CN216573998U - Air-float drying box - Google Patents
Air-float drying box Download PDFInfo
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- CN216573998U CN216573998U CN202123135834.8U CN202123135834U CN216573998U CN 216573998 U CN216573998 U CN 216573998U CN 202123135834 U CN202123135834 U CN 202123135834U CN 216573998 U CN216573998 U CN 216573998U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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Abstract
The utility model relates to an air flotation drying box which comprises a box body, wherein a drying part is arranged in the box body, a through type drying channel is arranged on the drying part, a feeding station and a discharging station are arranged on the box body, an air box is arranged in the box body, and the drying part is communicated with the air box; the air box is communicated with a circulating fan, and a heat source component for supplying heat to the air box is arranged on the box body; through placing stoving portion and air box in the box for heat exchange and heated air circulation process are in the inner space of box is accomplished, for current overhead or other air supporting drying cabinet of putting the loss among the heat transfer process has been reduced, and can utilize the waste heat that the heat source component gived off, improve heat utilization efficiency, and communicate air box and stoving portion, make the thermal cycle embed in the box, thereby can reduce the heat loss, improve drying efficiency and stoving effect, and the equipment appearance is more succinct, and the space utilization is more reasonable.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to the technical field of drying, in particular to an air flotation drying box.
[ background ] A method for producing a semiconductor device
Used air supporting drying system of traditional coating composite industry, drying cabinet divide into two upper and lower boxes, and box the inside installation static pressure chamber is shunted, and the hot-air is through the even high-speed blowout of nozzle, accomplishes the drying to the substrate, and the outer loop structure is adopted in the production of hot-air, and the heat exchange and the circulation of hot-air are realized at the drying cabinet outside, then oven static pressure chamber about supply-air duct and circulation pipeline get into, but the structure of present outer loop air supporting drying cabinet exists following two not enough: 1. the heat exchange is finished outside the drying box, the ventilation pipeline is longer, the heat loss of the heat exchanger and the pipeline is larger, and the heat efficiency is not high; 2. heat exchanger and air supply, circulation pipeline are bulky, no matter adopt the overhead or other design of putting, and the big problem of equipment occupation space can not be avoided, consequently, need to design one kind and guarantee originally drying effect and the less air supporting drying cabinet of area.
[ Utility model ] content
The utility model aims to provide an air-flotation drying box which ensures the original drying effect and has a small floor area, aiming at the problem that the floor area of an external circulation air-flotation drying box in the prior art is large.
In order to achieve the purpose, the utility model adopts the technical scheme that: an air flotation drying box comprises a box body, wherein a drying part is arranged in the box body, a through type drying channel is arranged on the drying part, a feeding station and a discharging station are arranged on the box body, an air box is arranged in the box body, and the drying part is communicated with the air box; the air box is communicated with a circulating fan, and the box body is provided with a heat source component for supplying heat to the air box.
Preferably, the drying part comprises an upper static pressure box and a lower static pressure box which are symmetrically arranged, the drying channel is positioned between the upper static pressure box and the lower static pressure box, and the air box is respectively communicated with the upper static pressure box and the lower static pressure box through connecting pipes.
Preferably, the connecting pipe is provided with an adjusting air valve at the connecting part with the upper static pressure box and the lower static pressure box respectively.
Preferably, the heat source member includes a heat exchanger disposed on a peripheral side of the gas tank.
Preferably, the heat exchanger is annular, and the heat exchanger is sleeved on the air tank.
Preferably, the heat source member comprises a hot blast stove arranged outside the air box, and the hot blast stove is communicated with the air box.
Preferably, the heat source member comprises a hot blast stove disposed inside the box body, the hot blast stove being in communication with the gas box.
Preferably, a support member is arranged between the lower static pressure box and the inner wall of the box body.
Preferably, the number of the connecting pipes is two, and the two connecting pipes are symmetrically arranged on two sides of the upper static pressure box and the lower static pressure box.
