CN218296690U - Vacuum furnace body and vacuum equipment - Google Patents
Vacuum furnace body and vacuum equipment Download PDFInfo
- Publication number
- CN218296690U CN218296690U CN202222750926.5U CN202222750926U CN218296690U CN 218296690 U CN218296690 U CN 218296690U CN 202222750926 U CN202222750926 U CN 202222750926U CN 218296690 U CN218296690 U CN 218296690U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- furnace body
- shell
- furnace
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 claims abstract description 121
- 238000000605 extraction Methods 0.000 claims abstract description 34
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000001307 helium Substances 0.000 claims description 48
- 229910052734 helium Inorganic materials 0.000 claims description 48
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 48
- 238000003466 welding Methods 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 21
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 238000005238 degreasing Methods 0.000 claims description 7
- 239000003292 glue Substances 0.000 claims description 6
- 238000009529 body temperature measurement Methods 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000012423 maintenance Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000011895 specific detection Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Images
Landscapes
- Furnace Details (AREA)
Abstract
The utility model discloses a vacuum furnace body and vacuum apparatus, vacuum furnace body includes furnace body shell, the furnace body inner shell, stove outer shell connection ring, stove tail flange, furnace gate flange and vacuum extraction pipe, furnace body shell's both ends open the setting, the lateral wall of furnace body inner shell sets up the cooling runner in order to inject the open setting in both ends with the inside wall interval of furnace body shell, the cooling runner has cooling outlet and cooling entry, the one end welded connection of stove outer shell connection ring and furnace body shell and furnace body inner shell, stove outer shell connection ring is used for sealing the one end of cooling runner, stove tail flange and stove outer shell connection ring welded connection, and be located the one side that stove outer shell connection ring deviates from furnace body shell, the other end welded connection of furnace gate flange and furnace body shell and furnace body inner shell, the furnace gate flange is used for sealing the other end of cooling runner, the one end of extraction vacuum pipe is worn to establish and is welded on furnace body shell and furnace body inner shell. The vacuum furnace body can conveniently detect the leakage point in the maintenance process, and the manufacturing yield is high.
Description
Technical Field
The utility model relates to a semiconductor manufacturing equipment technical field especially relates to a vacuum furnace body and vacuum apparatus.
Background
Semiconductor or photovoltaic materials are widely applied to industries such as electronics, new energy and the like, and the semiconductor and photovoltaic materials can be applied to products after various processing treatments, for example, a sheet material is fed into a furnace and reacts under process conditions such as a certain temperature, a certain pressure and a certain gas atmosphere to obtain a required product, so that a vacuum heating furnace is required.
The manufacturing yield of the product is influenced to a great extent by the sealing degree of the vacuum furnace body of the vacuum heating furnace, if the vacuum furnace body leaks in the working process, leaked process gas can possibly harm workers, and on the other hand, external air enters the vacuum furnace body to influence the processing of the product and reduce the manufacturing yield of the product. The furnace body structure of the existing vacuum heating furnace is not easy to find the leakage point in the maintenance process.
SUMMERY OF THE UTILITY MODEL
A first object of the utility model is to provide a vacuum furnace body, this vacuum furnace body can detect the leak source very conveniently at the maintenance in-process, and it is high to make the yield.
A second object of the present invention is to provide a vacuum apparatus, which is convenient to maintain.
For realizing the technical effect, the technical scheme of the utility model as follows:
the utility model discloses a vacuum furnace body, include: the furnace body shell is provided with two open ends; the furnace body inner shell is arranged in the furnace body outer shell in an open mode, the two ends of the furnace body inner shell are arranged in the furnace body outer shell in an open mode, the outer side wall of the furnace body inner shell and the inner side wall of the furnace body outer shell are arranged at intervals to limit a cooling flow channel with the two ends arranged in an open mode, and the cooling flow channel is provided with a cooling outlet and a cooling inlet; the furnace shell connecting ring is connected with one end of the furnace body outer shell and one end of the furnace body inner shell in a welding manner, and the furnace shell connecting ring is used for sealing one end of the cooling flow channel; the furnace tail flange is welded with the furnace shell connecting ring and is positioned on one side of the furnace shell connecting ring, which deviates from the furnace body shell; the furnace door flange is welded with the other ends of the furnace body outer shell and the furnace body inner shell and is used for sealing the other end of the cooling flow channel; and one end of the vacuum extraction pipe is penetrated through and welded on the furnace body outer shell and the furnace body inner shell, and the other end of the vacuum extraction pipe is used for being connected with a vacuumizing device.
In some embodiments, the furnace shell comprises a shell body and an outer end enclosure welded at one end of the shell body, the outer circumferential surface of the outer end enclosure is an arc-shaped surface, and the outer end enclosure is welded with the furnace shell coupling ring.
In some embodiments, the furnace inner shell comprises an inner shell body and an inner end enclosure welded at one end of the inner shell body, the inner circumferential surface of the inner end enclosure is an arc-shaped surface, and the inner end enclosure is welded with the furnace shell coupling ring.
