CN219051357U - Get rid of metal ion's circulation filter equipment - Google Patents

Abstract

The utility model provides a circulating filter device for removing metal ions, which relates to the technical field of photoresist treatment and comprises a mounting frame, wherein a liquid tank is arranged on the mounting frame, a feed pipe, a discharge pipe and a guide pipe are arranged on the liquid tank, a discharge valve is arranged on the discharge pipe, a power mechanism and a filter mechanism are also arranged on the liquid tank, the power mechanism is connected with the guide pipe and is used for guiding a photoetching solvent in the liquid tank into the filter mechanism, the filter mechanism is connected with a return pipe, one end of the return pipe is connected with the feed pipe, and a stirring mechanism is also arranged in the liquid tank; the device realizes automatic circulating filtration and discharging of metal particles in the photoresist solvent, has simple structure and convenient use, can effectively remove metal ions in the photoresist resin/solvent in a circulating filtration mode, and has high use value.

Description

Get rid of metal ion's circulation filter equipment

Technical Field

The utility model relates to the technical field of photoresist treatment, in particular to a circulating filter device for removing metal ions.

Background

In the semiconductor field, photolithography is used as a core step in the process of manufacturing integrated circuits, while photoresist is used as a core material in the process of manufacturing photolithography, and trace metal ion pollution in a photoresist solvent can cause threshold voltage variation of devices, thereby adversely affecting the overall performance of processed devices and even directly causing yield reduction and product rejection. Some solvents or related products used for manufacturing electronic devices contain part of metal ions, and even trace metal ion pollution can affect the precision of the electronic devices, so that the content control of the metal ions by electronic elements with higher ends is more strict.

The aqueous phase has been studied for metal ion removal and detection methods, and there are mainly adsorption methods, chemical reduction methods, chemical precipitation methods, solvent extraction methods, ion exchange methods, and the like. Ion exchange resins are commonly used to remove metal ions from water, while photoresists employ organic solvent systems in which methods and studies for removing metal ions from organic solvents have been rarely mentioned and used. One of the removal methods is to mix and stir the ion exchange resin and the photoresist resin/solvent, and then filter, precipitate, separate solid and liquid and the like to remove metal ions.

Disclosure of Invention

The utility model aims to solve the problems in the background art, and further provides a circulating filter device for removing metal ions.

The technical scheme adopted for solving the technical problems is as follows:

the utility model provides a get rid of metal ion's circulation filter equipment, including the mounting bracket, be equipped with the liquid material jar on the mounting bracket, be equipped with inlet pipe, material loading pipe, row material pipe and passage on the liquid material jar, install the relief valve on the row material pipe, still be equipped with power unit and filter mechanism on the liquid material jar, power unit and passage connection and be arranged in leading-in filter mechanism with the photoetching solvent in the liquid material jar filter, filter mechanism is connected with the back flow, the one end and the inlet pipe of back flow are connected, be equipped with rabbling mechanism in the liquid material jar.

Further, power unit includes suction pump, feed liquor pipe and drain pipe, and the suction pump is installed on the liquid material jar and suction pump is connected with feed liquor pipe and drain pipe, and the feed liquor pipe is connected with the feed liquor pipe, and the drain pipe is connected with filtering mechanism.

Further, filtering mechanism includes rose box, filter screen, sealing door, ion exchange resin, pan feeding pipe and drain pipe, and rose box one side is equipped with sealing door, and the rose box top is equipped with the pan feeding pipe, and the pan feeding pipe is connected with the drain pipe, and the rose box bottom is equipped with the blowing pipe, and the blowing pipe is connected with the back flow, and the rose box internalization is provided with an at least filter screen, has placed ion exchange resin on the filter screen.

Further, filtering mechanism includes rose box, filter screen, ion exchange resin, pan feeding pipe, blowing pipe, places seat and closing cap, and rose box top swing joint has a closing cap, and filter screen one side is equipped with the pan feeding pipe, and the pan feeding pipe is connected with the drain pipe, and the filter screen bottom is equipped with the blowing pipe, blowing pipe and back flow connection are equipped with at least a set of seat of placing in the rose box, and a filter screen has been placed respectively on every group of seat of placing, has placed ion exchange resin on the filter screen.

Further, the pore diameter of the filter screen is smaller than the particle diameter of the ion exchange resin so as to prevent the ion exchange resin from flowing out of the filter screen and entering the photoetching solvent.

Furthermore, the liquid outlet pipe and the material inlet pipe are connected through a quick connector so as to be convenient for disassembly and assembly between the liquid outlet pipe and the material inlet pipe, and the material outlet pipe and the return pipe are also connected through the quick connector; this design is in order to be convenient for more to filtering mechanism's washing, makes things convenient for its dismantlement.