Preferably, the number of the circulating fans is two, and the two circulating fans are symmetrically arranged on the top side of the air box.
The utility model has the advantages that:
through placing stoving portion and gas tank in the box in, make heat exchange and heated air circulation process all be in the inner space of box is accomplished, for current overhead or other air supporting drying cabinet of putting the loss among the heat transfer process has been reduced, and can utilize the waste heat that the heat source component gived off, improve heat utilization efficiency, and communicate gas tank and stoving portion, make the thermal cycle built-in the box, thereby can reduce the heat loss, improve drying efficiency and stoving effect, and the equipment appearance is more succinct, the space utilization is more reasonable, compare with the model of other heat exchange box of putting, area has been greatly reduced.
[ description of the drawings ]
FIG. 1 is an isometric schematic view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is an isometric cross-sectional view taken at A-A of FIG. 2 of the present invention;
FIG. 4 is a right side view of FIG. 1 of the present invention;
FIG. 5 is an isometric cross-sectional view taken at B-B of FIG. 4 in accordance with the present invention;
FIG. 6 is a schematic diagram of an internal circulation configuration in accordance with an embodiment of the present invention;
FIG. 7 is an isometric schematic view of another embodiment of the present invention;
FIG. 8 is a schematic diagram of an internal circulation configuration in accordance with another embodiment of the present invention;
FIG. 9 is a schematic view of a drying part according to another embodiment of the present invention;
FIG. 10 is a schematic view of a prior art overhead external circulation air flotation drying box configuration;
FIG. 11 is a schematic structural view of a side-mounted external circulation air-flotation drying box in the prior art.
The reference numerals and components referred to in the drawings are as follows: 1. a box body; 2. a drying section; 21. a drying channel; 22. an upper static pressure box; 23. a lower static pressure box; 24. a static pressure box; 241. connecting holes; 3. a feed station; 4. a discharge station; 5. a gas tank; 51. an air outlet; 6. a circulating fan; 71. a heat exchanger; 72. a hot blast stove; 73. a transfer box; 8. a connecting pipe; 9. adjusting an air valve; 10. an air inlet pipe.
[ detailed description ] embodiments
The following detailed description of the present invention will be made with reference to the accompanying drawings.
The present invention will be described in detail with reference to fig. 1 to 11, and the technical solutions in the embodiments of the present invention will be clearly and completely described, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 3 and 5, the present invention is an air flotation drying box, including a box body 1, a drying part 2 is arranged in the box body 1, the drying part 2 is provided with a drying channel 21 through which a substrate can pass, the box body 1 is provided with a feeding station 3 and a discharging station 4, an air box 5 is arranged in the box body 1, and the drying part 2 is communicated with the air box 5; the air box 5 is communicated with a circulating fan 6, and the box body 1 is provided with a heat source component for supplying heat to the air box 5.
During operation, the substrate is discharged from the feeding station 3 through the drying channel 21 and the discharging station 4; the drying section 2 dries the base material.
Through placing drying portion 2 and air tank 5 in box 1 in, make heat exchange and heated air circulation process all in the inner space of box 1 accomplishes, for current overhead or other air supporting drying cabinet of putting reduce the loss in the heat transfer process, and can utilize the waste heat that the heat source component gived off, improve heat utilization efficiency, and be linked together air tank 5 and drying portion 2, make the thermal cycle built-in box 1, thereby can reduce the heat loss, improve drying efficiency and stoving effect, and the equipment appearance is more succinct, the space utilization is more reasonable, compare with the model of other heat exchange box, area has greatly reduced.
As a preferred embodiment of the present invention, as shown in fig. 3, the drying section 2 comprises an upper static pressure box 22 and a lower static pressure box 23 symmetrically arranged on the heating surface of the substrate, the drying channel 21 is located between the upper static pressure box 22 and the lower static pressure box 23, and the air box 5 is respectively communicated with the upper static pressure box 22 and the lower static pressure box 23 through a connecting pipe 8.
