CN218002459U - Optical fiber strain sensor based on vernier effect - Google Patents
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Abstract
本实用新型公开了一种基于游标效应的光纤应变传感器,包括并联设置的参考干涉仪和传感干涉仪,所述参考干涉仪和传感干涉仪为马赫‑曾德尔干涉仪;所述参考干涉仪和传感干涉仪包括依次熔接的第一单模光纤、第二单模光纤、少模光纤和第三单模光纤;光束经第二单模光纤激发为高阶模和基模;所述少模光纤传输高阶模和基模至所述第三单模光纤;所述高阶模和基模在所述第三单模光纤中干涉;本实用新型通过同时监测仅受温度变化影响的参考干涉仪透射谱的波长漂移量,同时受应变和温度变化影响的并联信号大包络的波长漂移量可以解调出温度和应变,不仅大幅提高了传感器应变灵敏度,且消除了温度的影响。
The utility model discloses an optical fiber strain sensor based on a vernier effect, which comprises a reference interferometer and a sensing interferometer arranged in parallel, the reference interferometer and the sensing interferometer are Mach-Zehnder interferometers; the reference interferometer The instrument and the sensing interferometer include the first single-mode fiber, the second single-mode fiber, the few-mode fiber and the third single-mode fiber which are fused in sequence; the light beam is excited into a high-order mode and a fundamental mode through the second single-mode fiber; the few-mode The optical fiber transmits the high-order mode and the fundamental mode to the third single-mode optical fiber; the high-order mode and the fundamental mode interfere in the third single-mode optical fiber; the utility model simultaneously monitors the transmission spectrum of the reference interferometer that is only affected by temperature changes Wavelength drift, the wavelength drift of the large envelope of the parallel signal affected by both strain and temperature changes can demodulate temperature and strain, which not only greatly improves the strain sensitivity of the sensor, but also eliminates the influence of temperature.
Description
技术领域technical field
本实用新型属于光纤传感技术领域,具体涉及一种基于游标效应的光纤应变传感器。The utility model belongs to the technical field of optical fiber sensing, in particular to an optical fiber strain sensor based on the cursor effect.
背景技术Background technique
与传统的电子传感器相比,光纤传感器因其结构简单、体积小、重量轻、抗电磁干扰和灵敏度高等优点,受到许多学者和研究人员的青睐。近年来,为了进一步提高马赫-曾德尔传感器的测量灵敏度,游标效应进入了研究人员的视线。游标效应最初应用于游标卡尺气压计中,用于提升测量的精确度,后来也被应用到光器件传感系统中,用于放大光谱共振峰的漂移,可提高光子器件的灵敏度。马赫-曾德尔干涉原理因其在各种干涉原理中具有简单而稳定的特性而被广泛应用于光学干涉测试中,根据马赫-曾德尔干涉原理测量的单一物理参量可以为温度、折射率、压力、应变等。Compared with traditional electronic sensors, fiber optic sensors are favored by many scholars and researchers because of their simple structure, small size, light weight, anti-electromagnetic interference, and high sensitivity. In recent years, in order to further improve the measurement sensitivity of Mach-Zehnder sensors, the vernier effect has entered the sight of researchers. The vernier effect was first applied to vernier caliper barometers to improve the accuracy of measurement, and was later applied to optical device sensing systems to amplify the shift of spectral resonant peaks and improve the sensitivity of photonic devices. The Mach-Zehnder interference principle is widely used in optical interference testing because of its simple and stable characteristics in various interference principles. The single physical parameters measured according to the Mach-Zehnder interference principle can be temperature, refractive index, pressure, etc. , Strain, etc.
但是大多数基于马赫-曾德尔干涉原理的传感器具有多参数响应,很难对单个参数进行准确的测量,所以对应变和温度的同步传感是实现精确测量的方式之一。目前越来越多的研究者开始对双参数测量传感器进行研究,而传统的多参数传感器都是通过灵敏度测量矩阵实现温度和应变的同时测量,然而基于游标效应的传感器包络是单频信号,无法使用上述的灵敏度矩阵实现温度和应变的同时测量,消除温度的交叉敏感。However, most sensors based on the Mach-Zehnder interference principle have multi-parameter responses, and it is difficult to accurately measure a single parameter, so synchronous sensing of strain and temperature is one of the ways to achieve accurate measurement. At present, more and more researchers are beginning to study the dual-parameter measurement sensor, while the traditional multi-parameter sensor realizes the simultaneous measurement of temperature and strain through the sensitivity measurement matrix. However, the sensor envelope based on the vernier effect is a single-frequency signal. Simultaneous measurement of temperature and strain cannot be achieved using the aforementioned sensitivity matrix, eliminating temperature cross-sensitivity.