In some embodiments, the vacuum furnace body further comprises a safety valve seat, an electrode mounting seat, a gas pipeline seat, a vacuum relief mounting seat, a temperature measuring mounting seat and a heating mounting seat, which are arranged on the furnace body outer shell and the furnace body inner shell in a penetrating and welding mode; wherein: the safety valve seat is used for installing a safety control valve, the electrode mounting seat is used for installing an electrode assembly, the gas pipeline seat is used for installing a process gas pipeline, the vacuum release mounting seat is used for installing a vacuum release control valve, the temperature measurement mounting seat is used for installing a temperature measurement assembly, and the heating mounting seat is used for installing a heating assembly.
In some embodiments, the vacuum furnace body still includes cooling outlet flange and cooling inlet flange, be equipped with first clamp on the cooling outlet flange, the cooling outlet flange wear to establish in the cooling outlet and with furnace body shell welding, the cooling inlet flange wear to establish in the cooling inlet and with furnace body shell welding, be equipped with the second clamp on the cooling inlet flange, first clamp with the second clamp is used for respectively with the cooling outlet flange with cooling inlet flange and cooling pipe, blind flange, vacuum gauge, external vacuum pump or helium mass spectrometer leak detector closure.
In some embodiments, the vacuum furnace further comprises a furnace support attached to the furnace shell.
In some embodiments, the vacuum furnace further comprises a rubber discharge pipe, and the rubber discharge pipe is arranged through and welded on the furnace outer shell and the furnace inner shell.
The utility model also discloses a vacuum apparatus, include as before vacuum furnace body, furnace gate device, vacuum apparatus, stove tail motor and degrease subassembly, vacuum apparatus connects on the other end of vacuum extraction pipe, the degrease subassembly is connected on the other end of vacuum furnace body's row of rubber pipe, the housing of stove tail motor is connected on the stove tail flange, the furnace gate device can connect with opening and shutting on the furnace gate flange.
In some embodiments, the vacuum device comprises: a vacuum pump; the vacuum pipeline assembly is connected with the vacuum pump; the vacuum shell is connected with the vacuum pipeline assembly and the vacuum extraction pipe; and the vacuum gauge is arranged on the vacuum shell and is used for detecting the vacuum degree in the vacuum furnace body.
In some specific embodiments, the vacuum housing is further provided with a vacuum extraction port, and the vacuum extraction port can be connected with a helium mass spectrometer leak detector.
The utility model discloses a vacuum furnace body's beneficial effect: because the furnace shell connecting ring, the furnace door flange and the vacuum extraction pipe are all connected with the furnace body outer shell and the furnace body inner shell in a welding mode, and the furnace tail flange is connected with the furnace shell connecting ring in a welding mode, in the actual detection process, after the manufacturing is completed, only an external vacuum pump needs to be connected with one of the cooling outlet and the cooling outlet, the helium mass spectrometer leak detector is connected with the other of the cooling outlet and the cooling outlet, after the cooling flow channel is vacuumized, the helium mass spectrometer leak detector is started and simultaneously sprays helium towards welding seams among the furnace shell connecting ring, the furnace door flange, the vacuum extraction pipe, the furnace body outer shell and the furnace body inner shell in sequence, if the helium mass spectrometer leak detector detects that the helium spraying point has leakage, the leakage can be judged to occur when the helium content is larger than a preset value, the vacuum furnace body which is just manufactured is not required to be installed on a specific detection device, the leakage detection can be carried out, the leakage detection operation is very convenient, and the leakage rate can be repeatedly detected after the manufacturing is completed to improve the manufacturing yield. Meanwhile, after the vacuum furnace body is delivered from the factory and installed in the vacuum equipment, the vacuum furnace body can be independently overhauled by referring to the flow in the overhauling process without detaching the vacuum furnace body from the vacuum equipment, so that the overhauling is facilitated.
The utility model discloses a vacuum apparatus's beneficial effect, owing to have the aforesaid vacuum furnace body, in the actual test process, after the test of vacuum furnace body finishes, can install the vacuum furnace body with helium mass spectrometer leak detector on, and make the vacuum pump on the helium mass spectrometer leak detector can extract the gas in the vacuum furnace body, use vacuum apparatus to take out whole vacuum apparatus to vacuum state, spout helium towards the junction of each spare part, it just proves to spout helium department and has leaked if helium mass spectrometer leak detector detects helium content and is greater than the default, can measure whole vacuum apparatus's leak source very conveniently like this.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic structural view of a vacuum furnace body according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of another direction of the vacuum furnace body according to the embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of a vacuum furnace according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of another embodiment of the vacuum furnace body of the present invention;
fig. 5 is a schematic structural diagram of a vacuum apparatus according to an embodiment of the present invention.
