CN216248759U - Double-column double-sided exposure machine - Google Patents

Abstract

The double-column double-sided exposure machine of the utility model comprises a first conveying device, a first exposing device, a second conveying device, a second exposing device and a third conveying device arranged on the frame. The first conveying device is used for feeding, the second conveying device is connected to the first exposing device and the second exposing device, and the third conveying device is used for discharging. The first conveying device, the second conveying device and the third conveying device all include two conveying mechanisms arranged in parallel. The first exposure device includes two first exposure platforms and two first exposure modules, and the two first exposure modules share a first light source assembly. The second exposure device includes two second exposure platforms and two second exposure modules, and the two second exposure modules share a second light source assembly. The double-column and double-sided exposure machine of the utility model can perform exposure in two columns and four stations, which not only has high efficiency, but also shares some parts and saves the cost. The double-column double-sided exposure machine of the utility model has reasonable structure and high efficiency.

Description

Double-column double-sided exposure machine

technical field

The utility model relates to the technical field of exposure machines, in particular to a double-column double-sided exposure machine.

Background technique

The fully automatic double-sided exposure machine is usually designed to carry out each operation process on the same plane and the same axis, and the basic operation process includes feeding, first-side exposure, flipping, second-side exposure and material discharge. However, there are many intermediate processes in the fully automatic double-sided exposure machine, and in many cases, the waiting time for each process is long, which affects the production efficiency.

Therefore, it is necessary to provide a double-column double-side exposure machine with reasonable structure and high efficiency.

Utility model content

The purpose of the utility model is to provide a double-column double-sided exposure machine with reasonable structure and high efficiency.

In order to achieve the above purpose, the utility model provides a double-column double-sided exposure machine, comprising a first conveying device, a first exposure device, a second conveying device, a second exposure device and a third conveying device arranged on a frame , the first conveying device is located at the front end of the first exposure device, the second conveying device is located between the first exposure device and the second exposure device, the third conveying device is located at the rear end of the second exposure device, the first conveying device, the second The conveying device and the third conveying device both include two conveying mechanisms arranged in parallel; the first exposure device is used for exposing one side of the workpiece, the first exposure device includes two first exposure platforms, and the first exposure platforms are both provided with first exposure platforms. module, the two first exposure modules are also provided with a first light source assembly that can move between the two first exposure modules; the second conveying device is provided with a flip device, the flip device includes and the two first exposure modules. The inversion mechanism of the platform docking, the inversion mechanism is used to invert the workpiece; the second exposure device is used for exposing the other side of the workpiece, the second exposure device includes two second exposure platforms docked with the inversion mechanism, and both second exposure platforms are provided with The second exposure module is further provided with a second light source assembly capable of moving between the two second exposure modules.

Preferably, a plurality of groups of roller assemblies are arranged on the transmission mechanism. The roller assemblies include rollers and a plurality of rollers sleeved on the rollers. There is a gap between the rollers and the rollers. less than the rotational speed of the rollers.

Preferably, both the first conveying device and the third conveying device are provided with a reclaiming manipulator that can move between the two conveying mechanisms, and the reclaiming manipulator is used to transport and switch the workpieces on the two conveying mechanisms.

Preferably, the front ends of the first exposure device and the second exposure device are provided with a monolithic mechanism located on the conveying mechanism, and the workpiece can be pre-positioned by the monolithic mechanism, so that the workpiece can be better aligned and exposed.

Preferably, each first exposure platform is also provided with a first reclaiming mechanism, and the first reclaiming mechanism is slidably arranged on the frame and can slide between the first conveying device and the first exposure platform, so as to be able to slide. The workpieces on the first conveyor are transported to the first exposure platform.

Preferably, the first reclaiming mechanism includes two oppositely arranged reclaiming assemblies, a connecting rod assembly is arranged between the two reclaiming assemblies, and the distance between the two reclaiming assemblies can be adjusted by adjusting the connecting rod assembly to make the first reclaiming assembly. A pick-up mechanism can pick up workpieces of various sizes.

Preferably, the first exposure platform is arranged on the frame in a lifting manner, the first exposure module is movably arranged on the frame, and the exposure glass is arranged on the first exposure module, and the first exposure module is operated by operating the first exposure module. In order to make the first exposure module slide out of the frame so as to stick the film surface on the exposure glass.