实用新型内容Utility model content
本实用新型的目的在于提供一种基于游标效应的光纤应变传感器,提高传感器的应变灵敏度,消除了温度的影响。The purpose of the utility model is to provide a fiber optic strain sensor based on the vernier effect, which improves the strain sensitivity of the sensor and eliminates the influence of temperature.
为了解决上述问题,本实用新型采用如下技术方案:一种基于游标效应的光纤应变传感器,包括并联设置的参考干涉仪和传感干涉仪,所述参考干涉仪和传感干涉仪为马赫-曾德尔干涉仪;所述参考干涉仪和传感干涉仪包括依次熔接的第一单模光纤、第二单模光纤、少模光纤和第三单模光纤;光束经第二单模光纤激发为高阶模和基模;所述少模光纤传输高阶模和基模至所述第三单模光纤;所述高阶模和基模在所述第三单模光纤中干涉。In order to solve the above problems, the utility model adopts the following technical scheme: a fiber optic strain sensor based on the vernier effect, including a reference interferometer and a sensing interferometer arranged in parallel, and the reference interferometer and the sensing interferometer are Mach-Zeng Del interferometer; the reference interferometer and the sensing interferometer include the first single-mode fiber, the second single-mode fiber, the few-mode fiber and the third single-mode fiber which are fused in sequence; the light beam is excited into a high-order mode by the second single-mode fiber and the fundamental mode; the few-mode fiber transmits the high-order mode and the fundamental mode to the third single-mode fiber; the high-order mode and the fundamental mode interfere in the third single-mode fiber.
进一步地,所述第二单模光纤包括熔接球A和熔接球B,光束经第一单模光纤传输至熔接球A时,激发为第二单模光纤中包层的高阶模;所述光束经过熔接球A传输至熔接球B时,激发为纤芯中的基模。Further, the second single-mode fiber includes a splicing ball A and a splicing ball B. When the light beam is transmitted to the splicing ball A through the first single-mode fiber, it is excited into a high-order mode of the cladding in the second single-mode fiber; the light beam passes through When splicing ball A is transmitted to splicing ball B, it is excited as the fundamental mode in the fiber core.
进一步地,所述参考干涉仪和传感干涉仪通过两3dB耦合器并联。Further, the reference interferometer and the sensing interferometer are connected in parallel through two 3dB couplers.
进一步地,所述光纤应变传感器产生的自由光谱范围FSRenvelope为:Further, the free spectral range FSR envelope produced by the optical fiber strain sensor is:
其中,FSRs表示传感干涉仪的自由光谱范围;FSRr表示参考干涉仪的自由光谱范围。Among them, FSR s represents the free spectral range of the sensing interferometer; FSR r represents the free spectral range of the reference interferometer.
进一步地,所述光纤应变传感器的游标效应灵敏度放大系数M为:Further, the vernier effect sensitivity amplification factor M of the optical fiber strain sensor is:
进一步地,当外界温度改变时,所述参考干涉仪的透射谱波长产生漂移,参考干涉仪的漂移量Δλ的计算公式为:Further, when the external temperature changes, the transmission spectrum wavelength of the reference interferometer drifts, and the calculation formula of the drift Δλ of the reference interferometer is:
Δλ=k1TΔTΔλ=k 1T ΔT
式中,k1T为传感干涉仪的温度灵敏度,ΔT表示为温度变化值。In the formula, k 1T is the temperature sensitivity of the sensor interferometer, and ΔT is expressed as the temperature change value.