Reference numerals:
1. a furnace body shell; 101. a housing body; 102. an outer end enclosure; 2. a furnace body inner shell; 201. an inner shell body; 202. an inner end enclosure; 3. a furnace shell connecting ring; 4. a furnace tail flange; 5. a furnace door flange; 6. a vacuum extraction tube; 7. a safety valve seat; 8. an electrode mount; 9. a gas pipe seat; 10. a vacuum relief mount; 11. a temperature measuring mounting base; 12. a heating mounting seat; 13. cooling the outlet flange; 14. cooling the inlet flange; 15. a first clamp; 16. a second clamp; 17. a furnace body support; 18. a rubber discharge pipe; 19. a cooling flow channel;
20. a safety control valve; 30. an electrode assembly; 40. a process gas conduit; 50. a vacuum release control valve; 60. a temperature measuring component; 70. a heating assembly; 80. a furnace door device; 90. a vacuum device; 910. a vacuum pump; 920. a vacuum conduit assembly; 930. a vacuum housing; 940. a vacuum gauge; 100. a furnace tail motor; 200. and (7) a degreasing component.
Detailed Description
In order to make the technical problem solved by the present invention, the technical solution adopted by the present invention and the technical effect achieved by the present invention clearer, the technical solution of the present invention will be further explained by combining the drawings and by means of the specific implementation manner.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features for distinguishing between descriptive features, non-sequential, non-trivial and non-trivial. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The specific structure of the vacuum furnace body according to the embodiment of the present invention will be described below with reference to fig. 1 to 4.
The utility model discloses a vacuum furnace body, as shown in fig. 1 and fig. 3, the utility model discloses a vacuum furnace body includes furnace body shell 1, furnace body inner shell 2, stove outer shell coupling ring 3, stove tail flange 4, furnace gate flange 5 and vacuum extraction pipe 6, the both ends of furnace body shell 1 open the setting, the both ends of furnace body inner shell 2 open the setting, and establish at furnace body shell 1 internal, the lateral wall of furnace body inner shell 2 sets up in order to inject the cooling runner 19 that the both ends opened the setting with the inside wall interval of furnace body shell 1, cooling runner 19 has cooling outlet and cooling inlet, the one end welded connection of stove outer shell coupling ring 3 and furnace body outer shell 1 and furnace body inner shell 2, stove outer shell coupling ring 3 is used for sealing cooling runner 19's one end, stove tail flange 4 and stove outer shell coupling ring 3 welded connection, and be located stove outer shell coupling ring 3 and deviate from one side of furnace body shell 1, furnace gate flange 5 and furnace body outer shell 1 and inner shell 2's the other end welded connection, furnace gate flange 5 is used for sealing cooling runner 19's the other end, the one end of vacuum extraction pipe 6 wears to establish and welds on furnace body shell 2, the other end of vacuum extraction pipe 90 is used for connecting with the vacuum extraction pipe.
It can be understood that, because the furnace shell connecting ring 3, the furnace door flange 5 and the vacuum extraction pipe 6 are all connected with the furnace body outer shell 1 and the furnace body inner shell 2 in a welding way, the furnace tail flange 4 is connected with the furnace shell connecting ring 3 in a welding way, in the actual detection process, after the manufacturing is completed, only an external vacuum pump needs to be connected with one of a cooling outlet and a cooling outlet, a helium mass spectrometer leak detector is connected with the other of the cooling outlet and the cooling outlet, after the cooling flow channel 19 is vacuumized, the helium mass spectrometer leak detector is started, and simultaneously, helium is sprayed towards welding seams among the furnace shell connecting ring 3, the furnace door flange 5, the vacuum extraction pipe 6, the furnace body outer shell 1 and the furnace body inner shell 2 in sequence, if the helium mass spectrometer leak detector detects that the helium spraying point has leakage, the leakage can be judged without installing the vacuum furnace body which is just manufactured on a specific detection device, so that the leakage detection operation is very convenient. Meanwhile, after the vacuum furnace body is delivered from the factory and installed in the vacuum equipment, the vacuum furnace body can be independently overhauled by referring to the flow in the overhauling process without detaching the vacuum furnace body from the vacuum equipment, so that the overhauling is facilitated.
In some embodiments, as shown in fig. 3, the furnace shell 1 includes a shell body 101 and an outer sealing head 102 welded to one end of the shell body 101, the outer surface of the outer sealing head 102 is an arc surface, and the outer sealing head 102 is welded to the shell coupling ring 3. It can be understood that if integral type sleeve structure needs machining to make its one end form the round platform of convergent, causes the damage easily in the course of working to also can reduce intensity after processing is accomplished, compare in current whole sleeve as furnace body shell, the utility model discloses well adoption components of a whole that can function independently welded structure has made things convenient for processing, has guaranteed furnace body shell 1's intensity, has prolonged the life of whole vacuum furnace body.
Preferably, the outer sealing head 102 and the housing body 101 are formed by welding a plurality of plates, so that the processing is further simplified, and the manufacturing cost is reduced.