It should be noted that the connecting tube 8 includes, but is not limited to, a circular tube shape, and also includes a rectangular tube, a hose, etc. capable of realizing directional airflow.
The upper static pressure box 22 and the lower static pressure box 23 have a gap for forming a drying channel 21, hot air in the air box 5 enters the upper static pressure box 22 and the lower static pressure box 23 through the connecting pipe 8, so that the temperature at the drying channel 21 is increased, when a substrate passes through the drying channel 21, the substrate is dried, and the upper static pressure box 22 and the lower static pressure box 23 are symmetrically arranged, thereby simultaneously performing drying treatment on two surfaces of the substrate and improving the drying effect.
As another embodiment of the present invention, as shown in fig. 9, the drying section 2 includes a static pressure box 24, the cross section of the static pressure box 24 is "back", the drying channel 21 is disposed at the central portion of the static pressure box 24, two connecting holes 241 are disposed at the top end of the static pressure box 24, the connecting holes are upwardly opened, two air outlet holes 51 are disposed at the lower end of the air box 5, and each connecting hole 241 is communicated with the adjacent air outlet hole 51.
Through the arrangement of the square-shaped static pressure box 24, the temperature difference of each part of the drying channel 21 is small, and the drying effect on the base material is more stable.
Further, the connection hole 241 is located at the center of the plenum box 24, so that the temperature difference between the two ends of the drying duct 21 is not large, and the stability of the drying effect is improved.
As a preferred embodiment of the present invention, as shown in fig. 5 and 6, the heat source member includes a heat exchanger 71 disposed on the peripheral side of the casing 5. The number of the heat exchangers 71 is selected according to the size of the heat exchange amount.
Further, the number of the heat exchangers 71 is two, and the heat exchangers 71 are symmetrically arranged on two sides of the air box 5, so that the air box 5 is heated more uniformly, and the purpose of supplying heat to the air box 5 is achieved.
As another embodiment of the present invention, the heat exchanger 71 is annular, the air tank 5 is annular, and the heat exchanger 71 is sleeved on the air tank 5, so that the heat conduction of the heat exchanger 71 to the air tank 5 is more uniform, and the heating effect is more stable.
As another embodiment of the present invention, as shown in fig. 7 and 8, the heat source member includes a hot blast stove 72 disposed outside the box body 1, and the hot blast stove 72 communicates with the gas box 5.
Further, the hot blast stove 72 is located on the top side of the box body 1, the output end of the hot blast stove 72 penetrates through the box body 1 and enters the inner space of the box body 1, a transfer box 73 is arranged in the box body 1, the output end of the hot blast stove 72 is communicated with the transfer box 73, and the transfer box 73 is communicated with the gas box 5; through the arrangement of the transfer box 73, the hot air output by the hot blast stove 72 more uniformly enters the air box 5, so that the heat supply of the circulating fan 6 is more uniform.
As another embodiment of the present invention, the hot blast stove 72 is located inside the box body, the number of the hot blast stoves 72 is at least one, and the output end of each hot blast stove 72 is communicated with the air box 5. Will hot-blast furnace 72 sets up the inboard of box 1 when guaranteeing normal work effect for the air supporting box is whole comparatively succinct, and area is littleer.
As shown in fig. 5, a feeding station 3 and a discharging station 4 are arranged on the box body 1 along the length direction of the upper static pressure box 22 and the lower static pressure box 23.
Through the arrangement of the feeding station 3 and the discharging station 4, the base material can enter between the upper static pressure box 22 and the lower static pressure box 23, and the purpose of heating the base material is achieved.
As shown in fig. 3, the connecting pipe 8 is provided with an adjusting air valve 9 at the connection with the upper static pressure box 22 and the lower static pressure box 23.
Through the setting of the adjusting air valve 9, the adjusting air valve 9 is controlled to adjust the amount of hot air entering the static pressure tank according to the required heat exchange amount.
Further, a support member is arranged between the lower static pressure box 23 and the inner wall of the box body 1.