进一步地,当外界温度和应变发生变化时,所述传感干涉仪透射谱的波长也会随之发生变化,所述传感干涉仪的透射谱波长漂移量Δλ包络的计算公式为:Further, when the external temperature and strain change, the wavelength of the transmission spectrum of the sensing interferometer will also change accordingly, and the calculation formula of the transmission spectrum wavelength shift Δλ envelope of the sensing interferometer is:
Δλ包络=k2TΔT+k2εΔεΔλ envelope = k 2T ΔT+k 2ε Δε
式中,k2T为传感干涉仪的温度灵敏度;k2ε为传感干涉仪的应变灵敏度,Δε表示为应变变化值。In the formula, k 2T is the temperature sensitivity of the sensing interferometer; k 2ε is the strain sensitivity of the sensing interferometer, and Δε is the strain change value.
与现有技术相比,本实用新型所达到的有益效果是:Compared with the prior art, the beneficial effects achieved by the utility model are:
一方面,本实用新型通过并联设置的参考干涉仪和传感干涉仪,参考干涉仪和传感干涉仪为马赫-曾德尔干涉仪;通过同时监测仅受温度变化影响的参考干涉仪透射谱的波长漂移量,同时受应变和温度变化影响的并联信号大包络的波长漂移量可以解调出温度和应变,使光纤应变传感器产生游标效应并进行标定,不仅大幅提高了传感器应变灵敏度,且消除了温度的影响。On the one hand, the utility model adopts the reference interferometer and the sensing interferometer arranged in parallel, and the reference interferometer and the sensing interferometer are Mach-Zehnder interferometers; Wavelength drift, the wavelength drift of the large envelope of the parallel signal affected by strain and temperature changes can demodulate temperature and strain, make the optical fiber strain sensor produce a vernier effect and calibrate, not only greatly improve the sensor strain sensitivity, but also eliminate affected by temperature.
另一方面,本实用新型所述第二单模光纤包括熔接球A和熔接球B,光束经第一单模光纤传输至熔接球A时,激发为第二单模光纤中包层的高阶模;所述光束经过熔接球A传输至熔接球B时,激发为纤芯中的基模;通过第二单模光纤保证提高传播距离后依然可以产生干涉。On the other hand, the second single-mode fiber described in the present invention includes a fusion splice ball A and a fusion splice ball B. When the light beam is transmitted to the fusion splice ball A through the first single-mode fiber, it is excited into a higher-order mode of the cladding in the second single-mode fiber; When the light beam passes through the splicing ball A and is transmitted to the splicing ball B, it is excited as the fundamental mode in the fiber core; the second single-mode optical fiber ensures that interference can still occur after increasing the propagation distance.
附图说明Description of drawings
图1是本实用新型实施例提供的一种基于游标效应的光纤应变传感器结构示意图;Fig. 1 is a schematic structural diagram of an optical fiber strain sensor based on the vernier effect provided by an embodiment of the present invention;
图中:1-第一单模光纤;2-第二单模光纤;21-熔接球A;22-熔接球B;3-少模光纤;4-第三单模光纤。In the figure: 1-the first single-mode fiber; 2-the second single-mode fiber; 21-the fusion ball A; 22-the fusion ball B; 3-the few-mode fiber; 4-the third single-mode fiber.
具体实施方式detailed description
下面结合附图对本实用新型作进一步描述,以下实施例仅用于更加清楚地说明本实用新型的技术方案,而不能以此来限制本实用新型的保护范围。The utility model will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the utility model more clearly, but not to limit the protection scope of the utility model.
在本实用新型的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。In describing the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention. Novel and simplified descriptions do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the utility model.
此外,在本实用新型的描述中,除非另有说明,“多个”的含义是两个或两个以上。In addition, in the description of the present utility model, unless otherwise specified, "plurality" means two or more.
在本实用新型的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以通过具体情况理解上述术语在本实用新型中的具体含义。In the description of the present utility model, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a flexible connection. Detachable connection, or integral connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention through specific situations.