Further, rabbling mechanism includes driving motor, speed reducer and puddler, and driving motor and speed reducer are installed in the liquid material jar outside and driving motor is connected with the speed reducer, and the speed reducer is connected with the puddler, and the puddler is vertical stretches into in the liquid material jar.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the photoetching solvent in the liquid tank is timely extracted into the filter by utilizing the power mechanism, so that the photoetching solvent filtered by the filter mechanism can form good circulation in the liquid tank, automatic circulation filtering and discharging can be completed without manual intervention, and the photoetching solvent filtering device is simple in structure, convenient to use and capable of effectively removing metal ions in the photoetching solvent in a circulation filtering mode.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of the installation of a closure;

wherein: 1. a mounting frame; 2. a liquid tank; 21. a feed pipe; 22. a discharge pipe; 221. a discharge valve; 23. a material guiding pipe; 24. feeding pipes; 3. a suction pump; 31. a liquid inlet pipe; 32. a liquid outlet pipe; 33. a quick connector; 4. a filter box; 41. a filter screen; 42. sealing the door; 43. an ion exchange resin; 44. a feeding pipe; 45. discharging pipes; 46. a return pipe; 47. a placement seat; 48. a cover; 5. a driving motor; 51. a speed reducer; 52. stirring rod.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model. The utility model will be further described with reference to the accompanying drawings and examples:

as shown in fig. 1, a circulating filter device for removing metal ions comprises a mounting frame 1, wherein a liquid tank 2 for containing a lithography solvent is arranged on the mounting frame 1, a feeding pipe 21 for introducing a clean lithography solvent and a feeding pipe 24 for pouring the lithography solvent containing the metal ions are arranged at the top of the liquid tank 2, a discharging pipe 22 for discharging the clean lithography solvent and a material guiding pipe 23 for discharging the lithography solvent containing the metal ions are arranged at the bottom of the liquid tank, a material discharging valve 221 is arranged on the discharging pipe 22, and the material discharging valve 221 is always kept in a closed state in the discharging process of the material guiding pipe 23; the liquid tank 2 is also provided with a power mechanism and a filtering mechanism, the power mechanism is connected with the material guide pipe 23 and used for guiding the lithography solvent in the liquid tank 2 into the filtering mechanism for filtering, the filtering mechanism is connected with a return pipe 46, one end of the return pipe 46 is connected with the material inlet pipe 21 so as to realize that the filtered lithography solvent is reintroduced into the liquid tank 2, and a stirring mechanism used for fully stirring and mixing the lithography solvent is arranged in the liquid tank 2.

Wherein, power unit includes suction pump 3, feed liquor pipe 31 and drain pipe 32, and suction pump 3 installs on liquid tank 2 and suction pump 3 is connected with feed liquor pipe 31 and drain pipe 32, and feed liquor pipe 31 is connected with feed conduit 23, and drain pipe 32 is connected with filtering mechanism, and during the use, power unit operation pumps the lithography solvent in the liquid tank 2 into filtering mechanism through drain pipe 32, and this in-process, discharge valve 221 remains closed throughout.

In at least one embodiment, the filtering mechanism comprises a filtering box 4, a filtering net 41, a sealing door 42, ion exchange resin 43, a feeding pipe 44 and a liquid outlet pipe 32, wherein the sealing door 42 for sealing the filtering box is arranged on one side of the filtering box 4, the feeding pipe 44 is arranged at the top of the filtering box 4, the feeding pipe 44 is connected with the liquid outlet pipe 32, a discharging pipe 45 is arranged at the bottom of the filtering box 4, the discharging pipe 45 is connected with a return pipe 46, at least one filtering net 41 is movably arranged in the filtering box 4, the ion exchange resin 43 is placed on the filtering net 41, and the aperture of the filtering net 41 is smaller than the particle size of the ion exchange resin 43.

In the specific implementation process of the embodiment, before removing the metal ions in the lithography solvent, the metal ions need to be cleaned, and when in use, the sealing door 42 is opened and the filter screen 41 is removed, so that the operation is simple.

In other embodiments, as shown in fig. 2, the filtering mechanism includes a filtering box 4, a filtering net 41, an ion exchange resin 43, a feeding pipe 44, a discharging pipe 45, a placing seat 47 and a sealing cover 48, the top of the filtering box 4 is movably connected with the sealing cover 48, one side of the filtering net 41 is provided with the feeding pipe 44, the feeding pipe 44 is connected with the liquid outlet pipe 32, the bottom of the filtering net 41 is provided with the discharging pipe 45, the discharging pipe 45 is connected with a return pipe 46, at least one group of placing seats 47 are arranged in the filtering box 4, each group of placing seats 47 is provided with a filtering net 41, the ion exchange resin 43 is placed on the filtering net 41, and the aperture of the filtering net 41 is smaller than the particle size of the ion exchange resin 43.

In the embodiment, before removing the metal ions in the lithography solvent, the cleaning is needed, and when in use, the cover 48 is opened, the filter screen 41 is removed from the upper end, and the operation is simple.