The support members include, but are not limited to, support bars, support blocks, etc. that are available in the prior art to support the lower plenum box 23; so that the internal structure is more stable.
As shown in fig. 3, the number of the connecting pipes 8 is two, and two connecting pipes 7 are symmetrically arranged on two sides of the upper static pressure tank 22 and the lower static pressure tank 23.
Further, the connecting pipe 7 is connected to the middle portion of the upper plenum box 22 and the lower plenum box 23.
Through the symmetrical arrangement of the two connecting pipes 7, heat supply to the static pressure box is more uniform and stable, heat supply is carried out from the middle of the static pressure box, and the phenomenon that the temperature of a certain position in the static pressure box is too high to influence drying of the base material is avoided.
As shown in fig. 3, the number of the circulation fans 6 is two, and the two circulation fans 6 are symmetrically arranged on the top side of the air box 5.
Through two setting of circulating fan 6 to satisfy different heat transfer volume.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and additions can be made without departing from the method of the present invention, and these modifications and additions should also be regarded as the protection scope of the present invention.
Claims (10)
1. The utility model provides an air supporting drying cabinet, includes the box, its characterized in that: the drying device is characterized by also comprising a drying part, wherein the drying part is provided with a through drying channel, and the box body is provided with a feeding station and a discharging station;
an air box is arranged in the box body, and the drying part is communicated with the air box;
the air box is communicated with a circulating fan, and the box body is provided with a heat source component for supplying heat to the air box.
2. The air flotation drying oven as set forth in claim 1, wherein: the drying part comprises an upper static pressure box and a lower static pressure box which are symmetrically arranged, the drying channel is positioned between the upper static pressure box and the lower static pressure box, and the air box is respectively communicated with the upper static pressure box and the lower static pressure box through connecting pipes.
3. An air flotation drying box as claimed in claim 2, wherein: and adjusting air valves are respectively arranged at the joints of the connecting pipe and the upper static pressure box and the lower static pressure box.
4. The air flotation drying box as claimed in claim 3, wherein: the heat source member includes a heat exchanger disposed on a peripheral side of the gas tank.
5. The air flotation drying oven as set forth in claim 4, wherein: the heat exchanger is annular, and the heat exchanger is sleeved on the air box.
6. An air flotation drying box as claimed in claim 3, wherein: the heat source component comprises a hot blast stove arranged on the outer side of the box body, and the hot blast stove is communicated with the air box.
7. The air flotation drying box as claimed in claim 3, wherein: the heat source component comprises a hot blast stove arranged on the inner side of the box body, and the hot blast stove is communicated with the air box.
8. An air flotation drying box as claimed in claim 2, wherein: and a supporting member is arranged between the lower static pressure box and the inner wall of the box body.
9. An air flotation drying box as claimed in claim 2, wherein: the number of the connecting pipes is two, and the two connecting pipes are symmetrically arranged on two sides of the upper static pressure box and the lower static pressure box.
10. The air flotation drying oven as set forth in claim 1, wherein: the number of the circulating fans is two, and the two circulating fans are symmetrically arranged on the top side of the air box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123135834.8U CN216573998U (en) | 2021-12-13 | 2021-12-13 | Air-float drying box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123135834.8U CN216573998U (en) | 2021-12-13 | 2021-12-13 | Air-float drying box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216573998U true CN216573998U (en) | 2022-05-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123135834.8U Active CN216573998U (en) | 2021-12-13 | 2021-12-13 | Air-float drying box |
Country Status (1)
| Country | Link |
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| CN (1) | CN216573998U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116140161A (en) * | 2022-12-30 | 2023-05-23 | 惠州市赢合科技有限公司 | Internal circulation air flotation oven, coating equipment and PID control method of coating equipment |
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2021
- 2021-12-13 CN CN202123135834.8U patent/CN216573998U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116140161A (en) * | 2022-12-30 | 2023-05-23 | 惠州市赢合科技有限公司 | Internal circulation air flotation oven, coating equipment and PID control method of coating equipment |
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