如图1所示,本实用新型实施例提供了一种基于游标效应的光纤应变传感器,包括并联设置的参考干涉仪和传感干涉仪,所述参考干涉仪和传感干涉仪为马赫-曾德尔干涉仪;所述参考干涉仪和传感干涉仪包括依次熔接的第一单模光纤1、第二单模光纤2、少模光纤3和第三单模光纤4;所述第一单模光纤1的输出端与第二单模光纤2的输入端连接;所述第二单模光纤2包括熔接球A21和熔接球B22,光束经第一单模光纤1传输至熔接球A21时,激发为第二单模光纤2中包层的高阶模;所述光束经过熔接球A21传输至熔接球B22时,激发为纤芯中的基模,所述少模光纤3将高阶模和基模传输至所述第三单模光纤4;将高阶模和基模在所述第三单模光纤4中发生干涉,通过第二单模光纤2保证提高传播距离后依然可以产生干涉。As shown in Figure 1, the embodiment of the utility model provides a kind of optical fiber strain sensor based on the vernier effect, including the reference interferometer and the sensing interferometer arranged in parallel, the reference interferometer and the sensing interferometer are Mach-Zeng Del interferometer; the reference interferometer and the sensing interferometer include the first single-
所述传感干涉仪中的光信号与参考干涉仪中的光信号叠加产生游标效应,产生大干涉包络;所述光纤应变传感器与隔离器进行连接;保持传感器无应变,仅当温度变化时,通过电脑对参考干涉仪的温度灵敏度k1T进行标定,通过对温度变化-透射谱波谷波长偏移曲线拟合得到参考干涉仪的温度灵敏度k1T;保持传感器无应变,仅当温度变化时,对光纤应变传感器的并联信号包络的温度灵敏度k2T进行标定,通过对温度变化-包络波谷波长偏移曲线拟合得到光纤应变传感器的并联信号包络的温度灵敏度k2T;保持传感器初始温度不变,仅当应变作用于传感干涉仪时,对光纤应变传感器的并联信号包络的应变灵敏度k2ε进行标定,通过对应变-包络波谷波长偏移曲线拟合得到并联信号包络的应变灵敏度k2ε。The optical signal in the sensing interferometer is superimposed with the optical signal in the reference interferometer to produce a vernier effect, resulting in a large interference envelope; the optical fiber strain sensor is connected to the isolator; keep the sensor strain-free, only when the temperature changes , the temperature sensitivity k 1T of the reference interferometer is calibrated by computer, and the temperature sensitivity k 1T of the reference interferometer is obtained by fitting the temperature change-transmission spectrum trough wavelength shift curve; keep the sensor without strain, only when the temperature changes, Calibrate the temperature sensitivity k 2T of the parallel signal envelope of the fiber optic strain sensor, and obtain the temperature sensitivity k 2T of the parallel signal envelope of the fiber optic strain sensor by fitting the temperature change-envelope valley wavelength shift curve; keep the initial temperature of the sensor remains unchanged, only when the strain acts on the sensing interferometer, the strain sensitivity k 2ε of the parallel signal envelope of the fiber optic strain sensor is calibrated, and the parallel signal envelope is obtained by fitting the strain-envelope valley wavelength shift curve Strain sensitivity k 2ε .
所述光纤应变传感器产生的自由光谱范围FSRenvelope为:The free spectral range FSR envelope that described optical fiber strain sensor produces is:
其中,FSRs表示传感干涉仪的自由光谱范围;FSRr表示参考干涉仪的自由光谱范围。Among them, FSR s represents the free spectral range of the sensing interferometer; FSR r represents the free spectral range of the reference interferometer.
所述光纤应变传感器的游标效应灵敏度放大系数M为:The vernier effect sensitivity amplification factor M of the optical fiber strain sensor is:
当外界温度改变时,所述参考干涉仪的透射谱波长产生漂移,参考干涉仪的漂移量Δλ的计算公式为:When the external temperature changes, the transmission spectrum wavelength of the reference interferometer drifts, and the calculation formula of the drift Δλ of the reference interferometer is:
Δλ=k1TΔTΔλ=k 1T ΔT
式中,k1T为传感干涉仪的温度灵敏度,ΔT表示为温度变化值。In the formula, k 1T is the temperature sensitivity of the sensor interferometer, and ΔT is expressed as the temperature change value.