Preferably, a CCD detection mechanism is also provided on the first exposure device, a NG temporary storage device is arranged between the first exposure device and the turning device, the NG temporary storage device is arranged on the second conveying device, and the CCD detection mechanism is used for The workpiece is detected, and the NG temporary storage device is used to temporarily store the workpieces that fail to pass the inspection.

Preferably, the NG temporary storage device includes a lifting frame and an object storage mechanism located on both sides of the lifting frame. Each object storage mechanism is connected with a lifting mechanism arranged on the lifting frame. The upper layer of the storage mechanism is provided with a plurality of discharging positions for discharging materials.

Preferably, the turning mechanism includes a turning frame and a first conveying assembly and a second conveying assembly arranged on the turning frame, the workpiece is conveyed between the first conveying assembly and the second conveying assembly, and the first conveying assembly and the second conveying assembly A movable material stop assembly is arranged between, the first conveying assembly or the second conveying assembly is connected to the conveying mechanism on the second conveying device, and the overturning frame is connected with a power assembly, and the power assembly acts to make the overturning frame drive the first conveying assembly and the The second transfer assembly flips and reverses positions, thereby flipping the workpiece.

Compared with the prior art, the double-column double-side exposure machine of the present invention includes a first conveying device, a first exposing device, a second conveying device, a second exposing device and a third conveying device arranged on the frame. The first conveying device is used for feeding, the second conveying device is connected to the first exposing device and the second exposing device, and the third conveying device is used for discharging. The first conveying device, the second conveying device and the third conveying device all include two conveying mechanisms arranged in parallel. The first exposure device includes two first exposure platforms and two first exposure modules, and the two first exposure modules share a first light source assembly. The second exposure device includes two second exposure platforms and two second exposure modules, and the two second exposure modules share a second light source assembly. The double-column double-sided exposure machine of the utility model can perform exposure in two columns and four stations, which not only has high efficiency, but also saves costs by sharing some parts. The double-column double-sided exposure machine of the utility model has reasonable structure and high efficiency.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

FIG. 1 is a structural diagram of a double-column double-sided exposure machine provided by an embodiment of the present invention.

FIG. 2 is a structural diagram of the first conveying device in FIG. 1 .

FIG. 3 is a structural diagram of the first exposure apparatus in FIG. 1 .

FIG. 4 is an enlarged view of A in FIG. 3 .

FIG. 5 is a structural diagram of the first reclaiming mechanism in FIG. 3 .

FIG. 6 is a structural diagram of the NG temporary storage device in FIG. 1 .

FIG. 7 is a structural diagram of a position avoidance part in the second conveying device in FIG. 1 that cooperates with the NG temporary storage device.

FIG. 8 is a structural diagram of the inversion mechanism in FIG. 1 .

Description of reference numbers:

100. Double-column double-sided exposure machine; 101. Rack;

10. The first conveying device; 102, the conveying mechanism; 11, the roller assembly; 111, the roller; 112, the roller; 113, the avoidance part;

20, the first exposure device; 21, the first reclaiming mechanism; 211, the reclaiming assembly; 2111, the reclaiming suction cup; 212, the connecting rod assembly; 22, the first exposure platform; 23, the first exposure module; 231, handle; 24, the first light source assembly; 25, the second reclaiming mechanism;

30. The second conveying device;

40, NG temporary storage device; 41, lift frame; 42, storage mechanism; 421, discharge part; 422, discharge position; 43, lift mechanism;

50, turning device; 501, turning mechanism; 51, turning frame; 52, first conveying assembly; 53, second conveying assembly; 54, power assembly; 55, stopper assembly;

60. A second exposure device;

70. A third transmission device.

Detailed ways

In order to describe the technical content and structural features of the present utility model in detail, further description is given below with reference to the embodiments and the accompanying drawings.