In some embodiments, as shown in fig. 3, the furnace inner shell 2 includes an inner shell body 201 and an inner end enclosure 202 welded to one end of the inner shell body 201, an inner circumferential surface of the inner end enclosure 202 is an arc-shaped surface, and the inner end enclosure 202 is welded to the furnace shell coupling ring 3. It can be understood that if integral type sleeve structure needs machining to make its one end form the round platform of convergent, causes the damage easily in the course of working to also can reduce intensity after processing is accomplished, compare in current whole sleeve as the furnace body inner shell, the utility model discloses well adoption components of a whole that can function independently welded structure has made things convenient for processing, has guaranteed the intensity of furnace body inner shell 2, has prolonged the life of whole vacuum furnace body.
Preferably, the inner sealing head 202 and the inner shell body 201 are formed by welding a plurality of plates, so that the processing is further simplified, and the manufacturing cost is reduced.
In some embodiments, as shown in fig. 1, 2 and 4, the vacuum furnace further includes a safety valve seat 7, an electrode mounting seat 8, a gas pipeline seat 9, a vacuum release mounting seat 10, a temperature measuring mounting seat 11 and a heating mounting seat 12, which are arranged through and welded on the furnace outer shell 1 and the furnace inner shell 2, wherein the safety valve seat 7 is used for mounting a safety control valve 20, the electrode mounting seat 8 is used for mounting an electrode assembly 30, the gas pipeline seat 9 is used for mounting a process gas pipeline 40, the vacuum release mounting seat 10 is used for mounting a vacuum release control valve 50, the temperature measuring mounting seat 11 is used for mounting a temperature measuring assembly 60, and the heating mounting seat 12 is used for mounting a heating assembly 70. It can be understood that, the safety valve seat 7, the electrode mounting seat 8, the gas pipe seat 9, the vacuum release mounting seat 10, the temperature measuring mounting seat 11 and the heating mounting seat 12 are respectively welded with the furnace body outer shell 1 and the furnace body inner shell 2, and when the leak rate is detected, helium is sprayed towards the welding seams between the safety valve seat 7, the electrode mounting seat 8, the gas pipe seat 9, the vacuum release mounting seat 10, the temperature measuring mounting seat 11 and the heating mounting seat 12 and the furnace body outer shell 1 and the furnace body inner shell 2 according to the method described above, so that the operation is very simple. The safety valve seat 7, the electrode mounting seat 8, the gas pipeline seat 9, the vacuum release mounting seat 10, the temperature measuring mounting seat 11 and the heating mounting seat 12 are arranged for mounting the safety control valve 20, the electrode assembly 30, the process gas pipeline 40, the vacuum release control valve 50, the temperature measuring assembly 60 and the heating assembly 70, so that the stable mounting of the components and the vacuum furnace body is ensured, and the connection sealing performance is ensured.
In some embodiments, as shown in fig. 3, the vacuum furnace further includes a cooling outlet flange 13 and a cooling inlet flange 14, a first clamp 15 is disposed on the cooling outlet flange 13, the cooling outlet flange 13 is disposed in the cooling outlet and welded to the furnace body shell 1, the cooling inlet flange 14 is disposed in the cooling inlet and welded to the furnace body shell 1, a second clamp 16 is disposed on the cooling inlet flange 14, and the first clamp 15 and the second clamp 16 are respectively used for locking the cooling outlet flange 13 and the cooling inlet flange 14 to a cooling pipeline, a blind flange, an external vacuum gauge, an external vacuum pump, or a helium mass spectrometer leak detector. It can be understood that the cooling outlet flange 13 and the cooling inlet flange 14 facilitate the connection of a cooling circulation pipeline assembly on the vacuum furnace body, and ensure that the cooling liquid can stably circulate between the external cold source and the cooling flow channel 19, and the first clamp 15 and the second clamp 16 are respectively used for locking the cooling outlet flange 13 and the cooling inlet flange 14 with the cooling pipeline, the blind flange, the external vacuum gauge, the external vacuum pump or the helium mass spectrometer leak detector, so that the connection stability and the connection tightness of the cooling outlet flange 13 and the cooling inlet flange 14 with the cooling pipeline, the blind flange, the external vacuum gauge, the external vacuum pump or the helium mass spectrometer leak detector can be ensured in actual use or maintenance.
Preferably, the number of the cooling outlets and the number of the cooling inlets are two, the two cooling outlets are located above the vacuum furnace body, and the cooling inlets are located below the vacuum furnace body. From this, on the one hand, the circulation efficiency of coolant liquid has been promoted, ensure to cool off furnace body shell 1 and furnace body inner shell 2 stably in the in-service use process, on the other hand, at the detection leak rate in-process, cooperation blind flange on one cooling outlet flange 13, cooperation external vacuum gauge on another cooling outlet flange 13, cooperation external vacuum pump on one cooling inlet flange 14, another cooling inlet flange 14 cooperates the helium mass spectrometer leak detector, can carry out real-time supervision to the vacuum in the cooling runner 19 when detecting the leak rate like this, avoid the vacuum in the cooling runner 19 too high or cross the harmful effects that the leak rate test caused excessively.
