detachable tool structure can timely replace damaged parts, the whole tool body does not need to be replaced, and cost saving is facilitated.

(2) According to the leakage detection tool disclosed by the utility model, the connecting hole arranged on the connecting pipe at the upper part can enable the vacuumizing equipment to be communicated with the tool body and the base, the KF connector is a quick-dismantling flange which can be applied to a vacuum system, and the installation efficiency of the tool body and the vacuumizing equipment can be improved. The upper connecting pipe and the middle connecting pipe are in threaded connection, so that on one hand, the upper connecting pipe and the middle connecting pipe can be detached, on the other hand, the threaded connection has good sealing performance, and leakage at the connecting position can be prevented. The first sealing piece is arranged between the upper connecting pipe and the middle connecting pipe, so that the tightness of the tool body can be further improved.

(3) According to the leakage detection tool disclosed by the utility model, the middle connecting piece and the lower locking piece are connected through the threads, so that the disassembly is convenient, and the tightness of the tool body is improved. The second sealing piece can improve the sealing performance of the tool body when the tool body is connected with the base, so that the leakage of the connecting part is prevented, and the misjudgment of the detection result is avoided. The retainer ring can play a supporting role on the second sealing piece, so that the tightness of the tool body is further improved.

(4) According to the leakage detection tool, the chamfer angles are respectively arranged at the connecting positions of the middle connecting pipe and the lower locking piece, so that the middle connecting pipe and the lower locking piece can be conveniently abutted, and the further installation efficiency is improved. The knurling is arranged on the outer side surface of the lower locking piece, so that the friction force of the outer side surface of the lower locking piece can be increased, the lower locking piece can be screwed up and mounted, and the mounting efficiency is further improved.

Drawings

In the drawings, the dimensions and proportions are not representative of the dimensions and proportions of an actual product. The figures are merely illustrative and certain unnecessary elements or features have been omitted for clarity.

FIG. 1 is a schematic view of the overall structure of a tooling body in an embodiment of the utility model;

FIG. 2 is a schematic view of the structure of an upper connection pipe in an embodiment of the present utility model;

FIG. 3 is a schematic view showing the structure of an intermediate connection pipe in an embodiment of the present utility model;

FIG. 4 is a schematic view of the structure of a retainer ring in an embodiment of the utility model;

FIG. 5 is a schematic view of the lower retaining member in an embodiment of the present utility model;

fig. 6 is a schematic view of a mounting structure of a base and a tool body according to an embodiment of the present utility model.

Reference numerals in the schematic drawings illustrate:

1. a tool body; 101. an upper connecting pipe; 102. an intermediate connecting pipe; 103. a retainer ring; 104. a lower locking member; 105. a first seal; 106. a second seal; 2. a base body; 201. a base body; 202. a base pipe section; 3. and a connection hole.

Detailed Description

For a further understanding of the present utility model, the present utility model will be described in detail with reference to the drawings and examples. What has been described herein is merely a preferred embodiment according to the present utility model, and other ways of implementing the utility model will occur to those skilled in the art on the basis of the preferred embodiment, and are within the scope of the utility model.

In the description of the present utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Examples

Referring to fig. 1-5, the embodiment provides a leak detection tool, which comprises a tool body 1, wherein one end of the tool body 1 is used for being connected with a base to be detected, and the other end of the tool body is communicated with a vacuum pumping device. The tool body 1 is connected with the vacuumizing equipment and the base, the vacuumizing equipment can vacuumize the base and then detect the vacuum degree of the base, so that whether the base leaks or not is determined, and the follow-up cleaning work of the base is facilitated. The tool body 1 comprises a split type upper connecting pipe 101, a middle connecting pipe 102 and a lower locking piece 104, wherein the upper connecting pipe 101, the middle connecting pipe 102 and the lower locking piece 104 are sequentially and detachably connected. The detachable structure enables the tool body 1 with a long length to be detached into a plurality of shorter tool part structures, and the tool body can be more convenient to install when a plurality of wires such as heating wires are exposed above the base pipe 202. In addition, detachable frock structure also can in time replace the part of damage, need not change whole root frock body 1, is favorable to practicing thrift the cost.

In this embodiment, referring to fig. 1 and 2, one end of the upper connecting pipe 101 is provided with a connecting hole 3, the connecting hole 3 is a through hole, and penetrates through the end of the upper connecting pipe 101, the connecting hole 3 can enable a vacuum device to be communicated with the tool body 1 and the base, so that the vacuum device can detect the vacuum degree of the base, and further judge whether the base leaks. The other end of the upper connecting pipe 101 is in threaded connection with the middle connecting pipe 102, so that on one hand, the upper connecting pipe and the middle connecting pipe can be detached, and on the other hand, the threaded connection has good sealing performance, and leakage at the joint of the upper connecting pipe and the middle connecting pipe can be prevented. Further, the connecting hole 3 is connected with the KF connector and is connected with the vacuumizing equipment through the KF connector, the KF connector can be applied to a quick-dismantling flange of a vacuum system, and the installation efficiency of the tool body 1 and the vacuumizing equipment can be improved.

In this embodiment, referring to fig. 1, 2 and 3, an end of the middle connecting pipe 102 connected with the upper connecting pipe 101 is provided with an internal thread, an end of the upper connecting pipe 101 is correspondingly provided with a matched external thread, and the end of the upper connecting pipe 101 can extend into the middle connecting pipe 102, so that the tightness of the connection between the two pipes is further improved. The tip of middle connecting pipe 102 is provided with the mounting groove, installs first sealing member 105 in the mounting groove, and when upper portion connecting pipe 101 and middle connecting pipe 102 were screwed up, first sealing member 105 sealed the junction with the two, and first sealing member 105 plays the effect of further strengthening the leakproofness of both connections, helps improving the accuracy of leak hunting result.