Referring to FIGS. 1 to 1 , the present invention provides a double-column double-sided exposure machine 100 , including a first conveying device 10 , a first exposing device 20 , a second conveying device 30 , a first conveying device 10 , a first exposing device 20 , a second conveying device 30 , a Two exposure devices 60 and a third transfer device 70 . The first conveying device 10 is located at the front end of the first exposure device 20 , the second conveying device 30 is located between the first exposure device 20 and the second exposure device 60 , and the third conveying device 70 is located at the rear end of the second exposure device 60 . The first conveying device 10 , the second conveying device 30 and the third conveying device 70 all include two conveying mechanisms 102 arranged in parallel. The first exposure device 20 is used for exposing one side of the workpiece. The first exposure device 20 includes two first exposure platforms 22 . The two first exposure platforms 22 are both provided with first exposure modules 23 . A first light source assembly 24 that can move between the two first exposure modules 23 is also provided. The second conveying device 30 is provided with an NG temporary storage device 40 and a turning plate device 50 . The NG temporary storage device 40 is used to temporarily store the workpiece for which NG is detected. The flipping device 50 includes a flipping mechanism 501 docked with the two first exposure platforms 22 , and the flipping mechanism 501 is used for flipping the workpiece. The second exposure device 60 is used for exposing the other side of the workpiece, and the structure of the second exposure device 60 is the same as that of the first exposure device 20 . The second exposure device 60 includes two second exposure platforms that are docked with the turning mechanism 501 , second exposure modules are provided on both of the second exposure platforms, and two second exposure modules are also provided on the two second exposure modules. A second light source assembly that moves between groups. The double-column double-side exposure machine 100 of the present invention has high efficiency for double-column transmission and exposure, and the first exposure device 20 and the second exposure device 60 share light source components, which effectively saves costs.

Referring to FIG. 2 , in some optional embodiments, the first conveying device 10 , the second conveying device 30 and the third conveying device 70 all include two conveying mechanisms 102 arranged in parallel. The conveying mechanism 102 is provided with a plurality of sets of roller assemblies 11 . The roller assemblies 11 include rollers 111 and a plurality of rollers 112 sleeved on the rollers 111 , and the workpiece is conveyed on the rollers 112 . There is a gap between the roller 112 and the roller 111, and when the roller 111 drives the roller 112 to transmit, there is still a sliding phenomenon between the roller 111 and the roller 112, so that when a workpiece is placed on the roller 112, the rotational speed of the roller 112 less than the rotational speed of the roller 111 . It can be understood that when the workpiece is placed on the roller 112, under the action of the gravity of the workpiece, the roller 112 will have a downward force, causing relative sliding between the roller 112 and the roller 111, so that the rotational speed of the roller 112 is lower than that of the roller. The rotation speed of the shaft 111 prevents the roller 112 from rubbing against the workpiece due to relatively large relative sliding between the roller 112 and the workpiece when the roller 112 drives the workpiece to rotate. In this embodiment, oil is printed on both sides of the workpiece to be exposed on both sides. If the friction between the workpiece and the conveying roller 112 is large, the workpiece will be scratched and the exposure effect will be affected. In the transmission mechanism 102 of the present invention, there is a certain gap between the rollers 112 and the rollers 111, which can avoid scratching the workpiece, and the transmission effect is good.