In some embodiments, the vacuum furnace further comprises a furnace support 17 attached to the furnace housing 1. It can be understood that the furnace body support 17 can facilitate the use of a vacuum furnace body, the structure of the furnace body support 17 can be selected according to actual needs, and the specific shape of the furnace body support 17 is not selected.
In some embodiments, the vacuum furnace further comprises a rubber discharge pipe 18, and the rubber discharge pipe 18 is arranged through and welded on the furnace outer shell 1 and the furnace inner shell 2. It can be understood that the glue discharging pipe 18 can discharge the glue generated in the vacuum furnace body, thereby avoiding the phenomenon of excessive glue accumulation in the vacuum furnace body.
The first embodiment is as follows:
as shown in fig. 1 to 4, the vacuum furnace of the present embodiment includes a furnace outer shell 1, a furnace inner shell 2, a furnace shell coupling ring 3, a furnace tail flange 4, a furnace door flange 5, a vacuum extraction pipe 6, a safety valve seat 7, an electrode mounting seat 8, a gas pipe seat 9, a vacuum release mounting seat 10, a temperature measurement mounting seat 11, a heating mounting seat 12, a cooling outlet flange 13, a cooling inlet flange 14, a furnace body support 17, and a glue discharge pipe 18. The both ends of furnace body shell 1 open the setting, the both ends of furnace body inner shell 2 open the setting, and establish at furnace body shell 1 internal, the lateral wall of furnace body inner shell 2 sets up in order to inject the cooling runner 19 that the both ends opened the setting with the inside wall interval of furnace body shell 1, cooling runner 19 has two cooling outlets and two cooling inlets, furnace body shell 1 includes shell body 101 and welds the outer head 102 in shell body 101 one end, the outer peripheral face of outer head 102 is the arcwall face, outer head 102 links to each other with the welding of stove outer shell connection ring 3. The furnace inner shell 2 comprises an inner shell body 201 and an inner end enclosure 202 welded at one end of the inner shell body 201, the inner circumferential surface of the inner end enclosure 202 is an arc-shaped surface, and the inner end enclosure 202 is connected with the furnace shell connecting ring 3 in a welding manner. The furnace shell connecting ring 3 is used for sealing one end of a cooling flow channel 19, the furnace tail flange 4 is connected with the furnace shell connecting ring 3 in a welding mode and is located on one side, deviated from the furnace body shell 1, of the furnace shell connecting ring 3, the furnace door flange 5 is used for sealing the other end of the cooling flow channel 19, one end of the vacuum extraction pipe 6 is arranged in a penetrating mode and welded on the furnace body shell 1 and the furnace body inner shell 2, and the other end of the vacuum extraction pipe 6 is used for being connected with the vacuumizing device 90. The safety valve seat 7, the electrode mounting seat 8, the gas pipeline seat 9, the vacuum release mounting seat 10, the temperature measuring mounting seat 11 and the heating mounting seat 12 are arranged through and welded on the furnace body outer shell 1 and the furnace body inner shell 2. Be equipped with first clamp 15 on the cooling outlet flange 13, cooling outlet flange 13 wears to establish in the cooling outlet and with furnace body shell 1 welding, cooling inlet flange 14 wears to establish in the cooling inlet and with furnace body shell 1 welding, be equipped with second clamp 16 on the cooling inlet flange 14, first clamp 15 and second clamp 16 are used for respectively with cooling outlet flange 13 and cooling inlet flange 14 and cooling pipe, blind flange, outside vacuum gauge, outside vacuum pump or helium mass spectrometer leak detector closure. The furnace body support 17 is connected on the furnace body outer shell 1, and the rubber discharge pipe 18 is arranged and welded on the furnace body outer shell 1 and the furnace body inner shell 2 in a penetrating way.
The detection process of the leakage rate of the vacuum furnace body in the embodiment is as follows:
preparation and testing: the blind flange is placed on the cooling outlet flange 13 at the upper part of the furnace body shell 1, a sealing ring is placed between the blind flange and the cooling outlet flange, and the blind flange and the cooling outlet flange are connected together by a first clamp 15, namely, a cooling water outlet on the cooling outlet flange 13 is blocked. An external vacuum gauge is placed on the other cooling outlet flange 13 at the upper part of the furnace body shell 1, a sealing ring is placed between the external vacuum gauge and the cooling outlet flange, the external vacuum gauge and the cooling outlet flange are connected together by a first clamp 15, and the vacuum value of the cooling flow channel 19 is converted into an electric signal through the external vacuum gauge and is transmitted to a control system. The pipe orifice of a rubber discharge pipe 18 at the lower part of the furnace body shell 1 is blocked by a blind flange, the extraction port of an external vacuum pump is connected with one cooling inlet flange 14 at the lower part of the furnace body shell 1, and the extraction port of the helium mass spectrometer leak detector is connected with the other cooling inlet flange 14 at the lower part of the furnace body shell 1.