In this embodiment, referring to fig. 1, 3 and 5, an end of the intermediate connection pipe 102 away from the upper connection pipe 101 is screwed with the lower locking member 104; the end of the middle connecting pipe 102 connected with the lower locking piece 104 is provided with external threads, the end of the lower locking piece 104 is correspondingly provided with internal threads, and the end of the middle connecting pipe 102 can be screwed into the end of the lower locking piece 104. The threaded connection of the middle connecting pipe 102 and the lower locking piece 104 is convenient for disassembly and assembly, and can increase the tightness of the connection of the middle connecting pipe 102 and the lower locking piece. Further, the end portion of the middle connecting pipe 102 connected with the lower locking member 104 is provided with a mounting groove, the mounting groove is provided with a second sealing member 106, and when the tool body 1 is mounted on the base to be detected, the second sealing member 106 seals the joint of the tool body 1 and the base. The second sealing member 106 can improve the sealing performance of the tool body 1 when being connected with the base, so that the leakage of the connecting part is prevented, and the erroneous judgment of the detection result is avoided.

It should be noted that, referring to fig. 1 and 4, the connection between the intermediate connection pipe 102 and the lower locking member 104 is provided with a retainer ring 103, the retainer ring 103 is used for supporting the second sealing member 106, and the retainer ring 103 can strengthen the structural stability of the second sealing member 106, prevent the position deviation of the second sealing member 106, and further improve the tightness of the tool body 1.

In this embodiment, referring to fig. 1, 3 and 5, the connection between the middle connecting pipe 102 and the lower locking member 104 is respectively provided with a chamfer, and the chamfer angles of the two are the same, so that the two can be conveniently abutted, which is beneficial to improving the installation efficiency of the two. Still further, referring to fig. 1 and 5, the outer side of the lower locking member 104 is provided with knurling, which can increase the friction force of the outer side of the lower locking member 104, thereby facilitating screwing of the lower locking member 104 and improving the installation and removal efficiency of the lower locking member 104.

According to another aspect of the disclosure, referring to fig. 6, a base is further provided, including a base body 2, the base body 2 includes a base body 201 and a base pipe 202, the base pipe 202 is in sealing connection with the leak detection tool, the leak detection tool is of a split design, the installation is convenient, the sealing performance is good, the base body 2 is convenient for detecting the sealing performance, and the follow-up cleaning work is facilitated. By the detachable tooling structure, the lower locker 104, the intermediate connection pipe 102 and the upper connection pipe 101 are mounted on the base pipe portion 202 of the base in the mounting order, and even if a plurality of wires such as heating wires are exposed above the base pipe portion 202, the detachable structure can be mounted conveniently.

The utility model and its embodiments have been described above by way of illustration and not limitation, and the utility model is illustrated in the accompanying drawings and described in the drawings in which the actual structure is not limited thereto. Therefore, if one of ordinary skill in the art is informed by this disclosure, the structural mode and the embodiments similar to the technical scheme are not creatively designed without departing from the gist of the present utility model.

Claims

1. The leakage detection tool is characterized by comprising a tool body (1), wherein one end of the tool body (1) is used for being connected with a base to be detected, and the other end of the tool body is communicated with a vacuum pumping device; the tool body (1) comprises an upper connecting pipe (101), a middle connecting pipe (102) and a lower locking piece (104), and the upper connecting pipe (101), the middle connecting pipe (102) and the lower locking piece (104) are sequentially and detachably connected.

2. A leak detection tool according to claim 1, characterized in that one end of the upper connecting pipe (101) is provided with a connecting hole (3), and the other end is in threaded connection with the intermediate connecting pipe (102).

3. A leak detection tool according to claim 2, characterized in that the connection hole (3) is connected with KF-connector and with vacuum-pumping equipment via KF-connector.

4. The leak detection tool according to claim 2, wherein an end of the intermediate connecting pipe (102) connected with the upper connecting pipe (101) is provided with internal threads, and an end of the upper connecting pipe (101) is correspondingly provided with matched external threads; the end part of the middle connecting pipe (102) is provided with a mounting groove, a first sealing piece (105) is mounted in the mounting groove, and when the upper connecting pipe (101) and the middle connecting pipe (102) are screwed down, the connecting part of the upper connecting pipe and the middle connecting pipe is sealed by the first sealing piece (105).

5. A leak detection tool as claimed in claim 1, wherein the end of the intermediate connection tube (102) remote from the upper connection tube (101) is in threaded connection with the lower locking member (104); the end, connected with the lower locking piece (104), of the middle connecting pipe (102) is provided with external threads, the end part of the lower locking piece (104) is correspondingly provided with internal threads, and the end part of the middle connecting pipe (102) can be screwed into the end part of the lower locking piece (104).

6. The leak detection tool as recited in claim 5, wherein an end portion of the intermediate connection pipe (102) connected to the lower locking member (104) is provided with a mounting groove, the mounting groove is provided with a second sealing member (106), and when the tool body (1) is mounted on the base to be leak detected, the second sealing member (106) seals a joint of the tool body (1) and the base.

7. The leak detection tool according to claim 6, wherein a retainer ring (103) is provided at the connection of the intermediate connection pipe (102) and the lower locking member (104), the retainer ring (103) being adapted to support the second sealing member (106).

8. The leak detection tool as recited in claim 5, wherein the joints of the intermediate connecting pipe (102) and the lower locking member (104) are each provided with a chamfer.

9. A leak detection tool as defined in claim 1, wherein the outer side of the lower lock member (104) is provided with knurling.