Referring to FIG. 2 , in some optional embodiments, both the first conveying device 10 and the third conveying device 70 are provided with a reclaiming manipulator 12 that can move between the two conveying mechanisms 102 , and the reclaiming manipulator 12 is used for The workpieces on the two transfer mechanisms 102 are conveyed and switched. The structures of the first conveyor 10 and the third conveyor 70 are similar, the first conveyor 10 is used for feeding, and the third conveyor 70 is used for discharging. Specifically, the first conveying device 10 and the third conveying device 70 are further provided with a material blocking mechanism 13 and a material forming mechanism 14 . The material stopper mechanism 13 is used for material stopper. On the first conveying device 10 , the material stopper mechanism 13 suspends the workpiece on the conveying mechanism 102 to suspend the entry of the workpiece into the first exposure device 20 . That is, when the first surface exposure of the upper workpiece is not completed, the conveyance of the workpiece is suspended by the stopper mechanism 13 . When the detection device on the first exposure device 20 detects that the workpiece on any one of the two exposure platforms 22 has been exposed, the stopper mechanism 13 can release the workpiece; or when the first exposure platform 22 corresponds to the workpiece. When there is no workpiece on the conveying mechanism 102, the workpiece on another conveying mechanism 102 can be picked up by the pick-up manipulator 12 and placed on the corresponding conveying mechanism 102, so that the workpiece can be transferred to the vacant first exposure platform 22, and the structure design is reasonable. On the third conveying device 70 , the stopper mechanism 13 suspends the workpiece on the conveying mechanism 102 to suspend the flow of the workpiece on the second exposure device 60 to the next process. The reclaiming robot 12 on the third conveying device 70 is also used for conveying and switching the workpieces on the two conveying mechanisms 102, so that the workpieces can be transported and conveyed better and more efficiently. The first conveying device 10 , the second conveying device 30 and the third conveying device 70 are all provided with a centering mechanism for centering and conveying the workpiece. Wherein, the front ends of the first exposure device 20 and the second exposure device 60 are both provided with a aligning mechanism 14 located on the conveying mechanism 102, and the workpiece can be pre-positioned by the aligning mechanism 14, so that the workpiece can be better aligned exposure. The whole material mechanism 14 is provided, so that the workpiece can be positioned better, and the first reclaiming mechanism 21 and the second reclaiming mechanism 25 on the first exposure device 20 and the second exposure device 60 can be better taken out. material. At the rear ends of the first exposure device 20 and the second exposure device 60 are further provided a buffer area for the second and second reclaiming mechanisms 25 to discharge materials.

Referring to FIGS. 3 to 5 , in some optional embodiments, each first exposure platform 22 is further provided with a first reclaiming mechanism 21 , and the first reclaiming mechanism 21 is slidably disposed on the frame 101 and It is slidable between the first conveyor 10 and the first exposure stage 22 , so that the workpieces on the first conveyor 10 can be transported to the first exposure stage 22 . A second reclaiming mechanism 25 is also provided at the other end of the first exposure platform 22. The structure of the second reclaiming mechanism 25 is substantially the same as that of the first reclaiming mechanism 21. The second reclaiming mechanism 25 is used to The exposed workpieces on the exposure platform 22 are picked up and placed on the second conveying device 30 . Specifically, the first reclaiming mechanism 21 includes two reclaiming assemblies 211 disposed opposite to each other, and the reclaiming assemblies 211 are provided with a plurality of reclaiming suction cups 2111 . A connecting rod assembly 212 is disposed between the two reclaiming assemblies 211 , and the distance between the two reclaiming assemblies 211 is adjusted by adjusting the connecting rod assembly 212 , so that the first reclaiming mechanism 21 can pick up workpieces of various sizes. The linkage assembly 212 moves to make the two first reclaiming mechanisms 21 slide along the slide rails on both sides, so that the two first reclaiming mechanisms 21 can approach or move away from each other.

Referring to FIG. 3 and FIG. 4 , in some optional embodiments, the first exposure platform 22 is disposed on the frame 101 in an ascending and descending manner, and the first exposure module 23 is located above the first exposure platform 22 . After the first pick-up mechanism 21 picks up the workpiece and places it on the first exposure platform 22 , the first exposure platform 22 rises close to the first exposure module 23 to enable exposure. On the other hand, the first exposure module 23 is movably disposed on the frame 101 , and the first exposure module 23 can move in the horizontal direction along the side of the first exposure device 20 . The first exposure module 23 is provided with an exposure glass and a pullable handle 231 . By pulling the handle 231 , the first exposure module 23 slides out of the frame 101 so that a film surface can be attached to the exposure glass. In this embodiment, the structure of the second exposure device 60 is the same as that of the first exposure device 20 .

Please refer to FIG. 3 and FIG. 6 , in some optional embodiments, the two first exposure platforms 22 of the first exposure device 20 are further provided with CCD detection mechanisms, and the CCD detection mechanisms include a CCD detection component before exposure and a post-exposure CCD detection mechanism. CCD detection components. An NG temporary storage device 40 is arranged between the first exposure device 20 and the plate turning device 50, the NG temporary storage device 40 is arranged on the second conveying device 30, the CCD detection mechanism is used to detect the workpiece, and the NG temporary storage device 40 is used for Temporarily store unqualified workpieces.