Starting an external vacuum pump: when the vacuum value in the cooling runner 19 is lower than 5Pa, a valve between an external vacuum pump and the vacuum furnace body is closed, and the pressure maintaining state is entered; when the vacuum value in the cooling flow passage 19 is higher than 50Pa, a valve between the external vacuum pump and the vacuum furnace body is opened to draw vacuum. The vacuum value of the cooling flow passage 19 is maintained within 5Pa to 50 Pa.
Starting a helium mass spectrometer leak detector: when the vacuum value of the system is within 5 Pa-50 Pa, a vacuum pump on the helium mass spectrometer leak detector operates, and helium is gradually sprayed to welding seams at each position of a vacuum furnace body by a spray gun. If a leakage point exists on the welding line, helium enters the cooling flow channel 19 through the leakage point and is pumped by a vacuum pump on the helium mass spectrometer leak detector, and the leak rate displayed by the helium mass spectrometer leak detector after operation is more than 1.3 x 10 -7 And when the pressure is Pa.L/s, the leakage point is detected.
And repairing the leakage points after all the leakage points on the vacuum furnace body are detected. After the repair is finished, the leakage rate of the vacuum furnace body is detected again, and the leakage rate of the vacuum furnace body is less than 1.3 x 10 -7 And when the pressure is Pa.L/s, the sealing performance of the vacuum furnace body is qualified.
The utility model also discloses a vacuum apparatus, as shown in fig. 5, including vacuum furnace body, furnace gate device 80 as before, vacuum apparatus 90, stove tail motor 100 and degrease subassembly 200, vacuum apparatus 90 connects on the other end of vacuum extraction pipe 6, and degrease subassembly 200 is connected on the other end of vacuum furnace body's binder removal pipe 18, and the housing of stove tail motor 100 is connected on stove tail flange 4, and furnace gate device 80 can connect on furnace gate flange 5 with opening and shutting.
It can be understood that, in the actual test process, after the test of the vacuum furnace body is completed, the helium mass spectrometer leak detector can be installed on the vacuum furnace body, a vacuum pump on the helium mass spectrometer leak detector can extract gas in the vacuum furnace body, the whole vacuum equipment is pumped to a vacuum state by using the vacuum device 90, helium is sprayed towards the connection part of each part, if the helium mass spectrometer leak detector detects that the content of helium is greater than a preset value, the helium spraying part is proved to have leakage, and thus, the leakage point of the whole vacuum equipment can be very conveniently detected.
In some embodiments, the vacuum apparatus 90 includes a vacuum pump 910, a vacuum pipe assembly 920, a vacuum housing 930, and a vacuum gauge 940, wherein the vacuum pipe assembly 920 is connected to the vacuum pump 910, the vacuum housing 930 is connected to the vacuum pipe assembly 920 and the vacuum extraction pipe 6, and the vacuum gauge 940 is disposed on the vacuum housing 930 and is used for detecting the vacuum degree in the vacuum furnace. Therefore, the vacuum gauge 940 can detect the vacuum value of the whole vacuum equipment in real time, and is convenient to use and detect by a user.
In some embodiments, vacuum housing 930 is also provided with a vacuum extraction port that can be connected to a helium mass spectrometer leak detector. Therefore, the user can conveniently detect.
Example two:
as shown in fig. 5, the vacuum apparatus of this embodiment includes the vacuum furnace body, the furnace door device 80, the vacuum device 90, the furnace tail motor 100 and the degreasing assembly 200, the vacuum device 90 is connected to the other end of the vacuum extraction pipe 6, the degreasing assembly 200 is connected to the other end of the glue discharging pipe 18 of the vacuum furnace body, and the housing of the furnace tail motor 100 is connected to the furnace tail flange 4. The door device 80 is connected to the door flange 5 in an openable and closable manner. The vacuum device 90 comprises a vacuum pump 910, a vacuum pipe assembly 920, a vacuum housing 930 and a vacuum gauge 940, wherein the vacuum pipe assembly 920 is connected with the vacuum pump 910, the vacuum housing 930 is connected with the vacuum pipe assembly 920 and the vacuum extraction pipe 6, and the vacuum gauge 940 is arranged on the vacuum housing 930 and is used for detecting the vacuum degree in the vacuum furnace. Vacuum housing 930 is also provided with a vacuum draw port that can be connected to a helium mass spectrometer leak detector.
The detection process of the detection leak rate of the vacuum equipment of the embodiment is as follows:
preparation and test: mounting a housing of the furnace tail motor 100 on a vacuum furnace body, and placing a sealing element with a proper specification at the joint of the housing and the vacuum furnace body; plugging the vacuum release mounting seat 10 by using a blind flange, and placing a sealing element with a proper specification at the joint of the vacuum release mounting seat and the blind flange; the safety control valve 20, the heating assembly 70, the electrode assembly 30, the process piping system, the temperature measuring assembly 60, etc. are installed on the vacuum furnace body, and a sealing member of a proper specification is placed at the junction thereof. One end of the degreasing component 200 is connected with the rubber discharge pipe 18 at the lower part of the vacuum furnace body, the other end is connected with the vacuum device 90, a sealing piece with proper specification is placed at the joint of the degreasing component and the vacuum furnace body, the furnace door device 80 is installed on the vacuum furnace body, the sealing piece is placed in a sealing groove on a furnace door flange 5 of the vacuum furnace body, and the furnace door device 80 is closed and pressed tightly. The extraction port of the helium mass spectrometer leak detector was connected to the vacuum extraction port in the upper portion of vacuum apparatus 90 and a seal of appropriate gauge was placed at the junction thereof.