当外界温度和应变发生变化时,所述传感干涉仪透射谱的波长也会随之发生变化,所述传感干涉仪的透射谱波长漂移量Δλ包络的计算公式为:When the external temperature and strain change, the wavelength of the transmission spectrum of the sensing interferometer will also change accordingly, and the calculation formula of the transmission spectrum wavelength drift Δλ envelope of the sensing interferometer is:
Δλ包络=k2TΔT+k2εΔεΔλ envelope = k 2T ΔT+k 2ε Δε
式中,k2T为传感干涉仪的温度灵敏度;k2ε为传感干涉仪的应变灵敏度,Δε表示为应变变化值。In the formula, k 2T is the temperature sensitivity of the sensing interferometer; k 2ε is the strain sensitivity of the sensing interferometer, and Δε is the strain change value.
所述传感干涉仪和参考干涉仪制备包括如下步骤:The preparation of the sensing interferometer and the reference interferometer comprises the following steps:
将第一单模光纤1和第二单模光纤2除去涂覆层后,用酒精擦拭干净,再用切割刀分别切取2cm的无涂覆层的光纤,将第一单模光纤1和第二单模光纤2两端的切割面切割平整;After removing the coating layer from the first single-mode
将切割完好的单根单模光纤放置在熔接机的一端进行放电;由于手动放电时的放电功率会大于普通熔接的功率,所以光纤的切割面会出现融化、收缩的过程,进而呈现一个球形的状态。两个已经分别熔接的小球再同时放置在熔接机的两端进行手动放电,形成熔接球A21和熔接球B22;Place a well-cut single-mode optical fiber at one end of the fusion splicer for discharge; since the discharge power during manual discharge will be greater than the power of ordinary fusion splicing, the cut surface of the optical fiber will melt and shrink, and then present a spherical state . Two small balls that have been welded separately are placed on both ends of the welding machine at the same time for manual discharge to form welded ball A21 and welded ball B22;
将第二单模光纤2的多余结构进行切除,只保留熔接球A21和熔接球B22部分;Cut off the redundant structure of the second single-mode
将少模光纤3除去涂覆层后,用酒精擦拭干净后,用切割刀切取25.8cm的无涂覆层的光纤,将两端的切割面切割平整。所述少模光纤3的一端与熔接球B22的一端对芯熔接,另一端与第三单模光纤4熔接;将制作好的传感干涉仪和参考干涉仪进行封装保护。After removing the coating layer from the few-mode
本实用新型实施例通过将两个FSR相近而不相同的传感干涉仪和参考干涉仪并联,产生游标效应,大幅度提高了并联传感器的应变灵敏度;通过同时监测仅受温度变化影响的参考干涉仪透射谱的波长漂移量,同时受应变和温度变化影响的并联信号大包络的波长漂移量可以解调出温度和应变,不仅大幅提高了传感器应变灵敏度,且消除了温度的影响。In the embodiment of the utility model, two sensing interferometers and reference interferometers with similar but not identical FSRs are connected in parallel to generate a vernier effect, which greatly improves the strain sensitivity of the parallel sensors; The wavelength shift of the transmission spectrum of the instrument, and the wavelength shift of the large envelope of the parallel signal affected by the strain and temperature changes can demodulate the temperature and strain, which not only greatly improves the strain sensitivity of the sensor, but also eliminates the influence of temperature.
以上所述仅为本实用新型的优选实例而已,并不用于限制本实用新型,尽管参照前述实施例对本实用新型进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特进行等同替换。凡在本实用新型的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。The above description is only a preferred example of the utility model, and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the aforementioned embodiments, for those skilled in the art, it can still be used for the aforementioned items. The technical schemes recorded in the examples are modified, or some technical features are equivalently replaced. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.
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CN116105778A (en) * | 2023-04-12 | 2023-05-12 | 广东海洋大学深圳研究院 | A Fiber Optic Sensing System for Synchronous Measurement of Temperature and Salt |
US11965821B1 (en) | 2023-04-12 | 2024-04-23 | Guangdong Ocean University | Optical fiber sensing system for temperature and salinity synchronous measurement |
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CN116105778A (en) * | 2023-04-12 | 2023-05-12 | 广东海洋大学深圳研究院 | A Fiber Optic Sensing System for Synchronous Measurement of Temperature and Salt |
US11965821B1 (en) | 2023-04-12 | 2024-04-23 | Guangdong Ocean University | Optical fiber sensing system for temperature and salinity synchronous measurement |
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