Referring to FIGS. 6 and 7 , in some optional embodiments, the NG temporary storage device 40 includes a lifting frame 41 and storage mechanisms 42 located on both sides of the lifting frame 41 , and each storage mechanism 42 is connected to a lifting frame 41 . Under the action of the lifting mechanism 43 , the storage mechanism 42 can ascend or descend on the second conveying device 30 along the lifting frame 41 . The lifting mechanism 43 may include a motor and a lead screw. Wherein, the second conveying device 30 is provided with a position avoidance portion 113 that cooperates with the storage mechanism 42 , and the upper layer of the storage mechanism 42 is provided with a plurality of discharge positions 422 for discharging materials. Each discharge position 422 is provided with a plurality of discharge members 421 on the same horizontal line, and the positions of the plurality of discharge members 421 of each discharge position 422 are approximately the same, so that the plurality of discharge members 421 are positioned horizontally and vertically. All directions are neatly arranged. It can be understood that the same row of discharging members 421 in the vertical direction is located in a sheltering portion 113 , and the discharging position 422 is gradually raised under the action of the lifting mechanism 43 . When the discharging position 422 is ascending, the workpiece on the second conveying device 30 is lifted and the discharging member 421 on the next discharging position 422 is located under the conveying surface of the second conveying device 30 so as not to affect the conveying of the workpiece.

Referring to FIG. 8 , in some optional embodiments, the turning mechanism 501 includes a turning frame 51 and a first conveying assembly 52 and a second conveying assembly 53 disposed on the turning frame 51 . Transfer between the two transfer components 53 . Wherein, between the first conveying assembly 52 and the second conveying assembly 53, a movable material stopper 55 is provided, and the material stopper 55 moves to block the gap between the first conveying assembly 52 and the second conveying assembly 53, so as to avoid When turning over, the workpiece slides out of the first conveying assembly 52 and the second conveying assembly 53 . The first conveying assembly 52 or the second conveying assembly 53 is connected to the conveying mechanism 102 on the second conveying device 30 , and the turning frame 51 is connected with a power assembly 54 , which may include a motor, a timing belt assembly, and the like. The power assembly 54 is actuated so that the turning frame 51 drives the first conveying assembly 52 and the second conveying assembly 53 to turn over and exchange positions, so that the workpiece is turned over. The turned workpiece is conveyed on the second conveying device 30 through the first conveying assembly 52 or the second conveying assembly 53 , and is conveyed into the second exposure device 60 through the second conveying device 30 .

As shown in FIGS. 1 to 8 , the double-column double-sided exposure machine 100 of the present invention includes a first conveying device 10 , a first exposing device 20 , a second conveying device 30 , and a second exposing device 10 , which are arranged on a frame 101 . Device 60 and third transfer device 70 . The first conveying device 10 is used for feeding, the second conveying device 30 is connected to the first exposing device 20 and the second exposing device 60, and the third conveying device 70 is used for discharging. The first conveying device 10 , the second conveying device 30 and the third conveying device 70 all include two conveying mechanisms 102 arranged in parallel. The first exposure device 20 includes two first exposure platforms 22 and two first exposure modules 23 , and the two first exposure modules 23 share a first light source assembly 24 . The second exposure device 60 includes two second exposure platforms and two second exposure modules, and the two second exposure modules share a second light source assembly. The double-column double-sided exposure machine 100 of the present utility model can perform exposure in two-column and four-station, and has high efficiency, and some parts are shared to save cost. The double-column double-sided exposure machine 100 of the utility model can be connected with automatic loading and unloading, automatic exposure, automatic temporary storage of NG products, high efficiency, high alignment accuracy, and good exposure effect.

The above disclosures are only preferred examples of the present invention, and cannot limit the scope of the rights of the present invention. Therefore, the equivalent changes made according to the claims of the present invention belong to the scope of the present invention.