Starting the vacuum pump 910 on the vacuum device 90: when the vacuum value is lower than 5Pa, the valve between the vacuum pump 910 and the vacuum pipeline assembly 920 is closed, and the vacuum equipment enters a pressure maintaining state; when the vacuum value is higher than 50Pa, the valve between the vacuum pump 910 and the vacuum pipe assembly 920 is opened, and vacuum is drawn. The vacuum value of the vacuum equipment is kept within 5 Pa-50 Pa.
Starting a helium mass spectrometer leak detector: when the vacuum value of the vacuum equipment is within 5 Pa-50 Pa, a vacuum pump on the helium mass spectrometer leak detector operates, and helium is gradually sprayed to the joint of the vacuum furnace body and each component and all joints on the vacuum device 90 by a spray gun. If the joint is not sealedHelium enters the vacuum furnace body through a gap at the joint and is extracted by a vacuum pump on the helium mass spectrometer leak detector, and the leak rate displayed by the helium mass spectrometer leak detector after operation is more than 1.3 x 10 -7 At pa.l/s, the seal with the leak was checked.
In the description herein, references to the description of "some embodiments," "other embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (10)
1. Vacuum furnace body, its characterized in that includes:
the furnace body comprises a furnace body shell (1), wherein two ends of the furnace body shell (1) are arranged in an open manner;
the furnace body inner shell (2), the both ends of furnace body inner shell (2) open the setting, and establish in the furnace body shell (1), the lateral wall of furnace body inner shell (2) with the inside wall interval setting of furnace body shell (1) is in order to inject the cooling runner (19) that both ends open the setting, cooling runner (19) have cooling outlet and cooling entry;
the furnace shell connecting ring (3) is connected with one ends of the furnace body outer shell (1) and the furnace body inner shell (2) in a welding mode, and the furnace shell connecting ring (3) is used for sealing one end of the cooling flow channel (19);
the furnace tail flange (4) is welded with the furnace shell connecting ring (3) and is positioned on one side, deviating from the furnace body shell (1), of the furnace shell connecting ring (3);
the furnace door flange (5), the furnace door flange (5) is welded with the other ends of the furnace body outer shell (1) and the furnace body inner shell (2), and the furnace door flange (5) is used for sealing the other end of the cooling flow channel (19);
one end of the vacuum extraction pipe (6) penetrates through and is welded on the furnace body outer shell (1) and the furnace body inner shell (2), and the other end of the vacuum extraction pipe (6) is used for being connected with a vacuumizing device (90).
2. The vacuum furnace body according to claim 1, characterized in that the furnace body shell (1) comprises a shell body (101) and an outer end enclosure (102) welded at one end of the shell body (101), the outer circumference of the outer end enclosure (102) is an arc surface, and the outer end enclosure (102) is connected with the furnace shell coupling ring (3) in a welding way.
3. The vacuum furnace body according to claim 1, wherein the furnace body inner shell (2) comprises an inner shell body (201) and an inner end enclosure (202) welded at one end of the inner shell body (201), the inner circumferential surface of the inner end enclosure (202) is an arc-shaped surface, and the inner end enclosure (202) is connected with the furnace shell coupling ring (3) in a welding manner.
4. The vacuum furnace body according to claim 1, further comprising a safety valve seat (7), an electrode mounting seat (8), a gas pipeline seat (9), a vacuum relief mounting seat (10), a temperature measuring mounting seat (11) and a heating mounting seat (12) which are arranged through and welded on the furnace body outer shell (1) and the furnace body inner shell (2); wherein:
the safety valve seat (7) is used for installing a safety control valve (20), the electrode installation seat (8) is used for installing an electrode assembly (30), the gas pipeline seat (9) is used for installing a process gas pipeline (40), the vacuum release installation seat (10) is used for installing a vacuum release control valve (50), the temperature measurement installation seat (11) is used for installing a temperature measurement assembly (60), and the heating installation seat (12) is used for installing a heating assembly (70).
5. The vacuum furnace body according to claim 1, characterized in that, the vacuum furnace body further comprises a cooling outlet flange (13) and a cooling inlet flange (14), a first clamp (15) is arranged on the cooling outlet flange (13), the cooling outlet flange (13) is arranged in the cooling outlet and welded with the furnace body shell (1), the cooling inlet flange (14) is arranged in the cooling inlet and welded with the furnace body shell (1), a second clamp (16) is arranged on the cooling inlet flange (14), and the first clamp (15) and the second clamp (16) are respectively used for locking the cooling outlet flange (13) and the cooling inlet flange (14) with a cooling pipeline, a blind flange, an external vacuum gauge, an external vacuum pump or a helium mass spectrometer.