In order to further facilitate the cleaning of the filtering mechanism, the liquid outlet pipe 32 is connected with the liquid inlet pipe 44 through the quick connector 33 so as to facilitate the disassembly and assembly between the liquid outlet pipe 32 and the liquid inlet pipe, and the liquid outlet pipe 45 is also connected with the return pipe 46 through the quick connector 33.

Wherein, rabbling mechanism includes driving motor 5, speed reducer 51 and puddler 52, and driving motor 5 and speed reducer 51 are installed in the outside of liquid material jar 2 and driving motor 5 is connected with speed reducer 51, and speed reducer 51 is connected with puddler 52, and puddler 52 vertically stretches into in the liquid material jar 2.

When the device is specifically used, firstly, the photoetching solvent containing metal ions is injected into the liquid material tank 2 through the feeding pipe 24, the device is started, the stirring mechanism stirs the photoetching solvent, then the power mechanism guides the photoetching solvent in the liquid material tank 2 into the filtering mechanism for filtering, the filtered photoetching solvent is reintroduced into the liquid material tank 2, repeated cyclic filtering can be carried out for many times according to the specific quality requirement of the photoetching solvent, and finally, the liquid discharge valve is opened to uniformly discharge the filtered photoetching solvent into the liquid material tank 2.

The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the foregoing examples, and that the foregoing description and description are merely illustrative of the principles of this utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (7)

1. Get rid of metal ion's circulation filter equipment, a serial communication port, including mounting bracket (1), be equipped with liquid tank (2) on mounting bracket (1), be equipped with inlet pipe (21) on liquid tank (2), material loading pipe (24), row material pipe (22) and passage (23), install discharge valve (221) on row material pipe (22), still be equipped with power unit and filter mechanism on liquid tank (2), power unit is connected with passage (23) and is arranged in leading-in filter mechanism with the photoetching solvent in liquid tank (2), filter mechanism is connected with back flow (46), the one end and the inlet pipe (21) of back flow (46) are connected, still be equipped with rabbling mechanism in liquid tank (2).

2. The circulating filter apparatus for removing metal ions according to claim 1, wherein the power mechanism comprises a suction pump (3), a liquid inlet pipe (31) and a liquid outlet pipe (32), the suction pump (3) is mounted on the liquid tank (2) and the suction pump (3) is connected with the liquid inlet pipe (31) and the liquid outlet pipe (32), the liquid inlet pipe (31) is connected with the material guiding pipe (23), and the liquid outlet pipe (32) is connected with the filter mechanism.

3. The circulating filter device for removing metal ions according to claim 2, wherein the filter mechanism comprises a filter box (4), a filter screen (41), a sealing door (42), ion exchange resin (43), a feeding pipe (44) and a liquid outlet pipe (32), wherein the sealing door (42) is arranged on one side of the filter box (4), the feeding pipe (44) is arranged at the top of the filter box (4), the feeding pipe (44) is connected with the liquid outlet pipe (32), a discharging pipe (45) is arranged at the bottom of the filter box (4), the discharging pipe (45) is connected with a return pipe (46), at least one filter screen (41) is movably arranged in the filter box (4), and the ion exchange resin (43) is placed on the filter screen (41).

4. The circulating filtration device for removing metal ions according to claim 1, wherein the filtration mechanism comprises a filtration tank (4), a filter screen (41), ion exchange resin (43), a feeding pipe (44), a discharging pipe (45), a placing seat (47) and a sealing cover (48), wherein the top of the filtration tank (4) is movably connected with the sealing cover (48), the feeding pipe (44) is arranged on one side of the filter screen (41), the feeding pipe (44) is connected with a liquid outlet pipe (32), the discharging pipe (45) is arranged at the bottom of the filter screen (41), the discharging pipe (45) is connected with a return pipe (46), at least one group of placing seats (47) are arranged in the filtration tank (4), and each group of placing seats (47) is provided with one filter screen (41) on which the ion exchange resin (43) is placed.

5. A circulating filtration apparatus for removing metal ions according to claim 3 or 4, characterized in that the filter screen (41) has a pore size smaller than the particle size of the ion exchange resin (43).

6. A circulating filter arrangement for removing metal ions according to claim 3 or 4, characterized in that the outlet pipe (32) and the inlet pipe (44) are connected by means of a quick connector (33), and the outlet pipe (45) and the return pipe (46) are also connected by means of a quick connector (33).

7. The circulating filter device for removing metal ions according to claim 1, wherein the stirring mechanism comprises a driving motor (5), a speed reducer (51) and a stirring rod (52), the driving motor (5) and the speed reducer (51) are arranged outside the liquid material tank (2), the driving motor (5) is connected with the speed reducer (51), the speed reducer (51) is connected with the stirring rod (52), and the stirring rod (52) vertically stretches into the liquid material tank (2).

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