Claims (10)

1. A double-column double-sided exposure machine, characterized by comprising a first conveying device, a first exposing device, a second conveying device, a second exposing device and a third conveying device arranged on a frame, the first conveying device A conveying device is located at the front end of the first exposure device, the second conveying device is located between the first exposure device and the second exposure device, and the third conveying device is located at the front of the second exposure device At the rear end, the first conveying device, the second conveying device and the third conveying device all include two conveying mechanisms arranged in parallel; the first exposing device is used for exposing one side of the workpiece, and the first exposing The device includes two first exposure platforms, both of which are provided with first exposure modules, and two first exposure modules are also provided with a device that can move between the two first exposure modules The first light source assembly; the second conveying device is provided with a flipping device, the flipping device includes a flipping mechanism docking with the two first exposure platforms, and the flipping mechanism is used for flipping the workpiece; the first Two exposure devices are used for exposing the other side of the workpiece. The second exposure device includes two second exposure platforms docked with the turning mechanism, and a second exposure module is arranged on both of the second exposure platforms. The two second exposure modules are also provided with a second light source assembly that can move between the two second exposure modules. 2 . The double-column double-sided exposure machine according to claim 1 , wherein a plurality of sets of roller assemblies are arranged on the conveying mechanism, and the roller assemblies comprise a roller and a plurality of rollers sleeved on the roller. 3 . A roller, there is a gap between the roller and the roller, and when a workpiece is placed on the roller, the rotational speed of the roller is lower than the rotational speed of the roller. 3 . The double-column double-side exposure machine according to claim 1 , wherein the first conveying device and the third conveying device are both provided with a reclaimer that can move between the two conveying mechanisms. 4 . A manipulator, the reclaiming manipulator is used to transport and switch the workpieces on the two conveying mechanisms. 4 . The double-column double-sided exposure machine according to claim 1 , wherein the front ends of the first exposure device and the second exposure device are both provided with a monolithic mechanism located on the conveying mechanism, 4 . The workpiece is pre-positioned by the monolithic mechanism, so that the workpiece can be better aligned and exposed. 5 . The double-column double-sided exposure machine according to claim 1 , wherein each of the first exposure platforms is further provided with a first reclaiming mechanism, and the first reclaiming mechanism is slidably arranged on the The frame is slidable between the first conveying device and the first exposure platform, so that the workpieces on the first conveying device can be transported to the first exposure platform. 6 . The double-column double-sided exposure machine according to claim 5 , wherein the first reclaiming mechanism comprises two reclaiming assemblies arranged opposite to each other, and a connecting rod assembly is arranged between the two reclaiming assemblies. 7 . , by adjusting the connecting rod assembly to adjust the distance between the two reclaiming assemblies, so that the first reclaiming mechanism can pick up workpieces of various sizes. 7 . The double-column double-side exposure machine according to claim 1 , wherein the first exposure platform is arranged on the frame in an ascending and descending manner, and the first exposure module is movably arranged on the machine. 8 . On the frame, an exposure glass is arranged on the first exposure module, and by operating the first exposure module, the first exposure module is slid out of the frame so as to be pasted on the exposure glass Film noodles. 8 . The double-column double-side exposure machine according to claim 1 , wherein a CCD detection mechanism is further arranged on the first exposure device, and a CCD detection mechanism is arranged between the first exposure device and the turning plate device. 9 . An NG temporary storage device, the NG temporary storage device is arranged on the second conveying device, the CCD detection mechanism is used for detecting the workpiece, and the NG temporary storage device is used for temporarily storing the workpieces that are not qualified for detection. 9 . The double-column double-sided exposure machine according to claim 8 , wherein the NG temporary storage device comprises a lifting frame and a storage mechanism located on both sides of the lifting frame, and each storage mechanism is connected with a set of The lifting mechanism on the lifting frame, the second conveying device is provided with a position-reducing part that cooperates with the storage mechanism, and the storage mechanism can be moved along the lifting frame in the lifting mechanism by the lifting mechanism. The upper part of the avoidance part ascends or descends, and the upper layer of the storage mechanism is provided with a plurality of discharging positions for discharging materials. 10 . The double-column double-sided exposure machine according to claim 1 , wherein the turning mechanism comprises a turning frame and a first conveying assembly and a second conveying assembly arranged on the turning frame, the first conveying assembly and the second conveying assembly being arranged on the turning frame. A movable stopper assembly is arranged between the conveying assembly and the second conveying assembly, the workpiece is conveyed between the first conveying assembly and the second conveying assembly, the first conveying assembly or the The second conveying assembly is connected to the conveying mechanism on the second conveying device, the turning frame is connected with a power assembly, and the power assembly is actuated so that the turning frame drives the first conveying assembly and the second conveying assembly Flip and reverse positions so that the workpiece is turned over.

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