6. The vacuum furnace according to claim 1, characterized in that it further comprises a furnace frame (17) attached to the furnace shell (1).
7. The vacuum furnace body according to claim 1, characterized in that the vacuum furnace body further comprises a rubber discharge pipe (18), and the rubber discharge pipe (18) is arranged through and welded on the furnace body outer shell (1) and the furnace body inner shell (2).
8. Vacuum equipment, characterized by comprising a vacuum furnace body according to any one of claims 1 to 7, a furnace door device (80), a vacuum device (90), a furnace tail motor (100) and a degreasing assembly (200), wherein the vacuum device (90) is connected to the other end of the vacuum extraction pipe (6), the degreasing assembly (200) is connected to the other end of the glue discharge pipe (18) of the vacuum furnace body, a housing of the furnace tail motor (100) is connected to the furnace tail flange (4), and the furnace door device (80) is connected to the furnace door flange (5) in an openable and closable manner.
9. Vacuum apparatus according to claim 8, characterized in that the vacuum device (90) comprises:
a vacuum pump (910);
a vacuum conduit assembly (920), the vacuum conduit assembly (920) being connected to the vacuum pump (910);
a vacuum housing (930), the vacuum housing (930) being connected to the vacuum pipe assembly (920) and the vacuum extraction pipe (6);
the vacuum gauge (940) is arranged on the vacuum shell (930) and used for detecting the vacuum degree in the vacuum furnace body.
10. Vacuum apparatus according to claim 9, characterized in that the vacuum housing (930) is further provided with a vacuum extraction port, which can be connected to a helium mass spectrometer leak detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222750926.5U CN218296690U (en) | 2022-10-19 | 2022-10-19 | Vacuum furnace body and vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222750926.5U CN218296690U (en) | 2022-10-19 | 2022-10-19 | Vacuum furnace body and vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218296690U true CN218296690U (en) | 2023-01-13 |
Family
ID=84808654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222750926.5U Active CN218296690U (en) | 2022-10-19 | 2022-10-19 | Vacuum furnace body and vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218296690U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117287977A (en) * | 2023-11-24 | 2023-12-26 | 杭州嘉悦智能设备有限公司 | Carbonization preheating furnace |
-
2022
- 2022-10-19 CN CN202222750926.5U patent/CN218296690U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117287977A (en) * | 2023-11-24 | 2023-12-26 | 杭州嘉悦智能设备有限公司 | Carbonization preheating furnace |
| CN117287977B (en) * | 2023-11-24 | 2024-02-13 | 杭州嘉悦智能设备有限公司 | Carbonization preheating furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN218296690U (en) | Vacuum furnace body and vacuum equipment | |
| CN108871688A (en) | A kind of test-run a machine rack intercooler cooling line leakage detection method | |
| CN217111967U (en) | Large-scale barrel part coating porosity's verifying attachment | |
| CN210269152U (en) | Withstand voltage testing arrangement of indoor fire hydrant | |
| CN212007700U (en) | PE valve air tightness test device | |
| CN209802614U (en) | Tuyere sleeve sealing detection tool | |
| CN210214113U (en) | Flexible connection device and weighing system of high-temperature powder bin | |
| RU181104U1 (en) | VACUUM INPUT FOR LEAKAGE DESIGN TESTS | |
| CN218002187U (en) | High-temperature vacuum furnace reaction device | |
| CN221990975U (en) | Molten salt loading valve and molten salt conveying device comprising same | |
| CN219319688U (en) | Detachable helium leak detection connector | |
| CN221803278U (en) | 90-Degree cast elbow pressure testing tool | |
| CN217845543U (en) | Terminal airtight pressing device and terminal airtight pressing system | |
| CN218486773U (en) | Steam pipeline sweeps target plate erector | |
| CN218330440U (en) | Spray gun testing device | |
| CN217708903U (en) | Sight glass device and reduction furnace | |
| CN214471604U (en) | Efficient airtight leakage detection device for water pump assembly of internal combustion engine | |
| CN221992948U (en) | Detection device for pipeline welding | |
| CN205534635U (en) | A sealing device that is used for vacuum eutectic stove | |
| CN220610874U (en) | Reagent automatic spraying device for ammonia leakage inspection | |
| CN216815910U (en) | A gas tightness device for detecting slide valve | |
| CN111998155B (en) | Exhaust device of semiconductor process equipment and semiconductor process equipment | |
| CN109439847A (en) | It is a kind of for the circulating pipe gas leakage detection of RH refining furnace vacuum tank, cooling device | |
| CN221302646U (en) | Helium leak detection device | |
| CN115019985B (en) | Fuel channel leakage positioning device for heavy water reactor nuclear power unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518122 No. 1 Jikang Road, Kengzi Street, Pingshan District, Shenzhen, Guangdong, China Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518122 No. 1 Jikang Road, Kengzi Street, Pingshan District, Shenzhen, Guangdong, China Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |